WO2024130624A1 - 一种清洗设备、清洗系统及清洗方法 - Google Patents

一种清洗设备、清洗系统及清洗方法 Download PDF

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Publication number
WO2024130624A1
WO2024130624A1 PCT/CN2022/140941 CN2022140941W WO2024130624A1 WO 2024130624 A1 WO2024130624 A1 WO 2024130624A1 CN 2022140941 W CN2022140941 W CN 2022140941W WO 2024130624 A1 WO2024130624 A1 WO 2024130624A1
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WO
WIPO (PCT)
Prior art keywords
cleaning
carrier
pipeline
spray
storage tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2022/140941
Other languages
English (en)
French (fr)
Inventor
张萌萌
要军磊
张宇宁
李闯
云全新
黎宇翔
董宇亮
章文蔚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BGI Shenzhen Co Ltd
Original Assignee
BGI Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BGI Shenzhen Co Ltd filed Critical BGI Shenzhen Co Ltd
Priority to PCT/CN2022/140941 priority Critical patent/WO2024130624A1/zh
Priority to CN202280100234.6A priority patent/CN119947839A/zh
Publication of WO2024130624A1 publication Critical patent/WO2024130624A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays

Definitions

  • the present invention belongs to the technical field of cleaning equipment, and in particular to a cleaning equipment, a cleaning system and a cleaning method.
  • chip cleaning is mainly performed by tank cleaning.
  • the current tank cleaning method is to immerse the chip in a cleaning solution.
  • a metal film is plated on the surface of the chip. After the chip is immersed for many times, it is easy to cause the metal film to fall off and oxidize, which has a great impact on the service life of the chip.
  • the invention provides a cleaning device, a cleaning system and a cleaning method to solve the technical problem of immersing easily damaged chips in the prior art.
  • the present invention adopts the following solutions:
  • a cleaning device comprises a box, a mobile carrier platform and a cleaning pipeline group;
  • the mobile carrier platform is installed in the box and comprises a carrier and a drive module, the carrier is located in the box, the drive module is connected to the carrier and is used to drive the carrier to move linearly in the up and down directions;
  • the cleaning pipeline group comprises multiple cleaning pipelines, each of the cleaning pipelines is arranged in the box and comprises a pipeline body and a nozzle, the nozzle is connected to the pipeline body and is arranged to face the carrier.
  • the carrier includes a support frame and a cover assembly
  • the support frame is provided with a plurality of loading stations
  • the cover assembly is pivotally connected to the support frame and is located above the loading stations, and the cover assembly is used to limit the workpiece loaded in the loading stations in the up and down directions.
  • the cover assembly can pivot relative to the support frame to open and close the loading stations, and when the cover assembly opens the loading stations, the workpiece can be placed into the loading stations from above the loading stations, and then the cover assembly is rotated to close the loading stations, thereby limiting the up and down movement of the workpiece.
  • the support frame includes a carrier body, a base and a connecting side plate, wherein the base is arranged at the bottom of the carrier body; the connecting side plates are arranged at both ends of the base to clamp the carrier body and are pivotally connected to the cover assembly; wherein the loading station is located on the carrier body.
  • the support frame further comprises a baffle plate, which is connected to the connecting side plate to limit the pivoting movement of the cover plate assembly.
  • the pivoting angle of the cover plate assembly is limited by the baffle plate.
  • the cover plate assembly includes a cover plate and a plurality of limiting components, the cover plate is pivotally connected to the support frame; the plurality of limiting components are connected to the cover plate and are arranged one by one in alignment with the plurality of loading stations. The limiting components can be pressed against the workpiece loaded in the loading station, thereby limiting the workpiece in the up and down directions.
  • the carrier further includes a locking structure, the locking structure is used to maintain the carrier in an open state, and when the carrier is in the open state, the cover assembly opens the loading station.
  • the locking structure allows the cover assembly to maintain the state of opening the loading station, preventing the cover assembly from automatically pivoting and falling due to gravity.
  • one end of the pipeline body is an inlet end, and the other end is a closed arrangement, so that the fluid in the pipeline can only be sprayed outward through the nozzle.
  • the pipeline body includes a main pipeline and multiple branch pipelines, and the multiple branch pipelines are arranged at intervals along the extension direction of the pipeline body and connected to the main pipeline, and each branch pipeline is correspondingly provided with a nozzle.
  • the cleaning pipeline can cover a wider cleaning range.
  • the cleaning pipeline groups are relatively arranged on both sides of the carrier.
  • the cleaning pipeline groups located on both sides of the carrier can clean two positions of the workpiece at the same time to ensure the cleaning effect.
  • the plurality of cleaning pipelines are arranged at intervals in the up-down direction.
  • the mobile carrier platform further includes a sliding mechanism, the sliding mechanism is installed on the box, and the carrier is slidingly connected to the box through the sliding mechanism.
  • the sliding mechanism realizes the sliding connection between the carrier and the box, which facilitates the driving module to drive the carrier to move.
  • the driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.
  • the cleaning device further comprises a fan module, which is mounted on the side wall of the box and is configured to draw air outward from the box.
  • the fan module is used to draw out the volatilized gas in the box, thereby improving safety.
  • the number of the cleaning pipelines is three, and they are respectively an air blowing pipeline, a first spray pipeline and a second spray pipeline arranged from top to bottom.
  • the cleaning equipment has three cleaning workstations for cleaning the workpieces placed on the carrier.
  • the present invention also provides a cleaning system, which comprises the above cleaning device.
  • the cleaning system further comprises an operating table assembly and a liquid storage tank group, wherein the liquid storage tank group is connected to the cleaning pipeline group, and the operating table assembly is used to control the operation of the cleaning equipment.
  • the liquid storage tank group can store cleaning liquid and spray it through the cleaning pipeline group, and the operating table assembly can control the operation of the cleaning equipment.
  • the operating table assembly includes a cabinet, a control module and a pump-valve assembly;
  • the control module includes an input unit and a control unit, and the control unit is signal-connected to the input unit;
  • the pump-valve assembly is arranged in the cabinet and connected to the liquid storage tank group; wherein the pump-valve assembly and the drive module are both signal-connected to the control unit.
  • the operating table assembly mainly integrates a control module and a pump-valve assembly.
  • the control module is used to control the drive module and the pump-valve assembly, so that the combined operation of the cleaning pipeline group and the mobile carrier platform can be controlled.
  • a liquid level sensor is provided at the bottom of the liquid storage tank group to monitor the liquid level in the liquid storage tank group.
  • the number of the cleaning pipelines is 3, and they are respectively an air blowing pipeline, a first spray pipeline, and a second spray pipeline arranged in a top-down direction;
  • the liquid storage tank group includes a first liquid storage tank and a second liquid storage tank, wherein the first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent, and the second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent.
  • the first spray pipeline is used to spray the first cleaning agent
  • the second spray pipeline is used to spray the second cleaning agent
  • the air blowing pipeline is used to blow dry the sprayed workpiece.
  • the present invention also provides a cleaning method, which is implemented by applying the above-mentioned cleaning system, wherein the first cleaning agent is water, and the cleaning method comprises:
  • the control unit controls the carrier to reciprocate the chip between the spray area corresponding to the first spray pipeline and the spray area corresponding to the second spray pipeline, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, respectively, so that the first spray pipeline and the second spray pipeline alternately spray and clean the chip;
  • the control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline performs water spray cleaning on the chip;
  • the control unit controls the carrier to move the chip to the purge area corresponding to the air blowing pipeline to complete the purge of the chip;
  • the control unit controls the carrier to move the cleaned chips out of the cleaning area of the cleaning pipeline group.
  • the cleaning method is applied in the cleaning system to realize an automated full-process chip cleaning operation.
  • the present invention has the following beneficial effects:
  • a mobile carrier platform and a cleaning pipeline group are installed on a box body, and the mobile carrier platform includes a carrier and a driving module for driving the carrier to move, the carrier is used to place the workpiece to be cleaned, and the driving module drives the carrier to move linearly in the up and down directions.
  • the cleaning pipeline group includes multiple cleaning pipelines composed of pipeline bodies and nozzles, and the cleaning pipeline can allow fluid to flow and spray toward the carrier through the nozzle, thereby cleaning the workpiece to be cleaned placed on the carrier.
