CN2457596Y - Adjustable constant pressure probe drive frame - Google Patents
Adjustable constant pressure probe drive frame Download PDFInfo
- Publication number
- CN2457596Y CN2457596Y CN00265490U CN00265490U CN2457596Y CN 2457596 Y CN2457596 Y CN 2457596Y CN 00265490 U CN00265490 U CN 00265490U CN 00265490 U CN00265490 U CN 00265490U CN 2457596 Y CN2457596 Y CN 2457596Y
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- guide rail
- screw
- probe
- casing
- spring
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Abstract
The utility model relates to an adjustable constant pressure probe drive frame used for detecting the pixel signal of the chip area array of an infrared focal plane device. The utility model comprises a lever component and an X-Y precision mobile platform composed of a translation component of X direction and a translation component of Y direction. The utility model is characterized in that one end of the lever component is provided with a probe, and the other end is provided with a balancing weight with a balancing moment. An adjusting screw is arranged vertically above the balancing weight, and the balancing weight is driven to move up and down by rotating the adjusting screw to cause the probe to enhance and fall. One end of the probe is provided with a weight near a fulcrum, and adjusting the distance between the weight and the fulcrum can control the pressure of the probe falling to form the adjustable constant pressure probe drive frame.
Description
The utility model relates to the probe actuation frame, is meant a kind of probe actuation frame that detects infrared focal plane device face battle array chip pixel signal especially.
Present domestic infrared focal plane device structure is to be formed by the indium pole interconnection by detector chip and silicon sensing circuit, because the needs of interconnection process, must become the pixel electrode growing the indium post on each pixel of array chip, the pixel signal is just drawn from indium post electrode.But array chip picture element density height, for example first monobasic distance is 70 μ m, and the indium column diameter is 10 μ m, and it highly is 10 μ m, and loose being easy to of indium rod structure damaged.To detect and to contact with each pixel indium post with probe array chip, obtain each pixel signal.
Its structure of probe actuation frame commonly used is: rectangle spring leaf one end is fixed on the translation stage with X-Y translation functions, and the other end is put a probe.The spring leaf vertical direction has a set screw, and the turn set screw is forced the dead spring sheet, and probe is depressed, and contacts with pixel indium post.Otherwise probe is lifted to be disengaged.The X-Y translation stage moves to probe on the position of tested pixel, heads on spring leaf by set screw and forces probe to depress or lift.This bogie has two large problems, one, can not effectively control the contact pressure of probe to pixel indium post, set screw is pushed up slightly tightly often, probe and indium post contact pressure are excessive, cause indium post even electrode damage, bring difficulty to interconnection, or pressure is too small causes and the loose contact of indium post, brings error to measurement.Its two, when spring leaf is conditioned screw top down, because firmly bigger, often make probe landing positions skew easily, that is I guess small in this skew, also can exceed the diameter of an indium post, solution to this problem is to align X-Y translation stage, operating difficulties, inefficiency repeatedly.
The purpose of this utility model is in order to overcome the defective of prior art, to provide a kind of easy to operate, and the probe actuation frame of high efficiency is called adjustable constant voltage probe actuation frame.Its pressure can be adjusted when probe contacts the indium post, and in a single day pressure adjusted, and each probe is constant to the contact pressure of indium post.Probe pressure is transferred to optimum condition; Both guaranteed that probe and indium post had excellent contact, guaranteed again that probe did not damage the indium post.To improve measuring reliability and work efficiency.
