WO2023238625A1 - Dispositif d'étalement de chaleur et appareil électronique - Google Patents

Dispositif d'étalement de chaleur et appareil électronique Download PDF

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Publication number
WO2023238625A1
WO2023238625A1 PCT/JP2023/018555 JP2023018555W WO2023238625A1 WO 2023238625 A1 WO2023238625 A1 WO 2023238625A1 JP 2023018555 W JP2023018555 W JP 2023018555W WO 2023238625 A1 WO2023238625 A1 WO 2023238625A1
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WO
WIPO (PCT)
Prior art keywords
wick
thickness direction
convex portion
diffusion device
heat diffusion
Prior art date
Application number
PCT/JP2023/018555
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English (en)
Japanese (ja)
Inventor
竜宏 沼本
誠士 森上
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株式会社村田製作所
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Publication of WO2023238625A1 publication Critical patent/WO2023238625A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427—Cooling by change of state, e.g. use of heat pipes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating

Definitions

  • the present invention relates to heat diffusion devices and electronic equipment.
  • the vapor chamber has a structure in which a working medium (also referred to as working fluid) and a wick that transports the working medium by capillary force are enclosed inside a housing.
  • the working medium absorbs heat from the heat generating elements such as electronic components in the evaporation section, evaporates in the vapor chamber, moves within the vapor chamber, is cooled, and returns to the liquid phase. .
  • the working medium that has returned to the liquid phase moves again to the evaporation section on the heating element side by the capillary force of the wick, and cools the heating element.
  • the vapor chamber can operate independently without external power, and can diffuse heat two-dimensionally at high speed using the latent heat of vaporization and latent heat of condensation of the working medium.
  • Patent Document 1 discloses a casing including an upper casing sheet and a lower casing sheet facing each other joined at outer edges and having an internal space, a hydraulic fluid sealed in the internal space, and the lower casing.
  • a microchannel arranged in the inner space of the sheet and forming a flow path for the working fluid; a sheet-shaped wick arranged in the inner space of the casing and in contact with the microchannel;
  • a vapor chamber is described in which the contact area between the wick and the microchannel is 5% to 40% of the area of the internal space when viewed in plan.
  • the working fluid changes from liquid to gas in the holes of the wick due to heat from a heat source in close contact with the lower housing sheet.
  • the working fluid constitutes a gas-liquid interface in the holes of the wick.
  • the vaporized working fluid releases heat in the internal space of the housing and returns to liquid form.
  • the working fluid which has returned to liquid form, moves through the microchannel due to capillary force due to the pores of the wick and is brought close to the heat source again.
  • the present invention was made in order to solve the above problems, and an object of the present invention is to provide a heat diffusion device that can improve the maximum heat transport amount. Furthermore, an object of the present invention is to provide an electronic device equipped with the above-mentioned heat diffusion device.
  • the heat diffusion device of the present invention includes a casing having a first inner surface and a second inner surface facing each other in the thickness direction, a working medium sealed in an internal space of the casing, and a working medium disposed in the internal space of the casing.
  • a wick the wick including a support in contact with the first inner surface and a perforated body in contact with the support, and an edge of the wick facing toward the second inner surface. curved so that they are close together.
  • the electronic device of the present invention includes the heat diffusion device of the present invention.
  • thermoelectric device that can improve the maximum heat transport amount. Furthermore, according to the present invention, it is possible to provide an electronic device including the above heat diffusion device.
  • FIG. 1 is a perspective view schematically showing an example of a heat diffusion device of the present invention.
  • FIG. 2 is an example of a cross-sectional view of the heat diffusion device shown in FIG. 1 taken along line II-II.
  • FIG. 3 is an enlarged view of portion III in FIG.
  • FIG. 4 is an enlarged view showing a modification of portion III in FIG. 2.
  • FIG. 5 is a cross-sectional view schematically showing an example of a step of arranging a wick whose edge is bent toward the first inner surface side in the casing in the vapor chamber manufacturing process.
  • FIG. 6 is a cross-sectional view schematically showing an example of a step of arranging a wick whose edge is bent toward the second inner surface side in the casing in the vapor chamber manufacturing process.
  • FIG. 7 is a partially enlarged cross-sectional view schematically showing an example of a wick constituting the heat diffusion device shown in FIG. 2.
  • FIG. FIG. 8 is a plan view of the wick shown in FIG. 7 viewed from the support body side.
  • FIG. 9 is a partially enlarged sectional view schematically showing a first modification of the wick.
  • FIG. 10 is a partially enlarged sectional view schematically showing a second modification of the wick.
  • FIG. 11 is a partially enlarged sectional view schematically showing a third modification of the wick.
  • FIG. 12A is a partially enlarged cross-sectional view schematically showing a fourth modification of the wick.
  • FIG. 12B is a plan view schematically showing the through hole, the convex portion, and the flow of steam in the vicinity of the convex portion when the wick shown in FIG. 12A is viewed from the perforated body side.
  • FIG. 13 is a partially enlarged sectional view schematically showing a first modified example of the convex portion shown in FIG. 12A.
  • FIG. 14 is a partially enlarged sectional view schematically showing a second modified example of the convex portion shown in FIG. 12A.
  • FIG. 15 is a partially enlarged sectional view schematically showing a third modification of the convex portion shown in FIG. 12A.
  • FIG. 16 is a partially enlarged sectional view schematically showing a fourth modification of the convex portion shown in FIG. 12A.
  • FIG. 17 is a partially enlarged sectional view schematically showing a fifth modification example of the convex portion shown in FIG. 12A.
  • FIG. 18A is a partially enlarged sectional view schematically showing a fifth modification of the wick.
  • FIG. 18B is a cross-sectional view showing an example of a state in which a working medium is enclosed in the cross-sectional view shown in FIG. 18A.
  • FIG. 19 is a partially enlarged cross-sectional view schematically showing a first modified example of the convex portion shown in FIG. 18A.
  • FIG. 20 is a partially enlarged sectional view schematically showing a second modification of the convex portion shown in FIG. 18A.
  • FIG. 18A is a partially enlarged sectional view schematically showing a fifth modification example of the convex portion shown in FIG. 12A.
  • FIG. 18A is a partially enlarged sectional view schematically showing a fifth modification of the wick.
  • FIG. 18B is a cross-sectional view showing an example
  • FIG. 21 is a partially enlarged sectional view schematically showing a third modification of the convex portion shown in FIG. 18A.
  • FIG. 22 is a partially enlarged sectional view schematically showing a fourth modification of the convex portion shown in FIG. 18A.
  • FIG. 23 is a partially enlarged cross-sectional view schematically showing a fifth modification example of the convex portion shown in FIG. 18A.
  • FIG. 24 is a plan view schematically showing a sixth modification of the wick.
  • FIG. 25 is a plan view schematically showing the arrangement of wicks when the heat diffusion device shown in FIG. 1 is viewed from the thickness direction.
  • FIG. 26 is a plan view schematically showing the arrangement of the wick when the first modified example of the heat diffusion device of the present invention is viewed from the thickness direction.
  • FIG. 27 is a plan view schematically showing the arrangement of the wick when the second modified example of the heat diffusion device of the present invention is viewed from the thickness direction.
  • FIG. 28 is a cross-sectional view schematically showing a third modification of the heat diffusion device.
  • FIG. 29 is a cross-sectional view schematically showing a fourth modification of the heat diffusion device.
  • the heat diffusion device of the present invention will be explained below.
  • the present invention is not limited to the following embodiments, and can be modified and applied as appropriate without changing the gist of the present invention.
  • the present invention also includes a combination of two or more of the individual preferred configurations of the present invention described below.
  • heat diffusion device of the present invention is also applicable to heat diffusion devices such as heat pipes.
  • FIG. 1 is a perspective view schematically showing an example of the heat diffusion device of the present invention.
  • FIG. 2 is an example of a cross-sectional view of the heat diffusion device shown in FIG. 1 taken along line II-II.
  • the vapor chamber (thermal diffusion device) 1 shown in FIGS. 1 and 2 includes a hollow casing 10 that is hermetically sealed.
