CN214199930U - Target subassembly size detection anchor clamps - Google Patents
Target subassembly size detection anchor clamps Download PDFInfo
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- CN214199930U CN214199930U CN202120393737.XU CN202120393737U CN214199930U CN 214199930 U CN214199930 U CN 214199930U CN 202120393737 U CN202120393737 U CN 202120393737U CN 214199930 U CN214199930 U CN 214199930U
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Abstract
The utility model provides a target assembly size detection clamp, the main structure of the detection clamp is a flat plate provided with a groove, the groove is composed of a middle circular groove and two extension grooves respectively arranged at the radial two ends of the middle circular groove, the overlapped part of the middle circular groove and the extension grooves is directly communicated to form a whole groove; the mounting surface of the back plate in the target assembly is downwards arranged in the groove. The detection clamp of the utility model can rapidly detect whether the excircle diameter of the back plate in the target material component is qualified or not through simple structural design, thereby avoiding the problem of inaccurate detection easily caused by local deformation and ensuring the precision of back plate diameter detection and the product percent of pass; due to the structural design of the groove, the target assembly is convenient to place and take out, and the operation of target assembly detection is simplified; the detection clamp is simple in structure, is not easy to damage the target assembly, and has wide application prospect.
Description
Technical Field
The utility model belongs to the technical field of the target processing, a target subassembly size detection anchor clamps is related to.
Background
With the rapid development of the semiconductor industry, the demand of coating materials as important materials for manufacturing semiconductor electronic devices is increasing. The target material is used as an important coating material and has wide application in the fields of integrated circuits, flat panel displays, solar energy, optical devices and the like, and the main preparation method is a physical vapor deposition method, most commonly used is a sputtering coating method.
The target has high requirements on the size of the target in the sputtering coating process, so that the size of the target, particularly the diameter size of an excircle, needs to be accurately controlled in the target processing process, the last process for ensuring the qualified size is a size detection process, and the excircle of a target product is detected by using detection equipment so as to better ensure the size of the product and prevent the problem of unqualified size; at present, three points of a three-coordinate device are usually used for constructing a circle for detection, but the method is easy to have the problem of inaccurate detection, for example, a certain part on the circumference of a product is deformed so that real data of the diameter of an outer circle cannot be detected, so that the detection device and the detection method need to be improved.
CN 202793347U discloses a target detection clamp, comprising: a base; the positioning part is arranged on the base and provided with a groove, the opening direction of the groove is opposite to the base, the shape of the side wall of the groove is matched with that of the side surface of the target to be detected, and when the target to be detected is placed in the groove, part of the side surface of the target to be detected is attached to the side wall of the groove; the protection part comprises a first protection part and a second protection part, the first protection part is arranged on one side of the sputtering surface of the target to be detected, and the second protection part is arranged on one side opposite to the sputtering surface of the target to be detected, so that the target to be detected arranged in the groove is prevented from laterally falling. The structure of the target detection clamp is mainly used for accurately measuring the size of the installation bolt, and the target is prevented from being damaged easily when being clamped, so that the measurement of the diameter size of the target is not involved.
CN 209239838U discloses target detects uses anchor clamps, including first support, first cylinder, first piston rod, second support, third support, second cylinder, second piston rod, first piston rod upper end is connected with the backup pad, be equipped with the spout on the second support, the backup pad both ends be fixed with spout assorted slider, the upper fixed block is connected to second piston rod lower extreme, the terminal surface is equipped with the arc upper groove under the upper fixed block, the third support below be equipped with the base in the backup pad, be equipped with the locating piece on the base, be equipped with the arc constant head tank on the locating piece, locating piece both sides inner wall is equipped with the grafting track, upper fixed block both sides outer wall be equipped with grafting track assorted inserting groove, the upper groove with all be equipped with anti-skidding piece on the constant head tank. The detection clamp is also used for positioning the target in the detection process, so that the target is prevented from shaking in the detection process, but the detection parameters of the target are not determined, and the device is complex in structure and not beneficial to rapid and convenient detection.
