CN114485325A - Target hole site installation detection tool and detection method - Google Patents
Target hole site installation detection tool and detection method Download PDFInfo
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- CN114485325A CN114485325A CN202210144585.9A CN202210144585A CN114485325A CN 114485325 A CN114485325 A CN 114485325A CN 202210144585 A CN202210144585 A CN 202210144585A CN 114485325 A CN114485325 A CN 114485325A
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- 238000001514 detection method Methods 0.000 title claims abstract description 216
- 238000009434 installation Methods 0.000 title claims abstract description 17
- 239000013077 target material Substances 0.000 claims abstract description 70
- 239000010935 stainless steel Substances 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/08—Measuring arrangements characterised by the use of mechanical techniques for measuring diameters
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Abstract
The invention provides a mounting detection tool and a detection method for target hole sites, wherein the mounting detection tool comprises a detection tool body and a detection tool bolt which are independently arranged; the gauge body is of a circular ring structure, a through hole is formed in the middle position of the gauge body, a plurality of cylindrical bulges are arranged on the gauge body, the number of the cylindrical bulges is the same as that of the standard holes of the target material, and the cylindrical bulges are correspondingly inserted into the hole positions of the target material; the detection tool bolt is of a cylindrical structure, bolt heads are arranged at two ends of the detection tool bolt, the diameter of the bolt head at one end is larger than that of the target hole, and the diameter of the bolt head at the other end is smaller than that of the target hole. According to the structure and distribution of the hole sites in the target material to be detected, the corresponding mounting detection tool is designed, the cylindrical bulge on the detection tool main body is convenient for detecting whether the position of the hole on the target material is proper or not, the bolt of the detection tool is used for detecting whether the diameter of the hole on the target material is proper or not, the detection speed is high, the accuracy is high, and the matching performance is good when the detection tool is mounted; the installation detection tool is simple in structure, the detection method is simple and convenient to operate, and the cost is low.
Description
Technical Field
The invention belongs to the technical field of semiconductor product detection, and relates to a target hole site installation detection tool and a detection method.
Background
Semiconductor chips are the foundation of modern electronic industry, are the basic components for manufacturing silicon semiconductor circuits, and with the continuous development of semiconductor technology, the requirements for the quality of chips are gradually increased, so that higher requirements are also required for the production and processing processes of the chips. The sputtering target material is used as a raw material for chip preparation, and the target material needs to be fixed on a sputtering machine table for magnetron sputtering operation in the chip preparation process, so that the size of a hole site for fixing the target material is particularly important for ensuring the stability and safety of sputtering. If the hole position angle and the hole diameter are not matched with the sputtering machine, the target cannot be stably installed on the machine. Therefore, it is necessary to detect the hole site size of the sputtering target.
At present, size detection is needed after the primary processing of the target material is completed, wherein hole site detection is an important item, and in the prior art, a three-coordinate measuring machine is usually adopted to detect the hole site size of the target material so as to detect whether the angle and the size of each hole site meet the requirements or not; however, for some targets with special structures, the number of hole sites is large, the detection rate of the three-coordinate measuring machine is low, and the error rate during detection is high because the hole diameter is not a single size, so that a special hole site detection tool needs to be designed to improve the hole site detection efficiency of a specific target.
CN 108592734A discloses utensil is examined to hole site, and this utensil is examined to hole site includes: the detection ring is provided with a plurality of detection holes corresponding to the threaded holes of the standard SRH420 target at intervals, and the inner diameter of the detection ring is larger than the diameter of the aluminum cylinder of the standard target; and the fixing pieces correspond to the detection holes, the number of the fixing pieces is more than or equal to that of the detection holes, and when the hole site detection tool is used for detecting the target material, the detection holes and the corresponding threaded holes are fixed through the fixing pieces, so that whether the target material to be detected is qualified is judged.
CN 108507438A discloses utensil is examined to hole site, should examine the utensil and include: the detection ring is provided with a plurality of first detection holes corresponding to the first threaded holes of the standard ILC1060 target material and a plurality of second detection holes corresponding to the second threaded holes of the standard ILC1060 target material at intervals; and when the hole site detection tool is used for detecting the target material, each first detection hole and the corresponding first threaded hole are fixed through the first fixing piece, and each second detection hole and the corresponding second threaded hole are fixed through the second fixing piece.
The hole site in the above-mentioned patent examines the utensil and is used for detecting whether the position of hole is suitable on the target, but can't detect whether the size in aperture is suitable, and sets up the inspection hole on detecting the ring, and is the hole on the target equally, and both's matching nature is not enough.
Therefore, for the detection of the hole site in the target, a proper detection tool is required to be designed according to the structure of the target, so that the hole site detection can be completed quickly and accurately, the rework is reduced, the cost is reduced, and the use requirement is better met.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a mounting detection tool and a detection method for target hole sites, wherein the mounting detection tool is designed according to the structure of a target to be detected, and is divided into a detection tool main body and a detection tool bolt, the position and the size of a hole in the target are respectively detected, the detection speed is high, the accuracy is high, the matching performance is good when the mounting detection tool is mounted on a sputtering machine table, the rework operation during the application of the target is reduced, and the cost is reduced.
In order to achieve the purpose, the invention adopts the following technical scheme:
on one hand, the invention provides a mounting detection tool for target hole sites, which comprises a detection tool body and a detection tool bolt, wherein the detection tool body and the detection tool bolt are independently arranged;
the target is arranged on the gauge body, and the cylindrical bulges on the gauge body are correspondingly inserted into the hole sites of the target;
the detection tool bolt is of a cylindrical structure, bolt heads are arranged at two ends of the detection tool bolt, the diameter size of each bolt head is smaller than the size of the middle position of the detection tool bolt, the diameter sizes of the bolt heads at the two ends are different, the diameter of the bolt head at one end is larger than that of the target standard hole, and the diameter of the bolt head at the other end is smaller than that of the target standard hole.
In the invention, because the target needs to be installed on a sputtering machine table during sputtering, the smooth installation process is ensured, and the high accuracy of the sizes of hole sites on the target needs to be ensured, so that the size detection is needed after the target is molded, in the invention, according to the structure of the target to be detected, particularly the structure and the distribution of the hole sites therein, a corresponding installation detection tool is designed and divided into a detection tool main body and a detection tool bolt, the basic structure of the detection tool main body is matched with the target, particularly, a cylindrical bulge is arranged on the surface to be matched with a standard hole on the target, so that whether the position of the hole on the target is proper or not is conveniently detected, and through the structural design of the detection tool bolt, whether the diameter size of the hole on the target is proper or not is detected, so that the comprehensive detection of the hole sites on the target is realized, whether the processed target is proper or not can be found in time, the reprocessing can be carried out in time, and the problem that the subsequent installation on the sputtering machine table is difficult to match is avoided, the detection speed is high, and the accuracy is high; the installation detection tool is simple in structure, the detection method is simple and convenient to operate, time is saved, cost is reduced, and customer satisfaction is improved.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
In a preferred embodiment of the present invention, the diameter of the through hole in the gauge body is 80 to 90% of the diameter of the gauge body, for example, 80%, 82%, 84%, 85%, 86%, 88%, or 90%, but the diameter is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
Preferably, the diameter of the circumference of the cylindrical protrusion is 90-95% of the diameter of the gauge body, such as 90%, 91%, 92%, 93%, 94% or 95%, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the height of the cylindrical protrusions is the same.
Preferably, the position of the cylindrical protrusion corresponds to the position of the standard hole on the target.
Preferably, the diameter of the cylindrical protrusion is smaller than that of the standard hole at the corresponding position on the target.
As a preferable technical scheme, a ring of annular bulge is arranged at the edge of the checking fixture body to form an annular side wall.
Preferably, the height of the annular sidewall is 2 to 3.5 times, such as 2 times, 2.4 times, 2.7 times, 3 times, 3.2 times, or 3.5 times, etc., the height of the cylindrical protrusion, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, openings are symmetrically arranged on the annular side wall, and the positions of the openings are uniformly distributed.
Preferably, the number of the openings is two or four.
In the invention, the annular side wall is mainly used for limiting the maximum excircle of the product and ensuring the accuracy of the diameter of the target material, and the opening is formed in the annular side wall, so that the target material can be conveniently placed and taken out, and the operation difficulty is reduced; the inner diameter of the annular sidewall needs to be slightly larger than the size of the target so that the target can be placed in the area enclosed by the annular sidewall.
As a preferred technical solution of the present invention, the types of the standard holes on the target material are classified according to the hole diameter.
Preferably, the types and the number of the standard holes in the target material are the same as the number of the check tool pins, and one type of standard holes corresponds to one check tool pin.
Preferably, the material of the mounting detection tool comprises stainless steel, and is preferably the same as that of the target material.
In the invention, the check tool bolt is mainly used for detecting the size of the aperture, so that the size of the aperture needs to be matched with the type of the hole, and one type of hole corresponds to one check tool bolt and is selected according to the actual requirement of the target.
As a preferred technical scheme, the check tool bolt at least comprises three stepped cylindrical sections, namely a middle section of the check tool bolt and bolt heads at two ends of the check tool bolt.