  • the housing 10 has a first inner surface 11a and a second inner surface 12a facing each other in the thickness direction Z.
  • the vapor chamber 1 further includes a working medium 20 sealed in the internal space of the housing 10 and a wick 30 arranged in the internal space of the housing 10.
  • the housing 10 is provided with an evaporation section that evaporates the enclosed working medium 20.
  • a heat source HS which is a heat generating element, is arranged on the outer surface of the housing 10.
  • the heat source HS include electronic components of electronic equipment, such as a central processing unit (CPU).
  • CPU central processing unit
  • a portion of the internal space of the housing 10 that is near the heat source HS and is heated by the heat source HS corresponds to the evaporation section.
  • the vapor chamber 1 has a planar shape as a whole. That is, it is preferable that the housing 10 has a planar shape as a whole.
  • plan shape includes plate shape and sheet shape, and the dimension in the width direction X (hereinafter referred to as width) and the dimension in the length direction Y (hereinafter referred to as length) is It means a shape that is considerably large relative to its dimensions (hereinafter referred to as thickness or height), for example, a shape whose width and length are 10 times or more, preferably 100 times or more, the thickness.
  • the size of the vapor chamber 1, that is, the size of the housing 10, is not particularly limited.
  • the width and length of the vapor chamber 1 can be set as appropriate depending on the application.
  • the width and length of the vapor chamber 1 are, for example, 5 mm or more and 500 mm or less, 20 mm or more and 300 mm or less, or 50 mm or more and 200 mm or less.
  • the width and length of the vapor chamber 1 may be the same or different.
  • the casing 10 is composed of a first sheet 11 and a second sheet 12 that are joined at their outer edges and that face each other in the thickness direction Z.
  • the first sheet 11 has the first inner surface 11a of the housing 10.
  • the second sheet 12 has a second inner surface 12a of the housing 10. The first sheet 11 and the second sheet 12 are joined at their outer edges by a joint 13 .
  • the materials constituting the first sheet 11 and the second sheet 12 have properties suitable for use as a vapor chamber, such as thermal conductivity and strength. It is not particularly limited as long as it has flexibility, softness, etc.
  • the material constituting the first sheet 11 and the second sheet 12 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing these as main components, and particularly preferably copper. It is.
  • the materials constituting the first sheet 11 and the second sheet 12 may be the same or different, but are preferably the same.
  • the outer edges of the first sheet 11 and the second sheet 12 are joined by the joining part 13.
  • the method of such joining is not particularly limited, but for example, laser welding, resistance welding, diffusion bonding, brazing welding, TIG welding (tungsten-inert gas welding), ultrasonic bonding, or resin sealing can be used, and preferably Laser welding, resistance welding or brazing can be used.
  • the thickness of the first sheet 11 and the second sheet 12 is not particularly limited, but each is preferably 10 ⁇ m or more and 200 ⁇ m or less, more preferably 30 ⁇ m or more and 100 ⁇ m or less, and even more preferably 40 ⁇ m or more and 60 ⁇ m or less.
  • the thickness of the first sheet 11 and the second sheet 12 may be the same or different. Further, the thickness of each of the first sheet 11 and the second sheet 12 may be the same over the entirety, or may be partially thin.
  • each of the first sheet 11 and the second sheet 12 may have an outer edge portion thicker than a portion other than the outer edge portion.
  • the first sheet 11 and the second sheet 12 are joined. There may be a mark in the joint portion 13 where the first sheet 11 and the second sheet 12 were joined.
  • the overall thickness of the vapor chamber 1 is not particularly limited, but is preferably 50 ⁇ m or more and 500 ⁇ m or less.
  • the planar shape of the casing 10 viewed from the thickness direction Z is not particularly limited, and examples thereof include polygons such as triangles and rectangles, circles, ellipses, and combinations thereof. Further, the planar shape of the casing 10 may be an L-shape, a C-shape (U-shape), a staircase shape, or the like. Furthermore, the housing 10 may have a through hole. The planar shape of the casing 10 may be a shape depending on the purpose of the vapor chamber, the shape of the part where the vapor chamber is installed, and other components existing nearby.
  • the working medium 20 is not particularly limited as long as it can cause a gas-liquid phase change in the environment inside the casing 10, and for example, water, alcohols, CFC substitutes, etc. can be used.
  • working medium 20 is an aqueous compound, preferably water.
  • the wick 30 has a capillary structure that can move the working medium 20 by capillary force.
  • the capillary structure of the wick 30 may be a known structure used in conventional vapor chambers.
  • the size and shape of the wick 30 are not particularly limited, it is preferable, for example, that the wick 30 be arranged continuously in the internal space of the housing 10.
  • the wick 30 may be disposed in the entire internal space of the casing 10 when viewed from the thickness direction Z, or the wick 30 may be disposed in a part of the internal space of the casing 10 when viewed from the thickness direction Z. You can leave it there.
  • An example of the arrangement of the wicks in the internal space of the housing 10 will be described later using FIGS. 25, 26, and 27.
  • the wick 30 includes a support 31 in contact with the first inner surface 11a and a perforated body 32 in contact with the support 31.
  • FIG. 3 is an enlarged view of portion III in FIG. 2.
  • FIG. 3 is an enlarged view showing the periphery of the edge of the wick 30.
  • FIG. 4 is an enlarged view showing a modification of portion III in FIG. 2.
  • the edge of the wick 30 is bent toward the second inner surface 12a side.
  • the edge of the wick 30 is bent upward in FIGS. 3 and 4.
  • the edge of the perforated body 32 is bent toward the second inner surface 12a side.
  • the space ( The area indicated by R in FIGS. 3 and 4) is wider.
  • a liquid flow path for the working medium 20 is formed in the space closer to the first inner surface 11a than the edge of the wick 30 by sucking up the working medium 20 by capillary force. . Therefore, if the edge of the wick 30 is bent toward the second inner surface 12a side, the liquid flow path of the working medium 20 can be widened.
  • the working medium 20 that has returned to liquid form can be more efficiently transported to the vicinity of the heat source. Therefore, the maximum heat transport amount of the vapor chamber 1 can be improved.
  • the edge of the wick 30 may be bent toward the second inner surface 12a by, for example, pressing.
  • the edge of the wick 30 is formed by printing a paste material, performing press working, and then firing. may be bent toward the second inner surface 12a side.
  • the edge of the wick 30 approaches the second inner surface 12a by preparing a thicker porous sintered body in advance and removing a portion of the porous sintered body by etching or the like. It may be bent like this.
  • the shape of the edge of the wick 30 is not particularly limited as long as it is curved toward the second inner surface 12a side.
  • the edge of the wick 30 is curved in a cross section along the thickness direction Z so as to approach the second inner surface 12a side.
  • the edge of the wick 30 preferably has a convex shape toward the first inner surface 11a (lower side), as shown in FIGS. 3 and 4.
  • the edge of the wick 30 may be curved so that the curvature is constant, or may be curved while changing the curvature.
  • the edge of the wick 30 may be bent linearly at a predetermined position so as to approach the second inner surface 12a side in the cross section along the thickness direction Z.
  • the edge of the wick 30 and the inner edge of the casing 10 do not have to be in contact, and as shown in FIG. may be in contact with each other.
  • the distance between the edge of the wick 30 and the inner edge of the housing 10 is preferably 500 ⁇ m or less. If the distance between the edge of the wick 30 and the inner edge of the housing 10 (distance indicated by A in FIG. 3) is 500 ⁇ m or less, the edge of the wick 30 will bend toward the second inner surface 12a side. Since the working medium 20 is sucked up by a larger capillary force into the space between the inner edge of the housing 10 and the inner edge of the housing 10, the maximum heat transport amount of the vapor chamber 1 can be further improved. Note that when the edge of the wick 30 and the inner edge of the housing 10 are in contact with each other as shown in FIG. 4, the distance between the edge of the wick 30 and the inner edge of the housing 10 is 0 ⁇ m.
  • the bending height of the edge of the wick 30 (distance indicated by B in FIG. 3), which is the distance in the thickness direction Z between the edge of the wick 30 and a portion of the wick 30 other than the edge, is particularly limited. However, it may be, for example, 1 ⁇ m or more and 100 ⁇ m or less.
