ZA200209816B - Silicon nitride porous body and method of manufacturing the same. - Google Patents
Silicon nitride porous body and method of manufacturing the same. Download PDFInfo
- Publication number
- ZA200209816B ZA200209816B ZA200209816A ZA200209816A ZA200209816B ZA 200209816 B ZA200209816 B ZA 200209816B ZA 200209816 A ZA200209816 A ZA 200209816A ZA 200209816 A ZA200209816 A ZA 200209816A ZA 200209816 B ZA200209816 B ZA 200209816B
- Authority
- ZA
- South Africa
- Prior art keywords
- silicon nitride
- porous body
- nitride porous
- silicon
- nitriding
- Prior art date
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 92
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 92
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 46
- 239000011148 porous material Substances 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 36
- 239000010703 silicon Substances 0.000 claims description 36
- 238000005121 nitriding Methods 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 22
- 239000007789 gas Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000000465 moulding Methods 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- 239000003054 catalyst Substances 0.000 claims description 11
- 239000011863 silicon-based powder Substances 0.000 claims description 11
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 9
- 150000002602 lanthanoids Chemical class 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- 238000011068 loading method Methods 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 15
- 239000000243 solution Substances 0.000 description 13
- 238000005245 sintering Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 239000000835 fiber Substances 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000035939 shock Effects 0.000 description 5
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 239000011812 mixed powder Substances 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000013001 point bending Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 206010034016 Paronychia Diseases 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0046—Inorganic membrane manufacture by slurry techniques, e.g. die or slip-casting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2068—Other inorganic materials, e.g. ceramics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
- B01D67/00411—Inorganic membrane manufacture by agglomeration of particles in the dry state by sintering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0044—Inorganic membrane manufacture by chemical reaction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0069—Inorganic membrane manufacture by deposition from the liquid phase, e.g. electrochemical deposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J27/00—Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
- B01J27/24—Nitrogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/50—Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
- B01J35/56—Foraminous structures having flow-through passages or channels, e.g. grids or three-dimensional monoliths
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0022—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors
- C04B38/0025—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors starting from inorganic materials only, e.g. metal foam; Lanxide type products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/10—Catalysts being present on the surface of the membrane or in the pores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/22—Thermal or heat-resistance properties
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2330/00—Structure of catalyst support or particle filter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2330/00—Structure of catalyst support or particle filter
- F01N2330/30—Honeycomb supports characterised by their structural details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Dispersion Chemistry (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Electrochemistry (AREA)
- Ceramic Products (AREA)
- Filtering Materials (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
- Catalysts (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001087912A JP4473463B2 (ja) | 2001-03-26 | 2001-03-26 | 窒化珪素多孔体及びその製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA200209816B true ZA200209816B (en) | 2003-12-03 |
Family
ID=18943087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA200209816A ZA200209816B (en) | 2001-03-26 | 2002-12-03 | Silicon nitride porous body and method of manufacturing the same. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6846764B2 (fr) |
| EP (1) | EP1298110B1 (fr) |
| JP (1) | JP4473463B2 (fr) |
| DE (1) | DE60234984D1 (fr) |
| WO (1) | WO2002076908A1 (fr) |
| ZA (1) | ZA200209816B (fr) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040043888A1 (en) * | 2002-08-28 | 2004-03-04 | Noritake Co., Limited | Compositions and methods for making microporous ceramic materials |