The purpose of this utility model is to realize like this, a kind of adjustable constant voltage probe actuation frame that is used to survey infrared focus plane device chip face battle array pixel signal, comprise lever part, X to member of translational and Y to member of translational, it is characterized in that said lever part is pressed from both sides by pin, the insulation section header, rod tube, screwed pipe, prop up piece, foot piece, balancing weight is formed, the pin folder is the metallic elastic member, in the middle of it is vertical an aperture is arranged, and probe injects aperture, and it is fastening with screw, with electrically contacting of forming, the pin folder is connected with rod tube by isolating joint, and rod tube is a tube-like piece, it is connected with a piece by screwed pipe, prop up the piece rear end and connect foot piece, this foot piece end is put a balancing weight, and a piece left and right sides is equipped with edge of a knife fulcrum, the balancing weight vertical direction is provided with set screw, put a weights on screwed pipe, this weights and screwed pipe are threaded engagement, one of shielded cable and the welding of pin folder, the other end was gone here and there isolating joint successively, rod tube, screwed pipe, piece center pit and cable-to-cable connector weldment;
Said X to member of translational by casing, cover plate, little axle, the spring boss, 45 ° of strippings and slicings and set screw are formed, respectively there is a foramen cordiforme box bilateral wall top, make to support and locate the usefulness of two edge of a knife fulcrums, deploy a little axle before the tank floor, this little axle matches to the nose of member of translational aperture by box bottom and Y, form the relative slide plate of casing being rotationally connected around little axle, the tank floor rear end is provided with spring boss and 45 ° of strippings and slicings, this spring boss side surfaces has a hole, the built-in compression spring in hole, spring withstands the spring plate washer of the slide plate side of Y on member of translational, the tangent plane of 45 ° of strippings and slicings of tank floor end is towards the casing rear, the X that is placed in horizontal direction withstands to set screw, and X is in set screw is installed in the screw of skateboard back-end bossing;
A cover plate is put in said casing top, is connected with casing with screw, and on the cover board aiming at the balancing weight place has a screw, balancing weight set screw and this screw match, pass cover plate, over against balancing weight and control balancing weight and move up and down, cover forward end also is equipped with cable-to-cable connector;
Said Y comprises the cloudy body of guide rail to member of translational, guide rail sun body, slide plate, compression spring, set screw, base plate, the cloudy body of said guide rail is the rectangle cube, the by-level direction has a cylindrical hole, guide rail sun body is a right cylinder, be precision movingly with the cylindrical hole of the cloudy body of guide rail, and vertically grind a facet at Cylinder simultaneously after cooperating, this guide rail sun body facet and slide plate lower plane are close to, be screwed combination, after cloudy body of guide rail and guide rail sun body cooperate like this, the cloudy body of guide rail can be done accurate moving relative to slide plate, guide rail sun body central longitudinal is to a cylindrical hole is arranged, put a compression spring in the hole, be screwed with a base plate below the cloudy body of guide rail and be connected, one projection is respectively arranged before and after the base plate, the compression spring that front end lug boss stepping has been lived in the guide rail sun body interstitial hole stretches, make spring be compressive state, rear end bossing horizontal direction is put a set screw, screw passes the base plate rear end bossing, withstand guide rail sun body, guide rail sun body front end is compressed spring and pushes down like this, the rear end is conditioned screw and withstands, and screws set screw, promotes the cloudy body of the relative guide rail of guide rail sun body and moves forward, otherwise, spring is unfolded promotion guide rail sun body and is moved backward relative to the cloudy body of guide rail, and guide rail sun body moves relative to the cloudy body of guide rail, drives X by little and moves to member of translational, move thereby just driven probe, form probe Y to translation functions;
Described adjustable constant voltage probe actuation frame is characterized in that the base plate below the cloudy body of said guide rail is being measured on the station by screw retention.
The utlity model has following good effect:
1, reliable in function, probe pressure is adjustable continuously, adjustable extent: 2～10 grams.After probe pressure was adjusted, each probe was to the contact of tested electrode, and constant pressure needn't worry that probe damages electrode, or probe and electrode loose contact.X, Y can deliver to the position, measured point to probe exactly to member of translational degree of regulation height.
2, easy to operate, the operation probe rises and falls, owing to quote lever principle, is the arm of force deadweight when probe is put down and falls, and acting force is minimum, can not influence the probe landing point.Do not need repeatedly to align X, Y translation stage.
3, measuring error is little, because probe and electrode have good stable electrically contacting, does not damage electrode again, so the measuring-signal noise is little.Adopt shielded cable and shielded cable connector to carry signal, signal to noise ratio (S/N ratio) height.The utility model high efficiency in a word.
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing thereof.
Fig. 1 is the schematic appearance of the utility model embodiment.
Fig. 2 is the structural representation of the utility model embodiment.
Fig. 3 is the A-A cut-away view of the utility model Fig. 2.
Fig. 4 is that the B of the utility model Fig. 2 is to synoptic diagram.
Fig. 5 is that the C of the utility model Fig. 2 is to diagrammatic sketch.
