WO2023163447A1 - Broche de contact électroconductrice et dispositif d'inspection la comprenant - Google Patents

Broche de contact électroconductrice et dispositif d'inspection la comprenant Download PDF

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Publication number
WO2023163447A1
WO2023163447A1 PCT/KR2023/002214 KR2023002214W WO2023163447A1 WO 2023163447 A1 WO2023163447 A1 WO 2023163447A1 KR 2023002214 W KR2023002214 W KR 2023002214W WO 2023163447 A1 WO2023163447 A1 WO 2023163447A1
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WO
WIPO (PCT)
Prior art keywords
electrically conductive
conductive contact
contact pin
connection
elastic
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Application number
PCT/KR2023/002214
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English (en)
Korean (ko)
Inventor
안범모
박승호
홍창희
Original Assignee
(주)포인트엔지니어링
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Publication of WO2023163447A1 publication Critical patent/WO2023163447A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

Definitions

  • the present invention relates to an electrically conductive contact pin and a testing device having the same.
  • test object semiconductor wafer or semiconductor package
  • inspection device equipped with a plurality of electrically conductive contact pins
  • the electrically conductive contact pins are placed on the corresponding external terminals (solder balls or bumps, etc.) on the test object.
  • Examples of testing devices include, but are not limited to, probe cards or test sockets.
  • the probe card Inspection at the semiconductor wafer level is performed by a probe card.
  • the probe card is mounted between the wafer and the test equipment head, and 8,000 to 100,000 electrically conductive contact pins on the probe card are in contact with pads (WP) in individual chips on the wafer to transmit test signals between the probe equipment and individual chips. It serves as an intermediary that enables communication between them.
  • These probe cards include vertical probe cards, cantilever probe cards, and MEMS probe cards.
  • the electrically conductive contact pins used in the vertical probe card have a structure pre-deformed from the time of manufacture, or a structure in which the electrically conductive contact pins are deformed by shifting the guide plate in the horizontal direction although it is straight at the time of manufacture. adopted and used.
  • the pitch of external terminals of an object to be inspected is becoming more and more narrow.
  • the conventional electrically conductive contact pin has a structure in which its body becomes convex in the horizontal direction and is elastically bent or bent by pressure applied to both ends, the electrically conductive contact pins arranged at a narrow pitch buckling and deform, causing adjacent electrical conductivity. There is often a problem of contact with the contact pins and short-circuiting.
  • test sockets include a pogo type test socket and a rubber type test socket.
  • An electrically conductive contact pin (hereinafter referred to as 'pogo type socket pin') used in a pogo type test socket includes a pin unit and a barrel accommodating the pin unit.
  • a spring member between the plungers at both ends of the pin, it is possible to apply necessary contact pressure and absorb shock at the contact position.
  • a gap In order for the pin to slide within the barrel, a gap must exist between the outer surface of the pin and the inner surface of the barrel.
  • the pogo-type socket pin is manufactured separately from the barrel and the pin and then combined and used, it is impossible to precisely manage the gap, such that the outer surface of the pin is separated from the inner surface of the barrel more than necessary.
  • the pin portion has a sharp tip portion in order to increase the contact effect with the external terminal of the test object.
  • the pointed tip portion generates a press-fitting mark or groove on the external terminal of the test object after the test. Due to the loss of the contact shape of the external terminal, errors in vision inspection occur and reliability of the external terminal is deteriorated in a subsequent process such as soldering.
  • the electrically conductive contact pin (hereinafter referred to as 'rubber type socket pin') used in the rubber type test socket has a structure in which conductive microballs are placed inside a rubber material, silicon rubber, When stress is applied by raising the semiconductor package and closing the socket, the conductive microballs made of gold strongly press each other and the conductivity increases, making them electrically connected.
  • this rubber-type socket pin has a problem in that contact stability is secured only when it is pressed with an excessive pressing force.
  • the conventional rubber-type socket pin a molding material in which conductive particles are distributed in a fluid elastic material is prepared, the molding material is inserted into a predetermined mold, and then a magnetic field is applied in the thickness direction to move the conductive particles in the thickness direction. Since it is manufactured by arranging the magnetic field, when the distance between the magnetic fields is narrowed, the conductive particles are irregularly oriented and the signal flows in the plane direction. Therefore, existing rubber-type socket pins have limitations in responding to the narrow pitch technology trend.
  • pogo-type socket pin is used after separately manufacturing the barrel and the pin, it is difficult to manufacture them in a small size. Therefore, existing pogo-type socket pins also have limitations in responding to the narrow pitch technology trend.
  • Patent Document 1 Republic of Korea Registration No. 10-0659944 Patent Registration
  • Patent Document 2 Republic of Korea Registration No. 10-0952712 Patent Publication
  • the present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide an electrically conductive contact pin and an inspection device with improved inspection reliability for an inspection object.
  • Another object of the present invention is to provide an electrically conductive contact pin that prevents a connection object from being damaged when pressurized in contact with a connection object, and a test device having the same.
  • an electrically conductive contact pin includes a first connection portion; and a second connection portion elastically displaced relative to the first connection portion in the longitudinal direction, wherein the first connection portion includes a hollow portion and is positioned above the hollow portion when an object to be connected to the first connection portion is contacted and pressed.
  • the contact portion to be bent and deformed in the pressing direction.
  • the first connection unit may include a contact unit that is in contact with the connection object; a base portion connected to the elastic portion; and a side portion connecting the contact portion and the base portion, wherein the hollow portion is provided in a form surrounded by the contact portion, the base portion, and the side portion.
  • the electrically conductive contact pin may be inserted into a through hole having a square cross section, wherein a total width of the electrically conductive contact pin in a width direction is longer than a length of a side opposite to the first direction of the through hole, and the electrically conductive contact pin may be inserted into the through hole.
  • the total thickness dimension of the thickness direction of is smaller than the length of the side opposite to the second direction of the through hole.
  • the support portion extending in the longitudinal direction; an elastic part connected to at least one of the first connection part and the second connection part and elastically deformable along the longitudinal direction; and a boundary portion connecting the elastic portion to the support portion.
  • the support portion extending in the longitudinal direction; a boundary portion extending in the width direction and connected to the support portion from both sides; a first elastic part connecting the first connection part and the boundary part; and a second elastic part connecting the second connection part and the boundary part.
  • the second connection part includes a flange located inside the support part, and the flange can contact the inner surface of the support part as the second elastic part is compressed.
  • the first elastic part may include a 1-1 elastic part having one end connected to the first connection part and the other end connected to the boundary part; and a 1-2 elastic part disposed spaced apart from the 1-1 elastic part and having one end connected to the first connection part and the other end connected to the boundary part.
  • the support portion a first holding portion provided at one end; and a second catching portion provided at the other end.
  • a plurality of metal layers are formed by being stacked in the thickness direction of the electrically conductive contact pin.
  • a fine trench provided on the side surface is included.
  • the support portion extending in the longitudinal direction; an elastic part connected to at least one of the first connection part and the second connection part and elastically deformable along the longitudinal direction; and a boundary portion connecting the elastic portion to the support portion, wherein the first connection portion is formed by stacking first and second metal layers in a thickness direction of the electrically conductive contact pin, and the support portion includes the first and second metal layers. It is formed by being laminated in the thickness direction of the electrically conductive contact pin, and when the first connection part is pressed and the first connection part and the support part come into contact, the first metal layer formed on the first connection part is formed on the first connection part. The second metal layer that is in contact with the metal layer and formed on the first connection part is in contact with the second metal layer that is formed on the support part.
  • connection portion connected to the side portions.
  • a deformation resistance portion formed in the hollow portion is included to prevent excessive deformation of the contact portion.
  • an upper row groove portion provided on the contact portion and having a groove extending along the thickness direction of the electrically conductive contact pin is formed.
  • a lower row groove portion provided under the contact portion and having a groove extending along the thickness direction of the electrically conductive contact pin is formed.
  • the upper line groove portion provided on the contact portion and having a groove extending along the thickness direction of the electrically conductive contact pin is formed; and a lower row groove portion provided under the contact portion and having grooves extending along the thickness direction of the electrically conductive contact pin, wherein the grooves constituting the upper row groove section and the groove constituting the lower row groove section are zigzag. are provided
  • an upwardly rounded portion provided under the contact portion is included.
  • a downward round portion provided on the upper portion of the contact portion is included.
  • the contact portion is formed by being divided by a cutout portion.
  • the inspection apparatus in order to solve the above problems and achieve the object, the inspection apparatus according to the present invention, the first connection unit; And a second connection portion that is elastically displaced relative to the first connection portion in the longitudinal direction, wherein the first connection portion includes a hollow portion and is located above the hollow portion when an object to be connected to the first connection portion is contacted and pressed. an electrically conductive contact pin, the contact portion being deformable; and an installation member having a through hole accommodating the electrically conductive contact pin.
  • the present invention provides an electrically conductive contact pin with improved inspection reliability for a test object and a test device having the same.
  • the present invention provides an electrically conductive contact pin that prevents a connection object from being damaged when pressurized in contact with a connection object, and a test device having the same.
  • FIG. 1 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 2 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 3 is a diagram representing the current path of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • Figure 4 is a perspective view of an installation member according to a first preferred embodiment of the present invention.
  • Fig. 5 shows an electrically conductive contact pin according to a first preferred embodiment of the present invention installed on an installation member
  • Figure 6 is a view showing the inspection of the inspection target using the inspection device according to the first preferred embodiment of the present invention.
  • FIG. 7 and 8 show an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIGS. 9A to 9D are diagrams illustrating a method of manufacturing an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • Fig. 10 is a side view of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • Fig. 11 is a perspective view of an electrically conductive contact pin according to a second preferred embodiment of the present invention.
  • Fig. 12 is a perspective view of an electrically conductive contact pin according to a third preferred embodiment of the present invention.
  • Fig. 13 is a perspective view of an electrically conductive contact pin according to a fourth preferred embodiment of the present invention.
  • Fig. 14 is a perspective view of an electrically conductive contact pin according to a fifth preferred embodiment of the present invention.
  • Fig. 15 is a perspective view of an electrically conductive contact pin according to a sixth preferred embodiment of the present invention.
  • Fig. 16 is a perspective view of an electrically conductive contact pin according to a seventh preferred embodiment of the present invention.
  • Fig. 17 is a perspective view of an electrically conductive contact pin according to an eighth preferred embodiment of the present invention.
  • Fig. 18 is a perspective view of an electrically conductive contact pin according to a ninth preferred embodiment of the present invention.
  • Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content.
  • the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes.
  • Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise.
  • the electrically conductive contact pins 100a to 100i are provided in the test device 10 and are used to electrically and physically contact the test target 400 to transmit electrical signals.
  • the inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the test device 10 includes electrically conductive contact pins 100a to 100i and an installation member 200 having through holes accommodating the electrically conductive contact pins 100a to 100i.
  • the electrically conductive contact pins 100a to 100i may be probe pins provided in a probe card or socket pins provided in a test socket.
  • socket pins are exemplified and described as examples of the electrically conductive contact pins 100a to 100i, but the electrically conductive contact pins 100a to 100i according to a preferred embodiment of the present invention are not limited thereto. All pins for checking whether the inspection object 400 is defective are included.
  • the width direction of the electrically conductive contact pins 100a to 100i described below is the ⁇ x direction indicated in the drawing
  • the length direction of the electrically conductive contact pins 100a to 100i is the ⁇ y direction indicated in the drawing
  • the thickness direction of (100a to 100i) is the ⁇ z direction indicated in the drawing.
  • the electrically conductive contact pins 100a to 100i have an overall length dimension L in a longitudinal direction ( ⁇ y direction) and an overall thickness dimension H in a thickness direction perpendicular to the longitudinal direction ( ⁇ z direction). , Has a total width dimension (W) in the width direction ( ⁇ x direction) perpendicular to the length direction.
  • FIGS. 1 to 10 an electrically conductive contact pin 100a according to a first preferred embodiment of the present invention will be described with reference to FIGS. 1 to 10 .
  • FIG. 1 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 2 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. It is a view expressing the current path of the electrically conductive contact pin according to the first preferred embodiment
  • Figure 4 is a perspective view of the installation member according to the first preferred embodiment of the present invention
  • Figure 5 is a perspective view of the first preferred embodiment of the present invention
  • FIG. 6 is a view showing that an inspection object is inspected using the inspection device according to the first preferred embodiment of the present invention
  • FIGS. 7 and 8 is a view showing an electrically conductive contact pin according to the first preferred embodiment of the present invention
  • FIGS. 9A to 9D are views explaining a method of manufacturing the electrically conductive contact pin according to the first preferred embodiment of the present invention
  • 10 is a side view of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • the electrically conductive contact pin 100a includes a first connection portion 110 and a second connection portion 120, and the second connection portion 120 is elastic with respect to the first connection portion 110 in a longitudinal direction ( ⁇ y direction). relative displacement.
  • An elastic part is provided so that the first connection part 110 can be elastically displaced relative to the second connection part 120 .
  • the elastic part is provided between the first connection part 110 and the second connection part 120 and is directly or indirectly connected to the first connection part 110 and/or the second connection part 120 . elastic part
  • the elastic part in the electrically conductive contact pin 100a according to the first embodiment includes first and second elastic parts 150 .
  • the electrically conductive contact pin 100a includes a first connection portion 110, a second connection portion 120, a support portion 130 extending in the longitudinal direction ( ⁇ y direction), and a support portion 130 extending in the width direction and extending from both sides.
  • the boundary part 140 connected, the first elastic part 150 connecting the first connection part 110 and the boundary part 140, and the second elastic part 160 connecting the second connection part 120 and the boundary part 140 includes
  • One end of the first elastic part 150 is connected to the first connection part 110 and the other end is connected to the boundary part 140 .
  • One end of the second elastic part 160 is connected to the second connection part 120 and the other end is connected to the boundary part 140 .
  • the first connection part 110, the second connection part 120, the support part 130, the boundary part 140, the first elastic part 150, and the second elastic part 160 are integrally provided.
  • the first connection part 110, the second connection part 120, the support part 130, the boundary part 140, the first elastic part 150, and the second elastic part 160 are manufactured at once using a plating process.
  • the electrically conductive contact pin 100a is formed by filling the inner space 1100 with a metal material by electroplating using the mold 1000 having the inner space 1100, so that the first connection portion 110, the second connection part 120, the support part 130, the boundary part 140, the first elastic part 150, and the second elastic part 160 are connected to each other and manufactured as an integral part.
  • the electrically conductive contact pins 100a include the first connector 110, 2 There is a difference in configuration in that the connection part 120, the support part 130, the boundary part 140, the first elastic part 150, and the second elastic part 160 are manufactured in one piece by using a plating process. there is.
  • each cross section in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a is the same. In other words, the same cross-sectional shape is formed extending in the thickness direction ( ⁇ z direction).
  • the electrically conductive contact pin 100a has an overall thickness dimension H in the thickness direction ( ⁇ z direction). That is, the first connection part 110, the second connection part 120, the support part 130, the boundary part 140, the first elastic part 150, and the second elastic part 160 are formed to have the same thickness (H). do.
  • a plurality of metal layers are stacked in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel (Ni). , manganese (Mn), tungsten (W), phosphorus (Ph) or alloys thereof, or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy, nickel-phosphorus (NiPh) alloy, nickel-manganese (NiMn ), a nickel-cobalt (NiCo) or a nickel-tungsten (NiW) alloy.
  • the second metal layer 102 is a metal having relatively high electrical conductivity compared to the first metal layer 101, and is preferably formed of a metal selected from among copper (Cu), silver (Ag), gold (Au), or alloys thereof. It can be. However, it is not limited thereto.
  • the first metal layer 101 is provided on the front and rear surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pins 100a are formed in the order of the first metal layer 101, the second metal layer 102, and the first metal layer 101 in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a. It is provided by being alternately stacked, and the number of layers to be stacked may consist of three or more layers.
  • One end of the first connection part 110 is a free end and the other end is connected to the first elastic part 150 so that it can move vertically elastically by contact pressure.
  • the first connection part 110 includes a contact part 112 in contact with the connection object, a base part 111 connected to the elastic part (more specifically, the first elastic part 150), the contact part 112 and the base part ( 111) and includes a side portion 114 connecting to it.
  • the hollow part 115 provided in the first connection part 110 is provided in a form surrounded by the contact part 112 , the base part 111 and the side part 114 .
  • the hollow part 115 is provided in a penetrating form in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the first connection part 110 includes a hollow part 115, and when a connection object is contacted and pressurized to the first connection part 110, the contact part 112 located on the upper part of the hollow part 115 is bent in the pressing direction. possible.
  • the base part 111, the contact part 112, and both side parts 114 are provided in a form surrounding the hollow part 115, so that the hollow part 115 is formed in a closed structure.
  • the contact part 112 and the side part 114 of the first connection part 110 are provided in the form of a plate-shaped plate having a substantial width.
  • the actual width of the contact portion 112 is one side (the upper surface of the contact portion 112 that is in contact with the connection object) and the opposite side (the lower surface of the contact portion 112, which is hollow) based on the contact portion 112. It is the length between the planes located on the part 115 side).
  • the contact portion 112 When looking at the electrically conductive contact pin 100a from the side of the connection object, the contact portion 112 has a plate-like shape and has four sides. Here, two of the four sides are configured in the form of corners connected to the side portion 114, and the other two sides are provided in the form of ends not connected to any part.
  • the side parts 114 located on both sides support the two sides of the contact part 112 along the thickness direction ( ⁇ z direction).
  • the connection object may be the test object 400, and preferably may be a semiconductor package.
  • the connection terminal 410 of the semiconductor package may have a spherical shape.
  • the connection terminal 410 contacts the contact portion 112 and presses the contact portion 112
  • the contact portion 112 surrounds the connection terminal 410. It is bent and deformed concavely in the direction. That is, the contact portion 112 is deformed into a semi-cylindrical shape by the pressing force. Meanwhile, when the pressing force of the connection terminal 410 is released, the contact portion 112 returns to its original state by its own elastic restoring force.
  • the contact part 112 of the first connection part 110 is elastically deformed to buffer the impact of falling of the connection terminal 410 and prevent damage to the connection terminal 410 . Preventing damage to the connection terminal 410 is achieved more effectively by the cushioning action of the first connection portion 110 together with the cushioning action of the elastic part.
  • the upper surface of the contact part 112 may be composed of a flat surface, a convex surface toward the upper side, or a concave surface toward the lower side.
  • the upper surface of the contact portion 112 is illustrated as being composed of a flat surface, but the scope of the embodiment of the present invention is not limited thereto, and is composed of a convex surface toward the upper side or a concave surface toward the lower side. Shaving is included.
  • the first elastic part 150 connected to the first connection part 110 is compressed and deformed, and while the first connection part 110 moves downward, the first connection part 110 comes into contact with the support part 130.
  • the base portion 111 of the first connection portion 110 is guided and descended between the two support portions 130, and the base portion 111 is an elastic portion (more preferably, the first elastic portion 150). to compress and deform.
  • the outer surface of the side portion 114 of the first connection portion 110 includes an inclined portion inclined inward in the width direction ( ⁇ x direction) from the top to the bottom in the length direction ( ⁇ y direction).
  • connection terminal 410 of the test object 400 contacts the first connection part 110 and moves downward by a predetermined distance, the distance between the first connection part 110 and the support part 130 is gradually reduced while the first connection part The side of 110 is in contact with the support 130 .
  • the first elastic part 150 is compressed by the pressing force of the connection terminal 410 as described above, the first connection part 110 contacts the support part 130 to form a current path.
  • the first connection part 110 is formed by stacking the first and second metal layers 101 and 102 in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a
  • the support part 130 also includes the first and second metal layers ( 101 and 102) are formed by being stacked in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the first and second metal layers 101 and 102 formed on the first connection portion 110 and the support portion 130 have the same number of layers and are located at the same position in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a. are provided
  • the first metal layer 101 formed on the first connection part 110 forms the support part 130.
  • the second metal layer 102 formed on the first connection portion 110 is in contact with the second metal layer 102 formed on the support portion 130 . In this way, by allowing the same metals to be in sliding contact with each other, it is possible to prevent a problem in which particles are generated during sliding contact between dissimilar metals.
  • One end of the second connection part 120 is a free end and the other end is connected to the second elastic part 160 so that it can move vertically elastically by contact pressure.
  • the second connection part 120 includes a body part 121 connected to the second elastic part 160 and a flange 123 extending from the body part 121 and located inside the support part 130 . As the second elastic part 160 is compressed, the flange 123 can contact the inner surface of the support part 130 .
  • a concave portion 122 is provided in the body portion 121 . Both sides of the concave portion 122 form contacts protruding downward, so that multi-contact is achieved between the second connection portion 120 and the connection pad 310 .
  • the flange 123 extends upward from the side of the body 121 in a direction parallel to the support 130 in a state of being spaced apart from the support 130 .
  • the flange 123 is located between the support part 130 and the second elastic part 160 based on the width direction ( ⁇ x direction).
  • the support part 130 includes a thin part 134 formed at a position corresponding to the position of the flange 123, and a thick part 133 having a width larger than the width of the thin part 134 at the top of the thin part 134.
  • the outside of the support part 130 is provided in a vertical form because it is in close contact with the inner wall of the through hole 210 of the support member 200, while the inside of the support part 130 has a thin part 134 with a different width. It has a thick portion (133).
  • the thin portion 134 is a portion having a relatively small width compared to the thick portion 133 .
  • the inner side of the support part 130 is formed by the thin part 134 and the thick part 133, and the width of the support part 130 increases from the bottom to the top.
  • the second elastic portion 160 is compressed and deformed, and the second connector 120 moves upward.
  • the second connection part 120 moves upward, since the second connection part 120 is in a state of being spaced apart from the support part 130, compression deformation of the second elastic part 160 is more easily achieved.
  • the second connection part 120 moves upward by a predetermined distance, the second connection part 120 comes into contact with the support part 130 . More specifically, before the second elastic part 160 compressively deforms, the flange 123 of the second connection part 120 is in a state of being spaced apart from the thin part 134 of the support part 130 .
  • the second connection part 120 When the second elastic part 160 is compressed and deformed, the second connection part 120 rises, and the flange 123 of the second connection part 120 comes into contact with the thick part 133 . As the second elastic part 160 is compressed in this way, the second connection part 120 contacts the support part 130 to form a current path.
  • the support part 130 includes a first support part 130a provided on the left side and a second support part 130b provided on the right side.
  • the boundary portion 140 extends in the width direction of the electrically conductive contact pin 100a and connects the first support portion 130a and the second support portion 130b.
  • the upper side portion and the lower side portion of the support portion 130 may be folded or opened with respect to each other in the width direction ( ⁇ x direction).
  • the electrically conductive contact pin 100a is inserted into the through hole 210 of the installation member 200 through a configuration in which the upper and lower portions of the support 130 are closed or widened in the width direction ( ⁇ x direction).
  • the installation process and replacement process can be achieved more easily.
  • the first elastic part 150 is provided on the upper part based on the boundary part 140
  • the second elastic part 160 is provided on the lower part based on the boundary part 140 . Based on the boundary portion 140, the first elastic portion 150 and the second elastic portion 160 are compressed or stretched.
  • the boundary part 140 is fixed to the first and second support parts 130a and 130b to limit the positional movement of the first and second elastic parts 130a and 130b when the first and second elastic parts 150 and 160 are compressed and deformed. will perform the function of
  • An area provided with the first elastic part 150 and an area provided with the second elastic part 160 are distinguished from each other by the boundary portion 140 . Therefore, foreign substances introduced from the upper part are not introduced into the second elastic part 160, and foreign substances introduced from the lower part are also prevented from being introduced into the first elastic part 150. Through this, by limiting the movement of the foreign matter introduced into the support part 130, it is possible to prevent the foreign matter from interfering with the operation of the first and second elastic parts 150 and 160.
  • the first support portion 130a and the second support portion 130b are formed along the longitudinal direction ( ⁇ y direction) of the electrically conductive contact pin 100a, and the first support portion 130a and the second support portion 130b are electrically conductive. It is integrally connected to the boundary portion 140 extending along the width direction ( ⁇ x direction) of the contact pin 100a. While the first and second elastic parts 150 and 160 are integrally connected through the boundary part 140, the electrically conductive contact pin 100a is composed of one body as a whole.
  • the cross-sectional shapes of the first and second elastic parts 150 and 160 in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a are the same in all thickness sections. This is possible because the electrically conductive contact pins 100a are manufactured through a plating process.
  • the first and second elastic parts 150 and 160 have a shape in which a plate-shaped plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-shaped plate is generally constant.
  • the actual width (t) of the plate-shaped plate is the length between one side and the opposite side of the plate-shaped plate, and is an average value of widths based on the plate-shaped plates constituting the first and second elastic parts 150 and 160, or It can be an intermediate value.
  • the first and second elastic parts 150 and 160 are formed by alternately connecting a plurality of straight parts 153 and a plurality of curved parts 154 .
  • the straight part 153 connects the curved part 154 adjacent to the left and right, and the curved part 154 connects the straight part 153 adjacent to the top and bottom.
  • the curved portion 154 is provided in an arc shape.
  • a straight portion 153 is disposed at the center of the first and second elastic portions 150 and 160 , and a curved portion 154 is disposed at an outer portion of the first and second elastic portions 150 and 160 .
  • the straight portion 153 is provided parallel to the width direction ( ⁇ x direction) so that the curved portion 154 is more easily deformed according to the contact pressure.
  • the portion of the first and second elastic parts 150 and 160 connected to the boundary part 140 is the curved part 154 of the first and second elastic parts 150 and 160 .
  • the first and second elastic parts 131 and 135 maintain elasticity with respect to the boundary part 140 .
  • the first elastic part 150 requires an amount of compression sufficient for the first connection part 110 of the electrically conductive contact pin 100a to make stable contact with the connection terminal 410 of the object 400, while the second elastic part 150
  • the portion 160 requires an amount of compression sufficient to ensure stable contact between the second connection portion 120 of the electrically conductive contact pin 100a and the connection pad 310 of the circuit board 300 . Therefore, the spring coefficient of the first elastic part 150 and the spring coefficient of the second elastic part 160 may be different from each other.
  • the length of the first elastic part 150 and the length of the second elastic part 160 may be provided differently.
  • a dimension of the first elastic part 150 in the width direction ( ⁇ x direction) and a dimension of the second elastic part 160 in the width direction ( ⁇ x direction) may be provided differently from each other.
  • one second elastic part 160 may be provided and at least two first elastic parts 150 may be provided.
  • the second elastic part 160 is composed of one piece, while the first elastic part 150 has one end connected to the first connection part 110 and the other end connected to the boundary part 140.
  • the 1-1 elastic part 151 and the 1-1 elastic part 151 are disposed apart from each other, and one end is connected to the first connection part 110 and the other end is connected to the boundary part 140. It is configured to include 2 elastic parts 152.
  • the dimensions of the 1-1st elastic part 151 and the 1-2nd elastic part 152 in the width direction ( ⁇ x direction) are smaller than the dimensions of the second elastic part 160 in the width direction ( ⁇ x direction). It can be.
  • the 1-1st elastic part 151 and the 1-2nd elastic part 152 are provided in symmetrical shapes. In other words, based on an axis between the first elastic part 151 and the 1-2 elastic part 152, the 1-1 elastic part 151 and the 1-2 elastic part 152 are symmetrical. Through this, the first connector 110 can be more stably displaced in the vertical direction.
  • a first catching part 131 is provided at one end of the support part 130 and a second catching part 131 is provided at the other end. 132) is provided.
