WO2024241560A1 - 基板収納容器 - Google Patents

基板収納容器 Download PDF

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Publication number
WO2024241560A1
WO2024241560A1 PCT/JP2023/019438 JP2023019438W WO2024241560A1 WO 2024241560 A1 WO2024241560 A1 WO 2024241560A1 JP 2023019438 W JP2023019438 W JP 2023019438W WO 2024241560 A1 WO2024241560 A1 WO 2024241560A1
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WO
WIPO (PCT)
Prior art keywords
rib
wall
container body
opening
substrate storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/019438
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
隆二 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Priority to PCT/JP2023/019438 priority Critical patent/WO2024241560A1/ja
Priority to CN202380097633.6A priority patent/CN121039800A/zh
Priority to JP2025521750A priority patent/JPWO2024241560A1/ja
Priority to KR1020257038593A priority patent/KR20260018811A/ko
Priority to TW113118966A priority patent/TW202514873A/zh
Publication of WO2024241560A1 publication Critical patent/WO2024241560A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1918—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Definitions

  • the present invention relates to a substrate storage container for storing substrates such as semiconductor wafers.
  • Containers for storing substrates such as semiconductor wafers have been known in the past that have a container body and a lid.
  • the container body has a cylindrical wall portion at one end of which an opening rim portion is formed that forms the container body opening, and the other end of which is closed.
  • a substrate storage space is formed within the container body.
  • the substrate storage space is surrounded by the wall portion, and is capable of storing multiple substrates.
  • the lid body is detachable from the container body opening, and is capable of closing the container body opening.
  • a front retainer is provided on the portion of the lid that faces the substrate storage space when the container body opening is closed.
  • the front retainer is capable of supporting the edges of multiple substrates when the container body opening is closed by the lid.
  • a rear substrate support portion is provided on the wall to pair with the front retainer.
  • the rear substrate support portion is capable of supporting the edges of multiple substrates.
  • the lid is also provided with a sealing member.
  • the sealing member is attached to the lid and arranged so as to go around the outer periphery of the lid.
  • the sealing member is sandwiched between the sealing surface of the container body and the inner surface of the lid and elastically deforms, and the lid closes the opening of the container body in a sealed state.
  • substrate storage containers are sometimes transported by overhead transport devices (OHT: Overhead Hoist Transport) such as AMHS (Automated Wafer Transport System) and PGV (Wafer Substrate Transport Vehicle).
  • OHT Overhead Hoist Transport
  • AMHS Automated Wafer Transport System
  • PGV Wafer Substrate Transport Vehicle
  • the top flange on the upper wall of the container body is grasped and the substrate storage container is suspended.
  • the weight of the substrates and substrate storage container stored in the container body causes the upper wall of the container body to bend, which causes the sealed state maintained by the sealing member at the top of the substrate storage container to be lost, making it easier for gaps to form between the container body and the lid.
  • particles can enter the substrate storage space in the container body through the gap, causing contamination.
  • the present invention aims to provide a substrate storage container that can prevent the sealed state provided by the sealing member at the top of the substrate storage container from being lost due to the substrate storage container being suspended.
  • the first invention relates to a substrate storage container comprising: a container body having a substrate storage space formed therein capable of storing a plurality of substrates, an opening periphery at one end on the front side where a container body opening communicating with the substrate storage space is formed, and the other end on the rear side is blocked by a back wall; and a lid body that is detachable from the container body opening and capable of closing the container body opening, the lid body having a periphery facing portion that faces the opening periphery, the lid body further having a sealing member interposed between the opening periphery and the periphery facing portion and abutting closely against the opening periphery and the periphery facing portion, thereby closing the container body opening in an airtight manner, the container body further having an opposing upper wall and lower wall and an opposing first wall.
