AT359562B - Verfahren zur herstellung einer planaren integrierten halbleiterschaltung - Google Patents
Verfahren zur herstellung einer planaren integrierten halbleiterschaltungInfo
- Publication number
- AT359562B AT359562B AT692075A AT692075A AT359562B AT 359562 B AT359562 B AT 359562B AT 692075 A AT692075 A AT 692075A AT 692075 A AT692075 A AT 692075A AT 359562 B AT359562 B AT 359562B
- Authority
- AT
- Austria
- Prior art keywords
- producing
- semiconductor circuit
- integrated semiconductor
- planar integrated
- planar
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7430623A FR2284981A1 (fr) | 1974-09-10 | 1974-09-10 | Procede d'obtention d'un circuit integre semiconducteur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ATA692075A ATA692075A (de) | 1980-04-15 |
| AT359562B true AT359562B (de) | 1980-11-25 |
Family
ID=9142928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT692075A AT359562B (de) | 1974-09-10 | 1975-09-08 | Verfahren zur herstellung einer planaren integrierten halbleiterschaltung |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPS5744017B2 (de) |
| AT (1) | AT359562B (de) |
| CA (1) | CA1035470A (de) |
| CH (1) | CH591163A5 (de) |
| DE (1) | DE2538264C3 (de) |
| FR (1) | FR2284981A1 (de) |
| GB (1) | GB1518988A (de) |
| IT (1) | IT1042339B (de) |
| NL (1) | NL7510427A (de) |
| SE (1) | SE415421B (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5496775A (en) * | 1978-01-17 | 1979-07-31 | Hitachi Ltd | Method of forming circuit |
| FR2535525A1 (fr) * | 1982-10-29 | 1984-05-04 | Western Electric Co | Procede de fabrication de circuits integres comportant des couches isolantes minces |
| JPH053192A (ja) * | 1991-10-25 | 1993-01-08 | Matsushita Electron Corp | 半導体集積回路 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3979768A (en) * | 1966-03-23 | 1976-09-07 | Hitachi, Ltd. | Semiconductor element having surface coating comprising silicon nitride and silicon oxide films |
| FR1536321A (fr) * | 1966-06-30 | 1968-08-10 | Texas Instruments Inc | Contacts ohmiques pour des dispositifs à semi-conducteurs |
| FR1531852A (fr) * | 1966-07-15 | 1968-07-05 | Itt | Procédé de masquage de la surface d'un support |
| US3474310A (en) * | 1967-02-03 | 1969-10-21 | Hitachi Ltd | Semiconductor device having a sulfurtreated silicon compound thereon and a method of making the same |
| US3442012A (en) * | 1967-08-03 | 1969-05-06 | Teledyne Inc | Method of forming a flip-chip integrated circuit |
| DE2059116C3 (de) * | 1970-12-01 | 1974-11-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur Herstellung eines Halbleiterbauelementes |
| GB1363815A (en) * | 1971-12-06 | 1974-08-21 | Tektronix Inc | Semiconductor device and method of producing same |
| JPS4960870A (de) * | 1972-10-16 | 1974-06-13 |
-
1974
- 1974-09-10 FR FR7430623A patent/FR2284981A1/fr active Granted
-
1975
- 1975-08-28 DE DE2538264A patent/DE2538264C3/de not_active Expired
- 1975-09-04 NL NL7510427A patent/NL7510427A/xx not_active Application Discontinuation
- 1975-09-04 CA CA234,787A patent/CA1035470A/en not_active Expired
- 1975-09-05 GB GB36624/75A patent/GB1518988A/en not_active Expired
- 1975-09-05 IT IT26982/75A patent/IT1042339B/it active
- 1975-09-05 CH CH1153875A patent/CH591163A5/xx not_active IP Right Cessation
- 1975-09-06 JP JP50107586A patent/JPS5744017B2/ja not_active Expired
- 1975-09-08 SE SE7509970A patent/SE415421B/xx unknown
- 1975-09-08 AT AT692075A patent/AT359562B/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE2538264B2 (de) | 1981-04-30 |
| CA1035470A (en) | 1978-07-25 |
| FR2284981A1 (fr) | 1976-04-09 |
| JPS5153491A (de) | 1976-05-11 |
| NL7510427A (nl) | 1976-03-12 |
| CH591163A5 (de) | 1977-09-15 |
| DE2538264A1 (de) | 1976-03-18 |
| DE2538264C3 (de) | 1982-01-14 |
| SE415421B (sv) | 1980-09-29 |
| IT1042339B (it) | 1980-01-30 |
| ATA692075A (de) | 1980-04-15 |
| GB1518988A (en) | 1978-07-26 |
| JPS5744017B2 (de) | 1982-09-18 |
| FR2284981B1 (de) | 1978-11-24 |
| SE7509970L (sv) | 1976-03-11 |
| AU8461075A (en) | 1977-03-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee |