WO2024034908A1 - Broche de contact électroconductrice et dispositif de test la comprenant - Google Patents

Broche de contact électroconductrice et dispositif de test la comprenant Download PDF

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Publication number
WO2024034908A1
WO2024034908A1 PCT/KR2023/010513 KR2023010513W WO2024034908A1 WO 2024034908 A1 WO2024034908 A1 WO 2024034908A1 KR 2023010513 W KR2023010513 W KR 2023010513W WO 2024034908 A1 WO2024034908 A1 WO 2024034908A1
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WO
WIPO (PCT)
Prior art keywords
electrically conductive
contact pin
conductive contact
connection
support
Prior art date
Application number
PCT/KR2023/010513
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English (en)
Korean (ko)
Inventor
안범모
박승호
홍창희
Original Assignee
(주)포인트엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by (주)포인트엔지니어링 filed Critical (주)포인트엔지니어링
Publication of WO2024034908A1 publication Critical patent/WO2024034908A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects

Definitions

  • the present invention relates to an electrically conductive contact pin and an inspection device having the same.
  • Testing the electrical properties of semiconductor devices involves approaching an inspection object (semiconductor wafer or semiconductor package) to an inspection device equipped with a plurality of electrically conductive contact pins and connecting the electrically conductive contact pins to corresponding external terminals (solder balls or bumps, etc.) on the inspection object. It is carried out by contact.
  • inspection objects semiconductor wafer or semiconductor package
  • inspection device equipped with a plurality of electrically conductive contact pins and connecting the electrically conductive contact pins to corresponding external terminals (solder balls or bumps, etc.) on the inspection object. It is carried out by contact.
  • testing devices include, but are not limited to, probe cards or test sockets.
  • test sockets include pogo type test sockets and rubber type test sockets.
  • the electrically conductive contact pin (hereinafter referred to as 'pogo type socket pin') used in a pogo type test socket includes a pin portion and a barrel that accommodates the pin portion.
  • the pin portion provides necessary contact pressure and absorbs shock at the contact position by installing a spring member between the plungers at both ends.
  • a gap In order for the pin portion to slide within the barrel, a gap must exist between the outer surface of the pin portion and the inner surface of the barrel.
  • these pogo-type socket pins are used by separately manufacturing the barrel and pin portion and then combining them, gap management cannot be performed precisely, such as the outer surface of the pin portion being spaced from the inner surface of the barrel more than necessary. Therefore, loss and distortion of the electrical signal occur in the process of being transmitted to the barrel via the plunger at both ends, resulting in the problem of inconsistent contact stability.
  • Patent Document 1 Republic of Korea Registration No. 10-0659944 Registered Patent Gazette
  • Patent Document 2 Republic of Korea Registration No. 10-0952712 Registered Patent Gazette
  • the present invention was made to solve the problems of the prior art described above.
  • the purpose of the present invention is to provide an electrically conductive contact pin that improves inspection reliability for inspection objects and an inspection device including the same.
  • Another object of the present invention is to provide an electrically conductive contact pin that prevents shaking when inserted into a guide housing, and an inspection device including the same.
  • the electrically conductive contact pin according to the present invention is an electrically conductive contact pin including a first connection portion and a support portion provided on the outside of the first connection portion.
  • the connection portion includes a flange portion extending in the longitudinal direction, and when an eccentric pressing force is applied to the electrically conductive contact pin in at least one of the left and right directions, the flange portion contacts the support portion and moves in at least one of the left and right directions.
  • a holding force is generated to prevent deformation of the electrically conductive contact pin in one direction, and when an eccentric pressing force is applied to the electrically conductive contact pin in at least one of the front and rear directions, the flange portion into which the electrically conductive contact pin is inserted A supporting force is generated to prevent deformation of the electrically conductive contact pin in at least one of the front and rear directions by contacting the inner wall of the guide hole of the guide housing.
  • connection part provided below the first connection part;
  • An elastic part is provided between the first and second connection parts in the longitudinal direction to connect the first and second connection parts and is elastically deformable along the longitudinal direction, wherein the flange part includes the elastic part and the support part in the width direction. It is located in between.
  • the flange portion includes an extension portion extending downward in the longitudinal direction; and a deformation prevention portion provided at an end of the extension portion and protruding outward from the extension portion, wherein when an eccentric pressing force in at least one of left and right directions is applied to the electrically conductive contact pin, the extension portion and the The deformation prevention portion is supported while contacting the upper limb support portion to generate a supporting force that prevents deformation of the electrically conductive contact pin in at least one direction among the left and right directions, and is applied to the electrically conductive contact pin in at least one direction among the front and rear directions.
  • the extension portion and the deformation prevention portion are supported while contacting the inner wall of the guide hole, thereby generating a supporting force that prevents deformation of the electrically conductive contact pin in at least one of the front and rear directions.
  • the flange portion may include a first flange portion extending downward from one side of the first connection portion; and a second flange portion extending downward from the other side of the first connection portion.
  • a second connection part including the support part corresponding to the first connection part in the longitudinal direction and extending upward in the longitudinal direction; and an elastic part provided between the first and second connection parts in the longitudinal direction to connect the first and second connection parts and elastically deformable along the longitudinal direction, wherein the flange part is formed between the elastic part and the second connection part in the width direction. It is located between the supports.
  • a cover part including a front length extension part and a rear length extension part opposite to the front length extension part, wherein the cover part positions the front length extension part in front of the elastic part and the front length extension part in the rear part of the elastic part. It is coupled to the upper part of the first connection part to position the rear longitudinal extension.
  • the outer wall of the support portion is inclined.
  • the inspection device includes a guide housing having a guide hole; and an electrically conductive contact pin including a first connection portion including a flange portion extending downward in the longitudinal direction and a support portion provided outside the first connection portion, wherein the guide hole has a width direction dimension of the first opening.
  • the width direction dimension of the second opening is different, so that the inner wall is formed to be inclined, and the outer wall of the support portion is formed to be inclined at the same angle as the incline direction of the inner wall.
  • the electrically conductive contact pin according to the present invention when an eccentric pressing force is applied in at least one direction among the front, rear, left, and right directions, a supporting force against tilting deformation due to the eccentric pressing force is generated through the flange portion, resulting in excessive tilting. Prevents damage due to deformation.
  • the outer wall of the support portion to be inclined at the same angle as the inclination angle of the inner wall of the guide hole in response to the inclined inner wall of the guide hole, the occurrence of clearance with the guide hole can be prevented, thereby improving inspection efficiency for the inspection object.
  • FIG. 1 is a perspective view of an electrically conductive contact pin and a guide housing into which the electrically conductive contact pin is inserted according to a preferred embodiment of the present invention.
  • Figure 2 is a view taken along line A-A' of Figure 1 showing the state in which the electrically conductive contact pin according to a preferred embodiment of the present invention is inserted into the guide housing.
  • 3 to 6 illustrate a state in which an eccentric pressing force is applied to an electrically conductive contact pin according to a preferred embodiment of the present invention inserted into a guide housing.
  • Figure 7 is a cross-sectional view of an electrically conductive contact pin of a second preferred embodiment of the present invention inserted into a guide housing.
  • Figure 8a is a perspective view of the cover portion according to a preferred embodiment of the present invention.
  • Figure 8b is a front view of the cover portion according to a preferred embodiment of the present invention.
  • Figure 9a is a cross-sectional view of an electrically conductive contact pin of a third preferred embodiment of the present invention inserted into a guide housing.
  • Figure 9b is a front view of the cover part coupled to the electrically conductive contact pin of Figure 9a.
  • Figure 9c is a top view of Figure 9b.
  • Figure 10 is a cross-sectional view of an electrically conductive contact pin of a fourth preferred embodiment of the present invention inserted into a guide housing.
  • Figure 11 is a cross-sectional view of an electrically conductive contact pin of a fifth preferred embodiment of the present invention inserted into a guide housing.
  • Figure 12 is a cross-sectional view of an electrically conductive contact pin of a sixth preferred embodiment of the present invention inserted into a guide housing.
  • the electrically conductive contact pin (hereinafter referred to as the 'electrically conductive contact pin 100 of the first embodiment') according to a preferred embodiment of the present invention is provided in the inspection device and makes electrical and physical contact with the inspection object to generate an electrical signal. It is used to convey.