Preferably, the diameter of the standard hole on the target material is 9.02-9.22 mm, such as 9.02mm, 9.05mm, 9.08mm, 9.10mm, 9.12mm, 9.15mm, 9.18mm, 9.2mm, 9.22mm and the like, the diameter of the corresponding plug head at one end is 0.01-0.05 mm, such as 0.01mm, 0.02mm, 0.03mm, 0.04mm or 0.05mm and the diameter of the plug head at the other end is 0.01-0.05 mm, such as 0.01mm, 0.02mm, 0.03mm, 0.04mm or 0.05mm and the like smaller than the diameter of the standard hole; however, the numerical values recited are not intended to be limiting, and other numerical values not recited within the respective numerical ranges are also applicable.
In the invention, the size of the plug pin head in the plug pin of the checking tool is not suitable to be selected to have larger difference with the size of a standard hole, otherwise, the size detection of the hole diameter is easy to be inaccurate.
As a preferred technical scheme of the invention, when the standard hole on the target comprises a stepped hole, the plug pin head of the plug pin of the checking fixture is correspondingly designed into a stepped cylindrical section.
Preferably, when the stepped hole is of a structure with a large upper diameter and a small lower diameter, the check tool bolt comprises five sections, and the diameters of the five sections are reduced from the middle section to the two sides in a stepped manner.
In the invention, the single-diameter hole in the standard hole on the target material is a through hole, while the stepped hole comprises two or more sections, for example, the counter bore is matched with the through hole, the counter bore is a large-diameter hole, and the through hole is a small-diameter hole in the counter bore.
On the other hand, the invention provides a method for detecting the position of a target hole, which adopts the mounting detection tool to detect and comprises the following steps:
(1) placing a target to be detected on the detection tool main body, aligning the hole in the target with the cylindrical bulge at the corresponding position on the detection tool main body, observing whether the target to be detected can be inserted into the detection tool main body, and judging whether the position size of the hole in the target is qualified;
(2) inserting the bolt heads at the two ends of the bolt of the detection tool into the holes of the corresponding types respectively, observing whether the bolt heads at the two ends can be inserted at one end and can not be inserted at the other end, and judging whether the size of the hole on the target material is qualified.
According to the preferable technical scheme, the material of the gauge body and the gauge pin comprises stainless steel, and the material is preferably the same as that of the target material.
Preferably, before the gauge body and the gauge bolt are used, polishing and washing treatment are firstly carried out.
As a preferred technical solution of the present invention, the step (1) detects whether the positions of the holes on the target are proper, including the angles between the holes and the distances from the center.
Preferably, the target is arranged on the detection tool body, and the opening in the annular side wall of the detection tool body is convenient for the target to be placed and taken out.
Preferably, if the target to be detected cannot be inserted into the checking fixture body, the unqualified hole in the target is machined again.
As a preferred technical scheme of the invention, the step (2) detects whether the size of the hole on the target material is proper, mainly the diameter size of the hole.
Preferably, the types and the diameter sizes of the holes in the target material are different, and different types of check tool pins are correspondingly selected.
Preferably, when the hole in the target comprises a stepped hole, the pin head of the pin of the detection tool is also designed to be a stepped cylindrical structure.
Preferably, if the bolt heads at the two ends of the bolt of the checking fixture can be inserted into the corresponding holes or cannot be inserted into the corresponding holes, the diameter of each hole is unqualified.
In the invention, when the hole on the target is processed, the aperture size is gradually increased, so that the target can be processed when the aperture size is smaller during detection, otherwise, once the aperture is too large, the aperture is difficult to reduce, and the product can be scrapped or used for processing targets with other sizes.
Compared with the prior art, the invention has the following beneficial effects:
(1) the mounting detection tool is designed according to the structure of a target to be detected, particularly according to the structure and distribution of hole sites in the target, and is specifically divided into a detection tool main body and a detection tool bolt, wherein a cylindrical bulge on the surface of the detection tool main body is matched with a standard hole on the target, so that whether the position of the hole on the target is proper or not is convenient to detect, and the diameter size of the hole on the target is proper or not is detected by the detection tool bolt, so that the comprehensive detection of the hole sites on the target is realized, the detection speed is high, the detection time can be shortened by more than 0.5h compared with that of a traditional three-coordinate measuring machine, the accuracy is high, the matching performance is better when the mounting detection tool is mounted on a sputtering machine table, and the production efficiency of the target is improved;
(2) the installation detection tool disclosed by the invention is simple in structure, the detection method is simple and convenient to operate, the cost is lower, and the customer satisfaction can be effectively improved.
