CN115144734B

CN115144734B - Swing adjusting device and chip testing machine with same

Info

Publication number: CN115144734B
Application number: CN202210914527.XA
Authority: CN
Inventors: 王泽明; 申卫; 王梓伊; 徐晓钢; 孙家琛
Original assignee: Hebei Shenghao Photoelectric Technology Co ltd
Current assignee: Hebei Shenghao Photoelectric Technology Co ltd
Priority date: 2022-07-29
Filing date: 2022-07-29
Publication date: 2023-06-06
Anticipated expiration: 2042-07-29
Also published as: CN115144734A

Abstract

The invention relates to the technical field of wafer production, in particular to a swing adjusting device and a chip testing machine with the same. A swing adjustment device suitable for a chip tester or test platform, comprising: a receiving block provided with a receiving surface and a receiver with an axis perpendicular to the receiving surface; swing structure, including first regulation seat and second regulation seat, first regulation seat is equipped with arc guide rail or guide slot, second regulation seat is equipped with guide slot or arc guide rail, first regulation seat and second regulation seat pass through arc guide rail and guide slot sliding connection, be equipped with the connecting block between first regulation seat and the second regulation seat, first regulation seat is equipped with first piece of screwing, first piece and the connecting block butt of screwing are equipped with the receiving piece on the second regulation seat, the relative first regulation seat swing of drive second regulation seat, screw first piece of screwing, make receiving surface and chip positive light end cross section parallel. The invention solves the problem that the receiving surface of the receiving block, on which the optical fiber (or PD) is arranged, cannot be parallel to the cross section of the positive optical end due to errors of the receiving block.

Description

Swing adjusting device and chip testing machine with same

Technical Field

The invention relates to the technical field of wafer production, in particular to a swing adjusting device and a chip testing machine with the same.

Background

In the chip production process, a Wafer (Chinese name is a Wafer) is split into one Bar by a splitting machine through a splitting technology, or the single Bar is split into one chip (Chinese name is a chip). Specifically, the Bar may be regarded as a single Bar formed by a plurality of chips side by side, and is called a Bar.

Before being produced into a single chip, a manufacturer can use a chip tester to test the performance of the single chip arranged on the Bar. In the test process, after the probe arranged on the test platform of the chip tester is electrified, the electrified end arranged on the chip is electrified, a luminous strip can appear in the chip, the two ends of the luminous strip emit light signals, and then the optical fiber (for receiving the light signals) or the PD (for converting the received light signals into electric signals) receives the light signals, and whether the standard is met or not is judged according to the light signals.

In recent years, with the advent of high-speed/high-power chips, special chips with inclined angle optical waveguides (such as a turning optical waveguide chip with an SOA amplifying function) are appeared, the angle of the optical signal emitted from two ends of the light-emitting strip is changed (the backlight end is still perpendicular to the optical waveguide, and the positive optical end is designed to have a fixed angle optical waveguide), which requires that the angle of the optical fiber or the PD on the chip tester should be changed along with the change of the angle of the optical signal. In the production process of the conventional chip tester, due to errors in machining precision and installation, different included angles exist between a receiving block for installing optical fibers or PDs and a test platform respectively and a horizontal plane, namely, the receiving surface for installing the optical fibers (or PDs) on the receiving block cannot be arranged in parallel with the cross section of a positive optical end, so that the optical fibers or PDs cannot effectively receive optical signals, and errors exist in detection results.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to overcome the defect that the receiving surface of the receiving block on which the optical fiber (or PD) is arranged and the cross section of the positive optical end cannot be arranged in parallel due to processing and installation errors in the receiving block in the prior art, so that the optical fiber or PD cannot effectively receive an optical signal, and therefore, the swing adjusting device and the chip testing machine with the swing adjusting device are provided.

In order to solve the above-mentioned problems, the present invention provides a swing adjusting device including:

a receiving block provided with a receiving surface and a receiver with an axis perpendicular to the receiving surface;

the swing structure comprises a first adjusting seat and a second adjusting seat, wherein the first adjusting seat is provided with an arc guide rail or a guide groove, the second adjusting seat is provided with a guide groove or an arc guide rail, the first adjusting seat and the second adjusting seat are connected in a sliding mode through the arc guide rail and the guide groove, a connecting block is arranged between the first adjusting seat and the second adjusting seat, a first screwing piece is arranged on the first adjusting seat and is in butt joint with the connecting block, the second adjusting seat is provided with a receiving block, the second adjusting seat is driven to swing to a preset position relative to the first adjusting seat, and the first screwing piece is screwed to enable the first adjusting seat and the second adjusting seat to be fixed, so that the receiving surface is parallel to the cross section of the positive light end of the chip to be detected.

