WO2023281687A1 - 位置検出器及びリニア搬送装置 - Google Patents
位置検出器及びリニア搬送装置 Download PDFInfo
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- WO2023281687A1 WO2023281687A1 PCT/JP2021/025737 JP2021025737W WO2023281687A1 WO 2023281687 A1 WO2023281687 A1 WO 2023281687A1 JP 2021025737 W JP2021025737 W JP 2021025737W WO 2023281687 A1 WO2023281687 A1 WO 2023281687A1
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- Prior art keywords
- position detection
- carrier
- magnetic
- magnet
- magnetic shielding
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- 238000001514 detection method Methods 0.000 claims abstract description 208
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000000969 carrier Substances 0.000 claims abstract description 26
- 230000005389 magnetism Effects 0.000 abstract 4
- 230000032258 transport Effects 0.000 description 84
- 238000013459 approach Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 230000006866 deterioration Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
- G01B7/042—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length
- G01B7/046—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length using magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/01—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for shielding from electromagnetic fields, i.e. structural association with shields
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/10—Detecting linear movement
- G01D2205/18—Detecting linear movement using magnetic means not otherwise provided for in this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/40—Position sensors comprising arrangements for concentrating or redirecting magnetic flux
Definitions
- the present disclosure relates to a position detector and a linear transport device that detect the position of a mover on which magnets are mounted.
- a linear motor having a mover and a stator is used in the drive mechanism of a linear transport device that transports articles.
- Japanese Patent Laid-Open No. 2002-200001 discloses a linear transport device having a plurality of carriers.
- a mover is provided below a carrier.
- a linear transfer device disclosed in Patent Document 1 includes one stator and a plurality of movers.
- the carrier is provided with permanent magnets in which different magnetic poles are alternately arranged as a mover, and the transport rail on which a stator composed of coils is installed is provided with a Hall element for detecting the magnetic field of the permanent magnet.
- Permanent magnets on the carrier and Hall elements on the transport rail form a position detector.
- a linear transport device disclosed in Patent Document 1 detects the position of a carrier based on a magnetic field detected by a Hall element.
- the present disclosure has been made in view of the above, and aims to obtain a position detector capable of suppressing deterioration in position detection accuracy even when carriers approach each other.
- a position detector includes a position detection magnet unit installed in each of a plurality of carriers on which movers are mounted, and a stator. and a position detector installed on the transport rail.
- the position detection magnet portion includes a plurality of magnets arranged so that different magnetic poles are alternately arranged along the carrier transport direction, and a side magnetic portion provided at the end of the position detection magnet portion in the carrier transport direction. and a shielding part.
- the position detection unit includes a processing substrate arranged parallel to the carrier transport direction, and a plurality of magnetic detection elements arranged side by side along the carrier transport direction on the surface of the processing substrate that faces the carrier. and a substrate-side magnetic shielding portion provided to face the magnetic detection element on the back surface, which is the surface opposite to the front surface, which is the surface facing the carrier, of the processing substrate.
- the position detector according to the present disclosure has the effect of suppressing deterioration in position detection accuracy even when carriers approach each other.
- FIG. 1 is a diagram showing the configuration of a linear transport system according to Embodiment 1;
- FIG. 2 is a side view of the position detector of the linear transfer device according to the first embodiment;
- FIG. 4 is a diagram showing waveforms of magnetic field intensity applied to the magnetic detection element by the position detection magnet unit of the linear transport device according to the first embodiment;
- FIG. 4 is a diagram showing the positional relationship between the position detection magnet unit and the magnetic detection element of the linear transport device according to the first embodiment;
- FIG. 4 is a diagram showing the positional relationship between the position detection magnet unit and the magnetic detection element of the linear transport device according to the first embodiment;
- FIG. 4 is a diagram showing the positional relationship between the position detection magnet unit and the magnetic detection element of the linear transport device according to the first embodiment;
- FIG. 4 is a diagram showing the positional relationship between the position detection magnet unit and the magnetic detection element of the linear transport device according to the first embodiment;
- FIG. 4 is a diagram showing the strength of the magnetic field applied to the magnetic detection element by the position detection magnet portion that is not the position detection target of the linear transport device according to the first embodiment;
- FIG. 5 is a diagram showing the intensity of a magnetic field applied to a magnetic detection element by a position detection magnet portion that is not a position detection target of the linear transport device according to each of Embodiments 1, 2, and 3; Sectional view along the transport direction of the carrier of the linear transport device according to the fourth embodiment
- FIG. 1 is a diagram showing the configuration of a linear transport system according to Embodiment 1.
- FIG. FIG. 2 is a cross-sectional view perpendicular to the transport direction of the carrier of the linear transport device according to Embodiment 1.
- FIG. A linear transport system 50 according to the first embodiment includes a linear transport device 100 having a plurality of carriers 1 for transporting articles on the upper surface thereof and transport rails 2 for moving the carriers 1 in the transport direction, and a movement of the carriers 1. and a control device 3 for controlling the
- the carrier 1 includes a mover 11 that generates a magnetic field for driving and a position detection magnet portion 12 that generates a magnetic field for position detection.
- the transport rail 2 includes a stator 21 that generates a magnetic field for driving, and a position detector 22 that detects the position of the mover 11 .
- the mover 11 and stator 21 form a linear motor 4 .
- the position detection magnet section 12 and the position detection section 22 form the position detector 5 .
- the carrier 1 conveys the articles by loading the articles to be conveyed and moving in the conveying direction. Note that the carrier 1 may hold an article to be transported by suspending or sucking the article.
- FIG. 3 is a side view of the position detector of the linear transfer device according to Embodiment 1.
- FIG. Since the linear transfer device 100 has two carriers 1, the position detector 5 has two position detection magnets 12 1 and 12 2 .
- the position detection magnet unit 12-1 when distinguishing between the position detection magnet unit 12-1 and the position detection magnet unit 12-2 , it is indicated as the position detection magnet unit 12-1 or the position detection magnet unit 12-2 . is written as the position detection magnet portion 12 .
- the position detection magnet portion 12 includes a plurality of magnets 121 arranged along the transport direction of the carrier 1, side magnetic shield portions 122 provided on both side surfaces of the carrier 1 in the transport direction, and A back surface magnetic shielding part 123 is provided so as to cover the back surface, which is the surface opposite to the front surface, which is the surface facing the transport rail 2 .
- the thickness T of the magnet 121 in the direction perpendicular to the transport direction of the carrier 1 and from the front surface to the rear surface of the magnet 121 is the same as the length S of the side magnetic shielding portion 122 .
- the solid line arrow indicates the magnetic field generated by the magnet 121 of the position detection magnet unit 121 .
- the dashed arrow indicates the magnetic field generated by the magnet 121 of the position detection magnet section 122 .
- the white arrow inside the magnet 121 indicates the direction of the magnetic field inside the magnet 121 .
- a plurality of magnets 121 are arranged along the transport direction of the carrier 1 so that different magnetic poles are arranged alternately. That is, the plurality of magnets 121 shown in FIG. 3 are arranged along the conveying direction of the carrier 1, the magnets 121 having different magnetic field directions alternately. In the linear transfer device 100 according to Embodiment 1, 14 magnets 121 are arranged along the transfer direction of the carrier 1 . It should be noted that the magnet 121 may be formed by forming a plurality of magnetic poles along the transport direction of the carrier 1 on one magnetic body.
- the side magnetic shielding portion 122 and the back magnetic shielding portion 123 are formed using a material having a magnetic permeability of more than 1, such as iron.
- a plurality of position detection units 22 are arranged along the transport direction of the carrier 1 on the surface of the process substrate 222 that is placed parallel to the transport direction of the carrier 1 and on the surface of the process substrate 222 that faces the carrier 1. It has a magnetic detection element 221 and a substrate-side magnetic shielding portion 223 provided on the back surface of the processing substrate 222 opposite to the surface on which the magnetic detection element 221 is mounted.
- the magnetic detection element 221 detects the magnetic field generated by the magnet 121 of the position detection magnet section 12 . Note that FIG.
- FIG. 3 shows only one of the plurality of magnetic detection elements 221 arranged along the transport direction of the carrier 1 .
- the carrier 1 to be detected by the magnetic detection element 221 illustrated in FIG. 3 is the carrier 1 including the position detection magnet portions 121 arranged facing each other.
- the carrier 1 provided with the position detection magnet portion 122 does not face the magnetic detection element shown in FIG. It is not subject to H.221 position detection.
- FIG. 3 shows a mode in which the substrate-side magnetic shielding part 223 is installed over the entire back surface of the processing substrate 222 .
- One of the mover 11 and the stator 21 can use an electromagnet, and the other can use an electromagnet or a permanent magnet.
