WO2024014340A1 - Feuille de verre mère et procédé de fabrication de feuille de verre mère - Google Patents

Feuille de verre mère et procédé de fabrication de feuille de verre mère Download PDF

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Publication number
WO2024014340A1
WO2024014340A1 PCT/JP2023/024629 JP2023024629W WO2024014340A1 WO 2024014340 A1 WO2024014340 A1 WO 2024014340A1 JP 2023024629 W JP2023024629 W JP 2023024629W WO 2024014340 A1 WO2024014340 A1 WO 2024014340A1
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Prior art keywords
mother glass
glass plate
evaluation
width direction
inspection
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PCT/JP2023/024629
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English (en)
Japanese (ja)
Inventor
誠一 森田
拡志 澤里
隆雄 岡
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日本電気硝子株式会社
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Publication of WO2024014340A1 publication Critical patent/WO2024014340A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

Definitions

  • the present disclosure relates to a mother glass plate and a method for manufacturing a mother glass plate.
  • Patent Document 1 discloses an example of an HDD board.
  • an HDD substrate when manufacturing a 3.5-inch HDD substrate, first, a large-area mother glass plate with a size of 1300 x 1500 mm to 2400 x 2800 mm, for example, and a small-area rectangular glass plate ( Cut out a large number of pieces (about 100mm square). Thereafter, an HDD substrate (also called a platter blank) is manufactured by processing each of the rectangular glass plates into a circular shape.
  • a method for measuring the shape accuracy of an HDD substrate is to measure the flatness of a rectangular glass plate before it is processed into a circular shape using an oblique incidence interferometer, targeting a circular area of the glass plate that corresponds to the HDD substrate.
  • the flatness required for a 3.5-inch HDD substrate is as severe as 50 ⁇ m or less in an upright state without the influence of gravity.
  • a mother glass plate for inspection is collected from the mother glass plate production line.
  • the shape accuracy of the sampled mother glass plate for inspection is measured. Specifically, a large number of rectangular glass plates (about 100 mm square) are cut out from a mother glass plate for inspection. These many rectangular glass plates are arranged along the drawing direction and the width direction of the mother glass plate for inspection. Thereafter, the flatness of each cut rectangular glass plate is measured using an oblique incidence interferometer. If the flatness values of all the rectangular glass plates are within the allowable range, it is determined that the mother glass plate satisfies the shape accuracy standard for HDD substrates, and the shape accuracy of the mother glass plate is guaranteed. .
  • the shape accuracy of the mother glass plate for inspection is measured by measuring the flatness of a large number of rectangular glass plates.
  • the bottom line is that the above procedure involves actually cutting out a large number of rectangular glass plates corresponding to the size of the final product (HDD board) from a mother glass plate for inspection, and then ensuring that each piece has the required shape accuracy. If it satisfies the criteria, it is determined that the mother glass plate satisfies the shape accuracy criteria for HDD substrates.
  • the number of rectangular glass plates cut out from the mother glass plate for inspection may reach several hundred pieces.
  • a total of 10 rows along the drawing direction and 25 columns along the width direction of the mother glass plate for inspection are used. This meant cutting out 250 rectangular glass plates. Then, it is necessary to measure the shape accuracy of each of the 250 sheets. Therefore, there is a problem in that it takes a lot of effort and time to measure the shape accuracy of the mother glass plate for inspection.
  • the technical problem to be solved is that when manufacturing mother glass plates for HDD boards that require high shape accuracy, if a step of measuring the shape accuracy of the mother glass plate for inspection is included, The objective is to reduce the effort and time required for measurement while ensuring measurement accuracy.
  • a method for manufacturing a mother glass plate to solve the above problems includes a production process in which mother glass plates are continuously produced on a production line, a sampling process in which a mother glass plate for inspection is collected from the production line, Mother glass for hard disk drives, comprising: a measurement process for measuring the shape accuracy of a mother glass plate for inspection; and a pass/fail judgment process for judging the pass/fail of a plurality of mother glass plates produced in a production process based on the results of the measurement process.
  • the mother glass plate has a rectangular shape having a first side along the sheet drawing direction and a second side along the width direction perpendicular to the sheet drawing direction, and and the second side each has a length of 1000 mm or more and a thickness of 0.3 mm or more and 0.7 mm or less, and the sampling process is performed at predetermined intervals, and the effective part of the sampled mother glass plate for inspection is A plurality of rectangular first evaluation regions with a side length of 300 mm or more and 700 mm or less are arranged and set in the width direction with respect to the effective part so as to satisfy the entire width.
  • the process (hereinafter referred to as , front and back deflection difference measuring process) is executed.
  • the shape accuracy can be more efficiently achieved than when measuring the shape accuracy of a mother glass plate for inspection by measuring the flatness of a large number of rectangular glass plates using an oblique incidence interferometer. can be measured. This is due to the following reasons (A) and (B).
  • (A) The size of each first evaluation region (length of one side is 300 mm or more and 700 mm or less) can be made larger than the size of the rectangular glass plate when using a grazing incidence interferometer. The number can be significantly reduced.
  • the number of first evaluation regions can be significantly reduced compared to the number of rectangular glass plates.
  • the shape accuracy of the mother glass plate for inspection can be accurately measured. In other words, it is possible to accurately determine whether or not the mother glass plate for inspection satisfies the required standard of shape accuracy. The reason for this is as follows. The shape of a mother glass plate (mother glass plate for inspection) does not change locally in a small area, but gradually changes in a large area.
  • the shape accuracy of the first evaluation area shape accuracy based on the front and back deflection difference
  • the shape accuracy when cut out to a smaller size than the first evaluation area can also be guaranteed.
  • the number of objects to be measured can be significantly reduced, and the measurement can be performed accurately. As a result, it is possible to reduce the effort and time required for measurement while ensuring measurement accuracy.
  • the amount of change in the front and back deflection difference between the corresponding first evaluation areas between the mother glass plates for inspection sampled in two successive sampling processes is measured.
  • a step of calculating each (hereinafter referred to as "inter-corresponding region deflection difference change amount calculation step") is executed. After that, a pass/fail determination process is performed to determine whether or not the plurality of mother glass plates produced in the production process are acceptable based on the results of the measurement process.