  • the bending width of the edge 30 (the length indicated by C in FIG. 3) is not particularly limited, but may be, for example, 1 ⁇ m or more and 1000 ⁇ m or less. In FIG. 3, the bending width of the edge of the wick 30 is the length in the width direction X.
  • the edge of the wick 30 may be bent toward the second inner surface 12a side, but from the viewpoint of widening the liquid flow path of the working medium 20, the edge of the wick 30 may be bent toward the second inner surface 12a side. Preferably, the entire portion is curved toward the second inner surface 12a side.
  • the joint 13 between the first sheet 11 and the second sheet 12 is located between the support 31 of the wick 30 and the second inner surface 12a of the casing 10 in the thickness direction Z.
  • the height of the joint 13 between the first sheet 11 and the second sheet 12 may be higher than the support 31 of the wick 30.
  • the edge of the wick 30 is bent toward the second inner surface 12a side, and the joint 13 between the first sheet 11 and the second sheet 12 supports the wick 30 in the thickness direction Z. The effect of being located between the body 31 and the second inner surface 12a of the housing 10 will be explained.
  • FIG. 5 is a cross-sectional view schematically showing an example of a step of arranging a wick whose edge is bent toward the first inner surface side in the casing in the vapor chamber manufacturing process.
  • FIG. 6 is a cross-sectional view schematically showing an example of a step of arranging a wick whose edge is bent toward the second inner surface side in the casing in the vapor chamber manufacturing process.
  • the wick 30 is arranged in the internal space of the housing 10 by joining the first sheet 11 and the second sheet 12. It's okay.
  • the wick 30 is arranged such that the outer edge of the first sheet 11 is located above the support 31 of the wick 30. At this time, for example, as shown in FIG. 5, if the edge of the wick 130 is bent toward the first inner surface 11a, the edge of the wick 130 may be caught on the outer edge of the first sheet 11.
  • the wick 130 If the wick 130 is put away, it may become impossible to arrange the wick 130 at a predetermined position. Although not shown in FIG. 5, even if the edge of the wick 130 is not bent, the edge of the wick 130 may catch on the outer edge of the first sheet 11, causing the wick 130 to be placed in a predetermined position. There is a risk that you will not be able to do so. As a result, if the first sheet 11 and the second sheet 12 are joined with the edge of the wick 130 caught on the outer edge of the first sheet 11, defects related to the maximum heat transport amount or the thickness of the casing may occur in the vapor chamber. There is a risk that leaks may occur. On the other hand, as shown in FIG.
  • the edge of the wick 30 is bent toward the second inner surface 12a, and the outer edge of the first sheet 11 is closer to the support of the wick 30. 31, so that even if the edge of the wick 30 is placed on the outer edge of the first sheet 11, the edge of the wick 30 will slide over the outer edge of the first sheet 11. Because of this arrangement, the edge of the wick 30 does not get caught on the outer edge of the first sheet 11. As a result, it is possible to prevent defects related to the maximum heat transport amount or the thickness of the casing in the vapor chamber 1.
  • the joint 13 between the first sheet 11 and the second sheet 12 be located at a different position from the edge of the wick 30 in the thickness direction Z. If the joint 13 between the first sheet 11 and the second sheet 12 is located at the same position as the edge of the wick 30 in the thickness direction Z, the first sheet 11 and the second sheet 12 will be connected in the manufacturing process of the vapor chamber. When joining, the part that functions as the wick 30 is reduced by entering the wick 30 into the joint part 13, so there is a risk that the maximum heat transport amount will decrease. On the other hand, if the joint 13 between the first sheet 11 and the second sheet 12 is located at a different position from the edge of the wick 30 in the thickness direction Z, the edge of the wick 30 will enter the joint 13. Therefore, it is possible to prevent the maximum heat transport amount from decreasing in the vapor chamber 1.
  • the joint 13 between the first sheet 11 and the second sheet 12 is located between the edge of the wick 30 and the second inner surface 12a of the casing 10 in the thickness direction Z.
  • the edge of the wick 30 may be located between the joint 13 of the first sheet 11 and the second sheet 12 and the second inner surface 12a of the housing 10 in the thickness direction Z.
  • FIG. 7 is a partially enlarged sectional view schematically showing an example of a wick that constitutes the heat diffusion device shown in FIG. 2.
  • FIG. 8 is a plan view of the wick shown in FIG. 7 viewed from the support body side.
  • a support 31 is formed in the recessed part by bending and recessing a part of the metal foil by, for example, press working. Since a vapor space is formed in the recessed portion of the support body 31, thermal conductivity is improved. Not limited to the example shown in FIG. 7, when pressing metal foil, a through hole may be formed in a recessed portion when a part of the metal foil is bent, depending on the condition of the pressing.
  • the thickness of the metal foil is constant before performing press working or the like. However, the metal foil may become thinner in bent areas. From the above, in the wick 30, it is preferable that the thickness of the support body 31 is the same as the thickness of the porous body 32, or smaller than the thickness of the porous body 32.
  • the porous body 32 is made of the same material as the support body 31.
  • the support body 31 and the perforated body 32 are integrally constructed.
  • the support body 31 and the porous body 32 are integrally constituted means that there is no interface between the support body 31 and the porous body 32, and specifically, , which means that the boundary between the support body 31 and the porous body 32 cannot be determined.
  • the support body 31 includes a plurality of columnar members, for example, as shown in FIG.
  • columnar means a shape in which the ratio of the length of the long side of the bottom surface is less than 5 times the length of the short side of the bottom surface.
  • the shape of the columnar member is not particularly limited, and examples include shapes such as a columnar shape, a prismatic shape, a truncated cone shape, and a truncated pyramid shape.
  • the shape of the support body 31 is not particularly limited, it is preferable that the support body 31 has a tapered shape whose width becomes narrower from the perforated body 32 toward the first inner surface 11a, as shown in FIGS. 2 and 7. Thereby, the flow path between the supports 31 can be widened on the first inner surface 11a side of the housing 10 while suppressing the perforated body 32 from falling into the spaces between the supports 31. As a result, the transmittance increases and the maximum heat transport amount increases.
  • the arrangement of the supports 31 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly throughout, for example, so that the center-to-center distance (pitch) of the supports 31 is constant.
  • the center-to-center distance of the support body 31 (the length indicated by P 31 in FIG. 8) is, for example, 60 ⁇ m or more and 800 ⁇ m or less.
  • the width of the support body 31 (the length indicated by W 31 in FIG. 8) is, for example, 20 ⁇ m or more and 500 ⁇ m or less.
  • the height of the support body 31 (the length indicated by T 31 in FIG. 7) is, for example, 10 ⁇ m or more and 100 ⁇ m or less.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the support body 31 is, for example, 20 ⁇ m or more and 500 ⁇ m or less.
  • the bending height of the edge of the wick 30 may be smaller or larger than the height of the support 31 (the length indicated by T 31 in FIG. 7). , may be the same.
  • the bending width of the edge of the wick 30 may be smaller or larger than the width of the support 31 (length indicated by W 31 in FIG. 8). Well, they can be the same.
  • the perforated body 32 may have a through hole 33 penetrating in the thickness direction Z.
  • the working medium 20 can move due to capillary action.
  • the through hole 33 is provided in a portion where the support body 31 is not present when viewed from the thickness direction Z.
  • the shape of the through hole 33 is not particularly limited, it is preferable that the cross section in a plane perpendicular to the thickness direction Z is circular or elliptical.
  • the arrangement of the through holes 33 of the perforated body 32 is not particularly limited, but is preferably arranged uniformly in a predetermined area, more preferably evenly over the entire area, for example, by adjusting the center-to-center distance (pitch) of the through holes 33 of the perforated body 32. are arranged so that it is constant.
  • the distance between the centers of the through holes 33 of the porous body 32 is, for example, 3 ⁇ m or more and 150 ⁇ m or less.
  • the diameter of the through hole 33 (the length indicated by ⁇ 33 in FIG. 8) is, for example, 100 ⁇ m or less.