Optionally, the first adjusting seat is including wearing to establish adjust the pole in arc guide rail or the guide slot, it is equipped with twist grip and screw rod end to adjust the pole, the second is adjusted the seat and is provided with the regulation end on the terminal surface towards first adjusting seat, the screw rod end with the meshing of regulation end sets up, rotates the twist grip, the regulation end is relative the screw rod end motion.

Optionally, the connection block is arc-shaped.

Optionally, the receiver is a PD receiver or an optical fiber receiver, and the optical fiber receiver is connected with a spectrometer, and the PD receiver is connected with a signal amplification acquisition board.

Optionally, the device further comprises a rotating structure, wherein the rotating structure is sequentially provided with a rotating seat, a first rotating disc and a second rotating disc from bottom to top along the height direction, the first rotating disc and the second rotating disc are rotationally connected, the first rotating disc is rotationally connected with the rotating seat, the rotating seat is fixedly connected with the second adjusting seat, and the receiving block is arranged on the second rotating disc.

Optionally, a bearing is arranged between the first rotating disc and the second rotating disc, a second screwing piece is rotationally arranged at the fixed end of the first rotating disc, and the second screwing piece is abutted to the second rotating disc.

Optionally, be equipped with the spout in the rotation seat, expose in the spout and have three at least balls, first rolling disc and ball point contact, the fine setting end of rotation seat is equipped with the angle regulation spare, be equipped with the angle regulation pole on the first rolling disc, the angle regulation spare with the butt of angle regulation pole.

Optionally, still include height adjusting seat, first horizontal adjusting plate, the second horizontal adjusting plate that sets gradually from bottom to top along the direction of height, the height adjusting seat is located on the second rolling disc, and is equipped with the altitude mixture control spare, be equipped with first horizontal adjusting piece on the first horizontal adjusting plate, be equipped with the second horizontal adjusting piece on the second horizontal adjusting plate, the axis of first horizontal adjusting piece sets up perpendicularly with the axis of second horizontal adjusting piece, the receiving piece is fixed to be located on the second horizontal adjusting plate.

The chip testing machine comprises the swing adjusting device and further comprises a bottom plate, wherein the swing adjusting device is arranged on the bottom plate.

Optionally, the device further comprises a test platform, wherein the test platform is provided with Bar strips to be detected and probe structures which are arranged corresponding to the Bar strips to be detected.

The technical scheme of the invention has the following advantages:

1. the swing adjusting device provided by the invention comprises: a receiving block provided with a receiving surface and a receiver with an axis perpendicular to the receiving surface; swing structure is equipped with first regulation seat and second regulation seat, first regulation seat is equipped with arc guide rail or guide slot, the second is adjusted the seat and is equipped with guide slot or arc guide rail, first regulation seat and second are adjusted the seat and are passed through arc guide rail and guide slot sliding connection, be equipped with the connecting block between first regulation seat and the second, be equipped with on the first regulation seat and screw a piece, first screw a piece and connecting block butt setting, be equipped with the receiver block on the second regulation seat, drive the second and adjust the seat relative first regulation seat swing to the preset position, screw first screw a piece and make first regulation seat and second regulation seat fixed, in order to make the receiver surface parallel with the cross section of waiting to detect the positive light end of chip. The first adjusting seat and the second adjusting seat are in sliding connection through the arc-shaped guide rail and the guide groove, so that relative movement between the first adjusting seat and the second adjusting seat is achieved, the second adjusting seat is driven to swing relative to the first adjusting seat to drive the receiving surface of the receiving block to swing, the receiving surface of the receiving block is parallel to the cross section of the positive light end of the chip to be detected through swing, the receiver with the axis perpendicular to the receiving surface is convenient to effectively receive the light signal sent from the positive light end, errors caused by machining and installation are reduced, adverse effects of other environmental factors such as temperature can be eliminated, and the accuracy of a detection result is improved. After the positions of the first adjusting seat and the second adjusting seat are adjusted, the screwing piece is rotated towards the direction of the first adjusting seat, and the screwing piece enables the connecting block to be tightly abutted on the first adjusting seat, so that the first adjusting seat and the second adjusting seat are fixed, and relative sliding between the first adjusting seat and the second adjusting seat is avoided.

