Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
  • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
  • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/20—Exposure; Apparatus therefor

Definitions

• the present invention relates to an actinic ray-sensitive or radiation-sensitive resin composition, an actinic ray-sensitive or radiation-sensitive film, a pattern forming method, and an electronic device manufacturing method. More specifically, the present invention relates to an ultra-microlithography process applicable to the manufacturing process of ultra-LSI (Large Scale Integration) and high-capacity microchips, the manufacturing process of nanoimprint molds, the manufacturing process of high-density information recording media, etc. The present invention relates to actinic ray-sensitive or radiation-sensitive resin compositions, actinic ray-sensitive or radiation-sensitive films, pattern forming methods, and electronic device manufacturing methods that can be suitably used in other photofabrication processes.
• ultra-microlithography process applicable to the manufacturing process of ultra-LSI (Large Scale Integration) and high-capacity microchips, the manufacturing process of nanoimprint molds, the manufacturing process of high-density information recording media, etc.
• the present invention relates to actinic ray-sensitive or radiation
• Patent Documents 1 and 2 describe resist compositions containing a sulfonium salt having a specific structure.
• LWR performance refers to the ability to reduce the LWR of a pattern.
• a resist composition may be stored for a certain period of time after being prepared, it is desired that the resist composition has excellent LWR performance even when pattern formation is performed after being stored for a certain period of time.
• the LWR performance of the resist composition immediately after preparation is also called “initial LWR performance,” and the LWR performance of the resist composition after a certain period of time has passed after preparation is also called “LWR performance after aging.”
• an object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition that is excellent in resolution, initial LWR performance, and LWR performance after aging.
• the present invention also provides an actinic ray-sensitive or radiation-sensitive film formed using the above-mentioned actinic ray-sensitive or radiation-sensitive resin composition, and a pattern using the above-mentioned actinic ray-sensitive or radiation-sensitive resin composition.
• An object of the present invention is to provide a method for forming an electronic device and a method for manufacturing an electronic device.
• An actinic ray-sensitive or radiation-sensitive resin composition containing a resin (P) whose polarity increases when decomposed by the action of an acid, and a compound represented by the following formula (Z-1).
• Ar 1 , Ar 2 and Ar 3 each independently represent an aromatic ring. At least two of Ar 1 , Ar 2 and Ar 3 are bonded through a single bond or through at least one divalent group selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and an alkylene group. may be combined with each other.
• R Z1 , R Z2 and R Z3 each independently represent an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkyloxy group, an aryl group, a heteroaryl group, an aryloxy group or a heteroaryloxy group.
• n1, n2 and n3 each independently represent an integer of 2 to 5.
• a plurality of R Z1 , R Z2 and R Z3 may be the same or different from each other, and may be bonded to each other to form a ring. However, at least one of the plurality of R Z1 , R Z2 and R Z3 represents a group other than an alkyl group.
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is.
• R a1 , R a2 and R a3 each independently represent a halogen atom.
• k1, k2 and k3 each independently represent an integer from 0 to 3.
• n1+k1, n2+k2, and n3+k3 are each independently integers from 2 to 5.
• X ⁇ represents an anion.
• R Z1 , R Z2 and R Z3 in the above formula (Z-1) represents an alkyl group, the alkyl group is an unsubstituted alkyl group, or an alkoxy group as a substituent
• a X1 represents COO - or SO 3 - .
• Ar 4 represents an aromatic ring.
• R X1 represents a substituent.
• k4 represents an integer from 0 to 7. When k4 is 2 or more, a plurality of R X1s may be the same or different from each other. When k4 is 2 or more, a plurality of R X1s may be bonded to each other to form a ring.
• the actinic ray-sensitive or radiation-sensitive resin composition according to any one of [1] to [6], wherein the resin (P) contains a repeating unit represented by the following formula (Pa1).
• R b1 represents a hydrogen atom or an alkyl group.
• r represents an integer from 0 to 2.
• p represents an integer from 1 to 5.
• R p1 represents -OR p2 or -COOR p3 .
• R p2 and R p3 each independently represent a group that is eliminated by the action of an acid.
• q represents an integer from 0 to (5+2 ⁇ rp).
• R b2 represents a hydroxyl group, a halogen atom, an alkyl group, an alkoxy group, an alkylthio group, an aryl group, a heteroaryl group, an aryloxy group, a heteroaryloxy group, an ester group, or a carboxy group.
• p 2 or more
• a plurality of R p1s may be the same or different from each other, or may be bonded to each other to form a ring.
• q is 2 or more
• a plurality of R b2s may be the same or different from each other, or may be bonded to each other to form a ring.
• R Z4 , R Z5 and R Z6 are each independently an unsubstituted alkyl group, an alkyl group having an alkoxy group, a hydroxy group or an ester group as a substituent, or a cycloalkyl group. Or represents an alkoxy group.
• n4, n5 and n6 each independently represent an integer of 2 to 5.
• a plurality of R Z4 , R Z5 and R Z6 may be the same or different, and may be bonded to each other to form a ring. However, at least one of the plurality of R Z4 , R Z5 and R Z6 represents an alkoxy group.
• R Z4 , R Z5 and R Z6 represent an alkoxy group
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is.
• X ⁇ represents an anion.
• a pattern forming method comprising the steps of: exposing a radiation-sensitive film; and developing the exposed actinic ray-sensitive or radiation-sensitive film using a developer.
• a method for manufacturing an electronic device comprising the pattern forming method according to [10].
• the present invention it is possible to provide an actinic ray-sensitive or radiation-sensitive resin composition that is excellent in resolution, initial LWR performance, and LWR performance after aging. Further, the present invention can provide an actinic ray-sensitive or radiation-sensitive film, a pattern forming method, and an electronic device manufacturing method using the above-mentioned actinic ray-sensitive or radiation-sensitive resin composition.
• active rays or “radiation” include, for example, the bright line spectrum of a mercury lamp, far ultraviolet rays typified by excimer lasers, extreme ultraviolet (EUV), X-rays, soft X-rays, and electron It means a line (EB: Electron Beam) or the like.
• light means actinic rays or radiation.
• exposure refers not only to exposure to the bright line spectrum of a mercury lamp, far ultraviolet rays typified by excimer lasers, extreme ultraviolet rays, X-rays, and EUV, but also to electron beams and ion beams, unless otherwise specified. It also includes drawing using particle beams such as beams.
• " ⁇ " is used to include the numerical values described before and after it as a lower limit value and an upper limit value.
• (meth)acrylate represents at least one of acrylate and methacrylate.
• (meth)acrylic acid represents at least one of acrylic acid and methacrylic acid.
• the weight average molecular weight (Mw), number average molecular weight (Mn), and degree of dispersion (also referred to as molecular weight distribution) (Mw/Mn) of the resin are determined using a GPC (Gel Permeation Chromatography) apparatus (HLC manufactured by Tosoh Corporation).
• GPC Gel Permeation Chromatography
• the notation that does not indicate substituted or unsubstituted includes a group containing a substituent as well as a group having no substituent.
• alkyl group includes not only an alkyl group without a substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
• organic group refers to a group containing at least one carbon atom.
• monovalent substituents are preferred. Examples of the substituent include monovalent nonmetallic atomic groups excluding hydrogen atoms, and can be selected from the following substituents T, for example.
• substituent T examples include halogen atoms such as fluorine, chlorine, bromine and iodine; alkoxy groups such as methoxy, ethoxy and tert-butoxy; cycloalkyloxy; phenoxy and p-tolyloxy groups; Aryloxy groups; alkoxycarbonyl groups such as methoxycarbonyl and butoxycarbonyl groups; cycloalkyloxycarbonyl groups; aryloxycarbonyl groups such as phenoxycarbonyl groups; acyloxy groups such as acetoxy, propionyloxy and benzoyloxy groups; acetyl Acyl groups such as benzoyl, isobutyryl, acryloyl, methacryloyl and methoxalyl groups; sulfanyl groups; alkylsulfanyl groups such as methylsulfanyl and tert-butylsulfanyl groups; phenylsulfanyl groups; alkyls
• substituent T when these substituents can further have one or more substituents, the further substituent is a group having one or more substituents selected from the above-mentioned substituents (for example, a monoalkylamino group). , dialkylamino group, arylamino group, trifluoromethyl group, etc.) are also included as examples of the substituent T.
• the direction of bonding of the divalent groups described is not limited unless otherwise specified.
• Y in the compound represented by the formula "X-Y-Z" is -COO-
• Y may be -CO-O- or -O-CO- Good too.
• the above compound may be "X-CO-O-Z" or "X-O-CO-Z”.
• acid dissociation constant refers to pKa in an aqueous solution, and specifically, it is a value based on Hammett's substituent constant and a database of known literature values using the following software package 1. is the value obtained by calculation. All pKa values described herein are values calculated using this software package.
• Software package 1 Advanced Chemistry Development (ACD/Labs) Software V8.14 for Solaris (1994-2007 ACD/Labs).
• pKa can also be determined by molecular orbital calculation method.
• a specific method for this includes a method of calculating H 2 + dissociation free energy in an aqueous solution based on a thermodynamic cycle.
• the H + dissociation free energy can be calculated, for example, by DFT (density functional theory), but various other methods have been reported in the literature, and the method is not limited to this. .
• DFT density functional theory
• there is a plurality of software that can perform DFT and one example is Gaussian 16.
