WO2024111593A1 - 接合方法およびレーザ加工装置 - Google Patents

接合方法およびレーザ加工装置 Download PDF

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Publication number
WO2024111593A1
WO2024111593A1 PCT/JP2023/041861 JP2023041861W WO2024111593A1 WO 2024111593 A1 WO2024111593 A1 WO 2024111593A1 JP 2023041861 W JP2023041861 W JP 2023041861W WO 2024111593 A1 WO2024111593 A1 WO 2024111593A1
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WO
WIPO (PCT)
Prior art keywords
joining
conductive member
laser light
joining method
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/041861
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English (en)
French (fr)
Japanese (ja)
Inventor
慶吾 佐藤
暢康 松本
孝 繁松
諒也 松本
知道 安岡
一輝 高田
淳 寺田
俊明 酒井
和行 梅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP2024560166A priority Critical patent/JPWO2024111593A1/ja
Priority to KR1020257016446A priority patent/KR20250090335A/ko
Priority to EP23894598.4A priority patent/EP4624086A1/en
Publication of WO2024111593A1 publication Critical patent/WO2024111593A1/ja
Priority to US19/213,329 priority patent/US20250276393A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Soldering of electronic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/005—Soldering by means of radiant energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/005—Soldering by means of radiant energy
    • B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits

Definitions

  • the present invention relates to a joining method and a laser processing device.
  • Reflow soldering is known as a method for joining conductors provided on a circuit board to conductive members such as bus bars in order to electrically connect them (see, for example, Patent Documents 1 to 4).
  • the application of reflow soldering may be limited due to the risk of heat adversely affecting the board and components.
  • solder with high strength reliability generally has a high melting point, which further increases the effect of heat, and therefore may further limit the application of reflow soldering.
  • a joining material such as conductive solder that is placed between a conductor and a conductive member is heated and melted by irradiating it with laser light, and then cooled and solidified to obtain a joined state.
  • one of the objectives of the present invention is to provide a new and improved joining method and laser processing device that joins a conductive member and a conductor provided on a circuit board by irradiating a conductive member with laser light, heating and melting a bonding material having conductivity through the thermal conduction of the conductive member, and then cooling and solidifying the molten bonding material, so that it is possible to obtain, for example, a desired bonding state more easily or more reliably in the joining method and laser processing device.
  • the joining method of the present invention includes, for example, a step of melting the joining material by thermal conduction in the joining portion by irradiating a portion of the joining portion opposite the joining material with laser light having a wavelength of 550 nm or less in a state in which a first surface of a conductor provided on a circuit board facing a first direction and a joining portion of a conductive member are aligned in the first direction and a joining material having an electrical conductivity lower than the melting point of the conductor and the conductive member is interposed between the first surface and the joining portion, and a step of solidifying the molten joining material by cooling the joining material, electrically connecting the conductor and the conductive member via the joining material.
  • the wavelength of the laser light may be 400 nm or more.
  • the wavelength of the laser light may be less than 500 nm.
  • the conductive member may be made of a copper-based material.
  • the parts to be joined do not have to be melted by irradiation with the laser light.
  • the joined parts are formed with a molten and solidified part that is melted by irradiation with the laser light in the step of melting the joining material and then solidified in the step of joining the conductor and the conductive member, and the molten and solidified part may be separated from the joining material.
  • the aspect ratio of the depth of the molten and solidified portion in the first direction to the width in a direction intersecting the first direction may be 1 or less.
  • the aspect ratio may be 0.5 or less.
  • the energy of the laser light irradiated in the process of melting the joining material per unit volume of a portion of the joined portion that overlaps with the first surface and the joining material in the first direction may be 1.5 [J/mm 3 ] or more and 12 [J/mm 3 ] or less.
  • the energy of the laser light irradiated in the process of melting the joining material per unit volume of a portion of the joined portion that overlaps with the first surface and the joining material in the first direction may be 2.5 [J/mm 3 ] or more and 7 [J/mm 3 ] or less.
