CN115616378A - End face detection device and detection method - Google Patents
End face detection device and detection method Download PDFInfo
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- CN115616378A CN115616378A CN202211247888.XA CN202211247888A CN115616378A CN 115616378 A CN115616378 A CN 115616378A CN 202211247888 A CN202211247888 A CN 202211247888A CN 115616378 A CN115616378 A CN 115616378A
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- 230000007246 mechanism Effects 0.000 claims description 50
- 238000012937 correction Methods 0.000 claims description 9
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2868—Complete testing stations; systems; procedures; software aspects
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Abstract
The invention provides an end face detection device and a detection method, which belong to the technical field of detection, and the end face detection device comprises a bracket, a supply device, a carrying assembly, a testing device and a containing device which are sequentially arranged in the transmission direction of a chip to be detected; the test device comprises: the adsorption component is provided with a first adsorption piece and a second adsorption piece; a detection assembly having a first detection assembly and a second detection assembly; this device will await measuring the chip through the transport subassembly and place first absorption annex on, the rethread first absorption annex uses with first camera and second camera cooperation to await measuring the chip except that every surface of bottom surface detects, the second adsorbs the piece and uses the bottom surface to the chip that awaits measuring with the third camera cooperation and detect, has realized detecting the chip that awaits measuring comprehensively, and this kind of end face detection device operation detects, and degree of automation is high, labour saving and time saving.
Description
Technical Field
The invention relates to the technical field of detection, in particular to an end face detection device and a detection method.
Background
Integrated Circuits (ICs), also known as microchips, chips, or dies, are a way to miniaturize circuits, including semiconductor devices, including passive components, and the like, and are often fabricated on the surface of semiconductor wafers.
With the development of the semiconductor industry, the thinner the thickness of an integrated circuit chip is, the higher the processing and detection precision of the chip is. The chip size to the producer manufacturing is most common with the rectangle, and current chip need detect through detection mechanism after processing is accomplished to ensure that chip quality and performance are qualified, and current detection means is complicated loaded down with trivial details usually, needs the manual work to carry out many times and detects each surface of chip, and degree of automation is low, and consuming time and wasting force.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defect of low automation degree of chip detection in the prior art, so as to provide an end face detection device and a detection method.
In order to solve the above problem, the present invention provides an end surface detection apparatus, including:
the device comprises a support, a supply device, a carrying assembly, a testing device and a containing device which are sequentially arranged in the transmission direction of a chip to be tested;
the bracket is arranged on the detection platform;
the carrying assembly is connected with the bracket in a sliding manner;
the test device comprises:
the adsorption component is provided with a first adsorption part and a second adsorption part;
the first suction accessory is provided with a first working end face for sucking the chip to be detected; an adsorption port is formed in the first working end face; the first adsorption part is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part faces upwards;
the second adsorption piece is arranged on the bracket in a sliding manner; the second adsorption piece is internally provided with a pipeline through which gas passes; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption part;
a detection assembly having a first detection assembly and a second detection assembly; the first detection assembly is arranged corresponding to the first suction piece; the second detection assembly is arranged corresponding to the second adsorption piece;
the first detection assembly comprises a first camera and a second camera; the four first cameras are respectively arranged around the first detection area and are arranged in a cross structure; the second camera is disposed above the first detection area;
the second detection component comprises a third camera; the third camera is disposed below the second detection area.
Preferably, the supply device further includes:
the chip loading device comprises a bearing mechanism and a chip loading mechanism, wherein the bearing mechanism is provided with a bearing area for placing a chip, the bearing area is made of transparent materials, and the bearing mechanism is connected with a first driving mechanism;
the ejection mechanism is arranged below the bearing mechanism and comprises a seat body and a thimble arranged in the center of the seat body, a plurality of through holes for adsorbing a bearing area are arranged on the end surface of the seat body facing the bearing mechanism, the seat body is connected with an air exhaust mechanism, and the thimble is connected with a second driving mechanism;
preferably, the method further comprises the following steps:
the alignment piece is arranged on the detection platform and provided with a correction plate, and the correction plate is arranged corresponding to the first suction piece; the correction plate is provided with a first hole body suitable for the chip to pass through.
As a preferred scheme, the first camera is arranged on the first sliding table assembly; the first sliding table assembly drives the first camera to move and/or rotate, and the second camera is arranged on the second sliding table assembly; the second sliding table assembly drives the second camera to move; the third camera is arranged on the third sliding table assembly; and the third sliding table assembly drives the third camera to move.
Preferably, the first slip table assembly includes:
the first leveling plate is provided with a first leveling member;
the second horizontal adjusting plate is provided with a second horizontal adjusting piece, and the axis of the second horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece;
the first swing structure is arranged on the first level adjusting plate; a first camera is arranged on the first swing structure;
the first swinging structure comprises a first adjusting seat and a second adjusting seat, the first adjusting seat is provided with an arc-shaped guide rail or a guide groove, the second adjusting seat is provided with a guide groove or an arc-shaped guide rail, the first adjusting seat and the second adjusting seat are connected in a sliding mode through the arc-shaped guide rail and the guide groove, a first screwing piece is arranged on the first adjusting seat and is abutted to the second adjusting seat to drive the second adjusting seat to swing to a preset position relative to the first adjusting seat, and the first screwing piece is screwed to fix the first adjusting seat and the second adjusting seat;
a turntable structure disposed between the first camera and the first swing structure;
the turntable structure comprises a first rotating disk and a second rotating disk, and the first rotating disk is fixedly connected with the first swinging structure; the second rotating disk is rotatably connected with the first rotating disk.
Preferably, the second slide table assembly includes:
the third level adjusting plate is provided with a third level adjusting piece;
a fourth horizontal adjusting plate is arranged on the fourth horizontal adjusting plate, and the axis of the fourth horizontal adjusting piece is perpendicular to the axis of the third horizontal adjusting piece;
the vertical fixing plate is L-shaped in cross section; one side of the vertical fixing plate is fixedly connected with the fourth horizontal adjusting plate;
one side of the vertical sliding plate is connected with the other side of the vertical fixing plate in a sliding manner; the second camera is fixedly installed on the vertical sliding plate.
Preferably, the third slide table assembly includes:
the fifth horizontal adjusting plate is provided with a fifth horizontal adjusting part;
a sixth horizontal adjusting piece is arranged on the sixth horizontal adjusting plate, and the axis of the sixth horizontal adjusting piece is perpendicular to the axis of the fifth horizontal adjusting piece;
the second swing structure is arranged on the fifth horizontal adjusting plate; the third motor is arranged on the second swinging structure; second swing structure includes that the third adjusts seat and fourth and adjusts the seat, the third adjust the seat be equipped with arc guide rail or guide slot the fourth adjust the seat and be equipped with guide slot or arc guide rail, the third adjust the seat with through arc guide rail and guide slot sliding connection between the fourth regulation seat, the third is adjusted and is equipped with the second on the seat and revolves the tight piece, the second revolve tight piece with the third adjusts the seat butt setting, drives the fourth adjusts the seat relatively the third adjusts the seat and swings to preset position, and the second that screws revolves the tight piece and makes the third adjust seat and fourth adjust the seat fixed.
Preferably, the second adsorption part is connected with a motor; the second adsorption piece is driven by the motor to rotate along the center line of the second adsorption piece.
Preferably, the receiving device comprises a plurality of containing structures.
A detection method comprising the end face detection device of any one of the above; further comprising the steps of:
firstly, moving a chip to be tested to a first working end face of a first suction accessory through an automatic supply device and a carrying assembly; the first working end face is in contact with the lower surface of the chip to be tested, the first cameras are distributed around the chip to be tested and arranged in a cross-shaped structure, and the second cameras are arranged above the chip to be tested; carrying out first detection on the chip to be detected, and carrying out shooting detection on each surface of the chip to be detected except the lower surface;
then moving the second adsorption part to the position above the first adsorption part through the movement of the second adsorption part and the first adsorption part, transferring the chip to be detected to the second adsorption part from the first adsorption part, enabling the second adsorption part to be in contact with the upper surface of the chip to be detected, moving the second adsorption part to the position above a third camera under the driving of the second adsorption part, and carrying out shooting detection on the lower surface of the chip to be detected by the third camera;
and finally, after the chip to be detected is detected, the second adsorption piece is moved to the upper part of the storage device, and the chip to be detected is placed on the storage device.
The technical scheme of the invention has the following advantages:
1. the invention provides an end face detection device, which comprises a bracket, a supply device, a carrying assembly, a test device and a storage device, wherein the bracket, the supply device, the carrying assembly, the test device and the storage device are sequentially arranged in the transmission direction of a chip to be detected; the bracket is arranged on the detection platform; the carrying assembly is connected with the bracket in a sliding manner; the test device includes: the adsorption component is provided with a first adsorption part and a second adsorption part; the first suction accessory is provided with a first working end face for sucking the chip to be detected; an adsorption port is formed in the first working end face; a first pipeline for gas circulation is arranged inside the first adsorption part and is communicated with the adsorption port; the adsorption port of the first adsorption part faces upwards; the second adsorption piece is arranged on the bracket in a sliding manner; a pipeline through which gas passes is arranged in the second adsorption piece; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline in the second adsorption piece; a detection assembly having a first detection assembly and a second detection assembly; the first detection assembly is arranged corresponding to the first suction attachment; the second detection assembly is arranged corresponding to the second adsorption piece; the first detection component comprises a first camera and a second camera; the four first cameras are respectively arranged around the first detection area and are arranged in a cross-shaped structure; the second camera is disposed above the first detection area; the second detection component comprises a third camera; the third camera is disposed below the second detection area.
