WO2023188999A1 - プローブピンおよびプローブカード - Google Patents
プローブピンおよびプローブカード Download PDFInfo
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- WO2023188999A1 WO2023188999A1 PCT/JP2023/005990 JP2023005990W WO2023188999A1 WO 2023188999 A1 WO2023188999 A1 WO 2023188999A1 JP 2023005990 W JP2023005990 W JP 2023005990W WO 2023188999 A1 WO2023188999 A1 WO 2023188999A1
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- WIPO (PCT)
- Prior art keywords
- resistance member
- low
- probe pin
- probe
- layer
- Prior art date
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- 239000000523 sample Substances 0.000 title claims abstract description 162
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 238000007689 inspection Methods 0.000 claims abstract description 9
- 238000012360 testing method Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 56
- 239000004065 semiconductor Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 16
- 239000004020 conductor Substances 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 10
- 239000002356 single layer Substances 0.000 description 8
- 230000005489 elastic deformation Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G01R1/06761—Material aspects related to layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Definitions
- This application relates to probe pins and probe cards.
- a probe card is a card (substrate) to which probe pins (probes) are attached.
- the probe card connects each electrode (power input electrode, signal output electrode, ground electrode) of an electronic circuit of a semiconductor device formed on a semiconductor wafer to a tester device through probe pins.
- Inspection of the electrical characteristics of the electronic circuit of a semiconductor device is performed by supplying current to the semiconductor device to operate the semiconductor device and checking whether the semiconductor device outputs a predetermined signal. In this test, a large current flows through the probe pin for power supply (power supply pin) and the ground probe pin for grounding (ground pin).
- the present application discloses a technique for solving the above-mentioned problems, and aims to provide a probe pin and a probe card that can maintain mechanical strength and increase the allowable current value.
- the probe pin disclosed in the present application has a contact portion that contacts an electrode to be inspected at one end in the longitudinal direction, and a terminal portion that contacts a circuit board at the other end in the longitudinal direction,
- the probe pin includes a low-resistance member made of a first conductive metal and a high-resistance member made of a second conductive metal having a higher resistivity than the low-resistance member.
- a plurality of high-resistance members, slits that are voids, and low-resistance members are arranged in this order between the terminal portion and the probe pin in a first direction different from the buckling direction of the probe pin during the inspection of the test object.
- the low resistance member and the high resistance member are arranged so as not to overlap each other when the plurality of layered parts are viewed from the buckling direction.
- the probe card disclosed in the present application includes a plurality of the probe pins.
- FIG. 3 is a diagram schematically showing a test state of an electronic circuit using the probe card according to the first embodiment.
- FIG. 2A is an enlarged view of the main part of FIG.
- FIG. 2B is a perspective view of the probe pin.
- FIG. 2C is a cross-sectional view taken along A1-A1 and A2-A2 in FIG. 2B.
- FIG. 2D is a cross-sectional view taken along lines B1-B1 and B2-B2 in FIG. 2B.
- FIG. 2E is a sectional view taken along line CC in FIG. 2B.
- FIG. 3 is a diagram showing the permissible range in the arrangement of the five-layer section according to the first embodiment.
- FIG. 3 is a diagram showing the permissible range in the arrangement of the five-layer section according to the first embodiment.
- FIG. 4A is a diagram showing the configuration of a low resistance member of a probe pin according to the second embodiment.
- FIG. 4B is a diagram of the probe pin according to the second embodiment viewed from the buckling direction Z.
- FIG. 4C is a sectional view taken along line DD in FIG. 4B.
- FIG. 4D is a cross-sectional view taken along E1-E1 and E2-E2 in FIG. 4B.
- FIG. 4E is a sectional view taken along line FF in FIG. 4B.
- 7 is a sectional view perpendicular to the longitudinal direction of a five-layer portion of a probe pin according to Embodiment 3.
- FIG. FIG. 6A is a diagram of the probe pin according to Embodiment 4 viewed from the buckling direction Z.
- FIG. 6B is a sectional view taken along line DD in FIG. 6A.
- FIG. 6C is a sectional view taken along lines E1-E1, E2-E2, and GG in FIG. 6A.
- FIG. 6D is a sectional view taken along line FF in FIG. 6A.
- FIG. 7A is a diagram showing the configuration of a high resistance member of a probe pin according to Embodiment 5.
- FIG. 7B is a diagram of the probe pin according to Embodiment 5 viewed from the buckling direction Z.
- FIG. 7C is a sectional view taken along line DD in FIG. 7B.
- FIG. 7D is a cross-sectional view taken along E1-E1 and E2-E2 in FIG. 7B.
- FIG. 7E is a sectional view taken along line FF in FIG. 7B.