  • the laser light in the step of melting the joining material, may be scanned on a second surface, which is a portion of the joined portion opposite the joining material.
  • the width of the spot of the laser light on the second surface, which is the part of the joined portion opposite the joining material may be 0.5 mm or more.
  • the width of the spot of the laser light on the second surface, which is the part of the joined portion opposite the joining material may be 1 mm or more.
  • the circuit board may be any one of a glass epoxy resin board, a ceramic board, and a metal-based board.
  • the conductive member may be a plate-shaped, rod-shaped, or wire-shaped member.
  • the conductive member may be a foil-like member.
  • gas may be supplied to the parts to be joined during the process of melting the joining material.
  • the conductive member is a foil-like member and has an extension that extends from the joined portion in a second direction that intersects with the first direction and follows the first surface, and in the process of melting the joining material, the gas may be blown in a direction between the opposite direction of the second direction and the opposite direction of the first direction.
  • the joining method of the present invention includes, for example, a step of melting the joining material by irradiating a laser beam having a wavelength of 550 nm or less to a portion of the joining material on the opposite side of the joining material of the joining material or to the joining material, in a state in which a first surface of a conductor provided on a circuit board facing a first direction and a joining portion of a conductive member are aligned in the first direction, and at least a portion of a joining material having an electrical conductivity with a melting point lower than that of the conductor and the conductive member is interposed between the first surface and the joining portion, and a step of solidifying the molten joining material by cooling the joining material, electrically connecting the conductor and the conductive member via the joining material.
  • the laser processing device of the present invention is, for example, a laser processing device in which a first surface of a conductor provided on a circuit board facing a first direction and a joint portion of a conductive member are aligned in the first direction, and a joint material having an electrical conductivity with a melting point lower than that of the conductor and the conductive member is interposed between the first surface and the joint portion, and the laser processing device irradiates a second surface of the joint portion opposite the joint material with laser light having a wavelength of 550 nm or less to melt the joint material by thermal conduction in the joint portion, and includes a laser device that outputs laser light having a wavelength of 550 nm or less, and an optical head that irradiates the second surface with the laser light output from the laser device.
  • a new and improved joining method and laser processing device can be obtained as a joining method for joining a conductive member and a conductor provided on a circuit board by irradiating a conductive member with laser light, heating and melting a bonding material having electrical conductivity through the thermal conduction of the conductive member, and then cooling and solidifying the molten bonding material.
  • FIG. 1 is an exemplary schematic configuration diagram of a laser processing device that performs the joining method of the first embodiment.
  • FIG. 2 is an exemplary schematic plan view of an object to be processed by the joining method of the first embodiment.
  • FIG. 3 is an exemplary flowchart showing the steps of the bonding method according to the embodiment.
  • FIG. 4 is a schematic plan view showing an example of a scanning trajectory of laser light on a surface of an object to be processed in the joining method of the embodiment.
  • FIG. 5 is a schematic plan view showing another example of the scanning trajectory of the laser light on the surface of the processing object in the joining method of the embodiment, different from that in FIG. FIG.
  • FIG. 6 is a schematic plan view showing another example of the scanning trajectory of the laser light on the surface of the processing target in the joining method of the embodiment, different from those in FIGS.
  • FIG. 7 is a schematic plan view showing an example of the shape of a spot of laser light on a surface of an object to be processed in the joining method of the embodiment.
  • FIG. 8 is a schematic plan view showing another example of the shape of a laser light spot on a surface of an object to be processed in the joining method of the embodiment, different from that shown in FIG.
  • FIG. 9 is a schematic plan view showing another example of the shape of a laser beam spot on the surface of the object to be processed in the joining method of the embodiment, different from those shown in FIGS. FIG.
  • FIG. 10 is an explanatory diagram showing an example of a beam profile of laser light on the surface of the object to be processed in the joining method of the embodiment.
  • FIG. 11 is a schematic cross-sectional view showing an example of a portion of a circuit board assembly joined by the joining method of the embodiment.
