CN108592734A - A kind of hole position gauge - Google Patents
A kind of hole position gauge Download PDFInfo
- Publication number
- CN108592734A CN108592734A CN201810388724.6A CN201810388724A CN108592734A CN 108592734 A CN108592734 A CN 108592734A CN 201810388724 A CN201810388724 A CN 201810388724A CN 108592734 A CN108592734 A CN 108592734A
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- China
- Prior art keywords
- detection
- hole
- srh420
- targets
- inner ring
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
Abstract
The present invention relates to a kind of hole position gauges, belong to detection technique field.The hole position gauge, including：Detect ring, detect ring on be arranged at intervals with multiple detection holes corresponding with the threaded hole of standard SRH420 targets, detect ring internal diameter be more than standard SRH420 targets aluminium cylinder diameter；And, multiple fixing pieces corresponding with detection hole, the quantity of fixing piece is more than or equal to the quantity of detection hole, when being detected to SRH420 targets to be detected using hole position gauge, when each detection hole can be fixed with corresponding threaded hole by fixing piece, show that SRH420 targets to be detected are qualified.SRH420 targets to be detected are detected by the hole position gauge, when each detection hole can be fixed with corresponding threaded hole by fixing piece, show that SRH420 targets to be detected are qualified, it is on the contrary then unqualified, detection efficiency is greatly improved, detection time is shortened.
Description
Technical field
The invention belongs to detection technique fields, and in particular to a kind of hole position gauge.
Background technology
With the high speed development of manufacturing industry and scientific and technological level, more and more electronic equipments enter people’s lives, and
All include usually electronic chip in these electronic equipments, to realize that the electronic equipment wants the function of realizing, i.e. electronic equipment
Function realized by chip.When producing chip, can be related to producing the target of chip, it, should such as SRH420 targets
SRH420 targets are a kind of semiconductor ultra-high purity metal sputtering target materials, are used for chip manufacturing.When producing chip, by this
SRH420 targets are installed to the sputtering machine table of chip production equipment, to carry out subsequent operation.Therefore, it is set to the SRH420
Hole size on target just seems most important, the installation question of the screw thread orifice angle correctness relationship product of product, if
Screw thread orifice angle is incorrect, can not just be mounted on sputtering machine table, and therefore, it is necessary to the hole sizes to target to examine
It surveys.
Currently, when the reasonability of the hole size to target is detected, it is detected using three coordinate measuring machine,
Whether the angle to detect each hole position meets regulation.Present applicant is found during studying the application, this
Although mode accuracy of detection is high, there are problems that detection speed is slow, inefficiency.
Invention content
In consideration of it, the purpose of the present invention is to provide a kind of hole position gauge, to effectively improve the above problem.
What the embodiment of the present invention was realized in：
An embodiment of the present invention provides a kind of hole position gauge, ring is detected, is arranged at intervals on the detection ring and standard
The internal diameter of the corresponding multiple detection holes of threaded hole of SRH420 targets, the detection ring is more than the standard SRH420 targets
The diameter of aluminium cylinder；And multiple fixing pieces corresponding with the detection hole, the quantity of the fixing piece is more than or equal to described
The quantity of detection hole, when being detected to SRH420 targets to be detected using the hole position gauge, each detection hole with it is right
When the threaded hole answered can be fixed by the fixing piece, show that the SRH420 targets to be detected are qualified.
In optional embodiment of the present invention, the detection ring includes：Inner ring and outer rings, multiple detection holes are set to
In the inner ring, the height of the outer shroud is more than the height of the inner ring, and the internal diameter of the outer shroud is more than the standard SRH420
The diameter of target.
In optional embodiment of the present invention, the reverse side of the outer shroud is flushed with the reverse side of the inner ring, the outer shroud
Front is higher than the front of the inner ring.
In optional embodiment of the present invention, the reverse side of the outer shroud is higher than the reverse side of the inner ring, and the outer shroud is just
Face is higher than the front of the inner ring.
In optional embodiment of the present invention, the part of the reverse side of the reverse side of the outer shroud apart from the inner ring with it is described outer
Positive Partial Height of the front of ring apart from the inner ring is equal.