Drawings
Fig. 1 is a schematic top view of a fixture body in a mounting fixture for a target hole site according to embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of a bolt of a detection tool for mounting a target hole site provided in embodiment 1 of the present invention;
the device comprises a detection tool body 1, a detection tool bolt 2, a through hole 3, a cylindrical protrusion 4, an annular side wall 5, an opening 6 and a bolt head 7.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the following embodiments are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The embodiment of the invention provides a target hole site installation detection tool and a detection method, wherein the installation detection tool comprises a detection tool body 1 and a detection tool bolt 2 which are independently arranged;
the detection tool main body 1 is of a circular ring structure, a through hole 3 is formed in the middle of the detection tool main body, a plurality of cylindrical protrusions 4 are arranged on the surface circumference, close to the outer edge, of the detection tool main body 1, the number of the cylindrical protrusions 4 is the same as that of standard holes in a target material, the target material is arranged on the detection tool main body 1, and the cylindrical protrusions 4 on the detection tool main body 1 are correspondingly inserted into the hole positions of the target material;
the detection tool bolt 2 is of a cylindrical structure, bolt heads 7 are arranged at two ends of the detection tool bolt, the diameter size of each bolt head 7 is smaller than the size of the middle position of the detection tool bolt 2, the diameter sizes of the bolt heads 7 at the two ends are different, the diameter of the bolt head 7 at one end is larger than that of a standard target hole, and the diameter of the bolt head 7 at the other end is smaller than that of the standard target hole.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a mounting detection tool for target hole sites, which comprises a detection tool body 1 and a detection tool bolt 2, wherein the detection tool body 1 and the detection tool bolt 2 are independently arranged;
the top view structure schematic diagram of the detection tool body 1 is shown in fig. 1, the detection tool body 1 is of a circular ring structure, a through hole 3 is formed in the middle position of the detection tool body, a plurality of cylindrical protrusions 4 are arranged on the surface circumference of the detection tool body 1 close to the outer edge, the number of the cylindrical protrusions 4 is the same as that of standard holes in a target material, the target material is arranged on the detection tool body 1, and the cylindrical protrusions 4 on the detection tool body 1 are correspondingly inserted into hole positions of the target material;
the structure schematic diagram of the detection tool bolt 2 is shown in fig. 2, the detection tool bolt 2 is of a cylindrical structure, bolt heads 7 are arranged at two ends of the detection tool bolt 2, the diameter size of each bolt head 7 is smaller than the size of the middle position of the detection tool bolt 2, the diameter sizes of the bolt heads 7 at the two ends are different, the diameter of the bolt head 7 at one end is larger than that of the target standard hole, and the diameter of the bolt head 7 at the other end is smaller than that of the target standard hole.
The diameter of the through hole 3 in the gauge body 1 accounts for 85% of the diameter of the gauge body 1.
The diameter of the circumference of the cylindrical protrusion 4 accounts for 92% of the diameter of the gauge body 1.
The height of the cylindrical protrusions 4 is the same; the position of the cylindrical protrusion 4 corresponds to the position of a standard hole on the target material; the diameter of the cylindrical protrusion 4 is smaller than that of the standard hole at the corresponding position on the target material.
The edge position of the checking fixture body 1 is provided with a circle of annular bulge to form an annular side wall 5.
The height of said annular side wall 5 is 2.5 times the height of the cylindrical protrusion 4.
The annular side wall 5 is symmetrically provided with four openings 6, and the four openings 6 are uniformly distributed on the circumference.
The types of the standard holes in the target are divided according to the aperture, the number of the types of the standard holes in the target is the same as that of the detecting tool pins 2, and one type of the standard holes corresponds to one detecting tool pin 2.
The mounting detection tool is made of stainless steel and is made of the same material as the target material.
The checking fixture bolt 2 comprises three stepped cylindrical sections and five stepped cylindrical sections, namely a middle section of the checking fixture bolt and bolt heads 7 at two ends of the checking fixture bolt, and the diameters of the checking fixture bolt are reduced in a stepped manner from the middle section to two sides.
The five-section stepped cylindrical section of the checking fixture pin 2 detects a stepped hole, and the diameters of the two sections of the stepped hole correspond to those of the two sections of cylindrical sections of the pin head 7 respectively.
The diameter of a single-diameter standard hole in the target material is 9.15mm, the diameter of the corresponding bolt head 7 at one end is 0.03mm larger than that of the standard hole, and the diameter of the bolt head 7 at the other end is 0.03mm smaller than that of the standard hole.