  • the cleaning equipment can spray and clean the chip placed on the carrier, reduce damage to the chip, and ensure the service life of the chip.
  • FIG1 is a schematic diagram of a cleaning device according to one embodiment of the present invention.
  • FIG2 is a second schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG3 is a third schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG4 is a fourth schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG5 is a partial enlarged view of point A in FIG4 ;
  • FIG6 is a schematic diagram of a mobile carrier platform according to one embodiment of the present invention.
  • FIG7 is a partial enlarged view of point B in FIG6;
  • FIG8 is a schematic diagram of a cleaning system provided according to one embodiment of the present invention.
  • FIG9 is a schematic diagram of an operating table assembly provided according to one embodiment of the present invention.
  • FIG. 10 is a flow chart of a cleaning method according to one embodiment of the present invention.
  • Mobile carrier platform 121. Carrier; 1211. Carrier body; 1212. Base; 1213. Connecting side plate; 1214. Cover plate; 1215. Limiting component; 1216. Baffle plate; 1217. Support component; 1218. Baffle plate; 1219. Magnetic buckle; 121a. Magnetic buckle hole; 121b. Connecting column;
  • driving module 1221, power component; 1222, lead screw; 1223, lead screw nut; 1224, second guide rail; 1225, second slider; 123, sliding mechanism; 1231, first guide rail; 1232, first slider; 124, first slider mounting plate; 125, second slider mounting plate; 126, slide rail connecting plate;
  • Cleaning pipeline group 13a. Pipeline body; 13b. Spray head; 131. Air blowing pipeline; 132. First spray pipeline; 133. Second spray pipeline;
  • Liquid storage tank group 31. First liquid storage tank; 32. Second liquid storage tank; 33. Liquid level sensor;
  • first and second are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as “first” and “second” may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of “plurality” is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
  • the terms “installed”, “connected”, “connected”, “fixed” and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • installed can be a fixed connection, a detachable connection, or an integral connection
  • it can be a mechanical connection or an electrical connection
  • it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • a first aspect of the present invention provides a cleaning device, which includes a box 11, a mobile carrier platform 12, and a cleaning pipeline group 13.
  • the mobile carrier platform 12 is installed in the box 11 and includes a carrier 121 and a drive module 122.
  • the carrier 121 is located in the box 11.
  • the drive module 122 is connected to the carrier 121 and is used to drive the carrier 121 to move linearly in the up and down directions.
  • the cleaning pipeline group 13 includes multiple cleaning pipelines, each of which is arranged in the box 11 and includes a pipeline body 13a and a nozzle 13b.
  • the nozzle 13b is connected to the pipeline body 13a and is arranged to face the carrier 121.
  • the mobile carrier platform 12 and the cleaning pipeline group 13 are installed on the box 11.
  • the mobile carrier platform 12 includes a carrier 121 and a driving module 122 for driving the carrier 121 to move.
  • the carrier 121 is used to place the workpiece 4, and the driving module 122 drives the carrier 121 to move linearly in the up and down directions.
  • the cleaning pipeline group 13 includes multiple cleaning pipelines consisting of pipeline bodies 13 a and nozzles 13 b .
  • the cleaning pipelines allow fluid to flow and spray toward the carrier 121 through the nozzles 13 b , thereby cleaning the workpiece placed on the carrier 121 .
  • the carrier 121 includes a support frame and a cover assembly
  • the support frame is provided with a plurality of loading stations
  • the cover assembly is pivotally connected to the support frame and is located above the loading station
  • the cover assembly is used to limit the workpiece 4 loaded in the loading station in the up and down direction.
  • the cover assembly can pivot relative to the support frame to open and close the loading station, when the cover assembly opens the loading station, the workpiece 4 can be placed in the loading station from above the loading station, and then the cover assembly is rotated to close the loading station, thereby limiting the up and down movement of the workpiece.
  • the support frame includes a carrier body 1211, a base 1212 and a connecting side plate 1213.
  • the base 1212 is arranged at the bottom of the carrier body 1211, and the connecting side plates 1213 are arranged at both ends of the base 1212 to clamp the carrier body 1211 and are pivotally connected to the cover assembly.
  • the loading station is located on the carrier body 1211.
  • the support frame is a frame structure assembled by the carrier body 1211, the base 1212 and the connecting side plates 1213.
  • the connecting side plates 1213 are located at both ends of the base 1212 to clamp and fix the carrier body 1211, and the cover assembly is pivotally connected to the top of the connecting side plates 1213, so as to open and close the loading station located on the carrier body 1211.
  • the support frame further includes a baffle 1216, which is connected to the connecting side plate 1213 to limit the pivoting movement of the cover assembly.
  • the baffle 1216 is arranged on the connecting side plate 1213.
  • the cover plate assembly includes a cover plate 1214 and a plurality of limiting components 1215.
  • the cover plate 1214 is pivotally connected to the support frame, and the plurality of limiting components are connected to the cover plate 1214 and are arranged one by one in alignment with the plurality of loading stations.
  • the cover plate assembly covers the loading station, and the limiting components 1215 can abut against the workpiece 4 loaded in the loading station, thereby limiting the workpiece 4 in the up and down directions.
  • the carrier body 1211 is provided with 4 loading stations, and the number of the limiting components 1215 is also 4 and aligned with the 4 loading stations.
  • Each loading station is provided with a supporting component 1217 and a plurality of baffles 1218.
  • the cover assembly is pivoted to switch the carrier 121 to the closed state, and the limiting component 1215 abuts against the top of the workpiece 4 to limit the up and down movement of the workpiece 4, so as to fix the workpiece 4 in the loading station.
  • the limiting component 1215 and the supporting component 1217 are both screws, but are not limited thereto, and may also include, for example, latches, etc., to ensure that the workpiece can be limited up and down.
  • the carrier 121 further includes a locking structure, which is used to maintain the open state of the carrier 121.
  • the locking structure allows the cover assembly to maintain the state of opening the loading station, thereby preventing the cover assembly from automatically pivoting and falling due to gravity, or even covering the loading station.
  • the locking structure includes a magnetic buckle 1219 and a magnetic buckle hole 121a provided on the baffle 1216.
  • the magnetic buckle 1219 is located in the magnetic buckle hole 121a and adsorbs the baffle 1216, so that the cover assembly maintains the state of opening the loading station.
  • the locking structure is not limited to this.
  • the locking structure includes a spring latch and a latch hole. When the carrier 121 is in the open state, the spring latch can be inserted into the latch hole to keep the cover assembly in the state of opening the loading station.
  • one end of the pipeline body 13a is an inlet end, and the other end is a closed end. Fluid can enter from the inlet end, and because the other end is closed, the fluid in the pipeline can only be sprayed outward through the nozzle 13b.
  • the pipeline body 13a includes a main pipeline and a plurality of branch pipelines.
  • the plurality of branch pipelines are arranged at intervals along the extension direction of the pipeline body and are connected to the main pipeline.
  • a nozzle 13b is correspondingly arranged for each branch pipeline.
  • the pipeline body 13a is mainly composed of a main pipeline and a plurality of branch pipelines.
  • the branch pipelines can play a diversion role and guide the fluid to different nozzles 13b. It can be understood that when a plurality of nozzles 13b are provided, the cleaning pipeline can cover a wider cleaning range.
  • each nozzle 13b corresponds to each loading station one by one, so as to achieve the purpose of cleaning multiple workpieces 4 at one time.
  • the cleaning pipeline groups 13 are relatively arranged on both sides of the carrier 121.
  • the carrier 121 can move within the spraying area defined by the two cleaning pipeline groups 13, so as to clean the workpiece 4 at two positions at the same time.
  • the number of cleaning pipeline groups 13 is not limited to this, and it is sufficient to ensure that the workpiece 4 can be sprayed at two relative positions at the same time.
  • Fig. 4 in the embodiment of the present invention, multiple cleaning pipelines are arranged at intervals in the vertical direction. Different cleaning fluids can flow into each cleaning pipeline, and each cleaning pipeline has different cleaning effects.
  • the cleaning pipeline group 13 includes the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133.
