CN115684867A - High efficiency test apparatus for light emitting devices - Google Patents
High efficiency test apparatus for light emitting devices Download PDFInfo
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- CN115684867A CN115684867A CN202210313127.3A CN202210313127A CN115684867A CN 115684867 A CN115684867 A CN 115684867A CN 202210313127 A CN202210313127 A CN 202210313127A CN 115684867 A CN115684867 A CN 115684867A
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- probe
- pin shaft
- bearing
- point contact
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a high-efficiency test device for a light-emitting device, which comprises: a test probe assembly, the test probe assembly comprising: the probe that is connected with drive support, backup pad, is used for with the examination chip contact of awaiting measuring and moves some contact probe, a cantilever is installed to backup pad one end, and the other end is installed move some contact probe, terminal surface one side is provided with one and is located move some contact probe upper portion and rather than the quiet point contact probe who corresponds under the body, the cantilever is kept away from backup pad one end and is fixed with one and installs the probe seat of probe, when the probe with the examination chip contact of awaiting measuring, move some contact probe and rotate along with the backup pad and keep away from quiet point contact probe, move, quiet point contact probe and become the looks separation state by the initial condition of mutual contact, the probe is 60 with the contained angle of backup pad. The invention improves the stability, repeatability, comparability and consistency of the detection data.
Description
Technical Field
The invention relates to efficient test equipment for a light-emitting device, and belongs to the technical field of chip test.
Background
In the testing process of a single laser chip (LD) for optical communication, the stability of a probe plays a very important role, because the size of a single chip is very small (generally in the range of 300 μm), the position or angle of the chip can be more or less pushed to shift when the test probe contacts the chip, once the position or angle of the chip changes, the stability and the testing efficiency of subsequent testing indexes can be directly influenced, and the pressure stability of the test probe can also be directly fed back to the stability of a testing value.
Disclosure of Invention
The inventor finds that: the pressure change of the probe acting on the chip can cause the change of the contact resistance, thereby influencing the consistency of test data, and in the long-time test process, if the pressure change is overlarge, the change which can cause the test result to be indistinguishable is caused by the chip or the machine table, thereby causing the test result to lose the comparability. Based on the above findings, an object of the present invention is to provide an efficient test apparatus for a light emitting device, which solves the problems of unstable and inconsistent test data during long-term use caused by fatigue of a test probe assembly on a machine table in the prior art.
In order to achieve the purpose, the invention adopts the technical scheme that: an efficient test apparatus for light emitting devices, comprising: the device comprises a substrate, a test bench arranged on the upper surface of the substrate, a driving support arranged on the outer side of the substrate and a test probe assembly arranged on the driving support and positioned above the test bench, wherein the test probe assembly comprises: the probe comprises a body, a supporting plate, a probe and a moving point contact probe, wherein the body is connected with a driving support, the probe is used for being in contact with a chip to be tested, the moving point contact probe is arranged at one end of the supporting plate, a cantilever is arranged at the other end of the supporting plate, the moving point contact probe is arranged on one side of the lower end face of the body and corresponds to the moving point contact probe, when the probe is in contact with the chip to be tested, the moving point contact probe rotates along with the supporting plate to be away from the stationary point contact probe, the moving point contact probe and the stationary point contact probe are in a mutually separated state from an initial state of mutual contact, a probe seat provided with the probe is fixed at one end of the cantilever, away from the supporting plate, and the included angle between the probe and the supporting plate is 60 degrees;
a transfer seat is arranged on the upper surface of the middle part of the supporting plate, the front side and the rear side of the transfer seat are respectively provided with a front baffle and a rear baffle, the front baffle and the rear baffle are respectively provided with a first through hole and 2 guide grooves positioned at two sides of the first through hole, and two ends of a first pin shaft are respectively positioned in the respective first through holes of the front baffle and the rear baffle;
a second pin shaft and a third pin shaft are arranged on the lower convex block on the other side of the lower end face of the body in parallel, the second pin shaft and the third pin shaft are positioned above the first pin shaft and positioned on two sides of the first pin shaft, two ends of the second pin shaft and two ends of the third pin shaft respectively extend out from the front side and the rear side of the lower convex block, a first bearing and a second bearing are respectively sleeved on two ends of the second pin shaft and positioned on the front side and the rear side of the lower convex block, and a third bearing and a fourth bearing are respectively sleeved on two ends of the third pin shaft and positioned on the front side and the rear side of the lower convex block;
the first bearing, the third bearing, the second bearing and the fourth bearing are respectively positioned between the lower lug and the front baffle and the rear baffle, one end of a first elastic part positioned in a vertical through hole of the lower lug is connected with a middle area of a first pin shaft positioned between the front baffle and the rear baffle, the other end of the first elastic part is connected with a fourth pin shaft positioned in the body and positioned above the second pin shaft and the third pin shaft, and the first elastic part is in a stretching state, so that respective moving coils of the first bearing, the second bearing, the third bearing and the fourth bearing are in pressing contact with the side surface of the first pin shaft;
the barycenter moment of the supporting plate part, the cantilever, the probe seat and the probe which are positioned on the right side of the first pin shaft is larger than the barycenter moment of the rest part of the supporting plate and the moving point contact probe which are positioned on the left side of the first pin shaft.
The further improved scheme in the technical scheme is as follows:
1. in the above scheme, the probe seat comprises a base and a clamping piece, and at least one of the surfaces of the base and the clamping piece, which are contacted with the probe, is provided with a V-shaped groove for the probe to be embedded into.
2. In the above scheme, the drive support further includes two parallel arrangement's pole setting, connects the mounting panel between two pole setting upper ends and connects the connecting plate between two pole setting lower extremes, 2 the test probe subassembly is installed respectively on the upper surface at mounting panel both ends.
3. In the scheme, a fixing plate installed on the base plate is vertically arranged between the vertical rod of the driving support and the base plate, a motor is installed on the lower portion of the fixing plate, a lead screw is installed on an output shaft of the motor in the vertical direction, and a lead screw nut sleeved on the lead screw is connected with a connecting plate of the driving support.
4. In the above scheme, the two sides of the screw rod and the position between the vertical rod and the fixed plate are respectively provided with a sliding rail, and the vertical rod is movably connected with the sliding rails through at least two sliding blocks.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
the invention is used for the high-efficient test equipment of the luminescent device, on the basis of realizing carrying on the performance test to a large number of chips, it installs the first pin shaft perpendicular to length direction of the shoe plate on the shoe plate that is fitted with the probe and rotatable, and set up the second fixed on body, third pin shaft on both sides above the first pin shaft, and then two ends of the second, third pin shaft install four bearings jointed with first pin shaft, tension the first pin shaft on the shoe plate and fourth pin shaft in the body through the first elastic member finally, make the outer lane of four bearings keep with the first pin shaft pressure of the outer peripheral surface and can rotate relatively, dispel the fatigue problem existing in prior art, help to set up the horizontal and vertical position parameter accurately, and can keep the stability of the initial pressure set value after long-term, high-frequency use, thus improve stability, repeatability, comparability and uniformity of the measured data, also overcome the probe when disengaging with the chip, there is the defect of the vertical direction micro-jitter, thus help to shorten the time between the adjacent detections, raise the detection efficiency and avoid the damage to the chip; and the micro rotation offset of the probe in the horizontal direction is eliminated, the accuracy of the detection data is ensured, and the stability, repeatability, comparability and consistency of the detection data are further improved.