Example 2:
the embodiment provides a mounting detection tool for target hole sites, which comprises a detection tool body 1 and a detection tool bolt 2, wherein the detection tool body 1 and the detection tool bolt 2 are independently arranged;
the detection tool main body 1 is of a circular ring structure, a through hole 3 is formed in the middle of the detection tool main body, a plurality of cylindrical protrusions 4 are arranged on the surface circumference, close to the outer edge, of the detection tool main body 1, the number of the cylindrical protrusions 4 is the same as that of standard holes in a target material, the target material is arranged on the detection tool main body 1, and the cylindrical protrusions 4 on the detection tool main body 1 are correspondingly inserted into the hole positions of the target material;
the detection tool bolt 2 is of a cylindrical structure, bolt heads 7 are arranged at two ends of the detection tool bolt, the diameter size of each bolt head 7 is smaller than the size of the middle position of the detection tool bolt 2, the diameter sizes of the bolt heads 7 at the two ends are different, the diameter of the bolt head 7 at one end is larger than that of a standard target hole, and the diameter of the bolt head 7 at the other end is smaller than that of the standard target hole.
The diameter of the through hole 3 in the gauge body 1 accounts for 80% of the diameter of the gauge body 1.
The diameter of the circumference of the cylindrical protrusion 4 accounts for 90% of the diameter of the gauge body 1.
The height of the cylindrical protrusions 4 is the same; the position of the cylindrical protrusion 4 corresponds to the position of a standard hole on the target material; the diameter of the cylindrical protrusion 4 is smaller than that of the standard hole at the corresponding position on the target material.
The edge position of the checking fixture body 1 is provided with a circle of annular bulge to form an annular side wall 5.
The height of said annular side wall 5 is 2 times the height of the cylindrical protrusion 4.
The annular side wall 5 is symmetrically provided with two openings 6, and the two openings 6 are symmetrically distributed on the circumference.
The types of the standard holes in the target are divided according to the aperture, the number of the types of the standard holes in the target is the same as that of the detecting tool pins 2, and one type of the standard holes corresponds to one detecting tool pin 2.
The mounting detection tool is made of stainless steel and is made of the same material as the target material.
The checking fixture bolt 2 comprises three stepped cylindrical sections, namely a checking fixture bolt middle section and bolt heads 7 at two ends.
The diameter of the standard hole on the target material is 9.02mm, the diameter of the corresponding bolt head 7 at one end is 0.01mm larger than that of the standard hole, and the diameter of the bolt head 7 at the other end is 0.02mm smaller than that of the standard hole.
Example 3:
the embodiment provides a mounting detection tool for target hole sites, which comprises a detection tool body 1 and a detection tool bolt 2, wherein the detection tool body 1 and the detection tool bolt 2 are independently arranged;
the detection tool main body 1 is of a circular ring structure, a through hole 3 is formed in the middle of the detection tool main body, a plurality of cylindrical protrusions 4 are arranged on the surface circumference, close to the outer edge, of the detection tool main body 1, the number of the cylindrical protrusions 4 is the same as that of standard holes in a target material, the target material is arranged on the detection tool main body 1, and the cylindrical protrusions 4 on the detection tool main body 1 are correspondingly inserted into the hole positions of the target material;
the detection tool bolt 2 is of a cylindrical structure, bolt heads 7 are arranged at two ends of the detection tool bolt, the diameter size of each bolt head 7 is smaller than the size of the middle position of the detection tool bolt 2, the diameter sizes of the bolt heads 7 at the two ends are different, the diameter of the bolt head 7 at one end is larger than that of a standard target hole, and the diameter of the bolt head 7 at the other end is smaller than that of the standard target hole.
The diameter of the through hole 3 in the gauge body 1 accounts for 90% of the diameter of the gauge body 1.
The diameter of the circumference of the cylindrical protrusion 4 accounts for 95% of the diameter of the gauge body 1.
The height of the cylindrical protrusions 4 is the same; the position of the cylindrical protrusion 4 corresponds to the position of a standard hole on the target material; the diameter of the cylindrical protrusion 4 is smaller than that of the standard hole at the corresponding position on the target material.
The edge position of the checking fixture body 1 is provided with a circle of annular bulges to form an annular side wall 5.
The height of said annular side wall 5 is 3.5 times the height of the cylindrical protrusion 4.
The annular side wall 5 is symmetrically provided with four openings 6, and the four openings 6 are uniformly distributed on the circumference.
The types of the standard holes in the target are divided according to the aperture, the number of the types of the standard holes in the target is the same as that of the detecting tool pins 2, and one type of the standard holes corresponds to one detecting tool pin 2.
