CN216597539U - Automatic processing device for semiconductor chip - Google Patents

Automatic processing device for semiconductor chip Download PDF

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Publication number
CN216597539U
CN216597539U CN202122560132.8U CN202122560132U CN216597539U CN 216597539 U CN216597539 U CN 216597539U CN 202122560132 U CN202122560132 U CN 202122560132U CN 216597539 U CN216597539 U CN 216597539U
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China
Prior art keywords
motor
base
arc
shaped rack
clamping strip
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CN202122560132.8U
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Chinese (zh)
Inventor
黄建军
吴永红
赵山
胡海洋
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Suzhou Lianxun Instrument Co ltd
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Stelight Instrument Inc
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Priority to CN202122560132.8U priority Critical patent/CN216597539U/en
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Abstract

The utility model discloses an automatic processing device of a semiconductor chip, comprising: the base, vertically install the first motor on the base, horizontal slip table, the keysets, second motor and suction nozzle pole, horizontal slip table is located between the up end plate of base and the lower terminal plate of keysets, the second motor is fixed in on a base plate, this base plate is connected through a Z axle slide mechanism with the keysets, the output shaft and the Z axle slide mechanism of second motor are connected, a fixing base that lies in first motor below is installed on the base, the side has left inclined plane district and right inclined plane district respectively about on the terminal surface before this fixing base, install 2 at least pairs of bearings on the terminal surface before the fixing base, the top of fixing base is provided with the centre gripping strip, the arc rack, the front end and the upper end centre gripping of suction nozzle pole of this centre gripping strip are connected, the rear end and the arc rack of centre gripping strip are connected through a connecting rod. The utility model can avoid the positioning offset after a large amount of chips are repeatedly sucked for work, and the stability of the precision is still kept after long-time high-frequency use.

Description

Automatic processing device for semiconductor chip
Technical Field
The utility model relates to an automatic processing device of a semiconductor chip, and belongs to the technical field of semiconductor chip mounting and testing.
Background
In the production and use process of chips in the semiconductor industry, the testing and the surface mounting of the chips are indispensable key processes, in the surface mounting and testing link, the chip is carried and mounted with high precision, a surface mounting machine and a testing machine are needed to be used as components which are in direct contact with the chips in the testing machine and the surface mounting machine, and a suction nozzle for picking up the chips plays an important role. In the process of chip mounting and testing in the optical communication industry, the requirement of process is high, and the requirement on the chip mounting precision is high.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an automatic processing device of a semiconductor chip, which can avoid the positioning offset after a large amount of chips are repeatedly sucked and operated and still keep the stability of precision after long-time high-frequency use.
In order to achieve the purpose, the utility model adopts the technical scheme that: an automated semiconductor chip processing apparatus comprising: the suction nozzle comprises a base, a first motor, a horizontal sliding table, an adapter plate, a second motor and a suction nozzle rod, wherein the first motor, the horizontal sliding table, the adapter plate, the second motor and the suction nozzle rod are vertically arranged on the base;
a fixed seat positioned below the first motor is arranged on the base, the left side and the right side of the front end surface of the fixed seat are respectively provided with a left inclined surface area and a right inclined surface area, at least 2 pairs of bearings are arranged on the front end surface of the fixed seat, the left bearing in each pair of bearings is arranged on the left inclined surface area of the fixed seat at intervals along the vertical direction, the right bearing in each pair of bearings is arranged on the right inclined surface area of the fixed seat at intervals along the vertical direction, so that a V-shaped channel is formed between the left bearing and the right bearing in each pair of bearings, and the suction nozzle rod is positioned in the V-shaped channel of at least 2 pairs of bearings;
a clamping strip and an arc-shaped rack are arranged above the fixed seat, the front end of the clamping strip is connected with the upper end of the suction nozzle rod in a clamping manner, the rear end of the clamping strip is connected with the arc-shaped rack through a connecting rod, the arc-shaped rack is connected with a gear on an output shaft of a first motor in a meshing manner, and the circle center of the arc-shaped rack is overlapped with the axis of the suction nozzle rod;
the two ends of a spring are respectively connected with the respective side faces of the upper parts of the clamping strip and the fixing seat, one end of the spring is close to the arc-shaped rack and is positioned below the arc-shaped rack, the other end of the spring is connected to one end, far away from the arc-shaped rack, of the clamping strip, and one end, connected with the clamping strip, of the spring is higher than the other end of the spring.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, the connecting rod is connected to the middle of the arc-shaped rack.
2. In the above scheme, the fixing base further comprises a base body and a fixing block, the base body is connected with the base, and the fixing block is installed on the base body.
3. In the above scheme, the first motor and the second motor are respectively located on two sides of the adapter plate.
4. In the above scheme, the lower surface of the clamping strip is provided with a protruding part which is in contact with the upper surface of the fixed seat.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
1. according to the automatic processing device for the semiconductor chip, disclosed by the utility model, on the basis of realizing horizontal and vertical conveying of the chip, the gear on the output shaft of the first motor is positively or reversely rotated to drive the arc-shaped rack to correspondingly positively or reversely rotate, so that the angle adjusting range is expanded, and the angle adjusting requirements of various situations are met; furthermore, the arc-shaped rack also drives the connecting rod and the clamping strip to correspondingly rotate, the circle center of the arc-shaped rack is overlapped with the axis of the suction nozzle rod, and the suction nozzle rod is positioned in the clamping channel of at least 2 pairs of bearings, so that the suction nozzle rod rotates around the axis of the suction nozzle rod under the positioning of the left bearing and the right bearing, the lateral pressure of the left bearing and the right bearing is avoided, the positioning deviation after a large amount of chips are repeatedly sucked is avoided, and the stability of the precision is still kept after long-time high-frequency use.
2. The utility model relates to an automatic processing device of a semiconductor chip, wherein two ends of a spring are respectively connected with respective side surfaces of a clamping strip and the upper part of a fixed seat, one end of the spring connected with the clamping strip is higher than the other end of the spring, one end of the spring is close to an arc-shaped rack and is positioned below the arc-shaped rack, the other end of the spring is connected with one end of the clamping strip far away from the arc-shaped rack, the tension part of the spring is converted into torsion, the gear on an output shaft of a first motor is ensured to be in gapless contact with the teeth of the gear no matter the gear of the arc-shaped rack rotates forwards or reversely, and the gap between the teeth is eliminated, so that the pulse number of the first motor can be accurately calculated according to the angle to be adjusted, the actual rotating angle of the gear and a suction nozzle rod is consistent with the expected rotating angle of the pulse, and the precision of angle calculation and adjustment is improved.
Drawings
FIG. 1 is a left side view schematic diagram of an automated semiconductor chip processing apparatus according to the present invention;
FIG. 2 is a schematic perspective view of a partial structure of the automated processing apparatus of the present invention;
FIG. 3 is an enlarged view of a portion of the automatic processing apparatus of the present invention without the nozzle rod.
In the above drawings: 1. a base; 101. an upper end plate; 2. a first motor; 3. a horizontal sliding table; 4. an adapter plate; 401. a lower end plate; 5. a second motor; 6. a nozzle rod; 7. a substrate; 8. a Z-axis sliding mechanism; 9. a fixed seat; 901. a left beveled region; 902. a right beveled region; 903. a base body; 904. a fixed block; 10. a V-shaped channel; 11. a left bearing; 12. a right bearing; 13. a clamping bar; 131. a boss portion; 14. an arc-shaped rack; 15. a connecting rod; 16. a gear; 17. a spring.
Detailed Description
In the description of this patent, it is noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in this patent may be specifically understood by those of ordinary skill in the art.