  • the carrier 121 moves in the up and down direction, the carrier 121 sequentially passes through the air blowing area of the air blowing pipeline 131, the spraying area of the first spraying pipeline 132, and the spraying area of the second spraying pipeline 133.
  • the cleaning equipment has three cleaning workstations to clean the workpiece 4 placed on the carrier 121.
  • the mobile carrier platform 12 also includes a sliding mechanism 123, which is installed on the box body 11, and the carrier 121 is slidingly connected to the box body 11 through the sliding mechanism 123.
  • the sliding mechanism 123 has the function of reducing friction.
  • the sliding mechanism 123 is used to achieve a sliding connection between the carrier 121 and the box body 11, which is beneficial for the driving module 122 to drive the carrier 121 to move up and down.
  • the number of sliding mechanisms 123 is 2 and they are respectively installed on the opposite side walls of the box body 11 to ensure the stability of the carrier 121 during movement.
  • the sliding mechanism 123 includes a first guide rail 1231 and a first slider 1232.
  • the first guide rail 1231 is installed on the box body 11, the first slider 1232 is slidably connected to the first guide rail 1231, and the carrier 121 is connected to the first slider 1232.
  • the driving module 122 drives the first slider 1232 to slide on the first guide rail 1231, thereby driving the carrier 121 to move in the up and down direction.
  • the sliding mechanism 123 in this embodiment is a first linear guide mechanism.
  • the sliding mechanism 123 includes a sliding rod and a sleeve slidably connected to the sliding rod, and the carrier 121 is connected to the sleeve.
  • the driving module 122 drives the sleeve to move on the sliding rod, thereby driving the carrier 121 to move in the up and down direction.
  • the sliding mechanism 123 is not limited to the illustrated embodiment, and it only needs to ensure that the mobile carrier platform 12 can move in the up and down directions on the box body 11, and no specific limitation is made here.
  • the driving module 122 includes a power component 1221 and a transmission mechanism.
  • the transmission mechanism is connected to the sliding mechanism 123 .
  • the power component 1221 is connected to the transmission mechanism.
  • the power component 1221 is used to drive the transmission mechanism so that the sliding mechanism 123 drives the carrier 121 .
  • the driving module 122 is a screw-type linear module and includes a motor, a ball screw mechanism, and a second linear guide mechanism.
  • the power component 1221 is a motor
  • the transmission mechanism is a combination of a ball screw mechanism and a second linear guide mechanism.
  • the ball screw mechanism includes a screw 1222 and a screw nut 1223
  • the second linear guide mechanism includes a second guide rail 1224 and a second slider 1225.
  • the screw nut 1223 is connected to the second slider 1225.
  • the power component 1221 drives the screw 1222 to rotate, so that the screw nut 1223 moves on the screw 1222, thereby driving the second slider 1225 to slide on the second guide rail 1224.
  • the mobile carrier platform 12 further includes a first slider mounting plate 124, a second slider mounting plate 125, and a slide rail connecting plate 126.
  • the carrier 121 is connected to the first slider mounting plate 124, the first slider mounting plate 124 is mounted on the first slider 1232, the second slider mounting plate 125 is mounted on the second slider 1225, and the slide rail connecting plate 126 is connected between the first slider mounting plate 124 and the second slider mounting plate 125.
  • the second slider mounting plate 125 is driven to move, and the first slider mounting plate 124 mounted on the first slider 1232 is driven to move through the slide rail connecting plate 126, thereby driving the carrier 121 connected to the first slider mounting plate 124 to move.
  • the connecting side plate 1213 is provided with a connecting column 121b, and the connecting column 121b passes through the side wall of the box body 11 and is connected to the second slider mounting plate 125. Since the carrier 121 can move in the up and down directions, a slide groove 112 is formed on the side wall for the connecting column 121b to move. During the cleaning process, the cleaning liquid can splash out from the slide groove 112. Therefore, in order to reduce the risk of liquid splashing, a liquid blocking plate 113 is provided on the side wall of the box body 11, and the liquid blocking plate 113 blocks the slide groove 112.
  • the driving module 122 is a linear motor module, and the mover seat of the linear motor is connected to the first slider 1232 through a connecting plate, thereby driving the first slider 1232 to move and drive the carrier 121 to move.
  • the driving module 122 is not limited thereto, and may also include, for example, an electric push rod, an electric cylinder, etc., which can drive the sliding mechanism 123 to drive the carrier 121 to move, and no specific limitation is made here.
  • the cleaning device 1 further includes a fan module 14, which is mounted on the side wall of the box 11 and is configured to draw air from the inside of the box 11 to the outside. It should be noted that the fluid sprayed through the cleaning pipeline group 13 includes a volatile liquid. In order to improve safety, the volatilized gas in the box 11 is extracted through the fan module 14.
  • the fan module 14 is installed on the top side wall of the box body 11 and includes a fan mounting seat 141 and a plurality of fans 142, and the plurality of fans 142 are all installed on the fan mounting seat 141.
  • the number of fans 142 is 3, and of course the installation position of the fan module 14 and the number of fans 142 are not specifically limited here, as long as the fan module 14 can draw air outward.
  • the box body 11 is provided with a cover 111, which is connected to the side wall of the box body 11 and covers the driving module 122 and the sliding mechanism 123.
  • the driving module 122 and the sliding mechanism 123 are sealed by the cover 111 to avoid contamination of the transmission mechanism and the sliding mechanism 123, thereby extending the service life of the cleaning device.
  • the cover 111 also covers the slide 112 and can also prevent liquid from splashing.
  • a liquid outlet 114 is provided at the bottom of the box body 11, and the waste liquid after cleaning the workpiece 4 is discharged from the box body 11 through the liquid outlet 114.
  • the top of the box body 11 is open.
  • the carrier 121 When the carrier 121 is located at the top, the carrier 121 extends outward through the top opening of the box body 11, so that it is convenient for the staff to load the workpiece 4 to be cleaned.
  • the second aspect of the present invention provides a cleaning system, which includes the above-mentioned cleaning device 1.
  • the cleaning system has all the beneficial effects brought by the above-mentioned cleaning device 1, and no repeated description is given here.
  • the cleaning system further includes an operating table assembly 2 and a liquid storage tank group 3, the liquid storage tank group 3 is connected to the cleaning pipeline group 13, and the operating table assembly 2 is used to control the operation of the cleaning device 1.
  • the liquid storage tank group 3 can store cleaning liquid and spray it through the cleaning pipeline group 13, and the operating table assembly 2 can control the operation of the cleaning device 1, for example, controlling the spraying time of the cleaning pipeline group 13, controlling the moving speed and direction of the carrier 121 in the mobile carrier platform 12, etc.
  • a liquid level sensor 33 is provided at the bottom of the liquid storage tank group 3.
  • the liquid level sensor 33 is connected to the control unit 222 by signal, and the liquid level in the liquid storage tank group 3 can be monitored by the control unit.
  • the operating table assembly 2 includes a cabinet 21, a control module 22 and a pump-valve assembly 23.
  • the control module 22 includes an input unit 221 and a control unit 222, and the control unit 222 is connected to the input unit 221 by signal;
  • the pump-valve assembly 23 is arranged in the cabinet 21 and connected to the liquid storage tank group 3; wherein the pump-valve assembly 23 and the driving module 122 are both connected to the control unit 222 by signal.
  • the operating table assembly 2 mainly integrates a control module 22 and a pump-valve assembly 23 .
  • the control module 22 is used to control the driving module 122 and the pump-valve assembly 23 , so as to control the combined operation of the cleaning pipeline assembly 13 and the mobile carrier platform 12 .
  • the input unit 221 includes buttons, a touch screen, etc.
  • the control unit 222 includes, but is not limited to: a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) circuit, any other type of integrated circuit (IC), and a state machine, etc.
  • DSP digital signal processor
  • ASIC application-specific integrated circuit
  • FPGA field programmable gate array
  • the pump-valve assembly 23 includes a pump and an electric control valve, the pump is used to pump liquid from the liquid storage tank group 3 to the cleaning pipeline group 13, and the electric control valve is used to control the on-off of the pipeline.
  • the pump and the electric control valve are controlled by the control unit 222.