2. The invention provides a swing adjusting device, a first adjusting seat comprises an adjusting rod penetrating through an arc-shaped guide rail or a guide groove, the adjusting rod is provided with a rotating handle and a screw rod end, the guide groove or the arc-shaped guide rail of a second adjusting seat is provided with an adjusting end towards the end face of the first adjusting seat, the screw rod end is meshed with the adjusting end, and the rotating adjusting end moves relative to the screw rod end. The screw rod end of the adjusting rod is meshed with the adjusting end of the second adjusting seat to form a worm and gear structure, and relative movement between the first adjusting seat and the second adjusting seat is achieved through meshing.

3. According to the swing adjusting device provided by the invention, the connecting blocks are arranged in an arc shape so as to be more suitable for the shape of the first adjusting seat.

4. According to the swing adjusting device provided by the invention, the receiver is a PD receiver or an optical fiber receiver, the optical fiber receiver is connected with a spectrometer, the optical fiber receiver sends the received spectrum curve data into the spectrometer for spectrum signal analysis, and whether the quality requirement of a product is met or not is judged according to the result of spectrum test data, so that the product grade classification is carried out; the PD receiver is connected with a signal amplification acquisition board, converts an optical signal into an electric signal, transmits the electric signal to the signal amplification acquisition board for data acquisition, calculates and processes electric characteristic data, and classifies electric characteristic grades according to judgment conditions.

5. The swing adjusting device provided by the invention further comprises a rotating structure, wherein the rotating structure is sequentially provided with a rotating seat from bottom to top along the height direction, the first rotating disc and the second rotating disc are in rotating connection, the first rotating disc is in rotating connection with the rotating seat, the rotating seat is fixedly connected with the second adjusting seat, and the receiving block is provided with the second rotating disc. When the specification, the material and the like of the chip to be detected change, the angle of the positive light end of the chip to be detected changes, and the angle of the receiving block needs to be adjusted through the rotating structure, so that the angle of the receiving surface is consistent with the angle of the positive light end.

6. According to the swing adjusting device provided by the invention, the bearing is arranged between the first rotating disc and the second rotating disc, the second screwing piece is rotatably arranged at the fixed end of the first rotating disc, and the second screwing piece is abutted with the second rotating disc so as to fix the second rotating disc through rotating the screwing piece.

7. According to the swing adjusting device provided by the invention, the sliding groove is formed in the rotating seat, at least three balls are exposed in the sliding groove, the first rotating disc is in point contact with the balls, the fine adjustment end of the rotating seat is provided with the angle adjusting piece, the first rotating rod is provided with the angle adjusting rod, and the angle adjusting piece is in butt joint with the angle adjusting rod. The first rotating disc is in point contact with the balls to realize relative rotation between the first rotating disc and the rotating seat, and the rotating angle adjusting piece drives the angle adjusting rod to rotate to drive the first rotating disc to rotate relative to the rotating seat.

8. The swing adjusting device provided by the invention further comprises a height adjusting seat, a first horizontal adjusting plate and a second horizontal adjusting plate which are sequentially arranged from bottom to top along the height direction, wherein the height adjusting seat is arranged on the second rotating disc and is provided with a height adjusting piece, and the height adjusting piece is used for adjusting the height of the height adjusting seat. The first horizontal adjusting plate is provided with a first horizontal adjusting piece, the second horizontal adjusting plate is provided with a second horizontal adjusting piece, the axis of the first horizontal adjusting piece is perpendicular to the axis of the second horizontal adjusting piece, so that adjustment of different directions of a horizontal plane is achieved, and the receiving block is fixedly arranged on the second horizontal adjusting plate.