  • the substrate storage container further includes a side wall and a second side wall, and a rear wall to which the rear end of the upper wall, the rear end of the lower wall, the rear end of the first side wall, and the rear end of the second side wall are connected, and the front end of the upper wall, the front end of the lower wall, the front end of the first side wall, and the front end of the second side wall constitute the opening periphery, and the opening periphery has a sealing surface with which the sealing member abuts at a position rearward of the opening edge of the opening periphery, and the container body has a first rib that stands in a direction perpendicular to the front-to-rear direction at the position of the sealing surface, and a second rib that stands in a direction perpendicular to the front-to-rear direction at a position spaced rearward from the first rib, and the second rib extends at least across the first side wall, the upper wall, and the second side wall.
  • the second invention is a substrate storage container according to (1), in which the container body further has a hanging portion that becomes the portion that is hung on the substrate storage container when the substrate storage container is suspended, and the second rib is disposed between the first rib and the hanging portion in the front-to-rear direction.
  • the third invention is a board storage container according to (1) or (2), in which the upper wall located at the base of the second rib has a step that recesses inward toward the rear in a direction perpendicular to the front-to-rear direction.
  • the fourth aspect of the present invention is a substrate storage container according to any one of (1) to (3), in which the position of the top of the first rib and the position of the top of the second rib are the same in a direction perpendicular to the front-to-rear direction.
  • the fifth aspect of the present invention is a substrate storage container according to any one of (1) to (4), in which the distance between the first rib and the second rib in the front-to-rear direction is 10 to 50 mm.
  • the sixth aspect of the present invention is a substrate storage container according to any one of (1) to (5), in which the second rib extends across the first side wall, the upper wall, the second side wall, and the lower wall.
  • the present invention provides a substrate storage container that can prevent the sealed state provided by the sealing member at the top of the substrate storage container from being lost due to the substrate storage container being suspended.
  • FIG. 1 is an exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention.
  • 1 is an exploded perspective view showing substrates W stored in a substrate storage container 1 according to an embodiment of the present invention.
  • 1 is a perspective view showing a lid 3 with a sealing member 4 and a front retainer 7 attached in a substrate storing container 1 according to a first embodiment of the present invention.
  • FIG. 1 is a perspective view showing a seal member 4 of a lid 3 of a substrate storage container 1 according to a first embodiment of the present invention.
  • 1 is a top view showing a container body 2 of a substrate storage container 1 according to an embodiment of the present invention.
  • 2 is a rear view showing the container body 2 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 1 is a vertical cross-sectional view of a substrate storage container 1 according to an embodiment of the present invention, taken at the center in the left-right direction.
  • 7B is a partially enlarged view of the perip
  • FIG. 1 is an exploded perspective view showing the substrate storage container 1 according to an embodiment of the present invention.
  • FIG. 2 is an exploded perspective view showing a state in which substrates W are stored in the substrate storage container 1 according to an embodiment of the present invention.
  • FIG. 3 is a perspective view showing the lid body 3 in a state in which the seal member 4 and the front retainer 7 are attached in the substrate storage container 1 according to the first embodiment of the present invention.
  • FIG. 4 is a perspective view showing the seal member 4 of the lid body 3 of the substrate storage container 1 according to the first embodiment of the present invention.
  • FIG. 5 is a top view showing the container body 2 of the substrate storage container 1 according to an embodiment of the present invention.
  • FIG. 6 is a rear view showing the container body 2 of the substrate storage container 1 according to an embodiment of the present invention.
  • FIG. 7A is a vertical cross-sectional view cut at the center in the left-right direction of the substrate storage container 1 according to an embodiment of the present invention.
  • FIG. 7B is a partial enlarged view of the periphery of the seal member 4 in FIG. 7A.
  • the direction from the container body 2 to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, the opposite direction is defined as the rear direction D12, and these are defined as the front-rear direction D1.
  • the direction from the lower wall 24 to the upper wall 23 (upward in FIG. 1) is defined as the upward direction D21, the opposite direction is defined as the downward direction D22, and these are defined as the up-down direction D2.
  • the direction from the second side wall 26 to the first side wall 25 (direction from the lower right to the upper left in FIG. 1) is defined as the leftward direction D31, the opposite direction is defined as the rightward direction D32, and these are defined as the left-right direction D3 or lateral direction D3.