Drawings
FIG. 1 is a schematic structural diagram of an efficient test apparatus for a light emitting device according to the present invention;
FIG. 2 is a schematic diagram of a test probe assembly in the high efficiency test apparatus of the present invention;
FIG. 3 is a partial cross-sectional structural view of a test probe assembly in the high efficiency test apparatus of the present invention;
FIG. 4 is a schematic diagram of a partial structure of a test probe assembly in the high efficiency test apparatus of the present invention;
FIG. 5 is an exploded view of the structure of FIG. 4;
FIG. 6 is a partial bottom view of a test probe assembly of the high efficiency test apparatus of the present invention;
fig. 7 is a schematic structural view of a probe holder in an efficient test apparatus for a light emitting device according to the present invention.
In the drawings above: 1. a body; 2. a support plate; 31. the moving point contacts the probe; 32. a stationary point contact probe; 4. a cantilever; 5. a probe base; 51. a probe; 52. a base; 53. a clamping piece; 54. adjusting the nut; 55. a V-shaped groove; 6. a transfer seat; 61. a front baffle; 62. a tailgate; 7. a first through hole; 8. a guide groove; 9. a first pin shaft; 10. a lower bump; 11. a second pin shaft; 12. a third pin shaft; 13. a first bearing; 14. a second bearing; 15. a third bearing; 16. a fourth bearing; 17. a vertical through hole; 18. a first elastic member; 19. a fourth pin shaft; 21. a substrate; 22. a test bench; 23. a drive bracket; 231. erecting a rod; 232. mounting a plate; 233. a connecting plate; 24. testing the probe assembly; 25. a fixing plate; 26. a motor; 27. a screw rod; 28. a feed screw nut; 29. a slide rail; 30. a slide block.
Detailed Description
In the description of this patent, it is noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in this patent may be specifically understood by those of ordinary skill in the art.
Example 1: an efficient test apparatus for light emitting devices, comprising: a substrate 21, a test platform 22 installed on the upper surface of the substrate 21, a driving bracket 23 installed outside the substrate 21, and a test probe assembly 24 installed on the driving bracket 23 and located above the test platform 22, wherein the test probe assembly 24 includes: the probe testing device comprises a body 1, a support plate 2, a probe 51 and a moving point contact probe 31, wherein the body 1 is connected with a driving support 23, the probe 51 is used for being in contact with a chip to be tested, the moving point contact probe 31 is arranged at one end of the support plate 2, the moving point contact probe 32 is arranged at one side of the lower end face of the body 1 and corresponds to the moving point contact probe 31, when the probe is in contact with the chip to be tested, the moving point contact probe rotates along with the support plate to be away from the stationary point contact probe, the moving point contact probe and the stationary point contact probe are mutually separated from each other from an initial state, a control system for testing the chip executes electrifying operation to enable the probe to be electrically communicated with the chip after receiving signals that the moving point contact probe and the stationary point contact probe are mutually separated, and then tests various parameters of the chip are carried out, and a probe seat 5 provided with the probe 51 is fixed at one end, away from the support plate 2, of the cantilever 4;
a transfer seat 6 is arranged on the upper surface of the middle part of the support plate 2, the front side and the rear side of the transfer seat 6 are respectively provided with a front baffle 61 and a rear baffle 62, the front baffle 61 and the rear baffle 62 are respectively provided with a first through hole 7 and 2 guide grooves 8 positioned at two sides of the first through hole 7, and two ends of a first pin shaft 9 are respectively positioned in the respective first through holes 7 of the front baffle 61 and the rear baffle 62;
a second pin shaft 11 and a third pin shaft 12 are arranged on the lower convex block 10 positioned on the other side of the lower end face of the body 1 in parallel, the second pin shaft 11 and the third pin shaft 12 are positioned above the first pin shaft 9 and positioned on two sides of the first pin shaft, two ends of the second pin shaft 11 and two ends of the third pin shaft 12 respectively extend out from the front side and the rear side of the lower convex block 10, a first bearing 13 and a second bearing 14 are respectively sleeved on two ends of the second pin shaft 11 and positioned on the front side and the rear side of the lower convex block 10, and a third bearing 15 and a fourth bearing 16 are respectively sleeved on two ends of the third pin shaft 12 and positioned on the front side and the rear side of the lower convex block 10;
the first bearing 13, the third bearing 15, the second bearing 14 and the fourth bearing 16 are respectively positioned between the lower lug 10 and the front baffle plate 61 and the rear baffle plate 62, one end of a first elastic part 18 positioned in a vertical through hole 17 of the lower lug 10 is connected with the middle area of the first pin shaft 9 positioned between the front baffle plate 61 and the rear baffle plate 62, the other end of the first elastic part is connected with a fourth pin shaft 19 positioned in the body 1 and positioned above the second pin shaft 11 and the third pin shaft 12, and the first elastic part 18 is in a stretching state, so that moving coils of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are respectively in pressing contact with the side surface of the first pin shaft 9;
the moment of the center of mass of the part of the supporting plate 2, the cantilever 4, the probe holder 5 and the probe 51 which is positioned at the right side of the first pin shaft 9 is larger than the moment of the center of mass of the rest of the supporting plate 2, the moving point contact probe 31 which is positioned at the left side of the first pin shaft 9.