  • a plurality of mother glass plates can be determined to be acceptable if both of the following [Condition 1] and [Condition 2] are satisfied.
  • multiple mother glass plates refers to the mother glass plates for inspection that were collected in the first and second sampling processes of two successive sampling processes, respectively, as the preceding inspection plate and the subsequent inspection plate. This refers to a plurality of mother glass plates sandwiched between a preceding inspection plate and a subsequent inspection plate on a production line. [Condition 1]: Each of the mother glass plates for inspection (the plate for the preceding inspection and the plate for the subsequent inspection) collected in two successive sampling steps satisfies the required standard of shape accuracy.
  • the measurement step includes a step of calculating the amount of change in the front and back deflection difference between the first evaluation regions adjacent in the width direction for each mother glass plate for inspection. It is preferable to further provide.
  • the measurement step it is possible to clarify the change in the shape of the mother glass plate for inspection along the width direction based on the amount of change in the front and back deflection difference between the first evaluation regions adjacent in the width direction. Therefore, it becomes possible to more accurately measure the shape accuracy of the mother glass plate for inspection.
  • This is advantageous when a mother glass plate is required to have higher shape accuracy and a mother glass plate that satisfies the requirement is selected (determined as acceptable in the pass/fail determination process). For example, in addition to satisfying both Conditions 1 and 2 above, after calculating the amount of change in the front and back deflection difference between the first evaluation areas adjacent in the width direction, all of the calculated values are less than or equal to the threshold value. In this case, if the pass/fail determination step is made to determine pass, a mother glass plate with even higher shape accuracy can be obtained.
  • the measuring step is a step of measuring the front and back deflection difference along the board drawing direction and the width direction for each of the second evaluation areas, respectively;
  • the method may further include the step of calculating the amount of change in the front and back deflection difference between the corresponding first evaluation area and second evaluation area.
  • the front and back deflections in the second evaluation area along the board drawing direction and the width direction, as well as the front and back deflections between the first and second evaluation areas adjacent in the board drawing direction can be measured.
  • changes in the shape of the mother glass plate for inspection along the drawing direction can be clarified. Therefore, it becomes possible to more accurately measure the shape accuracy of the mother glass plate for inspection. This is advantageous when a mother glass plate is required to have higher shape accuracy and a mother glass plate that satisfies the requirement is selected (determined as acceptable in the pass/fail determination process).
  • a plurality of third evaluation areas are further added to the width direction end area of the effective part of the sampled mother glass plate for inspection.
  • the width of the width direction end area is 30% or less of the length of the second side
  • the measurement step includes a step of measuring the flatness of each of the plurality of third evaluation regions using an optical interferometer. You may also have more.
  • the shape of the mother glass plate for inspection is likely to change, such as warping easily occurring. Therefore, regarding the width direction end area, in addition to measuring the front and back deflection difference in the first evaluation area mentioned above, we also set multiple third evaluation areas and measured the flatness of the multiple third evaluation areas using an optical interferometer. By measuring each degree, the shape accuracy of the mother glass plate for inspection can be measured more accurately.
  • the plurality of third evaluation regions are set in the width direction end area of the effective portion of the mother glass plate for inspection, and are not set in the entire effective portion of the mother glass plate for inspection. Therefore, an increase in the number of measurement targets due to the setting of a plurality of third evaluation regions is suppressed to a minimum, so that it is possible to eliminate the possibility that efficient measurement of the shape accuracy of the mother glass plate for inspection will be hindered.
  • the third evaluation region may have a rectangular shape with one side of 50 mm or more and 150 mm or less.
  • the size of the third evaluation area corresponds to the size of the HDD board (2.5 inch size or 3.5 inch size). Specifically, the size of the third evaluation area corresponds to the size of the rectangular glass plate before being processed into a circular shape. Therefore, it is advantageous in ensuring the shape accuracy of the mother glass plate for HDD substrates.
  • the third evaluation area is a part of the first evaluation area.
  • the first evaluation area and the third evaluation area can be measured. It is no longer necessary to cut out and from separate areas of the mother glass plate for inspection. Furthermore, regarding the third evaluation area, in addition to the measurement of the front and back deflection difference carried out for the first evaluation area, which is the basis of the third evaluation area, flatness measurement will also be carried out. The shape accuracy of the mother glass plate for inspection can be measured more accurately.
  • the mother glass plate has a defect inside, and the defect depth measurement step of measuring the depth from the main surface of the mother glass plate to the defect and a defect evaluation step of evaluating defects based on the measured depth.
  • the main surface of the glass plate cut into small pieces from the mother glass plate may be mechanically polished. Therefore, even if the mother glass plate has internal defects such as foreign objects or bubbles, if the depth from the main surface of the mother glass plate to the defect is less than a predetermined value, polishing will remove the defect. can be removed. In this way, a mother glass plate whose defects can be removed in a post-process can be used without being discarded as a defective product. Therefore, by executing the defect depth measurement process and the defect evaluation process, defects are classified into acceptable defects (defects that can be removed) whose depth is below a predetermined value and reject defects whose depth is greater than a predetermined value. By evaluating the mother glass plate based on the number, size, and type of reject defects, the yield of the mother glass plate can be improved.
  • the mother glass plate that can be manufactured by the above manufacturing method has a rectangular shape with a first side along the sheet drawing direction and a second side along the width direction orthogonal to the sheet drawing direction.
  • a mother glass plate for a hard disk drive having a first side and a second side each having a length of 1000 mm or more and a thickness of 0.3 mm or more and 0.7 mm or less, the mother glass plate having an effective
  • a plurality of rectangular first evaluation areas are set so as to fill the entire width of the section.
  • the values of the front and back deflection differences are all within the range of ⁇ 0.5 mm, and the front and back deflection differences are , is a value converted to a 350 mm square size.
  • this mother glass plate when converted to a 350 mm square size, the values of the front and back deflection differences along the sheet drawing direction and width direction in all the first evaluation areas are within the range of ⁇ 0.5 mm. This ensures high shape accuracy. Therefore, this mother glass plate is suitable as a mother glass plate for an HDD substrate that requires high shape accuracy.