The mounting detection tool is made of aluminum alloy and is made of the same material as the target.
The checking fixture bolt 2 comprises three stepped cylindrical sections, namely a checking fixture bolt middle section and bolt heads 7 at two ends.
The diameter of the standard hole on the target material is 9.22mm, the diameter of the corresponding bolt head 7 at one end is 0.05mm larger than that of the standard hole, and the diameter of the bolt head 7 at the other end is 0.04mm smaller than that of the standard hole.
Example 4:
the embodiment provides a mounting detection tool for target hole sites, which comprises a detection tool body 1 and a detection tool bolt 2, wherein the detection tool body 1 and the detection tool bolt 2 are independently arranged;
the detection tool main body 1 is of a circular ring structure, a through hole 3 is formed in the middle of the detection tool main body, a plurality of cylindrical protrusions 4 are arranged on the surface circumference, close to the outer edge, of the detection tool main body 1, the number of the cylindrical protrusions 4 is the same as that of standard holes in a target material, the target material is arranged on the detection tool main body 1, and the cylindrical protrusions 4 on the detection tool main body 1 are correspondingly inserted into the hole positions of the target material;
the detection tool bolt 2 is of a cylindrical structure, bolt heads 7 are arranged at two ends of the detection tool bolt, the diameter size of each bolt head 7 is smaller than the size of the middle position of the detection tool bolt 2, the diameter sizes of the bolt heads 7 at the two ends are different, the diameter of the bolt head 7 at one end is larger than that of a standard target hole, and the diameter of the bolt head 7 at the other end is smaller than that of the standard target hole.
The diameter of the through hole 3 in the gauge body 1 accounts for 82.5% of the diameter of the gauge body 1.
The diameter of the circumference of the cylindrical protrusion 4 accounts for 92.5% of the diameter of the gauge body 1.
The height of the cylindrical protrusions 4 is the same; the position of the cylindrical protrusion 4 corresponds to the position of a standard hole on the target material; the diameter of the cylindrical protrusion 4 is smaller than that of the standard hole at the corresponding position on the target material.
The types of the standard holes in the target are divided according to the aperture, the number of the types of the standard holes in the target is the same as that of the detecting tool pins 2, and one type of the standard holes corresponds to one detecting tool pin 2.
The mounting detection tool is made of stainless steel and is made of the same material as the target material.
The checking fixture bolt 2 comprises three stepped cylindrical sections and five stepped cylindrical sections, namely a middle section of the checking fixture bolt and bolt heads 7 at two ends of the checking fixture bolt, and the diameters of the checking fixture bolt are reduced in a stepped manner from the middle section to two sides.
The five-section stepped cylindrical section of the checking fixture pin 2 detects a stepped hole, and the diameters of the two sections of the stepped hole correspond to those of the two sections of cylindrical sections of the pin head 7 respectively.
The diameter of the single-diameter standard hole on the target material is 9.1mm, the diameter of the corresponding bolt head 7 at one end is 0.02mm larger than that of the standard hole, and the diameter of the bolt head 7 at the other end is 0.025mm smaller than that of the standard hole.
Example 5:
the embodiment provides a method for detecting a target hole position, which adopts the mounting detection tool in embodiment 1 to detect, and comprises the following steps:
(1) placing a target to be detected on a detection tool main body 1, wherein the detection tool main body 1 is made of stainless steel, aligning a hole in the target with a cylindrical protrusion 4 at a corresponding position on the detection tool main body 1, observing whether the target to be detected can be inserted into the detection tool main body 1, and judging whether the position size of the hole in the target is qualified, wherein the position size of the hole comprises an angle between the holes and a distance from the center; if the target to be detected cannot be inserted into the checking fixture body 1, machining an unqualified hole in the target again;
(2) inserting the bolt heads 7 at two ends of the detection tool bolt 2 into corresponding types of holes respectively, wherein the detection tool bolt 2 is made of stainless steel, observing whether the bolt heads 7 at two ends can be inserted at one end and cannot be inserted at the other end, and judging whether the diameter of the hole in the target material is qualified; if the bolt heads 7 at the two ends of the bolt 2 of the detection tool can be inserted into corresponding holes, the diameter of each hole is too large, and the holes are used for preparing targets with other sizes.