The probe seat 5 comprises a base 52 and a clip 53, the probe 51 is positioned between the base 52 and the clip 53, and the clip 53 is connected to the base 52 through an adjusting nut 54;
at least one of the contact surfaces of the base 52 and the clip 53 with the probe 51 is provided with a V-shaped groove 55 for the probe 51 to be embedded; the probe 51 is angled at 30 deg. to the support plate 2.
Example 2: an efficient test apparatus for light emitting devices, comprising: a substrate 21, a testing platform 22 mounted on the upper surface of the substrate 21, a driving bracket 23 mounted on the outer side of the substrate 21, and a test probe assembly 24 mounted on the driving bracket 23 and located above the testing platform 22, wherein the test probe assembly 24 includes: the probe comprises a body 1, a support plate 2, a probe 51 used for contacting with a chip to be tested and a moving point contact probe 31 which are connected with a driving bracket 23, wherein one end of the support plate 2 is provided with a cantilever 4, the other end of the support plate is provided with the moving point contact probe 31, one side of the lower end surface of the body 1 is provided with a fixed point contact probe 32 which is positioned at the upper part of the moving point contact probe 31 and corresponds to the moving point contact probe, and one end of the cantilever 4, which is far away from the support plate 2, is fixedly provided with a probe seat 5 provided with the probe 51;
a transfer seat 6 is arranged on the upper surface of the middle part of the support plate 2, the front side and the rear side of the transfer seat 6 are respectively provided with a front baffle 61 and a rear baffle 62, the front baffle 61 and the rear baffle 62 are respectively provided with a first through hole 7 and 2 guide grooves 8 positioned at two sides of the first through hole 7, and two ends of a first pin shaft 9 are respectively positioned in the respective first through holes 7 of the front baffle 61 and the rear baffle 62;
a second pin shaft 11 and a third pin shaft 12 are arranged on the lower convex block 10 positioned on the other side of the lower end face of the body 1 in parallel, the second pin shaft 11 and the third pin shaft 12 are positioned above the first pin shaft 9 and positioned on two sides of the first pin shaft, two ends of the second pin shaft 11 and two ends of the third pin shaft 12 respectively extend out from the front side and the rear side of the lower convex block 10, a first bearing 13 and a second bearing 14 are respectively sleeved on two ends of the second pin shaft 11 and positioned on the front side and the rear side of the lower convex block 10, and a third bearing 15 and a fourth bearing 16 are respectively sleeved on two ends of the third pin shaft 12 and positioned on the front side and the rear side of the lower convex block 10;
the first bearing 13, the third bearing 15, the second bearing 14 and the fourth bearing 16 are respectively positioned between the lower lug 10 and the front baffle plate 61 and the rear baffle plate 62, one end of a first elastic part 18 positioned in a vertical through hole 17 of the lower lug 10 is connected with the middle area of the first pin shaft 9 positioned between the front baffle plate 61 and the rear baffle plate 62, the other end of the first elastic part is connected with a fourth pin shaft 19 positioned in the body 1 and positioned above the second pin shaft 11 and the third pin shaft 12, and the first elastic part 18 is in a stretching state, so that moving coils of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are respectively in pressing contact with the side surface of the first pin shaft 9;
the moment of the center of mass of the part of the support plate 2, the cantilever 4, the probe holder 5 and the probe 51 located on the right side of the first pin 9 is greater than the moment of the center of mass of the rest of the support plate 2, the moving point contact probe 31 located on the left side of the first pin 9.