Adjustable constant voltage probe actuation frame of the present utility model is made up of to member of translational three parts to member of translational, Y lever part, X.X, Y are responsible for probe 30 is delivered to the position, measured point to member of translational, and lever part control probe 30 contacts or disengaging with the measured point.Said lever part (consulting Fig. 2) is successively by pin folder 29, isolating joint 28, rod tube 1, screwed pipe 3, a piece 5, foot piece 34, balancing weight 8 compositions such as grade.Pin folder 29 is metallic elastic members, and it has an aperture in the middle of vertically, and probe 30 injects apertures, and with screw 31 fastening it.Pin folder 29 is connected with rod tube 1 by isolating joint 28.Rod tube 1 is a tube-like piece, and rod tube 1 is connected with a piece 5 by screwed pipe 3 again, and piece 5 rear end connects foot piece 34, and foot piece 34 other ends are put a balancing weight 8.Prop up piece 5 left and right sides and be provided with edge of a knife fulcrum 23 (consulting Fig. 5), the vertical direction of balancing weight 8 is provided with set screw 10.Put a weights 2 on screwed pipe 3, weights 2 is threaded engagement with screwed pipe 3.So just having formed with edge of a knife fulcrum 23 is mid point, attach most importance to probe 30, and be the leverage in force with balancing weight 8.The moment of probe 30 1 ends is greater than balancing weight 8 one end moments, and balancing weight 8 has upwards been lifted up and has been conditioned screw 10 and withstands, and turn set screw 10 is depressed balancing weight 8 probe is lifted, and breaks away from the measured point.Otherwise, probe 30 is fallen with the measured point contacts.Weights 2 on the turn screwed pipe 3 is adjusted the distance between weights 2 and the edge of a knife fulcrum 23, just can adjust the pressure that contacts with the measured point when probe 30 falls.Probe pressure is adjustable continuously, adjustable extent: 2～10 grams.After probe pressure was adjusted, each probe was constant to the pressure of the contact of tested electrode.The edge of a knife fulcrum 23 that props up piece 5 both sides forms the balance pivot edges of a knife and supports, and is used for improving the sensitivity that lever rotates.Thereby also just improved the stability of 30 pairs of measured point contact pressures of probe.Probe 30 has good electrical contact with pin folder 29, and 27 1 of shielded cables and 29 welding of pin folder are arranged, and the other end was gone here and there isolating joint 28 successively, and the center pit of rod tube 1, screwed pipe 3, a piece 5 etc. welds with cable-to-cable connector 7, is used for carrying electric signal.
X comprises casing 4, cover plate 9, little axle 26,22,45 ° of strippings and slicings 14 of spring boss, set screw 10 to member of translational.Top, casing 4 two sides respectively has one
Supporting and positioning lever two edge of a knife fulcrums 23 usefulness are made in shape hole 35 (Fig. 1).Deploy a little axle 26 before casing 4 bottom surfaces, little axle also matches to the slide plate 12 front end apertures of member of translational with Y by box bottom, forms casing 4 and rotates attitude relative to slide plate 12 around little axle.There are spring boss 22 and 45 ° of strippings and slicings 14 in rear end, casing 4 bottom surface.There is a hole spring boss 22 sides, the built-in compression spring 18 in hole, and the spring plate washer 15 of these slide plate 12 sides of Y on member of translational, spring 18 top forms the gesture (consulting Fig. 3, Fig. 4) that casing 4 relative slide plates 12 are compressed spring 18 promotions.Consult Fig. 4, the tangent plane 140 of 45 ° of strippings and slicings 14 of casing 4 bottom surface ends is towards casing 4 rears, and the X that is placed in horizontal direction withstands to set screw 13.X screws set screw 13 in set screw 13 is installed in the screw of slide plate 12 rear end bossings, promote the tangent plane 140 of stripping and slicing 14, because ramp effect makes casing 4 relative slide plates 12 clockwise rotate around little axle 26, spring 18 is compressed.Move back set screw 13 otherwise revolve, spring 18 is unfolded, and casing 4 is rotated around little axle 26 counter-clockwise direction relative to slide plate 12.The rotation of casing 4 drives probe 30 displacements of lever front end, and the X that forms probe 30 is to translation.A cover plate 9 is put in casing 4 tops, is connected with casing 4 with screw 11.Aiming at balancing weight 8 places on cover plate 9 has a screw 90, and balancing weight set screw 10 matches with this screw, passes cover plate 9, withstands balancing weight 8, and control balancing weight 8 moves up and down.Cover plate 9 front ends also are equipped with cable-to-cable connector 7, and the electric signal of drawing from probe 30 patches 7 outputs by cable 27 by this cable.