  • the amount of change in the front and back deflection difference between the first evaluation regions adjacent in the width direction is 0.3 mm or less, respectively.
  • the change in the shape of the mother glass plate along the width direction will be small, so it is more suitable as a mother glass plate for an HDD substrate that requires high shape accuracy.
  • the position in the width direction is the same as the first evaluation area, and the first evaluation area corresponds to each of the plurality of first evaluation areas.
  • a second evaluation area adjacent to the area in the board pulling direction is further set, and when the front and back deflection differences are measured along the board pulling direction and the width direction for each of the second evaluation areas, the value of the front and back deflection difference is determined. It is preferable that both of them fall within the range of ⁇ 0.5 mm, and that the amount of change in the front and back deflection difference between the corresponding first evaluation area and second evaluation area is each 0.3 mm or less.
  • the change in shape of the mother glass plate along the drawing direction will be small, so it is more suitable as a mother glass plate for an HDD substrate that requires high shape accuracy.
  • a plurality of rectangular third evaluations are performed in a range where the distance from the first side is 30% or less of the length of the second side.
  • a region is set, each side of the third evaluation region is 100 mm, and when the flatness of all the third evaluation regions is measured using an optical interferometer, the flatness is 50 ⁇ m or less. It is preferable.
  • the size of the third evaluation area corresponds to the size of the HDD substrate (specifically, the size of the rectangular glass plate before being processed into a circle). Further, the flatness in all the third evaluation regions is 50 ⁇ m or less, and high flatness is ensured. Therefore, it is suitable as a mother glass plate for HDD substrates.
  • the mother glass plate according to any one of (8) to (11) above preferably has a longitudinal elastic modulus of 80 GPa or more.
  • the mother glass plate according to any of (8) to (12) above may have internal defects, and the depth of the defect from the main surface of the mother glass plate is 25 ⁇ m or less. It is preferable.
  • the defects in the mother glass plate is 25 ⁇ m or less from the main surface, the defects can be removed by mechanically polishing the main surface in the manufacturing process of manufacturing an HDD substrate from the mother glass plate. As shown above, even if there is a defect inside the mother glass plate, as long as the depth of the defect is 25 ⁇ m or less from the main surface, it can be used as a glass plate for HDD substrates without being discarded as a defective product. Therefore, the yield can be improved.
  • the mother glass plate according to the present disclosure when manufacturing a mother glass plate for an HDD substrate that requires high shape accuracy, if the step of measuring the shape accuracy of a mother glass plate for inspection is included, The effort and time required for measurement can be reduced while ensuring measurement accuracy. Further, the mother glass plate according to the present disclosure is suitable as a mother glass plate for an HDD substrate that requires high shape accuracy.
  • FIG. 3 is a plan view showing a mother glass plate.
  • FIG. 3 is a plan view showing a mother glass plate.
  • FIG. 3 is a plan view showing a mother glass plate.
  • FIG. 3 is a plan view showing a mother glass plate.
  • FIG. 3 is a plan view showing an enlarged view of the periphery of the first evaluation area on the mother glass plate.
  • FIG. 3 is a diagram for explaining a method of measuring the difference in deflection between the front and back sides. It is a figure which shows the measurement result of the front and back deflection difference along the board drawing direction of several first evaluation areas. It is a figure which shows the measurement result of the front and back deflection difference along the width direction of several first evaluation areas.
  • FIG. 7 is a diagram showing the measurement results of the front and back deflection difference along the width direction of the first evaluation area and the measurement result of the front and back deflection difference along the width direction of the second evaluation area.
  • FIG. 3 is a cross-sectional view schematically showing a mother glass plate.
  • FIG. 2 is a cross-sectional view schematically showing a glass plate cut out from a mother glass plate. It is a sectional view showing a production process in a method of manufacturing a mother glass plate. It is a schematic diagram which shows the collection process in the manufacturing method of a mother glass plate. It is a figure which shows the measurement result of a part of measurement process in the manufacturing method of a mother glass plate. It is a figure which shows the measurement result of a part of measurement process in the manufacturing method of a mother glass plate.
  • FIG. 1 shows a mother glass plate 1.
  • the mother glass plate 1 is a glass cut from a glass ribbon formed by a down-draw method or a float method.
  • This mother glass plate 1 is a mother glass for a product glass plate that requires high shape accuracy.
  • multiple product glass plates are cut from the mother glass plate 1.
  • the mother glass plate 1 of this embodiment is a mother glass for a 3.5-inch HDD substrate (glass substrate for a hard disk drive).
  • the mother glass plate 1 may be a mother glass of an HDD substrate of another size (for example, 2.5 inch size).
  • the present mother glass plate 1 has a rectangular shape having a first side 2 along the sheet drawing direction and a second side 3 along the width direction orthogonal to the sheet drawing direction.
  • the "drawing direction” of the mother glass plate 1 is a direction that coincides with the drawing direction of the glass ribbon during molding of the glass ribbon.
  • the "width direction” of the mother glass plate 1 is a direction that coincides with the width direction of the glass ribbon.
  • the board drawing direction can be observed as a striped pattern by emitting light from a light source (for example, a xenon light) in a dark room while adjusting the angle of the mother glass plate 1 and projecting the transmitted light onto a screen. Therefore, even in the mother glass plate 1 cut out from a glass ribbon, it is possible to determine the drawing direction and the width direction.
  • the present mother glass plate 1 has a longitudinal elastic modulus of 80 GPa or more.
  • the thickness of the mother glass plate 1 is 0.3 mm or more and 0.7 mm or less.
  • the length 2y of the first side 2 and the length 3x of the second side 3 are each 1000 mm or more.
  • the mother glass plate 1 is G8.5 size
  • the length 2y of the first side 2 is 2200 mm
  • the length 3x of the second side 3 is 2500 mm.
  • the present invention is not limited to this, and the mother glass plate 1 may have other sizes, such as G6 size, for example.
  • the mother glass plate 1 is preferably alkali-free glass or alkali aluminosilicate glass.
