WO2023201965A1

WO2023201965A1 - Probe mount and testing platform having same

Info

Publication number: WO2023201965A1
Application number: PCT/CN2022/117463
Authority: WO
Inventors: 牛超凡; 郭岩; 戎晓红; 彭薪元
Original assignee: 河北圣昊光电科技有限公司
Priority date: 2022-04-21
Filing date: 2022-09-07
Publication date: 2023-10-26
Also published as: CN114720734A; CN116519998A

Abstract

A probe mount and a testing platform having same, which belong to the technical field of chip testing. The probe mount comprises a main body (1) and an adjustment table (2), wherein the main body (1) is connected to a swing arm (5) by means of an elastic sheet (112); the swing arm (5) is provided with a probe (6); the adjustment table (2) is arranged on the main body (1); the adjustment table (2) is provided with an adjustment member (7) adapted for applying pressure on the swing arm (5); the adjustment member (7) is sleeved with a first elastic member (3); the first elastic member (3) has an elastic force for driving the adjustment member (7) to move away from the swing arm (5); the adjustment member (7) is provided with a second elastic member (4); and the adjustment member (7) comes in contact with the swing arm (5) by means of the second elastic member (4). In the probe mount, the probe (6) can be prevented from being affected by the factor of action shaking when the probe abuts against an object under test, thereby facilitating an increase in the abutting pressure of the probe (6).

Description

A probe holder and a test platform having the same

Cross-references to related applications

This application claims the priority of the Chinese patent application submitted to the China Patent Office on April 21, 2022, with the application number 202210425007.2 and the invention title "A probe holder and a test platform having the same", the entire content of which is incorporated by reference. method is incorporated into this article.

Technical field

The present application relates to the field of chip testing technology, and specifically to a probe holder and a test platform having the same.

Background technique

In the chip production of optical communication, the wafer will not be cut directly into individual chips, but will be cut into several strips first, which we call Bar strips. There are multiple chips in the bar. During production, the parameters of the chips need to be tested. The existing method of testing the chips in the bar is generally carried out by using a test platform. The probe on the test platform contacts the test object. After the bar is powered on, it simulates actual working conditions to detect the status of multiple chips in the bar.

The probe of the test platform is installed on the test platform through an elastic plate. When the test end of the probe contacts the bar to be tested, the elastic plate maintains a certain resistance between the test end of the probe and the bar to be tested. Take the pressure. In actual work, the contact pressure between the probe and the bar needs to be adjusted, and the accuracy of the contact pressure of the probe during the entire test process is required to be high.

However, since the contact pressure of the probe against the bar is easily affected by the shaking of the adjustment member itself, the contact pressure of the probe cannot be within a controllable small range, affecting the test effect.

Contents of the invention

Therefore, the technical problem to be solved by this application is to overcome the defect of low accuracy of maintaining the contact pressure of the probe in the probe test platform of the prior art, thereby providing a probe holder and a test platform having the same.

In order to solve the above problems, this application provides a probe holder, including:

The main body is connected to a swing arm through a spring piece, and a probe is installed on the swing arm;

An adjustment table is provided on the main body, and the adjustment table is provided with an adjustment member suitable for applying pressure to the swing arm;

A first elastic member is sleeved on the adjusting member, and the first elastic member has an elastic force that drives the adjusting member to move in a direction away from the swing arm;

A second elastic member is installed on the adjusting member, and the adjusting member contacts the swing arm through the second elastic member.

Further, the adjusting member is threadedly connected to the adjusting platform.

Furthermore, one end of the adjusting member facing the swing arm has a central hole for installing the second elastic member, and the second elastic member is partially installed in the central hole.

Further, one end of the second elastic member is fixedly connected to an end of the adjusting member facing the swing arm.

Further, it also includes: a conductive plate connected to the main body, the conductive plate having an abutting surface facing the swing arm, and the swing arm having an electrode facing the abutting surface;

In the free state, the adjusting member exerts pressure toward the swing arm so that the electrode of the swing arm abuts against the contact surface of the conductive plate.

Further, it also includes: a connecting rod connected between the adjustment platform and the conductive plate.

Further, the connecting rod passes through the swing arm.

