WO2023281871A1 - 流体制御システム及びバルブモジュール - Google Patents

流体制御システム及びバルブモジュール Download PDF

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Publication number
WO2023281871A1
WO2023281871A1 PCT/JP2022/015335 JP2022015335W WO2023281871A1 WO 2023281871 A1 WO2023281871 A1 WO 2023281871A1 JP 2022015335 W JP2022015335 W JP 2022015335W WO 2023281871 A1 WO2023281871 A1 WO 2023281871A1
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WO
WIPO (PCT)
Prior art keywords
valve
block
flow path
control system
fluid control
Prior art date
Application number
PCT/JP2022/015335
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English (en)
French (fr)
Japanese (ja)
Inventor
美良 木村
Original Assignee
イハラサイエンス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イハラサイエンス株式会社 filed Critical イハラサイエンス株式会社
Priority to CN202280040777.3A priority Critical patent/CN117425790A/zh
Priority to JP2023533431A priority patent/JPWO2023281871A1/ja
Publication of WO2023281871A1 publication Critical patent/WO2023281871A1/ja

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/02—Means to prevent accidental or unauthorised actuation to be locked or disconnected by means of a pushing or pulling action

Definitions

  • the present invention relates to a fluid control system used, for example, in a semiconductor manufacturing process, and a valve module that constructs this system.
  • Patent Document 1 As a conventional fluid control system, as shown in Patent Document 1, there are those in which various fluid devices are provided in a fluid flow channel.
  • a plurality of blocks having V-shaped or U-shaped internal flow paths are arranged in a row, and the above-described fluid device is attached to these blocks.
  • a manual valve, a filter, a pressure reducing valve, a pressure gauge, a two-way valve, a three-way valve, a mass flow controller, etc. are arranged to form one flow path.
  • valves are used as fluid devices. More specifically, in order to perform remote operation by a controller, an automatically controllable two-way pneumatic valve or three-way pneumatic valve is required. A manual valve is required to confirm the type and then allow the fluid to flow.
  • the main object of the present invention is to provide a new and unprecedented valve module that contributes to dramatic downsizing of fluid control systems.
  • the fluid control system includes a mass flow controller, a pair of blocks in which the mass flow controller is bridged and an internal flow path is formed, and one of the pair of blocks is attached to the block to control the internal flow path. and a valve arranged on the road, wherein the valve is attached to a surface of the one block facing the other block, and is arranged in a space surrounded by the opposite surface and the bottom surface of the mass flow controller.
  • the space surrounded by the block and the mass flow controller which was conventionally a dead space, can be utilized, so the system can be dramatically made more compact.
  • the one block is formed with a second internal flow channel separate from the internal flow channel, and the valve is configured to be a fluid flowing through the internal flow channel or the second internal flow channel.
  • An example is a three-way valve that selectively circulates any of the fluids flowing through the channel.
  • another valve attached to the first equipment attachment surface to which the mass flow controller of the one block is attached.
  • the function of the three-way valve and the function of another valve can be modularized.
  • An automatic on-off valve in which the other valve is switched between an open state and a closed state by receiving power from a power source and moving the valve body, and a locked state in which the movement of the valve body is restricted by pressing the valve body. It is preferable to include a manual operation unit that is manually operated to switch between the unlocked state in which the regulation is released and the movement of the valve body is permitted. According to the valve module configured as described above, by switching the manual operation unit to the locked state and pressing the valve body, the automatic on-off valve can be kept closed, and the manual operation unit can be released from the unlocked state. By switching and permitting the movement of the valve body, the automatic on-off valve can be opened and closed.
  • the filter can be incorporated into the valve module, and not only valves but also various fluid devices can be modularized.
  • the valve module according to the present invention includes one of a pair of blocks in which a mass flow controller is bridged and an internal flow path is formed, and a valve attached to the one block and arranged on the internal flow path. and wherein the valve is attached to a surface of the one block facing the other block, and is arranged in a space surrounded by the surface facing the other block and the bottom surface of the mass flow controller. It is something to do.
  • the valve module configured in this way by utilizing the same effect as the fluid control system described above, that is, by utilizing the space surrounded by the block and the mass flow controller, which was a dead space in the past, The system can be dramatically made compact.
  • FIG. 1 is a schematic diagram showing the overall configuration of a fluid control system according to an embodiment of the present invention
  • FIG. The schematic diagram which shows the structure of the valve module in the same embodiment.
  • FIG. 4 is a schematic diagram showing the internal configuration of the air introducing member in the same embodiment;
  • 4A and 4B are schematic diagrams showing a locked state and an unlocked state of the manual operation unit according to the embodiment;
  • the schematic diagram which shows the structure of the valve module in other embodiment. 1 is a schematic diagram showing the configuration of a conventional fluid control system;
  • the valve module 100 of this embodiment constructs a fluid control system X for an integrated high-purity gas supply system.
  • this valve module 100 can be used in various gas supply system fluid control systems.
  • This fluid control system X is used, for example, in a semiconductor manufacturing process, and controls flow rates of various fluids such as process gas. Specifically, as shown in FIG. 1, for example, a plurality of fluid lines XL through which different types of fluids flow are provided. A combined valve module 100 is provided. Note that the mass flow controller MFC and the valve module 100 do not necessarily have to be provided for all of the plurality of fluid lines XL.