- a permanent magnet for the mover 11 and an electromagnet for the stator 21 wiring for connecting a plurality of moving carriers 1 and the control device 3 becomes unnecessary, and the wiring does not need to be connected to the movement of the carrier 1. is no longer hindered.
- the magnetic detection element 221 detects only the magnetic field generated by the magnet 121 of the position detection magnet portion 121 of the carrier 1 that is the target of position detection. to detect
- the carrier 1, which is not the target of position detection approaches the carrier 1, which is the target of position detection, if nothing interrupts the magnetic field generated by the magnet 121 of the position detection magnet unit 122 of the carrier 1 which is not the target of position detection, the position The magnetic field generated by the magnet 121 of the position detection magnet portion 122 of the carrier 1 , which is not the target of detection, is detected by the magnetic detection element 221, and the position detection accuracy of the carrier 1, which is the target of position detection, is lowered.
- the position detection magnet part 12 is provided with the side magnetic shield part 122 on the side surface of the carrier 1 in the transport direction, the position of the carrier 1, which is not subject to position detection, can be detected.
- the loop portion with a small magnetic line of force is blocked by the side magnetic shielding portion 122 and does not reach the magnetic detecting element 221 .
- the position detection magnet section 12 is provided with the back surface magnetic shielding section 123 and the position detection section 22 is provided with the substrate side magnetic shielding section 223, the position of the carrier 1 which is not the target of position detection can be detected.
- the loop portion with a large magnetic line of force is blocked by the back surface magnetic shielding portion 123 or the board side magnetic shielding portion 223 and does not reach the magnetic detection element 221 .
- FIG. 4 is a diagram showing the waveform of the strength of the magnetic field applied to the magnetic detection element by the position detection magnet section of the linear transport device according to the first embodiment.
- the horizontal axis of FIG. 4 is the position of the carrier 1 in the transport direction, and the vertical axis of FIG. The vertical axis in FIG. 4 is positive when the magnetic field is applied from the front surface to the back surface of the magnetic detection element 221 .
- the solid line indicates the waveform of the magnetic field strength in the first embodiment
- the dashed line indicates the waveform without the side magnetic shielding portion, the rear magnetic shielding portion, and the board side magnetic shielding portion for comparison.
- FIG. 5 shows a state in which the position detection magnet portion 12 is arranged at the position of 0P.
- FIG. 6 shows a state in which the position detection magnet portion 12 is arranged at the position 13P.
- the position detection magnet section 12 is composed of 14 magnets 121, so the magnetic detection element 221 detects the position detection magnet section 12 in the range from 0P to 13P. , it is necessary to detect the magnetic field of the position detection magnet section 12, and it is not necessary to detect the magnetic field of the position detection magnet section 12 that is arranged outside the range of 0P to 13P.
- FIG. 8 is a diagram showing the strength of the magnetic field applied to the magnetic detection element by the position detection magnet portion, which is not the position detection target, of the linear transfer device according to the first embodiment.
- FIG. 8 shows the magnetic field applied to the magnetic detection element by the position detection magnet portion, which is not the object of position detection, of the linear transfer device that does not include the side magnetic shielding portion, the back magnetic shielding portion, and the substrate side magnetic shielding portion. is shown by the dashed line. Focusing on one of the magnetic detecting elements, the position detecting magnet portion of the linear transfer device that does not include the side magnetic shielding portion, the back magnetic shielding portion, and the board side magnetic shielding portion has a position of 2P with respect to the magnetic detecting element of interest.
- a magnetic field of about 9% of the center of the position detection magnet portion is applied to the magnetic detection element. Therefore, when the position detection magnet portion of the carrier, which is the target of position detection, is arranged at the position 0P with respect to the target magnetic detection element, the position detection magnet portion of the carrier, which is not the target of position detection, is positioned at the position detection target. When it is placed at the position 16P near the target carrier, a 9% error component is superimposed on the magnetic detection element by the position detection magnet portion of the carrier that is not the position detection target.
- the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet section 12, which is not the position detection target of the linear transport apparatus 100 according to the first embodiment, is indicated by a solid line.
- the magnetic field is almost applied to the magnetic detection element 221. not applied. Therefore, even if the carrier 1 that is not the target of position detection approaches the carrier 1 that is the target of position detection, the magnetic field generated by the magnet 121 of the position detection magnet portion 122 of the carrier 1 that is not the target of position detection will not be the target of position detection. does not affect the position detection accuracy of carrier 1.