  • the first locking portion 131 prevents the electrically conductive contact pins 100a from escaping in the downward direction
  • the second locking portion 132 prevents the electrically conductive contact pins 100a from escaping in the upward direction.
  • the first locking portion 131 is composed of an upwardly inclined portion 131a inclined upward in the width direction ( ⁇ x direction) and a protruding jaw 131b protruding outward in the width direction ( ⁇ x direction).
  • the inclined portion 131a it becomes easy to insert the electrically conductive contact pin 100a into the through hole 210 of the mounting member 200.
  • the protruding jaw 131b the electrically conductive contact pin 100a is prevented from falling into the lower portion of the through hole 210 after being installed in the through hole 210.
  • the second locking portion 132 is configured to protrude outward in the width direction ( ⁇ x direction). Through this, the upward movement of the electrically conductive contact pin 100a is restricted.
  • a through hole 210 is formed in the installation member 200 .
  • the through hole 210 has a square cross-sectional shape
  • the outer shape of the electrically conductive contact pin 100a also has a square cross-sectional shape corresponding to the cross-sectional shape of the through hole 210 .
  • the outer shape of the electrically conductive contact pin 100a refers to a shape formed when the electrically conductive contact pin 100a is projected from one side to the other side in the longitudinal direction ( ⁇ y direction) of the electrically conductive contact pin 100a. can mean
  • the cross section of the through hole 210 has a rectangular shape.
  • the overall dimension W in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100a is larger than the overall thickness H in the thickness direction ( ⁇ z direction), so that the electrically conductive contact pin 100a
  • the outer shape of is preferably formed in a rectangular shape. Through this, it is possible to prevent the electrically conductive contact pin 100a from being erroneously inserted in a 90 degree rotation state.
  • the overall width dimension W of the electrically conductive contact pin 100a in the width direction ( ⁇ x direction) is longer than the length of the through hole 210 facing in the first direction, and the electrically conductive contact pin 100a
  • the total thickness dimension H in the thickness direction ( ⁇ z direction) is smaller than the length of the side of the through hole 210 facing in the second direction.
  • the first direction of the through hole 210 is the width direction ( ⁇ x direction) of the electrically conductive contact pin 100a
  • the second direction of the through hole 210 is the thickness direction ( ⁇ x direction) of the electrically conductive contact pin 100a. z direction).
  • the electrically conductive contact pin 100a is spanned by the first locking portion 131 at the two sides of the through hole 210 facing in the first direction, but the two sides of the through hole 210 facing in the second direction. does not span Therefore, by allowing the movement of the electrically conductive contact pins 100a in the direction of the two opposite sides in the second direction of the through hole 210, the fine adjustment of the alignment can be performed from the number to several tens of ⁇ m of the electrically conductive contact pins 100a. possible.
  • FIG 5 is a view showing a state in which the electrically conductive contact pins 100a are inserted into the through holes 210 of the installation member 200 .
  • the electrically conductive contact pin 100a When the electrically conductive contact pin 100a is inserted into the through hole 210, the electrically conductive contact pin 100a is pushed upward until the second locking portion 132 is supported on the lower surface of the installation member 200. , A part of the support part 130 protrudes from the upper surface of the installation member 200.
  • the support portion 130 is longer than the length of the through hole 210 so that at least a portion of the support portion 130 protrudes outward from the through hole 210 .
  • the overall length L of the electrically conductive contact pin 100a may be 400 ⁇ m or more and 600 ⁇ m or less.
  • the overall width W of the electrically conductive contact pin 100a may be 150 ⁇ m or more and 300 ⁇ m or less.
  • the longitudinal dimension L2 of the installation member 200 may be 150 ⁇ m or more and 250 ⁇ m or less.
  • a longitudinal dimension L1 of the electrically conductive contact pin 100a protruding to the top of the installation member 200 may be greater than or equal to 50 ⁇ m and less than or equal to 200 ⁇ m.
  • a longitudinal dimension L3 of the electrically conductive contact pin 100a protruding from the lower portion of the installation member 200 may be greater than or equal to 50 ⁇ m and less than or equal to 200 ⁇ m.
  • the distance L4 between the lower surface of the first hanging part 131 and the upper surface of the installation member 200 may be 5 ⁇ m or more and 50 ⁇ m or less.
  • the contact stroke of the test object 400 may be secured through the distance L4 between the lower surface of the first hanging part 131 and the upper surface of the installation member 200 .
  • the electrically conductive contact pin 100a When the electrically conductive contact pin 100a is pressed by the contact terminal 410 and moves downward, within the free space provided through the distance L4 between the lower surface of the first hanging part 131 and the upper surface of the installation member 200.
  • the electrically conductive contact pin 100a can move downward as a whole.
  • the stroke may not be constant each time. Therefore, if the electrically conductive contact pin 100a does not have enough distance to move with respect to the installation member 200 as a whole, the electrically conductive contact pin 100a may be damaged. However, it is possible to secure the contact stroke through the distance L4 between the lower surface of the first hanging part 131 and the upper surface of the installation member 200 .
  • the distance (L4) between the lower surface of the first locking part 131 and the upper surface of the installation member 200 is less than 5 ⁇ m, it is difficult to secure a contact stroke of the test object 400, and it is more than 50 ⁇ m. In this case, it is not preferable because it may be caught in the gap between the terminal guide film and the connection terminal.
  • the first connection part 110 and the second connection part 120 are spaced apart from the support part 130. It is a state.
  • the first elastic part 150 and the second elastic part 160 are compressed and deformed by pressing force, as the first connection part 110 and the second connection part 120 come into contact with the support part 130, the first A current path leading to the connection part 110 , the support part 130 and the second connection part 120 is formed.
  • first elastic part 150 and the second elastic part 160 are compressed and deformed by the pressing force, the first connection part 110 and the second connection part 120 come into close contact with the inside of the support part 130. friction increases.
  • the first elastic part 150 and the second elastic part 160 are excessively deformed by dispersing the stress applied to the first elastic part 150 and the second elastic part 160 by the frictional force with the support part 130. Prevents damage and improves durability.
  • the overall length L of the electrically conductive contact pin 100a should be short. Accordingly, the lengths of the first and second elastic parts 150 and 160 should also be shortened. However, when the lengths of the first and second elastic parts 150 and 160 are shortened, a problem in that the contact pressure increases occurs. In order to reduce the contact pressure while reducing the length of the first and second elastic parts 150 and 160, the actual width t of the plate-shaped plates constituting the first and second elastic parts 150 and 160 should be reduced. However, when the actual width t of the plate-shaped plate constituting the first and second elastic parts 150 and 160 is reduced, the first and second elastic parts 150 and 160 are easily damaged.
  • the first and second elastic parts 150 and 160 are provided.
  • the total thickness dimension (H) of the constituting plate-shaped plate should be formed large.
  • the electrically conductive contact pin 100a reduces the actual width t of the plate-shaped plates constituting the first and second elastic parts 150 and 160 while reducing the overall thickness dimension H of the plate-shaped plates. is formed to be large. That is, the overall thickness dimension (H) is formed to be larger than the actual width (t) of the plate-shaped plate. This is possible because, as will be described later, the electrically conductive contact pins 100a are manufactured using the mold 1000 made of an anodic oxide film.