  • the number of pump-valve assemblies 23 is determined according to the number of liquid storage tanks in the liquid storage tank group 3, and the number of liquid storage tanks in the liquid storage tank group 3 is determined by the number of cleaning pipelines in the cleaning pipeline group 13.
  • the number of pump-valve assemblies 23 can be adaptively adjusted according to demand.
  • the number of cleaning pipelines is 3, and they are respectively arranged from top to bottom, namely, the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133.
  • the liquid storage tank group 3 includes a first liquid storage tank 31 and a second liquid storage tank 32.
  • the first liquid storage tank 31 is connected to the first spraying pipeline 132 and is used to store the first cleaning agent.
  • the second liquid storage tank 32 is connected to the second spraying pipeline 133 and is used to store the second cleaning agent.
  • the first spraying pipeline 132 is used to spray the first cleaning agent
  • the second spraying pipeline 133 is used to spray the second cleaning agent. Different cleaning effects can be achieved by spraying different cleaning agents.
  • the air blowing pipeline 131 is used to dry the sprayed workpiece.
  • a filtering device such as a filter net, may be further provided on the pipeline between the liquid storage tank group 3 and the cleaning pipeline group 13 to ensure the cleanliness of the cleaning liquid and avoid secondary contamination of the workpiece 4.
  • box body 11, the mobile carrier platform 12, the cleaning pipeline group 13, the liquid storage tank group 3, etc. are all made of stainless steel and chemical-resistant materials to avoid corrosion by cleaning agents.
  • the third aspect of the present invention further provides a cleaning method.
  • the cleaning method is implemented by using the above-mentioned cleaning system. Specifically, the cleaning system can be applied to chip cleaning.
  • the first cleaning agent is water.
  • the cleaning method includes the following steps.
  • Step S1 fix the chip on the carrier 121
  • Step S2 applying a start signal to the input unit 221, and the input unit 221 transmits the start signal to the control unit 222;
  • Step S3 the control unit 222 controls the carrier 121 to reciprocate the chip in the spray area corresponding to the first spray pipeline 132 and the spray area corresponding to the second spray pipeline 133, and the control unit 222 controls the pump valve assembly 23 to alternately pump liquid from the first liquid storage tank 31 and the second spray pipeline 133, so that the first spray pipeline 132 and the second spray pipeline 133 alternately spray and clean the chip;
  • Step S4 the control unit 222 controls the carrier 121 to move the chip again to the spray area corresponding to the first spray pipeline 132, and the control unit 222 controls the pump valve assembly 23 to pump liquid from the first liquid storage tank 31, so that the first spray pipeline 132 sprays the chip with water for cleaning;
  • Step S5 the control unit 222 controls the carrier 121 to move the chip to the purge area corresponding to the air blowing pipeline 131 to complete the purge of the chip;
  • step S6 the control unit 222 controls the carrier 121 to move the cleaned chips out of the cleaning area of the cleaning pipeline assembly 13 .
  • the start signal includes, for example, a signal generated by a start button and operation parameters inputted through a touch screen, such as the number of alternate spraying times and the operation time corresponding to each cleaning pipeline.
  • the control unit 222 can control the combined operation of the mobile carrier platform 12 and the corresponding pump-valve assembly 23 according to the parameters input by the input unit 221. For example, when the carrier 121 moves into the spraying area of the first spraying pipeline 132 or the spraying area of the second spraying pipeline 133, the spraying time and spraying pressure of the spraying pipeline are controlled; or when the carrier 121 moves into the purge area of the blowing pipeline 131, the blowing time of the blowing pipeline 131 is controlled.