  • the glass composition in mol%, is SiO 2 60-75%, Al 2 O 3 5-20%, B 2 O 3 0-15%, Li 2 O + Na 2 O + K 2 O (Li 2 O , Na 2 O and K 2 O) 0 to less than 1%, MgO 0 to 10%, CaO 0 to 15%, SrO 0 to 10%, and BaO 0 to 10%.
  • the following glass composition examples (1) or (2) are particularly preferred.
  • the glass composition is SiO 2 : 50-75%, Al 2 O 3 : 10-30%, B 2 O 3 : 0-12%, Li 2 O: 0-10% in mol%. , Na 2 O: 2 to 18%, and K 2 O: 0 to 5%.
  • the following glass composition examples (3) or (4) are particularly preferred.
  • the entire area (total area) is an effective part.
  • the "effective area” is an area of the mother glass plate 1 that will later become a product glass plate. Note that in this embodiment, the entire area of the mother glass plate 1 is the effective portion, but this is not the case. If only a part of the area of the mother glass plate 1 becomes a product glass plate later, only the part of the area becomes an effective part.
  • a plurality of rectangular first evaluation areas 41 are set so as to fill the entire width of the effective portion (the full width of the mother glass plate 1). .
  • the plurality of first evaluation areas 41 are set so as to fill the entire width of the effective part” means that all points in the width direction of the effective part are set so as to fill the entire width of the effective part. It is to be included within either range.
  • the plurality of first evaluation areas 41 have the same size.
  • the dimension 41ay of the vertical side 41a extending in the board drawing direction and the dimension 41bx of the horizontal side 41b extending in the width direction are each 300 mm or more and 700 mm or less.
  • the dimension 41ay of the vertical side 41a is 500 mm
  • the dimension 41bx of the horizontal side 41b is 400 mm
  • the size of the first evaluation area 41 is larger than the size of the product glass plate (here, a 3.5-inch HDD substrate).
  • first evaluation areas 41 there are seven first evaluation areas 41.
  • the number of first evaluation regions 41 is not limited to seven, and the number of first evaluation regions 41 may be increased or decreased as appropriate, for example, depending on the size of mother glass plate 1.
  • the seven first evaluation areas 41 may be distinguished by being expressed as first evaluation areas A, B, . . . , F, G in the order of arrangement.
  • first evaluation areas 41 Five first evaluation areas B to F near the center in the width direction of the mother glass plate 1 are arranged in a line along the width direction of the mother glass plate 1 without gaps.
  • the two first evaluation areas A and G located at both ends of the mother glass plate 1 in the width direction are located at positions shifted from the five first evaluation areas B to F in the sheet drawing direction.
  • the first evaluation area A and the first evaluation area B, and the first evaluation area F and the first evaluation area G are located offset in the board drawing direction, but some areas overlap in the width direction. are doing.
  • first evaluation regions 41 are located near the center of the mother glass plate 1 in the drawing direction, but the present invention is not limited to this.
  • Each of the seven first evaluation regions 41 may be located at any position in the board drawing direction. That is, the location of each first evaluation area 41 may be shifted from the position illustrated in FIG. 1 in the board pulling direction. Therefore, as a form of setting the first evaluation area 41 on the mother glass plate 1, the form shown in FIGS. 2 and 3 may be adopted.
  • seven first evaluation areas 41 are arranged in a zigzag pattern.
  • all seven first evaluation regions 41 are arranged in a line without gaps along the width direction.
  • the position in the width direction is the same as that of the first evaluation region 41, and the first evaluation region 41 and the board
  • a second evaluation area 42 (indicated by a two-dot chain line in FIG. 4) adjacent to each other in the pulling direction is further set.
  • the second evaluation area 42 may be set above or below the first evaluation area 41 along the board drawing direction.
  • the dimension 42ay of the vertical side 42a extending in the board drawing direction of the second evaluation area 42 and the dimension 42bx of the horizontal side 42b extending in the width direction are the same as the dimension 41ay of the vertical side 41a of the first evaluation area 41, and , is preferably the same as the dimension 41bx of the horizontal side 41b (see FIG. 1 for dimensions 41ay and 41bx).
  • the seven second evaluation areas 42 may be distinguished by being expressed as second evaluation areas H, I, . . . M, N in the order of arrangement.
  • This mother glass plate 1 has a widthwise end area 5 (shown with diagonal lines in FIGS. 1 to 4).
  • the widthwise end areas 5 are set at one end and the other end of the mother glass plate 1 in the width direction, respectively.
  • the width dimension 5x of the width direction end area 5 is a dimension whose upper limit is 30% of the length 3x of the second side 3. That is, the widthwise end area 5 corresponds to a range in the mother glass plate 1 where the distance from the first side 2 is 30% or less of the length 3x of the second side 3.
  • the mother glass plate 1 is likely to warp (particularly in the range where the distance from the first side 2 is up to 300 mm).
  • a thick ear portion is formed further outside the width direction end area 5 in the width direction.
  • a plurality of rectangular third evaluation regions 6 are set in the width direction end area 5.
  • a plurality of third evaluation areas 6 are set in an area of the widthwise end area 5 that overlaps with the first evaluation area 41 . That is, each of the plurality of third evaluation areas 6 is a part of the first evaluation area 41.
  • the third evaluation area 6 may be set in a different area from the first evaluation area 41 in the widthwise end area 5 (an area that does not overlap with the first evaluation area 41). Further, the third evaluation area 6 may be positioned at any position in the board drawing direction as long as it is set within the width direction end area 5.
  • width direction end areas 5 are set at one end and the other end in the width direction of the mother glass plate 1
  • the width of the mother glass plate 1 is also set for the plurality of third evaluation regions 6. They are set at one end and the other end in the direction, respectively.
  • the third evaluation regions 6 are arranged in five rows along the board drawing direction and in two rows along the width direction at each of one end side and the other end side in the width direction. There is. Therefore, in this embodiment, the total number of third evaluation regions 6 set on the mother glass plate 1 is twenty.
  • the number of rows of third evaluation regions 6 along the board drawing direction and the width direction may be increased or decreased as appropriate. As an example, there may be 5 to 10 rows in the drawing direction and 1 to 3 rows in the width direction.