In summary, for the detection fixture for the size of the target assembly, especially for the detection of the diameter size, the detection assembly or the fixture with a proper structure needs to be selected, so that the sizes of the target and the backing plate can be accurately detected, the target product can be prevented from being damaged or deformed, and the product quality can be ensured.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the utility model aims to provide a target subassembly size detects anchor clamps, detect anchor clamps through simple structural design, can the short-term test target subassembly in the excircle diameter size of backplate qualified, avoid because of the easy inaccurate problem of detection that causes of backplate local deformation, can avoid the conventional target subassembly that causes easily of examining time measuring to damage or the problem of deformation simultaneously, guarantee the precision and the quality of target product.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a target assembly size detection clamp, the main structure of the target assembly size detection clamp is a flat plate provided with a groove, the groove is composed of a middle circular groove and two extension grooves respectively arranged at the radial two ends of the middle circular groove, the overlapped part of the middle circular groove and the extension grooves is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
The utility model discloses in, the detection of target and backplate size is the qualified important process of one of assurance target product, and based on the effect of backplate in target sputtering, the structure of its installation face one side is usually not solid structure, but the hollow cylinder that forms by the ring, and the current check out test set often is not high to this part's detection accuracy nature, therefore the utility model provides a detection anchor clamps, through setting up the recess that is close with backplate diameter size to control the size of recess, thereby can detect the size of backplate installation face under this size, through the design to groove structure, make things convenient for placing and taking out of target subassembly simultaneously; the detection clamp is simple in structure, convenient and fast to detect and operate, high in size detection precision of the target assembly, not prone to damage of the target assembly and wide in application prospect.
Following conduct the utility model discloses preferred technical scheme, nevertheless do not conduct the utility model provides a technical scheme's restriction, through following technical scheme, can reach and realize better the utility model discloses a technical purpose and beneficial effect.
As the utility model discloses preferred technical scheme, it is whole circular to be established the notched dull and stereotyped, dull and stereotyped edge is equipped with the round arch.
The utility model discloses in, the major structure that detects anchor clamps is the recess, and the recess sets up on dull and stereotyped, according to the common shape of target backplate and recess, dull and stereotyped shape also usually rather than the phase-match, and in order to avoid the stained that probably causes recess and target subassembly, is equipped with the round arch at dull and stereotyped outside edge, is a recess in all respects, is convenient for to the protection of target product, the dull and stereotyped holistic removal of also being convenient for.
As the preferred technical scheme of the utility model, the material of dull and stereotyped material is the same with the material of backplate in the target subassembly.
The utility model discloses in, because the target requires highly to the purity when using, therefore avoid reducing the contact with other materials as far as possible in each step of operation of target processing, therefore the dull and stereotyped material of preference is the same with the backplate that waits to detect the target subassembly of direct contact.
As the utility model discloses preferred technical scheme, the extension tank of middle part circular recess both sides is symmetrical about the circular recess in middle part.
As the preferred technical scheme of the utility model, the shape of extension groove is square.
In a preferred embodiment of the present invention, the length or width of the extension groove is 1/5 to 1/2, such as 1/5, 1/4, 3/10, 1/3, 2/5, 9/20, or 1/2, which are independent of the diameter of the central circular groove, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
The utility model discloses in, the setting of extending groove is mainly for the convenience of placing and taking out of target subassembly, consequently sets up an extending groove respectively at the radial both ends of circular recess, the size of extending groove is relevant with the size of target subassembly and circular recess, should satisfy the manual work of being convenient for at least and take.
As the utility model discloses preferred technical scheme, the diameter of the installation face of backplate is not more than the diameter of middle part circular recess.
As the utility model discloses preferred technical scheme, there is round ring shape arch the side of backplate, the bellied diameter of ring shape is greater than the diameter of middle part circular recess.
As the utility model discloses preferred technical scheme, the distance between the protruding and backplate installation face of ring shape is less than the degree of depth of middle part circular recess.
In the utility model, in order to facilitate the accurate detection of the diameter of the backboard, the diameter of the backboard mounting surface is preferably consistent with that of the middle circular groove, and if the diameter of the backboard is too small, the accuracy of the size detection is not achieved; and according to the structure side of the backboard, a circle of annular bulge with the diameter larger than that of the installation surface is arranged, the annular bulge can be erected on the groove at the moment, the problem that the backboard is completely embedded into the groove and is in direct contact with the bottom of the groove is solved, and meanwhile, the distance between the annular bulge and the backboard installation surface and the depth of the groove are limited, so that the backboard installation surface is controlled not to be in direct contact with the bottom of the groove.
Compared with the prior art, the utility model discloses following beneficial effect has:
(1) the detection clamp of the utility model can rapidly detect whether the excircle diameter of the back plate in the target assembly is qualified or not through simple structural design, thereby avoiding the problem of inaccurate detection easily caused by local deformation, ensuring the diameter detection precision of the target assembly and ensuring the qualification rate of products to be more than 98%;
(2) the structural design of the groove of the utility model facilitates the placement and the taking out of the target component, and simplifies the operation of the detection of the target component;
(3) detect anchor clamps simple structure, detect the simple operation, and be difficult for causing the damage of target subassembly, have wide application prospect.