  • the mass flow controller MFC as shown in FIG.
  • the fluid flowing through the internal flow path of the downstream block 20 is introduced into the mass flow controller MFC, is flow-controlled, and flows out to the internal flow path of the downstream block 20 .
  • mass flow controllers MFC such as differential pressure type and thermal type
  • mass flow controller MFC of this embodiment incorporates a regulator function and a filter for preventing crosstalk, these are also not essential, and the specific configuration may be changed as appropriate.
  • This mass flow controller MFC is housed in a casing C with a fluid control valve and a flow rate sensor (not shown) supported by a base member B.
  • the bottom surface BS of the mass flow controller MFC that is, the bottom surface BS of the base member B is bridged between the upstream block 10 and the downstream block 20 described above.
  • an inflow port (not shown) of the mass flow controller MFC is connected to the fluid outlet port Pb formed in the upstream block 10, and the mass flow controller MFC is connected to the fluid inlet port Px formed in the downstream block 20.
  • outflow port (not shown) is connected.
  • the downstream block 20 is provided with a downstream automatic opening/closing valve 30 such as a pneumatic two-way valve.
  • valve module 100 will be explained.
  • the valve module 100 has the functions of a plurality of types of valves, and as shown in FIG. A valve 50 and a manual operation unit 60 are provided.
  • Block 10 is the upstream block 10 described above in this embodiment.
  • the valve module 100 may be configured using the downstream block 20 instead of the upstream block 10 .
  • the upstream block 10 is formed with at least the first internal channel L1 through which the fluid to be controlled flows.
  • the first internal flow path L1 is divided into an upstream element L1a, a midstream element L1b, and a downstream element L1c by a first valve 40 and a second valve 50, which will be described later.
  • the upstream block 10 is formed with a first fluid introduction port Pa1 through which the fluid to be controlled is introduced and a fluid outlet port Pb through which the fluid flows out, and a first valve 40 is attached.
  • a first valve port Pc and a second valve port Pd to which the second valve 50 is attached are formed.
  • the upstream element L1a connects the first fluid introduction port Pa1 and the first valve port Pc
  • the midstream element L1b connects the first valve port Pc and the second valve port Pd
  • a downstream element L1c connects the second valve port Pd and the fluid outlet port Pb.
  • the upstream block 10 of the present embodiment is formed with a second internal flow path L2 in which a second fluid different from the fluid to be controlled flows, in addition to the above-described first internal flow path L1. ing.
  • purge gas etc. can be mentioned as a 2nd fluid.
  • the upstream block 10 here is formed with a second fluid introduction port Pa2 through which the second fluid is introduced.
  • the second fluid introduction port Pa2 here is formed on the rear surface of the surface on which the first fluid introduction port Pa1 is formed.
  • the second fluid introduction port Pa2 and the second valve port Pd are connected by a second internal flow path L2, and the purge gas or the like that has flowed into the second fluid introduction port Pa2 passes through the second valve 50. After that, it flows out from the fluid lead-out port Pb and is led to the mass flow controller MFC.
  • the first valve 40 is an automatic open/close valve that is switched between an open state and a closed state by receiving power from a power source and moving a valve body 41 .
  • the automatic opening/closing valve 40 which is the first valve, is attached to the first valve port Pc of the upstream block 10 described above. is.
  • the automatic on-off valve 40 of this embodiment is a two-way valve that allows or stops the flow of the fluid to be controlled, and is of the so-called normally closed type. That is, when air is supplied to the automatic on-off valve 40, the valve body 41 is separated from the valve seat 42 to open the valve body 40. When the air supply is stopped, the valve body is opened by the biasing force of the spring SP. 41 is seated on the valve seat 42 to be in a closed state.
  • the automatic on-off valve 40 has a valve body 41 accommodated in a casing 43 separated from a valve seat 42 by air introduced from an air introduction member 44. It will be in an open state or a closed state by coming into contact with it.
  • the casing 43 has a hollow cylindrical shape, and the valve body 41 is provided in the internal space thereof via a sealing member such as an O-ring.
  • the peripheral wall portion of the casing 43 is formed with a communication hole 43x for communicating between the outside and the internal space.
  • a ring-shaped groove 43y formed along the circumferential direction is provided on the outer peripheral surface of the peripheral wall portion of the casing 43, and the outer end of the communication hole 43x is connected to the ring-shaped groove 43y. ing.
  • the air introducing member 44 is cylindrical and provided around the casing 43, as shown in FIG.
  • the peripheral wall portion of the air introduction member 44 is formed with an air supply passage 44x that communicates the outside with the internal space and through which the air supplied from the outside flows.
  • An upstream opening 44a of the air supply path 44x is an air supply port 44a to which air is supplied from the outside, and a downstream opening 44b is arranged to face the ring-shaped groove 43y.
  • the air introduction member 44 is rotatably provided around the casing 43 . That is, the air supply port 44a is rotatable, in other words, the direction of the air supply port 44a can be 360 degrees as desired.
  • the valve body 41 is composed of a diaphragm 45 provided to be able to contact and separate from the valve seat 42 and one or more movable bodies 46 interlocking with the diaphragm 45 .
  • three movable bodies 46 that can move in the contact-separating direction are provided. These movable bodies 46 are formed with through holes 46x through which air supplied from the communication holes 43x of the casing 43 passes through the air supply passages 44x of the air introduction member 44 described above. Air passing through the through hole 46 x of the movable body 46 is guided to the air supply space AS formed below the movable body 46 .