  • FIG. 12 is a schematic cross-sectional view showing another example of a part of a circuit board assembly joined by the joining method of the embodiment, different from that shown in FIG.
  • FIG. 13 is a graph showing the bonding state depending on the volume of the irradiated portion and the irradiation energy in the bonding method of the embodiment.
  • FIG. 14 is an exemplary schematic configuration diagram of a laser processing device that performs the joining method of the second embodiment.
  • FIG. 15 is an illustrative schematic plan view of an object to be processed by the joining method of the second embodiment.
  • the X direction is represented by an arrow X
  • the Y direction is represented by an arrow Y
  • the Z direction is represented by an arrow Z.
  • the X direction, Y direction, and Z direction intersect with each other and are perpendicular to each other.
  • the Z direction is, for example, the normal direction of the surface (machining surface) of the workpiece W.
  • [Laser processing equipment] 1 is a schematic diagram of a laser processing apparatus 100A (100) according to a first embodiment. As shown in FIG. 1, the laser processing apparatus 100 includes a laser device 110, an optical fiber 130, an optical head 120, and a position adjustment mechanism 140.
  • Laser device 110 has a laser oscillator.
  • laser device 110 has multiple semiconductor laser elements inside and is configured to output multi-mode laser light with a power of several kW as the total output of the multiple semiconductor laser elements.
  • the laser device 110 outputs laser light with a wavelength of, for example, 550 nm or less.
  • the wavelength of the laser light is preferably 400 nm or more and 550 nm or less, and more preferably 400 nm or more and less than 500 nm.
  • the optical fiber 130 guides the laser light output from the laser device 110 to the optical head 120.
  • the optical head 120 is an optical device for irradiating the laser light input from the laser device 110 via the optical fiber 130 toward the workpiece W.
  • the optical head 120 includes a collimator lens 121, a mirror 123, a galvanometer scanner 126, and a focusing lens 122.
  • the collimator lens 121, the mirror 123, the galvanometer scanner 126, and the focusing lens 122 can also be referred to as optical components.
  • Collimating lens 121 collimates the laser light input through optical fiber 130.
  • the collimated laser light becomes parallel light.
  • Mirror 123 reflects the laser light that has been collimated by collimator lens 121.
  • the laser light reflected by mirror 123 travels toward galvano scanner 126. Note that, depending on the layout of the optical components in optical head 120, mirror 123 may not be necessary.
  • the galvanometer scanner 126 has two mirrors 126a and 126b, and is a device that can control the angles of the two mirrors 126a and 126b to move the irradiation position of the laser light L on the surface of the workpiece W and scan the surface with the laser light L.
  • the angles of the mirrors 126a and 126b can each be changed by an actuator (not shown) including a motor, for example.
  • the focusing lens 122 focuses the laser light that has passed through the galvanometer scanner 126 and irradiates the laser light L (output light) onto the workpiece W.
  • the position adjustment mechanism 140 is configured to be able to change the relative position of the optical head 120 with respect to the workpiece W.
  • the laser processing apparatus 100 can scan a spot of laser light L on the surface of the workpiece W by operating at least one of the galvanometer scanner 126 and the position adjustment mechanism 140.
  • the galvanometer scanner 126 and the position adjustment mechanism 140 can also be referred to as a scanning mechanism.
  • the processing object W includes a conductor 12 provided on a circuit board 10, a terminal portion 21 of a conductive member 20, and a bonding material 30. Through a bonding process using the laser processing apparatus 100, the conductor 12 and the terminal portion 21 are integrated with the bonding material 30 to form a circuit board assembly 1.
  • the circuit board assembly 1 includes the circuit board 10 provided with the conductor 12, the conductive member 20 having the terminal portion 21, and the bonding material 30.
  • the terminal portion 21 is an example of a portion to be bonded.
  • the circuit board 10 is, for example, a printed wiring board, and has an insulator 11 and a conductor 12.
  • the insulator 11 is made of, for example, glass epoxy resin. However, the insulator 11 is not limited to this and may be made of other materials.