The driving bracket 23 further includes two vertical rods 231 arranged in parallel, a mounting plate 232 connected between the upper ends of the two vertical rods 231, and a connecting plate 233 connected between the lower ends of the two vertical rods 231, and 2 of the test probe assemblies 24 are respectively mounted on the upper surfaces of both ends of the mounting plate 232;
a fixing plate 25 mounted on the base plate 21 is vertically arranged between the upright 231 of the driving bracket 23 and the base plate 21, a motor 26 is mounted at the lower part of the fixing plate 25, a screw rod 27 is mounted on an output shaft of the motor 26 along the vertical direction, and a screw rod nut 28 sleeved on the screw rod 27 is connected with a connecting plate 233 of the driving bracket 23;
a slide rail 29 is respectively arranged on both sides of the screw rod 27 and between the upright 231 and the fixed plate 25, and the upright 231 is movably connected with the slide rail 29 through at least two slide blocks 30; the probe 51 is at an angle of 60 ° to the support plate 2.
When the high-efficiency test equipment for the light-emitting device is adopted, the driving support is driven by the motor to drive the test probe assembly to move, so that a probe on the test probe assembly is in contact with a chip to be tested on the test board, the probe applies downward pressure to the chip and simultaneously receives upward reaction force from the chip to drive the support plate to rotate, the moving point contact probe arranged on the support plate moves downward, the initial state of contact with the stationary point contact probe is changed into a state of separation from the stationary point contact probe, the probe applies proper pressure to the chip, at the moment, the control system for chip test executes power-on operation to enable the probe to be electrically conducted with the chip and test various parameters of the chip, after the test is finished, the support plate reversely rotates under the action of the second elastic piece and returns to the initial horizontal position, and meanwhile, the moving point contact probe is in contact with the stationary point contact probe;
in the process of testing a large number of chips for a long time and rotating the supporting plate in a reciprocating manner, the first pin shaft arranged on the supporting plate is attached to the four bearings which are arranged on two sides and two ends of the supporting plate and are arranged on the body through the first elastic piece, so that the first pin shaft can be accurately limited while the supporting plate can smoothly rotate by taking the first pin shaft as a fulcrum, and the supporting plate can only rotate without deviating in other directions; therefore, on the basis of realizing performance test on a large number of chips, the fatigue problem in the prior art that the front-end probe structure is supported by adopting a spring piece supporting structure is eliminated, the accurate setting of position parameters in the horizontal and vertical directions is facilitated, and the stability of an initial pressure set value can be still kept after long-term and high-frequency use, so that the stability, repeatability, comparability and consistency of detection data are improved, the defect that the probe has micro-jitter in the vertical direction when the probe is separated from the chip is overcome, the time between adjacent detections is facilitated to be shortened, the detection efficiency is improved, and unnecessary damage to the chip is avoided;
furthermore, the micro rotation offset of the probe in the horizontal direction is eliminated, the accuracy of the detection data is ensured, and the stability, repeatability, comparability and consistency of the detection data are further improved.