  • the supplied air is guided to the air supply space AS through the through hole 46x of the movable body 46 and compressed, thereby lifting the movable body 46, and in conjunction with this, the diaphragm 45 is separated from the valve seat 42. and open.
  • the movable body 46 is lowered, and the diaphragm 45 is seated on the valve seat 42 in conjunction with this movement, resulting in a closed state.
  • the second valve 50 is a three-way valve that is switched between an open state and a closed state by receiving power from a power source and moving the valve body 51 .
  • the three-way valve 50 which is the second valve, is a pneumatic valve to which air is supplied as power to move the valve element 51. Specifically, it selectively selects either the fluid to be controlled or the purge gas as the second fluid. or stop the flow.
  • valve body 51 diaphragm
  • valve seat 52 a type of three-way valves
  • the three-way valve 50 is attached to a second valve port Pd formed on a different surface of the upstream block 10 from the first valve port Pc. That is, the three-way valve 50 is attached to a surface of the upstream block 10 different from the surface to which the first valve 40 is attached.
  • the three-way valve 50 is attached to the facing surface 11 of the upstream block 10 facing the downstream block 20, as shown in FIG. , the bottom surface BS of the mass flow controller MFC, and the facing surface 21 of the downstream block 20 .
  • the valve module 100 of the present embodiment has a lock state R in which the movement of the valve body 41 is restricted by pressing the valve body 41 of the automatic on-off valve 40, and a lock state R in which the restriction is released. and a manual operation portion 60 which is manually switched to an unlocked state UR in which movement of the valve body 41 is permitted.
  • the manual operation referred to here is not necessarily limited to a mode in which the manual operation unit 60 is directly operated by hand, but is a concept including a mode in which a tool such as a screwdriver is used for manual operation.
  • the manual operation unit 60 is provided above the automatic on-off valve 40 described above, and is detachable integrally with the automatic on-off valve 40 with respect to the upstream block 10 .
  • the manual operation unit 60 is, for example, a handle knob using a screw or the like. 62.
  • the moving portion 62 is configured to move between a contact position r in contact with the movable body 46 and a retracted position ur in which the movable body 46 is retracted.
  • the automatic on-off valve 40 can be forcibly kept closed regardless of whether the automatic on-off valve 40 is open or closed. , the flow of the fluid to be controlled flowing through the first internal flow path L1 can be stopped.
  • the valve module 100 of this embodiment further includes a filter F provided in the first internal flow path L1 of the upstream block 10, as shown in FIGS.
  • This filter F is a fine mesh filter required by the process, and here it is arranged in the upstream element L1a of the first internal flow path L1.
  • valve module 100 configured as described above, by switching the manual operation unit 60 to the locked state R and pressing the valve body 41, the automatic opening/closing valve 40 can be maintained in the closed state. 60 is switched to the unlocked state UR to allow movement of the valve body 41, the automatic on-off valve 40 can be opened and closed. In this way, since the manual operation unit 60 functions as if it were a manual valve, it is possible for one valve module 100 to function as both an automatic on-off valve and a manual valve. Thus, by constructing the fluid control system X using this valve module 100, the system can be made more compact than a conventional configuration in which automatic on-off valves and manual valves are attached to blocks one by one.
  • the air introduction member 44 is rotatably provided around the casing 43, even in the fluid control system X having a large number of fluid lines XL and having a narrow work space, the air introduction member 44 can be rotated around the casing 43. By rotating it, it becomes possible to supply air from a desired direction, and it is easy to assemble and maintain.
  • valve module 100 also includes a three-way valve attached to the upstream block 10, the functions of the manual valve, two-way valve, and three-way valve can be modularized.
  • this three-way valve is arranged in the space surrounded by the facing surface 11 of the upstream block 10 and the bottom surface BS of the mass flow controller MFC, this space, which was conventionally a dead space, can be utilized. It is possible to make the system dramatically compact.
  • valve module 100 further includes a filter F provided in the first internal flow path L1, it is possible to modularize not only valves but also various fluid devices.
  • the automatic on-off valve 40 and the three-way valve 50 are pneumatic valves, they are safe even if they leak, and the valve module 100 according to the present invention contributes to the semiconductor manufacturing process.
  • the present invention is not limited to the above embodiments.
  • the automatic on-off valve 40 of the above embodiment was of the normally closed type, but may be of the normally open type.
  • the manual operation unit 60 in the above embodiment is, for example, a handle knob, it may be switched to the locked state R or the unlocked state UR by operating using a tool such as a screwdriver.
  • the automatic on-off valve 40 and the three-way valve 50 in the above embodiment were pneumatic valves, they may be electromagnetic valves depending on the application of the fluid control system X and the valve module 100.
  • the three-way valve 50 is attached to the facing surface 11 of the upstream block 10 in the above embodiment, it may be attached to the facing surface 21 of the downstream block 20 as shown in FIG.
  • valve module 100 the manual operation unit 60 and the automatic opening/closing valve 40 do not necessarily have to be modularized, and as shown in FIG. .
  • first valve 40 was a two-way valve in the above embodiment, it may be a three-way valve. or a manual valve.
  • X fluid control system
  • MFC mass flow controller 100: valve module 10: upstream block 11: facing surface 20: downstream block 21: facing surface 30: downstream Side automatic opening/closing valve 40 First valve 44 Air introduction member 50 Second valve 60 Manual operation unit R Locked state UR Unlocked state F Filter