- FIG. 8A is a diagram of the probe pin according to the sixth embodiment viewed from the buckling direction Z.
- FIG. 8B is a cross-sectional view taken along E1-E1 and E2-E2 in FIG. 8A.
- FIG. 8C is a sectional view taken along line FF in FIG. 8A.
- FIG. 1 is a diagram schematically showing a test state of an electronic circuit using a probe card 100 according to the first embodiment.
- the upper side of the page in FIG. 1 will be referred to as “top” and the lower side of the page will be referred to as “bottom.” That is, when viewed from the probe card 100, the side to be inspected is the "lower" side.
- the left-right direction in the paper of FIG. 1 is defined as a buckling direction Z
- the direction from the front to the back of the paper and the opposite direction thereof is defined as a direction Y (first direction) perpendicular to the buckling direction Z for convenience.
- the probe card 100 is a device used to test the electrical characteristics of an electronic circuit of a semiconductor device formed on a semiconductor wafer W.
- the probe card 100 includes a large number of probe pins 20 that are brought into contact with electrodes C on electronic circuits of semiconductor devices formed on a semiconductor wafer W, respectively.
- To test the characteristics of an electronic circuit bring the semiconductor wafer W close to the probe card 100, bring the tips of the probe pins 20 into contact with the electrodes C on the electronic circuit, and wire the probe card 100 to a tester device (not shown) via the probe pins 20. This is carried out by electrically connecting the tester connection electrode TC of the substrate 14.
- the probe card 100 includes a hollow frame 10, an upper guide 11 attached to the upper end of the frame 10, a lower guide 12 attached to the lower end of the frame 10, a fixing plate 13 for fixing the upper guide 11, and a wiring board 14. Equipped with An intermediate guide may be further provided between the upper guide 11 and the lower guide 12.
- the upper guide 11 has a plurality of guide holes 11H penetrating in the vertical direction
- the lower guide 12 provided below the upper guide 11 also has a plurality of guide holes 12H penetrating in the vertical direction.
- Above the group of guide holes 11H provided in the upper guide 11 is an opening 13H provided in the fixed plate 13.
- a wiring board 14 is arranged on the upper surface of the fixed plate 13.
- the wiring board 14 includes, on its lower surface, a plurality of probe connection pads 14P that come into contact with the terminal portions 20t at the upper ends of the probe pins 20.
- the probe pin 20 is a vertical probe pin arranged perpendicularly to the object to be inspected (electronic circuit formed on the semiconductor wafer W).
- FIG. 2A is an enlarged view of the main part of FIG. One probe pin 20, upper guide 11 and lower guide 12 are shown.
- the left-right direction in FIG. 2A is the buckling direction Z of the probe pin 20, that is, the direction in which the probe pin 20 is elastically deformed when the probe card 100 is overdriven.
- FIG. 2B is a perspective view of the probe pin 20.
- the direction Y shown in the figure is perpendicular to the buckling direction Z.
- the probe pin 20 has an elongated shape.
- the central portion is curved, and the upper and lower portions extend vertically in a straight line.
- the curved central portion is the elastic deformation portion 20m.
- a contact portion 20c is provided at the lower end (one end) of the probe pin 20.
- a terminal portion 20t is formed at the upper end (other end).
- the contact portion 20c is a contact portion that is brought into contact with the object to be inspected. Further, the terminal portion 20t is provided at the upper end portion of the probe pin 20, and is pressed against the probe connection pad 14P of the wiring board 14 during inspection.
- the elastically deformable portion 20m is a portion that easily undergoes buckling deformation when compressive force is applied in the longitudinal direction during overdrive. During overdrive, the elastically deformable portion 20m undergoes buckling deformation in the buckling direction Z in response to the reaction force from the test object, and the contact portion 20c retreats toward the terminal portion 20t.
- a predetermined range above the elastic deformation portion 20m is the upper guide storage portion 20U. This portion is accommodated in the guide hole 11H of the upper guide 11. Further, a predetermined range below the elastic deformation portion 20m is the lower guide storage portion 20D. This portion is accommodated in the guide hole 12H of the lower guide 12.
- the probe pin 20 is made of two types of metals that are electrically conductive and have different resistivities.
- One is a metal (first metal) constituting the low resistance member L, which is made of a metal with low resistivity such as copper, gold, silver (Cu, Au, Ag).
- the other is a metal (second metal) constituting the high-resistance member H, such as a palladium alloy, which has a higher resistivity than the low-resistance member L, and has low conductivity but high mechanical strength.
- the low resistance member L has high conductivity and functions to increase the allowable current value.
- the high resistance member H functions to maintain mechanical strength.
- the flow rate of current is smaller in the high resistance member H, so the heat generation in the high resistance member H is less than in the low resistance member L.
- the resistivity of palladium alloy is about 35.8 ⁇ m, while that of Au is about 3 ⁇ m. If the cross-sectional area is the same, the amount of heat generated by the low-resistance member L is lower than that of the high-resistance member L. This is 12 times the amount of heat generated by member H.
- FIG. 2C is a sectional view taken along lines A1-A1 and A2-A2 in FIG. 2B, and is a sectional view perpendicular to the longitudinal direction of the single-layer portion T1 of the probe pin 20.
- FIG. 2D is a sectional view taken along lines B1-B1 and B2-B2 in FIG. 2B, and is a sectional view perpendicular to the longitudinal direction of the three-layer portion T3 of the probe pin 20.
- FIG. 2E is a cross-sectional view taken along the line CC in FIG. 2B, and is a cross-sectional view perpendicular to the longitudinal direction of the five-layer portion T5 (multilayer portion) of the probe pin 20.
- the upper end portion including the terminal portion 20t and the lower end portion including the contact portion 20c are a single layer portion T1 composed of a single layer of only the high resistance member H.
- the number of "layers” refers to the number of layers of material that constitutes the probe pin 20 in the direction Y perpendicular to the buckling direction Z, and the layers include voids (gas).
- the single-layer portion T1 is composed of only a single-layer high-resistance member H in the direction Y perpendicular to the buckling direction Z.
- the terminal portion 20t is repeatedly pressed against the probe connection pad 14P of the wiring board 14, and the contact portion 20c is pressed against the electrode C on the electronic circuit formed on the semiconductor wafer W. Since mechanical strength is required, it is constructed only of high-resistance members H having strong mechanical strength.
- the lower part of the upper end of the probe pin 20 composed of only the above-mentioned high-resistance member H and the upper part of the above-mentioned lower end are provided with high-resistance members H on both sides of the direction Y perpendicular to the buckling direction Z.
- the three-layer portion T3 is composed of three layers: a high-resistance member H, a low-resistance member L, and a high-resistance member H in the direction Y perpendicular to the buckling direction Z in the cross section of FIG. 2D.
- the adjacent layers are fixed to each other.
- a part of the upper three-layer part T3 becomes the above-mentioned upper guide internal storage part 20U, and a part of the lower three-layer part T3 becomes the lower guide internal storage part 20D.
- the portion corresponding to the elastic deformation portion 20m between the upper and lower two three-layer portions T3 is provided with high-resistance members H on both sides of the direction Y perpendicular to the buckling direction Z, and the two high-resistance members H In between, there is a five-layer part T5 formed with a low-resistance member L sandwiched therebetween via slits S penetrating on both sides in the buckling direction Z.
- the five-layer part T5 includes a high-resistance member H, a slit S as a void, a low-resistance member L, a slit S as a void, and a high-resistance member in the direction Y perpendicular to the buckling direction Z. It is composed of five layers of H.
- the high-resistance member H of the probe pin 20 splits into two parts downward from the upper end of the probe pin 20, and then comes together again at the lower end.
- the low resistance member L of the upper three-layer section T3, the low resistance member L of the five-layer section T5, and the low resistance member L of the lower three-layer section T3 are all connected and perpendicular to the longitudinal direction.
- the cross section is a plate-like rectangle.
- the low resistance member L During inspection, the low resistance member L generates 12 times more heat than the high resistance member H.
- an upper guide storage section 20U and a lower guide storage section 20D which are parts thereof, are stored in the guide holes 11H and 12H of the upper guide 11 and the lower guide 12, respectively, and the upper guide 11. Since the outer peripheral surface contacts the lower guide 12, the heat conducted from the low resistance member L to the high resistance member H at that part is radiated by the upper guide 11 and the lower guide 12, and the high resistance member H is damaged by the heat. There's nothing to do.
- the range in which the heat dissipation effect of the upper guide 11 and the lower guide 12 can be obtained is from 500 ⁇ m to 1000 ⁇ m from the upper guide 11 and the lower guide 12. Therefore, the length of the three-layer section T3 from the upper guide 11 and the lower guide 12 to the five-layer section T5 is preferably set in the range of 500 ⁇ m to 1000 ⁇ m.
- the heat of the low resistance member L is conducted to the high resistance member H, may cause a decrease in strength. Therefore, a slit S is provided between the low resistance member L and the high resistance member H to dissipate the heat generated in the low resistance member L, and at the same time, the high heat of the low resistance member L is directly conducted to the high resistance member H. This prevents the mechanical strength of the high resistance member H from decreasing.
- probe pins buckle in the buckling direction during overdrive. At this time, the low-resistance member becomes much hotter than the high-resistance member, so it expands more than the high-resistance member.