Example 6:
the embodiment provides a method for detecting a target hole site, which adopts the mounting detection tool in embodiment 2 to detect, and comprises the following steps:
(1) placing a target to be detected on a detection tool main body 1, wherein the detection tool main body 1 is made of stainless steel, aligning a hole in the target with a cylindrical protrusion 4 at a corresponding position on the detection tool main body 1, observing whether the target to be detected can be inserted into the detection tool main body 1, and judging whether the position size of the hole in the target is qualified, wherein the position size of the hole comprises an angle between the holes and a distance from the center; if the target to be detected cannot be inserted into the checking fixture body 1, machining an unqualified hole in the target again;
(2) inserting the bolt heads 7 at two ends of the detection tool bolt 2 into corresponding types of holes respectively, wherein the detection tool bolt 2 is made of stainless steel, observing whether the bolt heads 7 at two ends can be inserted at one end and cannot be inserted at the other end, and judging whether the diameter of the hole in the target material is qualified; if the bolt heads 7 at the two ends of the detection tool bolt 2 can not be inserted into the corresponding holes, the diameter of the holes is too small, and the holes are reprocessed to enlarge the diameter.
Comparative example 1:
the comparative example provides a mounting detection tool for target hole sites, and the structure of the mounting detection tool is different from that in the embodiment 1 only in that: the installation checking fixture does not comprise a checking fixture bolt 2.
In this comparison example, because the installation is examined the utensil and is not set up and examine a bolt, can only detect the target and go up the position of hole and whether suitable, to the size of diameter size can't accurate detection, be difficult to realize the accurate detection of target hole site, still have great installation unmatched problem.
It can be seen from the above embodiments and comparative examples that, the installation and detection tool of the present invention is designed according to the structure of the target material to be detected, and particularly according to the structure and distribution of the hole sites therein, and is specifically divided into a detection tool body and a detection tool bolt, wherein the cylindrical protrusion on the surface of the detection tool body is matched with the standard hole site on the target material, so as to facilitate the detection of whether the position of the hole on the target material is proper, and the diameter size of the hole on the target material is proper, so that the hole site on the target material can be detected comprehensively, the detection speed is fast, the detection time can be shortened by more than 0.5h compared with the conventional three-coordinate measuring machine, the accuracy is high, the matching performance when the installation tool is installed on the sputtering machine table is good, and the production efficiency of the target material is improved; the installation detection tool is simple in structure, the detection method is simple and convenient to operate, the cost is low, and the customer satisfaction can be effectively improved.
The present invention is illustrated in detail by the embodiments described above, but the present invention is not limited to the above-described details, i.e., it is not intended that the present invention be implemented by relying on the details. It will be apparent to those skilled in the art that any modifications to the present invention, equivalents of the means for substitution and addition of means for carrying out the invention, selection of specific means, etc., are within the scope and disclosure of the invention.
Claims (10)
1. A mounting detection tool for target hole sites is characterized by comprising a detection tool body and a detection tool bolt, wherein the detection tool body and the detection tool bolt are independently arranged;
the target is arranged on the gauge body, and the cylindrical bulges on the gauge body are correspondingly inserted into the hole sites of the target;
the detection tool bolt is of a cylindrical structure, bolt heads are arranged at two ends of the detection tool bolt, the diameter size of each bolt head is smaller than the size of the middle position of the detection tool bolt, the diameter sizes of the bolt heads at the two ends are different, the diameter of the bolt head at one end is larger than that of the target standard hole, and the diameter of the bolt head at the other end is smaller than that of the target standard hole.
2. The mounting detection tool according to claim 1, wherein the diameter of the through hole in the detection tool body accounts for 80-90% of the diameter of the detection tool body;
preferably, the diameter of the circumference of the cylindrical protrusion accounts for 90-95% of the diameter of the gauge main body;
preferably, the height of the cylindrical protrusions is the same;
preferably, the position of the cylindrical protrusion corresponds to the position of a standard hole on the target material;
preferably, the diameter of the cylindrical protrusion is smaller than that of the standard hole at the corresponding position on the target.
3. The mounting detection tool according to claim 1 or 2, wherein a ring of annular protrusions are arranged at the edge of the detection tool body to form an annular side wall;
preferably, the height of the annular side wall is 2-3.5 times of the height of the cylindrical protrusion;
preferably, openings are symmetrically arranged on the annular side wall, and the positions of the openings are uniformly distributed;
preferably, the number of the openings is two or four.
4. The mounting fixture according to any one of claims 1 to 3, wherein the types of the standard holes in the target material are divided according to the hole diameters;
preferably, the types and the number of the standard holes on the target are the same as the number of the check tool pins, and one type of standard holes correspond to one check tool pin;
preferably, the material of the mounting check tool comprises stainless steel, and is preferably the same as the material of the target.