- the linear transport apparatus 100 can detect the position of the carrier 1, which is not the target of position detection, even when the distance between the carrier 1, which is the target of position detection, and the carrier 1, which is not the target of position detection, is small.
- the magnetic force from the detection magnet unit 122 is blocked by the side magnetic shielding unit 122, the back magnetic shielding unit 123, and the board side magnetic shielding unit 223, and does not reach the magnetic detection element 221. It is possible to suppress the deterioration of the position detection accuracy of.
- FIG. 9 is a side view of the position detection magnet portion of the position detector of the linear transfer device according to the second embodiment.
- the length S of the side magnetic shielding portion 122 is greater than the thickness T of the magnet 121 in the direction perpendicular to the transport direction of the carrier 1 from the front surface to the back surface of the magnet 121. is larger. That is, the side surface magnetic shielding portion 122 installed at the end portion of the carrier 1 in the conveying direction of the position detecting magnet portion 12 protrudes toward the conveying rail 2 side more than the magnet 121. It differs from the carrier device 100 .
- the side magnetic shielding portion 122 installed at the end portion of the position detecting magnet portion 12 in the conveying direction of the carrier 1 protrudes from the magnet 121 toward the conveying rail 2 side. Therefore, the magnetic force from the position detection magnet portion 12 of the carrier 1, which is not subject to position detection, is likely to be blocked by the side magnetic shielding portion 122.
- FIG. 10 is a side view of the position detector of the linear transfer device according to Embodiment 3.
- FIG. 10 is a side view of the position detector of the linear transfer device according to Embodiment 3.
- the magnets 121 protrude toward the conveying rails 2 from the side magnetic shielding portions 122 installed at the ends of the carrier 1 in the conveying direction of the position detecting magnet portions 12 .
- the length of the side magnetic shielding portion 122 is greater than the thickness T of the magnet 121 in the direction perpendicular to the transport direction of the carrier 1 from the front surface to the back surface of the magnet 121.
- the height S is smaller.
- the linear transport device 100 when the carrier 1 is tilted along the transport direction, one of the side magnetic shielding portions 122 provided at both ends of the position detection magnet portion 12 and the position detection portion 22 becomes narrower.
- the magnet 121 protrudes toward the transport rail 2 more than the side magnetic shielding part 122 of the position detection magnet part 12. Therefore, when the carrier 1 is tilted in the transport direction, However, it is possible to prevent the side magnetic shielding portion 122 from contacting the position detecting portion 22 .
- FIG. 11 is a diagram showing the strength of the magnetic field applied to the magnetic detection element by the position detection magnet portion, which is not the target of position detection, of the linear transfer apparatus according to each of Embodiments 1, 2, and 3; be.
- FIG. 11 indicates the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet section 12, which is not the position detection target of the linear transport apparatus 100 according to the first embodiment.
- a dotted line in FIG. 11 indicates the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet section 12, which is not the position detection target of the linear transport apparatus 100 according to the second embodiment.
- a dashed line in FIG. 11 indicates the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet section 12, which is not the position detection target of the linear transport apparatus 100 according to the third embodiment.
- FIG. 11 indicates the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet section 12, which is not the position detection target of the linear transport apparatus 100 according to the third embodiment.
- FIG. 11 shows the magnetic field applied to the magnetic detection element by the position detection magnet portion, which is not subject to position detection, in a linear transfer device that does not include the side magnetic shielding portion, the back magnetic shielding portion, and the substrate side magnetic shielding portion. is shown by the dashed line.
- the position is detected at a position closer to the carrier to be detected than the position 22P, which is the position 8P away from the magnetic detection element.
- the position detection magnet portion of the carrier that is not the target of position detection is arranged, the magnetic field of the position detection magnet portion of the carrier that is not the target of position detection is applied to the magnetic detection element.
- the carrier 1, which is not the object of position detection is positioned farther than 16P in the linear transfer device according to the first embodiment, 15P in the linear transfer device in the second embodiment, and 18P in the linear transfer device in the third embodiment.
- the magnetic field is not applied to the magnetic detection element 221 if the position detection magnet portion 12 is arranged.
- the strength of the magnetic field applied to the magnetic detection element 221 by the position detection magnet portion 12 of the carrier 1, which is not subject to position detection is a linear magnetic shielding portion that does not include the side magnetic shielding portion, the rear magnetic shielding portion, and the substrate side magnetic shielding portion. It is smaller than the transport device. Therefore, the linear transport apparatus 100 according to each of Embodiments 1, 2, and 3 is the target of position detection even if the carrier 1, which is not the target of position detection, approaches the carrier 1 that is the target of position detection. It is possible to suppress the influence on the position detection accuracy of the carrier 1, and it is possible to suppress the deterioration of the position detection accuracy even if the carriers 1 come close to each other.