This device will await measuring the chip through the transport subassembly and place first absorption part on, rethread first absorption part uses with first camera and second camera cooperation to await measuring the chip and detect except that every surface of bottom surface, rethread second adsorbs the piece and cooperates with first absorption part, to await measuring the chip transfer to the second on adsorbing the piece, the second adsorbs piece and adsorbs chip to third camera department, the third camera detects the bottom surface of the chip that awaits measuring, realized detecting the chip that awaits measuring comprehensively, this kind of end surface detection device operation detects, and high automation is achieved, time saving and labor saving.
2. The invention provides an end face detection device, wherein a supply device also comprises a bearing mechanism and an ejection mechanism, when a chip is required to be separated from the bearing mechanism, the air exhaust mechanism exhausts air to a seat body, so that the end face of the seat body facing the bearing mechanism is fixedly adsorbed with the bearing mechanism, and when an ejector pin rises to apply ejection force to the chip on the bearing mechanism, most of the bearing mechanism is fixedly adsorbed with the seat body, so that the movement cannot occur even if the ejection force is larger, the position of the chip cannot be changed, namely the center of the chip and the center of the adsorption mechanism are always superposed without readjustment, and the adsorption accuracy is ensured; simultaneously, the bearing mechanism is fixedly adsorbed with the seat body through a plurality of through holes on the seat body, the stress is uniform, the bearing mechanism cannot be bent and damaged due to large adsorption force, and the cost is reduced.
3. The end face detection device provided by the invention has the advantages that the first camera, the second camera and the third camera need to be focused before detecting a chip, the first camera is arranged on the first sliding table assembly, the first camera is driven by the first sliding table assembly to move and/or rotate to realize the focusing process of the first camera, the accuracy of the detection data of the first camera is ensured, the second camera is arranged on the second sliding table, the second camera is driven by the second sliding table assembly to move and complete the focusing process of the second camera, the accuracy of the detection data of the second camera is ensured, the third camera is arranged on the third sliding table, the third camera is driven by the third sliding table assembly to move and complete the focusing process of the third camera, and the accuracy of the detection data of the third camera is ensured.
4. According to the end face detection device provided by the invention, the first sliding table assembly can enable a first camera to slide freely in the horizontal direction, the axes of the first level adjustment plate and the second level adjustment plate are vertical, the first sliding table assembly can realize the free adjustment in the horizontal direction through the first level adjustment plate and the second level adjustment plate, the first sliding table assembly can also swing, the first swing structure is arranged on the first level adjustment plate, the small-scale movement in the vertical direction is realized through the first swing structure, the practicability of the first sliding table assembly is improved, the first sliding assembly can also rotate in the horizontal direction, the rotary table structure is arranged on the first swing structure, the rotation of the first sliding table assembly in the horizontal direction is realized through the rotary table structure, and the practicability of the first sliding table assembly is improved.
5. According to the end face detection device provided by the invention, the second sliding table assembly can enable the second camera to slide freely in the horizontal direction, the third horizontal adjusting plate is perpendicular to the axis of the fourth horizontal adjusting plate, so that the second camera can be adjusted freely in the horizontal direction under the action of the second sliding table assembly, the second sliding table assembly can also move in the vertical direction, the second camera can move in the vertical direction through relative sliding of the vertical sliding plate and the vertical fixing plate, and the practicability of the second sliding table assembly is improved.
6. According to the end face detection device provided by the invention, the third sliding table assembly can enable the third camera to freely slide in the horizontal direction, the third sliding table assembly comprises the fifth horizontal adjusting plate and the sixth horizontal adjusting plate, the third sliding table assembly can freely slide in the horizontal direction through the fifth horizontal adjusting plate and the sixth horizontal adjusting plate, the fifth horizontal adjusting plate is further provided with the second swinging structure, the third camera can swing under the action of the second swinging structure, the third camera can slightly change the angle relative to the bottom surface of the chip, and the practicability of the third sliding table assembly is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic overall structural diagram of an end face detection apparatus provided in the present invention.
Fig. 2 is a schematic structural diagram of an end face detection device of the end face detection device provided in the present invention.
Fig. 3 is a schematic structural diagram of a first sliding table assembly of the end surface detection apparatus provided by the present invention.
Fig. 4 is a schematic structural diagram of a second sliding table assembly of the end surface detection apparatus provided in the present invention.
Fig. 5 is a schematic structural diagram of a third sliding table assembly of the end surface detection apparatus provided in the present invention.
Fig. 6 is a schematic structural diagram of a first swing structure of an end face detection apparatus according to the present invention.