5. The installation testing fixture of any one of claims 1-4, wherein the testing fixture pin comprises at least three stepped cylindrical sections, namely a middle section and pin heads at two ends of the testing fixture pin;
preferably, the diameter of the standard hole on the target is 9.02-9.22 mm, the diameter of the corresponding bolt head at one end is 0.01-0.05 mm larger than that of the standard hole, and the diameter of the bolt head at the other end is 0.01-0.05 mm smaller than that of the standard hole.
6. The mounting detection tool according to any one of claims 1 to 5, wherein when the standard hole in the target material comprises a stepped hole, the pin head of the pin of the detection tool is correspondingly designed as a stepped cylindrical section;
preferably, when the stepped hole is of a structure with a large upper diameter and a small lower diameter, the check tool bolt comprises five sections, and the diameters of the five sections are reduced from the middle section to the two sides in a stepped manner.
7. A method for detecting the position of a target hole by using the mounting fixture according to any one of claims 1-6, wherein the method comprises the following steps:
(1) placing a target to be detected on the detection tool main body, aligning the hole in the target with the cylindrical bulge at the corresponding position on the detection tool main body, observing whether the target to be detected can be inserted into the detection tool main body, and judging whether the position size of the hole in the target is qualified;
(2) inserting the bolt heads at the two ends of the bolt of the detection tool into the holes of the corresponding types respectively, observing whether the bolt heads at the two ends can be inserted at one end and can not be inserted at the other end, and judging whether the size of the hole on the target material is qualified.
8. The method of claim 7, wherein the gauge body and the gauge pin are made of stainless steel, preferably the same material as the target material;
preferably, before the gauge body and the gauge bolt are used, polishing and washing treatment are firstly carried out.
9. The method according to claim 7 or 8, wherein the step (1) of detecting whether the position of the holes on the target is proper comprises the angle between the holes and the distance from the center;
preferably, the target is arranged on the detection tool body, and the opening in the annular side wall of the detection tool body is convenient for the target to be placed and taken out;
preferably, if the target to be detected cannot be inserted into the checking fixture body, the unqualified hole in the target is machined again.
10. The method according to any of claims 7-9, wherein step (2) detects whether the size of the hole in the target is suitable, mainly the diameter size of the hole;
preferably, the types and the diameter sizes of the holes in the target material are different, and different types of detection tool pins are correspondingly selected;
preferably, when the hole in the target comprises a stepped hole, the bolt head of the bolt of the detection tool is also designed into a stepped cylindrical structure;
preferably, if the bolt heads at the two ends of the bolt of the checking fixture can be inserted into the corresponding holes or cannot be inserted into the corresponding holes, the diameter of each hole is unqualified.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210144585.9A CN114485325A (en) | 2022-02-17 | 2022-02-17 | Target hole site installation detection tool and detection method |
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| CN202210144585.9A CN114485325A (en) | 2022-02-17 | 2022-02-17 | Target hole site installation detection tool and detection method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117367284A (en) * | 2023-12-06 | 2024-01-09 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202793347U (en) * | 2012-08-30 | 2013-03-13 | 宁波江丰电子材料有限公司 | Target detection clamp |
| CN108592734A (en) * | 2018-04-26 | 2018-09-28 | 宁波江丰电子材料股份有限公司 | A kind of hole position gauge |
| CN109059712A (en) * | 2018-08-21 | 2018-12-21 | 宁波江丰电子材料股份有限公司 | The detection method and cubing of wafer carrier |
| CN214199930U (en) * | 2021-02-22 | 2021-09-14 | 宁波江丰电子材料股份有限公司 | Target subassembly size detection anchor clamps |
| CN215373768U (en) * | 2021-08-10 | 2021-12-31 | 宁波江丰电子材料股份有限公司 | Target hole site gauge |
-
2022
- 2022-02-17 CN CN202210144585.9A patent/CN114485325A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202793347U (en) * | 2012-08-30 | 2013-03-13 | 宁波江丰电子材料有限公司 | Target detection clamp |
| CN108592734A (en) * | 2018-04-26 | 2018-09-28 | 宁波江丰电子材料股份有限公司 | A kind of hole position gauge |
| CN109059712A (en) * | 2018-08-21 | 2018-12-21 | 宁波江丰电子材料股份有限公司 | The detection method and cubing of wafer carrier |
| CN214199930U (en) * | 2021-02-22 | 2021-09-14 | 宁波江丰电子材料股份有限公司 | Target subassembly size detection anchor clamps |
| CN215373768U (en) * | 2021-08-10 | 2021-12-31 | 宁波江丰电子材料股份有限公司 | Target hole site gauge |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117367284A (en) * | 2023-12-06 | 2024-01-09 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
| CN117367284B (en) * | 2023-12-06 | 2024-03-29 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
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