  • the conductor 12 is made of a material having relatively high conductivity. As an example, the conductor 12 is made of a copper-based metal material such as pure copper or a copper alloy. However, the insulator 11 is not limited to this and may be made of other metal materials.
  • the circuit board 10 is not limited to a glass epoxy resin board, and may be, for example, a ceramic board such as a DCB board (DCB: direct copper bonding) or an AMB board (AMB: active metal brazing), a metal-based board, or another board.
  • a ceramic board such as a DCB board (DCB: direct copper bonding) or an AMB board (AMB: active metal brazing), a metal-based board, or another board.
  • the insulator 11 has a plate-like shape, and intersects with and is perpendicular to the Z direction.
  • the insulator 11 also has a surface 11a and a surface 11b.
  • the surface 11a faces in the opposite direction to the Z direction, and intersects with and is perpendicular to the Z direction.
  • the surface 11b faces in the Z direction, and intersects with and is perpendicular to the Z direction.
  • the conductor 12 is integrated with the insulator 11 and has a surface 12a exposed in the Z direction.
  • Surface 12a faces the Z direction and intersects with and is perpendicular to the Z direction.
  • Surface 12a is approximately flush with surface 11a or protrudes in the Z direction beyond surface 11a.
  • the conductor 12 is not limited to this and may be a semiconductor device such as a switching element mounted on the circuit board 10, or a conductor of an electrical component or electronic component. In this case, surface 12a becomes the surface of the conductor of the semiconductor device, electrical component, or electronic component mounted on the circuit board 10.
  • Surface 12a is an example of a first surface.
  • the conductive member 20A (20) has a terminal portion 21.
  • the terminal portion 21 has a plate-like shape with a substantially constant thickness, and intersects with and is perpendicular to the Z direction.
  • the terminal portion 21 also has a surface 21a and a surface 21b.
  • the surface 21a faces in the opposite direction to the Z direction, and intersects with and is perpendicular to the Z direction.
  • the surface 21b faces in the Z direction, and intersects with and is perpendicular to the Z direction.
  • the conductive member 20 is made of a material that has relatively high electrical conductivity and relatively high thermal conductivity.
  • the conductive member 20 is made of a copper-based metal material such as pure copper or a copper alloy.
  • the conductive member 20 is, for example, a plate-shaped, rod-shaped, or wire-shaped member.
  • the conductive member 20 may also be called a bus bar.
  • the conductive member 20 is not limited to this and may be made of other metal materials or may be a foil-shaped member. Specific examples of the conductive member 20 are terminals, ribbons, power supply lines, lead frames, etc.
  • the bonding material 30 crosses and is perpendicular to the Z direction, and spreads with a substantially constant thickness.
  • the bonding material 30 is at least partially sandwiched between the surface 12a of the conductor 12 and the surface 21a of the terminal portion 21.
  • the conductor 12, the bonding material 30, and the terminal portion 21 are stacked in this order in the Z direction.
  • Surface 21b is the portion of the terminal portion 21 located on the opposite side to the bonding material 30, and is an example of a second surface.
  • the Z direction is an example of a first direction.
  • the joining material 30 is made of a solder material or brazing material that is conductive and has a lower melting point than the conductor 12 and the conductive member 20.
  • the joining material 30 is, for example, a solder material such as solder paste or solder foil. Solder material can also be called a soft brazing material.
  • the joining material 30 is not limited to this, and may be a brazing material other than a solder material, a so-called hard brazing material.
  • the optical head 120 is spaced apart from the surface 21b of the terminal portion 21 in the Z direction, and outputs laser light L toward the surface 21b in the direction substantially opposite the Z direction.
  • the laser light L is irradiated onto the surface 21b of the terminal portion 21.
  • the terminal portion 21 conducts heat generated by the irradiation of the laser light L to the bonding material 30, which melts the bonding material 30.
  • FIG. 2 is a plan view of the workpiece W.
  • the conductor 12, the bonding material 30, and the terminal portion 21 partially overlap in the Z direction.