  • the actual width (t) of the planar plate constituting the electrically conductive contact pin (100a) is provided in the range of 5 ⁇ m or more and 15 ⁇ m or less, and the total thickness (H) is in the range of 70 ⁇ m or more and 200 ⁇ m or less.
  • the actual width (t) and total thickness (H) of the plate-shaped plate are provided in the range of 1:5 to 1:30.
  • the actual width of the plate-like plate is formed to be substantially 10 ⁇ m, and the total thickness dimension (H) is formed to be 100 ⁇ m, so that the effective width (t) and the total thickness dimension (H) of the plate-like plate are formed to be 1:10. can be made in proportion.
  • first and second elastic parts 150 and 160 have a structure formed by bending a plate-shaped plate, compared to an elastic part formed by winding a wire having a certain diameter in a certain direction, the first and second elastic parts 150 and 160 current flow through it can be performed more smoothly.
  • the overall thickness H and the overall length L of the electrically conductive contact pin 100a range from 1:3 to 1:9. is provided in the range of Preferably, the overall length L of the electrically conductive contact pin 100a may be provided in a range of 300 ⁇ m or more and less than 2 mm, and more preferably may be provided in a range of 450 ⁇ m or more and 600 ⁇ m or less. As such, it is possible to shorten the overall length L of the electrically conductive contact pin 100a, making it easy to respond to high-frequency characteristics, and shortening the elastic recovery time of the first and second elastic parts 150 and 160. Accordingly, the test time can also be shortened.
  • planar plate constituting the electrically conductive contact pin 100a has a substantially smaller width t than the thickness H, resistance to bending in the front and rear directions is improved.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a are provided in the range of 1:1 to 1:5.
  • the overall thickness (H) of the electrically conductive contact pins (100a) is provided in the range of 70 ⁇ m or more and 200 ⁇ m or less
  • the overall width (W) of the electrically conductive contact pins (100a) is 100 ⁇ m or more and 500 ⁇ m or less.
  • the total width W of the electrically conductive contact pin 100a may be provided in a range of 150 ⁇ m or more and 400 ⁇ m or less. In this way, by shortening the overall width W of the electrically conductive contact pin 100a, it is possible to narrow the pitch.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a may be formed to have substantially the same length. Accordingly, there is no need to bond a plurality of electrically conductive contact pins 100a in the thickness direction ( ⁇ z direction) so that the overall thickness dimension H and the overall width dimension W have substantially the same length.
  • the electrically conductive contact pin (100a) acts in the front and rear directions. The resistance to the moment is increased, and as a result, the contact stability is improved.
  • the overall thickness H of the electrically conductive contact pin 100a is 70 ⁇ m or more, and the overall thickness H and the overall width W are in the range of 1:1 to 1:5. While overall durability and deformation stability of the conductive contact pin 100a are improved, contact stability with the connection terminal 410 is improved. In addition, as the total thickness H of the electrically conductive contact pin 100a is formed to be 70 ⁇ m or more, current carrying capacity can be improved.
  • the electrically conductive contact pin 100a manufactured using a conventional photoresist mold has a limitation in that it cannot increase the overall thickness (H) compared to the overall width (W).
  • H overall thickness
  • W overall width
  • the conventional electrically conductive contact pin 100a has an overall thickness H of less than 70 ⁇ m and an overall thickness H and an overall width W in the range of 1:2 to 1:10.
  • the resistance to the moment that deforms the electrically conductive contact pin 100a in the forward and backward directions by the contact pressure is weak.
  • FIG. 9A is a plan view of the mold 1000 in which the inner space 1100 is formed
  • FIG. 9B is a cross-sectional view taken along line A-A' of FIG. 9A.
  • the mold 1000 may be made of an anodic oxide film, photoresist, silicon wafer, or a material similar thereto. However, preferably, the mold 1000 may be made of an anodic oxide film material.
  • the anodic oxide film means a film formed by anodic oxidation of a base metal
  • the pore means a hole formed in the process of forming an anodic oxide film by anodic oxidation of a metal.
  • the base metal is aluminum (Al) or an aluminum alloy
  • Al 2 O 3 aluminum oxide
  • the base metal is not limited thereto, and includes Ta, Nb, Ti, Zr, Hf, Zn, W, Sb, or an alloy thereof.
  • the anodic oxide film formed as above is a barrier layer without pores formed vertically therein. And, it is divided into a porous layer in which pores are formed. When the base material is removed from the base material on which the anodic oxide film having the barrier layer and the porous layer is formed, only the anodic oxide film made of aluminum oxide (Al 2 O 3 ) remains.
  • the anodic oxide film may be formed in a structure in which the barrier layer formed during anodic oxidation is removed to pass through the upper and lower pores, or in a structure in which the barrier layer formed during anodic oxidation remains as it is and seals one end of the upper and lower parts of the pore.
  • the anodic oxide film has a thermal expansion coefficient of 2 to 3 ppm/°C. Due to this, when exposed to a high temperature environment, thermal deformation due to temperature is small. Accordingly, the electrically conductive contact pins 100a can be manufactured precisely without thermal deformation even in a high-temperature environment.
  • the electrically conductive contact pin 100a is manufactured using the mold 1000 made of an anodic oxide film instead of the photoresist mold, the precision of the shape, which was limited to implement with the photoresist mold, It becomes possible to exert the effect of realizing a fine shape.
  • an electrically conductive contact pin having a thickness of 40 ⁇ m can be manufactured, but in the case of using the mold 1000 made of anodized film, an electrically conductive contact pin having a thickness of 100 ⁇ m or more to 200 ⁇ m or less ( 100a) can be produced.
  • a seed layer 1200 is provided on the lower surface of the mold 1000 .
  • the seed layer 1200 may be provided on the lower surface of the mold 1000 before forming the inner space 1100 in the mold 1000 .
  • a support substrate (not shown) is formed under the mold 1000 to improve handling of the mold 1000 .
  • the seed layer 1200 is formed on the support substrate and the mold 1000 in which the inner space 1100 is formed may be used by being coupled to the support substrate.
  • the seed layer 1200 may be formed of a copper (Cu) material and may be formed by a deposition method.
  • the inner space 1100 may be formed by wet etching the mold 1000 made of an anodic oxide film. To this end, a photoresist is provided on the mold 1000 and patterned, and then the anodic oxide layer in the patterned open area reacts with the etching solution to form the inner space 1100 .
  • FIG. 9C is a plan view showing that the internal space 1100 is subjected to an electroplating process
  • FIG. 9D is a cross-sectional view A-A' of FIG. 9C.
  • the metal layer is formed while growing in the thickness direction ( ⁇ z direction) of the mold 1000, the shape of each cross section in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a is the same, and the electrically conductive contact pin 100a has the same shape.
  • a plurality of metal layers are stacked in the thickness direction ( ⁇ z direction) of the fin 100a.
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium or any of these.