Drawings
Fig. 1 is a schematic top view of a target assembly dimension detection fixture provided in embodiment 1 of the present invention;
fig. 2 is a front cross-sectional view of a target assembly size detection fixture provided in embodiment 1 of the present invention;
wherein, 1-flat plate, 2-middle circular groove, and 3-extending groove.
Detailed Description
To better explain the technical solution of the present invention, it is convenient to understand the technical solution of the present invention, and the following is further detailed description of the present invention, but the following embodiments are only simple examples of the present invention, and do not represent or limit the protection scope of the present invention, and the protection scope of the present invention is subject to the claims.
The utility model provides a target assembly size detection clamp, the main structure of the target assembly size detection clamp is a flat plate 1 provided with a groove, the groove is composed of a middle circular groove 2 and two extension grooves 3 respectively arranged at the radial two ends of the middle circular groove 2, the overlapped part of the middle circular groove 2 and the extension grooves 3 is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
The following are typical but non-limiting examples of the present invention:
example 1:
the embodiment provides a target assembly size detection clamp, a schematic view of a top view structure of the target assembly size detection clamp is shown in fig. 1, a front view cross-sectional view is shown in fig. 2, a main body structure of the detection clamp is a flat plate 1 provided with a groove, the groove is composed of a middle circular groove 2 and two extension grooves 3 respectively arranged at two radial ends of the middle circular groove 2, and a part of the middle circular groove 2, which is overlapped with the extension grooves 3, is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
The flat plate 1 with the groove is integrally circular, and a circle of bulges are arranged on the edge of the flat plate 1.
The flat plate 1 and the back plate in the target assembly are both made of aluminum.
The extending grooves 3 on two sides of the middle circular groove 2 are symmetrical about the middle circular groove 2.
The shape of the extension groove 3 is rectangular, the length of the extension groove 3 is 1/4 of the diameter of the middle circular groove 2, and the width of the extension groove 3 is 1/5 of the diameter of the middle circular groove 2.
The diameter of the mounting surface of the back plate is equal to that of the middle circular groove 2.
The side of backplate has round annular arch, the bellied diameter of annular is greater than the diameter of middle part circular recess 2, the bellied diameter of annular is 1.1 times of middle part circular recess 2 diameter.
The distance between the circular ring-shaped bulge and the backboard installation surface is less than the depth of the middle circular groove 2, and the distance is 80% of the depth of the middle circular groove 2.
Example 2:
the embodiment provides a target assembly size detection clamp, the main structure of the target assembly size detection clamp is a flat plate 1 provided with a groove, the groove is composed of a middle circular groove 2 and two extension grooves 3 respectively arranged at two radial ends of the middle circular groove 2, and the overlapped part of the middle circular groove 2 and the extension grooves 3 is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
The flat plate 1 with the groove is integrally circular, and a circle of bulges are arranged on the edge of the flat plate 1.
The flat plate 1 and the back plate in the target assembly are both made of copper.
The extending grooves 3 on two sides of the middle circular groove 2 are symmetrical about the middle circular groove 2.
The shape of the extension groove 3 is rectangular, the length of the extension groove 3 is 1/2 of the diameter of the middle circular groove 2, and the width of the extension groove 3 is 2/5 of the diameter of the middle circular groove 2.
The diameter of the mounting surface of the back plate is equal to that of the middle circular groove 2.
The side of backplate has round annular arch, the bellied diameter of annular is greater than the diameter of middle part circular recess 2, the bellied diameter of annular is 1.05 times of middle part circular recess 2 diameter.
The distance between the circular ring-shaped bulge and the backboard installation surface is less than the depth of the middle circular groove 2, and the distance is 60% of the depth of the middle circular groove 2.
Example 3:
the embodiment provides a target assembly size detection clamp, the main structure of the target assembly size detection clamp is a flat plate 1 provided with a groove, the groove is composed of a middle circular groove 2 and two extension grooves 3 respectively arranged at two radial ends of the middle circular groove 2, and the overlapped part of the middle circular groove 2 and the extension grooves 3 is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
The flat plate 1 with the groove is integrally circular, and a circle of bulges are arranged on the edge of the flat plate 1.
The flat plate 1 and the back plate in the target material assembly are both made of aluminum-silicon alloy.
The extending grooves 3 on two sides of the middle circular groove 2 are symmetrical about the middle circular groove 2.
The shape of the extension groove 3 is square, and the side length of the extension groove 3 is 1/3 of the diameter of the middle circular groove 2.
The diameter of the mounting surface of the back plate is 0.2mm smaller than that of the middle circular groove 2.