The high-efficiency test equipment for the light-emitting device can be expanded to other industries for testing semiconductor chips, is not limited to the optical communication industry, can be synchronously expanded and used in all industries needing the high-efficiency test equipment for the light-emitting device, and has wide application range.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (5)
1. An efficient test apparatus for light emitting devices, comprising: base plate (21), install testboard (22) in base plate (21) upper surface, install drive support (23) in the base plate (21) outside and install on drive support (23) and be located testboard (22) top test probe subassembly (24), test probe subassembly (24) includes: the probe comprises a body (1) connected with a driving support (23), a support plate (2), a probe (51) used for being in contact with a chip to be tested and a moving point contact probe (31), wherein one end of the support plate (2) is provided with a cantilever (4), the other end of the support plate is provided with the moving point contact probe (31), one side of the lower end surface of the body (1) is provided with a fixed point contact probe (32) which is positioned at the upper part of the moving point contact probe (31) and corresponds to the moving point contact probe, when the probe (51) is in contact with the chip to be tested, the moving point contact probe (31) rotates along with the support plate (2) to be far away from the fixed point contact probe (32), the moving point contact probe (31) and the fixed point contact probe (32) are changed into a mutually separated state from an initial state of mutual contact, one end, far away from the support plate (2), of the cantilever (4) is fixedly provided with a probe seat (5) provided with the probe (51), and the included angle between the probe (51) and the support plate (2) is 60 degrees;
a switching seat (6) is arranged on the upper surface of the middle part of the support plate (2), the front side and the rear side of the switching seat (6) are respectively provided with a front baffle (61) and a rear baffle (62), the front baffle (61) and the rear baffle (62) are respectively provided with a first through hole (7) and 2 guide grooves (8) positioned at two sides of the first through hole (7), and two ends of a first pin shaft (9) are respectively positioned in the respective first through holes (7) of the front baffle (61) and the rear baffle (62);
a second pin shaft (11) and a third pin shaft (12) are arranged on a lower convex block (10) on the other side of the lower end face of the body (1) in parallel, the second pin shaft (11) and the third pin shaft (12) are arranged above the first pin shaft (9) and are arranged on two sides of the first pin shaft, two ends of the second pin shaft (11) and two ends of the third pin shaft (12) respectively extend out from the front side and the rear side of the lower convex block (10), a first bearing (13) and a second bearing (14) are respectively sleeved at two ends of the second pin shaft (11) and are arranged on the front side and the rear side of the lower convex block (10), and a third bearing (15) and a fourth bearing (16) are respectively sleeved at two ends of the third pin shaft (12) and are arranged on the front side and the rear side of the lower convex block (10);
the first bearing (13), the third bearing (15), the second bearing (14) and the fourth bearing (16) are respectively positioned between the lower lug (10) and the front baffle (61) and the rear baffle (62), one end of a first elastic piece (18) positioned in a vertical through hole (17) of the lower lug (10) is connected with a middle area of the first pin shaft (9) positioned between the front baffle (61) and the rear baffle (62), the other end of the first elastic piece is connected with a fourth pin shaft (19) positioned in the body (1) and positioned above the second pin shaft (11) and the third pin shaft (12), and the first elastic piece (18) is in a stretching state, so that respective moving rings of the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are in pressing contact with the side surface of the first pin shaft (9);
the moment of the mass centers of the supporting plate (2) part, the cantilever (4), the probe seat (5) and the probe (51) which are positioned on the right side of the first pin shaft (9) is larger than the moment of the mass centers of the rest part of the supporting plate (2) positioned on the left side of the first pin shaft (9) and the moving point contact probe (31).
2. The high efficiency test apparatus for light emitting devices of claim 1, wherein: the probe seat (5) comprises a base (52) and a clamping piece (53), and at least one of the surfaces of the base (52) and the clamping piece (53) which are contacted with the probe (51) is provided with a V-shaped groove (55) for the probe (51) to be embedded into.