  • step S4 the chip may be first moved to the spray area corresponding to the first spray line 132 and then start alternate cleaning, or the chip may be moved to the spray area corresponding to the second spray line 133 and then start alternate cleaning.
  • the order of alternate cleaning is not limited.
  • step S5 the air blowing pipeline 131 is connected to a gas source, and the gas source is connected to the air blowing pipeline 131 through a connecting gas pipe, and a solenoid valve connected to the control unit 222 signal can be provided on the connecting gas pipe, and the solenoid valve is used to open and close the gas pipe, thereby controlling the operation of the air blowing pipeline 131.
  • the gas source is preferably an inert gas source, including, for example, nitrogen, helium, etc.
  • the start signal includes the number of alternating spraying times
  • the number of cyclic spraying times refers to the number of alternating spraying times in step S4
  • the number of alternating spraying times can be adaptively adjusted according to actual conditions.
  • the cleaning system when the cleaning system is applied to chip cleaning, the last spray cleaning step is water spraying.
  • the cleaning system is not limited to chip cleaning, and the type of cleaning agent and the spraying sequence can be adjusted according to the type of workpiece to be cleaned.
  • a touch screen and buttons are provided on the operating table assembly 2, and the first cleaning agent and the second cleaning agent are water and isopropyl alcohol respectively.
  • the carrier 121 first automatically moves the chip to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the spray area corresponding to the second spray pipeline 133, and sprays the isopropyl alcohol solution for 10 seconds. After repeating the above-mentioned alternating spraying process, the carrier 121 moves again to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the purge area corresponding to the air blowing pipeline 131, and the purge time is 20 seconds. Finally, the carrier 121 moves out of the cleaning area to complete the cleaning.
  • the cleaning device 1 provided by the present invention can spray clean the chip placed on the carrier 121, reduce damage to the chip, and ensure the service life of the chip.
  • the present invention also provides a cleaning system with the above cleaning device 1, through which the cleaning system can realize the automatic full-process chip cleaning operation.

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

一种清洗设备、清洗系统及清洗方法，属于清洗设备技术领域。清洗设备包括箱体（11）、移动载具平台（12）以及清洗管路组（13）。移动载具平台（12）安装于箱体（11）并包括载具（121）和驱动模组（122），载具（121）位于箱体（11）内，驱动模组（122）连接于载具（121）、并用于驱动载具（121）沿上下方向线性移动；清洗管路组（13）包括多路清洗管路，各清洗管路均设置于箱体（11）内并包括管路本体（13a）和喷头（13b），喷头（13b）连接于管路本体（13a）、并设置为朝向载具（121）。清洗设备能够对放置于载具（121）上的芯片进行喷淋清洗，降低对芯片的损害，保证芯片的使用寿命。

Description

一种清洗设备、清洗系统及清洗方法 技术领域
本发明属于清洗设备技术领域，尤其是一种清洗设备、清洗系统及清洗方法。
背景技术
现有技术中芯片的清洗主要以槽式清洗为主。目前槽式清洗的方法是将芯片浸泡在清洗溶液内。在芯片的表面镀有金属膜，芯片经过多次浸泡后，就容易导致金属膜脱落、氧化等问题，对芯片的使用寿命造成很大的影响。
有鉴于此，特提出本发明。
发明内容
本发明提供了一种清洗设备、清洗系统及清洗方法，以解决现有技术中浸洗易损坏芯片的技术问题。
为解决上述问题，本发明采用以下方案：
一种清洗设备，该清洗设备包括箱体、移动载具平台和清洗管路组；移动载具平台安装于所述箱体并包括载具和驱动模组，所述载具位于所述箱体内，所述驱动模组连接于所述载具、并用于驱动所述载具沿上下方向线性移动；清洗管路组包括多路清洗管路，各所述清洗管路均设置于所述箱体内并包括管路本体以及喷头，所述喷头连接于所述管路本体、并设置为朝向所述载具。
在本方案的清洗设备中，移动载具平台与清洗管路组安装于箱体，移动载具平台包括载具以及用于驱动载具移动的驱动模组，载具用于放置工件， 驱动模组驱动载具沿上下方向线性移动。清洗管路组包括多路由管路本体与喷头构成的清洗管路，清洗管路能够允许流体流通，并通过喷头朝向载具喷出，从而清洗放置于载具上的工件。
在进一步可选的方案中，所述载具包括支撑架以及盖板组件，支撑架设有多个装载工位；盖板组件枢转连接于所述支撑架、并位于所述装载工位的上方，所述盖板组件用于在上下方向上对装载于所述装载工位中的工件进行限位。盖板组件能够相对支撑架枢转，从而开合装载工位，盖板组件打开装载工位时，可将工件从装载工位的上方放入于装载工位内，再转动盖板组件以使得盖板组件关闭装载工位，从而限制工件上下方向移动。
在进一步可选的方案中，所述支撑架包括载具本体、底座以及连接侧板，底座设置于所述载具本体的底部；连接侧板设置于所述底座的两端以夹设所述载具本体、并与所述盖板组件枢转连接；其中，所述装载工位位于所述载具本体上。
在进一步可选的方案中，所述支撑架还包括挡板，所述挡板连接于所述连接侧板，以用于对所述盖板组件的枢转运动进行限制。通过挡板限制盖板组件的枢转角度。
在进一步可选的方案中，所述盖板组件包括盖板以及多个限位部件，盖板枢转连接于所述支撑架；多个限位部件连接于所述盖板、并与多个所述装载工位一一对齐布置。限位部件能够压接于装载在装载工位中的工件，从而在上下方向对工件进行限位。
在进一步可选的方案中，所述载具还包括锁止结构，所述锁止结构用于将所述载具维持打开状态，在所述载具处于打开状态下，所述盖板组件打开所述装载工位。通过锁止结构使得盖板组件维持打开装载工位的状态，避免盖板组件因重力自动枢转掉落。
在进一步可选的方案中，所述管路本体的一端为入口端，另一端为封闭设置，使得管路中的流体仅能通过喷头朝外喷出。
在进一步可选的方案中，所述管路本体包括主管道和多个支管道，多个所述支管道沿所述管路本体的延伸方向间隔设置于所述主管道、并连通于所述主管道，各支管道对应设置一个喷头。在设有多个喷头的情况下，清洗管路所能覆盖的清洗范围更广
在进一步可选的方案中，所述清洗管路组相对设置在所述载具的两侧。位于载具两侧的清洗管路组能够同时清洗工件的两个方位，保证清洗效果。
在进一步可选的方案中，多路所述清洗管路沿上下方向间隔排布。
