CN121039800A - 基板收纳容器 - Google Patents

基板收纳容器

Info

Publication number
CN121039800A
CN121039800A CN202380097633.6A CN202380097633A CN121039800A CN 121039800 A CN121039800 A CN 121039800A CN 202380097633 A CN202380097633 A CN 202380097633A CN 121039800 A CN121039800 A CN 121039800A
Authority
CN
China
Prior art keywords
rib
container body
opening
wall
substrate storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380097633.6A
Other languages
English (en)
Chinese (zh)
Inventor
福田隆二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Publication of CN121039800A publication Critical patent/CN121039800A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1918—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Landscapes

  • Packaging Frangible Articles (AREA)
CN202380097633.6A 2023-05-25 2023-05-25 基板收纳容器 Pending CN121039800A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/019438 WO2024241560A1 (ja) 2023-05-25 2023-05-25 基板収納容器

Publications (1)

Publication Number Publication Date
CN121039800A true CN121039800A (zh) 2025-11-28

Family

ID=93589226

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380097633.6A Pending CN121039800A (zh) 2023-05-25 2023-05-25 基板收纳容器

Country Status (5)

Country Link
JP (1) JPWO2024241560A1 (https=)
KR (1) KR20260018811A (https=)
CN (1) CN121039800A (https=)
TW (1) TW202514873A (https=)
WO (1) WO2024241560A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3916342B2 (ja) * 1999-04-20 2007-05-16 信越ポリマー株式会社 基板収納容器
JP4204284B2 (ja) * 2002-09-11 2009-01-07 信越ポリマー株式会社 基板収納容器
JP2011077166A (ja) * 2009-09-29 2011-04-14 Shin Etsu Polymer Co Ltd 基板収納容器
TWI515160B (zh) * 2010-10-19 2016-01-01 安堤格里斯公司 具自動凸緣之前開式晶圓容器
JP2015521377A (ja) * 2012-05-04 2015-07-27 インテグリス・インコーポレーテッド ドア接点シールを有するウェハ容器
JP6000075B2 (ja) * 2012-11-08 2016-09-28 ミライアル株式会社 基板収納容器
US11309200B2 (en) * 2017-02-27 2022-04-19 Miraial Co., Ltd. Substrate storage container

Also Published As

Publication number Publication date
KR20260018811A (ko) 2026-02-09
WO2024241560A1 (ja) 2024-11-28
JPWO2024241560A1 (https=) 2024-11-28
TW202514873A (zh) 2025-04-01

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