  • “Direction" may also be called "side.”
  • the substrates W (see FIG. 2) stored in the substrate storage container 1 are disk-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin wafers used in industry.
  • the substrates W are silicon wafers with a diameter of 200 mm to 450 mm.
  • the substrate storage container 1 is for storing substrates W made of silicon wafers as described above, and has a container body 2, a lid 3, a substrate support plate portion 5 as a lateral substrate support portion, a rear substrate support portion 6 (see Figure 7A), and a front retainer 7 as a substrate support portion on the lid side.
  • the container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end.
  • a substrate storage space 27 is formed within the container body 2.
  • the substrate storage space 27 is surrounded by the wall portion 20.
  • a substrate support plate portion 5 is disposed in the portion of the wall portion 20 that forms the substrate storage space 27.
  • a plurality of substrates W can be stored in the substrate storage space 27, as shown in FIG. 2.
  • the substrate support plate portions 5 are provided on the wall portion 20 in a pair in the left-right direction D3 within the substrate storage space 27.
  • the substrate support plate portions 5 abut against the side portions of the edges of the substrates W, thereby supporting the side portions of the edges of the substrates W while arranging adjacent substrates W in parallel and spaced apart from each other at a predetermined distance.
  • a rear substrate support portion 6 is provided on the rear side of the substrate support plate portions 5.
  • the rear substrate support portion 6 is provided on the wall portion 20 so as to pair with the front retainer 7 within the substrate storage space 27. When the container body opening 21 is closed by the lid body 3, the rear substrate support portion 6 is able to support the rear portions of the edges of the substrates W by abutting against the rear portions of the edges of the substrates W.
  • the lid body 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21.
  • the front retainer 7 is provided on a portion of the lid body 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid body 3.
  • the front retainer 7 is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support part 6 in the front-to-rear direction D1.
  • the front retainer 7 can support the front of the edges of the substrates W by abutting against the edges of the substrates W.
  • the front retainer 7 supports the substrates W in cooperation with the rear substrate support part 6, thereby holding the substrates W in a state in which adjacent substrates W are spaced apart at a predetermined distance and arranged side by side.
  • the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25 and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25 and the second side wall 26 are made of a plastic material or the like, and in this embodiment, are integrally molded from polycarbonate.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22, and constitute an opening periphery 28 that forms the container body opening 21, which is approximately rectangular in shape.
  • the opening periphery 28 is provided at one end of the front side D11 of the container body 2, and the rear wall 22 is located at the other end of the rear side D12 of the container body 2.
  • the outer shape of the container body 2 formed by the outer surfaces of the walls 20 is box-shaped.
  • the inner surfaces of the walls 20, i.e., the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded by these.
  • the container body opening 21 formed in the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.
  • latch engagement recesses 231A, 231B, 241A, and 241B recessed toward the outside of the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28.
  • a total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.
  • a flange fixing portion 235 (see FIG. 7A) and ribs 235A, 235B are integrally formed with the upper wall 23.
  • the flange fixing portion 235 is disposed in the center of the upper wall 23.
  • a top flange 236 is fixed to the flange fixing portion 235 as a hanging portion.
  • the top flange 236 is disposed in the center of the upper wall 23.
  • the top flange 236 is a member that is hung and suspended on the substrate storage container 1 when the substrate storage container 1 is suspended by an overhead transport device (OHT: Overhead Hoist Transport) such as an AMHS (Automated Wafer Transport System) or a PGV (Wafer Substrate Transport Vehicle).
  • OHT Overhead Hoist Transport
  • Multiple ribs 235A extend from the top flange 236 generally in the left direction D31 and the right direction D32.
  • Multiple ribs 235B extend from the top flange 236 in the forward direction D11, and multiple ribs 235B extend from the top flange 236 in the rearward direction D12.
  • container body legs 243 are provided on the outer surface of the bottom wall 24.
  • the container body legs 243 are integrally molded on both left and right edge portions of the bottom wall 24 and extend in the front-to-rear direction D1 along both left and right edge portions of the bottom wall 24.