- FIG. 12 is a cross-sectional view along the transport direction of the carrier of the linear transport device according to the fourth embodiment.
- the linear transfer device 100 according to the fourth embodiment differs from the linear transfer device 100 according to the first embodiment in that the back surface magnetic shielding portion 123 is not provided for the position detection magnet portion 12 .
- the linear transport apparatus 100 since the linear transport apparatus 100 according to the fourth embodiment includes the side magnetic shielding portion 122, it is possible to block the magnetic field that draws a loop with a small magnetic force line that tends to affect the position detection accuracy of the carrier 1, which is the target of position detection. can.
- the back surface magnetic shielding portion 123 cannot shield the magnetic field
- the magnetic field shielded by the back surface magnetic shielding portion 123 is a magnetic field that draws a loop with large magnetic lines of force. The effect is smaller than the magnetic field in which the lines of magnetic force shielded by the side magnetic shielding portion 122 form a small loop.
- the magnetic field that draws a loop with large magnetic lines of force can be shielded by the substrate-side magnetic shielding portion 223 provided on the back surface of the processing substrate 222 before being applied to the magnetic detection element 221 . Therefore, in the linear transport apparatus 100 according to the fourth embodiment, even if the carrier 1 that is not the target of position detection approaches the carrier 1 that is the target of position detection, the position detection accuracy of the carrier 1 that is the target of position detection is not affected. can be suppressed, and deterioration of the position detection accuracy can be suppressed even if the carriers 1 come close to each other.
- the configuration shown in the above embodiment shows an example of the contents, and it is possible to combine it with another known technique, and part of the configuration is omitted or changed without departing from the scope. is also possible.
- the substrate-side magnetic shielding portion 223 is installed over the entire back surface of the processing substrate 222 , but the substrate-side magnetic shielding portion 223 is arranged on the front surface of the processing substrate 222 . It suffices if it is placed on the rear surface of the processing substrate 222 so as to face the magnetic detection element 221 .
- the substrate-side magnetic shielding part 223 is installed on the back surface of the processing substrate 222
- the substrate-side magnetic shielding unit 223 is located only at a position facing the magnetic detection element 221 arranged on the front surface of the processing substrate 222 with the processing substrate 222 interposed therebetween. may be partially installed on the rear surface of the processing substrate 222.
- the processing may be performed so as to surround the magnetic detection element 221 including the position facing the magnetic detection element 221 arranged on the front surface of the processing substrate 222 with the processing substrate 222 interposed therebetween. It may be configured to be partially installed on the back surface of the substrate 222 . Even with such a configuration, the linear transport apparatus 100 and the position detector 5 can detect the position of the carrier 1 that is the target of position detection even if the carrier 1 that is not the target of position detection approaches the carrier 1 that is the target of position detection. Influence on accuracy can be suppressed, and deterioration of position detection accuracy can be suppressed even if carriers 1 approach each other.
- the position detection magnet portion 12 is provided on the carrier 1 as a magnet separate from the mover 11, but the configuration is not limited to this.
- a configuration may be adopted in which a part or all of the permanent magnets or electromagnets included in the mover 11 also function as the position detection magnet section 12 .