Example 1: an automated semiconductor chip processing apparatus comprising: the device comprises a base 1, a first motor 2, a horizontal sliding table 3, an adapter plate 4, a second motor 5 and a suction nozzle rod 6, wherein the first motor 2, the horizontal sliding table 3, the adapter plate 4, the second motor 5 and the suction nozzle rod 6 are vertically arranged on the base 1, the horizontal sliding table 3 is positioned between an upper end plate 101 of the base 1 and a lower end plate 401 of the adapter plate 4, the second motor 5 is fixed on a base plate 7, the base plate 7 is connected with the adapter plate 4 through a Z-axis sliding mechanism 8, and an output shaft of the second motor 5 is connected with the Z-axis sliding mechanism 8;
a fixed seat 9 positioned below the first motor 2 is installed on the base 1, the left and right sides on the front end surface of the fixed seat 9 are respectively provided with a left inclined surface area 901 and a right inclined surface area 902, at least 2 pairs of bearings are installed on the front end surface of the fixed seat 9, the left bearing 11 in each pair of bearings is arranged on the left inclined surface area 901 of the fixed seat 9 at intervals along the vertical direction, the right bearing 12 in each pair of bearings is arranged on the right inclined surface area 902 of the fixed seat 9 at intervals along the vertical direction, so that a V-shaped channel 10 is formed between the left bearing 11 and the right bearing 12 in each pair of bearings, and the nozzle rod 6 is positioned in the V-shaped channel 10 of at least 2 pairs of bearings;
a clamping strip 13 and an arc-shaped rack 14 are arranged above the fixed seat 9, the front end of the clamping strip 13 is connected with the upper end of the suction nozzle rod 6 in a clamping manner, the rear end of the clamping strip 13 is connected with the arc-shaped rack 14 through a connecting rod 15, the arc-shaped rack 14 is meshed and connected with a gear 16 on an output shaft of the first motor 2, and the circle center of the arc-shaped rack 14 is overlapped with the axis of the suction nozzle rod 6;
the two ends of a spring 17 are respectively connected with the respective side surfaces of the upper parts of the clamping strip 13 and the fixed seat 9, one end of the spring 17 is close to the arc-shaped rack 14 and is positioned below the arc-shaped rack 14, the other end of the spring 17 is connected to one end, far away from the arc-shaped rack 14, of the clamping strip 13, and one end, connected with the clamping strip 13, of the spring 17 is higher than the other end of the spring.
The link 15 is connected to the middle of the arc-shaped rack 14.
The fixing base 9 further includes a base 903 and a fixing block 904, the base 903 is connected to the base 1, and the fixing block 904 is mounted on the base 903.
Example 2: an automated processing apparatus for semiconductor chips, comprising: the device comprises a base 1, a first motor 2, a horizontal sliding table 3, an adapter plate 4, a second motor 5 and a suction nozzle rod 6, wherein the first motor 2, the horizontal sliding table 3, the adapter plate 4, the second motor 5 and the suction nozzle rod 6 are vertically arranged on the base 1, the horizontal sliding table 3 is positioned between an upper end plate 101 of the base 1 and a lower end plate 401 of the adapter plate 4, the second motor 5 is fixed on a base plate 7, the base plate 7 is connected with the adapter plate 4 through a Z-axis sliding mechanism 8, and an output shaft of the second motor 5 is connected with the Z-axis sliding mechanism 8;
a fixed seat 9 positioned below the first motor 2 is installed on the base 1, the left and right sides on the front end surface of the fixed seat 9 are respectively provided with a left inclined surface area 901 and a right inclined surface area 902, at least 2 pairs of bearings are installed on the front end surface of the fixed seat 9, the left bearing 11 in each pair of bearings is arranged on the left inclined surface area 901 of the fixed seat 9 at intervals along the vertical direction, the right bearing 12 in each pair of bearings is arranged on the right inclined surface area 902 of the fixed seat 9 at intervals along the vertical direction, so that a V-shaped channel 10 is formed between the left bearing 11 and the right bearing 12 in each pair of bearings, and the nozzle rod 6 is positioned in the V-shaped channel 10 of at least 2 pairs of bearings;
a clamping strip 13 and an arc-shaped rack 14 are arranged above the fixed seat 9, the front end of the clamping strip 13 is connected with the upper end of the suction nozzle rod 6 in a clamping manner, the rear end of the clamping strip 13 is connected with the arc-shaped rack 14 through a connecting rod 15, the arc-shaped rack 14 is meshed and connected with a gear 16 on an output shaft of the first motor 2, and the circle center of the arc-shaped rack 14 is overlapped with the axis of the suction nozzle rod 6;
the two ends of a spring 17 are respectively connected with the respective side surfaces of the upper parts of the clamping strip 13 and the fixed seat 9, one end of the spring 17 is close to the arc-shaped rack 14 and is positioned below the arc-shaped rack 14, the other end of the spring 17 is connected to one end, far away from the arc-shaped rack 14, of the clamping strip 13, and one end, connected with the clamping strip 13, of the spring 17 is higher than the other end of the spring.
The fixing base 9 further includes a base 903 and a fixing block 904, the base 903 is connected to the base 1, and the fixing block 904 is mounted on the base 903.
The first motor 2 and the second motor 5 are respectively positioned at two sides of the adapter plate 4.
The lower surface of the holding bar 13 has a protrusion 131 contacting the upper surface of the fixing base 9.
When the automatic processing device for the semiconductor chip is adopted, on the basis of realizing the horizontal and vertical conveying of the chip, the gear on the output shaft of the first motor rotates forwards or reversely to drive the arc-shaped rack to rotate forwards or reversely correspondingly, so that the angle adjusting range is enlarged to +/-45 degrees, the angle adjusting requirements of various situations are met, and the mounting application situation is expanded;
furthermore, the arc-shaped rack also drives the connecting rod and the clamping strip to correspondingly rotate, the circle center of the arc-shaped rack is overlapped with the axis of the suction nozzle rod, and the suction nozzle rod is positioned in the clamping channel of at least 2 pairs of bearings, so that the suction nozzle rod rotates around the axis of the suction nozzle rod under the positioning of the left bearing and the right bearing, the side pressure of the left bearing and the right bearing is avoided, the positioning deviation after a large number of chips are repeatedly sucked is avoided, and the stability of precision is still kept after long-time high-frequency use;
furthermore, the two ends of a spring are respectively connected with the clamping strip and the respective side surface of the upper part of the fixed seat, one end of the spring connected with the clamping strip is higher than the other end of the spring, one end of the spring is close to the arc-shaped rack and is positioned below the arc-shaped rack, the other end of the spring is connected with one end of the clamping strip far away from the arc-shaped rack, the tension part of the spring is converted into torsion, the gears on the output shaft of the first motor are ensured to be in gapless contact with the teeth of the gears no matter the gears of the forward rotation arc-shaped rack or the reverse rotation arc-shaped rack are in gapless contact, and the gaps between the teeth are eliminated, so that the pulse number of the first motor can be accurately calculated according to the angle to be adjusted, the rotating angles of the actual gears and the suction nozzle rod are consistent with the rotating angle expected by the pulse, and the precision of angle calculation and adjustment is improved.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.