  • the container body legs 243 abut against the flat surface to stably support the container body 2.
  • the lid body 3 is provided with a latch mechanism.
  • the latch mechanism is provided near both the left and right ends of the lid body 3, and as shown in Figures 1 and 2, has two upper latch portions 32A that can protrude in an upward direction D21 from the top edge of the lid body 3, and two lower latch portions 32B that can protrude in a downward direction D22 from the bottom edge of the lid body 3.
  • the two upper latch portions 32A are located near both the left and right ends of the top edge of the lid body 3, and the two lower latch portions 32B are located near both the left and right ends of the bottom edge of the lid body 3.
  • An operating portion 33 is provided on the outer surface of the lid body 3.
  • the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid body 3, or can be made not to protrude from the upper and lower edges.
  • the upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body 3 and engages with the latch engagement recesses 231A, 231B of the container body 2
  • the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body 3 and engages with the latch engagement recesses 241A, 241B of the container body 2, thereby fixing the lid body 3 to the opening periphery 28 of the container body 2.
  • a front retainer 7 is fixed to the inside of the lid body 30 of the lid body 3.
  • the front retainer 7 is configured to be separated in the left-right direction D3.
  • the front retainer 7 has a front retainer board receiving portion 73.
  • the front retainer board receiving portions 73 are arranged in pairs in the left-right direction D3 at a predetermined distance apart.
  • the front retainer board receiving portions 73 arranged in pairs in this manner are arranged in 25 pairs in parallel in the vertical direction D2.
  • the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2.
  • the lid 3 is detachable from the opening periphery 28 of the container body 2, and the lid 3 can close the container body opening 21 by attaching the lid 3 to the opening periphery 28.
  • a ring-shaped seal member 4 is attached to the peripheral portion facing portion 331 that constitutes the inner surface 301 (the back surface of the lid 3) of the lid 3, and the surface facing the surface (sealing surface 281) of the step (first step 86 described below) formed at the position immediately behind the opening edge of the opening periphery 28 at the position D12 when the lid 3 closes the container body opening 21.
  • the opening periphery 28 has a seal surface 281 that the seal member 4 abuts against at the position behind the opening edge of the opening periphery 28 at the position D12.
  • the lip portion 42 of the seal member 4 is sandwiched between the sealing surface 281 of the opening periphery 28 and the periphery opposing portion 331 constituting the inner surface 301 of the lid 3 and elastically deforms, and the lid 3 closes the container body opening 21 in a sealed state.
  • the substrate W can be inserted and removed from the substrate storage space 27 inside the container body 2.
  • the lid body 3 has a lid body main body 30.
  • the lid body main body 30 forms the outer shell of the lid body 3, which is approximately rectangular. Therefore, the lid body main body 30 has an approximately rectangular shape.
  • the lid body main body 30 has an inner surface 301 and an outer surface 302.
  • the inner surface 301 faces the substrate storage space 27 when the container body opening 21 is closed by the lid body 3.
  • the outer surface 302 is exposed to the outside of the substrate storage container 1 when the container body opening 21 is closed by the lid body 3.
  • the lid body main body 30 is made of a plastic material or the like, and in this embodiment, it is molded from polycarbonate.
  • the peripheral portion of the lid body 30 facing the sealing surface 281 constituting the opening peripheral portion 28 of the container body 2 has a sealing member attachment portion 311 and a peripheral portion facing portion 331, as shown in FIG. 7B.
  • the sealing member attachment portion 311 is formed to exist around the peripheral portion of the lid body 30, and the holding groove 321 also exists around the peripheral portion of the lid body 30 along the sealing member attachment portion 311.
  • the peripheral portion facing portion 331 is formed by the peripheral portion of the lid body 30 facing the sealing surface 281 constituting the opening peripheral portion 28, and the portion of the lid body 3 that is further outward than the holding groove 321.
  • the peripheral portion facing portion 331 is formed by the peripheral portion of the lid body 30, and is formed by a plate-shaped portion that extends in the D2-D3 plane (perpendicular to the front-rear direction D1).