  • the thickness of the porous body 32 (the length indicated by T 32 in FIG. 7) is, for example, 5 ⁇ m or more and 50 ⁇ m or less.
  • the bending height of the edge of the wick 30 may be smaller than or greater than the thickness of the perforated body 32 (the length indicated by T 32 in FIG. 7). Well, they can be the same.
  • the bending width of the edge of the wick 30 may be smaller or larger than the diameter of the through hole 33 (length indicated by ⁇ 33 in FIG. 8). Well, they can be the same.
  • the through-hole 33 can be made, for example, by punching the metal or the like that constitutes the perforated body 32 by press working.
  • the wick 30 may be formed by simultaneously performing the press work for forming the support body 31 and the press work for forming the through holes 33.
  • the vapor chamber 1 may further include a support 40 disposed in the internal space so as to be in contact with the second inner surface 12a of the housing 10. It is possible to support the housing 10 and the wick 30 by arranging the struts 40 in the internal space of the housing 10.
  • the material constituting the pillar 40 is not particularly limited, and examples thereof include resin, metal, ceramics, a mixture thereof, a laminate, and the like. Further, the support column 40 may be integrated with the housing 10, and may be formed by, for example, etching the second inner surface 12a of the housing 10.
  • the shape of the support 40 is not particularly limited as long as it can support the housing 10 and the wick 30, but the shape of the cross section perpendicular to the height direction of the support 40 may be, for example, a polygon such as a rectangle, a circle, or an ellipse. Examples include shape.
  • the heights of the columns 40 may be the same or different in one vapor chamber.
  • the height of the pillar 40 may be, for example, 50 ⁇ m or more and 1000 ⁇ m or less.
  • the height of the support column 40 is preferably greater than the height of the support body 31.
  • the width of the support 40 is not particularly limited as long as it provides strength that can suppress deformation of the casing 10, but the width is the equivalent circle diameter of the cross section perpendicular to the height direction of the end of the support 40. is, for example, 100 ⁇ m or more and 2000 ⁇ m or less, preferably 300 ⁇ m or more and 1000 ⁇ m or less.
  • the equivalent circle diameter of the support column 40 By increasing the equivalent circular diameter of the support column 40, deformation of the housing 10 can be further suppressed.
  • by reducing the equivalent circle diameter of the support column 40 it is possible to secure a wider space for the vapor of the working medium 20 to move.
  • the equivalent circle diameter of the cross section perpendicular to the height direction of the support 40 is preferably larger than the equivalent circle diameter of the cross section perpendicular to the height direction of the support body 31.
  • the arrangement of the struts 40 is not particularly limited, but is preferably arranged evenly in a predetermined area, more preferably evenly throughout, for example, so that the distance between the struts 40 is constant. By arranging the pillars 40 evenly, uniform strength can be ensured throughout the vapor chamber 1.
  • the center-to-center distance between adjacent pillars 40 may be, for example, 100 ⁇ m or more and 5000 ⁇ m or less.
  • the center-to-center distance between mutually adjacent support columns 40 is larger than the center-to-center distance between mutually adjacent supports 31.
  • the support body 31 includes a plurality of columnar members, it is preferable that the center-to-center distance between the mutually adjacent columns 40 is larger than the center-to-center distance between the mutually adjacent columnar members.
  • FIG. 9 is a partially enlarged sectional view schematically showing a first modification of the wick.
  • edges of the wick are not shown in order to simplify the explanation of the modified examples of the wick.
  • the shape of the edge of the wick in the cross-sectional views shown in FIGS. 9 to 11 may be the same as the shape of the edge of the wick 30 in the cross-sectional view shown in FIG.
  • the support body 31 is not recessed.
  • the porous body 32 is made of the same material as the support body 31.
  • the materials constituting the support body 31 and the porous body 32 are not particularly limited, but may include, for example, resin, metal, ceramics, or a mixture thereof; Examples include laminates.
  • the material constituting the support body 31 and the porous body 32 is preferably metal.
  • the support body 31 and the perforated body 32 may be integrally configured.
  • the wick 30A in which the support body 31 and the porous body 32 are integrally formed can be produced by, for example, an etching technique, a printing technique using multilayer coating, or another multilayer technique.
  • the support body 31 and the porous body 32 do not need to be integrally constituted.
  • a wick 30A in which a copper pillar as a support 31 and a copper mesh as a perforated body 32 are fixed by diffusion bonding or spot welding the entire surface between the support 31 and the perforated body 32 is fixed. Since it is difficult to join the support body 31 and the porous body 32, a gap is formed between the support body 31 and the porous body 32.
  • the boundary between the support body 31 and the perforated body 32 can be distinguished, so that although the perforated body 32 is made of the same material as the support body 31, It is not constructed integrally with the body 32.
  • FIG. 10 is a partially enlarged sectional view schematically showing a second modification of the wick.
  • the support body 31 is not recessed.
  • the support 31 and the porous body 32 are made of a porous body.
  • the capillary force of the wick 30B can be improved.
  • the porous bodies constituting the support body 31 and the porous body 32 include, for example, porous sintered bodies such as metal porous sintered bodies and ceramic porous sintered bodies, or metal porous bodies, ceramic porous bodies, Examples include porous bodies such as porous resin bodies.
  • the wick 30B made of a porous material can be produced, for example, by a printing technique using multilayer coating using metal paste or ceramic paste.
  • the content of metal or ceramics in the paste for forming the support body 31 may be the same as the content of metal or ceramics in the paste for forming the porous body 32.
  • the content of metal or ceramics in the paste for forming the porous body 32 may be smaller than the content of metal or ceramics in the paste for forming the porous body 32.
  • the density can be made larger than the density of the porous body 32. As a result, the strength of the support body 31 can be increased.
  • the porous body 32 made of a porous body may have through holes penetrating in the thickness direction Z.
  • the porous body 32 made of a porous body does not need to have through holes penetrating in the thickness direction Z.
  • FIG. 11 is a partially enlarged sectional view schematically showing a third modification of the wick.
  • the support 31 is not recessed.
  • the porous body 32 is made of a different material from the support body 31.
  • the material constituting the support body 31 is not particularly limited, and examples thereof include resin, metal, ceramics, a mixture thereof, a laminate, etc. It will be done.
  • the material constituting the porous body 32 is not particularly limited, and examples thereof include resin, metal, ceramics, a mixture thereof, a laminate, and the like.
  • the wick 30C in which the support body 31 and the porous body 32 are made of different materials can be produced, for example, by a printing technique using multilayer coating using metal paste or ceramic paste.
  • the support 31 and the perforated body 32 may be fixed by diffusion bonding, spot welding, or the like.
  • the porous body 32 is made of a porous body.
  • porous body constituting the porous body 32 examples include a porous sintered body such as a porous metal sintered body, a porous ceramic sintered body, a porous metal body, a porous ceramic body, a porous resin body, etc. Examples include porous bodies.
  • the porous body 32 made of a porous body may have a through hole penetrating in the thickness direction Z.
  • the porous body 32 made of a porous body does not need to have through holes penetrating in the thickness direction Z.
  • FIG. 12A is a partially enlarged cross-sectional view schematically showing a fourth modification of the wick.
  • FIG. 12B is a plan view schematically showing the through hole, the convex portion, and the flow of steam in the vicinity of the convex portion when the wick shown in FIG. 12A is viewed from the perforated body side.
  • a protrusion 34 is provided on the periphery of the through hole 33 in a direction approaching the second inner surface 12a.
  • the convex portion 34 has a first end 35 on the first inner surface 11a side and a second end 36 on the second inner surface 12a side.
  • the working medium 20 evaporated in the heat source HS flows in a vapor state through the space between the perforated body 32 and the second inner surface 12a in a direction away from the heat source HS.
  • FIG. 12B when a convex portion 34 is provided at the periphery of the through hole 33 in a direction approaching the second inner surface 12a, steam flowing in the space between the perforated body 32 and the second inner surface 12a flows around the outer peripheral edge of the convex portion 34. Therefore, the flow of steam can be prevented from coming into direct contact with the liquid level of the working medium 20 in the through hole 33. Therefore, the influence of the flow of steam in the opposite direction to the capillary force of the wick 30, that is, the so-called counterflow, can be reduced. Therefore, the maximum heat transport amount of the vapor chamber 1 can be improved.