  • part A of the terminal portion 21 that overlaps with the surface 12a of the conductor 12 and the bonding material 30 in the Z direction is referred to as the irradiated part of the terminal portion 21.
  • the laser light L is irradiated onto the surface 21b of part A.
  • the irradiated part is also an example of the part to be joined.
  • [Joining method procedure] 3 is a flow chart showing the procedure of the bonding method.
  • the circuit board 10, the conductive member 20, and the bonding material 30 are set in the state shown in FIG. 1 and FIG. 2 (S1).
  • the surface 21b of the terminal portion 21 is irradiated with laser light L, and the bonding material 30 is melted by thermal conduction of the terminal portion 21 (S2).
  • the melted bonding material 30 is solidified by natural cooling or forced cooling (S3).
  • the solidified bonding material 30 bonds the conductor 12 and the terminal portion 21, and thus the conductor 12 and the terminal portion 21 are electrically connected.
  • the conductor 12, the bonding material 30, and the conductive member 20 constitute a part of an electrical circuit. It is preferable that the bonding material 30 remains on the conductor 12.
  • the absorptivity of laser light having a wavelength of 550 nm or less, preferably 400 nm or more and 550 nm or less, more preferably 400 nm or more and less than 500 nm, in metal materials is greater than the absorptivity of laser light having a longer wavelength, for example, laser light having a wavelength of 800 nm or more and 1200 nm or less, in metal materials.
  • the absorptivity of the terminal portion 21 is low, so when the power of the laser light is increased to melt the joining material 30, the terminal portion 21 also melts, and there are cases where an inconvenient situation occurs, such as spatter flying from the terminal portion 21. If spatter occurs, there is a risk of problems such as a short circuit occurring in the circuit of the circuit board 10.
  • the surface 21b of the terminal portion 21 is irradiated with laser light L having a wavelength of 550 nm or less, preferably 400 nm or more and 550 nm or less, and more preferably 400 nm or more and less than 500 nm, so that the bonding material 30 can be melted efficiently without causing sputtering or the like.
  • the laser light L may scan the surface 21b.
  • Fig. 4 is a plan view showing an example of a scanning trajectory Pt of a spot of the laser light L on the surface 21b. As shown in Fig. 4, the scanning trajectory Pt may be a substantially circular trajectory.
  • FIG. 5 is a plan view showing an example of a scanning trajectory Pt of the spot of the laser light L on the surface 21b. As shown in Fig. 5, the scanning trajectory Pt may be a trajectory that turns back in a zigzag pattern.
  • FIG. 6 is a plan view showing an example of a scanning locus Pt of the spot of the laser light L on the surface 21b. As shown in Fig. 6, the scanning locus Pt may be a spiral locus.
  • [Spot shape (1)] 7 is a plan view showing an example of the spot S on the surface 21b of the laser light L.
  • the spot S may be a circular spot.
  • the diameter D of the spot S is preferably 0.5 [mm] or more, and more preferably 1 [mm] or more, from the viewpoint of suppressing an excessive increase in the energy density due to the irradiation of the laser light L.
  • the diameter D may also be referred to as the width of the spot S.
  • the diameter D of the spot S may be defined as, for example, the diameter of a region in the spot S having an intensity of 1/e2 or more of the peak intensity.
  • FIG. 8 is a plan view showing an example of the spot S on the surface 21b of the laser light L.
  • the spot S may be a rectangular spot with rounded corners.
  • the width Ws of the spot S in the direction perpendicular to the scanning direction SD is preferably 1 mm or more.
  • [Spot shape (3)] 9 is a plan view showing an example of a spot S on the surface 21b of the laser light L.
  • the laser light may be split into a plurality of beams B by a beam shaper such as a DOE (diffractive optical element), and the laser light L may form a plurality of irradiation areas corresponding to each beam B on the surface 21b.
  • the width Ws of the spot S in the direction perpendicular to the scanning direction SD is preferably 0.5 [mm] or more, and more preferably 1 [mm] or more. Note that the specifications of the shape, arrangement, size, etc. of the spot S are not limited to the examples of FIGS. 7 to 9.