| JP3698143B2 (ja) | 2003-01-21 | 2005-09-21 | 住友電気工業株式会社 | フィルタ用多孔質Ｓｉ３Ｎ４とその製造方法 |
| WO2004067147A1 (fr) * | 2003-01-30 | 2004-08-12 | Asahi Glass Company, Limited | Procede pour produire un filtre en nid d'abeilles a base de nitrure de silicium |
| CN100343198C (zh) * | 2003-07-29 | 2007-10-17 | 旭硝子株式会社 | 氮化硅质蜂窝式过滤器及其制造方法 |
| EP1502904A1 (fr) * | 2003-07-31 | 2005-02-02 | Asahi Glass Company, Limited | Méthode de production d'un filtre en nid d'abeilles à base de nitrure de silicium |
| EP1787968B1 (fr) * | 2004-09-30 | 2012-12-12 | Ibiden Co., Ltd. | Procede de fabrication d un article poreux, article poreux et structure alveolaire |
| JP2006102631A (ja) * | 2004-10-05 | 2006-04-20 | Asahi Glass Co Ltd | 窒化ケイ素質フィルタの製造法 |
| JP5062402B2 (ja) * | 2007-03-30 | 2012-10-31 | 独立行政法人産業技術総合研究所 | 反応焼結窒化ケイ素基焼結体及びその製造方法 |
| JP5341597B2 (ja) * | 2009-03-31 | 2013-11-13 | 独立行政法人産業技術総合研究所 | 窒化ケイ素フィルターの製造方法及び窒化ケイ素フィルター |
| US20110111205A1 (en) * | 2009-11-09 | 2011-05-12 | Korea Institute Of Machinery & Materials | METHOD OF MANUFACTURING POROUS SINTERED REACTION-BONDED SILICON NITRIDE CERAMICS FROM GRANULAR Si MIXTURE POWDER AND POROUS SINTERED REACTION-BONDED SILICON NITRIDE CERAMICS MANUFACTURED THEREBY |
| CN101920142B (zh) * | 2010-09-30 | 2012-07-25 | 中材高新材料股份有限公司 | 碳化硅高温陶瓷过滤管及其制备方法 |
| KR101233744B1 (ko) * | 2011-01-27 | 2013-02-18 | 한국기계연구원 | 다공성 반응소결질화규소 제조 방법 및 그에 사용되는 가소결 규소혼합분말 과립 및 다공성 반응소결질화규소 제조 방법 |
| WO2015194552A1 (fr) * | 2014-06-16 | 2015-12-23 | 宇部興産株式会社 | Poudre de nitrure de silicium, corps fritté en nitrure de silicium et substrat de circuit, et procédé de production de ladite poudre de nitrure de silicium |
| RU2634443C1 (ru) * | 2016-09-21 | 2017-10-30 | федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" | Способ получения высокопористого материала из нитрида кремния с волокнистой структурой и установка для его осуществления |
| CN111423247A (zh) * | 2020-03-31 | 2020-07-17 | 深圳麦克韦尔科技有限公司 | 多孔陶瓷、制备方法及其发热体 |
| WO2024070470A1 (fr) * | 2022-09-27 | 2024-04-04 | 株式会社 東芝 | Corps fritté de nitrure de silicium, élément résistant à l'usure, substrat pour dispositifs semi-conducteurs et procédé de production de corps fritté de nitrure de silicium |
| CN115872754B (zh) * | 2022-12-06 | 2023-11-24 | 北京中地净土环境修复有限公司 | 一种流化床用氮化硅复合陶瓷催化剂及其制备方法与应用 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1546928A (en) | 1976-01-06 | 1979-05-31 | Gen Electric | Si3n4 formed by nitridation of sintered silicon compact |
| IT1117334B (it) * | 1977-12-23 | 1986-02-17 | Fiat Spa | Procedimento per la sinterizazzione di nitruro di silicio reaction bonded |
| JPS6389462A (ja) | 1986-10-02 | 1988-04-20 | 日産自動車株式会社 | 窒化珪素質焼結体の製造方法 |
| US5156830A (en) * | 1990-07-24 | 1992-10-20 | Eaton Corporation | Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material |
| US5382396A (en) * | 1992-06-15 | 1995-01-17 | Industrial Technology Research Institute | Method of making a porous ceramic filter |
| JPH06116045A (ja) | 1992-09-28 | 1994-04-26 | Honda Motor Co Ltd | 窒化珪素焼結体及びその製造方法 |
| KR0136298B1 (ko) * | 1993-05-20 | 1998-04-25 | 구라우치 노리타카 | 세라믹 다공체 및 이의 제조방법 |
| US5928601A (en) * | 1994-02-28 | 1999-07-27 | Honda Giken Kogyo Kabushiki Kaisha | Method for producing silicon nitride reaction sintered body |
| JPH08133857A (ja) * | 1994-11-08 | 1996-05-28 | Sumitomo Electric Ind Ltd | セラミックス多孔体及びその製造方法 |
| JPH09249457A (ja) * | 1996-01-09 | 1997-09-22 | Sumitomo Electric Ind Ltd | 高強度窒化ケイ素多孔体及びその製造方法 |
| WO1999011583A1 (fr) * | 1997-09-03 | 1999-03-11 | Sumitomo Electric Industries, Ltd. | Produit de frittage en nitrure de silicium a conductibilite thermique elevee et son procede de preparation |
| DE60034027T2 (de) * | 1999-12-24 | 2007-12-13 | Asahi Glass Co., Ltd. | Siliziumnitridfilter und verfahren zu dessen herstellung |
| JP2001293315A (ja) | 2000-04-11 | 2001-10-23 | Asahi Glass Co Ltd | アルミナ固溶窒化ケイ素質フィルタの製造方法 |
| JP2001316188A (ja) * | 2000-04-28 | 2001-11-13 | Asahi Glass Co Ltd | 窒化ケイ素質多孔体およびその製造方法 |
| EP1197253B1 (fr) | 2000-10-13 | 2006-06-14 | Asahi Glass Company Ltd. | Procédé pour produire un filtre en nitrure de silicium |
-
2001
- 2001-03-26 JP JP2001087912A patent/JP4473463B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-25 US US10/311,714 patent/US6846764B2/en not_active Expired - Lifetime
- 2002-03-25 DE DE60234984T patent/DE60234984D1/de not_active Expired - Lifetime
- 2002-03-25 EP EP02705468A patent/EP1298110B1/fr not_active Expired - Lifetime
- 2002-03-25 WO PCT/JP2002/002825 patent/WO2002076908A1/fr active Application Filing
- 2002-12-03 ZA ZA200209816A patent/ZA200209816B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP1298110A4 (fr) | 2007-01-17 |
| DE60234984D1 (de) | 2010-02-25 |
| US6846764B2 (en) | 2005-01-25 |
| WO2002076908A1 (fr) | 2002-10-03 |
| JP2002284586A (ja) | 2002-10-03 |
| EP1298110B1 (fr) | 2010-01-06 |
| US20030186801A1 (en) | 2003-10-02 |
| JP4473463B2 (ja) | 2010-06-02 |
| EP1298110A1 (fr) | 2003-04-02 |
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