  • the third evaluation area 6 located at the outermost side in the width direction has no mother glass plate 1 in the area. It is preferable that the width direction edge of the (effective portion) be included.
  • Each side of the third evaluation region 6 is 50 mm or more and 150 mm or less.
  • the third evaluation area 6 of this embodiment has a square shape of 100 mm square. Note that, unlike this embodiment, when the product glass plate is a 2.5-inch HDD substrate, the third evaluation area 6 may be, for example, a 75 mm square.
  • the first evaluation areas 41 and 41 adjacent to each other in the width direction are considered as one set, and a total of 6 sets (set of A, B, set of B, C, . . . set of E, F, F , G), front and back deflections of two sides along the board drawing direction (two vertical sides 41a) and two sides along the width direction (two horizontal sides 41b) between the first evaluation areas 41,
  • each calculated value is 0.3 mm or less.
  • the calculated value of the amount of change ⁇ d1 is 0.2 mm or less, and even more preferable that it is 0.1 mm or less.
  • adjacent in the width direction refers not only to the case where both the first evaluation regions 41, 41 are located right next to each other, as in the pair A and B in FIG. This includes cases where both first evaluation areas 41, 41 are located at positions shifted in the board drawing direction, as in the set A and B in FIGS. 1 and 2.
  • each calculated value is preferably 0.3 mm or less, more preferably 0.2 mm or less, and even more preferably 0.1 mm or less.
  • the calculated value of the amount of change ⁇ d2 is 0.2 mm or less, and even more preferable that it is 0.1 mm or less. Note that only the amount of change ⁇ d2 between the front and back deflection difference d1 between the two sides of the first evaluation area 41 along the board drawing direction and the front and back deflection difference d2 between the two sides along the board drawing direction of the second evaluation area 42 is calculated. You can also calculate it.
  • the calculated values are each preferably 0.3 mm or less, more preferably 0.2 mm or less, and even more preferably 0.1 mm or less. preferable.
  • the front and back deflection difference d1 is measured according to the following procedure. As mentioned above, the front and back deflection difference d1 is measured in both the board drawing direction and the width direction for each of the seven first evaluation areas 41. Let us take as an example a case where the front and back deflection difference d1 along the front and back sides is measured.
  • the front and back deflection difference d1 is the deflection W1 when the front surface of the front and back surfaces of the first evaluation area A is placed on the upper side (indicated by the solid line), and the deflection W1 when the back side is placed on the upper side (indicated by the dashed-dotted line).
  • the first evaluation area A is supported by two support members 7, 7 extending in parallel with a distance L between them. In this embodiment, the distance L is 350 mm.
  • the vertical side 41a of the first evaluation area A is bridged between the two support members 7, 7.
  • the horizontal side 41b of the first evaluation area A is spanned between the two supporting members 7, 7.
  • the deflection W1 and the deflection W2 are measured for each of the two sides (two vertical sides 41a) extending in the board drawing direction
  • the front and back deflection difference d1 is measured for each of the two sides extending in the board drawing direction. That is, from the measurement mode shown in FIG. 6, two measured values, ie, the front and back deflection difference d1 on one side of the two vertical sides 41a and the front and back deflection difference d1 on the other side, are obtained.
  • the front and back deflection difference d1 Following the measurement procedure of the front and back deflection difference d1 described above, for each of the seven first evaluation areas 41, two sides along the board drawing direction (two vertical sides 41a) and two sides along the width direction (two horizontal sides) are measured. When the front and back deflection difference d1 of the side 41b) is measured, a total of 28 measured values are obtained as the front and back deflection difference d1. Note that since the values of the deflection W1 and the deflection W2 change depending on the length of the distance L, the value of the front and back deflection difference d1 may also change.
  • the measurement results of the front and back deflection differences d1 of the two sides along the board drawing direction of the seven first evaluation areas 41 (first evaluation areas A to G) are illustrated in FIG.
  • the measurement results of the front and back deflection difference d1 are illustrated in FIG. In FIGS. 7 and 8, the measurement results on one of the two sides are shown connected with a solid line, and the measurement results on the other side are shown connected with a chain line.
  • the measurement results of the front and back deflection difference d2 of the corresponding side (one of the two vertical sides 42a) of the second evaluation area 42 (second evaluation areas H to N) are displayed together in FIG. 11 (d1 are connected by a solid line, and d2 is connected by a chain line).
  • the flatness of each third evaluation region 6 is measured by the following method. That is, using a grazing incidence interferometer (product name: FT-17 or FT-900) manufactured by NIDEK, the flatness is measured with each third evaluation region 6 in an upright state. Specifically, the flatness of a circular region corresponding to the HDD substrate in each third evaluation region 6 is measured. Of course, other oblique incidence interferometers may be used. Then, the flatness value in the upright state is taken as the flatness value of each third evaluation region 6. A total of 20 flatness values obtained are all 50 ⁇ m or less. As a result, [shape accuracy criterion E] is satisfied.
  • the amount of change ⁇ d1 in the front and back deflection difference d1 of the first evaluation region 41, the front and back deflection difference d2 of the second evaluation region 42, the front and back deflection difference d1 of the first evaluation region 41, and the front and back deflection difference d2 of the second evaluation region 42 may not be considered.
  • the mother glass plate 1 may have internal defects 1d represented by foreign objects, bubbles, etc. At this time, if the depth of the defect 1d from the main surface (front surface 1a or back surface 1b) of the mother glass plate 1 is less than or equal to a predetermined value, the defect 1d may be removed during the process of manufacturing the HDD substrate from the mother glass plate 1. As a result, no defect 1d remains on the finally obtained HDD substrate.
  • the depth of the defect 1d from the main surface (front surface 1a or back surface 1b) of the mother glass plate 1 is preferably 25 ⁇ m or less, more preferably 20 ⁇ m or less, still more preferably 15 ⁇ m or less, and most preferably Preferably it is 10 ⁇ m or less. Defects 1d existing at a depth within this range can be suitably removed by mechanical polishing.