The side of backplate has round annular arch, the bellied diameter of annular is greater than the diameter of middle part circular recess 2, the bellied diameter of annular is 1.15 times of middle part circular recess 2 diameter.
The distance between the circular ring-shaped bulge and the backboard installation surface is less than the depth of the middle circular groove 2, and the distance is 50% of the depth of the middle circular groove 2.
When the target assembly size detection clamp in the embodiment is adopted to detect the diameter size of the back plate, firstly, a detection clamp with a proper size is selected, namely, the detection clamp with the diameter of the middle circular groove 2 matched with the theoretical size of the back plate mounting surface and the detection clamp with the same material is held by a hand, the back plate mounting surface is downwards arranged on the middle circular groove 2 part of the detection clamp, and if a target assembly product can be embedded into the clamp, the diameter size of the target assembly product is qualified.
It can be seen from the above embodiments that, the detection clamp of the present invention can rapidly detect whether the outer diameter of the back plate in the target assembly is qualified or not through a simple structural design, thereby avoiding the problem of inaccurate detection easily caused by local deformation, ensuring the precision of the back plate diameter detection, and the qualification rate of the product can reach more than 98%; due to the structural design of the groove, the target assembly is convenient to place and take out, and the operation of target assembly detection is simplified; the detection clamp is simple in structure, convenient and fast to detect and operate, not prone to damage of the target assembly and wide in application prospect.
The applicant states that the present invention is described in the above embodiments, but the present invention is not limited to the above detailed device, i.e. the present invention must not be implemented by relying on the above detailed device. It should be clear to those skilled in the art that any improvement of the present invention, to the addition of the equivalent replacement and auxiliary devices of the present invention, the selection of the specific mode, etc., all fall within the scope of protection and disclosure of the present invention.
Claims (9)
1. A target assembly size detection clamp is characterized in that a main body structure of the target assembly size detection clamp is a flat plate provided with a groove, the groove is composed of a middle circular groove and two extension grooves respectively arranged at two radial ends of the middle circular groove, and the overlapped part of the middle circular groove and the extension grooves is directly communicated to form a whole groove; the target assembly comprises a target and a back plate which are fixedly welded, and the mounting surface of the back plate is downwards arranged in the groove.
2. The target assembly size detection fixture of claim 1, wherein the grooved flat plate is circular as a whole, and a circle of protrusions are formed on the edge of the flat plate.
3. The target assembly dimension detection fixture of claim 1, wherein the flat plate is made of the same material as a backing plate of the target assembly.
4. The target assembly size detection fixture of claim 1, wherein the extension slots on both sides of the central circular groove are symmetrical about the central circular groove.
5. The target assembly sizing fixture of claim 1, wherein the extension slot is square in shape.
6. The target assembly dimension detection fixture of claim 5, wherein the length or width of the extension slot is independently 1/5-1/2 of the diameter of the central circular groove.
7. The target assembly dimension detection fixture of claim 1, wherein a diameter of the mounting surface of the backing plate is not greater than a diameter of the central circular groove.
8. The target assembly size detection fixture of claim 1, wherein a circle of circular protrusion is formed on a side surface of the back plate, and the diameter of the circular protrusion is larger than that of the circular groove in the middle.
9. The target assembly size detection fixture of claim 8, wherein a distance between the circular protrusion and the back plate mounting surface is less than a depth of the middle circular groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120393737.XU CN214199930U (en) | 2021-02-22 | 2021-02-22 | Target subassembly size detection anchor clamps |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120393737.XU CN214199930U (en) | 2021-02-22 | 2021-02-22 | Target subassembly size detection anchor clamps |
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| Publication Number | Publication Date |
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| CN214199930U true CN214199930U (en) | 2021-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120393737.XU Active CN214199930U (en) | 2021-02-22 | 2021-02-22 | Target subassembly size detection anchor clamps |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485325A (en) * | 2022-02-17 | 2022-05-13 | 宁波江丰电子材料股份有限公司 | Target hole site installation detection tool and detection method |
| CN115031599A (en) * | 2022-03-31 | 2022-09-09 | 宁波江丰电子材料股份有限公司 | Detection device and detection method for target fittings |
-
2021
- 2021-02-22 CN CN202120393737.XU patent/CN214199930U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485325A (en) * | 2022-02-17 | 2022-05-13 | 宁波江丰电子材料股份有限公司 | Target hole site installation detection tool and detection method |
| CN115031599A (en) * | 2022-03-31 | 2022-09-09 | 宁波江丰电子材料股份有限公司 | Detection device and detection method for target fittings |
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