  • the base 41 of the seal member 4 which will be described later, is inserted into the retaining groove 321.
  • the seal member 4 is attached to the seal member attachment portion 311 of the lid body 3, and the lip portion 42 of the seal member 4 can abut against the seal surface 281 of the opening periphery 28 and the periphery facing portion 331.
  • the sealing member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. As shown in FIG. 4, the sealing member 4 has a rectangular ring shape and is arranged so as to go around the outer periphery of the lid body 3.
  • the sealing member 4 has a base 41 and a lip portion 42.
  • the base 41 is inserted into the retaining groove 321.
  • the lip portion 42 is integrally formed at the base end of the base 41.
  • the lip portion 42 extends from the base end of the base 41 in a direction oblique to the extension direction of the base 41.
  • the lip portion 42 branches into two midway to form a peripheral portion abutting lip portion 421 and a facing portion abutting lip portion 422.
  • the peripheral abutment lip 421 extends in an oblique direction between the rear direction D12 and the upward direction D21 (outward direction of the D2-D3 plane) so as to abut against the seal surface 281 of the opening peripheral portion 28.
  • the opposing portion abutment lip 422 extends in an oblique direction between the front direction D11 and the upward direction D21 (outward direction of the D2-D3 plane) so as to abut against the peripheral opposing portion 331.
  • the extending direction can be said to be generally outward direction of the D2-D3 plane.
  • the lip portion 42 of the sealing member 4 is interposed between the opening peripheral portion 28 and the peripheral opposing portion 331 and is in close contact with the opening peripheral portion 28 and the peripheral opposing portion 331, thereby sealing the container body opening 21 together with the lid 3 in an airtight state.
  • the container body 2 has a third rib 83, a first rib 81, and a second rib 82 on its outer surface, in that order from the front side D11 to the rear side D12.
  • the first rib 81 stands outward in a direction perpendicular to the front-rear direction D1 (direction along the D2-D3 plane) at position P281 of the sealing surface 281 of the opening periphery 28.
  • the first rib 81 extends over at least the first side wall 25, the upper wall 23, and the second side wall 26, and in this embodiment, it extends circumferentially around the entire circumference of the first side wall 25, the upper wall 23, the second side wall 26, and the lower wall 24.
  • the standing directions are typically the upward direction D21, the leftward direction D31, the rightward direction D32, and the downward direction D22.
  • the first rib 81 is located at position P281 of the sealing surface 281," in other words, "the container body 2 has the first rib 81 at position P281 of the sealing surface 281,” means that, as shown in FIG. 7B, in the front-to-rear direction D1, the distance t81 of (the center position of) the base 811 of the first rib 81 relative to position P281 of the sealing surface 281 is, for example, located within a range of 10 mm in both directions, and preferably within a range of 5 mm in both directions.
  • the height h81 of the first rib 81 is, for example, 0.5 mm or more and 15 mm or less, and preferably 3 mm or more and 8 mm or less.
  • the second rib 82 rises outward in a direction perpendicular to the front-to-rear direction D1 (direction along the D2-D3 plane) at a position spaced further rearward D12 than the first rib 81.
  • the second rib 82 extends over at least the first side wall 25, the top wall 23, and the second side wall 26, and in this embodiment, extends circumferentially around the entire circumference of the first side wall 25, the top wall 23, the second side wall 26, and the bottom wall 24.
  • the rising directions are typically the upward direction D21, the leftward direction D31, the rightward direction D32, and the downward direction D22.
  • the distance t8 (center-to-center distance) between the first rib 81 and the second rib 82 is, for example, 5.0 mm or more and 60 mm or less, preferably 10 mm or more and 50 mm or less, and more preferably 15 mm or more and 30 mm or less.
  • the height h82 of the second rib 82 is, for example, 10 mm or more and 30 mm or less, and preferably 15 mm or more and 25 mm or less.
  • the upper wall 23 located at the base 811 of the first rib 81 has a first step 86 that is recessed inward toward the rear side D12 in a direction perpendicular to the front-to-rear direction D1 (direction along the D2-D3 plane).