• pKa refers to a value obtained by calculating a value based on Hammett's substituent constant and a database of known literature values using software package 1, as described above. If calculation is not possible, a value obtained by Gaussian 16 based on DFT (density functional theory) is used.
• pKa refers to "pKa in aqueous solution” as described above, but if pKa in aqueous solution cannot be calculated, “pKa in dimethyl sulfoxide (DMSO) solution” is adopted. shall be.
• solid content means a component that forms an actinic ray-sensitive or radiation-sensitive film, and does not include a solvent. Furthermore, if the component forms an actinic ray-sensitive or radiation-sensitive film, it is considered to be a solid content even if the component is liquid.
• the actinic ray-sensitive or radiation-sensitive resin composition of the present invention (also referred to as “composition of the present invention”) is This is an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (P) whose polarity increases when decomposed by the action of an acid, and a compound represented by the following formula (Z-1).
• Ar 1 , Ar 2 and Ar 3 each independently represent an aromatic ring. At least two of Ar 1 , Ar 2 and Ar 3 are bonded via a single bond or through at least one divalent group selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and an alkylene group. may be combined with each other.
• R Z1 , R Z2 and R Z3 each independently represent an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkyloxy group, an aryl group, a heteroaryl group, an aryloxy group or a heteroaryloxy group.
• n1, n2 and n3 each independently represent an integer from 2 to 5.
• a plurality of R Z1 , R Z2 and R Z3 may be the same or different, and may be bonded to each other to form a ring. However, at least one of the plurality of R Z1 , R Z2 and R Z3 represents a group other than an alkyl group.
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is.
• R a1 , R a2 and R a3 each independently represent a halogen atom.
• k1, k2 and k3 each independently represent an integer from 0 to 3.
• n1+k1, n2+k2, and n3+k3 are each independently integers from 2 to 5.
• X ⁇ represents an anion.
• the compound represented by formula (Z-1) has a substituent that satisfies specific conditions and easily interacts with the resin (P), so it has high compatibility with the resin (P). As a result, it is considered that the uniformity of the material in the actinic ray-sensitive or radiation-sensitive resin composition was improved, and the resolution, initial LWR performance, and LWR performance after time were improved.
• the composition of the present invention is typically a resist composition, and may be a positive resist composition or a negative resist composition.
• the composition of the present invention may be a resist composition for alkaline development or an organic solvent development resist composition.
• the composition of the present invention may be a chemically amplified resist composition or a non-chemically amplified resist composition.
• the composition of the present invention is typically a chemically amplified resist composition.
• Actinic ray-sensitive or radiation-sensitive films can be formed using the composition of the present invention.
• the actinic ray-sensitive or radiation-sensitive film formed using the composition of the present invention is typically a resist film.
• the resin (P) contained in the composition of the present invention is a resin (acid-decomposable resin) that decomposes and increases in polarity under the action of an acid.
• the resin (P) preferably has a group (acid-decomposable group) that is decomposed by the action of an acid and increases in polarity, and more preferably contains a repeating unit having an acid-decomposable group.
• An acid-decomposable group is typically a group that decomposes under the action of an acid to produce a polar group.
• the acid-decomposable group preferably has a structure in which a polar group is protected by a group that leaves by the action of an acid (leaving group).
• the polarity of the resin (P) increases due to the action of an acid, so that its solubility in an alkaline developer increases and its solubility in an organic solvent decreases.
• the resin (P) is an acid-decomposable resin, and when an alkaline developer is typically used as a developer in the pattern forming method using the composition of the present invention, a positive pattern is preferable. When an organic developer is used as the developer, a negative pattern is suitably formed.
• An acid-decomposable group is a group that decomposes and increases in polarity under the action of an acid.
• An acid-decomposable group is typically a group that decomposes under the action of an acid to produce a polar group.
• the acid-decomposable group preferably has a structure in which a polar group is protected by a group that leaves by the action of an acid (leaving group).
• the polarity of the resin (P) increases due to the action of an acid, so that its solubility in an alkaline developer increases and its solubility in an organic solvent decreases.
• the above polar group is preferably an alkali-soluble group, such as a carboxy group, phenolic hydroxyl group, fluorinated alcohol group, sulfonic acid group, phosphoric acid group, sulfonamide group, sulfonylimide group, (alkylsulfonyl) (alkylcarbonyl) Methylene group, (alkylsulfonyl)(alkylcarbonyl)imide group, bis(alkylcarbonyl)methylene group, bis(alkylcarbonyl)imide group, bis(alkylsulfonyl)methylene group, bis(alkylsulfonyl)imide group, tris(alkylcarbonyl) ) methylene group, acidic groups such as tris(alkylsulfonyl)methylene groups, and alcoholic hydroxyl groups.
• alkali-soluble group such as a carboxy group, phenolic hydroxyl group, fluorinated alcohol group,
• Examples of the leaving group that leaves by the action of an acid include groups represented by formulas (Y1) to (Y4).
• Formula (Y1) -C(Rx 1 )(Rx 2 )(Rx 3 )
• Formula (Y3) -C(R 36 )(R 37 )(OR 38 )
• Rx 1 to Rx 3 each independently represent an alkyl group (linear or branched chain), a cycloalkyl group (monocyclic or polycyclic), an aryl group (monocyclic or polycyclic), an aralkyl group (linear or branched), or an alkenyl group (linear or branched). Note that when all of Rx 1 to Rx 3 are alkyl groups (linear or branched), it is preferable that at least two of Rx 1 to Rx 3 are methyl groups.
• Rx 1 to Rx 3 each independently represent a linear or branched alkyl group, and Rx 1 to Rx 3 each independently represent a linear alkyl group. is more preferable.
• Two of Rx 1 to Rx 3 may be bonded to each other to form a ring (which may be monocyclic or polycyclic).
• the alkyl group for Rx 1 to Rx 3 is preferably an alkyl group having 1 to 5 carbon atoms, such as a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, or t-butyl group.
• Examples of the cycloalkyl group for Rx 1 to Rx 3 include monocyclic cycloalkyl groups such as cyclopentyl group and cyclohexyl group, and polycyclic groups such as norbornyl group, tetracyclodecanyl group, tetracyclododecanyl group, and adamantyl group.
• a cycloalkyl group is preferred.
• the aryl group for Rx 1 to Rx 3 is preferably an aryl group having 6 to 10 carbon atoms, such as a phenyl group, a naphthyl group, an anthryl group, and the like.
• the aralkyl group of Rx 1 to Rx 3 is preferably a group in which one hydrogen atom in the alkyl group of Rx 1 to Rx 3 described above is substituted with an aryl group having 6 to 10 carbon atoms (preferably a phenyl group), For example, a benzyl group and the like can be mentioned.
• a benzyl group and the like can be mentioned.
• the alkenyl group for Rx 1 to Rx 3 a vinyl group is preferred.
• the ring formed by bonding two of Rx 1 to Rx 3 is preferably a cycloalkyl group.
• the cycloalkyl group formed by combining two of Rx 1 to Rx 3 is a cyclopentyl group or a monocyclic cycloalkyl group such as a cyclohexyl group, or a norbornyl group, a tetracyclodecanyl group, or a tetracyclododecanyl group. or a polycyclic cycloalkyl group such as an adamantyl group, and a monocyclic cycloalkyl group having 5 to 6 carbon atoms is more preferable.
• the cycloalkyl group formed by bonding two of Rx 1 to Rx 3 is, for example, a group in which one of the methylene groups constituting the ring has a hetero atom such as an oxygen atom, a hetero atom such as a carbonyl group, or a group in which one of the methylene groups constituting the ring has a hetero atom such as a carbonyl group, or May be substituted with a group. Further, in these cycloalkyl groups, one or more of the ethylene groups constituting the cycloalkane ring may be replaced with a vinylene group.
• the group represented by formula (Y1) or formula (Y2) is, for example, an embodiment in which Rx 1 is a methyl group or an ethyl group, and Rx 2 and Rx 3 are bonded to form the above-mentioned cycloalkyl group. is preferred.
• R 36 to R 38 each independently represent a hydrogen atom or a monovalent organic group.
• R 37 and R 38 may be combined with each other to form a ring.
• monovalent organic groups include alkyl groups, cycloalkyl groups, aryl groups, aralkyl groups, and alkenyl groups. It is also preferable that R 36 is a hydrogen atom. Note that the above alkyl group, cycloalkyl group, aryl group, and aralkyl group may contain a group having a hetero atom such as an oxygen atom and/or a hetero atom such as a carbonyl group.
• one or more methylene groups are replaced with a group having a hetero atom such as an oxygen atom and/or a hetero atom such as a carbonyl group.
• R 38 may be bonded to another substituent in the main chain of the repeating unit to form a ring.
• the group formed by bonding R 38 and another substituent of the main chain of the repeating unit to each other is preferably an alkylene group such as a methylene group.
• Ar represents an aromatic ring group.
• Rn represents an alkyl group, a cycloalkyl group, or an aryl group.
• Rn and Ar may be bonded to each other to form a non-aromatic ring.
• Ar is more preferably an aryl group.
• the resin (P) contains a repeating unit represented by the following formula (Pa1) because it is particularly excellent in resolution, initial LWR performance, and LWR performance after aging.
• the repeating unit represented by the following formula (Pa1) is a repeating unit having an acid-decomposable group.
• R b1 represents a hydrogen atom or an alkyl group.
• r represents an integer from 0 to 2.
• p represents an integer from 1 to 5.
• R p1 represents -OR p2 or -COOR p3 .
• R p2 and R p3 each independently represent a group that is eliminated by the action of an acid.
• q represents an integer from 0 to (5+2 ⁇ rp).
• R b2 represents a hydroxyl group, a halogen atom, an alkyl group, an alkoxy group, an alkylthio group, an aryl group, a heteroaryl group, an aryloxy group, a heteroaryloxy group, an ester group, or a carboxy group.
• p 2 or more
• a plurality of R p1s may be the same or different from each other, or may be bonded to each other to form a ring.
• q is 2 or more