  • This manufacturing method consists of a production process P1 ( Figure 14) in which mother glass plates 1 are continuously produced on a production line, a sampling process P2 ( Figure 15) in which mother glass plates 8 for inspection are sampled from the production line, and a sampling process P2 ( Figure 15) in which mother glass plates 8 for inspection are sampled from the production line. It includes a measurement step of measuring the shape accuracy of the mother glass plate 8, and a pass/fail determination step of determining the pass/fail of the plurality of mother glass plates 1 produced in the production process P1 based on the results of the measurement step. Then, each of the plurality of mother glass plates 1 that passed the pass/fail determination process is obtained as a mother glass (mother glass for a 3.5-inch HDD substrate in this embodiment) with guaranteed shape accuracy.
  • a manufacturing apparatus 9 is used to execute the production process P1.
  • the manufacturing device 9 is a device that continuously molds the glass ribbon Gr.
  • the manufacturing apparatus 9 includes a forming furnace 10 that forms the glass ribbon Gr, an annealing furnace 11 that slowly cools the glass ribbon Gr (annealing process), a cooling zone 12 that cools the glass ribbon Gr to around room temperature, and these forming furnaces 10,
  • Each of the slow cooling furnace 11 and the cooling zone 12 is provided with a pair of rollers 13 provided in a plurality of upper and lower stages.
  • a molded body 14 for molding a glass ribbon Gr from molten glass Gm by an overflow down-draw method is arranged in the internal space of the molding furnace 10.
  • the molten glass Gm supplied to the molded body 14 overflows from a groove (not shown) formed in the top 14a of the molded body 14 to both sides.
  • the overflowing molten glass Gm passes along both side surfaces 14b of the wedge-shaped molded body 14 and joins at the lower end of the molded body 14, thereby forming a glass ribbon Gr continuously.
  • the glass ribbon Gr is in a vertical position (preferably in a vertical position), and the direction Q is the drawing direction.
  • the internal space of the slow cooling furnace 11 has a predetermined temperature gradient downward.
  • the glass ribbon Gr is slowly cooled so that its temperature decreases as it moves downward through the interior space of the slow cooling furnace 11. This slow cooling reduces the internal strain of the glass ribbon Gr.
  • the temperature gradient in the internal space of the lehr 11 can be adjusted by a heating device (for example, a heater) provided on the inner surface of the lehr 11.
  • the plurality of roller pairs 13 are configured to sandwich the widthwise ends of the vertically oriented glass ribbon Gr from both the front and back sides.
  • the plurality of roller pairs 13 may include rollers whose ends are not sandwiched.
  • the distance between the rollers constituting the roller pair 13 may be made larger than the thickness of the end portion, so that the end portion passes between the rollers.
  • the outside of the wall 15 that partitions the forming furnace 10, the slow cooling furnace 11, and the cooling zone 12 is surrounded by an outer enclosure 16 (for example, a building).
  • an outer enclosure 16 for example, a building
  • partition portions 17 and 18 for example, the floor surface of each floor of the building
  • partitions 17 and 18 divide the space between the wall 15 and the outer envelope 16 into a room R1 surrounding the lehr 11 and a room R2 surrounding the cooling zone 12.
  • the manufacturing device 9 includes a cutting device 19 below the cooling zone 12.
  • the cutting device 19 is configured to sequentially cut out the glass plates Gs (the original glass of the mother glass plate 1) from the glass ribbon Gr by cutting the glass ribbon Gr in a vertical position in the width direction every predetermined length. be done.
  • the cutting device 19 includes a wheel cutter (not shown) that runs on one side of the glass ribbon Gr descending from the cooling zone 12 to form a scribe line S along the width direction of the glass ribbon Gr; Bending stress is applied around the scribe line S while holding the contact portion 20 that supports the area where S is formed from the other side of the glass ribbon Gr and the glass ribbon Gr in the portion corresponding to the glass plate Gs.
  • a holding section 21 that performs an operation for this purpose (operation in the V direction) is provided.
  • the wheel cutter is configured to form a scribe line S over the entire width or a part of the width direction of the glass ribbon Gr while descending to follow the descending glass ribbon Gr.
  • the scribe line S is also formed at the end including the relatively thick ear, but the scribe line S does not need to be formed at the end.
  • the scribe line S may be formed by laser irradiation or the like. Further, since the end portion including the ear portion is cut and removed from the glass plate Gs in a post-process, no ear portion remains in the produced mother glass plate 1.
  • the contact portion 20 is composed of an elongated bar that descends to follow the descending glass ribbon Gr and comes into contact with the entire width or a portion of the glass ribbon Gr in the width direction.
  • the contact surface with the glass ribbon Gr in the contact portion 20 may be a plane or a curved surface curved in the width direction.
  • the holding part 21 is composed of a chuck that holds the end of the glass ribbon Gr in the width direction from both the front and back sides.
  • a plurality of holding parts 21 are provided at intervals in the longitudinal direction of the glass ribbon Gr.
  • the holding portions 21 are provided for one end and the other end in the width direction of the glass ribbon Gr, respectively. All of the plurality of holding parts 21 for one side end are held by the same arm (not shown). Similarly, all of the plurality of holding parts 21 for the other end are held by the same arm (not shown). By the operation of these arms, the plurality of holding parts 21 for one side end and the other side end follow the descending glass ribbon Gr and curve the glass ribbon Gr using the contact part 20 as a fulcrum. (movement in the V direction).
  • the holding part 21 is not limited to the form in which it holds the end portion of the glass ribbon Gr, but may be in a form in which it holds either the front or back surface of the glass ribbon Gr by suction, for example.
  • Each glass plate Gs cut from the glass ribbon Gr includes a rectangular effective portion that will later become the mother glass plate 1, and end portions located on both sides in the width direction with the effective portion in between.
  • the ends include thick ears.
  • the effective portion is cut out by cutting and removing the end portion from the glass plate Gs.
  • a scribe line is formed along the sheet drawing direction on the glass plate Gs (formed along the boundary between the effective part and the end part), and a break cut is performed along the scribe line. By doing so, both ends of the glass plate Gs in the width direction are cut and removed. Thereby, the effective portion is cut out from the glass plate Gs to obtain the mother glass plate 1.