  • the upper wall 23 of the rear side D12 of the first rib 81 is provided with a first step 86 having a height difference h86.
  • the step directions are typically the downward direction D22, the rightward direction D32, the leftward direction D31, and the upward direction D21.
  • the height difference h86 of the first step 86 is, for example, 5.0 mm or more and 25 mm or less, and preferably 10 mm or more and 20 mm or less.
  • a second step 87 having a height difference h87 is provided on the upper wall 23 of the rear side D12 of the second rib 82.
  • the step directions are typically the downward direction D22, the rightward direction D32, the leftward direction D31, and the upward direction D21.
  • the height difference h87 of the second step 87 is, for example, 1.0 mm or more and 10 mm or less, and preferably 3.0 mm or more and 7.0 mm or less.
  • the position P812 of the apex 812 of the first rib 81, the position P822 of the apex 822 of the second rib 82, and the position P832 of the apex 832 of the third rib 83 are the same.
  • “the same” means that the difference in position in the up-down direction D2 is, for example, 5.0 mm or less, and preferably 1.0 mm or less.
  • the third rib 83 rises outward in a direction perpendicular to the front-rear direction D1 (direction along the D2-D3 plane) at the front-to-rear direction D1 at the very front of the container body 2.
  • the third rib 83 extends over at least the first side wall 25, the top wall 23, and the second side wall 26, and in this embodiment, extends circumferentially around the entire circumference of the first side wall 25, the top wall 23, the second side wall 26, and the bottom wall 24.
  • the rising directions are typically the upward direction D21, the leftward direction D31, the rightward direction D32, and the downward direction D22.
  • first rib 81, second rib 82, third rib 83, first step 86, and second step 87 are described with respect to the upper side D21 of the container body 2, but the container body 2 also has the first rib 81, second rib 82, third rib 83, first step 86, and second step 87 with basically the same configuration on the left side D31, right side D32, and lower side D22.
  • the description of the upper side D21 also applies to the left side D31, right side D32, and lower side D22 with respect to the configuration and numerical range.
  • the lower side D22 is provided with the container body leg 243, and in order to avoid interference with the container body leg 243, the shape of the first rib 81 and the second rib 82 on the lower side D22 is different from the shape of the first rib 81 and the second rib 82 on the upper side D21.
  • the second rib 82 is disposed between the first rib 81 and the top flange 236 (hanging portion) in the front-rear direction D1. In other words, the second rib 82 does not overlap the top flange 236 in a top view.
  • the substrate storage container 1 of the first embodiment having the above-mentioned configuration can provide the following effects.
  • the substrate storage container 1 of the first embodiment is a substrate storage container 1 comprising a container body 2 having a substrate storage space 27 formed therein capable of storing multiple substrates W, a container body 2 having an opening periphery 28 at one end on the front side D11 where a container body opening 21 communicating with the substrate storage space 27 is formed, and the other end on the rear side D12 is closed by a rear wall 22, and a lid body 3 that is detachable from the container body opening 21 and can close the container body opening 21, the lid body 3 having a periphery opposing portion 331 that faces the opening periphery 28.
  • the lid body 3 further has a sealing member 4 interposed between the opening peripheral portion 28 and the peripheral portion opposing portion 331 and abutting tightly against the opening peripheral portion 28 and the peripheral portion opposing portion 331, thereby closing the container body opening 21 in an airtight state
  • the container body 2 further has opposing upper and lower walls 23 and 24, opposing first and second side walls 25 and 26, and a rear wall 22 to which the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are connected, and the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute the opening peripheral portion 28, and the opening peripheral portion 28 has a sealing surface 281 against which the sealing member 4 abuts, at a position rear side D12 of the opening edge of the opening peripheral portion 28.
  • the container body 2 has a first rib 81 that stands in a direction (D2-D3) perpendicular to the front-rear direction D1 at position P281 of the sealing surface 281, and a second rib 82 that stands in a direction (D2-D3) perpendicular to the front-rear direction D1 at a position D12 rearward of the first rib 81, and the second rib 82 extends at least across the first side wall 25, the top wall 23, and the second side wall 26.