在进一步可选的方案中，所述移动载具平台还包括滑移机构，所述滑移机构安装于所述箱体，所述载具通过所述滑移机构滑移连接于所述箱体。通过滑移机构实现将载具与箱体滑移连接，便于驱动模组驱动载具移动。
在进一步可选的方案中，所述驱动模组包括动力部件以及传动机构，所述传动机构与所述滑移机构连接，所述动力部件与所述传动机构连接，所述动力部件用于驱动所述传动机构以使所述滑移机构带动所述载具。
在进一步可选的方案中，所述清洗设备还包括风扇模组，所述风扇模组安装于所述箱体的侧壁、并设置为从所述箱体内朝外抽风。通过风扇模组将箱体内挥发的气体抽出，提高安全性。
在进一步可选的方案中，所述清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路、第一喷淋管路以及第二喷淋管路。该清洗设备具备三个清洗作业工位以对放置于载具上的工件进行清洗。
本发明还提供了一种清洗系统，该清洗系统包括上述清洗设备。
在进一步可选的方案中，所述清洗系统还包括操作台总成与储液箱组，所述储液箱组与所述清洗管路组相连，所述操作台总成用于控制所述清洗设 备作业。储液箱组能够存储清洗液，通过清洗管路组喷出，操作台总成能够控制清洗设备作业。
在进一步可选的方案中，所述操作台总成包括机柜、控制模块以及泵阀组件；控制模块包括输入单元与控制单元，所述控制单元与所述输入单元信号连接；泵阀组件设置于所述机柜内并与所述储液箱组相连；其中，所述泵阀组件与驱动模组均与所述控制单元信号连接。
在该方案中，操作台总成主要集成有控制模块与泵阀组件，控制模块用于控制驱动模组以及泵阀组件，如此即可控制清洗管路组以及移动载具平台组合作业。
在进一步可选的方案中，所述储液箱组的底部设有液位传感器。用于监控储液箱组中的液位情况。
在进一步可选的方案中，所述清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路、第一喷淋管路以及第二喷淋管路；
所述储液箱组包括第一储液箱与第二储液箱，所述第一储液箱与所述第一喷淋管路相连、并用于存储第一清洗剂，所述第二储液箱与所述第二喷淋管路相连、并用于存储第二清洗剂。第一喷淋管路用于喷淋第一清洗剂，第二喷淋管路用于喷淋第二清洗剂，吹气管路用于吹干被喷淋的工件。
本发明还提供了一种清洗方法，所述清洗方法应用上述的清洗系统来实现，所述第一清洗剂为水，所述清洗方法包括：
将芯片固定放置在所述载具上；
向所述输入单元施加启动信号，所述输入单元将所述启动信号传递给所述控制单元；
所述控制单元控制所述载具将芯片在所述第一喷淋管路对应的喷淋区域和所述第二喷淋管路对应的喷淋区域内往复移动，所述控制单元控制所述泵 阀组件分别从所述第一储液箱和第二储液箱交替抽液，以使所述第一喷淋管路和所述第二喷淋管路对芯片进行交替喷淋清洗；
所述控制单元控制所述载具将芯片再次移动至所述第一喷淋管路对应的喷淋区域内，所述控制单元控制泵阀组件从所述第一储液箱抽液，以使所述第一喷淋管路对芯片进行水喷淋清洗；
所述控制单元控制所述载具将芯片移动至所述吹气管路对应的吹扫区域内，以完成对芯片的吹扫；
所述控制单元控制所述载具将清洗后的芯片移出所述清洗管路组的清洗区域。
在该方案中，在该清洗系统中应用该清洗方法即可实现自动化全流程芯片清洗作业。
与现有技术相比，本发明具有以下有益效果：
本发明提供的清洗设备中，移动载具平台与清洗管路组安装于箱体，移动载具平台包括载具以及用于驱动载具移动的驱动模组，载具用于放置待清洗工件，驱动模组驱动载具沿上下方向线性移动。清洗管路组包括多路由管路本体与喷头构成的清洗管路，清洗管路能够允许流体流通，并通过喷头朝向载具喷出，从而清洗放置于载具上的待清洗工件。换言之，清洗设备能够对放置于载具上的芯片进行喷淋清洗，降低对芯片的损害，保证芯片的使用寿命。
附图说明
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施方式，对于本领域普通技术 人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为根据本发明其中一个实施例提供的清洗设备的示意图之一；
图2为根据本发明其中一个实施例提供的清洗设备的示意图之二；
图3为根据本发明其中一个实施例提供的清洗设备的示意图之三；
图4为根据本发明其中一个实施例提供的清洗设备的示意图之四；
图5为图4中A处的局部放大图；
图6为根据本发明其中一个实施例提供的移动载具平台的示意图；
图7为图6中B处的局部放大图；
图8为根据本发明其中一个实施例提供的清洗系统的示意图；
图9为根据本发明其中一个实施例提供的操作台总成示意图；
图10为根据本发明其中一个实施例提供的清洗方法的流程图。
以上附图中，各标号所代表的部件列表如下：
1、清洗设备；11、箱体；111、罩盖；112、滑槽；113、挡液板；114、出液口；
12、移动载具平台；121、载具；1211、载具本体；1212、底座；1213、连接侧板；1214、盖板；1215、限位部件；1216、挡板；1217、支撑部件；1218、挡片；1219、磁扣；121a、磁扣孔；121b、连接柱；
122、驱动模组；1221、动力部件；1222、丝杆；1223、丝杆螺帽；1224、第二导轨；1225、第二滑块；123、滑移机构；1231、第一导轨；1232、第一滑块；124、第一滑块安装板；125、第二滑块安装板；126、滑轨连接板；
13、清洗管路组；13a、管路本体；13b、喷头；131、吹气管路；132、第一喷淋管路；133、第二喷淋管路；
14、风扇模组；141、风扇安装座；142、风扇；
2、操作台总成；21、机柜；22、控制模块；221、输入单元；222、控制单元；23、泵阀组件
3、储液箱组；31、第一储液箱；32、第二储液箱；33、液位传感器；
4、工件。
具体实施方式
为了使本发明的上述以及其他特征和优点更加清楚，下面结合附图进一步描述本发明。应当理解，本文给出的具体实施例是出于向本领域技术人员解释的目的，仅是示例性的，而非限制性的。
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接 相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外，在不相互矛盾的情况下，本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。
请参考图1至图4所示。本发明第一方面提供了一种清洗设备，该清洗设备包括箱体11、移动载具平台12以及清洗管路组13。移动载具平台12安装于箱体11并包括载具121和驱动模组122，载具121位于箱体11内，驱动模组122连接于载具121、并用于驱动载具121沿上下方向线性移动。清洗管路组13包括多路清洗管路，各清洗管路均设置于箱体11内并包括管路本体13a以及喷头13b，喷头13b连接于管路本体13a、并设置为朝向载具121。
在该实施例中，移动载具平台12与清洗管路组13安装于箱体11，移动载具平台12包括载具121以及用于驱动载具121移动的驱动模组122，载具121用于放置工件4，驱动模组122驱动载具121沿上下方向线性移动。
清洗管路组13包括多路由管路本体13a与喷头13b构成的清洗管路，清洗管路能够允许流体流通，并通过喷头13b朝向载具121喷出，从而清洗放置于载具121上的工件。
需要说明的是，该清洗设备主要用于清洗芯片等半导体零件，但不局限于此。
在本发明的实施例中，载具121包括支撑架以及盖板组件，支撑架设有多个装载工位，盖板组件枢转连接于支撑架、并位于装载工位的上方，盖板组件用于在上下方向上对装载于装载工位中的工件4进行限位。盖板组件能够相对支撑架枢转，从而开合装载工位，盖板组件打开装载工位时，可将工件4从装载工位的上方放入于装载工位内，再转动盖板组件以使得盖板组件关闭装载工位，从而限制工件上下方向移动。
请参阅图6，进一步地，支撑架包括载具本体1211、底座1212以及连接侧板1213。底座1212设置于载具本体1211的底部，连接侧板1213设置于底座1212的两端以夹设载具本体1211、并与盖板组件枢转连接。其中，装载工位位于载具本体1211上。支撑架为由载具本体1211、底座1212以及连接侧板1213拼装而成的框架结构，连接侧板1213位于底座1212的两端，以夹设固定载具本体1211，盖板组件枢转连接于连接侧板1213的顶端，从而开合位于载具本体1211上的装载工位。
进一步地，支撑架还包括挡板1216，挡板1216连接于连接侧板1213，以用于对盖板组件的枢转运动进行限制。挡板1216设置于连接侧板1213上，将盖板组件转动以打开装载工位的过程中，盖板组件转动一定角度后抵接于 连接侧板1213，从而限制盖板组件转动，载具121处于打开状态。将盖板组件转动以盖合装载工位的过程中，盖板组件转动一定角度后抵接于连接侧板1213的顶端，从而限制盖板组件转动，载具121处于关闭状态。
请参阅图6，在具体应用中，盖板组件在水平状态下，盖板组件盖合装载工位，载具121处于关闭状态；将盖板组件朝上枢转至竖直状态，盖板组件打开装载工位，载具121处于打开状态。由此可见，通过挡板1216与连接侧板1213的配合结构，以使盖板组件具有90°的枢转角度，从而使得载具121在打开状态与关闭状态之间切换。当然，可调整连接侧板1213的安装位置以调整盖板组件的枢转角度，在本实施例中不做具体限制，保证不影响正常装载工件即可。
在本发明的实施例中，盖板组件包括盖板1214以及多个限位部件1215，盖板1214枢转连接于支撑架，多个限位部件连接于盖板1214、并与多个装载工位一一对齐布置。在载具121处于关闭状态下，盖板组件盖合装载工位，限位部件1215能够抵接于装载在装载工位中的工件4，从而在上下方向对工件4进行限位。