  • the second metal layer 102 is a metal having relatively higher electrical conductivity than the first metal layer 101 and includes copper (Cu), silver (Ag), gold (Au), or an alloy thereof.
  • the first metal layer 101 is provided on the front and rear surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pins 100a are formed in the order of the first metal layer 101, the second metal layer 102, and the first metal layer 101 in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a. It is provided by being alternately stacked, and the number of layers to be stacked may consist of three or more layers.
  • the first metal layer 101 and the second metal layer 102 may be made more dense by raising the temperature to a high temperature and pressing the metal layer on which the plating process is completed by applying pressure.
  • a photoresist material is used as a mold, a process of raising the temperature to a high temperature and applying pressure cannot be performed because the photoresist exists around the metal layer after the plating process is completed.
  • the mold 1000 made of an anodic oxide film is provided around the metal layer on which the plating process is completed, deformation is minimized due to the low thermal expansion coefficient of the anodic oxide film even when the temperature is raised to a high temperature. It is possible to densify the first metal layer 101 and the second metal layer 102 . Therefore, it becomes possible to obtain a higher density first metal layer 101 and second metal layer 102 compared to a technique using a photoresist as a mold.
  • a process of removing the mold 1000 and the seed layer 1200 is performed.
  • the mold 1000 is made of an anodic oxide film material
  • the mold 1000 is removed using a solution that selectively reacts to the anodic oxide film material.
  • the seed layer 1200 is made of copper (Cu)
  • the seed layer 1200 is removed using a solution that selectively reacts with copper (Cu).
  • an electrically conductive contact pin 100a includes a plurality of micro trenches 88 on its side surface.
  • the fine trench 88 is formed to elongate from the side of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a means a direction in which metal fillers grow during electroplating.
  • the fine trench 88 has a depth of 20 nm or more and 1 ⁇ m or less, and a width of 20 nm or more and 1 ⁇ m or less.
  • the width and depth of the fine trench 88 have a value less than or equal to the diameter of the pore hole of the anodic oxide film mold 1000.
  • the anodic oxide film mold 1000 includes numerous pores, and at least a portion of the anodic oxide film mold 1000 is etched to form an inner space 1100, and a metal filler is formed into the inner space 1100 by electroplating. , The side surface of the electrically conductive contact pin 100a is provided with a fine trench 88 formed while contacting the pore hole of the anodic oxide film mold 1000 .
  • the fine trench 88 as described above has an effect of increasing the surface area on the side surface of the electrically conductive contact pin 100a.
  • the heat generated in the electrically conductive contact pin 100a can be quickly dissipated, thereby suppressing the temperature rise of the electrically conductive contact pin 100a. You can do it.
  • the configuration of the micro trench 88 formed on the side surface of the electrically conductive contact pin 100a it is possible to improve torsional resistance when the electrically conductive contact pin 100a is deformed.
  • FIG. 11 is a perspective view of an electrically conductive contact pin 100b according to a second preferred embodiment of the present invention.
  • the electrically conductive contact pin 100b according to the second preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100b includes a connection portion 510 formed in the hollow portion 115 and connected to the side portions 114 .
  • a plurality of connection units 510 may be provided, and each connection unit 510 may be provided side by side.
  • the hollow part 115 is divided into a plurality of parts by the connecting part 510 to form a divided hollow part.
  • the connecting portion 510 is formed between the divided hollows to separate the divided hollows.
  • connection portion 510 prevents the contact portion 112 from being excessively deformed when the contact portion 112 is deformed in contact with the connection terminal 410 of the test object 400 .
  • the connection portion 510 Through the configuration of the connecting portion 510, it is possible to make the actual width of the contact portion 112 smaller, so that the contact portion 112 is more easily deformed when the connection terminal 410 presses and contacts. Through this, damage to the connection terminal 410 can be minimized.
  • FIG. 12 is a perspective view of an electrically conductive contact pin 100c according to a third preferred embodiment of the present invention.
  • the electrically conductive contact pin 100c according to the third preferred embodiment of the present invention differs from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations same.
  • the electrically conductive contact pin 100c includes a deformation resistance portion 520 formed in the hollow portion 115 to prevent excessive deformation of the contact portion 112 .
  • the deformation resistance part 520 has one end and the other end connected to the base part 111 and a middle part having a convex shape toward the contact part 112 .
  • the middle portion of the deformation resistance unit 520 is provided in a form spaced apart from the contact unit 112 .
  • the deformation resistance unit 520 prevents the contact unit 112 from being excessively deformed when the contact unit 112 is deformed in contact with the connection terminal 410 of the test object 400 .
  • the middle portion of the contact portion 112 is bent downward and deformed.
  • the middle portion of the contact portion 112 is in contact with the deformation resisting portion 520 to prevent excessive deformation of the contact portion 112 .
  • the deformation resisting portion 520 it is possible to make the actual width of the contact portion 112 smaller, so that the contact portion 112 is more easily deformed when the connection terminal 410 is press-contacted. Through this, damage to the connection terminal 410 can be minimized.
  • FIG. 13 is a perspective view of an electrically conductive contact pin 100d according to a fourth preferred embodiment of the present invention.
  • the electrically conductive contact pin 100d according to the fourth preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100d according to the fourth embodiment is provided on the top of the contact portion 112 and has an upper row groove portion in which a groove extending along the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100d is formed ( 530).
  • the upper row groove portion 530 is provided in a form in which peaks 531 and valleys 532 are repeated in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100d.
  • the top of the mountain 531 is provided in the form of a flat surface.
  • connection terminal 410 Since an extra space is formed between the adjacent peaks 531 , the middle portion of the contact portion 112 may be more easily bent downward. Through this, damage to the connection terminal 410 can be minimized.
  • the upper surface of the contact portion 112 is provided with a plurality of mountains 531 , multi-contact is possible upon contact with the connection terminal 410 .
  • FIG. 14 is a perspective view of an electrically conductive contact pin 100e according to a fifth preferred embodiment of the present invention.
  • the electrically conductive contact pin 100e according to the fifth preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100e according to the fifth embodiment is provided below the contact portion 112 and has a lower row groove portion in which a groove extending along the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100e is formed ( 540).
  • the lower row groove portion 540 may be provided in a form in which peaks 541 and valleys 542 are repeated in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100e.
  • the top of the mountain 541 is provided in the form of a flat surface.
  • connection terminal 410 Since an extra space is formed between the adjacent peaks 541 , the middle portion of the contact portion 112 may be more easily bent downward. Through this, damage to the connection terminal 410 can be minimized.
  • the upper surface of the contact portion 112 is formed as a smooth surface, damage caused by scratching the surface of the connection terminal 410 can be minimized.
  • FIG. 15 is a perspective view of an electrically conductive contact pin 100f according to a sixth preferred embodiment of the present invention.
  • the electrically conductive contact pin 100f according to the sixth preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100f is provided on the top of the contact portion 112 and has an upper row groove portion in which a groove extending along the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100f is formed ( 530) and a lower row groove portion 540 provided under the contact portion 112 and having a groove extending along the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100f.