  • the substrate storage container 1 When the substrates are transported to each process by an overhead hoist transport device (OHT: Overhead Hoist Transport), the substrate storage container 1 is hung by gripping a top flange 236 (hanging portion) provided on the upper wall 23 of the container body 2.
  • the substrate storage container 1 of this embodiment has a second rib 82 standing in a direction (D2-D3) perpendicular to the front-rear direction D1 at a position spaced rearward D12 from the first rib 81, and the second rib 82 extends at least over the first side wall 25, the upper wall 23, and the second side wall 26. Therefore, the upper wall 23 at the opening peripheral portion 28 is reinforced (increased rigidity) by the second rib 82, making it less likely to bend.
  • the upper wall 23 of the container body 2 is unlikely to bend (deform) due to the weight of the substrates W stored in the container body 2 and the substrate storage container 1. Therefore, a gap is unlikely to occur between the opening periphery 28 and the seal member 4, and the sealed state by the seal member 4 at the upper part of the substrate storage container 1 is likely to be maintained. This prevents particles from entering the substrate storage space 27 of the container body 2 through the gap and causing contamination. In addition, the internal environment of the substrate storage space 27 improved by purging with N 2 (nitrogen) is likely to be maintained. In other words, according to this embodiment, it is possible to prevent the sealed state by the seal member 4 at the upper part of the substrate storage container 1 from being lost due to the substrate storage container 1 being suspended.
  • the second rib 82 is disposed between the first rib 81 and the top flange 236 (hanging portion) in the front-rear direction D1. If a rib were disposed on the lower side D22 of the top flange 236, the top flange 236 would need to be disposed significantly above the upper wall 23 D21 in order to avoid interference with the rib. However, such a disposition would increase the overall height of the container body 2 including the top flange 236, and the entire substrate storage container 1 would become unnecessarily large. In contrast, in this embodiment, the second rib 82 is disposed between the first rib 81 and the top flange 236 (hanging portion). Therefore, it is possible to prevent the entire substrate storage container 1 from becoming unnecessarily large, which would be caused by disposing the top flange 236 on the upper side D21 to avoid the second rib 82.
  • the upper wall 23 located at the base 821 of the second rib 82 has a first step 86 recessed inward in the direction (D2-D3) perpendicular to the front-rear direction D1 toward the rear side D12.
  • the base 821 of the second rib 82 is located more inward in the direction (D2-D3) perpendicular to the front-rear direction D1 than the base 811 of the first rib 81.
  • the base 811 of the first rib 81 often needs to be positioned toward the outside in the direction (D2-D3) perpendicular to the front-rear direction D1 due to the size of the cover body 3 and the size of the opening peripheral portion 28.
  • the height h81 of the first rib 81 may not be made too high.
  • the base 821 of the second rib 82 can be positioned toward the inside in the direction (D2-D3) perpendicular to the front-rear direction D1. This allows the height h82 of the second rib 82 to be increased, improving the aforementioned reinforcing (improving rigidity) effect of the second rib 82 and the effect of making it less likely to bend.
  • the position P812 of the top 812 of the first rib 81 and the position P822 of the top 822 of the second rib 82 are the same. This positional relationship holds true at least on the upper side D21, left side D31, and right side D32. This allows the height h82 of the second rib 82 to be increased without unnecessarily increasing the overall height of the container body 2 or the width in the lateral direction D3.
  • the second rib 82 extends across the first side wall 25, the upper wall 23, the second side wall 26, and the lower wall 24. Therefore, the second rib 82 becomes a (closed) rib that goes around once in the direction (D2-D3) perpendicular to the front-to-rear direction D1. This makes the second rib 82 even less likely to deform, and as a result, the aforementioned reinforcing (improving rigidity) effect and bending-resistance effect of the second rib 82 can be improved.
  • the present invention is not limited to the above-described embodiment, and modifications are possible within the technical scope described in the claims.