请参阅图6，在具体应用中，载具本体1211设有4个装载工位，限位部件1215的数量也为4个且与4个装载工位一一对齐，每个装载工位均设有支撑部件1217以及多组挡片1218，在载具121处于打开状态下，从装载工位的上方放入工件4，工件4夹设在多组挡片1218之间，支撑部件1217支撑工件的底部，以限制工件4水平移动；枢转盖板组件以将载具121切换至关闭状态，限位部件1215抵接于工件4的顶端，以限制工件4上下移动，以从而将工件4固定于装载工位内。在一种可选的实施例中，限位部件1215与支撑部件1217均为螺钉，但不局限于此，还可包括例如插销等，保证能够上下限位工件即可。
在本发明的实施例中，载具121还包括锁止结构，锁止结构用于将载具121维持打开状态。通过锁止结构使得盖板组件维持打开装载工位的状态，避免盖板组件因重力自动枢转掉落，甚至出现盖合装载工位的情况。
请参阅图7，在具体应用中，锁止结构包括磁扣1219以及设置于挡板1216的磁扣孔121a，载具121处于打开状态下，磁扣1219位于磁扣孔121a内并吸附挡板1216，从而使得盖板组件维持打开装载工位的状态。当然，锁止结构并不局限于此，在另一具体应用中，锁止结构包括弹簧插销以及插销孔，载具121处于打开状态下，可将弹簧插销伸入于插销孔内，以使盖板组件维持打开装载工位的状态。
在本发明的实施例中，管路本体13a的一端为入口端，另一端为封闭端。流体能够从入口端进入，由于另一端封闭，使得管路中的流体仅能通过喷头13b朝外喷出。
请参阅图3，在本发明的实施例中，管路本体13a包括主管道和多个支管道，多个支管道沿管路本体的延伸方向间隔设置于主管道、并连通于主管道，各支管道对应设置一个喷头13b。管路本体13a主要由主管道以及多个支管道构成，支管道能够起到分流作用，并将流体引向不同的喷头13b。可以理解地，在设有多个喷头13b的情况下，清洗管路所能覆盖的清洗范围更广。例如，在载具121包括多个装载工位的情况下，各喷头13b与各装载工位一一对应，达到一次清洗多个工件4的目的。
请参阅图3，在本发明的实施例中，清洗管路组13相对设置在载具121的两侧。在具体应用中，清洗管路组13的数量为两组，载具121位于两组清洗管路组13之间，载具121能够在两组清洗管路组13限定的喷淋区域内移动，从而在两个方位同时对工件4进行清洗。当然，清洗管路组13的数量并不局限于此，保证在相对的两个方位上能够同时对工件4进行喷淋即可。
请参阅图4，在本发明的实施例中，多路清洗管路沿上下方向间隔排布。每路清洗管路能够流入不同的清洗流体，每路清洗管路具有不同的清洗效果。
在具体应用中，清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路131、第一喷淋管路132以及第二喷淋管路133。清洗管路组13包括吹气管路131、第一喷淋管路132以及第二喷淋管路133，在载具121沿上下方向移动的过程中，载具121依次经过吹气管路131的吹气区域、第一喷淋管路132的喷淋区域以及第二喷淋管路133的喷淋区域。换言之，该清洗设备具备三个清洗作业工位以对放置于载具121上的工件4进行清洗。
请参阅图2、图4以及图5，在本发明的实施例中，移动载具平台12还包括滑移机构123，滑移机构123安装于箱体11，载具121通过滑移机构123滑移连接于箱体11。需要说明的是，滑移机构123具有降低摩擦力的作用，通过滑移机构123实现将载具121与箱体11滑移连接，利于驱动模组122驱动载具121上下移动。在本公开中，滑移机构123的数量为2个且分别安装于箱体11的相对两侧壁上，保证载具121在移动过程中的稳定性。
如图5所示，在图示实施例中，滑移机构123包括第一导轨1231和第一滑块1232，第一导轨1231安装于箱体11，第一滑块1232滑动连接于第一导轨1231，载具121连接于第一滑块1232。驱动模组122驱动第一滑块1232在第一导轨1231上滑移，从而带动载具121沿上下方向移动。可见，该实施例中的滑移机构123为第一直线导轨机构。
在另一种可选的实施例中，滑移机构123包括滑杆以及滑移连接于滑杆上的套筒，载具121连接于套筒。驱动模组122驱动套筒在滑杆上移动，从而带动载具121沿上下方向移动。
可见，滑移机构123并不局限于图示实施例，保证移动载具平台12能够在箱体11上沿上下方向移动即可，在此不做具体限制。
进一步地，驱动模组122包括动力部件1221以及传动机构，传动机构与滑移机构123相连，动力部件1221与传动机构连接，动力部件1221用于驱动传动机构以使滑移机构123带动载具121。
如图5所示，在图示实施例中，驱动模组122为丝杆型直线模组并包括电机、滚珠丝杆机构以及第二直线导轨机构。在丝杆型直线模组中，动力部件1221为电机，传动机构为滚珠丝杆机构与第二直线导轨机构的组合机构。滚珠丝杆机构包括丝杆1222以及丝杆螺帽1223，第二直线导轨机构包括第二导轨1224以及第二滑块1225，丝杆螺帽1223与第二滑块1225连接，动力部件1221驱动丝杆1222转动，从而使得丝杆螺帽1223在丝杆1222上移动，进而带动第二滑块1225在第二导轨1224上滑移。
在具体应用中，移动载具平台12还包括第一滑块安装板124、第二滑块安装板125以及滑轨连接板126，载具121连接于第一滑块安装板124，第一滑块安装板124安装于第一滑块1232，第二滑块安装板125安装于第二滑块1225，滑轨连接板126连接在第一滑块安装板124与第二滑块安装板125之间。第二滑块1225在第二导轨1224上滑移的过程中，带动第二滑块安装板125移动，通过滑轨连接板126进而带动安装于第一滑块1232上的第一滑块安装板124移动，进而带动连接于第一滑块安装板124上的载具121移动。
另外，还需说明的是，请参阅图3和图5，在图示实施例中，连接侧板1213设有连接柱121b，连接柱121b穿过箱体11的侧壁后与第二滑块安装板125连接，由于载具121能够沿上下方向移动，因此在侧壁上形成有滑槽112以供连接柱121b移动。在清洗过程中，清洗液能够从滑槽112溅出，因此，为降低液体溅出风险，在箱体11的侧壁上设有挡液板113，挡液板113遮挡滑槽112。
在另一种可选的实施例中，驱动模组122为直线电机模组，通过连接板 将直线电机的动子座与第一滑块1232连接，从而驱动第一滑块1232动作以带动载具121移动。
需要说明的是，驱动模组122并不局限于此，还可包括例如电动推杆、电动缸等，能够驱动滑移机构123带动载具121移动即可，在此不做具体限制。
在本发明的实施例中，清洗设备1还包括风扇模组14，风扇模组14安装于箱体11的侧壁、并设置为从箱体11内朝外抽风。需要说明的是，通过清洗管路组13喷出的流体包括易挥发的液体，为了提高安全性，通过风扇模组14将箱体11内挥发的气体抽出。
在具体应用中，风扇模组14安装于箱体11的顶侧壁并包括风扇安装座141以及多个风扇142，多个风扇142均安装于风扇安装座141上。如图2所示，在图示实施例中，风扇142的数量为3个，当然风扇模组14的安装位置以及风扇142的数量在此不做具体限制，保证风扇模组14能够向外抽风即可。
在一种可选的实施例中，该箱体11上设有罩盖111，罩盖111连接于箱体11的侧壁、并罩盖驱动模组122与滑移机构123。通过罩盖111密封驱动模组122与滑移机构123，避免污染传动机构及滑移机构123，延长清洗设备的使用寿命。可以理解地，罩盖111也盖合了滑槽112，同时也能起到防止液体溅出的作用。另外，请参阅图4，在该箱体11的底部设有出液口114，清洗完工件4后的废液通过出液口114排出箱体11。
另外，该箱体11的顶部呈开口设置，在载具121位于最上方的状态下，载具121穿过箱体11的顶部开口朝外伸出，如此便于工作人员装载待清洗的工件4。
请参阅图8，本发明第二方面提供了一种清洗系统，该清洗系统包括上 述的清洗设备1。显然地，该清洗系统具备由上述清洗设备1所带来的所有有益效果，在此不做重复说明。
进一步地，该清洗系统还包括操作台总成2与储液箱组3，储液箱组3与清洗管路组13相连，操作台总成2用于控制清洗设备1作业。储液箱组3能够存储清洗液，通过清洗管路组13喷出，操作台总成2能够控制清洗设备1作业，例如，控制清洗管路组13的喷淋时间、控制移动载具平台12中载具121的移动速度及方向等。
进一步地，储液箱组3的底部设有液位传感器33。液位传感器33与控制单元222信号连接，通过控制单元即可实现监控储液箱组3中的液位情况。
请参阅图7，进一步地，操作台总成2包括机柜21、控制模块22以及泵阀组件23。控制模块22包括输入单元221与控制单元222，控制单元222与输入单元221信号连接；泵阀组件23设置于机柜21内并与储液箱组3相连；其中，泵阀组件23与驱动模组122均与控制单元222信号连接。
操作台总成2主要集成有控制模块22与泵阀组件23，控制模块22用于控制驱动模组122以及泵阀组件23，如此即可控制清洗管路组13以及移动载具平台12组合作业。
需要说明的是，输入单元221包括按键、触摸显示屏等。控制单元222包括但不限于包括但不限于：通用处理器、专用处理器、常规处理器、数字信号处理器(DSP)、多个微处理器、与DSP核心关联的一个或多个微处理器、控制器、微控制器、单片机、专用集成电路(ASIC)、现场可编程门阵列(FPGA)电路、其他任何类型的集成电路(IC)以及状态机等。
还需说明的是，泵阀组件23包括泵以及电控阀，泵用于从储液箱组3内向清洗管路组13抽液，电控阀用于控制管路的通断。当然，泵以及电控阀均通过控制单元222进行控制，可以理解地，泵阀组件23的数量根据储液箱 组3中储液箱的数量确定，储液箱组3中储液箱的数量由清洗管路组13中的清洗管路数量决定，泵阀组件23的数量可根据需求适应性调整即可。
在一种优选的实施例中，清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路131、第一喷淋管路132以及第二喷淋管路133。储液箱组3包括第一储液箱31与第二储液箱32，第一储液箱31与第一喷淋管路132相连、并用于存储第一清洗剂，第二储液箱32与第二喷淋管路133相连、并用于存储第二清洗剂。第一喷淋管路132用于喷淋第一清洗剂，第二喷淋管路133用于喷淋第二清洗剂，通过喷淋不同的清洗剂以达到不同的清洗效果，吹气管路131用于吹干被喷淋的工件。