9. The chip testing machine provided by the invention has the advantages of any one of the above because the swing adjusting device is adopted. Still include bottom plate and test platform, locate swing adjusting device on the bottom plate, placed on the test platform and wait to detect the Bar to and with wait to detect the probe structure that the Bar corresponds to set up, after probe structure circular telegram with wait to detect the Bar contact, wait to detect the chip on the Bar and can form the luminous strip, luminous strip positive light end and backlight send the optical signal respectively, swing adjusting device's that sets up receiver on the bottom plate receives the optical signal that sends from positive light end.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of a swing adjusting device provided in an embodiment of the present invention;

fig. 2 is a schematic structural view of a swing structure provided in an embodiment of the present invention;

FIG. 3 is a schematic structural view of a first adjusting seat according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of a second adjusting seat according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a swing structure provided in an embodiment of the present invention;

fig. 6 is a schematic structural view of a rotating structure provided in an embodiment of the present invention;

fig. 7 is a schematic cross-sectional view of a first rotary disk and a second rotary disk of a swing structure provided in an embodiment of the present invention;

fig. 8 is a schematic structural view of a height adjustment base, a first horizontal adjustment plate, and a second horizontal adjustment plate provided in an embodiment of the present invention;

fig. 9 is a schematic structural view of a connection between a rotating block and a PD receiver provided in an embodiment of the present invention;

FIG. 10 is a schematic structural diagram of a test platform according to an embodiment of the present invention;

fig. 11 is a schematic structural diagram of a Bar to be detected according to an embodiment of the present invention.

Reference numerals illustrate: 1. an optical fiber receiver; 2. a receiving surface; 3. a PD receiver; 4. a receiving block; 5. a second horizontal adjustment plate; 6. a first horizontal adjustment plate; 7. a swinging structure; 8. a rotating structure; 9. a height adjusting seat; 10. rotating the handle; 11. a first adjustment seat; 12. a second adjusting seat; 13. a screw end; 14. an arc-shaped guide rail; 15. a guide groove; 16. an adjustment end; 17. a connecting block; 18. a first tightening member; 19. a rotating seat; 20. a first rotating disc; 21. a second rotating disc; 22. a second tightening member; 23. an angle adjusting lever; 24. a fine tuning end; 25. an angle adjusting member; 26. a third tightening member; 27. a bearing; 28. a height adjusting member; 29. a support base; 30. a movable seat; 31. a fastener; 32. a second horizontal adjustment member; 33. a second fixing plate; 34. a second movable plate; 35. a first movable plate; 36. a first horizontal adjustment member; 37. an extension end; 38. a first fixing plate; 39. a fixing hole; 40. placing a plate; 41. a probe structure; 42. a bottom plate; 43. a backlight end; 44. a power-on terminal; 45. a chip to be detected; 46. a light emitting strip; 47. bar to be detected; 48. and a positive light end.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

One embodiment of the swing adjusting apparatus as shown in fig. 1 to 11 includes: the swinging structure 7 and the rotating structure 8 are sequentially arranged from bottom to top along the height direction, two height adjusting seats 9 are arranged on the rotating structure 8 side by side, and each height adjusting seat 9 is provided with a first horizontal adjusting plate 6, a second horizontal adjusting plate 5 and a receiving block 4 from bottom to top along the height direction. Wherein the receiving face 2 of one receiving block 4 is provided with a PD receiver 3 and the receiving face 2 of the other receiving block 4 is provided with an optical fiber receiver 1.

As shown in fig. 1, 2, 3, 4 and 5, the swinging structure 7 comprises a first adjusting seat 11 and a second adjusting seat 12, the first adjusting seat 11 is provided with an arc-shaped guide rail 14 and an adjusting rod penetrating through the arc-shaped guide rail 14, wherein the adjusting rod is provided with a rotating handle 10 and a screw rod end 13, and the screw rod end 13 is exposed out of the surface of the arc-shaped guide rail 14; the second adjusting seat 12 is provided with a guide groove 15, an adjusting end 16 is arranged on the end face facing the first adjusting seat 11, the adjusting end 16 is of an arc-shaped structure and is provided with teeth, the first adjusting seat 11 and the second adjusting seat 12 are in sliding connection with the guide groove 15 through an arc-shaped guide rail 14, and a worm gear structure is formed by meshing the screw end 13 with the adjusting end 16. In order to facilitate the fixation of the adjusted first adjusting seat 11 and second adjusting seat 12, as shown in fig. 4 and 5, an arc-shaped connecting block 17 is further disposed between the first adjusting seat 11 and the second adjusting seat 12, a first tightening member 18 is further disposed on the first adjusting seat 11, the axial direction of the first tightening member 18 is perpendicular to the length direction of the connecting block 17, the first tightening member 18 is in abutting connection with the connecting block 17, and the first tightening member 18 is rotated towards the direction of the connecting block 17 to fix the first adjusting seat 11 and the second adjusting seat 12 through the connecting block 17. Specifically, the first tightening member 18 is a bolt.