  • the groove constituting the upper row groove portion 530 and the groove constituting the lower row groove portion 540 are provided in a zigzag shape.
  • the upper row groove portion 530 is provided in a form in which peaks 531 and valleys 532 are repeated in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100f.
  • the lower row groove portion 540 is provided in a form in which peaks 541 and valleys 542 are repeated in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100f.
  • the tops of the mountains 531 and 541 are provided in the form of flat surfaces.
  • the valley 542 of the lower row groove part 540 is located at a position corresponding to the crest 531 of the upper row groove part 530, and the lower row groove part ( Mount 541 of 540 is located.
  • the peaks 531 of the upper row grooves 530 and the peaks 541 of the lower row grooves 540 are arranged in a zigzag shape, and the valleys 532 of the upper row grooves 530 and the peaks 541 of the lower row grooves 540 The valleys 542 are arranged in a zigzag shape.
  • FIG. 16 is a perspective view of an electrically conductive contact pin 100g according to a seventh preferred embodiment of the present invention.
  • the electrically conductive contact pin 100g according to the seventh preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100g according to the seventh embodiment includes an upwardly rounded portion 550 provided under the contact portion 112 .
  • the upward round portion 550 is formed in an upwardly convex shape. Through the configuration of the upwardly rounded portion 550, the actual width at the middle portion of the contact portion 112 is smaller than the actual width at both ends of the contact portion 112. Through this, deformation in which the middle portion of the contact portion 112 is bent downward can be more easily performed. As a result, damage to the connection terminal 410 during inspection can be minimized.
  • FIG. 17 is a perspective view of an electrically conductive contact pin 100h according to an eighth preferred embodiment of the present invention.
  • the electrically conductive contact pin 100h according to the eighth preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100h includes a downwardly rounded portion 560 provided on the upper portion of the contact portion 112 .
  • the downward round portion 550 is formed in a downward concave shape.
  • the actual width at the middle portion of the contact portion 112 is smaller than the actual width at both ends of the contact portion 112. Through this, deformation in which the middle portion of the contact portion 112 is bent downward can be more easily performed. As a result, damage to the connection terminal 410 during inspection can be minimized.
  • connection reliability between the contact portion 112 and the connection terminal 410 is improved.
  • FIG. 18 is a perspective view of an electrically conductive contact pin 100i according to a ninth preferred embodiment of the present invention.
  • the electrically conductive contact pin 100i according to the ninth preferred embodiment of the present invention is different from the electrically conductive contact pin 100a according to the first embodiment only in the configuration of the hollow part 115, and the other configurations are same.
  • the electrically conductive contact pin 100i is formed by dividing the contact portion 112 by the cutout portion 570 . Because the opposite ends of the two contact portions 112 can be more easily deformed through the configuration of the cutout 570 , damage to the connection terminal 410 can be minimized through this.
  • the cutout 570 may be provided on the side portion 114 instead of the contact portion 112 .
  • the contact portion 112 can perform a buffering action.
  • the electrically conductive contact pins 100a to 100i are provided in the inspection device 10 and are used to electrically and physically contact the inspection target 400 to transmit electrical signals.
  • the test device 10 includes electrically conductive contact pins 100a to 100i installed in the installation member 200 by being inserted into the through hole 210 of the installation member 200 having holes.
  • the inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the electrically conductive contact pins 100a to 100i may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, or socket pins provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package.
  • the test devices 10 in which the electrically conductive contact pins 100a to 100i according to a preferred embodiment of the present invention can be used are not limited thereto, and any test device for checking whether an object to be tested is defective by applying electricity thereto included
  • the inspection target 400 of the inspection device 10 may include a semiconductor device, a memory chip, a microprocessor chip, a logic chip, a light emitting device, or a combination thereof.
  • inspection objects include logic LSIs (such as ASICs, FPGAs, and ASSPs), microprocessors (such as CPUs and GPUs), memories (DRAM, HMC (Hybrid Memory Cube), MRAM (Magnetic RAM), PCM (Phase- Change Memory), ReRAM (Resistive RAM), FeRAM (ferroelectric RAM) and flash memory (NAND flash)), semiconductor light emitting devices (including LED, mini LED, micro LED, etc.), power devices, analog ICs (DC-AC converters and such as insulated gate bipolar transistors (IGBTs), MEMS (such as acceleration sensors, pressure sensors, vibrators, and giro sensors), wire-free devices (such as GPS, FM, NFC, RFEM, MMIC, and WLAN), discrete devices, Includes BSI, CIS, Camera Module, CMOS

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)

Abstract

La présente invention concerne : une broche de contact électroconductrice qui améliore la fiabilité d'inspection pour un objet d'inspection ; et un dispositif d'inspection la comprenant. De plus, la présente invention concerne : une broche de contact électroconductrice pour empêcher un objet de connexion d'être endommagé lorsqu'elle est en contact avec l'objet de connexion et comprimée. L'invention concerne également un dispositif d'inspection la comprenant.
PCT/KR2023/002214 2022-02-23 2023-02-15 Broche de contact électroconductrice et dispositif d'inspection la comprenant WO2023163447A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220023360A KR20230126339A (ko) 2022-02-23 2022-02-23 전기 전도성 접촉핀 및 이를 구비하는 검사장치
KR10-2022-0023360 2022-02-23

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WO2023163447A1 true WO2023163447A1 (fr) 2023-08-31

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KR (1) KR20230126339A (fr)
WO (1) WO2023163447A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791895B1 (ko) * 2006-05-26 2008-01-07 (주)엠투엔 프로브 카드의 프로브
JP2010532908A (ja) * 2008-01-02 2010-10-14 中村 敏幸 一体型で構成されるプローブピン及びその製造方法
KR20170001805A (ko) * 2015-06-25 2017-01-05 (주) 네스텍코리아 비지에이 컨택용 프로브 핀
KR20180095315A (ko) * 2017-02-17 2018-08-27 (주) 루켄테크놀러지스 프로브 핀 및 이의 제조 방법
KR20190093688A (ko) * 2016-06-17 2019-08-09 오므론 가부시키가이샤 프로브 핀

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100659944B1 (ko) 2005-12-23 2006-12-21 리노공업주식회사 플런저 및 이를 장착한 검사용 탐침장치
KR100952712B1 (ko) 2007-12-27 2010-04-13 주식회사 아이에스시테크놀러지 판형 도전입자를 포함한 실리콘 콘택터

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791895B1 (ko) * 2006-05-26 2008-01-07 (주)엠투엔 프로브 카드의 프로브
JP2010532908A (ja) * 2008-01-02 2010-10-14 中村 敏幸 一体型で構成されるプローブピン及びその製造方法
KR20170001805A (ko) * 2015-06-25 2017-01-05 (주) 네스텍코리아 비지에이 컨택용 프로브 핀
KR20190093688A (ko) * 2016-06-17 2019-08-09 오므론 가부시키가이샤 프로브 핀
KR20180095315A (ko) * 2017-02-17 2018-08-27 (주) 루켄테크놀러지스 프로브 핀 및 이의 제조 방법

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