• a plurality of R b2s may be the same or different from each other, or may be bonded to each other to form a ring.
• the alkyl group represented by R b1 may be linear or branched.
• the alkyl group is preferably an alkyl group having 1 to 5 carbon atoms such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, and t-butyl group.
• the alkyl group may have a substituent.
• R b1 is preferably a hydrogen atom or a methyl group.
• r represents an integer from 0 to 2, preferably represents 0 or 1, and more preferably represents 0.
• the aromatic ring in formula (Pa1) represents a benzene ring.
• the aromatic ring in formula (Pa1) represents a naphthalene ring.
• the aromatic ring in formula (Pa1) represents an anthracene ring.
• p represents an integer of 1 to 5, preferably an integer of 1 to 3, and more preferably 1.
• R p1 represents -OR p2 or -COOR p3 .
• R p2 and R p3 each independently represent a group that is eliminated by the action of an acid.
• Examples of the groups R p2 and R p3 that are eliminated by the action of an acid include the groups represented by the aforementioned formulas (Y1) to (Y4).
• R p2 a hydroxy group (phenolic hydroxyl group) is generated in formula (Pa1).
• R p3 a carboxyl group is generated in formula (Pa1).
• q represents an integer of 0 to (5+2 ⁇ rp), preferably an integer of 0 to 5, more preferably an integer of 0 to 3, even more preferably 0 or 1, 0 It is particularly preferable to represent
• R b2 represents a hydroxyl group, a halogen atom, an alkyl group, an alkoxy group, an alkylthio group, an aryl group, a heteroaryl group, an aryloxy group, a heteroaryloxy group, an ester group, or a carboxy group.
• the halogen atom for R b2 is preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.
• the alkyl group for R b2 may be either linear or branched.
• the number of carbon atoms in the alkyl group is not particularly limited, but is preferably from 1 to 10, more preferably from 1 to 5, particularly preferably from 1 to 3.
• alkyl group examples include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, and t-butyl group.
• the description, specific examples, and preferred ranges of the alkyl group contained in the alkoxy group and alkylthio group of R b2 are the same as the description, specific examples, and preferred range of the alkyl group of R b2 above.
• the aryl group of R b2 is preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 15 carbon atoms, even more preferably a phenyl group or a naphthyl group, and a phenyl group It is particularly preferable that Specific examples and preferred ranges of the aryl group contained in the aryloxy group of R b2 are the same as the specific examples and preferred range of the aryl group of R b2 above.
• the heteroaryl group for R b2 is preferably a heteroaryl group having 3 to 20 carbon atoms.
• the heteroaryl group preferably contains at least one heteroatom selected from the group consisting of oxygen, sulfur, and nitrogen atoms.
• heteroaryl group examples include pyrrole residue, furan residue, thiophene residue, indole residue, benzofuran residue, and benzothiophene residue.
• Specific examples and preferred ranges of the heteroaryl group contained in the heteroaryloxy group of R b2 are the same as the specific examples and preferred range of the heteroaryl group of R b2 above.
• the ester group of R b2 is preferably -COOR b3 or -OCOR b3 .
• R b3 represents an organic group, preferably an alkyl group or an aryl group.
• the explanation, specific examples, and preferred range of the alkyl group of R b3 are the same as the explanation, specific examples, and preferred range of the alkyl group of R b2 above.
• the specific examples and preferred ranges of the aryl group for R b3 are the same as the specific examples and preferred ranges for the aryl group for R b2 above.
• the content of the repeating unit having an acid-decomposable group is preferably 5 mol% or more, more preferably 10 mol% or more, and even more preferably 15 mol% or more, based on all the repeating units in the resin (P). Further, the content of the repeating unit having an acid-decomposable group is preferably 70 mol% or less, more preferably 60 mol% or less, and even more preferably 50 mol% or less, based on all the repeating units in the resin (P). .
• the number of repeating units having an acid-decomposable group contained in the resin (P) may be one type or two or more types.
• the resin (P) contains two or more types of repeating units having acid-decomposable groups, the total content thereof is preferably within the above-mentioned preferred content range.
• the resin (P) preferably contains a repeating unit having a phenolic hydroxyl group because it is particularly excellent in resolution, initial LWR performance, and LWR performance after aging.
• the repeating unit having a phenolic hydroxyl group is preferably a repeating unit different from the above-mentioned repeating unit having an acid-decomposable group.
• the repeating unit having a phenolic hydroxyl group is preferably a repeating unit represented by the following formula (Pa2).
• R 101 , R 102 and R 103 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group or an alkoxycarbonyl group.
• R 102 may combine with Ar A to form a ring, in which case R 102 represents a single bond or an alkylene group.
• L A represents a single bond or a divalent linking group.
• Ar A represents an aromatic ring group.
• k represents an integer from 1 to 5.
• R 101 , R 102 and R 103 in formula (Pa2) each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group or an alkoxycarbonyl group.
• the alkyl groups of R 101 , R 102 and R 103 may be either linear or branched.
• the number of carbon atoms in the alkyl group is not particularly limited, but is preferably from 1 to 10, more preferably from 1 to 5, particularly preferably from 1 to 3.
• Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, and t-butyl group.
• the number of carbon atoms in the cycloalkyl group of R 101 , R 102 and R 103 is not particularly limited, but is preferably from 3 to 20, more preferably from 5 to 15.
• Examples of the cycloalkyl group for R 101 , R 102 and R 103 include monocyclic cycloalkyl groups such as a cyclopentyl group and a cyclohexyl group, a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group.
• a polycyclic cycloalkyl group is preferred.
• halogen atom for R 101 , R 102 and R 103 examples include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom or an iodine atom being preferred.
• the alkyl group contained in the alkoxycarbonyl group of R 101 , R 102 and R 103 may be either linear or branched.
• the number of carbon atoms in the alkyl group contained in the alkoxycarbonyl group is not particularly limited, but is preferably 1 to 5, more preferably 1 to 3.
• Ar A in formula (Pa2) represents an aromatic ring group, more specifically represents a (k+1)-valent aromatic ring group.
• the divalent aromatic ring group when k is 1 is, for example, an arylene group having 6 to 18 carbon atoms such as a phenylene group, tolylene group, naphthylene group, anthracenylene group, or a thiophene ring, a furan ring, a pyrrole ring,
• a divalent aromatic ring group containing a hetero ring such as a benzothiophene ring, a benzofuran ring, a benzopyrrole ring, a triazine ring, an imidazole ring, a benzimidazole ring, a triazole ring, a thiadiazole ring, and a thiazole ring is preferred.
• the above aromatic ring group may have a substituent.
• Specific examples of (k+1)-valent aromatic ring groups when k is an integer of 2 or more include (k-1) arbitrary hydrogen atoms removed from the above-mentioned specific examples of divalent aromatic ring groups. The following groups are mentioned.
• the (k+1)-valent aromatic ring group may further have a substituent.
• Substituents that the (k+1)-valent aromatic ring group may have are not particularly limited, but include, for example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, hexyl group, - Alkyl groups such as ethylhexyl, octyl and dodecyl; alkoxy groups such as methoxy, ethoxy, hydroxyethoxy, propoxy, hydroxypropoxy and butoxy; aryl groups such as phenyl; and the like.
• Ar A preferably represents an aromatic ring group having 6 to 18 carbon atoms, and more preferably represents a benzene ring group, a naphthalene ring group, or a biphenylene ring group.
• LA in formula (Pa2) represents a single bond or a divalent linking group.
• the divalent linking group represented by L A is not particularly limited, but includes, for example, -COO-, -CONR 104 -, an alkylene group, or a combination of two or more of these groups.
• R 104 represents a hydrogen atom or an alkyl group.
• the alkylene group is not particularly limited, but alkylene groups having 1 to 8 carbon atoms such as methylene group, ethylene group, propylene group, butylene group, hexylene group, and octylene group are preferable.
• R 104 represents an alkyl group
• examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, hexyl group, 2-ethylhexyl group, octyl group, and dodecyl group.
• Examples include alkyl groups having 20 or less carbon atoms, such as groups, and alkyl groups having 8 or less carbon atoms are preferred.
• the repeating unit represented by formula (Pa2) preferably has a hydroxystyrene structure. That is, it is preferable that Ar A represents a benzene ring group. k preferably represents an integer of 1 to 3, more preferably 1 or 2.
• the content of the repeating unit having a phenolic hydroxyl group in the resin (P) is not particularly limited, but is preferably 20 mol% or more, and 30 mol% or more based on the total repeating units in the resin (P). It is more preferable that the amount is 40 mol% or more. Further, the content of repeating units having a phenolic hydroxyl group is preferably 90 mol% or less, more preferably 85 mol% or less, and 80 mol% or less based on the total repeating units in the resin (P). It is more preferable that it is the following.
• the number of repeating units having a phenolic hydroxyl group contained in the resin (P) may be one type or two or more types.
• the resin (P) contains two or more types of repeating units having a phenolic hydroxyl group, the total content thereof is preferably within the above-mentioned preferred content range.
• the resin (P) may contain other repeating units.
• the contents of [0112] to [0172] of International Publication No. 2022/024928 are cited.
• the resin (P) can be synthesized by conventional methods (eg, radical polymerization).
• the weight average molecular weight (Mw) of the resin (P) is preferably 30,000 or less, more preferably 1,000 to 30,000, even more preferably 3,000 to 30,000, and particularly preferably 5,000 to 15,000 as a polystyrene equivalent value determined by GPC method.
• the degree of dispersion (molecular weight distribution, Pd, Mw/Mn) of the resin (P) is preferably 1 to 5, more preferably 1 to 3, even more preferably 1.0 to 3.0, and 1.1 to 2.0. is particularly preferred. The smaller the degree of dispersion, the better the resolution and resist shape, the smoother the sidewalls of the resist pattern, and the better the roughness.
