WO2023163493A1 - Broche de contact électroconductrice - Google Patents

Broche de contact électroconductrice Download PDF

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Publication number
WO2023163493A1
WO2023163493A1 PCT/KR2023/002495 KR2023002495W WO2023163493A1 WO 2023163493 A1 WO2023163493 A1 WO 2023163493A1 KR 2023002495 W KR2023002495 W KR 2023002495W WO 2023163493 A1 WO2023163493 A1 WO 2023163493A1
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WO
WIPO (PCT)
Prior art keywords
electrically conductive
conductive contact
contact pin
stopper
connection
Prior art date
Application number
PCT/KR2023/002495
Other languages
English (en)
Korean (ko)
Inventor
안범모
박승호
홍창희
Original Assignee
(주)포인트엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)포인트엔지니어링 filed Critical (주)포인트엔지니어링
Publication of WO2023163493A1 publication Critical patent/WO2023163493A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers

Definitions

  • the present invention relates to electrically conductive contact pins.
  • test object semiconductor wafer or semiconductor package
  • inspection device equipped with a plurality of electrically conductive contact pins
  • the electrically conductive contact pins are connected to the corresponding external terminals (solder balls or bumps, etc.) on the test object.
  • Examples of testing devices include, but are not limited to, probe cards or test sockets.
  • test sockets include a pogo type test socket and a rubber type test socket.
  • An electrically conductive contact pin (hereinafter referred to as 'pogo type socket pin') used in a pogo type test socket includes a pin unit and a barrel accommodating the pin unit.
  • a spring member between the plungers at both ends of the pin, it is possible to apply necessary contact pressure and absorb shock at the contact position.
  • a gap In order for the pin to slide within the barrel, a gap must exist between the outer surface of the pin and the inner surface of the barrel.
  • these pogo-type socket pins are manufactured separately from the barrel and pin and then combine them, it is impossible to precisely manage the gap, such that the outer surface of the pin is separated from the inner surface of the barrel more than necessary.
  • the pin portion has a sharp tip portion in order to increase the contact effect with the external terminal of the test object.
  • the pointed tip portion generates a press-fitting mark or groove on the external terminal of the test object after the test. Due to the loss of the contact shape of the external terminal, errors in vision inspection occur and reliability of the external terminal is deteriorated in a subsequent process such as soldering.
  • the electrically conductive contact pin (hereinafter referred to as 'rubber type socket pin') used in the rubber type test socket has a structure in which conductive microballs are placed inside a rubber material, silicon rubber, When stress is applied by raising the semiconductor package and closing the socket, the conductive microballs made of gold strongly press each other and the conductivity increases, making them electrically connected.
  • this rubber-type socket pin has a problem in that contact stability is secured only when it is pressed with an excessive pressing force.
  • the pitch of external terminals of an object to be inspected is becoming more narrow.
  • a molding material in which conductive particles are distributed in a fluid elastic material is prepared, the molding material is inserted into a predetermined mold, and then a magnetic field is applied in the thickness direction to move the conductive particles in the thickness direction. Since it is manufactured by arranging the magnetic field, when the distance between the magnetic fields is narrowed, the conductive particles are irregularly oriented and the signal flows in the plane direction. Therefore, existing rubber-type socket pins have limitations in responding to the narrow pitch technology trend.
  • pogo-type socket pin is used after separately manufacturing the barrel and the pin, it is difficult to manufacture them in a small size. Therefore, existing pogo-type socket pins also have limitations in responding to the narrow pitch technology trend.
  • Patent Document 1 Republic of Korea Registration No. 10-0659944 Patent Registration
  • Patent Document 2 Republic of Korea Registration No. 10-0952712 Patent Publication
  • the present invention has been made to solve the above-described problems of the prior art, and an object of the present invention is to provide an electrically conductive contact pin with improved test reliability for an object to be tested.
  • the present invention aims to limit the amount of compression of the electrically conductive contact pin through the stopper portion.
  • an electrically conductive contact pin includes a first connection portion; a second connection; a support extending in the longitudinal direction; an elastic part connected to at least one of the first connection part and the second connection part and elastically deformable along the longitudinal direction; a flange portion connected to at least one of the first connection portion and the elastic portion, provided between the support portion and the elastic portion, and extending in a longitudinal direction; and a stopper portion connected to at least one of the support portion and the elastic portion and extending in a width direction, wherein the stopper portion is in contact with the flange portion moving downward according to the compressive deformation of the elastic portion to lower the flange portion. limit the location.
  • the stopper part extends from the inner surface of the support part to the inside in the width direction and is connected to the elastic part.
  • the stopper portion is provided by forming a recessed portion in the width direction at the bottom of the support portion.
  • the stopper unit may include a first stopper unit provided on one side of the elastic unit; and a second stopper portion opposite to the first stopper portion provided on the other side of the elastic portion, wherein the first stopper portion and the second stopper portion are provided at the same position in the longitudinal direction.
  • the stopper unit may include a first stopper unit provided on one side of the elastic unit; and a second stopper portion opposed to the first stopper portion and provided on the other side of the elastic portion, wherein the first stopper portion and the second stopper portion are provided at different positions in the longitudinal direction.
  • the upper surface of the stopper part is provided concavely.
  • a thick portion having a thickness greater than that of the peripheral portion in the width direction is included on both sides of the elastic portion, and the flange portion is connected to the elastic portion through the thick portion.
  • the flange portion extends in a longitudinal direction from a lower surface of one side of the first connection portion and is provided between the support portion and the elastic portion.
  • first connection portion may include a contact portion; and an upward protrusion having a contact protrusion at an upper end thereof.
  • the first connection portion may include a contact portion; a contact cavity formed in the contact portion; and a contact protrusion extending in a longitudinal direction from an upper surface of the contact part.
  • connection unit may include a connection body unit; a connection cavity formed in the connection body; and at least one pad connection protrusion provided on a lower surface of the connection body.
  • connection unit may include a connection body unit; an inclined leg portion extending upward from both sides of the connecting body portion; and a second catching portion provided at one end of the inclined leg portion.
  • connection body portion In addition, the second connection portion, the connection body portion; and an extension portion extending upward to the connection body portion.
  • the support portion a first holding portion provided at one end; and a second catching portion provided at the other end.
  • a plurality of metal layers are formed by being stacked in the thickness direction of the electrically conductive contact pin.
  • a fine trench provided on the side surface is included.
  • the present invention provides an electrically conductive contact pin with improved test reliability for an object to be tested.
  • the present invention provides an electrically conductive contact pin capable of limiting the amount of compression of the electrically conductive contact pin through the stopper portion.
  • FIG. 1 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 2 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • Figure 3 is a perspective view of an installation member according to a preferred embodiment of the present invention.
  • FIG. 4 shows an electrically conductive contact pin according to a first preferred embodiment of the present invention installed on an installation member
  • Figure 5 is a diagram showing the inspection of the inspection target using the inspection device according to a preferred embodiment of the present invention.
  • FIG. 6 is a diagram representing a current path of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 7A to 7D are diagrams for explaining a method of manufacturing an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIG. 7A is a plan view of a mold in which an internal space is formed
  • FIG. 7B is A-A of FIG. 7A.
  • Figure 7c is a plan view showing that the electroplating process is performed on the inner space
  • Figure 7d is a cross-sectional view A-A' of Figure 7c.
  • FIG. 8 is an enlarged view of a portion of a side surface of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 9 is a plan view of an electrically conductive contact pin according to a second preferred embodiment of the present invention.
  • FIG. 10 is a plan view of an electrically conductive contact pin according to a third preferred embodiment of the present invention.
  • FIG. 11 is a plan view of an electrically conductive contact pin according to a fourth preferred embodiment of the present invention.
  • FIG. 12 is a plan view of an electrically conductive contact pin according to a fifth preferred embodiment of the present invention.
  • Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content.
  • the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes.
  • Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise.
  • the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e are provided in the test device 10 and electrically and physically contact the test object 400 to transmit electrical signals.
  • the inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the test device 10 is installed with electrically conductive contact pins 100a, 100b, 100c, 100d and 100e and through holes 210 accommodating the electrically conductive contact pins 100a, 100b, 100c, 100d and 100e.
  • It includes member 200.
  • the installation member 200 may be, for example, a guide plate GP having a guide hole GH.
  • the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e may be probe pins provided in a probe card or socket pins provided in a test socket.
  • socket pins are exemplified and described as examples of the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e, but the electrically conductive contact pin 100a according to a preferred embodiment of the present invention is not limited thereto, All pins for checking whether the object to be inspected 400 is defective by applying electricity are included.
  • the width direction of the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e described below is the ⁇ x direction indicated in the drawing, and the length direction of the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e is It is the ⁇ y direction indicated in the drawing, and the thickness direction of the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e is the ⁇ z direction indicated in the drawing.