  • the number of second ribs 82 is one in the embodiment, but is not limited to this and may be two or more.
  • the base 41 of the seal member 4 is held in the seal member mounting portion 311 by being inserted into the holding groove 321, but the manner in which it is held in the seal member mounting portion 311 is not limited to this.
  • the base 41 of the seal member 4 may be held in the seal member mounting portion 311 by being clamped or engaged.
  • the shapes of the container body 2 and the lid body 3, and the number and dimensions of the substrates W that can be stored in the container body 2 are not limited to those in this embodiment.
  • Substrate storage container 2 Container body 21 Container body opening 22 Back wall 23 Top wall 236 Top flange (hanging portion) 24 Lower wall 25 First side wall 26 Second side wall 27 Substrate storage space 28 Opening periphery 281 Sealing surface 3 Lid 331 Periphery facing portion 4 Sealing member 81 First rib 811 Top portion 812 Base portion 82 Second rib 821 Top portion 822 Base portion 86 First step (step) P281 Position P811 Position P812 Position D1 Front-rear direction D11 Front side D12 Rear side D2-D3 Direction perpendicular to the front-rear direction W Board

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PCT/JP2023/019438 2023-05-25 2023-05-25 基板収納容器 Ceased WO2024241560A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2023/019438 WO2024241560A1 (ja) 2023-05-25 2023-05-25 基板収納容器
CN202380097633.6A CN121039800A (zh) 2023-05-25 2023-05-25 基板收纳容器
JP2025521750A JPWO2024241560A1 (https=) 2023-05-25 2023-05-25
KR1020257038593A KR20260018811A (ko) 2023-05-25 2023-05-25 기판수납용기
TW113118966A TW202514873A (zh) 2023-05-25 2024-05-22 基板收納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/019438 WO2024241560A1 (ja) 2023-05-25 2023-05-25 基板収納容器

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WO2024241560A1 true WO2024241560A1 (ja) 2024-11-28

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KR (1) KR20260018811A (https=)
CN (1) CN121039800A (https=)
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WO (1) WO2024241560A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000306988A (ja) * 1999-04-20 2000-11-02 Shin Etsu Polymer Co Ltd 基板収納容器
JP2004103937A (ja) * 2002-09-11 2004-04-02 Shin Etsu Polymer Co Ltd 基板収納容器
JP2011077166A (ja) * 2009-09-29 2011-04-14 Shin Etsu Polymer Co Ltd 基板収納容器
JP2013546176A (ja) * 2010-10-19 2013-12-26 インテグリス・インコーポレーテッド ロボットフランジを有する前面開口ウェーハ容器
JP2014096440A (ja) * 2012-11-08 2014-05-22 Miraial Kk 基板収納容器
JP2015521377A (ja) * 2012-05-04 2015-07-27 インテグリス・インコーポレーテッド ドア接点シールを有するウェハ容器
WO2018154779A1 (ja) * 2017-02-27 2018-08-30 ミライアル株式会社 基板収納容器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000306988A (ja) * 1999-04-20 2000-11-02 Shin Etsu Polymer Co Ltd 基板収納容器
JP2004103937A (ja) * 2002-09-11 2004-04-02 Shin Etsu Polymer Co Ltd 基板収納容器
JP2011077166A (ja) * 2009-09-29 2011-04-14 Shin Etsu Polymer Co Ltd 基板収納容器
JP2013546176A (ja) * 2010-10-19 2013-12-26 インテグリス・インコーポレーテッド ロボットフランジを有する前面開口ウェーハ容器
JP2015521377A (ja) * 2012-05-04 2015-07-27 インテグリス・インコーポレーテッド ドア接点シールを有するウェハ容器
JP2014096440A (ja) * 2012-11-08 2014-05-22 Miraial Kk 基板収納容器
WO2018154779A1 (ja) * 2017-02-27 2018-08-30 ミライアル株式会社 基板収納容器

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CN121039800A (zh) 2025-11-28
JPWO2024241560A1 (https=) 2024-11-28
TW202514873A (zh) 2025-04-01

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