• the content of the resin (P) is preferably 40.0 to 99.9% by mass, and 60.0 to 90.0% by mass, based on the total solid content of the composition of the present invention. is more preferable.
• the resin (P) may be used alone or in combination of two or more. When using two or more types of resins (P), it is preferable that their total content is within the above-mentioned preferred content range.
• the compound represented by formula (Z-1) is preferably a compound that generates an acid upon irradiation with actinic rays or radiation.
• the pKa of the acid generated by the compound represented by formula (Z-1) upon irradiation with actinic rays or radiation (generated acid) is not particularly limited. When the pKa of the generated acid is less than 0, the compound represented by formula (Z-1) can function as a photoacid generator. When the pKa of the generated acid is 0 or more, the compound represented by formula (Z-1) can function as an acid diffusion control agent.
• Ar 1 , Ar 2 and Ar 3 each independently represent an aromatic ring. At least two of Ar 1 , Ar 2 and Ar 3 are bonded via a single bond or through at least one divalent group selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and an alkylene group. may be combined with each other.
• R Z1 , R Z2 and R Z3 each independently represent an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkyloxy group, an aryl group, a heteroaryl group, an aryloxy group or a heteroaryloxy group.
• n1, n2 and n3 each independently represent an integer from 2 to 5.
• a plurality of R Z1 , R Z2 and R Z3 may be the same or different, and may be bonded to each other to form a ring. However, at least one of the plurality of R Z1 , R Z2 and R Z3 represents a group other than an alkyl group.
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is.
• R a1 , R a2 and R a3 each independently represent a halogen atom.
• k1, k2 and k3 each independently represent an integer from 0 to 3.
• n1+k1, n2+k2, and n3+k3 are each independently integers from 2 to 5.
• X ⁇ represents an anion.
• the aromatic ring represented by Ar 1 , Ar 2 and Ar 3 may be an aromatic hydrocarbon ring or an aromatic heterocycle.
• the number of ring carbon atoms in the aromatic hydrocarbon ring is preferably 6 to 20, more preferably 6 to 15.
• the aromatic hydrocarbon ring is preferably a benzene ring or a naphthalene ring, and more preferably a benzene ring.
• the number of ring members of the aromatic heterocycle is preferably 4 to 20, more preferably 5 to 10.
• the aromatic heterocycle preferably contains at least one of a nitrogen atom and an oxygen atom.
• aromatic heterocycles include five-membered aromatic heterocycles such as pyrrole ring, imidazole ring, pyrazole ring, oxazole ring, isoxazole ring, thiazole ring, isothiazole ring, and triazole ring, pyridine ring, pyrazine ring, Examples include six-membered aromatic heterocycles such as a pyrimidine ring, a pyridazine ring, a triazine ring, a thiazine ring, and an oxazine ring.
• Ar 1 , Ar 2 and Ar 3 represent an aromatic hydrocarbon ring.
• At least two of Ar 1 , Ar 2 and Ar 3 are bonded via a single bond or through at least one divalent group selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and an alkylene group. may be combined with each other.
• a nitrogen atom-containing group -NR- is preferred.
• R represents a hydrogen atom or an alkyl group (preferably an alkyl group having 1 to 5 carbon atoms).
• the alkylene group is preferably an alkylene group having 1 to 5 carbon atoms.
• R Z1 , R Z2 and R Z3 each independently represent an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkyloxy group, an aryl group, a heteroaryl group, an aryloxy group or a heteroaryloxy group.
• the alkyl groups of R Z1 , R Z2 and R Z3 may be either linear or branched.
• the number of carbon atoms in the alkyl group is not particularly limited, but is preferably from 1 to 10, more preferably from 1 to 5, particularly preferably from 1 to 3.
• the alkyl group may have a substituent. Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, and trifluoromethyl group.
• the explanation, specific examples, and preferred ranges of the alkyl group contained in the alkoxy group of R Z1 , R Z2 and R Z3 are the same as those of the alkyl group of R Z1 , R Z2 and R Z3 above.
• the cycloalkyl groups of R Z1 , R Z2 and R Z3 may be monocyclic or polycyclic.
• the number of carbon atoms in the cycloalkyl group is preferably 3 to 20, more preferably 4 to 15.
• Examples of the cycloalkyl group include a cyclopentyl group, a cyclohexyl group, a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group.
• the cycloalkyl group may have a substituent.
• One of the methylene groups constituting the cycloalkane ring of the cycloalkyl group may be replaced with a hetero atom such as an oxygen atom, a group having a hetero atom such as a carbonyl group and an ester bond, or a vinylidene group. Further, in the cycloalkyl group, one or more of the ethylene groups constituting the cycloalkane ring may be replaced with a vinylene group.
• the explanation, specific examples and preferred ranges of the cycloalkyl group contained in the cycloalkyloxy group of R Z1 , R Z2 and R Z3 are the same as the cycloalkyl group of R Z1 , R Z2 and R Z3 above.
• the aryl group of R Z1 , R Z2 and R Z3 is preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 15 carbon atoms, and is a phenyl group or a naphthyl group. is more preferable, and phenyl group is particularly preferable.
• the aryl group may have a substituent.
• the heteroaryl groups R Z1 , R Z2 and R Z3 are preferably heteroaryl groups having 3 to 20 carbon atoms.
• the heteroaryl group preferably contains at least one heteroatom selected from the group consisting of oxygen, sulfur, and nitrogen atoms. Examples of the heteroaryl group include pyrrole residue, furan residue, thiophene residue, indole residue, benzofuran residue, and benzothiophene residue.
• the heteroaryl group may have a substituent.
• the explanation, specific examples and preferred ranges of the heteroaryl group contained in the heteroaryloxy group of R Z1 , R Z2 and R Z3 are the same as the aryl group of R Z1 , R Z2 and R Z3 above.
• At least one of the plurality of R Z1 , R Z2 and R Z3 represents a group other than an alkyl group. That is, at least one of n1 R Z1 , n2 R Z2 and n3 R Z3 represents a group other than an alkyl group.
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is. That is, when two or more of n1 R Z1 , n2 R Z2 and n3 R Z3 represent an alkoxy group, the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary It is a primary alkyl group or a secondary alkyl group.
• the primary alkyl group include ethyl group, n-propyl group, n-butyl group, and the like.
• the secondary alkyl group include isopropyl group and isobutyl group.
• the alkyl group is an unsubstituted alkyl group, or Preferably, the alkyl group has an alkoxy group, a hydroxy group, or an ester group as a substituent.
• the explanation, specific examples, and preferred ranges of the alkyl group contained in the alkoxy group as a substituent are the same as those for the alkyl groups of R Z1 , R Z2 and R Z3 above.
• the explanation, specific examples, and preferred range of the ester group as a substituent are the same as those for the ester group of R b2 in the above formula (Pa1).
• R Z1 , R Z2 and R Z3 each independently represent an unsubstituted alkyl group, an alkyl group having an alkoxy group, a hydroxy group or an ester group as a substituent, a cycloalkyl group or an alkoxy group. .
• n1, n2 and n3 each independently represent an integer of 2 to 5, preferably an integer of 2 to 4, more preferably 2 or 3.
• R a1 , R a2 and R a3 each independently represent a halogen atom, preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.
• k1, k2 and k3 each independently represent an integer from 0 to 3, preferably 0 or 1.
• n1+k1, n2+k2, and n3+k3 are each independently an integer of 2 to 5, preferably an integer of 2 to 4, and more preferably 2 or 3.
• X ⁇ in formula (Z-1) represents an anion.
• anions include sulfonic acid anions (aliphatic sulfonic acid anions, aromatic sulfonic acid anions, camphor sulfonic acid anions, etc.), carboxylic acid anions (aliphatic carboxylic acid anions, aromatic carboxylic acid anions, aralkyl carboxylic acid anions, etc.) ), sulfonylimide anion, bis(alkylsulfonyl)imide anion, tris(alkylsulfonyl)methide anion, and the like.
• the aliphatic moiety in the aliphatic sulfonic acid anion and the aliphatic carboxylic acid anion may be a linear or branched alkyl group, or a cycloalkyl group, and may be a linear or branched alkyl group having 1 to 30 carbon atoms. Alternatively, a branched alkyl group or a cycloalkyl group having 3 to 30 carbon atoms is preferable.
• the alkyl group may be, for example, a fluoroalkyl group (which may have a substituent other than a fluorine atom and may be a perfluoroalkyl group).
• the aryl group in the aromatic sulfonic acid anion and the aromatic carboxylic acid anion is preferably an aryl group having 6 to 14 carbon atoms, such as a phenyl group, a tolyl group, and a naphthyl group.
• alkyl group, cycloalkyl group, and aryl group listed above may have a substituent.
• Substituents are not particularly limited, but include, for example, nitro groups, halogen atoms such as fluorine atoms and chlorine atoms, carboxy groups, hydroxyl groups, amino groups, cyano groups, alkoxy groups (preferably having 1 to 15 carbon atoms), alkyl groups ( (preferably has 1 to 10 carbon atoms), cycloalkyl group (preferably has 3 to 15 carbon atoms), aryl group (preferably has 6 to 14 carbon atoms), alkoxycarbonyl group (preferably has 2 to 7 carbon atoms), acyl group (preferably has 2 to 7 carbon atoms), (preferably has 2 to 12 carbon atoms), alkoxycarbonyloxy group (preferably has 2 to 7 carbon atoms), alkylthio group (preferably has 1 to 15 carbon atoms), alkylsulfonyl group (preferably has 1 to 15 carbon atoms), alky
• the aralkyl group in the aralkylcarboxylic acid anion is preferably an aralkyl group having 7 to 14 carbon atoms.
• Examples of the aralkyl group having 7 to 14 carbon atoms include benzyl group, phenethyl group, naphthylmethyl group, naphthylethyl group, and naphthylbutyl group.
• Examples of the sulfonylimide anion include saccharin anion.
• the alkyl group in the bis(alkylsulfonyl)imide anion and tris(alkylsulfonyl)methide anion is preferably an alkyl group having 1 to 5 carbon atoms.
• Substituents for these alkyl groups include halogen atoms, alkyl groups substituted with halogen atoms, alkoxy groups, alkylthio groups, alkyloxysulfonyl groups, aryloxysulfonyl groups, and cycloalkylaryloxysulfonyl groups, A fluorine atom or an alkyl group substituted with a fluorine atom is preferred.
• the alkyl groups in the bis(alkylsulfonyl)imide anion may be bonded to each other to form a ring structure. This increases the acid strength.