  • the inspection device may be an inspection device used in a semiconductor manufacturing process, and for example, may be a probe card or a test socket.
  • the installation member 1 has a through hole 2 for receiving the electrically conductive contact pin 100 of the first embodiment.
  • the installation member 1 may be, as an example, a guide housing (HS) provided with a guide hole (GH).
  • the electrically conductive contact pin 100 of the first embodiment may be a probe pin provided in a probe card or a socket pin provided in a test socket.
  • a socket pin will be described as an example of the electrically conductive contact pin 100 of the first embodiment, but the electrically conductive contact pin 100 of the first embodiment is not limited thereto, and the inspection object (SP) to which electricity is applied is not limited thereto. ), any pin used to check whether it is defective is included.
  • the width direction of the electrically conductive contact pin 100 of the first embodiment described below is the ⁇ x direction shown in the drawing, and the longitudinal direction of the electrically conductive contact pin 100 of the first embodiment is the ⁇ y direction shown in the drawing,
  • the thickness direction of the electrically conductive contact pin 100 of the first embodiment is the ⁇ z direction indicated in the drawing.
  • the electrically conductive contact pin 100 of the first embodiment has an overall length dimension (L) in the longitudinal direction, and an overall width dimension (W) in the width direction ( ⁇ x direction) perpendicular to the longitudinal direction ( ⁇ y direction). It has an overall width dimension (W) in the width direction ( ⁇ x direction) perpendicular to the longitudinal direction ( ⁇ y direction).
  • Figure 1 is a perspective view of an electrically conductive contact pin (hereinafter referred to as 'electrically conductive contact pin 100 of the first embodiment') according to a first preferred embodiment of the present invention
  • Figure 2 is a perspective view of an electrically conductive contact pin 100 of the first embodiment of the present invention.
  • This diagram shows a plane cut along line A-A' of FIG. 1 in which the electrically conductive contact pin 100 of the first embodiment is inserted.
  • the electrically conductive contact pin 100 of the first embodiment includes a first connection portion (140) extending downward (-y direction) in the longitudinal direction ( ⁇ y direction). 110), a second connection part 120 provided below the first connection part 110, a support part 130 provided on the outside of the first connection part 110, and a first connection part 130 in the longitudinal direction ( ⁇ y direction). , It is provided between the two connection parts 110 and 120, connects the first and second connection parts 110 and 120, and includes an elastic part S that is elastically deformable along the longitudinal direction ( ⁇ y direction).
  • the first connection part 110, the second connection part 120, the support part 130, and the elastic part (S) are provided as one piece.
  • the first connection part 110, the second connection part 120, the support part 130, and the elastic part S are manufactured all at once using a plating process.
  • the electrically conductive contact pin 100 of the first embodiment is formed by filling the inner space with a metal material through electroplating using an anodic oxide mold having an inner space. Accordingly, the first connection part 110, the second connection part 120, the support part 130, the elastic part S, and the flange part 140 are manufactured as an integrated piece connected to each other.
  • the electrically conductive contact pin 100 of the first embodiment includes the first connection portion 110 and the second connection portion 120. ), the support portion 130, and the elastic portion (S) are manufactured all at once using a plating process, so that they are provided in one piece.
  • the overall thickness dimension (H) can be in the range of 80 ⁇ m or more and 160 ⁇ m or less.
  • the highly rigid anodic oxide film remains as a wall, so it can be manufactured to have a high aspect ratio line width (t).
  • the anodic oxide film mold used to manufacture the electrically conductive contact pin 100 of the first embodiment forms an internal space by etching an anodized film that is already in a solid state. Therefore, precise patterning is possible and a mold can be formed without layers while having a height of 80 ⁇ m or more and 160 ⁇ m or less.
  • the electrically conductive contact pin 100 of the first embodiment has a line width (t), and an overall thickness dimension (H) and an aspect ratio (H:t) to the line width (t) based on the smallest line width among the line widths (t). has a range of 13:1 or more and 80:1 or less.
  • the smallest line width (t) among the line widths (t) may be 2 ⁇ m or more and 6 ⁇ m or less.