  • the glass ribbon Gr by appropriately annealing the glass ribbon Gr in the annealing performed in the annealing furnace 11 described above, a predetermined shape accuracy can be obtained in the glass ribbon Gr and the mother glass plate 1 obtained from this glass ribbon Gr. I can do it.
  • the ambient temperature of the glass ribbon Gr changes over time within the slow cooling temperature range, it will affect the shape accuracy of the glass ribbon Gr (mother glass plate 1). Therefore, by suppressing the differential pressure fluctuation between the room R1 surrounding the lehr 11 and the cooling zone 12 (inner space of the cooling zone 12 divided by the wall 15), the temperature inside the lehr 11 is kept constant.
  • the range of variation in the differential pressure between the room R1 surrounding the slow cooling furnace 11 and the cooling zone 12 was set to 0.5 Pa to 1.5 Pa.
  • the "fluctuation range of differential pressure” means the difference between the maximum value and the minimum value of the differential pressure between the room R1 surrounding the lehr 11 and the cooling zone 12 during the period of producing the mother glass plate 1.
  • FIG. 15 a plurality of mother glass plates 1 are displayed side by side in the order in which they were produced in the production process P1.
  • the mother glass plates 1 on the right side of the row are mother glass plates 1 that were produced earlier in chronological order.
  • a test mother glass plate 8 whose shape accuracy is to be measured in the measurement process is sampled.
  • the sampling step P2 is executed at predetermined time intervals (for example, every 2 to 24 hours). That is, the left side of the two mother glass plates 8 for inspection shown in FIG. 15 is the mother glass plate 8 for inspection taken after a predetermined time period from the right side.
  • the mother glass plate 8 for inspection on the right side, which was sampled first, will be referred to as the plate for preceding inspection 8a
  • the mother glass plate 8 for inspection on the left side, sampled later, will be referred to as the plate for subsequent inspection.
  • the plate for subsequent inspection There may be cases where a distinction is made.
  • the time interval for performing the collection process P2 is shorter than the time interval before the molding conditions are changed.
  • the number of mother glass plates 8 for inspection sampled in one sampling process P2 may be one as in this embodiment. It is also possible to use a plurality of sheets.
  • ⁇ Measurement process> In the measurement process, first, a plurality of (seven in this embodiment) first evaluation regions 41 and widthwise end areas 5 are set on the preliminary inspection board 8a, as shown in FIG. , a plurality of (seven in this embodiment) second evaluation regions 42 are set as shown in FIG. A total of 20 third evaluation regions 6 (10 on each side and 10 on the other end) are set. Note that a plurality of first evaluation areas 41 may be set in the same manner as shown in FIGS. 2 and 3.
  • Step 1 For each of the seven first evaluation regions 41 (first evaluation regions A to G), the front and back deflection differences d1 along the board drawing direction and the width direction are measured.
  • the specific procedure for measuring the front and back deflection difference d1 is the same as the procedure described above.
  • a total of 28 front and back deflection differences d1 (14 in the board drawing direction and 14 in the width direction) are measured for one advance inspection board 8a.
  • Step 2 Adjacent first evaluation areas 41 and 41 are set as one set, totaling 6 sets (set of A, B, set of B, C, ... set of E, F, set of F, G)
  • the amount of change ⁇ d1 in the front and back deflection difference d1 between the first evaluation regions 41, 41 along the board drawing direction and the width direction is calculated.
  • the manner of calculating the amount of change ⁇ d1 is the same as the manner described above.
  • a total of 24 change amounts ⁇ d1 (12 in the board drawing direction and 12 in the width direction) are calculated for one advance inspection board 8a.
  • only the amount of change ⁇ d1 in the front and back deflection difference d1 along the width direction may be calculated.
  • Step 3 For each of the seven second evaluation regions 42 (second evaluation regions H to N), the front and back deflection differences d2 along the board drawing direction and the width direction are respectively measured.
  • the specific procedure for measuring the front and back deflection difference d2 is the same as the procedure described above.
  • a total of 28 front and back deflection differences d2 (14 in the board drawing direction and 14 in the width direction) are measured for one advance inspection board 8a.
  • Step 4 With the corresponding first evaluation area 41 and second evaluation area 42 as one set, a total of 7 sets (A, H group, B, I group, . . . F, M group, G, N sets), the amount of change ⁇ d2 between the front and back deflection difference d1 of the four sides of the first evaluation area 41 and the front and back deflection difference d2 of the corresponding four sides of the corresponding second evaluation area 42 is calculated.
  • the manner in which the amount of change ⁇ d2 is calculated is the same as the manner described above. As a result, a total of 28 variations ⁇ d2 are calculated for one advance inspection board 8a.
  • Step 5 Measure the flatness of all third evaluation regions 6 using an optical interferometer.
  • the method of measuring flatness is similar to the method described above. As a result, a total of 20 flatness values are measured for one advance inspection board 8a.
  • a first evaluation area 41, a widthwise end area 5, a second evaluation area 42, and a third evaluation area 6 were set in the same manner as the preceding inspection board 8a. Then, the above [Step 1] to [Step 5] are executed. As a result, for one subsequent inspection board 8b, a total of 28 front and back deflection differences d1, a total of 28 front and back deflection differences d2, a total of 24 changes ⁇ d1, a total of 28 changes ⁇ d2, and a total of 20 flatness values are measured and calculated.
  • the front and back deflection differences d1 and d2 are measured, the amounts of change ⁇ d1 and ⁇ d2 are calculated, and the flatness is measured for each of the plurality of plates.
  • Step 6 Corresponding first evaluation area between the mother glass plates for inspection 8 and 8 (between the preceding inspection plate 8a and the subsequent inspection plate 8b) sampled in two consecutive sampling steps P2 41, 41 (first evaluation areas A, between A, B, between B, ... F, between F, G, along the width direction)
  • the amount of change ⁇ d3 in the front and back deflection difference d1 is calculated.
  • FIG. 16 examples of the amount of change ⁇ d3 are shown in FIG. 16 (results for one of the two sides extending in the board drawing direction) and FIG. 17 (results for one of the two sides extending in the width direction).
  • What is shown in FIGS. 16 and 17 by a solid line is the measurement result of the front and back deflection difference d1 for the preceding test board 8a, and what is shown by a chain line is the corresponding front and back deflection for the subsequent test board 8b.