Description of the reference numerals:
1. a first camera; 2. a second camera; 3. a third camera; 4. a first fixing plate; 5. a first movable plate; 6. a second fixing plate; 7. a second movable plate; 8. a first adjusting seat; 9. a second adjusting seat; 10. a fourth adjustment seat; 11. a first rotating disk; 12. a second rotating disk; 13. a third fixing plate; 14. a third movable plate; 15. a fourth fixing plate; 16. a fourth movable plate; 17. a vertical fixing plate; 18. a vertical slide plate; 19. a fifth fixing plate; 20. a fifth movable plate; 21. a sixth fixing plate; 22. a sixth movable plate; 23. a third adjusting seat; 24. a first suction attachment; 25. a second adsorption member; 26. a carrying mechanism; 27. an ejection mechanism; 28. a registration member; 29. a containing structure; 30. an electric motor.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
As shown in fig. 1, in the end face detection apparatus provided by the present invention, a support, a supply device, a carrying assembly, a testing device, and a receiving device are sequentially arranged in a transmission direction of a chip to be tested; the bracket is arranged on the detection platform; the carrying assembly is connected with the bracket in a sliding manner; the test device includes: a suction assembly having a first suction piece 24 and a second suction piece 25; the first suction attachment 24 is provided with a first working end face for adsorbing a chip to be tested; an adsorption port is formed in the first working end face; the first suction fitting 24 has a first pipe for gas to flow through, and the first pipe is communicated with the suction port; the suction port of the first suction attachment 24 is arranged facing upward; the second adsorption piece 25 is arranged on the bracket in a sliding manner; the second adsorption part 25 has a gas passage pipe inside; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption piece 25; a detection assembly having a first detection assembly and a second detection assembly; the first detection component is arranged corresponding to the first suction piece 24; the second detection component is arranged corresponding to the second adsorption part 25; the first detection assembly comprises a first camera 1 and a second camera 2; the number of the first cameras 1 is four, and the four first cameras 1 are respectively arranged around the first detection area and are arranged in a cross-shaped structure; the second camera 2 is arranged above the first detection area; the second detection assembly comprises a third camera 3; the third camera 3 is disposed below the second detection area. The device moves the chip to be tested to the first working end surface of the first suction accessory 24 through the automatic feeding device and the carrying assembly; the first working end face is contacted with the lower surface of the chip to be tested, the first cameras 1 are distributed around the chip to be tested and arranged in a cross structure, and the second cameras 2 are arranged above the chip to be tested; at the moment, the chip to be detected is detected for the first time, and shooting detection is carried out on each surface of the chip to be detected except the lower surface; then, the second adsorption part 25 is moved above the first adsorption part 24 through the movement of the second adsorption part 25 and the first adsorption part 24, the chip to be tested is transferred to the second adsorption part 25 from the first adsorption part 24, the second adsorption part 25 is in contact with the upper surface of the chip to be tested and is driven by the second adsorption part 25 to move above the third camera 3, and the third camera 3 performs shooting detection on the lower surface of the chip to be tested; and finally, after the chip to be detected is detected, the second adsorption piece 25 is moved to the upper part of the storage device, and the chip to be detected is placed on the storage device. The device realizes the comprehensive detection of the chip to be detected, the operation of the end face detection device is detected, the automation degree is high, and time and labor are saved.
The feeding device further comprises a bearing mechanism 26 and an ejection mechanism 27, the bearing mechanism 26 is provided with a bearing area for placing the chip, the bearing area is made of transparent materials, specifically, the bearing area is a blue film made of transparent materials or a transparent film, and the bearing mechanism 26 is connected with a first driving mechanism; the first driving mechanism comprises two motors 30 with vertical moving directions, the bearing area moves in the horizontal direction through the driving of the two motors 30, the first driving mechanism can drive the bearing mechanism 26 to move in the horizontal direction, and after one chip in the bearing area is grabbed, the next chip is moved to a position to be grabbed through the driving of the two motors 30. The ejection mechanism 27 is arranged below the bearing mechanism 26 and comprises a base body and an ejector pin arranged in the center of the base body, the base body is cylindrical, a plurality of through holes are uniformly distributed in the circumferential direction of the ejector pin, the end surface of the base body facing the bearing mechanism 26 is provided with a plurality of through holes for adsorbing a bearing area, the base body is connected with an air extraction mechanism, and the ejector pin is connected with a second driving mechanism; the thimble moves in the vertical direction under the action of the second driving mechanism. Wherein the air exhaust structure can be a vacuum pump, so that the top of the seat body is firmly attached to the blue film.
As shown in fig. 2, the carrying assembly carries the chip to above the first suction attachment 24, but the position where the chip falls down on the first suction attachment 24 is random, which is not beneficial to detecting the chip to be detected, so an alignment member 28 is further provided, the alignment member 28 is arranged on the detection platform, the alignment member 28 has a correction plate, and the correction plate is arranged corresponding to the first suction attachment 24; the correction plate is provided with a first hole body suitable for the chip to pass through. In order to increase the fault tolerance, a second hole body is further arranged on the correcting plate, the area of a through hole of the second hole body is larger than that of the first hole body, the center line of the second hole body is coincident with that of the first hole body, the cross section of the second hole body is trapezoidal, an inclined plane is arranged on the second hole body towards the first hole body, the chip can enter the second hole body firstly and slide into the first hole body under the action of the inclined plane of the second hole body, and the fault tolerance of the chip entering the first hole body is improved.