As shown in fig. 1, 6 and 7, the rotating structure 8 is sequentially provided with a rotating seat 19, a first rotating disc 20 and a second rotating disc 21 from bottom to top along the height direction, the rotating seat 19 is fixedly connected with the second adjusting seat 12, the first rotating disc 20 and the second rotating disc 21 are rotatably connected, the first rotating disc 20 is rotatably connected with the rotating seat 19, the rotating seat 19 is fixedly connected with the second adjusting seat 12, and the second rotating disc 21 is fixedly connected with the height adjusting seat 9. In order to facilitate the rotation of the first rotating disk 20 and the second rotating disk 21, as shown in fig. 7, a bearing 27 is provided between the first rotating disk 20 and the second rotating disk 21, and the relative rotation between the first rotating disk 20 and the second rotating disk 21 is realized by the rotation of the bearing 27. In order to fix the second rotating disc 21, a second tightening member 22 is rotatably provided at the fixed end of the first rotating disc 20, the second tightening member 22 abuts against the second rotating disc 21, and the second tightening member 22 is rotated to fix the second rotating disc 21. Specifically, the second tightening member 22 is a bolt.

In order to facilitate the rotation of the first rotating disc 20 and the rotating seat 19, an annular chute is arranged in the rotating seat 19, three balls are exposed in the chute, and the first rotating disc 20 is in point contact with the balls so as to realize relative rotation with the rotating seat 19 through the balls. In order to realize micro-rotation between the first rotating disc 20 and the rotating seat 19, as shown in fig. 6, the rotating seat 19 is fixedly provided with a fine adjustment end 24, the fine adjustment end 24 is provided with an angle adjusting member 25, the first rotating disc 20 is provided with an angle adjusting rod 23, the angle adjusting member 25 is abutted to the angle adjusting rod 23, and the angle adjusting member 25 is rotated to enable the angle adjusting rod 23 to drive the first rotating disc 20 to rotate at a small angle, so that the small-angle relative rotation between the first rotating disc 20 and the rotating seat 19 is realized. Specifically, the angle adjusting member 25 is a micro head. In order to fix the first rotating disc 20 and the rotating seat 19, a third screwing piece 26 is arranged on the first rotating disc 20, the third screwing piece 26 passes through the first rotating disc 20 to be abutted with the rotating seat, and the third screwing piece 26 is rotated to fix the first rotating disc 20 and the rotating seat. Specifically, the third tightening member 26 is a bolt.

As shown in fig. 8, the height-adjusting seat 9 includes a movable seat 30, a supporting seat 29 and a height-adjusting member 28, the supporting seat 29 is fixedly connected with the second rotating disk 21, wherein the height-adjusting member 28 is disposed on the supporting seat 29, the height-adjusting member 28 is abutted on the inclined surface of the movable seat 30, and the height of the movable seat 30 is adjusted by rotating the position of the height-adjusting member 28, which extends into or extends out of the inclined surface of the movable seat 30, to change the height of the receiving block 4. Specifically, the height adjustment member 28 is a differential head.

As shown in fig. 8, the first horizontal adjusting plate 6 includes a first fixed plate 38 and a first movable plate 35 that are slidably connected, where the first fixed plate 38 is fixedly connected to the movable seat 30, an L-shaped protruding end 37 is provided on the first fixed plate 38, a first horizontal adjusting member 36 is provided on the protruding end 37, the first horizontal adjusting member 36 abuts against a side surface of the first movable plate 35, and an adjusting rod that rotates the first horizontal adjusting member 36 pushes the first movable plate 35 to move relative to the first fixed plate 38. Specifically, the first leveling member 36 is a micro-head. In order to fix the adjusted first movable plate 35 and the first fixed plate 38, the first horizontal adjusting plate 6 is further provided with a fastening member 31, and the fastening member 31 is rotated to fix the first movable plate 35.