3. The high efficiency test apparatus for light emitting devices of claim 1, wherein: drive support (23) further include two parallel arrangement's pole setting (231), connect mounting panel (232) between two pole setting (231) upper ends and connect connecting plate (233) between two pole setting (231) lower extreme, 2 test probe subassembly (24) are installed respectively on the upper surface at mounting panel (232) both ends.
4. The high efficiency test apparatus for light emitting devices of claim 3, wherein: a fixing plate (25) installed on the base plate (21) is vertically arranged between the vertical rod (231) of the driving support (23) and the base plate (21), a motor (26) is installed on the lower portion of the fixing plate (25), a lead screw (27) is installed on an output shaft of the motor (26) in the vertical direction, and a lead screw nut (28) sleeved on the lead screw (27) is connected with a connecting plate (233) of the driving support (23).
5. The high efficiency test apparatus for light emitting devices of claim 4, wherein: the two sides of the screw rod (27) are respectively provided with a sliding rail (29) between the vertical rod (231) and the fixed plate (25), and the vertical rod (231) is movably connected with the sliding rails (29) through at least two sliding blocks (30).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210313127.3A CN115684867A (en) | 2021-07-28 | 2021-07-28 | High efficiency test apparatus for light emitting devices |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210313127.3A CN115684867A (en) | 2021-07-28 | 2021-07-28 | High efficiency test apparatus for light emitting devices |
| CN202110856380.9A CN113533938B (en) | 2021-07-28 | 2021-07-28 | Chip testing machine |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110856380.9A Division CN113533938B (en) | 2021-07-28 | 2021-07-28 | Chip testing machine |
Publications (1)
| Publication Number | Publication Date |
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| CN115684867A true CN115684867A (en) | 2023-02-03 |
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Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110856380.9A Active CN113533938B (en) | 2021-07-28 | 2021-07-28 | Chip testing machine |
| CN202210313127.3A Pending CN115684867A (en) | 2021-07-28 | 2021-07-28 | High efficiency test apparatus for light emitting devices |
| CN202210305776.9A Pending CN114675164A (en) | 2021-07-28 | 2021-07-28 | Automatic testing arrangement of laser instrument chip |
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| CN114355132B (en) * | 2021-11-09 | 2024-03-01 | 苏州联讯仪器股份有限公司 | Laser chip test system for optical communication |
| CN114325300B (en) * | 2021-11-09 | 2023-08-08 | 苏州联讯仪器股份有限公司 | Chip test equipment for optical communication |
| CN115219750B (en) * | 2022-07-07 | 2024-06-07 | 深圳市斯纳达科技有限公司 | Three-dimensional electric probe seat with force feedback |
| CN116990564B (en) * | 2023-09-27 | 2024-03-15 | 武汉精毅通电子技术有限公司 | Correction device and correction method for cantilever probe |
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| CN2457596Y (en) * | 2000-12-27 | 2001-10-31 | 中国科学院上海技术物理研究所 | Adjustable constant pressure probe drive frame |
| KR100768914B1 (en) * | 2006-03-17 | 2007-10-23 | 양 전자시스템 주식회사 | Probe test apparatus |
| CN202757956U (en) * | 2012-08-01 | 2013-02-27 | 旺矽科技股份有限公司 | Rotatable edge sensor |
| CN202770869U (en) * | 2012-08-22 | 2013-03-06 | 旺矽科技股份有限公司 | Probe and edge sensor utilizing the same |
| CN203535079U (en) * | 2013-09-12 | 2014-04-09 | 旺矽科技股份有限公司 | Probe apparatus |
| CN207396556U (en) * | 2017-08-01 | 2018-05-22 | 深圳市矽电半导体设备有限公司 | Probe mounting structure and LED core chip test system |
| CN109387773A (en) * | 2018-10-22 | 2019-02-26 | 青岛海信宽带多媒体技术有限公司 | Powering on mechanism |
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| CN113533938B (en) | 2022-02-18 |
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