As shown in fig. 3-4, after the chip is corrected by the aligning member 28 and moved from the carrying assembly to the first suction attachment 24, the position where the chip falls on the first suction attachment 24 is ensured to be fixed, and then the chip on the first suction attachment 24 is detected by the first detection assembly, before the chip is detected, the first detection assembly needs to be debugged and focused, and specifically, the first camera 1 is arranged on the first sliding table assembly; the first camera 1 can focus in all directions under the driving of the first sliding table assembly.
The first sliding table assembly drives the first camera 1 to move and/or rotate, and specifically comprises a first level adjusting plate and a second level adjusting plate, wherein a first level adjusting piece is arranged on the first level adjusting plate; a second horizontal adjusting piece is arranged on the second horizontal adjusting plate, and the axis of the second horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece; the first sliding table assembly realizes arbitrary adjustment in the horizontal direction through a first leveling plate and a second leveling plate, the first leveling plate comprises a first fixing plate 4 and a first movable plate 5 which are connected in a sliding mode, the first fixing plate 4 and the first movable plate 5 are both connected with a screw motor 30, the screw motor 30 is provided with a movable screw rod and a fixed screw rod, the movable screw rod drives the first movable plate 5 to move, the fixed screw rod is connected with the first fixing plate 4, and the movable screw rod driving the screw motor 30 pushes the first movable plate 5 to move relative to the first fixing plate 4.
The second horizontal adjusting plate comprises a second fixing plate 6 and a second movable plate 7 which are in sliding connection, wherein an L-shaped extending end is arranged on the second fixing plate 6, a second horizontal adjusting piece is arranged on the extending end, the axis of the second horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece, the second horizontal adjusting piece is abutted against the side face of the second movable plate 7, and an adjusting rod of the second horizontal adjusting piece is rotated to push the second movable plate 7 to move relative to the second fixing plate 6. Specifically, the second level adjustment member is a differential head. The axis of the second horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece.
As shown in fig. 6, the first sliding table assembly further includes a first swing structure, and the first swing structure is disposed on the first level adjustment plate; a first camera 1 is arranged on the first swing structure; the first camera 1 is guaranteed to swing in a small amplitude in the vertical direction; the swing structure comprises a first adjusting seat 8 and a second adjusting seat 9, the first adjusting seat 8 is provided with an arc-shaped guide rail or a guide groove, the second adjusting seat 9 is provided with a guide groove or an arc-shaped guide rail, the first adjusting seat 8 and the second adjusting seat 9 are in sliding connection through the arc-shaped guide rail and the guide groove, a first tightening piece is arranged on the first adjusting seat 8 and is abutted to the second adjusting seat 9 to drive the second adjusting seat 9 to swing to a preset position relative to the first adjusting seat 8, and the first tightening piece is tightened to fix the first adjusting seat 8 and the second adjusting seat 9; the first swing structure further comprises a first adjusting rod, the first adjusting rod is arranged in the arc-shaped guide rail or the guide groove in a penetrating mode, the first adjusting rod is provided with a first rotating handle and a first screw rod end, the second adjusting seat 9 is provided with a first adjusting end on the end face, facing the first adjusting seat 8, of the second adjusting seat, and the first screw rod end is meshed with the first adjusting end. Make first screw rod end and first regulation end meshing rotate through rotating first rotation handle to drive first regulation pole and remove in arc guide rail or guide slot, the setting of first regulation pole can make things convenient for the staff to adjust first regulation seat 8 and second regulation seat 9. The first swing structure further comprises a first adjusting rod, the first adjusting rod is arranged in the arc-shaped guide rail or the guide groove in a penetrating mode, the first adjusting rod is provided with a first rotating handle and a first screw rod end, the second adjusting seat 9 is provided with a first adjusting end on the end face, facing the first adjusting seat 8, of the second adjusting seat, and the first screw rod end is meshed with the first adjusting end. Make first screw rod end and first regulation end meshing rotate through rotating first rotation handle to drive first regulation pole and remove in arc guide rail or guide slot, the setting of first regulation pole can make things convenient for the staff to adjust first regulation seat 8 and second regulation seat 9.
In order to enable the first camera 1 to be rotatably adjusted in the horizontal direction, the first sliding table assembly is further provided with a rotating disc structure, and the rotating disc structure is arranged between the first camera 1 and the first swinging structure; the turntable structure comprises a first rotating disk 11 and a second rotating disk 12, and the first rotating disk 11 is fixedly connected with the first swinging structure; the second rotating disk 12 is rotatably connected with the first rotating disk 11. Realize first slip table subassembly through the carousel structure and rotate in the horizontal direction, can adjust the receiving face of first camera 1 when the chip side receives the nonparallel with first camera 1, increased the practicality of this device.
Completing the focusing process of the first camera 1 through the first sliding table assembly, enabling the first camera 1 to accurately shoot four side surfaces of the chip, and then shooting the upper part of the chip through the second camera 2, wherein similarly, the second camera 2 also needs to be focused; arranging a second camera 2 on a second sliding table assembly; the second sliding table assembly drives the second camera 2 to move;
the second sliding table comprises a third level adjustment plate and a fourth level adjustment plate.