• anions include, for example, fluorinated phosphorus (eg, PF 6 ⁇ ), fluorinated boron (eg, BF 4 ⁇ ), and fluorinated antimony (eg, SbF 6 ⁇ ).
• the pKa of the conjugate acid of X is preferably -1.5 or more, more preferably -1.0 or more. . Further, the pKa of the conjugate acid of X - is preferably -0.1 or less, more preferably -0.5 or less.
• the pKa of the conjugate acid of X - is preferably 1.0 or more, more preferably 2.0 or more. Further, the pKa of the conjugate acid of X - is preferably 10 or less, more preferably 9 or less.
• X ⁇ is preferably a sulfonic acid anion or a carboxylic acid anion.
• X ⁇ is preferably an anion represented by the following formula (xa1).
• a X1 represents COO - or SO 3 - .
• Ar 4 represents an aromatic ring.
• R X1 represents a substituent.
• k4 represents an integer from 0 to 7. When k4 is 2 or more, a plurality of R X1s may be the same or different from each other. When k4 is 2 or more, a plurality of R X1s may be bonded to each other to form a ring.
• the aromatic ring represented by Ar 4 may be an aromatic hydrocarbon ring or an aromatic heterocycle.
• the number of ring carbon atoms in the aromatic hydrocarbon ring is preferably 6 to 20, more preferably 6 to 15.
• the aromatic hydrocarbon ring is preferably a benzene ring or a naphthalene ring, and more preferably a benzene ring.
• the number of ring members of the aromatic heterocycle is preferably 4 to 20, more preferably 5 to 10.
• the aromatic heterocycle preferably contains at least one of a sulfur atom, a nitrogen atom, and an oxygen atom.
• aromatic heterocycles include five-membered aromatic heterocycles such as pyrrole ring, imidazole ring, pyrazole ring, oxazole ring, isoxazole ring, thiazole ring, isothiazole ring, triazole, furan ring, and thiophene ring, and pyridine.
• aromatic heterocycles include six-membered aromatic heterocycles such as ring, pyrazine ring, pyrimidine ring, pyridazine ring, triazine ring, thiazine ring, and oxazine ring.
• the substituent represented by R X1 is not particularly limited, but includes, for example, the above-mentioned substituent T, and a hydroxy group, a carboxy group, an alkyl group, an alkoxy group, a cycloalkyl group, and a halogen atom are preferred.
• k4 represents an integer of 0 to 7, preferably an integer of 0 to 5, and more preferably an integer of 0 to 3.
• the compound represented by the formula (Z-1) is preferably a compound represented by the following formula (Z-2) because the resolution is further improved.
• R Z4 , R Z5 and R Z6 are each independently an unsubstituted alkyl group, an alkyl group having an alkoxy group, a hydroxy group or an ester group as a substituent, or a cycloalkyl group. Or represents an alkoxy group.
• n4, n5 and n6 each independently represent an integer of 2 to 5.
• a plurality of R Z4 , R Z5 and R Z6 may be the same or different, and may be bonded to each other to form a ring. However, at least one of the plurality of R Z4 , R Z5 and R Z6 represents an alkoxy group.
• R Z4 , R Z5 and R Z6 represent an alkoxy group
• the alkyl group contained in at least one of the alkoxy groups is a methyl group, a primary alkyl group or a secondary alkyl group. It is.
• X ⁇ represents an anion.
• each group represented by R Z4 , R Z5 and R Z6 are the same as those for R Z1 , R Z2 and R Z3 above.
• at least one of the plurality of R Z4 , R Z5 and R Z6 represents an alkoxy group. That is, at least one of n4 R Z4 , n5 R Z5 and n6 R Z6 represents an alkoxy group.
• n4, n5 and n6 each independently represent an integer of 2 to 5, preferably represent an integer of 2 to 4, and more preferably represent 2 or 3.
• X ⁇ in formula (Z-2) represents an anion.
• the explanation, specific examples, and preferred range of X ⁇ are the same as those for X ⁇ in formula (Z-1) above.
• the composition of the present invention preferably contains a compound (A) that generates an acid having a pKa of less than 0 upon irradiation with actinic rays or radiation.
• the pKa of the acid generated from compound (A) upon irradiation with actinic rays or radiation is preferably -0.1 or less, more preferably -0.5 or less.
• the pKa of the acid generated from the compound (A) upon irradiation with actinic rays or radiation is preferably -1.5 or more, more preferably -1.0 or more.
• Compound (A) may be a compound represented by formula (Z-1), or may be a compound different from the compound represented by formula (Z-1).
• Compound (A) may be in the form of a low molecular weight compound or may be incorporated into a part of the polymer. Further, a form of a low molecular compound and a form incorporated into a part of a polymer may be used together.
• the molecular weight of compound (A) is preferably 3000 or less, more preferably 2000 or less, even more preferably 1000 or less. The lower limit is not particularly limited, but is preferably 100 or more.
• the compound (A) is incorporated into a part of the polymer, it may be incorporated into a part of the resin (P), or may be incorporated into a resin different from the resin (P).
• Compound (A) is preferably in the form of a low molecular weight compound.
• Examples of the compound (A) include a compound represented by "M + X - " (onium salt), and preferably a compound that generates an organic acid upon exposure to light.
• Examples of the organic acids include sulfonic acids (aliphatic sulfonic acids, aromatic sulfonic acids, camphorsulfonic acids, etc.), carboxylic acids (aliphatic carboxylic acids, aromatic carboxylic acids, aralkylcarboxylic acids, etc.), carbonylsulfonylimide acid, bis(alkylsulfonyl)imidic acid, and tris(alkylsulfonyl)methide acid.
• sulfonic acids aliphatic sulfonic acids, aromatic sulfonic acids, camphorsulfonic acids, etc.
• carboxylic acids aliphatic carboxylic acids, aromatic carboxylic acids, aralkylcarboxylic acids, etc.
• carbonylsulfonylimide acid bis(al
• M + represents an organic cation.
• organic cation include a cation represented by formula (ZaI) (hereinafter also referred to as “cation (ZaI)”), or a cation represented by formula (ZaII) (hereinafter also referred to as “cation (ZaII)”). is preferred.
• R 201 , R 202 , and R 203 each independently represent an organic group.
• the number of carbon atoms in the organic groups of R 201 , R 202 , and R 203 is preferably 1 to 30, more preferably 1 to 20.
• Two of R 201 to R 203 may be combined to form a ring structure, and the ring may contain an oxygen atom, a sulfur atom, an ester group, an amide group, or a carbonyl group.
• Examples of the group formed by combining two of R 201 to R 203 include an alkylene group (for example, a butylene group and a pentylene group), and -CH 2 -CH 2 -O-CH 2 -CH 2 -. Can be mentioned.
• the organic groups of R 201 , R 202 , and R 203 are preferably an alkyl group, a cycloalkyl group, an aryl group, or a heteroaryl group.
• the alkyl group may be either linear or branched.
• the number of carbon atoms in the alkyl group is not particularly limited, but is preferably from 1 to 10, more preferably from 1 to 5.
• Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, and t-butyl group.
• the number of carbon atoms in the cycloalkyl group is not particularly limited, but is preferably from 3 to 20, more preferably from 5 to 15.
• cycloalkyl group monocyclic cycloalkyl groups such as cyclopentyl group and cyclohexyl group, and polycyclic cycloalkyl groups such as norbornyl group, tetracyclodecanyl group, tetracyclododecanyl group, and adamantyl group are preferable.
• the aryl group is preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 15 carbon atoms, even more preferably a phenyl group or a naphthyl group, and preferably a phenyl group. is particularly preferred.
• the heteroaryl group is preferably a heteroaryl group having 3 to 20 carbon atoms.
• the heteroaryl group preferably contains at least one heteroatom selected from the group consisting of oxygen, sulfur, and nitrogen atoms.
• Examples of the heteroaryl group include pyrrole residue, furan residue, thiophene residue, indole residue, benzofuran residue, and benzothiophene residue.
• R 204 and R 205 each independently represent an aryl group, an alkyl group, or a cycloalkyl group.
• the aryl group for R 204 and R 205 is preferably a phenyl group or a naphthyl group, and more preferably a phenyl group.
• the aryl group of R 204 and R 205 may be an aryl group having a heterocycle having an oxygen atom, a nitrogen atom, a sulfur atom, or the like. Examples of the skeleton of the aryl group having a heterocycle include pyrrole, furan, thiophene, indole, benzofuran, and benzothiophene.
• the alkyl group and cycloalkyl group of R 204 and R 205 include a linear alkyl group having 1 to 10 carbon atoms or a branched alkyl group having 3 to 10 carbon atoms (for example, a methyl group, an ethyl group, a propyl group, butyl group, pentyl group), or a cycloalkyl group having 3 to 10 carbon atoms (eg, cyclopentyl group, cyclohexyl group, or norbornyl group).
• the aryl group, alkyl group, and cycloalkyl group of R 204 and R 205 may each independently have a substituent.
• substituents that the aryl group, alkyl group, and cycloalkyl group of R 204 and R 205 may have include an alkyl group (e.g., carbon number 1 to 15), a cycloalkyl group (e.g., carbon number 3 to 15), an aryl group (eg, carbon number 6 to 15), an alkoxy group (eg, carbon number 1 to 15), a halogen atom, a hydroxyl group, and a phenylthio group.
• the substituents of R 204 and R 205 each independently form an acid-decomposable group using any combination of substituents.
• X - represents an anion.
• the explanation, specific examples, and preferred range of X ⁇ are the same as those for X ⁇ in formula (Z-1) above.
• Compound (A) may be at least one selected from the group consisting of compounds (I) to (II) below.
• Compound (I) is a compound having one or more of the following structural moieties X and one or more of the following structural moieties Y, and the following first acidic acid derived from the following structural moiety This is a compound that generates an acid containing the following second acidic site derived from the structural site Y below.
• Structural site X A structural site consisting of an anionic site A 1 - and a cationic site M 1 + , and which forms a first acidic site represented by HA 1 by irradiation with actinic rays or radiation
• Structural site Y Anionic site A structural site consisting of A 2 ⁇ and a cationic site M 2 + and forming a second acidic site represented by HA 2 by irradiation with actinic rays or radiation
• the above compound (I) satisfies the following condition I .