  • the electrically conductive contact pin 100 of the first embodiment is formed so that the line width (t) of the plate-shaped plate constituting the electrically conductive contact pin 100 is small while the overall thickness dimension (H) of the plate-shaped plate is large. That is, the overall thickness dimension (H) is formed to be large compared to the line width (t) of the plate-like plate.
  • the line width (t) of the plate-shaped plate is in the range of 2 ⁇ m to 15 ⁇ m, and the total thickness dimension (H) is provided in the range of 80 ⁇ m to 160 ⁇ m, and the line width (t) of the plate-shaped plate is The overall thickness dimension (H) is provided in the range of 1:13 to 1:80.
  • the line width (t) of the plate-shaped plate is formed to be substantially 4 ⁇ m, and the overall thickness dimension (H) is formed to be 100 ⁇ m, so that the line width (t) and overall thickness dimension (H) of the plate-shaped plate are 1:25. It can be formed at a ratio of .
  • each cross section in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100 of the first embodiment is the same.
  • the same shape on the x-y plane is formed by extending in the thickness direction ( ⁇ z direction).
  • the electrically conductive contact pin 100 of the first embodiment is provided with a plurality of metal layers stacked in the thickness direction ( ⁇ z direction).
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102.
  • the first metal layer 101 is a metal with relatively high rigidity or wear resistance compared to the second metal layer 102, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel ( Ni), manganese (Mn), tungsten (W), phosphorus (Ph) or their alloys, or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiPh) alloy, nickel-manganese It may be formed of a metal selected from (NiMn), nickel-cobalt (NiCo), or nickel-tungsten (NiW) alloy.
  • the second metal layer 102 is a metal with relatively high electrical conductivity compared to the first metal layer 101, and is preferably formed of a metal selected from copper (Cu), silver (Ag), gold (Au), or alloys thereof. It can be. However, it is not limited to this.
  • the first metal layer 101 is provided on the lower and upper surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101.
  • the electrically conductive contact pin 100a is provided by alternately stacking the first metal layer 101, the second metal layer 102, and the first metal layer 101 in the thickness direction ( ⁇ z direction),
  • the number of stacked layers may be three or more.
  • the first connection part 110 includes a contact part 111 in contact with the inspection object SP and a contact cavity 112 formed in the contact part 111.
  • the contact portion 111 is a portion that is in contact with the connection terminal (SD) of the inspection object (SP).
  • the contact portion 111 is formed to extend in the width direction ( ⁇ x direction).
  • the lower surface of the contact portion 111 in the longitudinal direction ( ⁇ y direction) is connected to the elastic portion (S).
  • the contact portion 111 includes a contact cavity 112 that penetrates one surface and the other surface of the contact portion 111 in the thickness direction ( ⁇ z direction).
  • the contact cavity 112 is provided in the central portion of the contact portion 111.
  • the upper surface of the contact portion 111 becomes a portion that contacts the connection terminal of the inspection object.
  • the contact cavity 112 is formed as an empty space whose left and right sides are curved relative to the width direction ( ⁇ x direction) so that the upper surface of the contact portion 111 can be more easily deformed.
  • the first connection part 110 is connected to the elastic part S and can elastically move vertically ( ⁇ y direction) based on the longitudinal direction ( ⁇ y direction) by contact pressure.
  • the connection terminal of the inspection object is in contact with the upper surface of the first connection part 110 and gradually compresses and deforms the elastic part S connected to the first connection part 110 side (-y direction). ) Go to
  • the flange portion 140 is provided to extend downward (-y direction) from the bottom surface of the first connection portion 110 in the longitudinal direction ( ⁇ y direction).
  • the flange portion 140 includes a first flange portion 141 and a first connection portion 110 extending downward in the longitudinal direction ( ⁇ y direction) from one side of the first connection portion 110 based on the width direction ( ⁇ x direction). It includes a second flange portion 142 extending downward in the longitudinal direction ( ⁇ y direction) on the other side.
  • first flange portion 141 extends from the bottom surface of the contact portion 111 on one side (-x direction) in the width direction ( ⁇ x direction) of the contact portion 111
  • second flange portion 142 extends from the bottom surface of the contact portion 111 in the width direction ( ⁇ x direction) and on the other side (+x direction).