  • Fig. 10 is an explanatory diagram showing an example of a beam profile of the laser light L.
  • the horizontal axis of Fig. 10 indicates the position p on a line that intersects with the Z direction, extends along the surface 21b, and passes through the optical axis Ax, and the vertical axis indicates the intensity I of the laser light.
  • the beam profile of the laser light L has a flat shape (flat-top shape) that does not have a local peak as shown in Fig. 10.
  • U P (Z) ⁇ E FWHM / E max ...
  • ⁇ E FWHM is the full width at half maximum (FWHM) of the peak E max of the energy density histogram N(E i ), and N(E i ) is the number of points (x, y) having energy density plotted.
  • Fig. 11 is a cross-sectional view of a portion of the circuit assembly 1A(1) taken approximately along the Z direction.
  • the terminal portion 21 is not melted by the irradiation of the laser beam L of S2 in Fig. 2, and a trace remains of the heated portion H that was heated by the irradiation of the laser beam L.
  • a molten pool is not formed in the terminal portion 21, so that no spatter is generated from the molten pool of the terminal portion 21 to the surrounding area.
  • Fig. 12 is a cross-sectional view of a portion of the circuit assembly 1B(1) taken approximately along the Z direction.
  • a heated portion H and a melted and solidified portion M that is partially melted and solidified are formed in the terminal portion 21 by irradiation with the laser light L at S2 in Fig. 2.
  • the melted and solidified portion M is a portion that melted at S2 in Fig. 2 and solidified at S3 in Fig. 2.
  • a molten pool is formed at the location that will become the molten and solidified portion M.
  • the molten and solidified portion M does not reach the position where it contacts the joining material 30 from the surface 21b, is separated from the joining material 30, and has a relatively small volume.
  • the inventors' research has confirmed that when the aspect ratio of the molten and solidified portion M, which is the depth Dp (maximum depth) from the surface 21b in the Z direction to the width Wd (maximum width) in the direction intersecting the Z direction, is 1 or less, no spatter that would affect the surrounding circuitry occurs.
  • the aspect ratio is preferably 0.5 or less.
  • FIG. 13 is a graph showing the results of examining the bonding state for a number of samples with various combinations of the volume of the irradiated portion A (see Fig. 2) of the terminal portion 21 and the irradiation energy of the laser light L on the surface 21b.
  • the horizontal axis represents the volume [ mm3 ] of the irradiated portion A
  • the vertical axis represents the irradiation energy [J].
  • the inventors' research has revealed that the bonding strength changes according to the irradiation energy [J/mm 3 ] per unit volume of the irradiated portion A, that is, the slope of the graph in FIG. 13, as shown in FIG. 13. Specifically, when the irradiation energy per unit volume of the irradiated portion A is less than 1.5 [J/mm 3 ], the solder wettability is insufficient, and the required bonding state is not obtained. It has also been revealed that when the irradiation energy per unit volume of the irradiated portion A is 1.5 [J/mm 3 ] or more and 12 [J/mm 3 ] or less, the required bonding state is obtained.
  • the bonding state: good indicates a state in which there is no bonding failure due to insufficient solder wettability or damage to the board due to overheating. Furthermore, when the irradiation energy per unit volume of the irradiated portion A is more than 12 [J/mm 3 ], the terminal portion 21 melts more, sputtering occurs, and the circuit board assembly 1 is damaged due to overheating.
  • the joining material 30 can be melted more efficiently by the thermal conduction of the terminal portion 21 without significantly melting the terminal portion 21, so that, for example, a higher quality and more efficient joining can be achieved in the joining of the conductor 12 and the terminal portion 21 of the conductive member 20 with the joining material 30.
  • FIG. 14 is a schematic diagram of the laser processing apparatus 100B (100) of the second embodiment.
  • the laser processing apparatus 100B includes a laser device 110, an optical fiber 130, an optical head 120, and a position adjustment mechanism 140, similar to the laser processing apparatus 100A of the first embodiment.