需要说明的是，在一种可选的实施例中，储液箱组3与清洗管路组13之间的管路上还可设置过滤装置，例如过滤网等，保证清洗液的清洁度，避免对工件4造成二次污染。
另外，还需要说明的是，箱体11、移动载具平台12、清洗管路组13、储液箱组3等均采用了不锈钢和耐化材料，避免被清洗剂腐蚀。
请参阅图10，本发明第三方面还提供了一种清洗方法，该清洗方法采用上述的一种清洗系统来实现的，具体可将该清洗系统应用于芯片清洗，第一清洗剂为水，该清洗方法包括如下步骤。
步骤S1，将芯片固定放置在载具121上；
步骤S2，向输入单元221施加启动信号，输入单元221将启动信号传递给控制单元222；
步骤S3，控制单元222控制载具121将芯片在第一喷淋管路132对应的喷淋区域和第二喷淋管路133对应的喷淋区域内往复移动，控制单元222控制泵阀组件23从第一储液箱31和第二喷淋管路133交替抽液，以使第一喷淋管路132和第二喷淋管路133对芯片进行交替喷淋清洗；
步骤S4，控制单元222控制载具121将芯片再次移动至第一喷淋管路132对应的喷淋区域内，控制单元222控制泵阀组件23从第一储液箱31抽液，以使第一喷淋管路132对芯片进行水喷淋清洗；
步骤S5，控制单元222控制载具121将芯片移动至吹气管路131对应的吹扫区域内，以完成对芯片的吹扫；
步骤S6，控制单元222控制载具121将清洗后的芯片移出清洗管路组13的清洗区域。
在步骤S2中，启动信号包括例如通过启动按钮产生的信号以及触摸显示屏输入的作业参数。作业参数包括例如交替喷淋次数、每条清洗管路对应的作业时间等。
在步骤S3至S5中，控制单元222能够根据输入单元221输入的参数控制移动载具平台12以及相应的泵阀组件23组合作业。例如，在载具121移动至第一喷淋管路132的喷淋区域内或第二喷淋管路133的喷淋区域内时，控制喷淋管路的喷淋时间、喷淋压力等；或者，在载具121移动至吹气管路131的吹扫区域时，控制吹气管路131的吹气时间等。
在步骤S4中，可先将芯片移动至第一喷淋管路132所对应的喷淋区域后开始交替清洗，也可将芯片移动至第二喷淋管路133所对应的喷淋区域后开始交替清洗，交替清洗的顺序并不限制。
可以理解地，在步骤S5中，吹气管路131连接有气源，气源通过连接气管连接吹气管路131，在连接气管上可设置有与控制单元222信号连接的电磁阀，电磁阀用于通断气管，从而控制吹气管路131作业。需要说明的是，气源优选采用惰性气源，包括例如氮气、氦气等。
需要说明的是，在一种可选的实施例中，启动信号包括交替喷淋次数，循环喷淋次数指在步骤S4中交替喷淋的次数，交替喷淋次数可根据实际情况 适应性调整。
另外，需要说明的是，将该清洗系统应用于芯片清洗时，最后一步喷淋清洗步骤为水喷淋，该清洗系统并不局限于芯片清洗，可根据清洗工件种类调整清洗剂种类和喷淋顺序。
在一种可选的实施例中，操作台总成2上设有触摸显示屏与按钮，第一清洗剂与第二清洗剂分别为水和异丙醇，将需要被清洗的芯片放置于载具121上后，在触摸显示屏幕上选择清洗程序并按下启动按钮后，该清洗系统将按清洗程序自动作业。
例如，载具121先将芯片自动移动至第一喷淋管路132对应的喷淋区域内，水喷淋10S。接着，载具121将芯片移动至第二喷淋管路133对应的喷淋区域内，异丙醇溶液喷淋时长10S。重复一次上述的交替喷淋过程后，载具121再次移动至第一喷淋管路132对应的喷淋区域内，水喷淋时长10S。接着，载具121将芯片移动至吹气管路131对应的吹扫区域内，吹扫时长20S，最后，载具121移出清洗区域完成清洗。
综上，本发明提供的清洗设备1能够对放置于载具121上的芯片进行喷淋清洗，降低对芯片的损害，保证芯片的使用寿命。另外，本发明还提供了一种具备上述清洗设备1的清洗系统，通过该清洗系统能够实现自动化全流程芯片清洗作业。
尽管上面已经示出和描述了本发明的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本发明的限制，本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。

Claims (20)

  1. 一种清洗设备，其特征在于，所述清洗设备包括：
    箱体；
    移动载具平台，安装于所述箱体并包括载具和驱动模组，所述载具位于所述箱体内，所述驱动模组连接于所述载具、并用于驱动所述载具沿上下方向线性移动；以及
    清洗管路组，包括多路清洗管路，各所述清洗管路均设置于所述箱体内并包括管路本体和喷头，所述喷头连接于所述管路本体、并设置为朝向所述载具。
  2. 根据权利要求1所述的清洗设备，其特征在于，所述载具包括：
    支撑架，设有多个装载工位；以及
    盖板组件，枢转连接于所述支撑架、并位于所述装载工位的上方，所述盖板组件用于在上下方向上对装载于所述装载工位中的工件进行限位。
  3. 根据权利要求2所述的清洗设备，其特征在于，所述支撑架包括：
    载具本体；
    底座，设置于所述载具本体的底部；以及
    连接侧板，设置于所述底座的两端以夹设所述载具本体、并与所述盖板组件枢转连接；
    其中，所述装载工位位于所述载具本体上。
  4. 根据权利要求3所述的清洗设备，其特征在于，所述支撑架还包括挡板，所述挡板连接于所述连接侧板，以用于对所述盖板组件的枢转运动进行限制。
  5. 根据权利要求2所述的清洗设备，其特征在于，所述盖板组件包括：
    盖板，枢转连接于所述支撑架；以及
    多个限位部件，连接于所述盖板、并与多个所述装载工位一一对齐布置。
  6. 根据权利要求2所述的清洗设备，其特征在于，所述载具还包括锁止结构，所述锁止结构用于将所述载具维持打开状态，在所述载具121处于打开状态下，所述盖板组件打开所述装载工位。
  7. 根据权利要求1所述的清洗设备，其特征在于，所述管路本体的一端为入口端，另一端为封闭设置。
  8. 根据权利要求1所述的清洗设备，其特征在于，所述管路本体包括主管道和多个支管道，多个所述支管道沿所述管路本体的延伸方向间隔设置于所述主管道、并连通于所述主管道，各支管道对应设置一个喷头。
  9. 根据权利要求1所述的清洗设备，其特征在于，所述清洗管路组相对设置在所述载具的两侧。
  10. 根据权利要求1所述的清洗设备，其特征在于，多路所述清洗管路沿上下方向间隔排布。
  11. 根据权利要求1所述的清洗设备，其特征在于，所述移动载具平台还包括滑移机构，所述滑移机构安装于所述箱体，所述载具通过所述滑移机构滑移连接于所述箱体。
  12. 根据权利要求11所述的清洗设备，其特征在于，所述驱动模组包括动力部件以及传动机构，所述传动机构与所述滑移机构连接，所述动力部件与所述传动机构连接，所述动力部件用于驱动所述传动机构以使所述滑移机构带动所述载具。
  13. 根据权利要求1所述的清洗设备，其特征在于，所述清洗设备还包括风扇模组，所述风扇模组安装于所述箱体、并设置为从所述箱体内朝外抽风。
  14. 根据权利要求8所述的清洗设备，其特征在于，所述清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路、第一喷淋管路以及第二 喷淋管路。
  15. 一种清洗系统，其特征在于，所述清洗系统包括根据权利要求1至13中任一项所述的清洗设备。
  16. 根据权利要求15所述的清洗系统，其特征在于，所述清洗系统还包括操作台总成与储液箱组，所述储液箱组与所述清洗管路组相连，所述操作台总成用于控制所述清洗设备作业。
  17. 根据权利要求16所述的清洗系统，其特征在于，所述操作台总成包括：
    机柜；
    控制模块，包括输入单元与控制单元，所述控制单元与所述输入单元信号连接；以及
    泵阀组件，设置于所述机柜内并与所述储液箱组相连；
    其中，所述泵阀组件与驱动模组均与所述控制单元信号连接。
  18. 根据权利要求16所述的清洗系统，其特征在于，所述储液箱组的底部设有液位传感器。
  19. 根据权利要求17所述的清洗系统，其特征在于，
    所述清洗管路的数量为3路、且分别为沿由上而下方向布置的吹气管路、第一喷淋管路以及第二喷淋管路；
    所述储液箱组包括第一储液箱与第二储液箱，所述第一储液箱与所述第一喷淋管路相连、并用于存储第一清洗剂，所述第二储液箱与所述第二喷淋管路相连、并用于存储第二清洗剂。
  20. 一种清洗方法，其特征在于，所述清洗方法根据权利要求19所述的清洗系统来实现，所述第一清洗剂为水，所述清洗方法包括：
    将芯片固定放置在所述载具上；
    向所述输入单元施加启动信号，所述输入单元将所述启动信号传递给所述控制单元；
    所述控制单元控制所述载具将芯片在所述第一喷淋管路对应的喷淋区域和所述第二喷淋管路对应的喷淋区域内往复移动，所述控制单元控制所述泵阀组件从所述第一储液箱和所述第二储液箱交替抽液，以使所述第一喷淋管路和所述第二喷淋管路对芯片进行交替喷淋清洗；
    所述控制单元控制所述载具将芯片再次移动至所述第一喷淋管路对应的喷淋区域内，所述控制单元控制泵阀组件从所述第一储液箱抽液，以使所述第一喷淋管路对芯片进行水喷淋清洗；
    所述控制单元控制所述载具将芯片移动至所述吹气管路对应的吹扫区域内，以完成对芯片的吹扫；
    所述控制单元控制所述载具将清洗后的芯片移出所述清洗管路组的清洗区域。
PCT/CN2022/140941 2022-12-22 2022-12-22 一种清洗设备、清洗系统及清洗方法 Ceased WO2024130624A1 (zh)

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