The third horizontal adjusting plate comprises a third fixed plate 13 and a fourth movable plate 16 which are connected in a sliding manner, wherein an L-shaped extending end is arranged on the third fixed plate 13, a third horizontal adjusting member is arranged on the extending end, the third horizontal adjusting member abuts against the side surface of the third movable plate 14, and the adjusting rod of the third horizontal adjusting member is rotated to push the third movable plate 14 to move relative to the third fixed plate 13. Specifically, the third horizontal adjusting member is a differential head.
The fourth leveling plate comprises a fourth fixing plate 15 and a fourth movable plate 16 which are connected in a sliding mode, wherein an L-shaped extending end is arranged on the fourth fixing plate 15, a fourth leveling part is arranged on the extending end, the axis of the fourth leveling part is perpendicular to the axis of the fourth leveling part, the fourth leveling part abuts against the side face of the fourth movable plate 16, and the adjusting rod of the fourth leveling part is rotated to push the fourth movable plate 16 to move relative to the fourth fixing plate 15. Specifically, the fourth horizontal adjusting member is a differential head.
The third and fourth level adjustment plates enable the second camera 2 to be adjusted in the horizontal direction, and in order to move the second camera 2 in other directions, a vertical fixing plate 17 and a vertical slide plate 18 are further provided.
The section of the vertical fixing plate 17 is L-shaped, one side of the vertical fixing plate 17 is fixedly connected with the fourth horizontal adjusting plate, and the other side of the vertical fixing plate 17 is slidably connected with the vertical sliding plate 18; and the second camera 2 is mounted on the vertical slide 18; the vertical sliding plate 18 and the vertical fixing plate 17 move relative to each other in the vertical direction, and the second camera 2 is driven to move in the vertical direction, so that the second camera 2 can move in the vertical direction finally. The second camera 2 obtains clear top surface data of the chip, data acquisition is completed on four side surfaces and the top surface of the chip at the moment, and then data acquisition is needed to be carried out on the bottom surface of the chip;
after the first camera 1 and the second camera 2 finish detection, the chip needs to be moved from the first adsorption part 24 to the second adsorption part 25, at this time, the relative positions of the first adsorption part 24 and the second adsorption part 25 are moved, wherein the second adsorption part 25 slides on the support, so that the second adsorption part 25 moves above the first adsorption part 24, the negative pressure of the first pipeline in the first adsorption part 24 is changed into the positive pressure, and meanwhile, the negative pressure is communicated with the second pipeline in the second adsorption part 25; the chip to be tested can bounce from the first adsorption part 24 under the action of the airflow, contact the second adsorption part 25 and be adsorbed by the second adsorption part 25 at the moment of contacting the second adsorption part 25; the grabbing of the second adsorption piece 25 to the chip to be tested is realized, and the position and the orientation of the chip to be tested may be found to deflect in the process that the chip to be tested moves from the first adsorption piece 24 to the second adsorption piece 25; the second adsorption piece 25 is connected with the motor 30, and the second adsorption piece 25 and the motor 30 are in transmission through a connecting belt in the scheme; the second adsorption part 25 is driven by the motor 30 to rotate along the central line of the second adsorption part, so that the chip to be detected also rotates, the position of the chip to be detected is kept consistent with the direction of the chip to be detected on the first adsorption part 24, the image detected by the second detection component corresponds to the image detected by the first detection component, and the detection accuracy is ensured;
the second adsorption piece 25 adsorbs the top of the chip and exposes the bottom of the chip in the visual field range of a third camera 3, and the third camera 3 is arranged on the third sliding table assembly; the third sliding table assembly drives the third camera 3 to move.
As shown in fig. 5, the third sliding table component drives the third camera 3 to move, and the third camera 3 is driven to move through the third sliding table component, so that the third camera 3 completes focusing on the chip to be tested, wherein the third sliding table component comprises: a fifth level adjustment plate and a sixth level adjustment plate. The axis of the sixth horizontal adjusting piece is perpendicular to the axis of the fifth horizontal adjusting piece.
The fifth horizontal adjusting plate comprises a fifth fixed plate 19 and a fifth movable plate 20 which are connected in a sliding manner, wherein an L-shaped extending end is arranged on the fifth fixed plate 19, a fifth horizontal adjusting piece is arranged on the extending end, the fifth horizontal adjusting piece is abutted against the side surface of the fifth movable plate 20, and an adjusting rod of the fifth horizontal adjusting piece is rotated to push the fifth movable plate 20 to move relative to the fifth fixed plate 19. Specifically, the fifth horizontal adjuster is a differential head.