Y comprises the cloudy body 33 of guide rail, guide rail sun body 24, slide plate 12, compression spring 25, set screw 16, base plate 17 to member of translational.The cloudy body 33 of guide rail is the rectangle cube, and the by-level direction has a cylinder-shaped hole 330.Guide rail sun body 24 is a right cylinder.Consult Fig. 3, cylinder-shaped hole 330 in the middle of the cloudy body 33 of guide rail sun body 24 and guide rail is precision movingly, and vertically grind a facet 240 at Cylinder simultaneously after cooperating, this guide rail sun body facet 240 is close to screw 32 with slide plate 12 lower planes and is connected, after cloudy body 33 of guide rail and guide rail sun body 24 cooperated like this, the cloudy body 33 of guide rail can be done accurate moving relative to slide plate 12.Guide rail sun body 24 central longitudinal are to a cylinder-shaped hole 241 is arranged, put a compression spring 25 (Fig. 2) in the hole, be connected with a base plate 17 usefulness screws 20 below the cloudy body 33 of guide rail, one projection is respectively arranged before and after the base plate, 170 grades of compression springs 25 of having lived in guide rail sun body 24 interstitial holes of front end bossing stretch, and make spring be compressive state.Bossing 171 horizontal directions in rear end are put a set screw 16, and screw 16 passes base plate rear end bossing 171, withstand guide rail sun body 24, and positive body 24 front ends of guide rail are compressed spring 25 and push down like this, and the rear end is conditioned screw 16 and withstands.Screw set screw 16, promote the cloudy body 33 of guide rail sun body 24 relative guide rails and move forward.Otherwise spring is unfolded promotion guide rail sun body 24 and is moved backward relative to the cloudy body 33 of guide rail.Guide rail sun body 24 moves relative to the cloudy body 33 of guide rail, drives X by little axle 26 and moves to member of translational, moves thereby just driven probe 30.Form probe Y to translation functions.Base plate 17 is fixed on by screw 21 and measures on the station.
Claims (5)
1, a kind of adjustable constant voltage probe actuation frame that is used to survey infrared focus plane device chip face battle array pixel signal, comprise lever part, X to member of translational and Y to member of translational, it is characterized in that said lever part is by pin folder (29), isolating joint (28), rod tube (1), screwed pipe (3), prop up piece (5), foot piece (34), balancing weight (8) is formed, pin folder (29) is the metallic elastic member, in the middle of it is vertical an aperture is arranged, probe (30) injects aperture, and it is fastening with screw (31), with electrically contacting of forming, pin folder (29) is connected with rod tube 1 by isolating joint (28), rod tube (1) is a tube-like piece, it is connected with a piece (5) by screwed pipe (3), prop up piece (5) rear end and connect foot piece (34), these foot piece 34 other ends are put a balancing weight (8), prop up piece (5) left and right sides and be equipped with edge of a knife fulcrum (23), balancing weight (8) vertical direction is provided with set screw (10), on screwed pipe (3), put a weights (2), this weights (2) is threaded engagement with screwed pipe (3), (27) one of shielded cables press from both sides (29) with pin and weld, and the other end is passed isolating joint (28) successively, rod tube (1), screwed pipe (3), the center pit and cable-to-cable connector (7) weldment of a piece (5).
2, adjustable constant voltage probe actuation frame according to claim 1, it is characterized in that said X to member of translational by casing (4), cover plate (9), little axle (26), spring boss (22), 45 ° of strippings and slicings (14) and set screw (10) are formed, respectively there is a foramen cordiforme (35) top, casing (4) two side, make to support and locate the usefulness of two edge of a knife fulcrums (23), deploy a little axle (26) before casing (4) bottom surface, this little axle (26) matches to slide plate (12) the front end aperture of member of translational by casing (4) base plate and Y, form casing (4) slide plate (12) being rotationally connected relatively around little axle (26), casing (4) rear end, bottom surface is provided with spring boss (22) and 45 ° of strippings and slicings (14), there is a hole this spring boss (22) side, the built-in compression spring in hole (18), spring withstands the spring plate washer (15) of slide plate (12) side of Y on member of translational, the tangent plane (140) of 45 ° of strippings and slicings (14) of casing (4) bottom surface end is towards casing (4) rear, the X that is placed in horizontal direction withstands to set screw (13), and X is in set screw (13) is installed in the screw of slide plate (12) rear end bossing.
3, adjustable constant voltage probe actuation frame according to claim 2, it is characterized in that putting a cover plate (9) above the said casing (4), be connected with casing (4) with screw (11), go up aligning balancing weight (8) at cover plate (9) and located a screw (90), balancing weight set screw (10) matches with this screw (90), pass cover plate (9), over against balancing weight (8) and control balancing weight (8) and move up and down, cover plate (9) front end also is equipped with cable-to-cable connector (7).