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
PCT/JP2022/015335 2021-07-09 2022-03-29 流体制御システム及びバルブモジュール WO2023281871A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202280040777.3A CN117425790A (zh) 2021-07-09 2022-03-29 流体控制系统以及阀模块
JP2023533431A JPWO2023281871A1 (zh) 2021-07-09 2022-03-29

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JP2021114436 2021-07-09
JP2021-114436 2021-07-09

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006132598A (ja) * 2004-11-04 2006-05-25 Ckd Corp ガス供給集積ユニット
JP2006234110A (ja) * 2005-02-25 2006-09-07 Ckd Corp ガス供給ユニット及びガス供給システム
JP2006319190A (ja) * 2005-05-13 2006-11-24 Ckd Corp ガス供給集積ユニット、ガスユニット及びモジュールユニット
WO2007141828A1 (ja) * 2006-06-02 2007-12-13 Ckd Corporation ガス供給ユニット及びガス供給システム
JP2016003752A (ja) * 2014-06-19 2016-01-12 株式会社フジキン 流体制御器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006132598A (ja) * 2004-11-04 2006-05-25 Ckd Corp ガス供給集積ユニット
JP2006234110A (ja) * 2005-02-25 2006-09-07 Ckd Corp ガス供給ユニット及びガス供給システム
JP2006319190A (ja) * 2005-05-13 2006-11-24 Ckd Corp ガス供給集積ユニット、ガスユニット及びモジュールユニット
WO2007141828A1 (ja) * 2006-06-02 2007-12-13 Ckd Corporation ガス供給ユニット及びガス供給システム
JP2016003752A (ja) * 2014-06-19 2016-01-12 株式会社フジキン 流体制御器

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CN117425790A (zh) 2024-01-19
JPWO2023281871A1 (zh) 2023-01-12

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