The sixth horizontal adjusting plate comprises a sixth fixed plate 21 and a sixth movable plate 22 which are connected in a sliding manner, wherein an L-shaped extending end is arranged on the sixth fixed plate 21, a sixth horizontal adjusting piece is arranged on the extending end, the axis of the sixth horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece, the sixth horizontal adjusting piece is abutted against the side surface of the sixth movable plate 22, and an adjusting rod of the sixth horizontal adjusting piece is rotated to push the sixth movable plate 22 to move relative to the sixth fixed plate 21. Specifically, the sixth level adjustment member is a differential head.
The second swinging structure is arranged on the fifth horizontal adjusting plate; a third motor 3 is arranged on the second oscillating structure; second swing structure includes that seat 23 and fourth are adjusted to the third, seat 10 is adjusted to the third, the third adjust the seat 23 be equipped with arc guide rail or guide slot the fourth adjust seat 10 be equipped with guide slot or arc guide rail, the third adjust the seat 23 with the fourth is adjusted between seat 10 through arc guide rail and guide slot sliding connection, it revolves the piece to be equipped with the second on the third adjusts the seat 23, the second revolve the piece with seat 23 butt setting is adjusted to the third, the drive seat 10 is adjusted to the fourth the seat 23 is adjusted to the third swings to preset position, and the second that revolves the piece makes the third adjust seat 23 and fourth adjust seat 10 fixed.
Example 2
An end face detection apparatus of example 1 was used as a detection method.
A detection method comprises the following steps:
firstly, the chip to be tested is moved to the first working end surface of the first suction accessory 24 through the automatic feeding device and the carrying assembly; the first working end face is contacted with the lower surface of the chip to be tested, the first cameras 1 are distributed around the chip to be tested and arranged in a cross structure, and the second cameras 2 are arranged above the chip to be tested; carrying out first detection on the chip to be detected, and carrying out shooting detection on each surface of the chip to be detected except the lower surface;
then, the second adsorption part 25 is moved above the first adsorption part 24 through the movement of the second adsorption part 25 and the first adsorption part 24, the chip to be tested is transferred to the second adsorption part 25 from the first adsorption part 24, the second adsorption part 25 is in contact with the upper surface of the chip to be tested and is driven by the second adsorption part 25 to move above the third camera 3, and the third camera 3 performs shooting detection on the lower surface of the chip to be tested; therefore, the detection of each end face of the chip is realized;
and finally, after the chip to be detected is detected, the second adsorption piece 25 is moved to the upper part of the storage device, and the chip to be detected is placed on the storage device.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. An end face detection device, comprising:
the device comprises a support, a supply device, a carrying assembly, a testing device and a containing device which are sequentially arranged in the transmission direction of a chip to be tested;
the bracket is arranged on the detection platform;
the carrying assembly is connected with the bracket in a sliding manner;
the test device comprises:
a suction assembly having a first suction member (24) and a second suction member (25);
the first suction piece (24) is provided with a first working end surface for sucking a chip to be tested; an adsorption port is formed in the first working end face; the first adsorption piece (24) is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part (24) faces upwards;
the second adsorption piece (25) is arranged on the bracket in a sliding way; the second adsorption piece (25) is internally provided with a pipeline through which gas passes; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline in the second adsorption piece (25);
a detection assembly having a first detection assembly and a second detection assembly; the first detection component is arranged corresponding to the first suction piece (24); the second detection component is arranged corresponding to the second adsorption piece (25);
the first detection assembly comprises a first camera (1) and a second camera (2); the number of the first cameras (1) is four, and the four first cameras (1) are respectively arranged on the periphery of the first detection area and are arranged in a cross structure; the second camera (2) is arranged above the first detection area;
the second detection assembly comprises a third camera (3); the third camera (3) is arranged below the second detection area.
2. The end face detection device according to claim 1, wherein the supply device further includes:
the bearing mechanism (26) is provided with a bearing area for placing the chip, the bearing area is made of transparent materials, and the bearing mechanism (26) is connected with a first driving mechanism;
the ejection mechanism (27) is arranged below the bearing mechanism (26) and comprises a base body and an ejector pin arranged at the center of the base body, a plurality of through holes used for adsorbing a bearing area are formed in the end face, facing the bearing mechanism (26), of the base body, the base body is connected with an air exhaust mechanism, and the ejector pin is connected with a second driving mechanism.
3. The end face detection apparatus according to claim 2, wherein the test apparatus further comprises:
the alignment piece (28) is arranged on the detection platform, the alignment piece (28) is provided with a correction plate, and the correction plate is arranged corresponding to the first suction piece (24); the correction plate is provided with a first hole body suitable for the chip to pass through.
4. The end face detection apparatus according to claim 1, wherein the first camera (1) is provided on a first slide table assembly; the first sliding table assembly drives the first camera (1) to move and/or rotate, and the second camera (2) is arranged on the second sliding table assembly; the second sliding table assembly drives the second camera (2) to move; the third camera (3) is arranged on the third sliding table assembly; and the third sliding table assembly drives the third camera (3) to move.