- the linear transport apparatus 100 and the position detector 5 can detect the position of the carrier 1 that is the target of position detection even if the carrier 1 that is not the target of position detection approaches the carrier 1 that is the target of position detection. Influence on accuracy can be suppressed, and deterioration of position detection accuracy can be suppressed even if carriers 1 approach each other.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Mechanical Conveyors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Linear Motors (AREA)
Abstract
Description
図1は、実施の形態1に係るリニア搬送システムの構成を示す図である。図2は、実施の形態1に係るリニア搬送装置のキャリアの搬送方向に垂直な断面図である。実施の形態1に係るリニア搬送システム50は、物品を上面に乗せて搬送する複数のキャリア1及び、キャリア1を搬送方向に移動させる搬送レール2を備えたリニア搬送装置100と、キャリア1の移動を制御する制御装置3とを有する。キャリア1は、駆動用の磁界を発生させる可動子11と位置検出用の磁界を発生させる位置検出用磁石部12とを備えている。搬送レール2は、駆動用の磁界を発生させる固定子21と、可動子11の位置を検出する位置検出部22とを備えている。可動子11及び固定子21は、リニアモータ4を形成している。位置検出用磁石部12及び位置検出部22は、位置検出器5を形成している。
図9は、実施の形態2に係るリニア搬送装置の位置検出器の位置検出用磁石部の側面図である。実施の形態2に係るリニア搬送装置100は、キャリア1の搬送方向と垂直であり磁石121の表面から裏面に向かう方向における磁石121の厚さTよりも、側面磁気遮蔽部122の長さSの方が大きくなっている。つまり、位置検出用磁石部12のうちキャリア1の搬送方向の端部に設置された側面磁気遮蔽部122が、磁石121よりも搬送レール2側に突出している点で実施の形態1に係るリニア搬送装置100と相違している。
図10は、実施の形態3に係るリニア搬送装置の位置検出器の側面図である。実施の形態3に係るリニア搬送装置100は、位置検出用磁石部12のうちキャリア1の搬送方向の端部に設置された側面磁気遮蔽部122よりも、磁石121が搬送レール2側に突出している点で実施の形態1に係るリニア搬送装置100と相違している。言い換えると、実施の形態3に係るリニア搬送装置100は、キャリア1の搬送方向と垂直であり磁石121の表面から裏面に向かう方向における磁石121の厚さTよりも、側面磁気遮蔽部122の長さSの方が小さくなっている。
図12は、実施の形態4に係るリニア搬送装置のキャリアの搬送方向に沿った断面図である。実施の形態4に係るリニア搬送装置100は、位置検出用磁石部12に対し裏面磁気遮蔽部123が設けられていない点で、実施の形態1に係るリニア搬送装置100と相違している。
Claims (5)
- 可動子が搭載された複数のキャリアの各々に設置された位置検出用磁石部と、固定子が搭載された搬送レールに設置された位置検出部とを備えた位置検出器であって、
前記位置検出用磁石部は、前記キャリアの搬送方向に沿って異なる磁極が交互に並ぶように配置された複数の磁石と、前記位置検出用磁石部のうち前記キャリアの搬送方向の端部に設置された側面磁気遮蔽部とを備え、
前記位置検出部は、前記キャリアの搬送方向と平行に配置された処理基板と、前記処理基板のうち前記キャリアと対向する面である表面に、前記キャリアの搬送方向に沿って並べて配置された複数の磁気検出素子と、前記処理基板のうち前記キャリアと対向する面である表面の反対側の面である裏面に前記磁気検出素子と対向して設置された基板側磁気遮蔽部とを備えることを特徴とする位置検出器。 - 前記位置検出用磁石部は、複数の前記磁石のうち前記搬送レールと対向する面である表面の反対側の面である裏面を覆って設置された裏面磁気遮蔽部を備えることを特徴とする請求項1に記載の位置検出器。
- 前記側面磁気遮蔽部は、複数の前記磁石よりも前記搬送レール側に突出していることを特徴とする請求項1又は2に記載の位置検出器。
- 複数の前記磁石は、前記側面磁気遮蔽部よりも前記搬送レール側に突出していることを特徴とする請求項1又は2に記載の位置検出器。
- 請求項1から4のいずれか1項に記載の位置検出器を備え、
前記可動子及び前記固定子はリニアモータを形成することを特徴とするリニア搬送装置。
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DE112021007621.3T DE112021007621T5 (de) | 2021-07-08 | 2021-07-08 | Positionsdetektor und Lineartransport-Vorrichtung |
CN202180098796.7A CN117397155A (zh) | 2021-07-08 | 2021-07-08 | 位置检测器及线性输送装置 |
PCT/JP2021/025737 WO2023281687A1 (ja) | 2021-07-08 | 2021-07-08 | 位置検出器及びリニア搬送装置 |
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JPH0574160U (ja) * | 1992-02-28 | 1993-10-08 | 株式会社三協精機製作所 | モータ |
JP2004166401A (ja) * | 2002-11-13 | 2004-06-10 | Matsushita Electric Ind Co Ltd | Dcブラシレスモータ及びそれを備えたdcポンプ |
JP2011061995A (ja) * | 2009-09-10 | 2011-03-24 | Nikon Corp | リニアモータ及びリニアモータの位置検出方法 |
JP2013102570A (ja) * | 2011-11-07 | 2013-05-23 | Yamaha Motor Co Ltd | リニアコンベア及びその駆動制御方法 |
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