  • the convex portion 34 is provided on the entire periphery of the through hole 33.
  • the protrusion 34 may be provided only on a part of the periphery of the through hole 33.
  • the convex portion 34 may be provided on the periphery of all the through holes 33 in the perforated body 32, or may be provided only on the periphery of some of the through holes 33 in the perforated body 32. When the convex portion 34 is provided only on the periphery of some of the through holes 33 in the perforated body 32, the convex portion 34 may be provided on the periphery of the through holes 33 other than those located directly above the heat source HS. preferable.
  • the through holes 33 and the convex portions 34 can be produced, for example, by punching the metal or the like that constitutes the perforated body 32 by press working.
  • punching by press working the shape of the convex portion, etc. can be adjusted by appropriately adjusting the punching depth, etc.
  • the punching depth means, for example, how far the punch is pushed in the punching direction when punching is performed.
  • the dimensions of the convex portion 34 are not particularly limited.
  • the height of the protrusion 34 may be larger than the diameter of the through hole 33, the height of the protrusion 34 may be smaller than the diameter of the through hole 33, and the height of the protrusion 34 may be It may be the same as the diameter of the through hole 33.
  • the height of the convex part 34 means the distance in the thickness direction Z between the 1st end part 35 and the 2nd end part 36.
  • the bending height of the edge of the wick 30D (distance indicated by B in FIG. 12A) is greater than the height of the convex portion 34.
  • the bending height of the edge of the wick 30D (distance indicated by B in FIG. 12A) may be smaller than the height of the protrusion 34, or may be the same as the height of the protrusion 34.
  • the thickness of the perforated body 32 is equal to the thickness of the perforated body 32 at the portion where the protrusion 34 is not provided. It means the thickness of the body 32.
  • a support body 31 is formed in the recessed portion by bending and recessing a part of the metal foil by pressing or the like.
  • the wick 30D may be formed by simultaneously performing the press work to form the support body 31 and the press work to form the through holes 33 and the convex portions 34.
  • the support 31 does not have to be recessed like the wick 30A shown in FIG. 9, the wick 30B shown in FIG. 10, and the wick 30C shown in FIG. 11.
  • FIG. 13 is a partially enlarged cross-sectional view schematically showing a first modification of the convex portion shown in FIG. 12A.
  • edges of the wick are not shown in order to simplify the explanation of the modified examples of the wick.
  • the shape of the edge of the wick in the cross-sectional views shown in FIGS. 13 to 17 may be the same as the shape of the edge of the wick 30D in the cross-sectional view shown in FIG. 12A.
  • the convex portion 34a shown in FIG. 13 has a first end 35a on the first inner surface 11a side and a second end 36a on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the second end portion 36a is smaller than the cross-sectional area of the region surrounded by the inner wall of the first end portion 35a.
  • the inner wall of the second end portion 36a when viewed from the thickness direction Z, the inner wall of the second end portion 36a is located inside the inner wall of the first end portion 35a.
  • the flow of steam directly contacts the liquid level of the working medium 20 in the through hole 33. can be further prevented.
  • the influence of counterflow can be further reduced, so that the maximum heat transport amount of the vapor chamber 1 can be further improved.
  • the convex portion 34a has a tapered shape in which the distance between the outer walls of the convex portion 34a becomes narrower toward the second inner surface 12a.
  • the convex portion 34a has a tapered shape in which the distance between the outer walls of the convex portion 34a becomes narrower toward the second inner surface 12a in the cross section along the thickness direction Z, the distance between the perforated body 32 and the second inner surface increases. 12a, when the steam flows in the space between the convex portion 34a and the convex portion 34a, the steam not only flows around the convex portion 34a but also flows along the outer wall surface of the convex portion 34a in the cross section along the thickness direction Z.
  • the protrusion 34a is smaller than the protrusion 34 which does not have a tapered shape in which the distance between the outer walls of the protrusion 34a becomes narrower toward the second inner surface 12a. It is possible to increase the number of paths through which steam comes into contact with. Thereby, a decrease in thermal conductivity of the vapor chamber 1 can be suppressed.
  • the convex portion 34a has a shape that is convex toward the second inner surface 12a side (upper side in FIG. 13) in the cross section along the thickness direction Z.
  • the convex portion 34a has a shape that curves toward the second inner surface 12a side (upper side in FIG. 13) with respect to the line segment connecting the first end portion 35a and the second end portion 36a in the cross section along the thickness direction Z. It is.
  • FIG. 14 is a partially enlarged sectional view schematically showing a second modification of the convex portion shown in FIG. 12A.
  • the convex portion 34b shown in FIG. 14 has a first end 35b on the first inner surface 11a side and a second end 36b on the second inner surface 12a side.
  • the convex portion 34b has a tapered shape in a cross section along the thickness direction Z such that the distance between the outer walls of the convex portion 34b decreases toward the second inner surface 12a.
  • the convex portion 34b has a shape that is convex toward the first inner surface 11a side (lower side in FIG. 14) in a cross section along the thickness direction Z. In other words, the convex portion 34b curves toward the first inner surface 11a side (downward in FIG.
  • the convex portion 34b has a shape that is convex toward the first inner surface 11a side (lower side in FIG. 14) in the cross section along the thickness direction Z, it has a convex shape toward the second inner surface 12a side (upper side in FIG. 13).
  • the slope of the outer wall surface of the portion of the convex portion 34b on the first end 35b side is gentle.
  • the convex portion 34b is removed in the cross section along the thickness direction Z. It becomes easier to flow toward the second inner surface 12a side along the outer wall surface. Thereby, a decrease in the thermal conductivity of the vapor chamber 1 can be further suppressed.
  • FIG. 15 is a partially enlarged sectional view schematically showing a third modification of the convex portion shown in FIG. 12A.
  • the convex portion 34c shown in FIG. 15 has a first end 35c on the first inner surface 11a side and a second end 36c on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the second end portion 36c is smaller than the cross-sectional area of the region surrounded by the inner wall of the first end portion 35c.
  • the convex portion 34c includes a lid portion 37 that narrows the opening of the convex portion 34c at the second end portion 36c.
  • the convex portion 34c when viewed from the thickness direction Z, the cross-sectional area of the region surrounded by the inner wall of the second end portion 36c is narrower than that of the convex portion 34b in which the lid portion 37 does not exist at the second end portion 36c. There is. If the convex portion 34c is provided with a lid portion 37 that narrows the opening of the convex portion 34c at the second end 36c, direct contact of the flow of steam with the liquid level of the working medium 20 in the through hole 33 can be further prevented. I can do it. As a result, the influence of counterflow can be further reduced, so that the maximum heat transport amount of the vapor chamber 1 can be further improved.
  • the lid portion 37 that narrows the opening of the convex portion 34c may be formed by, for example, performing press working on the second end portion 36c.
  • the size and shape of the lid part 37 that narrows the opening of the convex part 34c are not particularly limited, as long as the opening on the second end 36c side of the convex part 34c is narrowed. It is preferable that the lid portion 37 that narrows the opening of the convex portion 34c has a flat surface.
  • the lid portion 37 that narrows the opening of the convex portion 34c is preferably a flat surface perpendicular to the thickness direction Z.
  • the lid portion 37 that narrows the opening of the convex portion 34c may have a curved surface in part or in its entirety.
  • the lid portion 37 that narrows the opening of the convex portion 34c may have an uneven surface.
  • the thickness of the lid portion 37 that narrows the opening of the convex portion 34c may be the same as or different from the thickness of the convex portion 34c.
  • FIG. 16 is a partially enlarged sectional view schematically showing a fourth modification of the convex portion shown in FIG. 12A.
  • the convex portion 34d shown in FIG. 16 has a first end 35d on the first inner surface 11a side and a second end 36d on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the second end portion 36d is larger than the cross-sectional area of the region surrounded by the inner wall of the first end portion 35d.
  • the inner wall of the second end portion 36d is located outside the inner wall of the first end portion 35d.
  • FIG. 17 is a partially enlarged sectional view schematically showing a fifth modification of the convex portion shown in FIG. 12A.