  • the electrically conductive contact pins 100a, 100b, 100c, 100d, and 100e have an overall length dimension L in the longitudinal direction, and an overall thickness in a thickness direction ( ⁇ z direction) perpendicular to the longitudinal direction ( ⁇ y direction). It has a dimension H and an overall width dimension W in a width direction ( ⁇ x direction) perpendicular to the length direction ( ⁇ y direction).
  • an electrically conductive contact pin (hereinafter referred to as 'the electrically conductive contact pin 100a of the first embodiment') according to a first preferred embodiment of the present invention will be described with reference to FIGS. 1 to 8 .
  • FIG. 1 is a plan view of an electrically conductive contact pin 100a of the first embodiment
  • FIG. 2 is a perspective view of the electrically conductive contact pin 100a of the first embodiment
  • FIG. 3 is an installation member according to a preferred embodiment of the present invention ( 200)
  • FIG. 4 is a view showing that the electrically conductive contact pin 100a of the first embodiment is installed on the installation member 200
  • FIG. 5 is a test device 10 according to a preferred embodiment of the present invention.
  • 6 is a diagram showing the current path of the electrically conductive contact pin 100a of the first embodiment
  • FIGS. 7a is a plan view of the mold 1000 in which the inner space 1100 is formed
  • FIG. 7b is a cross-sectional view taken along line A-A' of FIG.
  • FIG. Fig. 7d is an A-A' cross-sectional view of Fig. 7c
  • Fig. 8 is an enlarged portion of a side surface of the electrically conductive contact pin 100a of the first embodiment. It is a figure shown by
  • the electrically conductive contact pin 100a of the first embodiment includes a first connection part 110, a second connection part 120, and a support part 130 extending in the longitudinal direction ( ⁇ y direction). ), and an elastic part 150 connected to at least one of the first connection part 110 and the second connection part 120 and elastically deformable along the longitudinal direction ( ⁇ y direction), the first connection part 110 and the elasticity
  • a flange part 160 connected to at least one of the parts 150 and provided between the support part 130 and the elastic part 150 and extending in the longitudinal direction ( ⁇ y direction), and the support part 130 and the elastic part 150
  • the first connection part 110, the second connection part 120, the support part 130, the elastic part 150, the flange part 160, and the stopper part 170 are manufactured at once using a plating process.
  • the electrically conductive contact pins 100a of the first embodiment are formed by filling the inner space 1100 with a metal material by electroplating using the mold 1000 having the inner space 1100 . Accordingly, the first connection part 110, the second connection part 120, the support part 130, the elastic part 150, the flange part 160, and the stopper part 170 are manufactured as one-piece connected to each other.
  • the electrically conductive contact pins 100a of the first embodiment have a first connection part 110 and a second connection part 120.
  • the support part 130, the elastic part 150, the flange part 160, and the stopper part 170 are manufactured at once using a plating process, so that there is a structural difference in that they are integrally provided.
  • the electrically conductive contact pins 100a of the first embodiment have the same shape in each cross section in the thickness direction ( ⁇ z direction). In other words, the same shape on the x-y plane is formed extending in the thickness direction ( ⁇ z direction).
  • the electrically conductive contact pin 100a of the first embodiment is provided by stacking a plurality of metal layers in its thickness direction ( ⁇ z direction).
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel (Ni). , manganese (Mn), tungsten (W), phosphorus (Ph) or alloys thereof, or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiPh) alloy, nickel-manganese (NiMn ), a nickel-cobalt (NiCo) or a nickel-tungsten (NiW) alloy.
  • the second metal layer 102 is a metal having relatively high electrical conductivity compared to the first metal layer 101, and is preferably formed of a metal selected from among copper (Cu), silver (Ag), gold (Au), or alloys thereof. It can be. However, it is not limited thereto.
  • the first metal layer 101 is provided on the lower and upper surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pin 100a is provided by alternately stacking the first metal layer 101, the second metal layer 102, and the first metal layer 101 in the order of its thickness direction ( ⁇ z direction),
  • the number of layers to be stacked may consist of three or more layers.
  • the first connection part 110 includes a contact part 110a contacting the test object 400 and an upwardly protruding part 111 having a contact protrusion 110c at an upper end.
  • the contact portion 110a is a portion in contact with the connection terminal 410 of the test object 400 .
  • the contact portion 110a is formed to extend in the width direction ( ⁇ x direction).
  • a lower surface of one end of the contact portion 110a in the width direction ( ⁇ x direction) is connected to the elastic portion 150 .
  • the upwardly protruding portion 111 extends upward from both sides of one of the curved portions 154 of the elastic portion 150 including the plurality of straight portions 153 and curved portions 154 .
  • the upwardly protruding portion 111 extends in the longitudinal direction (+y direction) from the elastic portion (specifically, the curved portion 154) to a position corresponding to the first connection portion 110.
  • the upwardly protruding portion 111 includes a contact protrusion 110c provided at a position corresponding to the first connection portion 110 .
  • the contact protrusion 110c is provided on the upper end of the upwardly protruding portion 111 and protrudes outward in the width direction ( ⁇ x direction).
  • An upper surface of the contact protrusion 110c is inclined downward in the width direction ( ⁇ x direction). Accordingly, the upwardly protruding portion 111 has an upper surface inclined downward in the width direction ( ⁇ x direction).
  • the upwardly protruding portion 111 may contact the connection terminal 410 through its upper surface and contact the upper end of the support portion 130 by the pressing force of the connection terminal 410 to form a current path.
  • the first connection part 110 is connected to the elastic part 150 and can move vertically ( ⁇ y direction) elastically by contact pressure.
  • the connection terminal 410 of the test object 400 is in contact with the upper surface of the first connection portion 110 and gradually releases the elastic portion 150 connected to the first connection portion 110 side. It comes into contact with the upper surface of the upwardly protruding portion 111 while being compressed and deformed.
  • the connection terminal 410 continues to move downward (-y direction) while compressing and deforming the elastic part 150 .
  • the contact protrusion 110c of the upwardly protruding portion 111 contacts the upper end of the support portion 130 to form a current path.
  • the upwardly protruding portion 111 comes into contact with the upper end of the support portion 130 through the contact protrusion portion 110c. It is supported by the upper end at 130. Due to this, the upwardly protruding portion 111 can prevent excessive buckling deformation in the left and right directions of the electrically conductive contact pin 100a of the first embodiment.
  • the elastic part 150 has the same cross-sectional shape in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a of the first embodiment in all thickness sections. This is possible because the electrically conductive contact pins 100a of the first embodiment are fabricated through a plating process.
  • the elastic part 150 has a shape in which a plate-like plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-like plate is generally constant.
  • the elastic part 150 is formed by alternately contacting a plurality of straight parts 153 and a plurality of curved parts 154 .
  • the straight portion 153 connects the curved portion 154 adjacent to the left and right.
  • the curved part 154 connects the straight part 153 adjacent to the top and bottom.
  • the curved portion 154 is provided in an arc shape.
  • a straight portion 153 is disposed at the center of the elastic portion 150 and a curved portion 154 is disposed at an outer portion of the elastic portion 150 .
  • the straight portions 153 are provided in parallel in the width direction ( ⁇ x direction) so that the curved portion 154 is more easily deformed according to the contact pressure.
  • the straight portion 153 is provided inside the support portion 130 and extends in the width direction ( ⁇ x direction). At least one of the curved portions 154 functions as a connecting portion 140 .
  • the connecting portion 140 serves to connect the upwardly protruding portion 111 and the flange portion 160 .
  • connection part 140 is provided with a thick part 141 .
  • the thick portion 141 has a thickness greater than that of the peripheral portion in the width direction.
  • the electrically conductive contact pin 100a of the first embodiment extends by a predetermined width in the width direction ( ⁇ x direction) at both sides of the connecting portion 140 to include a thick portion 141 .
  • the thick portion 141 is provided on the connecting portion 140, and the upwardly protruding portion 111 extends upward from the thick portion 141 in length.
  • the flange portion 160 extends downward from the thick portion 141 .
  • the outer surface of the thick portion 141 in the width direction ( ⁇ x direction) is convex and protrudes more than the peripheral portion in the width direction ( ⁇ x direction) by a predetermined amount.
  • connection terminal 410 When the pressing force by the connection terminal 410 acts eccentrically on the elastic part 150, one of the upwardly protruding parts 111 comes into contact with the upper end of the support part 130 and is supported by the support part 130, and the flange part 160 ) Any one of them is supported by the support part 130 in contact with a certain position on the inner surface of the support part 130. At this time, the thick portion 141 may prevent the connection portion between the connecting portion 140, the upwardly protruding portion 111, and the flange portion 160 from being easily damaged.
  • the flange part 160 is provided between the support part 130 and the elastic part 150 based on the width direction ( ⁇ x direction). In a state where the elastic part 150 is not compressed, the flange part 160 and the support part 130 are spaced apart from each other.
  • the flange portion 160 is connected to the elastic portion 150 .