• a compound PI obtained by replacing the cation moiety M 1 + in the structural moiety X and the cation moiety M 2 + in the structural moiety Y with H + in the compound (I) is The acid dissociation constant a1 derived from the acidic site represented by HA 1 is obtained by replacing the cationic site M 1 + with H + , and the acid dissociation constant a1 derived from the acidic site represented by HA 1 is obtained by replacing the cationic site M 2 + in the structural site Y with H + It has an acid dissociation constant a2 derived from the acidic site represented by HA 2 , and the acid dissociation constant a2 is larger than the acid dissociation constant a1. At least one of the acid dissociation constants a1 is less than 0.
• compound (I) is, for example, an acid-generating compound having one of the first acidic sites derived from the structural site X and one of the second acidic sites derived from the structural site Y.
• compound PI corresponds to "a compound having HA 1 and HA 2 ".
• the acid dissociation constant a1 and the acid dissociation constant a2 of the compound PI are defined as, when the acid dissociation constant of the compound PI is determined, the compound PI is a "compound having A 1 - and HA 2 ".
• compound (I) is, for example, an acid-generating compound having two of the first acidic sites derived from the structural site X and one of the second acidic sites derived from the structural site Y.
• compound PI corresponds to "a compound having two HA 1 and one HA 2 ".
• the acid dissociation constant when a compound having one HA 1 and one HA 2 becomes a compound having two A 1 - and one HA 2 corresponds to the acid dissociation constant a1 described above. .
• the acid dissociation constant when "a compound having two A 1 - and one HA 2 " becomes "a compound having two A 1 - and A 2 - " corresponds to the acid dissociation constant a2.
• compound PI when it has a plurality of acid dissociation constants derived from the acidic site represented by HA 1 , which is obtained by replacing the cation site M 1 + in the structural site X with H + , it has a plurality of acid dissociation constants.
• the value of acid dissociation constant a2 is larger than the largest value of a1.
• the acid dissociation constant when compound PI becomes "a compound having one A 1 - , one HA 1 , and one HA 2 " is aa
• ab is the acid dissociation constant when a compound with one HA 2 becomes a compound with two A 1 - and one HA 2 , the relationship between aa and ab satisfies aa ⁇ ab. .
• the acid dissociation constant a1 and the acid dissociation constant a2 are determined by the acid dissociation constant measurement method described above.
• the above-mentioned compound PI corresponds to an acid generated when compound (I) is irradiated with actinic rays or radiation.
• the structural sites X may be the same or different.
• two or more of the above A 1 ⁇ and two or more of the above M 1 + may be the same or different.
• the above A 1 - and the above A 2 - , and the above M 1 + and the above M 2 + may be the same or different, but the above A 1 - and the above A 2 - are preferably different from each other.
• Compound (II) is a compound having two or more of the above structural moieties It is a compound that generates an acid containing two or more sites and the above structural site Z.
• Structural site Z nonionic site capable of neutralizing acids
• compound (II) is, for example, an acid-generating compound having two of the first acidic sites derived from the structural site X and the structural site Z
• the compound PII is a compound having two HA 1 Compounds”
• the acid dissociation constant when compound PII becomes "a compound having one A 1 - and one HA 1 " and "one A 1 - and one HA 1" are determined.
• the acid dissociation constant when a "compound having 1 " becomes "a compound having two A 1 - " corresponds to the acid dissociation constant a1.
• the acid dissociation constant a1 is determined by the acid dissociation constant measurement method described above. At least one of the acid dissociation constants a1 is less than 0.
• the above-mentioned compound PII corresponds to an acid generated when compound (II) is irradiated with actinic rays or radiation.
• the two or more structural sites X may be the same or different.
• the two or more A 1 ⁇ and the two or more M 1 + may be the same or different.
• the nonionic site that can neutralize the acid in the structural site Z is not particularly limited, and for example, it must be a site that contains a group that can electrostatically interact with protons or a functional group that has electrons. is preferred.
• the group capable of electrostatic interaction with protons or the functional group having electrons is a functional group having a macrocyclic structure such as a cyclic polyether, or a functional group having a lone pair of electrons that does not contribute to ⁇ conjugation. Examples include functional groups having a nitrogen atom.
• a nitrogen atom having a lone pair of electrons that does not contribute to ⁇ conjugation is, for example, a nitrogen atom having a partial structure shown in the following formula.
• Examples of partial structures of functional groups having groups or electrons that can electrostatically interact with protons include crown ether structures, aza crown ether structures, primary to tertiary amine structures, pyridine structures, imidazole structures, and pyrazine structures. Among these, primary to tertiary amine structures are preferred.
• the content of compound (A) in the composition of the present invention is preferably 1.0% by mass or more, more preferably 3.0% by mass or more, based on the total solid content of the composition of the present invention.5. More preferably, it is 0% by mass or more.
• the content of compound (A) is preferably 30.0% by mass or less, more preferably 25.0% by mass or less, and even more preferably 20.0% by mass or less, based on the total solid content of the composition of the present invention. .
• Compound (A) may be used alone or in combination of two or more. When two or more types are used, it is preferable that the total content is within the range of the above-mentioned preferred content.
• the composition of the present invention preferably contains an acid diffusion control agent (B).
• the acid diffusion control agent (B) acts as a quencher that traps the acid generated from, for example, the compound (A) during exposure and suppresses the reaction of the acid-decomposable resin in the unexposed area due to the excess generated acid. do.
• the type of acid diffusion control agent (B) is not particularly limited, and examples thereof include a basic compound (BA), a low molecular compound (BB) having a nitrogen atom and a group that is eliminated by the action of an acid, and an active compound. Examples include compounds (BC) whose ability to control acid diffusion decreases or disappears when irradiated with light or radiation.
• the compound (BC) includes, for example, an onium salt compound (BD) of an acid that becomes a weak acid relative to the acid generated from the compound (A), etc., and an acid onium salt compound (BD) whose basicity decreases or disappears by irradiation with actinic rays or radiation.
• Examples include basic compounds (BE).
• Specific examples of basic compounds (BA) include those described in paragraphs [0132] to [0136] of International Publication No. 2020/066824; Specific examples of basic compounds (BE) that disappear include those described in paragraphs [0137] to [0155] of International Publication No. 2020/066824, and those described in paragraph [0164] of International Publication No. 2020/066824.
• low molecular weight compounds (BB) having a nitrogen atom and a group that is eliminated by the action of an acid include paragraphs [0156] to [0163] of International Publication No. 2020/066824. Examples include those described in .
• an onium salt compound (BD) that is a relatively weak acid with respect to the acid generated from compound (A), etc. see paragraphs [0305] to [0314] of International Publication No. 2020/158337. Examples include those listed below.
• the acid diffusion control agent (B) is preferably a compound that generates an acid having a pKa of 0 or more upon irradiation with actinic rays or radiation.
• the acid diffusion control agent (B) may be a compound represented by formula (Z-1), or may be a compound different from the compound represented by formula (Z-1).
• the content of the acid diffusion control agent (B) in the composition of the present invention is preferably 3.0% by mass or more, more preferably 5.0% by mass or more, based on the total solid content of the composition of the present invention. , more preferably 10.0% by mass or more.
• the content of compound (A) is preferably 50.0% by mass or less, more preferably 40.0% by mass or less, and even more preferably 30.0% by mass or less, based on the total solid content of the composition of the present invention. .
• the acid diffusion control agent (B) may be used alone or in combination of two or more. When two or more types are used, it is preferable that the total content is within the above-mentioned preferred content range.
• the composition of the present invention may further contain a hydrophobic resin (also referred to as "resin (T)”) different from resin (P).
• the hydrophobic resin is preferably designed so that it is unevenly distributed on the surface of the resist film, but unlike a surfactant, it does not necessarily have to have a hydrophilic group in the molecule, and it is necessary to uniformly mix polar and non-polar substances. does not have to contribute to
• the hydrophobic resin preferably has at least one of a fluorine atom, a silicon atom, and a CH 3 partial structure contained in the side chain portion of the resin, and two or more of them are preferred. It is more preferable to have the above.
• the hydrophobic resin preferably has a hydrocarbon group having 5 or more carbon atoms. These groups may be present in the main chain of the resin or may be substituted on the side chains. Examples of the hydrophobic resin include compounds described in paragraphs [0275] to [0279] of International Publication No. 2020/004306.
• the content of the hydrophobic resin is preferably 0.01 to 20.0% by mass, and 0.1 to 20.0% by mass, based on the total solid content of the composition of the present invention. 15.0% by mass is more preferred.
• the hydrophobic resins may be used alone or in combination of two or more. When two or more types are used, it is preferable that the total content is within the above-mentioned preferred content range.
• the composition of the invention may also contain a surfactant.
• a surfactant When a surfactant is included, a pattern with better adhesion and fewer development defects can be formed.
• the surfactant is preferably a fluorine-based and/or silicon-based surfactant. Examples of the fluorine-based and/or silicon-based surfactants include the surfactants disclosed in paragraphs [0218] and [0219] of International Publication No. 2018/193954.
• the content of the surfactant is preferably 0.0001 to 2.0% by mass, and 0.0005 to 2.0% by mass, based on the total solid content of the composition of the present invention. It is more preferably 1.0% by mass, and even more preferably 0.1 to 1.0% by mass.