  • the laser processing apparatus 100B of this embodiment includes a gas nozzle 150 as a gas supply mechanism for supplying gas G toward the terminal portion 21.
  • the gas G is supplied by both S2 and S3 (FIG. 3) described above.
  • the gas G is, for example, an inert gas such as nitrogen gas, and can suppress burning due to oxidation of the conductive member 20.
  • the gas G can also have the effect of cooling and preventing overheating.
  • FIG. 15 is a plan view of the workpiece W.
  • the conductive member 20B (20) is a foil-like member (metal foil).
  • the conductive member 20B is a member having a thickness of, for example, 0.4 mm or less.
  • the conductive member 20B has a terminal portion 21 and an extension portion 22 extending from the terminal portion 21 in the Y direction.
  • the terminal portion 21 is a joining region that is joined to the conductor 12 via the joining material 30, and the terminal portion 21 and the extension portion 22 extend in the Y direction with a substantially constant width in the X direction.
  • the Y direction is an example of the second direction.
  • the gas nozzle 150 is located away from the terminal portion 21 in the Z direction, for example, as shown in FIG. 14, and is located away from the geometric center C (center of gravity) of the terminal portion 21 in the Y direction in a plan view when viewed in the opposite direction to the Z direction, as shown in FIG. 15.
  • the gas nozzle 150 sprays the gas G in a direction D1 (FIG. 14) between the opposite direction to the Z direction and the opposite direction to the Y direction.
  • the gas G is preferably sprayed toward the geometric center C in a plan view as shown in FIG.
  • the gas G is preferably sprayed toward a position away from the geometric center C in the Y direction, for example, toward the vicinity of the end of the terminal portion 21 in the Y direction, so that the gas G flows approximately along the opposite direction to the Y direction in approximately the entire terminal portion 21.
  • the present invention can be used in joining methods and laser processing devices.
  • Circuit board assembly 10 ... Circuit board 11... Insulator 11a... Surface 11b... Surface 12... Conductor 12a... Surface (first surface) 20, 20A, 20B... Conductive member 21... Terminal portion (joined portion) 21a... surface 21b... surface (second surface, part) 22... Extension portion 30... Bonding material 100, 100A, 100B... Laser processing device 110... Laser device 120... Optical head 121... Collimator lens 122... Condenser lens 123... Mirror 126...
  • Galvano scanner (scanning mechanism) 126a, 126b...mirror 130...optical fiber 140...position adjustment mechanism (scanning mechanism) 150...Gas nozzle (gas supply mechanism)
  • G...gas H Cirated area
  • I...intensity L...laser light M...melted and solidified area p...position
  • Pt...scanning trajectory S...spots S1 to S3...process VP...virtual surface W...processing object Wd...width Ws...width X...direction Y...direction Z...direction (first direction)

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
PCT/JP2023/041861 2022-11-24 2023-11-21 接合方法およびレーザ加工装置 Ceased WO2024111593A1 (ja)

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KR1020257016446A KR20250090335A (ko) 2022-11-24 2023-11-21 접합 방법 및 레이저 가공 장치
EP23894598.4A EP4624086A1 (en) 2022-11-24 2023-11-21 Joining method and laser processing device
US19/213,329 US20250276393A1 (en) 2022-11-24 2025-05-20 Bonding method and laser processing apparatus

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JPH0422591A (ja) * 1990-05-08 1992-01-27 Fuji Electric Co Ltd レーザー半田付け装置
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JP2008254018A (ja) * 2007-04-04 2008-10-23 Olympus Corp レーザ接合装置
JP2009105266A (ja) * 2007-10-24 2009-05-14 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
JP3156732U (ja) 2009-10-29 2010-01-14 柏友照明科技股▲フン▼有限公司 リフローによる半田付けが可能で且つ放熱効果を高めるｌｅｄのパッケージ構造
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JP2020072208A (ja) * 2018-11-01 2020-05-07 三菱電機株式会社 半導体装置、電力変換装置及び半導体装置の製造方法
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