- Patent Document 1 shown as a prior art document, when a high-resistance member and a low-resistance member are arranged side by side with slits passing through both sides in the direction perpendicular to the buckling direction, the high-resistance member and the low-resistance member are Due to the difference in expansion coefficient with the low-resistance member and deformation due to buckling, the high-temperature low-resistance member comes into contact with the high-resistance member adjacent to it in the buckling direction, and the high heat of the low-resistance member is conducted to the high-resistance member. Put it away. This causes a problem in that the high-resistance member is plastically deformed and the stylus pressure of the contact portion against the electrode of the electronic circuit is reduced.
- the high resistance member H and the low resistance member L are arranged in the direction Y perpendicular to the buckling direction Z through the slit S penetrating in the buckling direction Z, Even if the respective expansion coefficients are different, the above-mentioned problem does not occur because the adjacent low-resistance members L and the high-resistance members H on both sides do not come into contact with each other via the slit S.
- the low-resistance member L and the high-resistance member H are arranged so that they do not overlap, so that heat can be reduced. Even if there is deformation due to expansion and buckling, there is no problem because contact between the low resistance member L and the high resistance member H does not occur.
- FIG. 3 is a diagram showing a design tolerance range in the arrangement of the five-layer portion T5.
- the five-layer part T5 has been described as having a low resistance member L, a high resistance member H, and a slit S arranged in a direction Y perpendicular to the buckling direction Z. is a direction different from the buckling direction Z, and as shown in FIG. It's fine if you don't have it. Even in this case, even if there is deformation due to thermal expansion and buckling, contact between the low resistance member L and the high resistance member H does not occur.
- the probe pin 20 is manufactured using so-called MEMS (Micro Electro Mechanical Systems) technology.
- MEMS technology is a technology for creating fine three-dimensional structures using photolithography technology and sacrificial layer etching technology.
- Photolithography technology is a fine pattern processing technology using photoresist used in semiconductor manufacturing processes.
- sacrificial layer etching technology creates a three-dimensional structure by forming a lower layer called a sacrificial layer, forming the layers that make up the structure on top of it, and then removing only the sacrificial layer by etching. It's technology.
- each layer including the sacrificial layer can be formed using metal ions in the electrolyte.
- metal ions in the electrolyte can be attached to the substrate surface by immersing a substrate as a cathode and a metal piece as an anode in an electrolyte and applying a voltage between the two electrodes.
- Such a process is called an electroplating process, and since it is a wet process in which the substrate is immersed in an electrolytic solution, a drying process is performed after the plating process.
- the probe pin 20 and probe card 100 when inspecting an electronic circuit formed on a semiconductor wafer W, the probe pin 20 is connected to the adjacent low resistance member L on both sides through the slit S. Since the high-resistance member H is not lined up in the buckling direction Z, they do not come into contact with each other even if there is deformation due to thermal expansion and buckling. Therefore, the high heat of the low-resistance member L is not conducted to the high-resistance member H, making it possible to provide a probe pin and probe card with high heat dissipation and allowable current value.
- FIG. 4A is a diagram showing the configuration of the low resistance member L of the probe pin 220.
- FIG. 4B is a diagram of the probe pin 220 viewed from the buckling direction Z shown in FIG. 4A.
- FIG. 4C is a cross-sectional view taken along the line DD in FIG. 4B, and is a cross-sectional view perpendicular to the longitudinal direction of the single-layer portion T1 of the probe pin 220.
- the cross-sectional shape of this portion is the same as in the first embodiment.
- FIG. 4D is a cross-sectional view taken along lines E1-E1 and E2-E2 in FIG. 4B, and is a cross-sectional view perpendicular to the longitudinal direction of the upper guide housing portion 220U and the lower guide housing portion 220D of the probe pin 220.
- the cross-sectional shape of this portion is different from that of the first embodiment.
- FIG. 4C is a cross-sectional view taken along the line DD in FIG. 4B, and is a cross-sectional view perpendicular to the longitudinal direction of the single-layer portion T1 of the probe pin 220.
- the cross-sectional shape of this portion is the same as in the first embodiment.
- FIG. 4D shows a cross-sectional shape of a portion corresponding to the three-layer portion T3 of the first embodiment.
- FIG. 4E is a sectional view taken along line FF in FIG. 4B, and is a sectional view perpendicular to the longitudinal direction of the five-layer portion T5 of the probe pin 220.
- the cross-sectional shape of this portion is the same as in the first embodiment.
- the width of the low resistance member L in the buckling direction Z is narrower above and below the five-layer portion T5.
- the low resistance member L is embedded in the high resistance member H. That is, the entire periphery of the outer peripheral surface of the low resistance member L is covered with the high resistance member H.
- the same effects as in the first embodiment can be achieved when testing an electronic circuit formed on a semiconductor wafer W.
- the periphery of the outer peripheral surface of the upper guide housing portion 220U that contacts the upper guide 11 and the lower guide housing portion 220D that contacts the lower guide 12 of the probe pin 220 is made of a high resistance member that is harder than the low resistance member L. Since the probe pins 220 and the probe card 100 are completely covered by H, it is possible to provide the probe pins 220 and the probe card 100 with even higher durability.
- FIG. 5 is a cross-sectional view perpendicular to the longitudinal direction of the five-layer portion T5 of the probe pin 320.
- the low resistance member L and the high resistance member H have different expansion coefficients during inspection.
- the low resistance member L which becomes hotter, expands and buckles more than the high resistance member H. Therefore, in the third embodiment, a thin plate-like high resistance member H is also provided on the end face of the low resistance member L in the buckling direction Z of the five-layer portion T5 to reduce the difference in expansion coefficient. Thereby, the difference in expansion coefficient between the low resistance member L and the high resistance member H can be suppressed from affecting the needle pressure of the probe pin 320.
- the same effects as in the first embodiment can be achieved when testing an electronic circuit formed on a semiconductor wafer W. Further, since the expansion rate of the low resistance member L of the five-layer portion T5 can be adjusted and the needle pressure of the probe pin 320 can be stabilized, a more reliable probe pin 320 and probe card 100 can be provided.
- FIG. 6A is a diagram of the probe pin 420 viewed from the buckling direction Z.
- FIG. 6B is a DD cross-sectional view of the probe pin 420 in FIG. 6A, showing a cross section perpendicular to the longitudinal direction of the single layer portion T1 of the probe pin 420. The cross-sectional shape of this portion is the same as in the first to third embodiments.
- FIG. 6C is a cross-sectional view taken along lines E1-E1, E2-E2, and GG in FIG. A vertical cross section is shown.
- each guide is the same as those in the second embodiment, but in the fourth embodiment, a bridge portion Br is disposed midway in the longitudinal direction of the five-layer portion T5.
- the cross-sectional shape of this bridge portion Br is the same as the cross-sectional shapes of the upper guide storage portion 220U and the lower guide storage portion 220D.
- FIG. 6D is a sectional view taken along line FF in FIG. 6A, showing a cross section perpendicular to the longitudinal direction of the five-layer portion T5 of the probe pin 220.
- the cross-sectional shape of this portion is the same as in the first embodiment.
- a bridge portion Br is disposed midway in the longitudinal direction of the five-layer portion T5 of the second embodiment.
- the bridge portion Br may be provided at one location or may be provided at a plurality of locations.
- the same effects as in the first embodiment can be achieved when testing an electronic circuit formed on a semiconductor wafer W.
- the amount of expansion of the low resistance member L of the five-layer portion T5 is dispersed by the bridge portion Br, and the buckling shape of the low resistance member L and the high resistance member H can be controlled, so that the probe pin 320 and A probe card 100 can be provided.
- FIG. 7A is a diagram showing the configuration of the high resistance member of the probe pin 520.
- FIG. 7B is a diagram of the probe pin 520 viewed from the buckling direction Z.
- FIG. 7C is a sectional view taken along line DD in FIG. 7B.
- FIG. 7D is a cross-sectional view taken along E1-E1 and E2-E2 in FIG. 7B.
- FIG. 7E is a sectional view taken along line FF in FIG. 7B.
- the difference between the probe pin 220 described in Embodiment 2 and the probe pin 520 in this practical embodiment is that the high resistance member H and low resistance member L of the 5-layer portion T505 are opposite to those in Embodiment 2. This is what is happening. That is, the high-resistance member H of the probe pin 220 described in the second embodiment is the low-resistance member L in the fifth embodiment, and the low-resistance member L of the probe pin 220 described in the second embodiment is However, in the fifth embodiment, the high resistance member H is used. All other configurations are the same.
- the probe pin 20 when inspecting an electronic circuit formed on a semiconductor wafer W, the probe pin 20 is connected to the adjacent low resistance member L through the slit S on both sides. Since the high resistance members H are not lined up in the buckling direction Z, they do not come into contact with each other even if their expansion coefficients are different. Therefore, the high heat of the low-resistance member L is not conducted to the high-resistance member H, making it possible to provide a probe pin and a probe card with high heat dissipation and allowable current value.
- FIG. 8A is a diagram of the probe pin 620 viewed from the buckling direction Z.
- FIG. 8B is a cross-sectional view taken along E1-E1 and E2-E2 in FIG. 8B.
- FIG. 8C is a sectional view taken along line FF in FIG. 8A.
- the elastic deformation part 620m has a five-layer part T5 including the slits, but in the sixth embodiment, high-resistance members are sequentially formed in the direction Y perpendicular to the buckling direction Z.
- a second third layer portion T603 (multiple layer portion) includes a slit S, a slit S, and a low resistance member L.
- a high resistance member H is provided above and below the second third layer portion T603. Note that above and below the second third layer portion T603, there may be a two layer portion including a high resistance member H and a low resistance member L in order in the direction Y perpendicular to the buckling direction Z.
- the probe pin 620 and the probe card 100 when inspecting an electronic circuit formed on a semiconductor wafer W, the probe pin 620 is connected to an adjacent low resistance member L through the slit S of the high resistance member L. Since the members H are not lined up in the buckling direction Z, they do not come into contact with each other even if their expansion coefficients are different. Therefore, the high heat of the low-resistance member L is not conducted to the high-resistance member H, making it possible to provide a probe pin and probe card with high heat dissipation and allowable current value.
- probe card 100 probe card, 10 frame, 11 upper guide, 12 lower guide, 11H, 12H guide hole, 13 fixing plate, 13H opening, 14 wiring board, 14P probe connection pad, 20, 220, 320, 420, 520, 620 probe Pin, 20c Contact part, 20m, 620m Elastic deformation part, 20t Terminal part, 20U, 220U Upper guide storage part, 20D, 220D Lower guide storage part, T1 Single layer part, T3 3rd layer part, T603 2nd 3rd layer Part, T5, T505 5th layer part, Br bridge part, C electrode, H high resistance member, L low resistance member, S slit, TC tester connection electrode, W semiconductor wafer, Z buckling direction.
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Abstract
Description
また、垂直に配置されるプローブピンの場合、電子回路の電極へのプローブピンの接触を確実にするために、プローブピンが座屈するまでプローブカードを半導体ウエハに押し付けることが行われる。このため、導電率の異なる導体が座屈方向に並べられていると、熱膨張と、座屈による変位とによって導体同士が接触し易くなるという問題がある。
前記プローブピンは、導電性を有する第1金属からなる低抵抗部材と、前記低抵抗部材よりも抵抗率の高い、導電性を有する第2金属からなる高抵抗部材によって構成され、前記コンタクト部と前記端子部との間に、前記検査対象の検査時における前記プローブピンの座屈方向とは異なる第1方向に、前記高抵抗部材、空隙であるスリット、前記低抵抗部材の順に構成された複数層部を有し、前記複数層部を前記座屈方向から見たときに、前記低抵抗部材と前記高抵抗部材とが重なり合わないように配置されているものである。
また、本願に開示されるプローブカードは、複数の前記プローブピンを備えるものである。
以下、実施の形態1に係るプローブピンおよびプローブカードを、図を用いて説明する。
図1は、実施の形態1に係るプローブカード100による電子回路の検査状態を概略的に示す図である。
本明細書においては、図1の紙面上方を「上」、同紙面下方を「下」として説明する。すなわち、プローブカード100から見て、検査対象側を「下」とする。また、図1の紙面左右方向を、便宜上、座屈方向Zとし、紙面手前から奥に向かう方向およびその逆方向を、便宜上、座屈方向Zに垂直な方向Y(第1方向)とする。
図2Bは、プローブピン20の斜視図である。図に示す方向Yが、座屈方向Zに対して垂直な方向である。
図2Dは、図2BのB1-B1およびB2-B2断面図であり、プローブピン20の3層部T3の長手方向に対して垂直な断面図である。
図2Eは、図2BのC-C断面図であり、プローブピン20の5層部T5(複数層部)の長手方向に対して垂直な断面図である。
これまで説明した各図において、5層部T5は、低抵抗部材L、高抵抗部材H、スリットSが、座屈方向Zに対して垂直な方向Yに並ぶものとして説明したが、第1方向は座屈方向Zとは異なる方向であって、図3に示すように、プローブピン20の5層部T5を座屈方向Zから見て、低抵抗部材Lと高抵抗部材Hとが重なり合わなければよい。この場合でも、熱膨張および座屈による変形があったとしても、低抵抗部材Lと高抵抗部材Hとの接触は起こらない。
以下、実施の形態2に係るプローブピンおよびプローブカードを、実施の形態1と異なる部分を中心に説明する。
図4Aは、プローブピン220の低抵抗部材Lの構成を示す図である。
図4Bは、プローブピン220を図4Aに示す座屈方向Zから見た図である。
図4Dは、図4BのE1-E1およびE2-E2断面図であり、プローブピン220の上部ガイド内収納部220Uおよび下部ガイド内収納部220Dの長手方向に対して垂直な断面図である。この部分の断面形状が、実施の形態1と異なる。実施の形態1の3層部T3に相当する部分の断面形状が図4Dである。
図4Eは、図4BのF-F断面図であり、プローブピン220の5層部T5の長手方向に対して垂直な断面図である。この部分の断面形状は実施の形態1と同じである。
以下、実施の形態3に係るプローブピンおよびプローブカードを、実施の形態1、2と異なる部分を中心に説明する。
図5は、プローブピン320の5層部T5の長手方向に対して垂直な断面図である。
上述したように、低抵抗部材Lと高抵抗部材Hとは、検査時の膨張率が異なる。より高温になる低抵抗部材Lの方が、高抵抗部材Hよりも膨張し、座屈量も大きくなる。そこで、本実施の形態3では、5層部T5の低抵抗部材Lの座屈方向Zの端面にも薄板状の高抵抗部材Hを設けて膨張率の差を低減する。これにより、低抵抗部材Lと高抵抗部材Hの膨張率の違いが、プローブピン320の針圧に影響することを抑制できる。
以下、実施の形態4に係るプローブピンおよびプローブカードを、実施の形態1~3と異なる部分を中心に説明する。
図6Aは、プローブピン420を座屈方向Zから見た図である。
図6Bは、図6Aのプローブピン420のD-D断面図であり、プローブピン420の単層部T1の長手方向に対して垂直な断面を示している。この部分の断面形状は実施の形態1~3と同じである。
図6Cは、図6AのE1-E1、E2-E2、G-G断面図であり、プローブピン420の上部ガイド内収納部220U、下部ガイド内収納部220D、およびブリッジ部Brの長手方向に対して垂直な断面を示している。各ガイド内収納部については、実施の形態2と同じであるが、本実施の形態4では、5層部T5の長手方向の途中にブリッジ部Brを配置している。このブリッジ部Brでの断面形状は、上部ガイド内収納部220Uおよび下部ガイド内収納部220Dの断面形状と同じである。
図6Dは、図6AのF-F断面図であり、プローブピン220の5層部T5の長手方向に対して垂直な断面を示している。この部分の断面形状は実施の形態1と同じである。
ブリッジ部Brを設け、低抵抗部材Lと高抵抗部材Hとを、5層部の長手方向の全長の中間部分で、物理的に固着することによって、低抵抗部材Lが大きく撓んだ場合であっても、予期しない部分で高抵抗部材Hに接触し、高抵抗部材Hの機械的強度を損なうことを防止できる。
以下、実施の形態5に係るプローブピンおよびプローブカードを、実施の形態2と異なる部分を中心に説明する。
図7Aは、プローブピン520の高抵抗部材の構成を示す図である。
図7Bは、プローブピン520を座屈方向Zから見た図である。
図7Cは、図7BのD-D断面図である。
図7Dは、図7BのE1-E1およびE2-E2断面図である。
図7Eは、図7BのF-F断面図である。
実施の形態2で説明したプローブピン220と、本実地の形態のプローブピン520との違いは、5層部T505の高抵抗部材Hと低抵抗部材Lとが、実施の形態2とは逆になっていることである。すなわち、実施の形態2で説明したプローブピン220の高抵抗部材Hが、本実施の形態5では、低抵抗部材Lとなっており、実施の形態2で説明したプローブピン220の低抵抗部材Lが、本実施の形態5では高抵抗部材Hとなっている。その他の構成は全て同じである。
以下、実施の形態6に係るプローブピンおよびプローブカードを、実施の形態1と異なる部分を中心に説明する。
図8Aは、プローブピン620を座屈方向Zから見た図である。
図8Bは、図8BのE1-E1およびE2-E2断面図である。
図8Cは、図8AのF-F断面図である。
なお、第二3層部T603よりも上方及び下方については、座屈方向Zに対して垂直な方向Yに順に高抵抗部材H、低抵抗部材Lの2層部としてもよい。
従って、例示されていない無数の変形例が、本願に開示される技術の範囲内において想定される。例えば、少なくとも1つの構成要素を変形する場合、追加する場合または省略する場合、さらには、少なくとも1つの構成要素を抽出し、他の実施の形態の構成要素と組み合わせる場合が含まれるものとする。
Claims (12)
- 長手方向の一端に検査対象の電極に接触させるコンタクト部を有し、長手方向の他端に回路基板に接触させる端子部を有するプローブピンであって、
前記プローブピンは、導電性を有する第1金属からなる低抵抗部材と、前記低抵抗部材よりも抵抗率の高い、導電性を有する第2金属からなる高抵抗部材によって構成され、
前記コンタクト部と前記端子部との間に、前記検査対象の検査時における前記プローブピンの座屈方向とは異なる第1方向に、前記高抵抗部材、空隙であるスリット、前記低抵抗部材の順に構成された複数層部を有し、
前記複数層部を前記座屈方向から見たときに、前記低抵抗部材と前記高抵抗部材とが重なり合わないように配置されているプローブピン。 - 前記複数層部は、前記高抵抗部材、前記スリット、前記低抵抗部材、前記スリット、前記高抵抗部材の順に5層に構成された5層部である請求項1に記載のプローブピン。
- 前記5層部の、前記長手方向の両側に、前記第1方向に、2つの前記高抵抗部材の間に前記低抵抗部材を挟んで形成される3層部を有し、前記5層部の前記低抵抗部材と前記3層部の前記低抵抗部材とは前記長手方向に連続して繋がり、前記5層部の前記高抵抗部材と前記3層部の前記高抵抗部材とは前記長手方向に連続して繋がり、前記コンタクト部と前記端子部は、前記高抵抗部材のみで構成されている請求項2に記載のプローブピン。
- 前記端子部と前記5層部との間、および前記5層部と前記コンタクト部との間に、前記低抵抗部材の外周面の周囲が、全て、前記高抵抗部材で覆われた、ガイド内収納部を備えている請求項3に記載のプローブピン。
- 前記複数層部の前記低抵抗部材は、前記座屈方向の少なくとも一方の面に、前記高抵抗部材を備えている請求項1に記載のプローブピン。
- 前記5層部の前記長手方向の上端と、下端との間に、前記低抵抗部材の外周面の周囲が、全て、前記高抵抗部材で覆われ、前記低抵抗部材と前記高抵抗部材とが固着されたブリッジ部を備えている請求項2に記載のプローブピン。
- 前記第1方向は、前記座屈方向に対して垂直な方向である請求項1から請求項6のいずれか1項に記載のプローブピン。
- 前記複数層部は、前記高抵抗部材、前記スリット、前記低抵抗部材の順に3層に構成された第二3層部である請求項1に記載のプローブピン。
- 前記複数層部は、前記低抵抗部材、前記スリット、前記高抵抗部材、前記スリット、前記低抵抗部材の順に5層に構成された5層部である請求項1に記載のプローブピン。
- 請求項1に記載の複数の前記プローブピンを備えているプローブカード。
- 請求項4に記載の複数のプローブピンと、
それぞれの前記プローブピンを挿入してガイドする複数のガイド孔を有するガイドを備え、前記ガイド内収納部は、前記ガイド孔内に挿入されているプローブカード。 - 前記ガイド内収納部から前記5層部までの前記3層部の長さは、500um~1000μmである請求項11に記載のプローブカード。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009272308A (ja) * | 2008-05-09 | 2009-11-19 | Feinmetall Gmbh | 電気検査の対象物と接触方式により接点を形成するための電気接点素子、並びに当該接触配列 |
JP2013007700A (ja) * | 2011-06-27 | 2013-01-10 | Japan Electronic Materials Corp | 電気的接触子 |
JP5995953B2 (ja) * | 2011-03-21 | 2016-09-21 | フォームファクター, インコーポレイテッド | 非線形垂直板バネ |
JP2018091870A (ja) * | 2012-12-04 | 2018-06-14 | 日本電子材料株式会社 | 電気的接触子 |
CN109425765A (zh) * | 2017-08-23 | 2019-03-05 | 李诺工业股份有限公司 | 微机电系统探针、制作其的方法及使用其的测试装置 |
WO2021122326A1 (en) * | 2019-12-19 | 2021-06-24 | Technoprobe S.P.A. | Contact probe for high-frequency applications with improved current capacity |
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---|---|---|---|---|
JPS6018189Y2 (ja) | 1982-12-20 | 1985-06-03 | 啓 荒木 | 食器抱持器 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009272308A (ja) * | 2008-05-09 | 2009-11-19 | Feinmetall Gmbh | 電気検査の対象物と接触方式により接点を形成するための電気接点素子、並びに当該接触配列 |
JP5995953B2 (ja) * | 2011-03-21 | 2016-09-21 | フォームファクター, インコーポレイテッド | 非線形垂直板バネ |
JP2013007700A (ja) * | 2011-06-27 | 2013-01-10 | Japan Electronic Materials Corp | 電気的接触子 |
JP2018091870A (ja) * | 2012-12-04 | 2018-06-14 | 日本電子材料株式会社 | 電気的接触子 |
CN109425765A (zh) * | 2017-08-23 | 2019-03-05 | 李诺工业股份有限公司 | 微机电系统探针、制作其的方法及使用其的测试装置 |
WO2021122326A1 (en) * | 2019-12-19 | 2021-06-24 | Technoprobe S.P.A. | Contact probe for high-frequency applications with improved current capacity |
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