• One kind of surfactant may be used, or two or more kinds of surfactants may be used. When two or more types are used, it is preferable that the total content is within the above-mentioned preferred content range.
• the composition of the present invention contains a solvent.
• the solvent consists of (M1) propylene glycol monoalkyl ether carboxylate, and (M2) propylene glycol monoalkyl ether, lactic acid ester, acetate ester, alkoxypropionic acid ester, chain ketone, cyclic ketone, lactone, and alkylene carbonate. It is preferable that at least one selected from the group is included. Note that the above solvent may further contain components other than components (M1) and (M2).
• the above-mentioned solvent and the above-mentioned resin are combined from the viewpoint of improving the coating properties of the composition of the present invention and reducing the number of pattern development defects. Since the above-mentioned solvent has a good balance between the solubility, boiling point, and viscosity of the above-mentioned resin, it is possible to suppress unevenness in the thickness of the resist film and the generation of precipitates during spin coating. Details of component (M1) and component (M2) are described in paragraphs [0218] to [0226] of International Publication No. 2020/004306, the contents of which are incorporated herein.
• the content of components other than components (M1) and (M2) is preferably 5 to 30% by mass based on the total amount of the solvent.
• the content of the solvent in the composition of the present invention is preferably determined so that the solid content concentration is 0.5 to 30% by mass, more preferably 1 to 20% by mass. In this way, the applicability of the composition of the present invention can be further improved.
• the composition of the present invention includes a dissolution inhibiting compound, a dye, a plasticizer, a photosensitizer, a light absorber, and/or a compound that promotes solubility in a developer (for example, a phenol compound having a molecular weight of 1000 or less, or It may further contain an alicyclic or aliphatic compound containing a carboxyl group.
• a dissolution inhibiting compound for example, a phenol compound having a molecular weight of 1000 or less, or It may further contain an alicyclic or aliphatic compound containing a carboxyl group.
• dissolution-inhibiting compound is a compound with a molecular weight of 3000 or less that decomposes under the action of an acid and reduces its solubility in an organic developer.
• the invention also relates to actinic- or radiation-sensitive films formed with the compositions of the invention.
• the actinic ray-sensitive or radiation-sensitive film of the present invention is preferably a resist film.
• the invention also relates to a patterning method.
• the pattern forming method of the present invention includes a step of forming an actinic ray-sensitive or radiation-sensitive film (typically a resist film) on a substrate using the composition of the present invention; It is preferable that the pattern forming method has the steps of exposing the film to light and developing the exposed actinic ray-sensitive or radiation-sensitive film using a developer.
• Step 1 Step of forming a resist film on a substrate using the composition of the present invention
• Step 2 Step of exposing the resist film
• Step 3 Step of developing the exposed resist film using a developer
• Step 1 is a step of forming a resist film on a substrate using the composition of the present invention.
• Examples of the method for forming a resist film on a substrate using the composition of the present invention include a method of applying the composition of the present invention onto a substrate.
• the pore size of the filter is preferably 0.1 ⁇ m or less, more preferably 0.05 ⁇ m or less, and even more preferably 0.03 ⁇ m or less.
• the filter is preferably made of polytetrafluoroethylene, polyethylene, or nylon.
• compositions of the present invention can be applied by any suitable application method, such as a spinner or coater, onto substrates (eg, silicon, silicon dioxide coated) such as those used in the manufacture of integrated circuit devices.
• the coating method is preferably spin coating using a spinner.
• the rotation speed during spin coating using a spinner is preferably 1000 to 3000 rpm (rotations per minute).
• the substrate may be dried to form a resist film. Note that, if necessary, various base films (inorganic film, organic film, antireflection film) may be formed under the resist film.
• drying method examples include a method of drying by heating. Heating can be carried out using a means provided in an ordinary exposure machine and/or developing machine, and may also be carried out using a hot plate or the like.
• the heating temperature is preferably 80 to 150°C, more preferably 80 to 140°C, even more preferably 80 to 130°C.
• the heating time is preferably 30 to 1000 seconds, more preferably 60 to 800 seconds, even more preferably 60 to 600 seconds.
• the thickness of the resist film is not particularly limited, but is preferably 10 to 120 nm from the standpoint of forming fine patterns with higher precision. Among these, in the case of EUV exposure, the thickness of the resist film is more preferably 10 to 65 nm, and even more preferably 15 to 50 nm. In the case of ArF immersion exposure, the thickness of the resist film is more preferably 10 to 120 nm, and even more preferably 15 to 90 nm.
• a top coat may be formed on the upper layer of the resist film using a top coat composition. It is preferable that the top coat composition is not mixed with the resist film and can be uniformly applied to the upper layer of the resist film.
• the top coat is not particularly limited, and a conventionally known top coat can be formed by a conventionally known method. Can be formed. For example, it is preferable to form a top coat containing a basic compound as described in JP-A-2013-61648 on the resist film. Specific examples of basic compounds that may be included in the top coat include basic compounds that may be included in the composition of the present invention.
• the top coat contains a compound containing at least one group or bond selected from the group consisting of an ether bond, a thioether bond, a hydroxyl group, a thiol group, a carbonyl bond, and an ester bond.
• Step 2 is a step of exposing the resist film.
• the exposure method include a method of irradiating the formed resist film with actinic rays or radiation through a predetermined mask.
• active light or radiation include infrared light, visible light, ultraviolet light, far ultraviolet light, extreme ultraviolet light, X-rays, and electron beams, preferably 250 nm or less, more preferably 220 nm or less, and 1 to 200 nm.
• Particularly preferred are deep ultraviolet light of wavelengths, specifically KrF excimer laser (248 nm), ArF excimer laser (193 nm), F 2 excimer laser (157 nm), EUV (13.5 nm), X-rays, and electron beams.
• the heating temperature is preferably 80 to 150°C, more preferably 80 to 140°C, even more preferably 80 to 130°C.
• the heating time is preferably 10 to 1000 seconds, more preferably 10 to 180 seconds, and even more preferably 30 to 120 seconds. Heating can be carried out using means provided in a normal exposure machine and/or developing machine, and may be carried out using a hot plate or the like. This step is also called post-exposure bake.
• Step 3 is a step of developing the exposed resist film using a developer to form a pattern.
• the developer may be an alkaline developer or a developer containing an organic solvent (hereinafter also referred to as an organic developer).
• Development methods include, for example, a method in which the substrate is immersed in a tank filled with a developer for a certain period of time (dip method), a method in which the developer is raised on the surface of the substrate by surface tension and left to stand for a certain period of time (paddle method). method), a method in which the developer is sprayed onto the surface of the substrate (spray method), and a method in which the developer is continuously discharged while scanning a developer discharge nozzle at a constant speed onto a rotating substrate (dynamic dispensing method). ). Furthermore, after the step of developing, a step of stopping the development may be carried out while substituting another solvent.
• the development time is not particularly limited as long as the resin in the unexposed areas is sufficiently dissolved, and is preferably 10 to 300 seconds, more preferably 20 to 120 seconds.
• the temperature of the developer is preferably 0 to 50°C, more preferably 15 to 35°C.
• alkaline developer it is preferable to use an alkaline aqueous solution containing an alkali.
• the type of alkaline aqueous solution is not particularly limited, but examples include quaternary ammonium salts represented by tetramethylammonium hydroxide, inorganic alkalis, primary amines, secondary amines, tertiary amines, alcohol amines, or cyclic amines. Examples include alkaline aqueous solutions containing.
• the alkaline developer is preferably an aqueous solution of a quaternary ammonium salt typified by tetramethylammonium hydroxide (TMAH). Appropriate amounts of alcohols, surfactants, etc. may be added to the alkaline developer.
• the alkaline concentration of the alkaline developer is usually preferably 0.1 to 20% by mass.
• the pH of the alkaline developer is usually preferably 10.0 to 15.0.
• the organic developer is a developer containing at least one organic solvent selected from the group consisting of ketone solvents, ester solvents, alcohol solvents, amide solvents, ether solvents, and hydrocarbon solvents. It is preferable that there be.
• a plurality of the above-mentioned solvents may be mixed together, or may be mixed with a solvent other than the above-mentioned ones or water.
• the water content of the developer as a whole is preferably less than 50% by mass, more preferably less than 20% by mass, even more preferably less than 10% by mass, and particularly preferably substantially free of water.
• the content of the organic solvent in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 80% by mass or more and 100% by mass or less, and 90% by mass or more and 100% by mass, based on the total amount of the developer. The following is more preferable, and 95% by mass or more and 100% by mass or less is particularly preferable.
• the pattern forming method includes a step of cleaning using a rinsing liquid after step 3.
• Examples of the rinsing solution used in the rinsing step after the step of developing using an alkaline developer include pure water. Note that an appropriate amount of a surfactant may be added to the pure water. An appropriate amount of surfactant may be added to the rinse solution.