4, adjustable constant voltage probe actuation frame according to claim 3, it is characterized in that said Y comprises the cloudy body (33) of guide rail to member of translational, guide rail sun body (24), slide plate (12), compression spring (25), set screw (16), base plate (17), the cloudy body of said guide rail (33) is the rectangle cube, the by-level direction has a cylinder-shaped hole (330), guide rail sun body (24) is a right cylinder, be precision movingly with the cylinder-shaped hole (330) of the cloudy body of guide rail (33), and vertically grind a facet (240) at Cylinder simultaneously after cooperating, this guide rail sun body facet (240) is close to slide plate (12) lower plane, with screw (32) secure bond, after cloudy body (33) of guide rail and guide rail sun body (24) cooperate like this, the cloudy body of guide rail (33) can be done accurate moving relative to slide plate (12), guide rail sun body (24) central longitudinal is to a cylinder-shaped hole (241) is arranged, put a compression spring (25) in the hole, fixedly connected with screw (20) with a base plate (17) below the cloudy body of guide rail (33), one projection is respectively arranged before and after the base plate, the compression spring (25) that front end bossing (170) shelves have been lived in guide rail sun body (24) interstitial hole stretches, make spring be compressive state, rear end bossing (171) horizontal direction is put a set screw (16), screw (16) passes base plate rear end bossing (171), withstand guide rail sun body (24), guide rail sun body (24) front end is compressed spring (25) and pushes down like this, the rear end is conditioned screw (16) and withstands, screw set screw (16), promoting the relative cloudy body of guide rail of guide rail sun body (24) (33) moves forward, otherwise, spring is unfolded promotion guide rail sun body (24) and is moved backward relative to the cloudy body of guide rail (33), guide rail sun body (24) moves relative to the cloudy body of guide rail (33), driving X by little axle (26) moves to member of translational, move thereby just driven probe (30), form probe Y to translation functions.
5,, it is characterized in that the following base plate (17) of the cloudy body of said guide rail (33) is fixed on the measurement station by screw (21) according to claim 1 or 2 or 3 or 4 described adjustable constant voltage probe actuation framves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00265490U CN2457596Y (en) | 2000-12-27 | 2000-12-27 | Adjustable constant pressure probe drive frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00265490U CN2457596Y (en) | 2000-12-27 | 2000-12-27 | Adjustable constant pressure probe drive frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2457596Y true CN2457596Y (en) | 2001-10-31 |
Family
ID=33619859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00265490U Expired - Fee Related CN2457596Y (en) | 2000-12-27 | 2000-12-27 | Adjustable constant pressure probe drive frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2457596Y (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207025A (en) * | 2012-01-17 | 2013-07-17 | 海洋王（东莞）照明科技有限公司 | Temperature test instrument |
| CN105842603A (en) * | 2016-04-11 | 2016-08-10 | 扬州乾照光电有限公司 | LED probe-station edge sensor for automatic control of Z shaft movement |
| CN106783658A (en) * | 2016-12-23 | 2017-05-31 | 江苏物联网研究发展中心 | Wafer scale infrared focus plane parameter test system |
| CN107589305A (en) * | 2017-10-17 | 2018-01-16 | 南京恒电电子有限公司 | A kind of test system and operating method of mini-pads silicon substrate PIN junction capacitances |
| CN109061232A (en) * | 2018-08-29 | 2018-12-21 | 河南大学 | Probe unit of microscope with atomic force |
| CN111492254A (en) * | 2017-12-26 | 2020-08-04 | 日本电产理德股份有限公司 | Substrate inspection device |
| CN113533938A (en) * | 2021-07-28 | 2021-10-22 | 苏州联讯仪器有限公司 | Chip testing machine |
| CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
-
2000
- 2000-12-27 CN CN00265490U patent/CN2457596Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207025A (en) * | 2012-01-17 | 2013-07-17 | 海洋王（东莞）照明科技有限公司 | Temperature test instrument |
| CN105842603A (en) * | 2016-04-11 | 2016-08-10 | 扬州乾照光电有限公司 | LED probe-station edge sensor for automatic control of Z shaft movement |
| CN106783658A (en) * | 2016-12-23 | 2017-05-31 | 江苏物联网研究发展中心 | Wafer scale infrared focus plane parameter test system |
| CN107589305A (en) * | 2017-10-17 | 2018-01-16 | 南京恒电电子有限公司 | A kind of test system and operating method of mini-pads silicon substrate PIN junction capacitances |
| CN111492254A (en) * | 2017-12-26 | 2020-08-04 | 日本电产理德股份有限公司 | Substrate inspection device |
| CN109061232A (en) * | 2018-08-29 | 2018-12-21 | 河南大学 | Probe unit of microscope with atomic force |
| CN113533938A (en) * | 2021-07-28 | 2021-10-22 | 苏州联讯仪器有限公司 | Chip testing machine |
| CN113533938B (en) * | 2021-07-28 | 2022-02-18 | 苏州联讯仪器有限公司 | Chip testing machine |
| CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
| CN113533939B (en) * | 2021-08-09 | 2022-03-15 | 苏州联讯仪器有限公司 | Probe station for chip test |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |