CN114325300B - Chip test equipment for optical communication - Google Patents
Chip test equipment for optical communication Download PDFInfo
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- CN114325300B CN114325300B CN202111318464.3A CN202111318464A CN114325300B CN 114325300 B CN114325300 B CN 114325300B CN 202111318464 A CN202111318464 A CN 202111318464A CN 114325300 B CN114325300 B CN 114325300B
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- 238000012360 testing method Methods 0.000 title claims abstract description 64
- 230000003287 optical effect Effects 0.000 title claims abstract description 34
- 238000004891 communication Methods 0.000 title claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 84
- 239000000463 material Substances 0.000 claims abstract description 40
- 238000007599 discharging Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 3
- 230000002457 bidirectional effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a chip testing device for optical communication, comprising: test board, install in test mechanism of test board upper surface and be located the test mechanism both sides respectively and be used for loading the material loading seat, the unloading seat of waiting to test the chip, its fortune material mechanism includes: the automatic suction nozzle comprises a base, a first motor, a horizontal sliding table, an adapter plate, a second motor and a suction nozzle rod, wherein the first motor, the horizontal sliding table, the adapter plate, the second motor and the suction nozzle rod are vertically arranged on the base, a fixing seat positioned below the first motor is arranged on the base, a clamping strip and an arc-shaped rack are arranged above the fixing seat, the front end of the clamping strip is connected with the upper end of the suction nozzle rod in a clamping mode, the rear end of the clamping strip is connected with the arc-shaped rack through a connecting rod, the arc-shaped rack is connected with a gear on an output shaft of the first motor in a meshing mode, and the circle center of the arc-shaped rack is overlapped with the axis of the suction nozzle rod. The invention improves the precision of calculating and adjusting the angle of the chip to be tested and the stability of maintaining the precision after long-time high-frequency use, thereby improving the precision and stability of testing the chip.
Description
Technical Field
The invention relates to chip testing equipment for optical communication, and belongs to the technical field of semiconductor chip testing.
Background
The optical device is an optoelectronic device in an optical communication system, which can convert an electrical signal into an optical signal or convert an optical signal into an electrical signal, and is a heart of an optical transmission system. After the optical device is packaged and manufactured, all photoelectric indexes of the optical device are tested to meet the requirements through an electric-adding link, and the qualified optical device can enter the next working procedure. As a component directly contacting the chip in the test link, the suction nozzle for picking up the chip plays an important role, and for the test link in the optical communication industry, the requirements on the position accuracy of the chip and the contact pressure between the suction nozzle and the chip are high due to the requirements of the process.
Disclosure of Invention
The invention aims to provide the chip testing equipment for optical communication, which improves the accuracy of calculating and adjusting the angle of a chip to be tested and the stability of maintaining the accuracy after long-time high-frequency use, thereby improving the accuracy and stability of chip testing.
In order to achieve the above purpose, the invention adopts the following technical scheme: a chip testing apparatus for optical communication, comprising: the test machine comprises a test machine table, a test mechanism arranged on the upper surface of the test machine table, and a feeding seat and a discharging seat which are respectively arranged at two sides of the test mechanism and used for loading chips to be tested, wherein an X-direction driving mechanism which spans over the feeding seat and the discharging seat is arranged on the test machine table, at least one material conveying mechanism capable of moving along the X direction is movably arranged on the X-direction driving mechanism, and the feeding seat and the discharging seat are respectively arranged on a Y-direction driving mechanism which is perpendicular to the X-direction driving mechanism and can move along the Y direction;
the material transporting mechanism further comprises: the device comprises a base, a first motor, a horizontal sliding table, an adapter plate, a second motor and a suction nozzle rod, wherein the first motor, the horizontal sliding table, the adapter plate, the second motor and the suction nozzle rod are vertically arranged on the base, the horizontal sliding table is positioned between an upper end plate of the 8 base and a lower end plate of the adapter plate, the second motor is fixed on a substrate connected with an X-direction driving mechanism, the substrate is connected with the adapter plate through a Z-axis sliding mechanism, and an output shaft of the second motor is connected with the Z-axis sliding mechanism;
the fixed seat is arranged below the first motor and is arranged on the base, a left inclined surface area and a right inclined surface area are respectively arranged on the left side and the right side of the front end surface of the fixed seat, at least 2 pairs of bearings are arranged on the front end surface of the fixed seat, the left bearings of each pair of bearings are arranged on the left inclined surface area of the fixed seat at intervals along the vertical direction, the right bearings of each pair of bearings are arranged on the right inclined surface area of the fixed seat at intervals along the vertical direction, a V-shaped channel is formed between the left bearings and the right bearings of each pair of bearings, and the suction nozzle rod is positioned in the V-shaped channel of at least 2 pairs of bearings;
a clamping bar and an arc-shaped rack are arranged above the fixed seat, the front end of the clamping bar is in clamping connection with the upper end of the suction nozzle rod, the rear end of the clamping bar is connected with the arc-shaped rack through a connecting rod, the arc-shaped rack is in meshed connection with a gear on the output shaft of the first motor, and the circle center of the arc-shaped rack is overlapped with the axle center of the suction nozzle rod;
the clamping strip is connected respectively to a first spring both ends, the left side of fixing base upper portion each, and the right side of clamping strip, fixing base lower part each is connected respectively to a second spring both ends, the one end that first spring and clamping strip are connected is higher than its other end, and first spring one end is close to the arc rack and is located the below of arc rack, and the other end is connected to the one end that clamping strip kept away from the arc rack, and this first spring is the slope setting with the horizontal direction, the second spring is vertical setting, the pulling force of first spring is greater than the pulling force of second spring.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, the connecting rod is connected to the middle of the arc-shaped rack.
2. In the above scheme, the lower surface of the clamping strip is provided with a protruding part which is contacted with the upper surface of the fixing seat.
3. In the above scheme, the front end of the clamping strip is provided with a clamping bolt, and one end of each of the first spring and the second spring is respectively connected with the left end and the right end of the clamping bolt.
4. In the scheme, 2 material conveying mechanisms corresponding to the material loading seat and the material unloading seat are arranged on the X-direction driving mechanism.
5. In the above scheme, the X-direction driving mechanism and the Y-direction driving mechanism further comprise a motor, a screw rod with one end connected with an output shaft of the motor and nuts sleeved on the screw rod, and the material conveying mechanism, the material loading seat and the material unloading seat are respectively connected with the corresponding nuts.
6. In the above scheme, X is to actuating mechanism still including parallel arrangement in the slide rail of lead screw both sides and slidable mounting on the slide rail, the slider is connected with the fortune material mechanism of installing on X to actuating mechanism.
7. In the above scheme, X is to actuating mechanism including being located the horizontal pole of material loading seat, unloading seat top and connecting in the stand at horizontal pole both ends, 2 upper ends and horizontal pole connection the lower extreme fixed mounting of stand is on the test bench.
8. In the above scheme, the lower extreme of second spring is connected with the fixing base through a right link, has a vertical bar hole on this right link, right link is connected with the fixing base through the bolt of embedding vertical bar hole.
9. In the above scheme, the other end of the first spring is connected with the fixing seat through a left hanging piece, a plurality of through holes are formed in the left hanging piece, and the other end of the first spring is connected with one through hole.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. according to the chip testing equipment for optical communication, the material conveying mechanism is used for realizing large-scale and forward and backward bidirectional dynamic adjustment of the angle of the chip, improving the accuracy of calculating and adjusting the angle and the stability of keeping the accuracy after long-time high-frequency use, gradually increasing the contact pressure of the suction nozzle rod and the chip, effectively avoiding chip loss and secondary position offset caused by chip adsorption failure, greatly improving the one-time adsorption success rate of the chip, further improving the accuracy of angle adjustment, and further avoiding damage to the chip, thereby improving the accuracy and stability of chip testing.
2. The invention relates to a chip testing device for optical communication, which is characterized in that the left side and the right side of the front end surface of a fixed seat are respectively provided with a left inclined surface area and a right inclined surface area, at least 2 pairs of bearings are arranged on the front end surface of the fixed seat, the left bearings of each pair of bearings are arranged on the left inclined surface area of the fixed seat at intervals along the vertical direction, and the right bearings of each pair of bearings are arranged on the right inclined surface area of the fixed seat at intervals along the vertical direction, so that a V-shaped channel for loading a suction nozzle rod is formed between the left bearings and the right bearings of each pair of bearings, thereby not only providing stable limit for the suction nozzle rod, but also greatly reducing the friction force of the suction nozzle rod in the process of repeatedly up-down micro-moving for a long time, further improving the accuracy of angle adjustment and the stability of the accuracy after long-time high-frequency use.
Drawings
FIG. 1 is a schematic diagram of a chip test apparatus for optical communication according to the present invention;
FIG. 2 is a schematic diagram of a material transporting mechanism in the chip testing device for optical communication according to the present invention;
FIG. 3 is an enlarged view of a partial structure of a material handling mechanism in the test apparatus of the present invention at one view angle;
FIG. 4 is an enlarged view of a partial structure of the material handling mechanism in the test apparatus of the present invention at another view angle;
fig. 5 is an enlarged view of a partial structure of the test apparatus according to the present invention in which the suction nozzle lever is not mounted to the material handling mechanism.
In the above figures: 100. a test machine; 200. a testing mechanism; 300. a Y-direction driving mechanism; 301. a feeding seat; 302. a blanking seat; 400. a chip to be tested; 500. an X-direction driving mechanism; 501. a cross bar; 502. a column; 600. a material conveying mechanism; 1. a base; 101. an upper end plate; 2. a first motor; 3. a horizontal slipway; 4. an adapter plate; 401. a lower end plate; 402. a vertical plate; 5. a second motor; 6. a suction nozzle lever; 7. a substrate; 8. a Z-axis sliding mechanism; 9. a fixing seat; 901. a left bevel region; 902. a right bevel region; 903. a base; 904. a fixed block; 10. a V-shaped channel; 11. a left bearing; 12. a right bearing; 13. clamping the strip; 131. a boss; 14. an arc-shaped rack; 15. a connecting rod; 16. a gear; 17. a first spring; 171. a left hanging piece; 172. a through hole; 18. a second spring; 181. a right hanging piece; 182. a vertical bar-shaped hole; 19. and clamping the bolt.
Detailed Description
In the description of this patent, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element in question must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in this patent will be understood by those of ordinary skill in the art in a specific context.
Example 1: a chip testing apparatus for optical communication, comprising: the testing machine comprises a testing machine 100, a testing mechanism 200 arranged on the upper surface of the testing machine 100, a feeding seat 301 and a discharging seat 302 which are respectively positioned at two sides of the testing mechanism 200 and used for loading chips 400 to be tested, wherein an X-direction driving mechanism 500 which spans over the feeding seat 301 and the discharging seat 302 is arranged on the testing machine 100, at least one material conveying mechanism 600 which can move along the X direction is movably arranged on the X-direction driving mechanism 500, and the feeding seat 301 and the discharging seat 302 are respectively arranged on a Y-direction driving mechanism 300 which is perpendicular to the X-direction driving mechanism 500 and can move along the Y direction;
the material transporting mechanism 600 further includes: the device comprises a base 1, a first motor 2 vertically arranged on the base 1, a horizontal sliding table 3, an adapter plate 4, a second motor 5 and a suction nozzle rod 6, wherein the horizontal sliding table 3 is positioned between an upper end plate 101 of the base 1 and a lower end plate 401 of the adapter plate 4, the second motor 5 is fixed on a base plate 7 connected with an X-direction driving mechanism 500, the base plate 7 is connected with the adapter plate 4 through a Z-axis sliding mechanism 8, and an output shaft of the second motor 5 is connected with the Z-axis sliding mechanism 8;
a fixed seat 9 below the first motor 2 is installed on the base 1, the left side and the right side on the front end surface of the fixed seat 9 are respectively provided with a left inclined surface area 901 and a right inclined surface area 902, at least 2 pairs of bearings are installed on the front end surface of the fixed seat 9, the left bearings 11 in each pair of bearings are arranged on the left inclined surface area 901 of the fixed seat 9 at intervals along the vertical direction, the right bearings 12 in each pair of bearings are arranged on the right inclined surface area 902 of the fixed seat 9 at intervals along the vertical direction, a V-shaped channel 10 is formed between the left bearings 11 and the right bearings 12 in each pair of bearings, and the suction nozzle rod 6 is positioned in the V-shaped channel 10 of at least 2 pairs of bearings;
a clamping bar 13 and an arc-shaped rack 14 are arranged above the fixed seat 9, the front end of the clamping bar 13 is in clamping connection with the upper end of the suction nozzle rod 6, the rear end of the clamping bar 13 is connected with the arc-shaped rack 14 through a connecting rod 15, the arc-shaped rack 14 is in meshed connection with a gear 16 on the output shaft of the first motor 2, and the center of the arc-shaped rack 14 is overlapped with the axis of the suction nozzle rod 6;
the two ends of a first spring 17 are respectively connected with the clamping strip 13 and the left side surface of the upper part of the fixed seat 9, the two ends of a second spring 18 are respectively connected with the clamping strip 13 and the right side surface of the lower part of the fixed seat 9, one end of the first spring 17 connected with the clamping strip 13 is higher than the other end of the first spring, one end of the first spring 17 is close to the arc-shaped rack 14 and is positioned below the arc-shaped rack 14, the other end of the first spring 17 is connected to one end of the clamping strip 13 far away from the arc-shaped rack 14, the first spring 17 is obliquely arranged with the horizontal direction, the second spring 18 is vertically arranged, and the tensile force of the first spring 17 is greater than that of the second spring 18.
The connecting rod 15 is connected to the middle of the arc-shaped rack 14; the lower surface of the clamping strip 13 is provided with a bulge 131 which is contacted with the upper surface of the fixed seat 9;
the X-direction driving mechanism 500 further comprises a sliding rail and a sliding block, wherein the sliding rail is arranged on two sides of the screw rod in parallel, the sliding block is slidably arranged on the sliding rail, and the sliding block is connected with the material conveying mechanism 600 arranged on the X-direction driving mechanism 500; the X-direction driving mechanism 500 includes a cross bar 501 located above the loading base 301 and the unloading base 302, and upright posts 502 connected to two ends of the cross bar 501, where the lower ends of the 2 upright posts 502 with upper ends connected to the cross bar 501 are fixedly mounted on the test machine 100;
the Z-axis sliding mechanism 8 further comprises a screw rod sleeved with a nut, at least one pair of sliding rails and a sliding block, an output shaft of the second motor 5 is connected with one end of the screw rod, and an output shaft of the second motor 5 is connected with one end of the screw rod through a coupling;
the first motor 2 and the second motor 5 are respectively located at two sides of the adapter plate 4, the adapter plate 4 further comprises a vertical plate 402 and a lower end plate 401 which are perpendicular to each other, the horizontal sliding table 3 and the first motor 2 are respectively located at two sides of the vertical plate 402, and the second motor 5 and the Z-axis sliding mechanism 8 are located between the base plate 7 and the vertical plate 402.
Example 2: a chip testing apparatus for optical communication, comprising: the material transporting mechanism 600, the material transporting mechanism 600 includes: the X-direction driving device comprises a base 1, a first motor 2, an adapter plate 4, a second motor 5 and a suction nozzle rod 6 which are vertically arranged on the base 1, wherein the second motor 5 is fixed on a base plate 7 connected with an X-direction driving mechanism 500, the base plate 7 is connected with the adapter plate 4 through a Z-axis sliding mechanism 8, and an output shaft of the second motor 5 is connected with the Z-axis sliding mechanism 8;
a fixed seat 9 below the first motor 2 is installed on the base 1, the left side and the right side on the front end surface of the fixed seat 9 are respectively provided with a left inclined surface area 901 and a right inclined surface area 902, at least 2 pairs of bearings are installed on the front end surface of the fixed seat 9, the left bearings 11 in each pair of bearings are arranged on the left inclined surface area 901 of the fixed seat 9 at intervals along the vertical direction, the right bearings 12 in each pair of bearings are arranged on the right inclined surface area 902 of the fixed seat 9 at intervals along the vertical direction, a V-shaped channel 10 is formed between the left bearings 11 and the right bearings 12 in each pair of bearings, and the suction nozzle rod 6 is positioned in the V-shaped channel 10 of at least 2 pairs of bearings;
a clamping bar 13 and an arc-shaped rack 14 are arranged above the fixed seat 9, the front end of the clamping bar 13 is in clamping connection with the upper end of the suction nozzle rod 6, the rear end of the clamping bar 13 is connected with the arc-shaped rack 14 through a connecting rod 15, the arc-shaped rack 14 is in meshed connection with a gear 16 on the output shaft of the first motor 2, and the center of the arc-shaped rack 14 is overlapped with the axis of the suction nozzle rod 6;
the two ends of a first spring 17 are respectively connected with the clamping strip 13 and the left side surface of the upper part of the fixed seat 9, the two ends of a second spring 18 are respectively connected with the clamping strip 13 and the right side surface of the lower part of the fixed seat 9, one end of the first spring 17 connected with the clamping strip 13 is higher than the other end of the first spring, one end of the first spring 17 is close to the arc-shaped rack 14 and is positioned below the arc-shaped rack 14, the other end of the first spring 17 is connected to one end of the clamping strip 13 far away from the arc-shaped rack 14, the first spring 17 is obliquely arranged with the horizontal direction, the second spring 18 is vertically arranged, and the tensile force of the first spring 17 is greater than that of the second spring 18.
The front end of the clamping bar 13 is provided with a clamping bolt 19, and one end of each of the first spring 17 and the second spring 18 is respectively connected with the left end and the right end of the clamping bolt 19;
2 material conveying mechanisms 600 corresponding to the material loading seat 301 and the material unloading seat 302 are arranged on the X-direction driving mechanism 500; the X-direction driving mechanism 500 and the Y-direction driving mechanism 300 each further comprise a motor, a screw rod with one end connected with an output shaft of the motor, and nuts sleeved on the screw rod, and the material conveying mechanism 600, the material loading seat 301 and the material unloading seat 302 are respectively connected with the corresponding nuts;
the lower end of the second spring 18 is connected with the fixed seat 9 through a right hanging piece 181, a vertical bar-shaped hole 182 is formed in the right hanging piece 181, and the right hanging piece 181 is connected with the fixed seat 9 through a bolt embedded in the vertical bar-shaped hole 182; the other end of the first spring 17 is connected with the fixed seat 9 through a left hanging piece 171, the left hanging piece 171 is provided with a plurality of through holes 172, and the other end of the first spring 17 is connected with one through hole 172;
the fixing base 9 further includes a base body 903 and a fixing block 904, the base body 903 is connected to the base 1, the fixing block 904 is mounted on the base body 903, and the fixing block 904 is connected to the base body 903 by a bolt.
When adopting above-mentioned chip test equipment for optical communication, through adjusting X to actuating mechanism, Y to actuating mechanism and Z axle slide mechanism, drive the suction nozzle pole and remove to await measuring chip top in level, vertical direction, the suction nozzle pole adsorbs the chip through vacuum adsorption's mode and picks up, and the chip that waits to pick up generally can exist the position deviation on the big or small angle, need adjust the correction to the angle of chip through the rotation of suction nozzle pole to satisfy the high requirement to the precision in the chip test process, specifically:
the gear on the output shaft of the first motor rotates forward or reversely to drive the arc-shaped rack to rotate forward or reversely correspondingly, so that the angle adjusting range is enlarged to +/-45 degrees, and the angle adjusting requirements of various situations are met;
further, the arc-shaped rack also carries the corresponding rotation of the connecting rod and the clamping strip, and as the circle center of the arc-shaped rack is overlapped with the axle center of the suction nozzle rod, the suction nozzle rod is positioned in the clamping channel of at least 2 pairs of bearings, so that the suction nozzle rod rotates around the axle center of the suction nozzle rod under the positioning of the left bearing and the right bearing, the lateral pressure of the left bearing and the right bearing is avoided, a great amount of positioning offset generated after the repeated suction of a chip works is avoided, and the stability of precision is still maintained after long-time high-frequency use;
further, two ends of the first spring are respectively connected with the clamping strip and the left side surface of the upper part of the fixing seat, one end of the first spring, which is connected with the clamping strip, is higher than the other end of the first spring, one end of the first spring is close to the arc-shaped rack and is positioned below the arc-shaped rack, the other end of the first spring is connected to one end of the clamping strip, which is far away from the arc-shaped rack, and the tension part of the first spring is converted into torsion, so that the teeth of the gear on the output shaft of the first motor, whether the gear rotates positively or reversely, are in gapless contact with the teeth of the gear, the gap between the teeth is eliminated, and therefore, the pulse number for the first motor can be accurately calculated according to the angle to be adjusted, the rotation angle of the actual gear and the suction nozzle rod is consistent with the rotation angle expected by the pulse, and the angle calculation and adjustment precision is improved;
further, the two ends of the second spring are respectively connected with the clamping strip and the lower part of the fixing seat and are positioned on the right side of the first spring, the first spring is obliquely arranged with the horizontal direction, the second spring is vertically arranged, the tension of the first spring is larger than that of the second spring, part of the tension of the first spring is converted into downward pressure of the clamping strip to act together with the second spring, the lateral pressure of the left bearing and the right bearing is reduced, meanwhile, the pressure contacted with the chip is gradually increased in the process that the suction nozzle rod approaches the chip, so that the suction nozzle of the suction nozzle rod can be well contacted with the surface of the chip, the one-time adsorption success rate is favorably improved, and the air flow around the chip can quickly flow to the suction nozzle of the suction nozzle rod due to the fact that the suction nozzle rod is internally adsorbed with negative pressure, the pressure applied by the application avoids the situation that the position and the angle of the chip are secondarily offset under the action of the air flow, so that the calculated angle and the actual angle are different, the rotation precision is influenced, and the mounting precision is influenced, and the damage to the chip is avoided;
in sum, the material conveying mechanism can realize large-scale and forward and backward bidirectional dynamic adjustment of the angle of the chip, improve the accuracy of calculating and adjusting the angle and the stability of keeping the accuracy after long-time high-frequency use, gradually increase the contact pressure of the suction nozzle rod and the chip, effectively avoid chip loss and secondary position deviation caused by chip adsorption failure, greatly improve the one-time adsorption success rate of the chip and further improve the accuracy of angle adjustment, and avoid damage to the chip, thereby improving the accuracy and stability of chip test;
in addition, the left side and the right side on the front end face of the fixing seat are respectively provided with a left inclined surface area and a right inclined surface area, at least 2 pairs of bearings are arranged on the front end face of the fixing seat, the left bearings in each pair of bearings are arranged on the left inclined surface area of the fixing seat at intervals along the vertical direction, and the right bearings in each pair of bearings are arranged on the right inclined surface area of the fixing seat at intervals along the vertical direction, so that a V-shaped channel for loading the suction nozzle rod is formed between the left bearings and the right bearings in each pair of bearings, stable limit is provided for the suction nozzle rod, friction force in the long-term up-down micro motion process of the suction nozzle rod can be greatly reduced, and the accuracy of angle adjustment and stability of precision after long-time high-frequency use are further improved.
The chip testing equipment for optical communication can be expanded to other industries for testing semiconductor chips, is not limited to the optical communication industry, can be synchronously expanded to be used in all industries needing chip testing machines, and has wide application range.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.
Claims (10)
1. A chip testing apparatus for optical communication, comprising: test board (100), install in test mechanism (200) of test board (100) upper surface and be located test mechanism (200) both sides respectively and be used for loading material loading seat (301), unloading seat (302) of awaiting measuring chip (400), its characterized in that: the test machine table (100) is provided with an X-direction driving mechanism (500) which spans over the feeding seat (301) and the discharging seat (302), the X-direction driving mechanism (500) is movably provided with at least one material conveying mechanism (600) which can move along the X direction, and the feeding seat (301) and the discharging seat (302) are respectively arranged on a Y-direction driving mechanism (300) which is perpendicular to the X-direction driving mechanism (500) and can move along the Y direction;
the material handling mechanism (600) further comprises: the device comprises a base (1), a first motor (2), an adapter plate (4), a second motor (5) and a suction nozzle rod (6), wherein the first motor (2), the adapter plate (4), the second motor (5) and the suction nozzle rod (6) are vertically arranged on the base (1), the second motor (5) is fixed on a base plate (7) connected with an X-direction driving mechanism (500), the base plate (7) is connected with the adapter plate (4) through a Z-axis sliding mechanism (8), and an output shaft of the second motor (5) is connected with the Z-axis sliding mechanism (8);
a fixed seat (9) positioned below the first motor (2) is arranged on the base (1), a left inclined surface area (901) and a right inclined surface area (902) are respectively arranged on the left side and the right side on the front end surface of the fixed seat (9), at least 2 pairs of bearings are arranged on the front end surface of the fixed seat (9), left bearings (11) in each pair of bearings are arranged on the left inclined surface area (901) of the fixed seat (9) at intervals along the vertical direction, right bearings (12) in each pair of bearings are arranged on the right inclined surface area (902) of the fixed seat (9) at intervals along the vertical direction, a V-shaped channel (10) is formed between the left bearings (11) and the right bearings (12) in each pair of bearings, and a suction nozzle rod (6) is positioned in the V-shaped channel (10) of at least 2 pairs of bearings;
a clamping strip (13) and an arc-shaped rack (14) are arranged above the fixed seat (9), the front end of the clamping strip (13) is in clamping connection with the upper end of the suction nozzle rod (6), the rear end of the clamping strip (13) is connected with the arc-shaped rack (14) through a connecting rod (15), the arc-shaped rack (14) is in meshed connection with a gear (16) on the output shaft of the first motor (2), and the center of the arc-shaped rack (14) is overlapped with the axis of the suction nozzle rod (6);
the clamping strip (13) is connected respectively at a first spring (17) both ends, the left side of fixing base (9) upper portion each, the right side of clamping strip (13) is connected respectively at a second spring (18) both ends, the one end that first spring (17) is connected with clamping strip (13) is higher than its other end, and first spring (17) one end is close to arc rack (14) and is located the below of arc rack (14), and the other end is connected to clamping strip (13) and keeps away from the one end of arc rack (14), and this first spring (17) are the slope setting with the horizontal direction, second spring (18) are vertical setting, the pulling force of first spring (17) is greater than the pulling force of second spring (18).