  • the flange portion 160 is connected to any one of the curved portions 154 of the elastic portion 150 and extends downward. Accordingly, an upward protruding portion 111 extending upward based on one curved portion 154 and a flange portion 160 extending downward are provided.
  • the flange portion 160 has a predetermined length and extends downward from the connecting portion 140 . Due to this, the flange portion 160 is located at a position corresponding to the middle portion of the support portion 130 in a state in which one end extends a predetermined length toward the inside of the support portion 130 .
  • the flange portion 160 is located inside the support portion 130 in the width direction ( ⁇ x direction) and is an upper end portion of the support portion 130 including at least a portion of the support portion 130 (specifically, the first hanging portion SP1). ) and overlapping in the width direction ( ⁇ x direction). Due to this, the flange portion 160 is in contact with the support portion 130 by the eccentric pressing force of the connection terminal 410 and is supported by the support portion 130 .
  • the extension length of the flange portion 160 extending downward from the connection portion 140 is equal to or longer than a predetermined length, so that one end of the flange portion 160 is at the base of the support portion 130. It is located in a position corresponding to the middle part side. Accordingly, the flange portion 160 is positioned to correspond to the middle portion of the support portion 130 in a state in which one end thereof is inserted into the support portion 130 by a predetermined length in the longitudinal direction ( ⁇ y direction).
  • the flange portion 160 includes an auxiliary contact protrusion 161 provided at a free end.
  • the auxiliary contact protrusion 161 has an outer surface protruding convexly outward in the width direction ( ⁇ x direction).
  • the lower surface of the auxiliary contact protrusion 161 is formed in a convex shape.
  • the flange portion 160 includes a first flange portion 160a located on one side of the elastic portion 150 and a second flange portion 160b located on the other side of the elastic portion 150 opposite to the first flange portion 160a. ).
  • the first and second flange portions 160a and 160b extend downward from both sides of the elastic portion 150, respectively.
  • the support part 130 is formed to extend in the longitudinal direction ( ⁇ y direction) and is provided outside the first connection part 110 in the width direction ( ⁇ x direction).
  • the support part 130 and the upwardly protruding part 111 of the first connection part 110 are spaced apart from each other.
  • the support part 130 and the flange part 160 located inside the support part 130 are spaced apart from each other.
  • the support part 130 includes a first support part 130a located on one side of the first connection part 110 and a second support part 130b located on the other side of the first connection part 110 .
  • the support part 130 has a first hanging part SP1 at one end (upper end).
  • the first hanging part SP1 is formed to protrude outward in the width direction ( ⁇ x direction).
  • the first hooking part SP1 is provided to protrude outward in the width direction ( ⁇ x direction) at the upper end of the support part 130 .
  • the support part 130 has a hook-shaped second hanging part SP2 at the other end (lower end).
  • the support part 130 has a first inclined part IC1 inclined inward in the width direction ( ⁇ x direction) at a lower end, one end connected to the first inclined part IC1 and the other end formed as a free end, and the first inclined part 130
  • a second inclined portion IC2 inclined in the inclined direction of IC1 is included.
  • the other end of the second inclined portion IC2 is formed as a free end perpendicular to the longitudinal direction ( ⁇ y direction).
  • the second inclined portion IC2 is formed to be inclined from one end connected to the first inclined portion IC1 toward the other end, and the other end is formed vertically in the longitudinal direction ( ⁇ y direction).
  • the support part 130 has a hook shape at its lower end through the configuration of the first inclined part IC1 and the second inclined part IC2, and is provided with the second hanging part SP2.
  • the other end of the second inclined portion IC2 is supported on the lower surface of the guide plate GP.
  • the other end of the second inclined portion IC2 is formed vertically in the longitudinal direction ( ⁇ y direction), and the upper surface of the other end is inclined in the inclined direction of the first inclined portion IC1.
  • the second inclined portion IC1 While the other end of the inclined portion IC2 is in close contact with each other, it can be elastically deformed more easily.
  • the electrically conductive contact pin 100a of the first embodiment When the electrically conductive contact pin 100a of the first embodiment is inserted into the guide hole GH, the lower end including the second hooking part SP2 is compressed inward in the width direction ( ⁇ x direction) so that the second connection part 120 ) side is inserted first. At this time, the electrically conductive contact pin 100a of the first embodiment compresses the lower end through the first and second inclined portions IC1 and IC2 to have a smaller dimension in the width direction ( ⁇ x direction) than the opening of the guide hole GH. Transformation is made easier.
  • the electrically conductive contact pin 100a of the first embodiment is forcibly pushed into the guide hole GH by pressing it from the top to the bottom.
  • the electrically conductive contact pin 100a of the first embodiment is compressed in the width direction ( ⁇ x direction) and moved to the lower part of the guide hole GH.
  • the electrically conductive contact pin 100a of the first embodiment is supported when the second catching portion SP2 passes through the lower opening of the guide hole GH and the second catching portion SP2 is supported on the lower surface of the guide hole GH. is pushed upwards until Through this, the upper part of the electrically conductive contact pin 100a of the first embodiment including the first hooking part SP1 protrudes from the upper surface of the guide plate GP.
  • the electrically conductive contact pin 100a of the first embodiment is prevented from upwardly departing from the guide hole GH through the second locking portion SP2, and is prevented from escaping from the guide hole GH through the first locking portion SP1. The downward departure of is prevented.
  • the length of the support portion 130 is longer than the length of the guide hole GH, so that at least a portion of the support portion 130 is formed through the guide hole GH when insertion is completed. (GH) protrudes outward. Accordingly, a protruding length h is provided between the upper surface of the guide plate GP and the first hanging part SP1.
  • the electrically conductive contact pin 100a of the first embodiment may secure the contact stroke of the test object 400 through the protruding length h.
  • the electrically conductive contact pin 100a of the first embodiment secures a space equal to the protruding length h between the upper surface of the guide plate GP formed around the guide hole GH through the protruding length h. Due to this, when the electrically conductive contact pin 100a of the first embodiment is pressed by the connection terminal 410 and moves downward, the electrically conductive contact pin 100a of the first embodiment is moved within the free space provided through the protrusion length h. It can move downward as a whole.
  • the stroke may not be constant. Therefore, as the protruding length h provided by the protrusion of the support part 130 from the guide hole GH is not secured, the free space between the first hanging part SP1 of the support part 130 and the guide plate GP. If this is not provided, the electrically conductive contact pin 100a of the first embodiment may be excessively pressed. This may cause damage to the electrically conductive contact pins 100a of the first embodiment.
  • the upper end of the support part 130 protrudes beyond the guide hole GH, so that the protruding length h between the first hanging part SP1 and the guide plate GP is reduced.
  • the contact stroke is secured through
  • the protrusion length (h) may be formed to be 5 ⁇ m or more and 50 ⁇ m or less. If the protruding length (h) is less than 5 ⁇ m, it is difficult to secure the contact stroke of the inspection object, and if it exceeds 50 ⁇ m, excessive deformation of the contact pin 100a or support 130 may be damaged. is not desirable because there is
  • the stopper part 170 extends from the inner surface of the support part 130 toward the inside in the width direction ( ⁇ x direction) by a predetermined length.
  • the stopper portion 170 is formed to have a smaller width from the inner surface of the support portion 130 toward the inner side in the width direction ( ⁇ x direction).
  • the stopper part 170 extends from the inner surface of the support part 130 to the inside in the width direction and is connected to the elastic part 150 .
  • the stopper part 170 is provided at the same position as at least one of the curved parts 154 of the elastic part 150 close to the second connection part 120 in the longitudinal direction, and one end is connected to the curved part 154.
  • the stopper part 170 is provided below the flange part 160 . Before the elastic part 150 compressively deforms, the stopper part 170 is spaced apart from the lower surface of the flange part 160 . When the elastic part 150 compressively deforms, the flange part 160 moves downward (-y direction). The stopper part 170 comes into contact with the downwardly moving flange part 160 and limits the downward position of the flange part 160 .
  • the upper surface of the stopper part 170 and the lower surface of the flange part 160 have a predetermined separation distance R in the longitudinal direction.
  • the flange part 160 gradually moves downward toward the stopper part 170 while narrowing the separation distance R from the upper surface of the stopper part 170 do.
  • the stopper part 170 is provided to be fixed. Accordingly, the stopper portion 170 maintains a fixed state at a fixed position without elastic deformation even when it comes into contact with the downwardly moving flange portion 160 .
  • the stopper part 170 functions to stop the flange part 160 moving downward in a fixed state when the lower surface of the flange part 160 comes into contact with the upper surface. Accordingly, the flange portion 160 does not additionally move downward.
  • the stopper part 170 is provided in a fixed state, and when the flange part 160 comes into contact with the upper surface, it stops the flange part 160 so that it no longer descends, and thus limits the descending position of the flange part 160 .
  • the amount of compression of the electrically conductive contact pin 100a may be limited by limiting the lowering position of the flange portion 160 through the stopper portion 170 .
  • the electrically conductive contact pin 100a of the first embodiment requires a compression amount sufficient to enable stable contact with the connection terminal 410 contacting the first connection part 110 . This is because an excessive amount of compression that prevents stable contact between the electrically conductive contact pin 100a and the connection terminal 410 of the first embodiment may deteriorate the reliability of the test.
  • the electrically conductive contact pin 100a of the first embodiment is configured to form a separation distance R between the stopper portion 170 and the flange portion 160 before the elastic portion 150 is compressed and deformed, thereby forming the flange portion 160.
  • a downward movement distance is limited, and a downward position of the flange portion 160 is limited through the stopper portion 170 when the elastic portion 150 is compressed and deformed.
  • the flange portion 160 has a structure connected to the elastic portion 150 and connected to the first connection portion 110 . Accordingly, the electrically conductive contact pin 100a of the first embodiment limits the excessive compression deformation of the elastic part 150 and the first connection part 110 by limiting the lowering position of the flange part 160 through the stopper part 170. can do. Therefore, the compression amount of the electrically conductive contact pin 100a of the first embodiment is limited.
  • the stopper part 170 is a first stopper part 170a provided on one side of the elastic part 150 and a second stopper part 170b provided on the other side of the elastic part 150 opposite to the first stopper part 170a. ).
  • the first stopper part 170a and the second stopper part 170b are connected to ends of the same straight part 153 and provided at the same position in the longitudinal direction.
  • the electrically conductive contact pin 100a of the first embodiment connects the elastic part 150 and the first support part 130a through the first stopper part 170a, and connects the elastic part 150 through the second stopper part 170b. ) and the second support part 130b are connected.
  • the first stopper part 170a is provided under the first flange part 160a so as to correspond up and down to the first flange part 160a in the longitudinal direction
  • the second stopper part 170b has a second stopper part 170b in the longitudinal direction. It is provided on the lower part of the second flange part 160b to correspond up and down with the flange part 160b.
  • the first stopper part 170a and/or the second stopper part 170b include a curved surface. Accordingly, when the first and second stopper portions 170a and 170b come into contact with the convex end portions of the first and second flange portions 160a and 160b, respectively, they may come into contact in a relatively close contact form. Due to this, the first and second stopper portions 170a and 170b perform a function of limiting the descending position of the first and second flange portions 160a and 160b moving downward, and the first and second flange portions 160a and 160b can be firmly supported without shaking in the lowered position.
  • the first and second stopper portions 170a and 170b include curved surfaces, but the curved surfaces have different degrees of curvature.
  • the first stopper portion 170a is connected to the left end of the straight portion 153 and is provided close to the curved portion 154 extending upward from the left end of the straight portion 153 . Accordingly, the first stopper portion 170a is formed in the form of a concave groove through a relatively flat bottom surface and a sidewall surface formed by the curved portion 154 and the first support portion 130a.
  • the second stopper part 170b is connected to the right end of the straight part 153.
  • the second stopper portion 170b extends inward in the width direction ( ⁇ x direction) from the inner surface of the second support portion 130b, and is curved downward by a portion connected to the right end of the straight portion 153. is formed Accordingly, the curved surface of the second stopper portion 170b has a relatively greater degree of curvature than the curved surface of the first stopper portion 170a.
  • the first and second stopper portions 170a and 170b contact the lower surfaces of the first and second flange portions 160a and 160b with upper surfaces, respectively, so that the first and second flange portions 160a and 160b do not additionally move downward. , Supports and stops the two flange parts 160a and 160b.
  • the first flange portion 160a is in contact with the relatively flat bottom surface of the first stopper portion 170a.
  • the second flange portion 160b is in contact with the curved surface of the second stopper portion 170b, which has a relatively greater degree of curvature than the first stopper portion 170a, in the longitudinal direction ( ⁇ y direction) and width direction ( ⁇ x direction) is deformed by a predetermined amount and contacted.
  • the electrically conductive contact pin 100a of the first embodiment divides the upper space US and the lower space LS through the stopper part (specifically, the first and second stopper parts 170a and 170b). Accordingly, the electrically conductive contact pin 100a of the first embodiment prevents foreign substances introduced from the upper portion from flowing into the lower space LS and prevents foreign substances introduced from the lower portion from flowing into the upper space US. The electrically conductive contact pin 100a of the first embodiment restricts the movement of foreign matter introduced into the electrically conductive contact pin 100a through the stopper portion 170, thereby preventing an operation interference problem caused by foreign matter.
  • the second connection part 120 includes first and second inclined parts IC1 and IC2 formed under the first support part 130a and first and second inclined parts IC1 and IC2 formed under the second support part 130b. IC2) is provided between them. Accordingly, the second connection part 120 is provided inside the lower end of the support part 130 in the width direction ( ⁇ x direction).
  • the second connector 120 contacts the pad 310 of the circuit board.
  • the second connection part 120 includes a connection body part 120a, a connection cavity 120d formed in the connection body part 120a, and at least one pad connection protrusion 120c provided on the lower surface of the connection body part 120a. ).
  • connection body portion 120a is inclined inward in the width direction ( ⁇ x direction) and has a connection inclined portion CI that is inclined in the inclined direction of the first inclined portion IC1 and the longitudinal direction ( ⁇ y direction). It includes a connection vertical portion (CV) extending vertically downward from one end of the connection inclined portion (CI).
  • the contact surface of the second connection part 120 can be more easily deformed by pressing the pad 310 of the circuit board through the configuration of the connection cavity 120d.
  • the second connection part 120 includes at least one pad connection protrusion 120c to make multi-contact with the pad 310 of the circuit board positioned below the connection body part 120a.
  • the pad connection protrusion 120c is formed along the thickness direction ( ⁇ z direction) of the connection body portion 120a and is formed to protrude and extend longer than the peripheral portion in the longitudinal direction ( ⁇ y direction).
  • three pad connection protrusions 120c are provided.
  • the two pad connection protrusions 120c provided on the outer portion are inclined outward in the width direction ( ⁇ x direction).
  • Each pad connection protrusion 120c is spaced apart by a groove 121 provided between the pad connection protrusions 120c.
  • connection terminal 410 of the inspection object 400 contacts the upper surface of the first connection part 110 and the upper surface of the upwardly protruding part 111 sequentially while moving downward. (-y direction) move. Specifically, the connection terminal 410 first contacts the top surface of the first connection portion 110 and compresses and deforms the elastic portion 150 while contacting the inclined top surface of the upwardly protruding portion 111 . The connection terminal 410 moves downward while being in contact with the upper surface of the contact protrusion 110c of the first connection portion 110 and the upwardly protruding portion 111 .
  • the first connection portion 110 and the upwardly protruding portion 111 gradually move downward, and the contact protrusion 110c contacts the upper end of the support portion 130 . Accordingly, the electrically conductive contact pin 100b of the first embodiment forms a current path leading to the first connection part 110 and the support part 130 .
  • connection vertical part CV of the connection body part 120a and A portion connecting the first inclined portion IC1 and the second inclined portion IC2 is in contact with each other.
  • the electrically conductive contact pin 100b of the second embodiment forms a current path leading to the second connection part 120 and the support part 130 .
  • FIG. 7A is a plan view of the mold 1000 in which the inner space 1100 is formed
  • FIG. 7B is a cross-sectional view taken along line A-A' of FIG. 7A.
  • the mold 1000 may be made of an anodic oxide film, photoresist, silicon wafer, or a material similar thereto. However, preferably, the mold 1000 may be made of an anodic oxide film material.
  • the anodic oxide film means a film formed by anodic oxidation of a base metal
  • the pore means a hole formed in the process of forming an anodic oxide film by anodic oxidation of a metal.
  • the base metal is aluminum (Al) or an aluminum alloy
  • Al 2 O 3 aluminum oxide
  • the base metal is not limited thereto, and includes Ta, Nb, Ti, Zr, Hf, Zn, W, Sb, or an alloy thereof.
  • the anodic oxide film formed as above is a barrier layer without pores formed vertically therein. And, it is divided into a porous layer in which pores are formed. When the base material is removed from the base material on which the anodic oxide film having the barrier layer and the porous layer is formed, only the anodic oxide film made of aluminum oxide (Al 2 O 3 ) remains.
  • the anodic oxide film may be formed in a structure in which the barrier layer formed during anodic oxidation is removed to pass through the upper and lower pores, or in a structure in which the barrier layer formed during anodic oxidation remains as it is and seals one end of the upper and lower parts of the pore.
  • the anodic oxide film has a thermal expansion coefficient of 2 to 3 ppm/°C. Due to this, when exposed to a high temperature environment, thermal deformation due to temperature is small. Accordingly, the electrically conductive contact pins 100a can be manufactured precisely without thermal deformation even in a high-temperature environment.
  • the electrically conductive contact pin 100a of the first embodiment is manufactured using the mold 1000 made of anodized film instead of the photoresist mold, the photoresist mold has limitations in realizing the precision of the shape and the implementation of the fine shape effect can be exerted.
  • an electrically conductive contact pin having a thickness of 40 ⁇ m can be manufactured, but in the case of using the mold 1000 made of anodized film, an electrically conductive contact pin having a thickness of 100 ⁇ m or more to 200 ⁇ m or less ( 100a) can be produced.
  • a seed layer 1200 is provided on the lower surface of the mold 1000 .
  • the seed layer 1200 may be provided on the lower surface of the mold 1000 before forming the inner space 1100 in the mold 1000 .
  • a support substrate (not shown) is formed under the mold 1000 to improve handling of the mold 1000 .
  • the seed layer 1200 is formed on the upper surface of the support substrate and the mold 1000 in which the inner space 1100 is formed may be used by being coupled to the support substrate.
  • the seed layer 1200 may be formed of a copper (Cu) material and may be formed by a deposition method.
  • the inner space 1100 may be formed by wet etching the mold 1000 made of an anodic oxide film. To this end, a photoresist is provided on the upper surface of the mold 1000 and patterned, and then the anodic oxide film in the patterned open area reacts with the etching solution to form the inner space 1100 .
  • FIG. 7c is a plan view showing that the internal space 1100 is subjected to an electroplating process
  • FIG. 7d is a cross-sectional view A-A' of FIG. 7c.
  • the metal layer is formed while growing in the thickness direction ( ⁇ z direction) of the mold 1000, the shape of each cross section in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a is the same, and the electrically conductive contact pin 100a has the same shape.
  • a plurality of metal layers are stacked in the thickness direction ( ⁇ z direction) of the fin 100a.
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium or any of these.
  • the second metal layer 102 is a metal having relatively higher electrical conductivity than the first metal layer 101 and includes copper (Cu), silver (Ag), gold (Au), or an alloy thereof.
  • the first metal layer 101 is provided on the lower and upper surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pin 100a is provided by alternately stacking the first metal layer 101, the second metal layer 102, and the first metal layer 101 in this order, and the number of layers is three or more. It can be.
  • the first metal layer 101 and the second metal layer 102 may be made more dense by raising the temperature to a high temperature and pressing the metal layer on which the plating process is completed by applying pressure.
  • a photoresist material is used as a mold, a process of raising the temperature to a high temperature and applying pressure cannot be performed because the photoresist exists around the metal layer after the plating process is completed.
  • the mold 1000 made of an anodic oxide film is provided around the metal layer on which the plating process is completed, deformation is minimized due to the low thermal expansion coefficient of the anodic oxide film even when the temperature is raised to a high temperature. It is possible to densify the first metal layer 101 and the second metal layer 102 . Therefore, it becomes possible to obtain a higher density first metal layer 101 and second metal layer 102 compared to a technique using a photoresist as a mold.
  • a process of removing the mold 1000 and the seed layer 1200 is performed.
  • the mold 1000 is made of an anodic oxide film material
  • the mold 1000 is removed using a solution that selectively reacts to the anodic oxide film material.
  • the seed layer 1200 is made of copper (Cu)
  • the seed layer 1200 is removed using a solution that selectively reacts with copper (Cu).
  • the electrically conductive contact pin 100a of the first embodiment includes a plurality of fine trenches 88 on its side surface.
  • the fine trench 88 is formed to elongate from the side of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a means a direction in which metal fillers grow during electroplating.
  • the fine trench 88 has a depth of 20 nm or more and 1 ⁇ m or less, and a width of 20 nm or more and 1 ⁇ m or less.
  • the width and depth of the fine trench 88 have a value equal to or less than the range of the diameter of the pore of the anodic oxide film mold 1000. .
  • the anodic oxide film mold 1000 includes numerous pores, at least a part of the anodic oxide film mold 1000 is etched to form an inner space 1100, and a metal filler is formed by electroplating into the inner space 1100, A fine trench 88 formed while contacting the pores of the anodic oxide film mold 1000 is provided on the side surface of the electrically conductive contact pin 100a.
  • the fine trench 88 as described above has an effect of increasing the surface area on the side surface of the electrically conductive contact pin 100a.
  • the heat generated in the electrically conductive contact pin 100a can be quickly dissipated, thereby suppressing the temperature rise of the electrically conductive contact pin 100a. You can do it.
  • the configuration of the micro trench 88 formed on the side surface of the electrically conductive contact pin 100a it is possible to improve torsional resistance when the electrically conductive contact pin 100a is deformed.
  • the overall length L of the electrically conductive contact pin 100a should be short. Accordingly, the length of the elastic part 150 should also be shortened. However, when the length of the elastic part 150 is shortened, a problem of increasing contact pressure occurs. In order to keep the contact pressure from increasing while shortening the length of the elastic part 150, the actual width t of the plate-shaped plate constituting the elastic part 150 should be reduced. However, if the actual width t of the plate-shaped plate constituting the elastic part 150 is reduced, the elastic part 150 may be easily damaged. In order to shorten the length of the elastic part 150 and prevent damage to the elastic part 150 without increasing the contact pressure, the total thickness H of the plate-shaped plate constituting the elastic part 150 should be formed large.
  • the electrically conductive contact pin 100a of the first embodiment is formed such that the overall thickness H of the plate-shaped plate is large while the actual width t of the plate-shaped plate is thin. That is, the overall thickness dimension (H) is formed to be larger than the actual width (t) of the plate-shaped plate.
  • the actual width (t) of the planar plate constituting the electrically conductive contact pin (100a) is provided in the range of 5 ⁇ m or more and 15 ⁇ m or less, and the total thickness (H) is in the range of 70 ⁇ m or more and 200 ⁇ m or less.
  • the actual width (t) and total thickness (H) of the plate-shaped plate are provided in the range of 1:5 to 1:30.
  • the actual width of the plate-like plate is formed to be substantially 10 ⁇ m, and the total thickness dimension (H) is formed to be 100 ⁇ m, so that the effective width (t) and the total thickness dimension (H) of the plate-like plate are formed to be 1:10. can be made in proportion.
  • the overall thickness (H) and the overall length (L) of the electrically conductive contact pin (100a) are provided in the range of 1:3 to 1:9.
  • the overall length dimension (L) of the electrically conductive contact pin 100a may be provided in the range of 300 ⁇ m or more and less than 2 mm, and more preferably may be provided in the range of 350 ⁇ m or more and 600 ⁇ m or less.
  • planar plate constituting the electrically conductive contact pin 100a has a substantially smaller width t than the thickness H, resistance to bending in the front and rear directions is improved.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment are provided in the range of 1:1 to 1:5.
  • the overall thickness (H) of the electrically conductive contact pins (100a) is provided in the range of 70 ⁇ m or more and 200 ⁇ m or less
  • the overall width (W) of the electrically conductive contact pins (100a) is 100 ⁇ m or more and 500 ⁇ m or less.
  • the total width W of the electrically conductive contact pin 100a may be provided in a range of 150 ⁇ m or more and 400 ⁇ m or less. In this way, by shortening the overall width W of the electrically conductive contact pin 100a, it is possible to narrow the pitch.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment may be formed to have substantially the same length. Accordingly, there is no need to bond a plurality of electrically conductive contact pins 100a in the thickness direction ( ⁇ z direction) so that the overall thickness dimension H and the overall width dimension W have substantially the same length.
  • the electrically conductive contact pin (100a) acts in the front and rear directions. The resistance to the moment is increased, and as a result, the contact stability is improved.
  • the overall thickness H of the electrically conductive contact pin 100a is 70 ⁇ m or more, and the overall thickness H and the overall width W are in the range of 1:1 to 1:5. While overall durability and deformation stability of the conductive contact pin 100a are improved, contact stability with the connection terminal 410 is improved. In addition, as the total thickness H of the electrically conductive contact pin 100a is formed to be 70 ⁇ m or more, current carrying capacity can be improved.
  • the electrically conductive contact pin 100a manufactured using a conventional photoresist mold cannot have a large overall thickness due to alignment problems because the mold is formed by laminating a plurality of photoresists. As a result, the overall thickness dimension (H) is small compared to the overall width dimension (W). For example, since the conventional electrically conductive contact pin 100a has an overall thickness H of less than 70 ⁇ m and an overall thickness H and an overall width W in the range of 1:2 to 1:10. , the resistance to the moment that deforms the electrically conductive contact pin 100a in the forward and backward directions by the contact pressure is weak.
  • FIGS. 3 and 9 is a plan view of an electrically conductive contact pin 100b of the second embodiment.
  • the electrically conductive contact pin 100b of the second embodiment includes a first connection portion 110 including a contact portion 110a and an upwardly protruding portion 111, a connection body portion 120a, and one direction on both sides of the connection body portion 120a.
  • the second connection part 120 including the inclined leg part 120b extending to and the second hooking part SP2 provided at one end of the inclined leg part 120b, the first and second width deformation parts 131a, 131b), the elastic part 150, the flange part 160, and the stopper part 170.
  • the support portion 130 is formed by bending inward in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100a toward the other end (lower end).
  • the support part 130 is provided at the other end of the first width changing part 131a that reduces the distance between the support parts 130 in the width direction ( ⁇ x direction) and below the first width changing part 131a. It includes a second width deformation portion 131b which is inclined inwardly in the width direction ( ⁇ x direction) towards the end.
  • the support part 130 includes a width-changing connection part 132 connecting the first and second width-changing parts 131a and 131b between the first width-changing part 131a and the second width-changing part 131b.
  • the electrically conductive contact pin 100b of the second embodiment forms a recessed portion in the width direction ( ⁇ x direction) by the first width deformation portion 131a.
  • the electrically conductive contact pin 100b of the second embodiment has a stopper portion 170 through a recessed portion.
  • the stopper portion 170 is formed by a portion that is recessed inward in the width direction ( ⁇ x direction) by the first width deformation portion 131a, so that at least a part (lower side) of the support portion 130 is provided with the support portion 130 and formed in one piece.
  • the first width deformable portion 131a is a portion formed in a shape of a depression on the outside of the lower portion of the support portion 130 toward the inside in the width direction ( ⁇ x direction).
  • the lower inner surface of the support 130 along the first width changing portion 131a is at a position corresponding to the first width changing portion 131a in the width direction ( ⁇ x direction). ) to protrude inward.
  • the portion protruding inward from the lower inner surface of the support part 130 in the width direction ( ⁇ x direction) is as much as the length protruding inward from the inner surface of the support part 130 in the width direction ( ⁇ x direction) in the width direction ( ⁇ x direction). It is formed with a thickness of
  • the electrically conductive contact pin 100b of the second embodiment has a stopper portion 170 through a portion protruding inward in the width direction ( ⁇ x direction) of the lower inner surface of the support portion 130 by the first width deformation portion 131a. to provide
  • the first stopper part 170a is provided below the first support part 130a and corresponds up and down to the first flange part 160a in the longitudinal direction ( ⁇ y direction).
  • the second stopper part 170b is provided below the second support part 130b and corresponds up and down to the second flange part 160b in the longitudinal direction ( ⁇ y direction).
  • the first and second flange portions 160a and 160b move downward (in the -y direction) and descend due to compression deformation of the elastic portion 150 .
  • the first and second flange portions 160a and 160b descend while gradually narrowing the separation distance R between the flange portion 160 and the stopper portion 170 before compression deformation of the elastic portion 150, It comes into contact with the upper surfaces of the stopper portions 170a and 170b.
  • the first and second stopper portions 170a and 170b support the first and second flange portions 160a and 160b so as not to additionally move downward while the lower surfaces of the first and second flange portions 160a and 160b are in contact with the upper surfaces.
  • the lowering positions of the first and second flange portions 160a and 160b are limited.
  • An end of the second width changing portion 131b of the support portion 130 is connected to the second connection portion 120 .
  • the second connection part 120 includes a connection body part 120a having a predetermined thickness in the longitudinal direction ( ⁇ y direction).
  • the connection body portion 120a is formed to increase in width in the width direction from top to bottom.
  • the upper end of the connection body part 120a is connected to the elastic part 150 .
  • the second connector 120 includes, for example, four pad connection protrusions 120c. Each pad connection protrusion 120c is spaced apart by a groove 121 provided between the pad connection protrusions 120c. Among the four pad connection protrusions 120c, the two pad connection protrusions 120c provided on the outer portion are provided through the other end of the inclined leg portion 120b not provided with the second hooking portion SP2.
  • the second connector 120 comes into contact with the pad 310 of the circuit board through the pad connection protrusion 120c and is pressed.
  • the second connection part 120 includes inclined leg parts 120b extending upward from both ends in the width direction ( ⁇ x direction) of the connection body part 120a.
  • the inclined leg portion 120b is formed to be inclined so that its width increases outward in the width direction ( ⁇ x direction) from the bottom to the top.
  • the connection body part 120a has a second hanging part SP2 at the upper end of the inclined leg part 120b.
  • the second hooking part SP2 protrudes inward in the width direction ( ⁇ x direction).
  • Ends of the second width changing portion 131b are connected to both ends in the width direction ( ⁇ x direction) of the middle portion of the connection body portion 120a. Accordingly, the second connection part 120 and the support part 130 are connected.
  • the electrically conductive contact pin 100a of the second embodiment includes the second width changing portion 131b inside the inclined leg portion 120b of the second connection portion 120 in the width direction ( ⁇ x direction).
  • the inclined leg portion 120b and the second width changing portion 131b are spaced apart from each other, but have a corresponding shape inclining inward in the width direction ( ⁇ x direction) from the top to the bottom. Such a shape makes it easier to insert the electrically conductive contact pin 100a of the second embodiment into the guide hole GH of the guide plate GP.
  • the electrically conductive contact pin 100a of the second embodiment has a first hooking part SP1 at an upper end via one end (upper end) of the support part 130, and a second width changing part 131b and an inclined leg part. Through 120b, the width of the lower end of the electrically conductive contact pin 100a in the width direction ( ⁇ x direction) is reduced from top to bottom.
  • the electrically conductive contact pin 100a of the second embodiment When the electrically conductive contact pin 100a of the second embodiment is inserted into the guide hole GH, the lower end including the second hooking part SP2 is compressed inward in the width direction ( ⁇ x direction) so that the second connection part 120 ) side is inserted first. At this time, the electrically conductive contact pin 100a of the first embodiment has a dimension smaller in the width direction ( ⁇ x direction) than the opening of the guide hole GH by the second width changing portion 131b and the inclined leg portion 120b. It is made easier to compress and deform the lower part to have
  • connection terminal 410 compresses and deforms the elastic part 150 connected to the first connection part 110
  • the contact protrusion 110c of the upwardly protruding part 111 comes into contact with the support part 130
  • the pad 310 comes into contact with the second
  • the elastic part 150 is compressed and deformed to the second connection part 120 by coming into contact with the pad connection protrusion 120c of the connection part 120 .
  • the electrically conductive contact pin 100a of the second embodiment forms a current path leading to the first connection part 110 , the support part 130 , and the second connection part 120 .
  • FIG. 10 is a plan view of an electrically conductive contact pin 100c of the third embodiment.
  • the electrically conductive contact pin 100c of the third embodiment includes a contact portion 110a, a contact cavity 110b formed in the contact portion 110a, and a contact protrusion 110e extending in the longitudinal direction from an upper surface of the contact portion 110a.
  • the first connection part 110 has a contact cavity 110b in the contact part 110a so that the contact surface can be more easily deformed by the pressure of the test object 400 .
  • the upper surface of the contact portion 110a based on the contact cavity 110b, becomes a part contacting the connection terminal 410 of the test object 400, and the lower portion of the contact portion 110a based on the contact cavity 110b.
  • the cotton is connected to the elastic part (150).
  • the contact cavity 110b is formed as an empty space with curved left and right sides, so that the upper surface of the contact portion 110a can be easily deformed.
  • the first connection part 110 includes at least one contact protrusion 110e on the upper surface of the contact part 110a to make multi-contact with the connection terminal 410 .
  • the contact protruding portion 110e is formed along the thickness direction ( ⁇ z direction) of the contact portion 110a and extends longer than its periphery in a longitudinal direction ( ⁇ y direction).
  • the flange portion 160 is continuously formed on the lower surface of the end of the contact portion 110a in the width direction ( ⁇ x direction) and extends downward.
  • the flange portion 160 is connected to the first connection portion 110 through the contact portion 110a.
  • the left and right sides of the contact portion 110a are curved corresponding to the curved left and right sides of the contact cavity 110b. Accordingly, the contact portion 110a protrudes outward in the width direction ( ⁇ x direction) with respect to the flange portion 160 due to the curved left and right sides.
  • the first connection part 110 contacts the end of the support part 130 through protruding parts on the left and right sides to form a current path leading to the first connection part 110 and the support part 130 .
  • the flange unit 160 includes a first flange unit 160a provided on one side of the elastic unit 150 and a second flange unit 160b provided on the other side of the elastic unit 150 .
  • the first flange part 160a is provided on one side of the elastic part 150 and is provided between the first support part 130a and the elastic part 150, and the second flange part 160b is provided on the first flange part 160a. It is opposite to and is provided on the other side of the elastic part 150. Accordingly, the second flange portion 160b is provided between the second support portion 130b and the elastic portion 150 .
  • the first flange portion 160a and the second flange portion 160b may have the same length or may have different lengths.
  • the length of the first flange portion 160a is longer than that of the second flange portion 160b.
  • one end of the upper region UF is connected to the contact portion 110a and moves inward in the width direction ( ⁇ x direction) from one end of the upper region UF to the other end of the upper region UF.
  • slope One end of the lower region LF is connected to the other end of the upper region UF, and the distance from one end of the lower region LF to the other end of the lower region LF is perpendicular to the longitudinal direction ( ⁇ y direction).
  • the lower region LF includes auxiliary contact protrusions 161 .
  • the second flange portion 160b has a different length from the first flange portion 160a, but the shape of the upper region UF and the lower region LF are the same.
  • the electrically conductive contact pin 100c of the third embodiment When the electrically conductive contact pin 100c of the third embodiment receives an eccentric pressing force by the connection terminal 410, excessive buckling deformation in the left and right directions is prevented through the first and second flange portions 160a and 160b. .
  • the elastic part 150 tilts to one side and compressively deforms due to the eccentric pressing force, the first and second flange parts 160a and 160b come into contact with the inner surface of the support part 130 corresponding to each other and are held by the support part 130. supported
  • the electrically conductive contact pin 100c of the third embodiment is prevented from being excessively buckling and deformed in the left and right directions due to the eccentric pressing force.
  • the support portion 130 including the first and second support portions 130a and 130b has an inner inclined portion IS that is inclined inward while increasing in width in the downward direction (-y direction).
  • the electrically conductive contact pin 100c of the third embodiment is formed by the compression deformation of the elastic part 150 through the configuration of the auxiliary contact protrusion 161 and the inner slope IS of the flange part 160. When is moved downward (-y direction), it gently contacts the inner surface of the support part 130 and maintains the contact state.
  • the stopper part 170 is a first stopper part 170a provided on one side of the elastic part 150 and a second stopper part 170b provided on the other side of the elastic part 150 opposite to the first stopper part 170a. ).
  • the first and second stopper portions 170a and 170b are provided at different positions in the longitudinal direction to disperse stress of the electrically conductive contact pin 100c of the third embodiment.
  • the first stopper part 170a is located close to the second stopper part 170b and the second connection part 120 in the longitudinal direction ( ⁇ y direction), and the second stopper part 170b is located in the longitudinal direction. It is located closer to the first connection part 110 than the first stopper part 170a in ( ⁇ y direction).
  • the first and second stopper portions 170a and 170b are positioned differently in the longitudinal direction ( ⁇ y direction), so that the first and second flange portions 160a and 170b have different lengths. 160b) is brought into stable contact with the first and second stopper portions 170a and 170b.
  • the electrically conductive contact pin 100c of the third embodiment includes first and second stopper portions 170a and 170b having different positions in the longitudinal direction ( ⁇ y direction), and first and second flange portions having different lengths ( 160a, 160b).
  • the first stopper part 170a corresponding to the relatively long first flange part 160a is located closer to the second connection part 120 and is lower than the second stopper part 170b in the longitudinal direction. provided at the location.
  • the second stopper part 170b corresponding to the relatively short length of the second flange part 160b is located close to the first connection part 110 and is higher than the first stopper part 170a in the longitudinal direction. are provided in
  • the electrically conductive contact pin 100c of the third embodiment is formed in the longitudinal direction ( ⁇ y direction) of the first and second stopper portions 170a and 170b in consideration of the different lengths of the first and second flange portions 160a and 160b. position differently. Accordingly, even if the lengths of the first and second flange portions 160a and 160b are different and the positions of the first and second stopper portions 170a and 170b in the longitudinal direction ( ⁇ y direction) are different, the first and second stopper portions 170a and 170b are different.
  • the distance R between the first flange parts 160a and the distance R between the second stopper part 170b and the second flange part 160b are the same.
  • the first and second stopper portions 170a and 170b come into contact with the first and second flange portions 160a and 160b through the upper surface and descend due to the compressive deformation of the elastic portion 150.
  • the first and second flange portions 160a, 160b) is stopped.
  • the first and second flange portions 160a and 160b do not additionally descend while contacting the first and second stopper portions 170a and 170b, thereby limiting their descending positions. Accordingly, the amount of compression is limited while the electrically conductive contact pins 100c of the third embodiment are no longer compressed.
  • the upper surfaces of the first and second stopper parts 170a and 170b are concave, and the free ends of the first and second flange parts 160a and 160b correspond to the shape of the upper surfaces of the first and second stopper parts 170a and 170b. is provided convexly.
  • the convex free ends of the first and second flange portions 160a and 160b form the first and second flange portions 160a and 160b respectively. It is accommodated in the concave part of the 2 stopper parts 170a and 170b.
  • the downwardly moving flange part 160 is firmly supported by the first and second stopper parts 170a and 170b without shaking in the lowered position.
  • FIGS. 3 and 11 are plan views of an electrically conductive contact pin 100d of the fourth embodiment.
  • the electrically conductive contact pin 100d of the fourth embodiment includes a first connection portion 110 including a contact portion 110a having a contact cavity 110b and a contact protrusion 110e, a connection body portion 120a, and a pad.
  • the first connection portion 110 includes a contact protrusion 110e extending upward from an end in the width direction ( ⁇ x direction) of the contact portion 110a having a contact cavity 110b at a central portion.
  • the electrically conductive contact pin 100d of the fourth embodiment has two contact projections 110e.
  • the contact protruding portion 110e is formed to protrude outward from the contact portion 110a based on the width direction ( ⁇ x direction).
  • An upper surface of the contact protrusion 110e is inclined.
  • the upper surface of the contact protrusion 110e slopes downward from the outside to the inside with reference to the width direction ( ⁇ x direction).
  • the groove portion 110f is concavely formed between the contact protrusions 110e to accommodate particles introduced through the upper surface of the contact protrusions 110e.
  • the outer surface of the contact portion 110a has an inclined surface inclined outward in the width direction. Accordingly, the width of the contact portion 110a decreases from top to bottom in the width direction.
  • the contact part 110a contacts the support part 130 through the inclined surface of the outer surface. Accordingly, a current path leading to the support part 130 and the first connection part 110 is formed.
  • the flange portion 160 extends from the lower surface of one side of the first connection portion 110 in a longitudinal direction ( ⁇ y direction). Specifically, the flange portion 160 extends from the lower surface of one side of the contact portion 110a in a longitudinal direction ( ⁇ y direction). Accordingly, the flange portion 160 is provided between the first support portion 130a and the elastic portion 150, and is positioned to overlap the upper end of the first support portion 130a in the width direction ( ⁇ x direction).
  • an eccentric pressing force by the connection terminal 410 is applied to the electrically conductive contact pin 100d of the fourth embodiment, the flange portion 160 comes into contact with the support portion 130 and is supported by the support portion 130 . Accordingly, the conductive contact pin 100d of the fourth embodiment is prevented from being excessively buckled in the left and right directions due to the eccentric pressing force.
  • the outer surface of the flange portion 160 is formed vertically, one end of which is connected to the lower end of the inclined outer surface of the contact portion 110a, and the other end of the flange portion 160 is a free end.
  • the flange part 160 moves downward according to the compressive deformation of the elastic part 150 and comes into contact with the stopper part 170 .
  • the electrically conductive contact pin 100d of the fourth embodiment includes a stopper portion 170 that extends from the inner side of the support portion in the width direction ( ⁇ x direction) and is connected to one side of the curved portion 154 .
  • the electrically conductive contact pin 100d of the fourth embodiment extends from the inner surface of the first support part 130a in the width direction ( ⁇ x direction) to at least one of the curved parts 154 of the elastic part 150. It is connected to one side of and is provided with a first stopper portion (170a) provided between the first support portion (130a) and the curved portion (154).
  • the first stopper portion 170a has a shape in which a portion extending curvedly from the inner surface of the first support portion 130a toward the inside in the width direction ( ⁇ x direction) is connected to one side of the curved portion 154 .
  • the first stopper part 170a is provided to correspond up and down with the flange part 160 in the longitudinal direction ( ⁇ y direction). Accordingly, the flange part 160 descends due to the compressive deformation of the elastic part 150 and comes into contact with the upper surface of the first stopper part 170a.
  • the first stopper portion 170a supports the flange portion 160 and stops the flange portion 160 from descending when the flange portion 160 contacts the upper surface. Accordingly, the flange portion 160 descends only to a position where it contacts the first stopper portion 170a, and the descending position is limited.
  • a separation distance R having a predetermined length exists between the lower surface of the flange part 160 and the upper surface of the first stopper part 170a.
  • the second hooking part SP2 of the support part 130 includes an outer inclined part 134a inclined outward in the width direction ( ⁇ x direction), a protruding jaw 134b protruding outward in the width direction ( ⁇ x direction), and an outer It includes a cutout 134c provided between the inclined portion 134a and the protruding jaw 134b.
  • At least two or more protruding jaws 134b are formed with the cutout 134c interposed therebetween.
  • the second hooking part SP2 allows the outer inclined part 134a to be elastically deformed in the width direction so that the second hooking part SP2 itself can be elastically deformed.
  • the electrically conductive contact pin 100d of the fourth embodiment When the electrically conductive contact pin 100d of the fourth embodiment is installed in the guide hole GH, the lower end including the second hooking part SP2 is compressed inward in the width direction ( ⁇ x direction) so that the guide hole GH is formed. It is inserted through the top opening. At this time, the electrically conductive contact pin 100d of the fourth embodiment allows compression deformation of the lower end to be more easily achieved through the cutout 134c and prevents movement inside the guide hole GH through the outer inclined portion 134a. It is easy to increase the insertion efficiency into the guide hole (GH).
  • the second connection part 120 includes three pad connection protrusions 120c extending downward from the connection body part 120a.
  • the second connection part 120 moves upward (in the +y direction) according to the pressing force of the pad 310, and the two pad connection protrusions 120c provided on the outside of the three pad connection protrusions 120c are placed in the second locking part ( SP2) is brought into contact with the inner surface of the lower end of the support part 130 . Accordingly, a current path leading to the second connection part 120 and the support part 130 is formed.
  • FIGS. 3 and 12 is a plan view of an electrically conductive contact pin 100e of the fifth embodiment.
  • the electrically conductive contact pin 100e of the fifth embodiment extends to the first connection portion 110 including the contact portion 110a and the contact protrusion portion 110e, the connection body portion 120a, and an upper portion of the connection body portion 120a. It includes the second connection part 120 including the extending part 123, the support part 130, the elastic part 150, the flange part 160, and the stopper part 170.
  • the first connection portion 110 includes a contact protrusion 110e extending upward from an end of the contact portion 110a in the width direction ( ⁇ x direction).
  • the flange portion 160 extends downward from the end of the contact portion 110a in the width direction ( ⁇ x direction).
  • the flange portion 160 is provided in a form in which the width increases in the width direction ( ⁇ x direction) from top to bottom. In other words, the separation distance between the first flange portion 160a and the second flange portion 160b increases from top to bottom in the width direction ( ⁇ x direction).
  • One end of the flange portion 160 is connected to the lower surface of the end of the contact portion 110a in the width direction ( ⁇ x direction), and the other end is a free end.
  • the flange portion 160 is provided between the support portion 130 and the elastic portion 150 and is positioned to overlap the upper end of the support portion 130 in the width direction ( ⁇ x direction). Accordingly, when an eccentric pressing force is applied to the electrically conductive contact pin 100e of the fifth embodiment by the connection terminal 410, it comes into contact with the support portion 130 to support the support portion 130, causing the support portion 130 to be excessively left, Buckling deformation in the right direction is prevented.
  • the flange portion 160 contacts the stopper portion 170 through the free end of the other end. According to the compressive deformation of the elastic part 150, the flange part 160 moves downward and contacts the stopper part 170.
  • the stopper part 170 includes a first stopper part 170a provided between the elastic part 150 and the first support part 130a and a second stopper part provided between the elastic part 150 and the second support part 130b. (170b).
  • the first stopper portion 170a extends from the inner surface of the first support portion 130a in the width direction ( ⁇ x direction) to the upper portion (+y direction) of the straight portion 154 relative to the length direction ( ⁇ y direction). ) is connected to the curved portion 154 extending in length.
  • the second stopper portion 170a extends from the inner surface of the second support portion 130b in the width direction ( ⁇ x direction) to the upper portion ( ⁇ y direction) of the straight portion 154 relative to the length direction ( ⁇ y direction). ) is connected to the curved portion 154 extending in length.
  • the first and second stopper portions 170a and 170b are provided at the same position in the longitudinal direction ( ⁇ y direction).
  • the stopper part 170 stops the flange part 160 by supporting the downwardly moving flange part 160 through the upper surface. Through this, the stopper part 170 limits the lowering position of the flange part 160 . Accordingly, the compression amount of the electrically conductive contact pin 100e of the fifth embodiment is limited.
  • the electrically conductive contact pin 100e of the fifth embodiment provides a current path leading to the first connection portion 110, the flange portion 160, and the stopper portion 170 through contact between the stopper portion 170 and the flange portion 160.
  • the electrically conductive contact pin 100e of the fifth embodiment includes a second hooking part SP2 including an inclined part 134a and a protruding jaw 134b at the upper end of the support part 130, and the lower part of the support part 130. It is provided with a first locking portion (SP1) protruding outward than the peripheral portion.
  • the electrically conductive contact pin 100e of the fifth embodiment when the electrically conductive contact pin 100e of the fifth embodiment is inserted into the guide hole GH, the upper end of the support portion 130 is compressively deformed inward in the width direction and inserted into the lower opening of the guide hole GH. Then, the electrically conductive contact pin 100e of the fifth embodiment is pressed from the bottom to the top and is forcibly pushed into the guide hole GH.
  • the second catching part SP2 passes through the upper opening of the guide hole GH, the upper end of the supporting part 130 including the second catching part SP2 extends outward in the width direction due to the elastic restoring force of the supporting part 130. It is restored as it unfolds.
  • the upper surface of the first hanging part SP1 comes into contact with and is supported by the lower surface of the guide plate GP existing around the lower opening of the guide hole GH.
  • the second connection part 120 has two pad connection protrusions 120c extending to the lower part of the connection body part 120a.
  • the second connection part 120 includes an extension part 123 extending upward from the connection body part 120a.
  • the extension part 123 includes an extended inclined part 123a extending upwardly and inclined outwardly in the width direction ( ⁇ x direction) from the end of the connection body part 120a in the width direction ( ⁇ x direction) and extending upward, and an extended inclined part 123a. ) and an extended contact portion 123b provided on the upper portion of the extension contact portion 123b and an extension free portion 123c provided on the upper portion of the extension contact portion 123b.
  • the extended contact portion 123b is formed to have a thicker thickness in the width direction ( ⁇ x direction) than the peripheral portion (the extended inclined portion 123a and the extended contact portion 123b). Accordingly, in the extension portion 123, the outer surface of the portion where the extended contact portion 123b is formed protrudes outward in the width direction ( ⁇ x direction) than the outer surface of the portion where the free extension portion 123c is formed.
  • the free extension part 123c located inside the support part 130 moves upward in the longitudinal direction, and the extension contact part (123b) is located on the inside of the support portion (130).
  • the extended contact portion 123b contacts the inner surface of the support portion 130 and is located inside the support portion 130 .
  • the extended close contact portion 123b pushes the support portion 130 outward in the width direction ( ⁇ x direction) and contacts the inner surface of the support portion 130 .
  • the lower end of the support part 130 including the first hooking part SP1 is in close contact with the inner surface of the guide hole GH, and the electrically conductive contact pin 100e of the fifth embodiment inserted into the guide hole GH. ) is strengthened. As a result, the prevention of upward separation of the electrically conductive contact pin 100e according to the fifth embodiment is more effectively achieved.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Push-Button Switches (AREA)

Abstract

La présente invention concerne une broche de contact électroconductrice qui améliore la fiabilité d'un test pour un objet, et dont la quantité de compression est limitée par une unité d'arrêt.
PCT/KR2023/002495 2022-02-25 2023-02-22 Broche de contact électroconductrice WO2023163493A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220025335A KR20230127709A (ko) 2022-02-25 2022-02-25 전기 전도성 접촉핀
KR10-2022-0025335 2022-02-25

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WO2023163493A1 true WO2023163493A1 (fr) 2023-08-31

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Citations (5)

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Publication number Priority date Publication date Assignee Title
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2010532908A (ja) * 2008-01-02 2010-10-14 中村 敏幸 一体型で構成されるプローブピン及びその製造方法
JP2015038455A (ja) * 2013-08-19 2015-02-26 富士通コンポーネント株式会社 プローブ及びプローブの製造方法
KR20150020500A (ko) * 2013-08-13 2015-02-26 주식회사 기가레인 미세 전극 회로 검사용 핀 제조 방법 및 이의 방법으로 제조된 미세 전극 회로 검사용 핀
KR102132232B1 (ko) * 2019-05-10 2020-07-10 (주)루켄테크놀러지스 프로브 핀, 이의 제조 방법 및 이를 포함하는 반도체 검사 장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100659944B1 (ko) 2005-12-23 2006-12-21 리노공업주식회사 플런저 및 이를 장착한 검사용 탐침장치
KR100952712B1 (ko) 2007-12-27 2010-04-13 주식회사 아이에스시테크놀러지 판형 도전입자를 포함한 실리콘 콘택터

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2010532908A (ja) * 2008-01-02 2010-10-14 中村 敏幸 一体型で構成されるプローブピン及びその製造方法
KR20150020500A (ko) * 2013-08-13 2015-02-26 주식회사 기가레인 미세 전극 회로 검사용 핀 제조 방법 및 이의 방법으로 제조된 미세 전극 회로 검사용 핀
JP2015038455A (ja) * 2013-08-19 2015-02-26 富士通コンポーネント株式会社 プローブ及びプローブの製造方法
KR102132232B1 (ko) * 2019-05-10 2020-07-10 (주)루켄테크놀러지스 프로브 핀, 이의 제조 방법 및 이를 포함하는 반도체 검사 장치

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KR20230127709A (ko) 2023-09-01

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