Further, the swing arm is equipped with a clamp for connecting the probe, and the probe is detachably mounted on the clamp.

Further, the clamp includes: a sliding column and a sliding piece that is sleeved on the sliding column, and the free end of the sliding column is provided with a clamping hole for passing the probe;

The sliding column is covered with a third elastic member, and the third elastic member has an elastic force that drives the sliding member to move toward the free end of the sliding column.

In addition, this application also provides a test platform, including the probe holder as described in any one of the above items.

The technical solution of this application has the following advantages:

1. The probe holder provided by this application has a main body connected to the swing arm through a spring piece, and an adjustment table is provided on the main body. The adjustment table is provided with an adjustment piece that exerts pressure on the swing arm. Since the adjustment piece is covered with a third An elastic member, the state of the adjusting member on the adjusting table is restrained by the elastic force of the first elastic member, thereby preventing the shaking of the adjusting member from exerting pressure on the swing arm; the adjusting member is equipped with a second elastic member, and through the second elastic member In contact with the swing arm, the swing arm is acted upon by the elastic force of the second elastic member, thereby keeping the contact pressure of the swing arm within a small fluctuation range, which is beneficial to ensuring the contact accuracy of the probe.

2. In the probe holder provided by this application, the second elastic member is partially installed in the central hole, and the axial direction of the second elastic member is constrained by the central hole, which is conducive to keeping the expansion and contraction of the second elastic member on the axis and avoids The second elastic member is deflected and deformed.

3. The probe holder provided by this application is equipped with a clamp for connecting the probe on the swing arm. The probe is detachably installed on the clamp. Depending on the size of the actual test probe, different elastic members can be used to adjust the elastic force. , thus ensuring that the probe is fixed in the clamping hole, and avoiding damage to the probe due to the elastic force being too small to be clamped or the elastic force being too large.

4. The test platform provided by this application has the probe holder as mentioned above, so it has all the advantages of the probe holder.

Description of the drawings

In order to more clearly explain the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description The drawings illustrate some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting creative efforts.

Figure 1 is a perspective view of the test platform in the embodiment of the present application;

Figure 2 is a front view of the test platform shown in Figure 1;

Figure 3 is an exploded view of part of the structure of the test platform shown in Figure 1;

Figure 4 is a schematic assembly diagram of the adjusting member, the first elastic member and the second elastic member in the embodiment of the present application.

Explanation of reference symbols:

1. Main body; 2. Adjustment table; 3. First elastic member; 4. Second elastic member; 5. Swing arm; 6. Probe; 7. Adjustment member; 8. Conductive plate; 9. Connecting rod; 10. Sliding column; 11. sliding member; 12. third elastic member; 111. center hole; 112. elastic piece; 113. blocking part.

Detailed ways

The technical solution of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of this application.

In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as limitations on this application. Furthermore, the terms “first”, “second” and “third” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of this application, it should be noted that, unless otherwise clearly stated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. Connection, or integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood on a case-by-case basis.

In addition, the technical features involved in different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

Example 1

This embodiment provides a probe holder, which can be applied to bar detection equipment or chip detection equipment.

As shown in Figures 1 to 3, the probe holder in this embodiment includes a main body 1 and an adjusting table 2. The main body 1 is connected to a swing arm 5 through a spring piece 112. The swing arm 5 is equipped with a probe 6. The adjusting table 2 Located on the main body 1, the adjusting platform 2 is provided with an adjusting member 7 suitable for exerting pressure on the swing arm 5. The adjusting member 7 is covered with a first elastic member 3, and the first elastic member 3 has a driving member 7 that drives the adjusting member 7 away. The elastic force of the swing arm 5 moves in the direction. The second elastic member 4 is installed on the adjusting member 7. The adjusting member 7 contacts the swing arm 5 through the second elastic member 4.

Through this arrangement, the state of the adjusting member 7 on the adjusting table 2 is restrained by the elastic force of the first elastic member 3, thereby avoiding the shaking of the adjusting member 7 and exerting pressure on the swing arm 5. The swing arm 5 is restrained by the second elastic member 4. The elastic force acts to keep the contact pressure of the swing arm within a small fluctuation range, which is beneficial to ensuring the contact accuracy of the probe 6.