2. The optical communication chip test apparatus according to claim 1, wherein: the connecting rod (15) is connected to the middle of the arc-shaped rack (14).
3. The optical communication chip test apparatus according to claim 1, wherein: the lower surface of the clamping strip (13) is provided with a protruding part (131) which is contacted with the upper surface of the fixed seat (9).
4. The optical communication chip test apparatus according to claim 1, wherein: the front end of the clamping strip (13) is provided with a clamping bolt (19), and one end of each of the first spring (17) and the second spring (18) is respectively connected with the left end and the right end of the clamping bolt (19).
5. The optical communication chip test apparatus according to claim 1, wherein: and 2 material conveying mechanisms (600) corresponding to the material loading seat (301) and the material unloading seat (302) are arranged on the X-direction driving mechanism (500).
6. The optical communication chip test apparatus according to claim 1, wherein: the X-direction driving mechanism (500) and the Y-direction driving mechanism (300) further comprise a motor, a screw rod with one end connected with an output shaft of the motor and nuts sleeved on the screw rod, and the material conveying mechanism (600), the material loading seat (301) and the material unloading seat (302) are respectively connected with the corresponding nuts.
7. The optical communication chip test apparatus according to claim 6, wherein: the X-direction driving mechanism (500) further comprises sliding rails and sliding blocks, wherein the sliding rails are arranged on two sides of the screw rod in parallel, the sliding blocks are slidably mounted on the sliding rails, and the sliding blocks are connected with the material conveying mechanism (600) mounted on the X-direction driving mechanism (500).
8. The optical communication chip test apparatus according to claim 1, wherein: the X-direction driving mechanism (500) comprises a cross rod (501) positioned above the feeding seat (301) and the discharging seat (302) and upright posts (502) connected to two ends of the cross rod (501), and the lower ends of the upright posts (502) with 2 upper ends connected with the cross rod (501) are fixedly arranged on the test machine table (100).
9. The optical communication chip test apparatus according to claim 1, wherein: the lower end of the second spring (18) is connected with the fixed seat (9) through a right hanging piece (181), a vertical bar-shaped hole (182) is formed in the right hanging piece (181), and the right hanging piece (181) is connected with the fixed seat (9) through a bolt embedded in the vertical bar-shaped hole (182).
10. The optical communication chip test apparatus according to claim 1, wherein: the other end of the first spring (17) is connected with the fixed seat (9) through a left hanging piece (171), a plurality of through holes (172) are formed in the left hanging piece (171), and the other end of the first spring (17) is connected with one through hole (172).
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CN202310846110.9A CN116859215A (en) | 2021-11-09 | 2021-11-09 | Chip test equipment for optical communication |
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CN114932089A (en) * | 2022-04-27 | 2022-08-23 | 泉州兰姆达仪器设备有限公司 | Feeding mechanism of laser chip testing and sorting machine and working method thereof |
CN115144734B (en) * | 2022-07-29 | 2023-06-06 | 河北圣昊光电科技有限公司 | Swing adjusting device and chip testing machine with same |
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