In optional embodiment of the present invention, the interior diameter of a circle of the outer shroud is selected from 379.9mm between 380.1mm
Any value.
In optional embodiment of the present invention, the outer diameter of a circle of the outer shroud is selected from 420.38mm between 420.58mm
Any value.
In optional embodiment of the present invention, the outer diameter of a circle of the inner ring is selected from 379.9mm between 380.1mm
The interior diameter of a circle of any value, the inner ring is selected from 329.9mm to any value between 330.1mm.
In optional embodiment of the present invention, the center of each detection hole is located at diameter and is selected from 349.99mm extremely
Between 350.01mm on the circular arc of any value.
In optional embodiment of the present invention, the quantity of the detection hole is 8, the angle between two neighboring detection hole
Any value between 44.95 to 45.05 degree.
Hole position gauge provided in an embodiment of the present invention, including：Ring is detected, is arranged at intervals on the detection ring and standard
The internal diameter of the corresponding multiple detection holes of threaded hole of SRH420 targets, the detection ring is more than the standard SRH420 targets
The diameter of aluminium cylinder；And multiple fixing pieces corresponding with the detection hole, the quantity of the fixing piece is more than or equal to described
The quantity of detection hole, when being detected to SRH420 targets to be detected using the hole position gauge, each detection hole with it is right
When the threaded hole answered can be fixed by the fixing piece, show that the SRH420 targets to be detected are qualified.Pass through the hole
Position cubing is detected SRH420 targets to be detected, in each detection hole can pass through the fixation with corresponding threaded hole
When part is fixed, show that the SRH420 targets to be detected are qualified, it is on the contrary then unqualified, detection efficiency is greatly improved,
Solves the slow technical problem of detection speed existing when the prior art is detected using three coordinate measuring machine.
Other features and advantages of the present invention will be illustrated in subsequent specification, also, partly be become from specification
It is clear that being understood by implementing the embodiment of the present invention.The purpose of the present invention and other advantages can be by being write
Specifically noted structure is realized and is obtained in specification, claims and attached drawing.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.Shown in attached drawing, above and other purpose of the invention, feature and advantage will be more clear.In whole
Identical reference numeral indicates identical part in attached drawing.Actual size equal proportion scaling is not pressed deliberately draws attached drawing, emphasis
It is that the purport of the present invention is shown.
Fig. 1 shows a kind of structural schematic diagram for hole position gauge that one embodiment of the invention provides.
Fig. 2 shows the sectional views of the Section A-A in Fig. 1 provided in an embodiment of the present invention.
Fig. 3 shows a kind of structural schematic diagram for hole position gauge that further embodiment of this invention provides.
Fig. 4 shows the sectional view of the Section A-A in Fig. 3 provided in an embodiment of the present invention.
Icon：100- hole position gauges；110- detects ring；111- outer shrouds；112- inner ring；120- fixing pieces.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this field is common
The every other embodiment that technical staff is obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, without
It is instruction or implies that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore not
It can be interpreted as limitation of the present invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is instruction or implies relative importance.
In addition, the terms such as term "horizontal", "vertical", " pendency " are not offered as requiring component abswolute level or pendency, and
It is that can be slightly tilted.It is not to indicate the structure if "horizontal" refers to only that its direction is more horizontal with respect to for "vertical"
It has to fully horizontally, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection；It can be directly connected, can also can be indirectly connected through an intermediary two
Connection inside element.For the ordinary skill in the art, above-mentioned term can be understood in the present invention with concrete condition
In concrete meaning.
The installation question of the screw thread orifice angle correctness relationship product of the SRH420 target products of production, if screw thread angle of spot hole
It spends incorrect, can not just be mounted on sputtering machine table, therefore, it is necessary to the hole sizes to target to be detected.Currently,
When being detected to the reasonability of the hole size of target, it is detected using three coordinate measuring machine, to detect each hole position
Angle whether meet regulation.Present applicant is found during studying the application, although this mode detection essence
Degree is high, but there are problems that detection speed is slow, inefficiency, since it is desired that the angle to multiple threaded holes is examined one by one
It surveys so that detection speed is slow, inefficiency.
For the defect present in above scheme, be inventor being obtained after putting into practice and carefully studying as a result,
Therefore, the discovery procedure of the above problem and the solution that hereinafter embodiment of the present invention is proposed regarding to the issue above, all
It should be the contribution that inventor makes the present invention in process of the present invention.
In order to solve the above-mentioned technical problem, it in consideration of it, an embodiment of the present invention provides a kind of hole position gauge 100, please refers to
Fig. 1 and Fig. 2.The hole position gauge 100 includes：Detection ring 110 and it is multiple be opened in it is described detect ring 110 on detection hole phase
Corresponding fixing piece 120.
Multiple detection holes corresponding with the threaded hole of standard SRH420 targets are arranged at intervals on the detection ring 110,
So that when detecting, which is sheathed on SRH420 targets to be detected, if the detection hole cannot with it is to be detected
Threaded hole alignment on SRH420 targets, then show that the SRH420 targets to be detected are unqualified.Due to standard SRH420 targets
Threaded hole is the threaded hole of 8 a diameter of 6mm, and this 8 threaded holes are equidistantly distributeds, e.g., two neighboring threaded hole it
Between angle in the range of 44.95 degree to 45.05 degree.
Therefore, as an alternative embodiment, the quantity for the detection hole being set on the detection ring 110 is 8, phase
Angle between adjacent two detection holes is selected from any value between 44.95 to 45.05 degree.As a kind of optional when side
Formula, the center of each detection hole are located at diameter and are selected from 349.99mm to the circular arc of any value between 350.01mm.Such as, first
The center in a hole is located on the circular arc of a diameter of 349.99mm, and the center in the second hole is located on the circular arc of a diameter of 350mm, third
The center in hole is located on the circular arc of a diameter of 350.01mm, and the center in the 4th hole is located on the circular arc of a diameter of 350mm, the 5th hole
Center be located on the circular arc of a diameter of 350mm, the center in the 6th hole is located on the circular arc of a diameter of 350mm, in seven apertures in the human head
The heart is located on the circular arc of a diameter of 350.01mm, and the center of octal is located on the circular arc of a diameter of 349.99mm.
Wherein it is possible to understand, above-mentioned 8 holes can be entirely located on the circular arc of the same circle, can also be
It is entirely located on the circular arc of different circles, can also be as described above, partial hole is located on the circular arc of the same circle.Herein no longer
It illustrates one by one.
Further, it is to be appreciated that the quantity for the detection hole being set on the detection ring 110 can also be less than 8, example
Such as, 7,6,5 etc..Such as, by taking 6 detection holes as an example, 6 are such as randomly selected from 8 above-mentioned detection holes and is used as detection hole, it is different
Selection mode determine different distribution rules.It is thus impossible to which illustrate in the present embodiment 8 detection holes are understood as being pair
The limitation of the present invention.
The internal diameter of the detection ring 110 is more than the diameter of the aluminium cylinder of the standard SRH420 targets, so as to when detecting,
The aluminium cylinder of SRH420 targets to be detected is placed in the through-hole of the detection ring 110.As an alternative embodiment, the detection
The inside diameter of ring 110 is selected from 329.9mm to any value between 330.1mm.
As another optional embodiment, Fig. 2 and Fig. 3 are please referred to, which includes：Inner ring 112 and outer shroud
111.Multiple detection holes are set in the inner ring 112, and the height of the outer shroud 111 is more than the height of the inner ring 112,
The internal diameter of the outer shroud 111 is more than the diameter of the standard SRH420 targets, when detecting, to limit SRH420 targets to be detected
SRH420 targets to be detected are surrounded by the displacement of material, i.e., when detecting, the outer shroud 111, the SRH420 targets to be detected without
Method moves left and right in the outer shroud 111, can only be in the outer shroud 111 clockwise or counterclockwise, under this kind of embodiment
Ring 110 is detected, when being detected to SRH420 targets to be detected, contraposition is more convenient, avoids and aligns in the lateral direction.
As an alternative embodiment, the reverse side of the outer shroud 111 is flushed with the reverse side of the inner ring 112, it is described
The front of outer shroud 111 is higher than the front of the inner ring 112.When detecting, it goes to be bonded with the front of detection ring 110 to be detected
SRH420 targets.
As a kind of optional embodiment of another kind, the reverse side of the outer shroud 111 is higher than the reverse side of the inner ring 112,
The front of the outer shroud 111 is higher than the front of the inner ring 112.When detecting, obverse and reverse is not needed to distinguish, which careless face
It may be used to be bonded SRH420 targets to be detected.The part of reverse side of the reverse side of the outer shroud 111 apart from the inner ring 112 with
Positive Partial Height of the front of the outer shroud 111 apart from the inner ring 112 can be equal, can not also be equal.
Wherein, as an alternative embodiment, the diameter of the inner circle (inside) of the outer shroud 111 is selected from 379.9mm extremely
Any value between 380.1mm.The diameter of the outer circle (outside) of the outer shroud 111 is selected from 420.38mm between 420.58mm
Any value.
Wherein, as an alternative embodiment, the outer diameter of a circle of the inner ring 112 is selected from 379.9mm extremely
The interior diameter of a circle of any value between 380.1mm, the inner ring 112 is selected from 329.9mm to any number between 330.1mm
Value.
Wherein, the connection type between the inner ring 112 and outer shroud 111 can there are many, for example, it may be passing through bonding
Mode links together, and can also be to link together by welding, can also be integrated molding etc..
Wherein, the mode that detection hole is set in the inner ring 112 please refers to the above-mentioned description to detection hole.
Wherein, as an alternative embodiment, the material of above-mentioned detection ring 110 is made of metal, e.g., iron, copper,
Aluminium and alloy etc..In order to extend the service life of the detection ring 110, stainless steel can be selected to be made.
The fixing piece 120 is corresponding with the detection hole, using the hole position gauge 100 to SRH420 targets to be detected
When material is detected, when each detection hole can be fixed with corresponding threaded hole by the fixing piece 120, show institute
It is qualified to state SRH420 targets to be detected.Therefore, the quantity of the fixing piece 120 is more than or equal to the quantity of the detection hole, e.g., with inspection
For the quantity of gaging hole is 8, the quantity of the fixing piece 120 is more than or equal to 8, in order to avoid after losing one of them, still not
Influence detection.
Wherein, it should be noted that the threaded hole for being set to standard SRH420 targets is the threaded hole of a diameter of 6mm, because
This, the detection hole in the present embodiment is corresponding with the threaded hole, which is also corresponding with the detection hole.
When detecting, by the detection hole on detection ring 110 and the threaded hole one on SRH420 targets to be detected
After one alignment, detection hole and threaded hole are sequentially passed through using fixing piece 120, if each detection hole can lead to corresponding threaded hole
When crossing the fixing piece 120 and being fixed, show that the SRH420 targets to be detected are qualified, it is on the contrary then show that this is to be detected
The screw thread orifice angle of SRH420 targets is unqualified.
Wherein, above-mentioned fixing piece 120 can be screw, can also be screw rod, can be with bolt etc..
Wherein, it should be noted that above-mentioned standard SRH420 targets refer to the qualified SRH420 targets of detection, i.e., each
The qualified SRH420 targets of a detection can be considered as standard SRH420 targets.
It should be noted that since the required precision of the screw thread orifice angle to being set to SRH420 targets to be detected is not very
Height is all reasonable as long as can be fixed on the sputtering machine table of chip production equipment, therefore, passes through the hole position gauge 100
It can quickly judge that the screw thread orifice angle of current SRH420 targets to be detected is qualified or not, greatly improve detection effect
Rate shortens detection time.
It should be noted that each embodiment in this specification is described in a progressive manner, each embodiment weight
Point explanation is all difference from other examples, and the same or similar parts between the embodiments can be referred to each other.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of hole position gauge, which is characterized in that including：
Ring is detected, multiple detection holes corresponding with the threaded hole of standard SRH420 targets are arranged at intervals on the detection ring,
The internal diameter of the detection ring is more than the diameter of the aluminium cylinder of the standard SRH420 targets；
And multiple fixing pieces corresponding with the detection hole, the quantity of the fixing piece are more than or equal to the detection hole
Quantity, when being detected to SRH420 targets to be detected using the hole position gauge, in each detection hole and corresponding screw thread
When Kong Junneng is fixed by the fixing piece, show that the SRH420 targets to be detected are qualified.
2. hole position gauge according to claim 1, which is characterized in that the detection ring includes：Inner ring and outer rings, Duo Gesuo
It states detection hole to be set in the inner ring, the height of the outer shroud is more than the height of the inner ring, and the internal diameter of the outer shroud is more than
The diameter of the standard SRH420 targets.
3. hole position gauge according to claim 2, which is characterized in that the reverse side of the outer shroud and the reverse side of the inner ring are neat
Flat, the front of the outer shroud is higher than the front of the inner ring.
4. hole position gauge according to claim 2, which is characterized in that the reverse side of the outer shroud is anti-higher than the inner ring
Face, the front of the outer shroud are higher than the front of the inner ring.
5. hole position gauge according to claim 2, which is characterized in that reverse side of the reverse side of the outer shroud apart from the inner ring
Part and the outer shroud front it is equal apart from the positive Partial Height of the inner ring.
6. according to claim 2-5 any one of them hole position gauges, which is characterized in that the interior diameter of a circle of the outer shroud selects
Any value between from 379.9mm to 380.1mm.
7. hole position gauge according to claim 6, which is characterized in that the outer diameter of a circle of the outer shroud is selected from 420.38mm
To any value between 420.58mm.
8. according to claim 2-5 any one of them hole position gauges, which is characterized in that the outer diameter of a circle of the inner ring selects
The interior diameter of a circle of any value between from 379.9mm to 380.1mm, the inner ring is selected from 329.9mm between 330.1mm
Any value.
9. according to claim 2-5 any one of them hole position gauges, which is characterized in that the centre bit of each detection hole
It is selected from 349.99mm to the circular arc of any value between 350.01mm in diameter.
10. according to claim 2-5 any one of them hole position gauges, which is characterized in that the quantity of the detection hole is 8,
Angle between two neighboring detection hole is selected from any value between 44.95 to 45.05 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810388724.6A CN108592734A (en) | 2018-04-26 | 2018-04-26 | A kind of hole position gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810388724.6A CN108592734A (en) | 2018-04-26 | 2018-04-26 | A kind of hole position gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108592734A true CN108592734A (en) | 2018-09-28 |
Family
ID=63609869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810388724.6A Pending CN108592734A (en) | 2018-04-26 | 2018-04-26 | A kind of hole position gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108592734A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900191A (en) * | 2019-03-19 | 2019-06-18 | 宁波江丰电子材料股份有限公司 | Sputter ring hole location detecting tool and method |
| CN113566680A (en) * | 2021-07-26 | 2021-10-29 | 湖南杉杉能源科技有限公司 | Utensil is examined to rotary wheel mill |
| CN114485325A (en) * | 2022-02-17 | 2022-05-13 | 宁波江丰电子材料股份有限公司 | Target hole site installation detection tool and detection method |
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| CN207123232U (en) * | 2017-08-23 | 2018-03-20 | 嘉兴四通车轮股份有限公司 | A kind of brake drum position detecting tool |
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|---|---|---|---|---|
| CN103148762A (en) * | 2013-01-31 | 2013-06-12 | 张俊辉 | Electromagnetic clutch detection tool |
| CN204988073U (en) * | 2015-05-29 | 2016-01-20 | 陕西华达科技股份有限公司 | Ring flange mounting hole inspection frock |
| CN205784946U (en) * | 2016-06-15 | 2016-12-07 | 合肥宽信机电有限公司 | A kind of hole location detecting cubing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109900191A (en) * | 2019-03-19 | 2019-06-18 | 宁波江丰电子材料股份有限公司 | Sputter ring hole location detecting tool and method |
| CN113566680A (en) * | 2021-07-26 | 2021-10-29 | 湖南杉杉能源科技有限公司 | Utensil is examined to rotary wheel mill |
| CN114485325A (en) * | 2022-02-17 | 2022-05-13 | 宁波江丰电子材料股份有限公司 | Target hole site installation detection tool and detection method |
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Application publication date: 20180928 |