5. The end face detection device according to claim 4, wherein the first slide table assembly includes:
the first horizontal adjusting plate is provided with a first horizontal adjusting piece;
the second horizontal adjusting plate is provided with a second horizontal adjusting piece, and the axis of the second horizontal adjusting piece is perpendicular to the axis of the first horizontal adjusting piece;
the first swing structure is arranged on the first level adjusting plate; a first camera (1) is arranged on the first swing structure;
the first swing structure comprises a first adjusting seat (8) and a second adjusting seat (9), the first adjusting seat (8) is provided with an arc-shaped guide rail or a guide groove, the second adjusting seat (9) is provided with a guide groove or an arc-shaped guide rail, the first adjusting seat (8) is connected with the second adjusting seat (9) in a sliding mode through the arc-shaped guide rail and the guide groove, a first screwing piece is arranged on the first adjusting seat (8) and is abutted to the second adjusting seat (9), the second adjusting seat (9) is driven to swing to a preset position relative to the first adjusting seat (8), and the first screwing piece is screwed to fix the first adjusting seat (8) and the second adjusting seat (9);
a turntable structure arranged between the first camera (1) and the first swing structure;
the turntable structure comprises a first rotating disk (11) and a second rotating disk (12), and the first rotating disk (11) is fixedly connected with the first swinging structure; the second rotating disk (12) is rotationally connected with the first rotating disk (11).
6. The end face detection device according to claim 4, wherein the second slide table assembly includes:
the third horizontal adjusting plate is provided with a third horizontal adjusting piece;
a fourth horizontal adjusting piece is arranged on the fourth horizontal adjusting plate, and the axis of the fourth horizontal adjusting piece is perpendicular to the axis of the third horizontal adjusting piece;
the vertical fixing plate (17) has an L-shaped section; one side of the vertical fixing plate (17) is fixedly connected with the fourth horizontal adjusting plate;
one side of the vertical sliding plate (18) is connected with the other side of the vertical fixing plate (17) in a sliding way; the second camera (2) is fixedly arranged on the vertical sliding plate (18).
7. The end face detection device according to claim 4, wherein the third slide table assembly includes:
the fifth horizontal adjusting plate is provided with a fifth horizontal adjusting part;
a sixth horizontal adjusting piece is arranged on the sixth horizontal adjusting plate, and the axis of the sixth horizontal adjusting piece is perpendicular to the axis of the fifth horizontal adjusting piece;
the second swing structure is arranged on the fifth horizontal adjusting plate; a third motor (3) is arranged on the second swing structure; second swing structure includes that seat (23) and fourth are adjusted to the third adjust seat (23), the third adjust seat (23) be equipped with arc guide rail or guide slot the fourth adjust seat (10) be equipped with guide slot or arc guide rail, the third adjust seat (23) with the fourth adjusts seat (10) and passes through arc guide rail and guide slot sliding connection between, it revolves the piece to be equipped with the second on third adjusts seat (23), the second revolve the piece with seat (23) butt setting is adjusted to the third, the drive the fourth adjust seat (10) is relative seat (23) is adjusted to the third swings to preset position, and the second that revolves the piece makes third adjust seat (23) and fourth adjust seat (10) fixed.
8. An end face detection apparatus according to claim 1, wherein the second suction member (25) is connected to a motor (30); the second adsorption piece (25) is driven by the motor (30) to rotate along the center line of the second adsorption piece.
9. End face detection device according to claim 1, characterised in that said housing means comprise a plurality of containing structures (29).
10. A detection method comprising the end face detection apparatus according to any one of claims 1 to 8; further comprising the steps of:
firstly, a chip to be tested is moved to a first working end surface of a first suction accessory (24) through an automatic feeding device and a carrying assembly; the first working end face is contacted with the lower surface of the chip to be tested, the first cameras (1) are distributed around the chip to be tested and arranged in a cross structure, and the second cameras (2) are arranged above the chip to be tested; carrying out first detection on the chip to be detected, and carrying out shooting detection on each surface of the chip to be detected except the lower surface;
then, the second adsorption part (25) is moved to the position above the first adsorption part (24) through the movement of the second adsorption part (25) and the first adsorption part (24), a chip to be detected is transferred to the second adsorption part (25) from the first adsorption part (24), the second adsorption part (25) is in contact with the upper surface of the chip to be detected and is moved to the position above the third camera (3) under the driving of the second adsorption part (25), and the third camera (3) shoots and detects the lower surface of the chip to be detected;
and finally, after the chip to be detected is detected, the second adsorption piece (25) is moved to the upper part of the storage device, and the chip to be detected is placed on the storage device.
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| CN202211247888.XA CN115616378A (en) | 2022-10-12 | 2022-10-12 | End face detection device and detection method |
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| CN202211247888.XA CN115616378A (en) | 2022-10-12 | 2022-10-12 | End face detection device and detection method |
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| CN202211247888.XA Pending CN115616378A (en) | 2022-10-12 | 2022-10-12 | End face detection device and detection method |
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Application publication date: 20230117 |