As shown in fig. 8, the second horizontal adjusting plate 5 includes a second fixed plate 33 and a second movable plate 34 that are slidably connected, where the second fixed plate 33 is fixedly connected to the first movable plate 35, an L-shaped protruding end 37 is provided on the second fixed plate 33, a second horizontal adjusting member 32 is provided on the protruding end 37, an axis of the second horizontal adjusting member 32 is perpendicular to an axis of the first horizontal adjusting member 36, the second horizontal adjusting member 32 abuts against a side surface of the second movable plate 34, and an adjusting rod that rotates the second horizontal adjusting member 32 pushes the second movable plate 34 to move relative to the second fixed plate 33. Specifically, the second leveling member 32 is a micro-head. In order to fix the adjusted second movable plate 34 and the second fixed plate 33, the second horizontal adjusting plate 5 is further provided with a fastening member 31, and the fastening member 31 is rotated to fix the second movable plate 34.

As shown in fig. 9, the receiving block 4 is provided with four fixing holes 39, and bolts are penetrated in the four fixing holes 39 to be fixedly connected with the second movable plate 34 of the second horizontal adjustment plate 5. In order to facilitate the fixation of the optical fiber receiver 1 or the PD receiver 3, the section of the receiving block 4 is in an L-shaped structure, and the optical fiber receiver 1 or the PD receiver 3 with the axis perpendicular to the receiving surface 2 is arranged on the receiving block 4 in a clamping way. In order to facilitate analysis of whether the optical signal meets the requirements, the PD receiver 3 is connected with a signal amplification acquisition board, and the optical fiber receiver 1 is connected with a spectrometer for analyzing and judging the acquired electrical characteristic curve and spectrum curve.

The chip testing machine, as shown in fig. 10 and 11, comprises the swing adjusting device, and further comprises a bottom plate 42, wherein the bottom plate 42 is provided with the swing adjusting device, a testing platform corresponding to the swing adjusting device, and a power mechanism for driving the testing platform to move, the testing platform is provided with a placing plate 40, the placing plate 40 is provided with a Bar strip 47 to be detected and a probe structure 41 arranged right above the Bar strip 47 to be detected, specifically, the Bar strip 47 to be detected is provided with two chips arranged at intervals, each chip is provided with three power-on ends 44, and each power-on end 44 corresponds to one probe of the probe structure 41.

In the specific implementation process, due to different specifications (such as thickness, height, size, etc.) and materials of the chip 45 to be detected, the rotation angle of the second rotating disc 21 is set according to the inclined optical waveguide angle of the front optical end 48, so that the axis of the receiver perpendicular to the receiving surface 2 of the receiving block 4 is parallel to the axis of the front optical end 48, that is, the axis of the PD receiver 3 or the optical fiber receiver 1 is perpendicular to the cross section of the front optical end 48 of the chip 45 to be detected (the PD or the optical fiber probe is consistent with the optical waveguide angle of the chip 45 to be detected). The second adjusting seat 12 is then driven to pivot relative to the first adjusting seat 11, so that the receiving surface 2 is parallel to the cross section of the front light end 48 of the chip 45 to be inspected. When the axis of the positive end 48 of the chip 45 to be detected is found to be offset from the central axis of the receiver (the two axes are parallel but not coincident), the on-site personnel can make fine adjustments to the height by the height adjusting member 28, and the first and

second leveling members

36, 32 make fine adjustments in two directions vertically arranged in the horizontal plane, and the central axis of the PD receiver 3 coincides with the central axis of the positive end 48 of the light-emitting strip 46. After all the positions are adjusted, the probe descends and is electrified to enable the light-emitting strip 46 of the same chip to emit light, the positive light end 48 and the backlight end 43 of the light-emitting strip 46 respectively emit light signals, the spectrum coupling peak value is the highest and the PD receiver 3 receives the light signals transmitted by the positive light end 48 with the highest efficiency. When the PD receiver 3 receives the optical signal, the test platform moves to the optical signal receiving area of the optical fiber receiver 1, performs fine adjustment in the height and horizontal directions, and receives the optical signal with maximum efficiency.

As an alternative embodiment, the first adjusting seat 11 may also be provided with a guide slot 15 and the second adjusting seat 12 may also be provided with an arcuate guide rail 14.

Alternatively, the adjustment end 16 of the second adjustment seat 12 may also be a nut, i.e. the screw of the adjustment rod of the first adjustment seat 11 penetrates into the nut to effect a relative movement between the first adjustment seat 11 and the second adjustment seat 12.

Alternatively, the number of balls may be 4, 5 or even more.

Alternatively, the height adjustment member 28, the first level adjustment member 36, the second level adjustment member 32 may also be bolts or the like.