  • the convex portion 34e shown in FIG. 17 has a first end 35e on the first inner surface 11a side and a second end 36e on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the second end portion 36e is larger than the cross-sectional area of the region surrounded by the inner wall of the first end portion 35e.
  • the convex portion 34e includes a lid portion 37 that narrows the opening of the convex portion 34e at the second end portion 36e.
  • the convex portion 34e when viewed from the thickness direction Z, the cross-sectional area of the region surrounded by the inner wall of the second end portion 36e is narrower than that of the convex portion 34d in which the lid portion 37 does not exist at the second end portion 36e. There is. If the convex portion 34e is provided with a lid portion 37 that narrows the opening of the convex portion 34e at the second end 36e, direct contact of the flow of steam with the liquid level of the working medium 20 in the through hole 33 can be further prevented. I can do it. As a result, the influence of counterflow can be further reduced, so that the maximum heat transport amount of the vapor chamber 1 can be further improved.
  • the lid portion 37 that narrows the opening of the convex portion 34e may be formed, for example, by pressing the second end portion 36e.
  • the size and shape of the lid portion 37 that narrows the opening of the convex portion 34e are not particularly limited, as long as the opening on the second end 36e side of the convex portion 34e is narrowed. It is preferable that the lid portion 37 that narrows the opening of the convex portion 34e has a flat surface.
  • the lid portion 37 that narrows the opening of the convex portion 34e is preferably a flat surface perpendicular to the thickness direction Z.
  • the lid portion 37 that narrows the opening of the convex portion 34e may have a curved surface in part or in its entirety.
  • the lid portion 37 that narrows the opening of the convex portion 34e may have an uneven surface.
  • the thickness of the lid portion 37 that narrows the opening of the convex portion 34e may be the same as or different from the thickness of the convex portion 34e.
  • FIG. 18A is a partially enlarged cross-sectional view schematically showing a fifth modification example of the wick.
  • FIG. 18B is a cross-sectional view showing an example of a state in which a working medium is enclosed in the cross-sectional view shown in FIG. 18A.
  • edges of the wick are not shown in order to simplify the explanation of the modified examples of the wick.
  • the shape of the edge of the wick in the cross-sectional views shown in FIGS. 18B and 19 to 23 may be the same as the shape of the edge of the wick 30E in the cross-sectional view shown in FIG. 18A.
  • a protrusion 34f is provided on the periphery of the through hole 33 in a direction approaching the first inner surface 11a.
  • the convex portion 34f has a first end 35f on the first inner surface 11a side and a second end 36f on the second inner surface 12a side.
  • the effect of the protrusion 34f being provided at the periphery of the through hole 33 in a direction approaching the first inner surface 11a will be explained.
  • the working medium 20 is sucked up into the through hole 33 by capillary force by contacting the surface surrounded by the inner wall of the convex portion 34f. Therefore, even though the liquid level of the working medium 20 is located closer to the first inner surface 11a than the perforated body 32 in the portion where the through hole 33 does not exist when the wick 30E is viewed from the thickness direction Z.
  • the working medium 20 is sucked up into the through hole 33 . In this way, even when the amount of the working medium 20 is small as shown in FIG.
  • the working medium 20 can be sucked up into the through hole 33. Therefore, even if the amount of the working medium 20 is small, it is possible to prevent capillary force from occurring in the wick 30E. From the above, in the vapor chamber 1, even when the amount of the working medium 20 is small, it is possible to suppress the deterioration of the heat soaking performance and the heat transport performance.
  • the convex portion 34f is provided on the periphery of the through hole 33 in a direction close to the first inner surface 11a, even when the amount of the working medium 20 is small, deterioration in heat soaking performance and heat transport performance can be suppressed. For example, changes in the design value of the amount of the working medium 20 injected in the manufacturing process, variations in the amount of the working medium 20 injected in the manufacturing process, fluctuations in the amount of the working medium 20 during use, etc. There is little effect on soaking performance or heat transport performance. In other words, if the convex portion 34f is provided on the periphery of the through hole 33 in a direction approaching the first inner surface 11a, it can be said that the robustness against the amount of the working medium 20 in the vapor chamber 1 is improved.
  • the convex portion 34f is provided on the entire periphery of the through hole 33.
  • the convex portion 34f may be provided only on a part of the periphery of the through hole 33 as long as the convex portion 34f has a shape that allows the working medium 20 to be sucked up by capillary force.
  • the convex portion 34f may be provided on the periphery of all the through holes 33 in the perforated body 32, or may be provided only on the periphery of some of the through holes 33 in the perforated body 32.
  • the convex portion 34f is provided at least on the periphery of the through hole 33 located directly above the heat source HS. is preferred.
  • the convex portion 34f is provided in the through hole 33 located directly above the heat source HS, even if the amount of the working medium 20 is small, it can be suppressed that the working medium 20 is less likely to evaporate in the evaporation section.
  • the protrusion 34f may be provided only on the periphery of the through hole 33 located directly above the heat source HS.
  • the through hole 33 and the convex portion 34f can be produced, for example, by punching the metal or the like that constitutes the perforated body 32 by press working.
  • punching by press working the shape of the convex portion, etc. can be adjusted by appropriately adjusting the punching depth, etc.
  • the punching depth means, for example, how far the punch is pushed in the punching direction when punching is performed.
  • the dimensions of the convex portion 34f are not particularly limited.
  • the height of the protrusion 34f may be larger than the diameter of the through hole 33
  • the height of the protrusion 34f may be smaller than the diameter of the through hole 33
  • the height of the protrusion 34f may be It may be the same as the diameter of the through hole 33.
  • the height of the convex part 34f means the distance in the thickness direction Z between the 1st end part 35f and the 2nd end part 36f.
  • the bending height of the edge of the wick 30E (distance indicated by B in FIG. 18A) is greater than the height of the convex portion 34f.
  • the bending height of the edge of the wick 30E (the distance indicated by B in FIG. 18A) may be smaller than the height of the protrusion 34f, or may be the same as the height of the protrusion 34f.
  • the thickness of the perforated body 32 is equal to the thickness of the perforated body 32 at the portion where the protrusion 34f is not provided. It means the thickness of the body 32.
  • a support 31 is formed in the recessed portion by bending and recessing a part of the metal foil by pressing or the like.
  • the wick 30E may be formed by simultaneously performing the press work for forming the support body 31 and the press work for forming the through hole 33 and the convex portion 34f.
  • the support 31 does not have to be recessed like the wick 30A shown in FIG. 9, the wick 30B shown in FIG. 10, and the wick 30C shown in FIG.
  • FIG. 19 is a partially enlarged sectional view schematically showing a first modification of the convex portion shown in FIG. 18A.
  • the convex portion 34g shown in FIG. 19 has a first end 35g on the first inner surface 11a side and a second end 36g on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the first end portion 35g is smaller than the cross-sectional area of the region surrounded by the inner wall of the second end portion 36g.
  • the inner wall of the first end 35g surrounds the region. can improve the capillary force generated in the area where the Therefore, since the capillary force of the wick 30E can be improved, the maximum heat transport amount of the vapor chamber 1 can be improved.
  • the inner wall of the first end portion 35g may be located inside the inner wall of the second end portion 36g when viewed from the thickness direction Z.
  • the convex portion 34g has a tapered shape in a cross section along the thickness direction Z such that the distance between the outer walls of the convex portion 34g becomes narrower toward the first inner surface 11a.
  • the convex portion 34g has a shape that is convex toward the first inner surface 11a side (lower side in FIG. 19) in a cross section along the thickness direction Z. In other words, the convex portion 34g curves toward the first inner surface 11a side (downward in FIG. 19) with respect to the line segment connecting the first end portion 35g and the second end portion 36g in the cross section along the thickness direction Z. It is the shape.
  • FIG. 20 is a partially enlarged sectional view schematically showing a second modification of the convex portion shown in FIG. 18A.
  • the convex portion 34h shown in FIG. 20 has a first end 35h on the first inner surface 11a side and a second end 36h on the second inner surface 12a side.