• the rinsing solution used in the rinsing step after the development step using an organic developer is not particularly limited as long as it does not dissolve the pattern, and solutions containing common organic solvents can be used.
• the rinsing liquid should contain at least one organic solvent selected from the group consisting of hydrocarbon solvents, ketone solvents, ester solvents, alcohol solvents, amide solvents, and ether solvents. is preferred.
• the method of the rinsing process is not particularly limited, and examples include a method in which the rinsing liquid is continuously discharged onto the substrate rotating at a constant speed (rotary coating method), and a method in which the substrate is immersed in a tank filled with the rinsing liquid for a certain period of time. (dip method) and a method of spraying a rinsing liquid onto the substrate surface (spray method).
• the pattern forming method may include a heating step (Post Bake) after the rinsing step. In this step, the developer and rinse solution remaining between patterns and inside the patterns due to baking are removed. This step also has the effect of smoothing the resist pattern and improving surface roughness of the pattern.
• the heating step after the rinsing step is usually carried out at 40 to 250°C (preferably 90 to 200°C) for 10 seconds to 3 minutes (preferably 30 seconds to 120 seconds).
• the substrate may be etched using the formed pattern as a mask. That is, the pattern formed in step 3 may be used as a mask to process the substrate (or the lower film and the substrate) to form a pattern on the substrate.
• the method of processing the substrate (or the lower layer film and the substrate) is not particularly limited, but by performing dry etching on the substrate (or the lower layer film and the substrate) using the pattern formed in step 3 as a mask, the substrate is processed.
• a method of forming a pattern is preferred.
• the dry etching is preferably oxygen plasma etching.
• composition of the present invention and various materials used in the pattern forming method do not contain impurities such as metals. It is preferable not to include it.
• the content of impurities contained in these materials is preferably 1 mass ppm (parts per million) or less, more preferably 10 mass ppb (parts per billion) or less, even more preferably 100 mass ppt (parts per trillion) or less, and 10 mass ppm (parts per million) or less.
• a mass ppt or less is particularly preferred, and a mass ppt or less is most preferred.
• the lower limit is not particularly limited, and is preferably 0 mass ppt or more.
• metal impurities include Na, K, Ca, Fe, Cu, Mg, Al, Li, Cr, Ni, Sn, Ag, As, Au, Ba, Cd, Co, Pb, Ti, V, Examples include W and Zn.
• Examples of methods for removing impurities such as metals from various materials include filtration using a filter. Details of filtration using a filter are described in paragraph [0321] of International Publication No. 2020/004306.
• Methods for reducing impurities such as metals contained in various materials include, for example, methods of selecting raw materials with low metal content as raw materials constituting various materials, and methods of filtering raw materials constituting various materials. and a method in which distillation is carried out under conditions in which contamination is suppressed as much as possible by lining the inside of the apparatus with Teflon (registered trademark).
• impurities may be removed using an adsorbent, or a combination of filter filtration and an adsorbent may be used.
• adsorbent known adsorbents can be used, such as inorganic adsorbents such as silica gel and zeolite, and organic adsorbents such as activated carbon.
• inorganic adsorbents such as silica gel and zeolite
• organic adsorbents such as activated carbon.
• the content of metal components contained in the cleaning liquid after use is preferably 100 mass ppt or less, more preferably 10 mass ppt or less, and even more preferably 1 mass ppt or less.
• the lower limit is not particularly limited, and is preferably 0 mass ppt or more.
• Organic processing liquids such as rinsing liquids contain conductive compounds to prevent damage to chemical piping and various parts (filters, O-rings, tubes, etc.) due to static electricity charging and subsequent electrostatic discharge. may be added.
• the conductive compound is not particularly limited, and for example, methanol may be mentioned.
• the amount added is not particularly limited, but is preferably 10% by mass or less, more preferably 5% by mass or less in terms of maintaining favorable development characteristics or rinsing characteristics.
• the lower limit is not particularly limited, and is preferably 0.01% by mass or more.
• Examples of chemical liquid piping include SUS (stainless steel), polyethylene or polypropylene treated with antistatic treatment, or various types of piping coated with fluororesin (polytetrafluoroethylene, perfluoroalkoxy resin, etc.). can be used.
• SUS stainless steel
• polyethylene or polypropylene treated with antistatic treatment or various types of piping coated with fluororesin (polytetrafluoroethylene, perfluoroalkoxy resin, etc.).
• fluororesin polytetrafluoroethylene, perfluoroalkoxy resin, etc.
• filter and O-ring antistatically treated polyethylene, polypropylene, or fluororesin (polytetrafluoroethylene, perfluoroalkoxy resin, etc.) can be used.
• the present specification also relates to an electronic device manufacturing method including the above-described pattern forming method, and an electronic device manufactured by this manufacturing method.
• Preferred embodiments of the electronic device of this specification include embodiments in which it is installed in electrical and electronic equipment (home appliances, office automation (OA), media-related equipment, optical equipment, communication equipment, etc.).
• ⁇ Resin (P)> As the resin (P), P-1 to P-6 were used. The types and contents of repeating units contained in P-1 to P-6 are shown in Table 1 below. The content of repeating units is the molar ratio to all repeating units in the resin. The weight average molecular weight (Mw) and degree of dispersion (Mw/Mn) of the resin were measured by GPC (carrier: tetrahydrofuran (THF)) (the amount is in terms of polystyrene). Further, the content of repeating units was measured by 13 C-NMR (nuclear magnetic resonance).
• T-1 was used as the hydrophobic resin (resin (T)).
• the structural formula, repeating unit content, Mw and Mw/Mn of T-1 are shown below.
• the content of repeating units contained in T-1 is the molar ratio to all repeating units in the resin.
• MwMw/Mn was measured by GPC (carrier: tetrahydrofuran (THF)) (it is a polystyrene equivalent amount).
• the content of repeating units was measured by 13 C-NMR.
• A-1 to A-13, AR-1, and AR-2 were used as compounds (A) that generate acids with a pKa of less than 0 upon irradiation with actinic rays or radiation.
• A-1 to A-13, AR-1 and AR-2 are compounds each containing a cation and anion shown in Table 2 below. Table 2 below also lists the pKa of the conjugate acid of the anion (the pKa of the acid generated from the compound (A) (generated acid) upon irradiation with actinic rays or radiation).
• B-1 to B-15 and BR-1 to B-3 were used as the acid diffusion control agent (B).
• B-1 to B-15 and BR-1 to B-3 are compounds containing cations and anions shown in Table 3 below, respectively.
• Table 3 below also lists the pKa of the conjugate acid of the anion (pKa of the acid generated from the acid diffusion control agent (B) by irradiation with actinic rays or radiation (generated acid)).
• Me represents a methyl group.
• ⁇ Coating of resist composition The prepared resist composition was applied onto a 6-inch Si (silicon) wafer that had been previously treated with hexamethyldisilazane (HMDS) using a spin coater Mark 8 manufactured by Tokyo Electron, and dried on a hot plate at 130° C. for 300 seconds. As a result, a resist film having a thickness of 100 nm was obtained. Note that similar results can be obtained even if the Si wafer is replaced with a chromium substrate.
• HMDS hexamethyldisilazane
• ⁇ Pattern formation method (1) EB exposure, alkaline development (positive)>
• the wafer coated with the resist film obtained above was subjected to pattern irradiation using an electron beam drawing device (manufactured by Advantest Corporation; F7000S, acceleration voltage 50 keV). At this time, drawing was performed so that a 1:1 line and space was formed.
• electron beam drawing it was heated on a hot plate at 100°C for 60 seconds, immersed in a 2.38% by mass tetramethylammonium hydroxide (TMAH) aqueous solution for 60 seconds, rinsed with water for 30 seconds, and dried. . Thereafter, the wafer was rotated at a rotation speed of 4000 rpm for 30 seconds, and then baked at 95° C. for 60 seconds to dry it.
• TMAH tetramethylammonium hydroxide
• the LWR when using a resist composition immediately after preparation is defined as the "initial” LWR, and the resist composition stored for 3 months in a constant temperature bath at 35 ° C. after preparation is used.
• the LWR when used was defined as the "after time” LWR.
• Table 5 below shows the resist compositions used and the results.
• ⁇ Pattern formation method (2) EUV exposure, alkaline development (positive)> The above pattern was formed except that an EUV exposure device (Exitech Micro Exposure Tool, NA (numerical aperture) 0.3, Quadrupole, outer sigma 0.68, inner sigma 0.36) was used instead of the electron beam lithography device. The same steps as method (1) were performed. Resolution and LWR performance (initial and after time) were evaluated using the same methods as described above. Table 6 below shows the resist compositions used and the results.
• the present invention it is possible to provide an actinic ray-sensitive or radiation-sensitive resin composition that is excellent in resolution, initial LWR performance, and LWR performance after aging. Further, the present invention can provide an actinic ray-sensitive or radiation-sensitive film, a pattern forming method, and an electronic device manufacturing method using the above-mentioned actinic ray-sensitive or radiation-sensitive resin composition.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Materials For Photolithography (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Priority Applications (2)

Applications Claiming Priority (2)

Publications (1)

Family

ID=90099391

Family Applications (1)

Country Status (4)

Citations (1)

Family Cites Families (2)

• 2023
  • 2023-08-16 JP JP2024544119A patent/JPWO2024048282A1/ja active Pending
  • 2023-08-16 WO PCT/JP2023/029609 patent/WO2024048282A1/ja not_active Ceased
  • 2023-08-16 KR KR1020257006546A patent/KR20250042818A/ko active Pending
  • 2023-08-28 TW TW112132344A patent/TW202413460A/zh unknown

Patent Citations (1)

Non-Patent Citations (1)

Also Published As

Similar Documents

Legal Events