  • These are the measurement results of the difference d1.
  • the amount of change ⁇ d3 is calculated to be 28 in total (14 in the board drawing direction and 14 in the width direction) when there is one each of the preceding inspection board 8a and the subsequent inspection board 8b.
  • the method may further include a defect depth measuring step and a defect evaluation step of evaluating the defect 1d based on the measured depth.
  • a defect depth measuring step When performing both of these steps, among the plurality of mother glass plates 1 that were judged to be acceptable in the above pass/fail judgment process, only the mother glass plates 1 that were also judged to be acceptable based on the results of the defect evaluation process are selected. It can also be treated as one that satisfies the quality of the mother glass plate 1 of the HDD board.
  • ⁇ Defect depth measurement process> it is possible to measure the depth of the defect 1d using various known measuring methods. For example, from among the images taken of the mother glass plate 1 at a plurality of focal lengths, an image that is most focused on the defect 1d is selected, and based on the focal position of the image, the defect 1d from the main surface is (the depth along the thickness direction of the mother glass plate 1) can be calculated.
  • ⁇ Defect evaluation process In the defect evaluation process, if the depth of the defect 1d measured in the defect depth measurement process is below a predetermined value (for example, 25 ⁇ m or less, 20 ⁇ m or less, 15 ⁇ m or less, 10 ⁇ m or less), the size and type of the defect 1d are determined. Regardless, the defect 1d is determined to be an acceptable defect. At that time, a defect whose depth from one main surface is less than or equal to a predetermined value may be determined to be an acceptable defect, but a defect whose depth from one main surface is less than or equal to a predetermined value may be determined to be an acceptable defect.
  • a predetermined value for example, 25 ⁇ m or less, 20 ⁇ m or less, 15 ⁇ m or less, 10 ⁇ m or less
  • the mother glass plate 1 determines a defect whose depth from the other main surface is less than or equal to a predetermined value as an acceptable defect. If the mother glass plate 1 has only acceptable defects, the mother glass plate 1 is determined to be acceptable. On the other hand, if the depth of the defect 1d is greater than a predetermined value, the defect 1d is determined to be a reject defect. Thereafter, the pass/fail of the mother glass plate 1 is determined based on the number, size, and type of reject defects included in the mother glass plate 1, and the mother glass plate 1 determined to be rejected is discarded. By performing such a defect evaluation process, it can be determined that the mother glass plate 1 having only acceptable defects satisfies the quality as the mother glass plate 1 for an HDD substrate, and the yield of the mother glass plate 1 can be improved. can do.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Ce procédé de fabrication de feuille de verre mère comprend une étape de collecte (P2) pour collecter une feuille de verre mère (8) pour inspection, et une étape de mesure pour mesurer la précision de forme de la feuille de verre mère (8) pour inspection, l'étape de collecte (P2) étant exécutée à chaque période prescrite, et définissant une pluralité de premières régions d'évaluation rectangulaires (41) de façon à satisfaire la largeur totale de la partie efficace de la feuille de verre mère collectée (8) pour inspection ; et l'étape de mesure comprenant une étape consistant à mesurer une différence de déviation avant-arrière (d1) le long d'une direction d'étirage de feuille et une direction de largeur pour chaque première région d'évaluation (41), et une étape consistant à calculer une quantité de changement (Δd3) de la différence de déviation avant-arrière (d1) entre de premières régions d'évaluation correspondantes (41, 41) entre des feuilles de verre mère (8, 8) pour inspection collectées dans deux étapes de collecte (P2) consécutives.
PCT/JP2023/024629 2022-07-13 2023-07-03 Feuille de verre mère et procédé de fabrication de feuille de verre mère WO2024014340A1 (fr)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH116726A (ja) * 1997-06-17 1999-01-12 Hoya Corp 反り値の測定方法及び測定装置
JPH11116267A (ja) * 1996-09-04 1999-04-27 Hoya Corp 高い比弾性率を有するガラス
JP2005174500A (ja) * 2003-12-12 2005-06-30 Hoya Corp 情報記録媒体用ガラス基板の製造方法
JP2013249254A (ja) * 2008-03-28 2013-12-12 Furukawa Electric Co Ltd:The 板材の製造方法および板材
JP2017178711A (ja) * 2016-03-31 2017-10-05 ＡｖａｎＳｔｒａｔｅ株式会社 磁気記録媒体用ガラス基板及びその製造方法
JP2020508958A (ja) * 2017-02-28 2020-03-26 コーニング インコーポレイテッド 厚み変動を抑制したガラス物品、その製造方法、及びそのための装置
JP2020101434A (ja) * 2018-12-21 2020-07-02 日本電気硝子株式会社 ガラス板の撓み測定装置及びガラス板の製造方法
JP2021124381A (ja) * 2020-02-05 2021-08-30 日本電気硝子株式会社 ガラス板の形状測定方法及びガラス物品の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11116267A (ja) * 1996-09-04 1999-04-27 Hoya Corp 高い比弾性率を有するガラス
JPH116726A (ja) * 1997-06-17 1999-01-12 Hoya Corp 反り値の測定方法及び測定装置
JP2005174500A (ja) * 2003-12-12 2005-06-30 Hoya Corp 情報記録媒体用ガラス基板の製造方法
JP2013249254A (ja) * 2008-03-28 2013-12-12 Furukawa Electric Co Ltd:The 板材の製造方法および板材
JP2017178711A (ja) * 2016-03-31 2017-10-05 ＡｖａｎＳｔｒａｔｅ株式会社 磁気記録媒体用ガラス基板及びその製造方法
JP2020508958A (ja) * 2017-02-28 2020-03-26 コーニング インコーポレイテッド 厚み変動を抑制したガラス物品、その製造方法、及びそのための装置
JP2020101434A (ja) * 2018-12-21 2020-07-02 日本電気硝子株式会社 ガラス板の撓み測定装置及びガラス板の製造方法
JP2021124381A (ja) * 2020-02-05 2021-08-30 日本電気硝子株式会社 ガラス板の形状測定方法及びガラス物品の製造方法

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