  • the convex portion 34h has a tapered shape in a cross section along the thickness direction Z such that the distance between the outer walls of the convex portion 34h becomes narrower toward the first inner surface 11a.
  • the convex portion 34h has a shape that is convex toward the second inner surface 12a side (upper side in FIG. 20) in a cross section along the thickness direction Z.
  • the convex portion 34h has a shape that curves toward the second inner surface 12a side (upper side in FIG. 20) with respect to the line segment connecting the first end portion 35h and the second end portion 36h in the cross section along the thickness direction Z. It is.
  • FIG. 21 is a partially enlarged sectional view schematically showing a third modification of the convex portion shown in FIG. 18A.
  • the convex portion 34i shown in FIG. 21 has a first end 35i on the first inner surface 11a side and a second end 36i on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the first end portion 35i is smaller than the cross-sectional area of the region surrounded by the inner wall of the second end portion 36i.
  • the convex portion 34i includes a lid portion 37 that narrows the opening of the convex portion 34i at the first end 35i.
  • the cross-sectional area of the region surrounded by the inner wall of the first end 35i is narrower than that of the convex portion 34h in which the lid portion 37 does not exist at the first end 35i. There is.
  • the lid portion 37 that narrows the opening of the convex portion 34i may be formed by, for example, pressing the first end portion 35i.
  • the size and shape of the lid 37 that narrows the opening of the convex portion 34i are not particularly limited, as long as the opening on the first end 35i side of the convex portion 34i is narrowed. It is preferable that the lid portion 37 that narrows the opening of the convex portion 34i has a flat surface.
  • the lid portion 37 that narrows the opening of the convex portion 34i is preferably a flat surface perpendicular to the thickness direction Z.
  • the lid portion 37 that narrows the opening of the convex portion 34i may have a curved shape in part or in its entirety.
  • the lid portion 37 that narrows the opening of the convex portion 34i may have an uneven surface.
  • the thickness of the lid portion 37 that narrows the opening of the convex portion 34i may be the same as or different from the thickness of the convex portion 34i.
  • FIG. 22 is a partially enlarged sectional view schematically showing a fourth modification of the convex portion shown in FIG. 18A.
  • the convex portion 34j shown in FIG. 22 has a first end 35j on the first inner surface 11a side and a second end 36j on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the first end portion 35j is larger than the cross-sectional area of the region surrounded by the inner wall of the second end portion 36j.
  • the cross-sectional area of the region surrounded by the inner wall of the first end 35j is larger than the cross-sectional area of the region surrounded by the inner wall of the second end 36j when viewed from the thickness direction Z, the working medium 20 flows into the through hole 33. The amount of suction can be increased.
  • the inner wall of the first end 35j may be located outside the inner wall of the second end 36j when viewed from the thickness direction Z.
  • FIG. 23 is a partially enlarged sectional view schematically showing a fifth modification of the convex portion shown in FIG. 18A.
  • the convex portion 34k shown in FIG. 23 has a first end 35k on the first inner surface 11a side and a second end 36k on the second inner surface 12a side.
  • the cross-sectional area of the region surrounded by the inner wall of the first end portion 35k is larger than the cross-sectional area of the region surrounded by the inner wall of the second end portion 36k.
  • the convex portion 34k includes a lid portion 37 that narrows the opening of the convex portion 34k at the first end 35k.
  • the cross-sectional area of the region surrounded by the inner wall of the first end portion 35k is narrower than that of the convex portion 34j in which the lid portion 37 does not exist at the first end portion 35k.
  • the lid portion 37 that narrows the opening of the convex portion 34k may be formed by, for example, performing press working on the first end portion 35k.
  • the size and shape of the lid portion 37 that narrows the opening of the convex portion 34k are not particularly limited, as long as the opening on the first end 35k side of the convex portion 34k is narrowed. It is preferable that the lid portion 37 that narrows the opening of the convex portion 34k has a flat surface.
  • the lid portion 37 that narrows the opening of the convex portion 34k is preferably a flat surface perpendicular to the thickness direction Z.
  • the lid portion 37 that narrows the opening of the convex portion 34k may have a curved surface in part or in its entirety.
  • the lid portion 37 that narrows the opening of the convex portion 34k may have an uneven surface.
  • the thickness of the lid portion 37 that narrows the opening of the convex portion 34k may be the same as or different from the thickness of the convex portion 34k.
  • FIG. 24 is a plan view schematically showing a sixth modification of the wick. Note that FIG. 24 is a plan view of the wick viewed from the support body side.
  • the support body 31 includes a plurality of rail-shaped members.
  • rail shape means a shape in which the ratio of the length of the long side of the bottom surface is 5 times or more to the length of the short side of the bottom surface.
  • the cross-sectional shape perpendicular to the extending direction of the rail-like member is not particularly limited, and examples thereof include polygons such as quadrangles, semicircles, semiellipses, and combinations thereof.
  • the rail-shaped member is relatively higher in height than its surroundings. Therefore, in addition to the portion protruding from the first inner surface 11a, the rail-like member also includes a portion having a relatively high height due to the groove formed in the first inner surface 11a.
  • the wick 30F is not limited to the shape shown in FIG. 24, and may be used by being partially disposed instead of being disposed throughout the interior space.
  • a rail-shaped support 31 may be configured in the internal space along the outer periphery, and a perforated body 32 shaped along the outer periphery may be arranged thereon.
  • FIG. 25 is a plan view schematically showing the arrangement of the wicks when the heat diffusion device shown in FIG. 1 is viewed from the thickness direction.
  • the wick 30 is disposed throughout the interior space of the casing 10 when viewed from the thickness direction Z.
  • the evaporation portion EP (evaporation portion) overlaps the inner edge of the housing 10 when viewed from the thickness direction Z.
  • the evaporation part EP overlaps the wick 30 when viewed from the thickness direction Z.
  • the edge of the wick 30 and the inner edge of the casing 10 are not in contact.
  • the edge of the wick 30 and the inner edge of the housing 10 may be in contact with each other.
  • FIG. 26 is a plan view schematically showing the arrangement of the wick when the first modification of the heat diffusion device of the present invention is viewed from the thickness direction.
  • the wick 30 is arranged over the entire internal space of the casing 10 when viewed from the thickness direction Z, and the internal space is It has a region where the wick 30 is arranged and a region where the wick 30 is not arranged, and the region where the wick 30 is not arranged extends linearly when viewed from the thickness direction Z. .
  • the region where the wick 30 is not arranged may extend linearly or curvedly when viewed from the thickness direction Z.
  • the edge on the inner edge side of the housing 10 is bent toward the second inner surface 12a side.
  • the edge on the side of the area where the wick 30 is not arranged may be bent so as to approach the second inner surface 12a side, and may approach the edge toward the second inner surface 12a side. It doesn't have to be bent like this.
  • the edge of the wick 30 and the inner edge of the casing 10 are not in contact.
  • the edge of the wick 30 and the inner edge of the housing 10 may be in contact with each other.
  • the evaporation part EP overlaps the inner edge of the casing 10 when viewed from the thickness direction Z.
  • the region where the wick 30 is not arranged may extend to the evaporation part EP when viewed from the thickness direction Z, or may not extend to the evaporation part EP.
  • FIG. 27 is a plan view schematically showing the arrangement of the wick when the second modification of the heat diffusion device of the present invention is viewed from the thickness direction.
  • the wick 30 is arranged along the outer periphery of the internal space of the casing 10 when viewed from the thickness direction Z.
  • the edge on the inner edge side of the housing 10 is bent toward the second inner surface 12a side.
  • the edge on the side of the region where the wick 30 is hollow may be bent so as to approach the second inner surface 12a side, and may be bent toward the second inner surface 12a side. It doesn't have to be bent like that.
  • the evaporation part EP overlaps the inner edge of the casing 10 when viewed from the thickness direction Z. In the vapor chamber 1B shown in FIG. 27, the evaporation part EP overlaps the wick 30 when viewed from the thickness direction Z.
  • the edge of the wick 30 and the inner edge of the casing 10 are not in contact.
  • the edge of the wick 30 and the inner edge of the housing 10 may be in contact with each other.
  • FIG. 28 is a cross-sectional view schematically showing a third modification of the heat diffusion device.
  • the support body 31 is configured integrally with the first sheet 11 of the casing 10.
  • the first sheet 11 and the support body 31 can be produced by, for example, an etching technique, a printing technique using multilayer coating, or another multilayer technique.
  • the perforated body 32 may be made of the same material as the support body 31 and the first sheet 11 of the housing 10, or may be made of a different material. The perforated body 32 may be configured integrally with the support body 31 and the first sheet 11 of the housing 10.
  • FIG. 29 is a cross-sectional view schematically showing a fourth modification of the heat diffusion device.
  • a support body 31 is formed in the recessed part. There is.
  • the heat diffusion device of the present invention is not limited to the above embodiments, and various applications and modifications can be made within the scope of the present invention regarding the configuration, manufacturing conditions, etc. of the heat diffusion device.
  • the casing may have one evaporation section or a plurality of evaporation sections. That is, one heat source or a plurality of heat sources may be arranged on the outer surface of the casing.
  • the number of evaporation sections and heat sources is not particularly limited.
  • the first sheet and the second sheet may overlap so that their edges coincide, or may be shifted and overlap.
  • the material constituting the first sheet and the material constituting the second sheet may be different.
  • stress applied to the housing can be dispersed.
  • different materials for both sheets one function can be obtained with one sheet, and another function can be obtained with the other sheet.
  • the above-mentioned functions are not particularly limited, but include, for example, a heat conduction function, an electromagnetic wave shielding function, and the like.
  • the heat diffusion device of the present invention can be installed in electronic equipment for the purpose of heat radiation. Therefore, electronic equipment including the heat diffusion device of the present invention is also one of the present inventions. Examples of the electronic device of the present invention include a smartphone, a tablet terminal, a notebook computer, a game device, a wearable device, and the like. As described above, the heat diffusion device of the present invention operates independently without requiring external power, and can diffuse heat two-dimensionally at high speed by utilizing the latent heat of vaporization and latent heat of condensation of the working medium. Therefore, an electronic device including the heat diffusion device of the present invention can effectively dissipate heat in a limited space inside the electronic device.
  • a casing having a first inner surface and a second inner surface facing each other in the thickness direction; A working medium sealed in the internal space of the casing; a wick disposed in the internal space of the casing; The wick includes a support in contact with the first inner surface and a perforated body in contact with the support, The edge of the wick is curved toward the second inner surface.
  • the casing is composed of a first sheet and a second sheet that are joined at their outer edges and that face each other in the thickness direction,
  • the first sheet has the first inner surface of the housing
  • the second sheet has the second inner surface of the housing,
  • the heat according to ⁇ 1>, wherein the joint between the first sheet and the second sheet is located between the support of the wick and the second inner surface of the casing in the thickness direction. Diffusion device.
  • ⁇ 3> The heat diffusion device according to ⁇ 1> or ⁇ 2>, wherein in the internal space, the distance between the edge of the wick and the inner edge of the casing is 500 ⁇ m or less.
  • ⁇ 4> further comprising a post disposed in the internal space so as to be in contact with the second inner surface of the casing,
  • the heat diffusion device according to any one of ⁇ 1> to ⁇ 3>, wherein the height of the support column is greater than the height of the support body.
  • ⁇ 11> The heat diffusion device according to any one of ⁇ 1> to ⁇ 10>, wherein the thickness of the support is the same as the thickness of the porous body or smaller than the thickness of the porous body.
  • the porous body has a through hole penetrating in the thickness direction,
  • the heat diffusion device according to any one of ⁇ 1> to ⁇ 11>, wherein a convex portion is provided on a peripheral edge of the through hole in a direction approaching the second inner surface.
  • the convex portion has a first end on the first inner surface side and a second end on the second inner surface side,
  • the heat diffusion device according to ⁇ 12> wherein the cross-sectional area of the region surrounded by the inner wall of the second end is smaller than the cross-sectional area of the region surrounded by the inner wall of the first end, when viewed from the thickness direction.
  • the porous body has a through hole penetrating in the thickness direction,
  • the heat diffusion device according to any one of ⁇ 1> to ⁇ 11>, wherein a convex portion is provided on a peripheral edge of the through hole in a direction proximate to the first inner surface.
  • the convex portion has a first end on the first inner surface side and a second end on the second inner surface side,
  • the heat diffusion device according to ⁇ 14> wherein the cross-sectional area of the region surrounded by the inner wall of the first end is smaller than the cross-sectional area of the region surrounded by the inner wall of the second end, when viewed from the thickness direction.
  • ⁇ 16> The heat diffusion device according to any one of ⁇ 1> to ⁇ 15>, wherein the wick is disposed throughout the internal space of the housing when viewed from the thickness direction.
  • the wick When viewed from the thickness direction, the wick is arranged throughout the internal space of the housing, The internal space has a region where the wick is arranged and a region where the wick is not arranged when viewed from the thickness direction,
  • ⁇ 18> The heat diffusion device according to any one of ⁇ 1> to ⁇ 15>, wherein the wick is arranged along the outer periphery of the internal space of the housing when viewed from the thickness direction.
  • An electronic device comprising the heat diffusion device according to any one of ⁇ 1> to ⁇ 18>.
  • the heat diffusion device of the present invention can be used for a wide range of applications in the field of mobile information terminals and the like. For example, it can be used to lower the temperature of a heat source such as a CPU and extend the usage time of electronic devices, and can be used for smartphones, tablet terminals, notebook computers, etc.
  • Vapor chamber (thermal diffusion device) 10 Housing 11 First sheet 11a First inner surface 12 Second sheet 12a Second inner surface 13 Joint portion 20 Working medium 30, 30A, 30B, 30C, 30D, 30E, 30F, 130 Wick 31 Support body 32 Perforated body 33 Penetration Holes 34, 34a, 34b, 34c, 34d, 34e, 34f, 34g, 34h, 34i, 34j, 34k Convex portions 35, 35a, 35b, 35c, 35d, 35e, 35f, 35g, 35h, 35i, 35j, 35k 1 end 36, 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j, 36k 2nd end 37 Lid 40 Support HS Heat source EP Evaporation part P 31 Distance between centers of support P 33 Distance between centers of through holes T 31 Height of support T 32 Thickness of porous body W 31 Width of support X Width direction Y Length direction Z

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Sustainable Development (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

L'invention concerne une chambre à vapeur 1 qui est un mode de réalisation d'un dispositif d'étalement de chaleur, la chambre à vapeur comprenant : un logement 10 qui comprend une première surface interne 11a et une seconde surface interne 12a qui se font face dans la direction de l'épaisseur Z ; un milieu de travail 20 qui est scellé dans un espace interne du logement 10 ; et une mèche 30 qui est disposée dans l'espace interne du logement 10. La mèche 30 comprend : un corps de support 31 qui est adjacent à la première surface interne 11a ; et un corps poreux 32 qui est adjacent au corps de support 31. Un bord de la mèche 30 est incurvé vers la seconde surface interne 12a de façon à s'approcher de celle-ci.
PCT/JP2023/018555 2022-06-08 2023-05-18 Dispositif d'étalement de chaleur et appareil électronique WO2023238625A1 (fr)

Applications Claiming Priority (2)

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JP2022093079 2022-06-08
JP2022-093079 2022-06-08

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110168359A1 (en) * 2010-01-08 2011-07-14 Cooler Master Co., Ltd. Heat-dissipating plate
WO2020026908A1 (fr) * 2018-07-31 2020-02-06 株式会社村田製作所 Chambre de vapeur
CN214502178U (zh) * 2021-01-28 2021-10-26 广州力及热管理科技有限公司 应用于薄型均温板的复合式毛细结构

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110168359A1 (en) * 2010-01-08 2011-07-14 Cooler Master Co., Ltd. Heat-dissipating plate
WO2020026908A1 (fr) * 2018-07-31 2020-02-06 株式会社村田製作所 Chambre de vapeur
CN214502178U (zh) * 2021-01-28 2021-10-26 广州力及热管理科技有限公司 应用于薄型均温板的复合式毛细结构

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TW202403255A (zh) 2024-01-16

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