As shown in Figures 2 and 3, the adjusting piece 7 in this embodiment is threadedly connected to the adjusting table 2. The adjusting piece 7 has a threaded section suitable for matching the threaded hole of the adjusting table 2. The end of the adjusting piece 7 has The outer diameter is larger than the blocking portion 113 of the thread segment. Since the pressure adjustment control accuracy applied by the adjusting member 7 to the swing arm 5 is generally within a small range of 0-20g, the shaking of the adjusting member 7 itself due to factors such as the pitch will affect its The pressure applied to the swing arm 5 causes a sudden change in pressure on the swing arm 5, which is not conducive to the normal detection effect. When the first elastic member 3 is constrained between the blocking part 113 and the abutting end surface of the adjustment table 2, the second An elastic member 3 exerts an elastic force on the adjusting member 7 in a direction away from the swing arm 5, so that the adjusting member 7 is forced to avoid shaking and effectively improves the control accuracy.

As shown in Figure 4, in this embodiment, one end of the adjusting member 7 facing the swing arm 5 has a central hole 111 for installing the second elastic member 4. The second elastic member 4 is partially installed in the central hole 111, thereby forming a third elastic member 4. The two elastic members 4 and the adjusting member 7 are mated and connected. Here, the second elastic member 4 is partially installed in the central hole 111. The axial direction of the second elastic member 4 is constrained by the central hole 111, which is beneficial to maintaining the second elastic member 4. The expansion and contraction of the elastic member 4 is located on the axis to prevent the second elastic member 4 from deflecting and deforming.

As an alternative embodiment, one end of the second elastic member 4 is fixedly connected to an end of the adjusting member 7 facing the swing arm 5 , and the other end is directly in contact with the swing arm 5 . Here, the second elastic member 4 and the adjusting member 7 can be fixedly connected by welding or fixedly connected by snapping.

As shown in Figures 1 to 3, the swing arm 5 and the main body 1 are connected through an elastic piece 112. The elastic piece 112 is preferably a metal piece with good elasticity. When the swing arm 5 swings, the elastic piece 112 moves with the swing arm 5. Deformation occurs, which is beneficial to the pressure detection of the swing arm 5. When the elastic piece 112 is used for connection, the elastic piece 112 only loses itself, and the elastic piece 112 can be replaced after working for a period of time. Compared with the rotating shaft connection, the rotating shaft connection will wear out due to friction with other components, resulting in a shortened service life of the entire component. The elastic piece 112 Set-up replacement is simple and convenient, and avoids wear and tear with other components.

The probe holder in this embodiment also includes a conductive plate 8 connected to the main body 1. The conductive plate 8 has a contact surface facing the swing arm 5. The swing arm 5 is provided with electrodes corresponding to the contact surface. In the free state Down, the adjusting member 7 exerts pressure toward the swing arm 5 so that the electrodes of the swing arm 5 are in contact with the contact surface of the conductive plate 8 .

Here, the conductive plate is connected to the external circuit with an indicating unit. The indicating unit can be an indicator light or other device that indicates the power on and off status. In the path state, the indicator light is always on. When the detection work is performed, the setting The external force drives the swing arm 5 to swing upward, and the swing arm 5 overcomes the elastic force of the second elastic member 4 to swing. When the electrode of the swing arm 5 is separated from the contact surface of the conductive plate 8, the conductive plate 8 is disconnected and the indicator light goes out. At this time, the The force value is the contact pressure during detection work. The conductive plate 8 is provided to adjust the contact pressure of the probe 6 on the one hand, and to constrain the swing amplitude of the swing arm 5 together with the adjustment table 2 of the main body 1 , thereby facilitating the adjustment of the contact accuracy of the probe 6 .

On the basis of the structure provided with the conductive plate 8, a connecting rod 9 is also provided between the adjusting table 2 and the conductive plate 8. After the connecting rod 9 passes through the adjusting table 2 and the swing arm 5 in sequence, its upper end is connected to the adjusting table 2 The upper end surface abuts the limiter, and the lower end is screwed to the conductive plate 8 , thereby forming a fixed connection between the adjusting table 2 and the conductive plate 8 . The connecting rod 9 can maintain the relative position of the adjusting table 2 and the conductive plate 8 and prevent the conductive plate 8 from deflecting due to force. In addition, the connecting rod 9 passing through the swing arm 5 can guide the swing arm 5. This prevents the swing arm 5 from lateral deflection. As an alternative implementation, the connecting rod 9 may also be provided without passing through the swing arm 5 .

As shown in Figure 3, in this embodiment, the swing arm 5 is equipped with a clamp for connecting the probe 6, and the probe 6 is detachably mounted on the clamp. Specifically, the clamp includes a sliding column 10 and a sliding member 11 sleeved on the sliding column 10. The free end of the sliding column 10 is provided with a clamping hole for passing the probe 6, and the sliding column 10 is sleeved with a third Elastic member 12 , the third elastic member 12 has an elastic force that drives the sliding member 11 to move toward the free end of the sliding column 10 .

Through this arrangement, when the size of the test probe 6 is actually required to change, different elastic members can be used to adjust the elastic force, thereby ensuring that the probe 6 is fixed in the clamping hole and avoiding failure due to too small elastic force. The probe 6 is damaged due to excessive clamping or elastic force.

Example 2

This embodiment provides a test platform, which includes the probe holder as described in Embodiment 1. Since it has the probe holder as described in Embodiment 1, it has all the advantages of the probe holder.

Here, the test platform can be a bar test platform or a test platform for a single chip.

Obviously, the above-mentioned embodiments are only examples for clear explanation and are not intended to limit the implementation. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. An exhaustive list of all implementations is neither necessary nor possible. However, obvious changes or modifications derived therefrom are still within the protection scope of the present invention.

Claims

A probe holder, characterized by including:

The main body (1) is connected to a swing arm (5) through a spring piece (112), and a probe (6) is installed on the swing arm (5);

An adjusting table (2) is provided on the main body (1), and the adjusting table (2) is provided with an adjusting piece (7) suitable for applying pressure to the swing arm (5);

The first elastic member (3) is sleeved on the adjusting member (7). The first elastic member (3) has the function of driving the adjusting member (7) to move in a direction away from the swing arm (5). elastic force;

The second elastic member (4) is installed on the adjusting member (7), and the adjusting member (7) contacts the swing arm (5) through the second elastic member (4).
The probe holder according to claim 1, characterized in that the adjusting member (7) is threadedly connected to the adjusting table (2).
The probe holder according to claim 1, characterized in that one end of the adjustment member (7) facing the swing arm (5) has a central hole ( 111), the second elastic member (4) is partially installed in the central hole (111).
The probe holder according to claim 1, characterized in that one end of the second elastic member (4) is fixedly connected to an end of the adjusting member (7) facing the swing arm (5).
The probe holder according to any one of claims 1-4, further comprising: a conductive plate (8) connected to the main body (1), the conductive plate (8) having a direction facing the The abutment surface of the swing arm (5), the swing arm (5) has an electrode facing the abutment surface;

In the free state, the adjusting member (7) exerts pressure toward the swing arm (5), so that the electrode of the swing arm (5) abuts against the contact surface of the conductive plate (8).
The probe holder according to claim 5, further comprising: a connecting rod (9) connected between the adjustment table (2) and the conductive plate (8).
The probe holder according to claim 6, characterized in that the connecting rod (9) passes through the swing arm (5).
The probe holder according to any one of claims 1-4 or 6-7, characterized in that the swing arm (5) is equipped with a clamp for connecting the probe (6), so The probe (6) is detachably mounted on the clamp.
The probe holder according to claim 8, characterized in that the clamp includes: a sliding column (10) and a sliding member (11) slidably sleeved on the sliding column (10), and the sliding column (10) The free end of 10) is provided with a clamping hole for passing through the probe (6);

The sliding column (10) is covered with a third elastic member (12), and the third elastic member (12) has a function of driving the sliding member (11) to move toward the free end of the sliding column (10). Elastic force.
A test platform, characterized by comprising: the probe holder according to any one of claims 1-9.