Alternatively, the Bar to be detected 47 may also be provided with 3, 4 or even more spaced chips 45 to be detected.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.

Claims

1. A swing adjusting device, suitable for use with a chip tester or test platform, comprising:

a receiving block (4), wherein the receiving block (4) is provided with a receiving surface (2) and a receiver with an axis perpendicular to the receiving surface (2);

the swinging structure (7), the swinging structure (7) comprises a first adjusting seat (11) and a second adjusting seat (12), the first adjusting seat (11) is provided with an arc-shaped guide rail (14) or a guide groove (15), the second adjusting seat (12) is provided with a guide groove (15) or an arc-shaped guide rail (14), the first adjusting seat (11) and the second adjusting seat (12) are in sliding connection through the arc-shaped guide rail (14) and the guide groove (15), a connecting block (17) is arranged between the first adjusting seat (11) and the second adjusting seat (12), a first screwing piece (18) is arranged on the first adjusting seat (11), the first screwing piece (18) is arranged in butt joint with the connecting block (17), the second adjusting seat (12) is provided with the receiving block (4), the second adjusting seat (12) is driven to swing to a preset position relative to the first adjusting seat (11), and the first piece (18) enables the first adjusting seat (11) and the second adjusting seat (12) to be fixed, so that the receiving surface (2) is parallel to the positive cross section (48) of the chip to be detected;

the rotary structure (8), the rotary structure (8) is provided with a rotary seat (19), a first rotary disc (20) and a second rotary disc (21) in turn from bottom to top along the height direction, the first rotary disc (20) and the second rotary disc (21) are rotationally connected, the first rotary disc (20) is rotationally connected with the rotary seat (19), the rotary seat (19) is fixedly connected with the second regulating seat (12), and the receiving block (4) is arranged on the second rotary disc (21);

the novel rotary table is characterized in that a sliding groove is formed in the rotary table (19), at least three balls are exposed in the sliding groove, the first rotary table (20) is in point contact with the balls, an angle adjusting piece (25) is arranged at a fine adjusting end (24) of the rotary table (19), an angle adjusting rod (23) is arranged on the first rotary table (20), and the angle adjusting piece (25) is in butt joint with the angle adjusting rod (23).

2. Swing adjusting device according to claim 1, characterized in that the first adjusting seat (11) comprises an adjusting rod which is arranged in the arc-shaped guide rail (14) or the guide groove (15) in a penetrating way, the adjusting rod is provided with a rotating handle (10) and a screw rod end (13), the end face of the second adjusting seat (12) facing the first adjusting seat (11) is provided with an adjusting end (16), the screw rod end (13) is meshed with the adjusting end (16), the rotating handle (10) is rotated, and the adjusting end (16) moves relative to the screw rod end (13).

3. Swing adjustment device according to claim 1, characterized in that the connection block (17) is arranged in an arc.

4. Swing adjusting device according to claim 1, characterized in that the receiver is a PD receiver (3) or an optical fiber receiver (1), the optical fiber receiver (1) is connected with a spectrometer, and the PD receiver (3) is connected with a signal amplifying acquisition board.

5. Swing adjusting device according to claim 1, characterized in that a bearing (27) is arranged between the first rotating disc (20) and the second rotating disc (21), a second tightening member (22) is rotatably arranged on the fixed end of the first rotating disc (20), and the second tightening member (22) is abutted to the second rotating disc (21).

6. The swing adjusting device according to claim 5, further comprising a height adjusting seat (9), a first horizontal adjusting plate (6) and a second horizontal adjusting plate (5) which are sequentially arranged from bottom to top along the height direction, wherein the height adjusting seat (9) is arranged on the second rotating disc (21) and is provided with a height adjusting piece (28), the first horizontal adjusting plate (6) is provided with a first horizontal adjusting piece (36), the second horizontal adjusting plate (5) is provided with a second horizontal adjusting piece (32), the axis of the first horizontal adjusting piece (36) is perpendicular to the axis of the second horizontal adjusting piece (32), and the receiving block (4) is fixedly arranged on the second horizontal adjusting plate (5).

7. Chip tester, characterized by comprising a swing adjusting device according to any one of claims 1-6, and further comprising a base plate (42), said swing adjusting device being provided on said base plate (42).

8. The chip tester according to claim 7, further comprising a test platform on which the Bar (47) to be tested is placed, and a probe structure (41) provided in correspondence with the Bar (47) to be tested.