Claims (5)

1. An automatic processing device of semiconductor chip which is characterized in that: the method comprises the following steps: the device comprises a base (1), a first motor (2), a horizontal sliding table (3), an adapter plate (4), a second motor (5) and a suction nozzle rod (6), wherein the first motor (2), the horizontal sliding table (3), the adapter plate (4), the second motor (5) and the suction nozzle rod (6) are vertically arranged on the base (1), the horizontal sliding table (3) is positioned between an upper end plate (101) of the base (1) and a lower end plate (401) of the adapter plate (4), the second motor (5) is fixed on a base plate (7), the base plate (7) is connected with the adapter plate (4) through a Z-axis sliding mechanism (8), and an output shaft of the second motor (5) is connected with the Z-axis sliding mechanism (8);
a fixed seat (9) positioned below the first motor (2) is arranged on the base (1), the left side and the right side on the front end surface of the fixed seat (9) are respectively provided with a left inclined surface area (901) and a right inclined surface area (902), at least 2 pairs of bearings are arranged on the front end surface of the fixed seat (9), the left bearing (11) in each pair of bearings is arranged on the left inclined surface area (901) of the fixed seat (9) at intervals along the vertical direction, the right bearing (12) in each pair of bearings is arranged on the right inclined surface area (902) of the fixed seat (9) at intervals along the vertical direction, so that a V-shaped channel (10) is formed between the left bearing (11) and the right bearing (12) in each pair of bearings, and the nozzle rod (6) is positioned in the V-shaped channel (10) of at least 2 pairs of bearings;
a clamping strip (13) and an arc-shaped rack (14) are arranged above the fixed seat (9), the front end of the clamping strip (13) is connected with the upper end of the suction nozzle rod (6) in a clamping manner, the rear end of the clamping strip (13) is connected with the arc-shaped rack (14) through a connecting rod (15), the arc-shaped rack (14) is meshed and connected with a gear (16) on an output shaft of the first motor (2), and the circle center of the arc-shaped rack (14) is overlapped with the axis of the suction nozzle rod (6);
the two ends of a spring (17) are respectively connected with the respective side faces of the upper parts of the clamping strip (13) and the fixing seat (9), one end of the spring (17) is close to the arc-shaped rack (14) and is positioned below the arc-shaped rack (14), the other end of the spring is connected to one end, far away from the arc-shaped rack (14), of the clamping strip (13), and one end, connected with the clamping strip (13), of the spring (17) is higher than the other end of the spring.
2. The automated semiconductor chip processing apparatus of claim 1, wherein: the connecting rod (15) is connected to the middle of the arc-shaped rack (14).
3. The automated semiconductor chip processing apparatus of claim 1, wherein: the fixing seat (9) further comprises a seat body (903) and a fixing block (904), the seat body (903) is connected with the base (1), and the fixing block (904) is installed on the seat body (903).
4. The automated processing apparatus for semiconductor chips of claim 1, wherein: the first motor (2) and the second motor (5) are respectively positioned on two sides of the adapter plate (4).
5. The automated semiconductor chip processing apparatus of claim 1, wherein: the lower surface of the clamping strip (13) is provided with a convex part (131) which is contacted with the upper surface of the fixed seat (9).
CN202122560132.8U 2021-10-22 2021-10-22 Automatic processing device for semiconductor chip Active CN216597539U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122560132.8U CN216597539U (en) 2021-10-22 2021-10-22 Automatic processing device for semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122560132.8U CN216597539U (en) 2021-10-22 2021-10-22 Automatic processing device for semiconductor chip

Publications (1)

Publication Number Publication Date
CN216597539U true CN216597539U (en) 2022-05-24

Family

ID=81640216

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122560132.8U Active CN216597539U (en) 2021-10-22 2021-10-22 Automatic processing device for semiconductor chip

Country Status (1)

Country Link
CN (1) CN216597539U (en)

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Address after: Building 5, No. 1508, Xiangjiang Road, Suzhou High-tech Zone, Suzhou City, Jiangsu Province 215129

Patentee after: Suzhou Lianxun Instrument Co.,Ltd.

Address before: 215011 Building 5, no.1508 Xiangjiang Road, high tech Zone, Suzhou City, Jiangsu Province

Patentee before: STELIGHT INSTRUMENT Inc.