  • the flange portion 140 has an extension portion 143 through a portion extending downward in the longitudinal direction ( ⁇ y direction) from the bottom surface of the contact portion 111, and a deformation prevention portion 144 at an end of the extension portion 143. ) is provided.
  • the deformation prevention portion 144 has a convex outer surface and protrudes outward from the extension portion 143 in the width direction ( ⁇ x direction).
  • the deformation prevention portion 144 is provided at an end composed of the free end of the flange portion 140.
  • the first flange portion 141 includes a first extension portion 143a and a first deformation prevention portion 144a
  • the second flange portion 142 includes a second extension portion 143b and a second deformation prevention portion ( 144b).
  • the flange portion 140 is located between the elastic portion S and the support portion 130 in the width direction ( ⁇ x direction).
  • the first flange portion 141 is located on one side of the elastic portion (S) in the width direction ( ⁇ x direction) and is located inside the support portion 130
  • the second flange portion 142 is located on the other side of the elastic portion (S) in the width direction ( ⁇ x direction) and is located inside the support portion (130). Accordingly, at least a portion of the elastic portion S is located between the first and second flange portions 141 and 142 in the width direction ( ⁇ x direction), and the support portion 130 is located outside it.
  • the first and second flange parts 141 and 142 are provided to cover at least a portion of the elastic part S from the outside.
  • the contact portion 111 and the flange portion 140 behave as one. .
  • the flange portion 140 and the support portion 130 are spaced apart from each other.
  • the flange portion 140 is positioned with a predetermined length inserted so that the extension portion 143 and the deformation prevention portion 144 are located inside the support portion 130 based on the longitudinal direction ( ⁇ y direction).
  • the insertion length IL shown in FIG. 2 is the length at which at least a portion of the flange portion 140 is inserted into the support portion 130. Accordingly, at least a part (specifically, the upper side) of the extension part 143 is located outside the support part 130 in the longitudinal direction ( ⁇ y direction), and the remaining part (specifically, the lower side) is located outside the support part 130 in the longitudinal direction ( ⁇ y direction). direction) and is located inside the support portion 130.
  • the deformation prevention part 144 is provided at the end of the extension part 143 and is located inside the support part 130 in the longitudinal direction ( ⁇ y direction).
  • the deformation prevention part 144 is located corresponding to the middle side of the support part 130, and the lower end of the extension part 143 on the upper part of the deformation prevention part 144 is located on the upper side of the support part 130. It is located in correspondence with .
  • the support portion 130 faces the left and right inner walls (LW, RW, see FIG. 1) of the guide housing HS and extends in the longitudinal direction ( ⁇ y direction).
  • the support portion 130 is provided on the outside of the flange portion 140 of the first connection portion 110 in the width direction ( ⁇ x direction). When the elastic portion S is not compressed, the inner surface of the support portion 130 and the outer surface of the flange portion 140 remain spaced apart from each other.
  • the support part 130 includes a first support part 131 located on one side (-x direction) of the first connection part 110 in the width direction ( ⁇ x direction), and a first support part 131 located on one side (-x direction) of the first connection part 110 in the width direction ( ⁇ x direction). It includes a second support portion 132 located on the other side (+x direction).
  • the first support portion 131 is opposite to the first flange portion 141 in the width direction ( ⁇ x direction) and is provided on the outside of the first flange portion 141, and the second support portion 132 is a second flange portion. It is provided on the outside of the second flange portion 142, opposing the branch 142.
  • the first support portion 131 has a concave portion (HM) corresponding to the first deformation prevention portion 144a in the middle portion of the inner side
  • the second support portion 132 also has a second deformation prevention portion ( It is provided with a concave portion (HM) corresponding to 144b).
  • the support portion 130 and the flange portion 140 remain spaced apart from each other without the pressing force of the connection terminal SD being applied through the concave portion HM provided on the inner surface of the support portion 130.
  • the support portion 130 is provided with a protruding portion (PJ) extending a predetermined length inward in the width direction ( ⁇ x direction) on an upper portion of the concave portion (HM).
  • the concave portion HM is provided in the form of a groove.
  • a groove-shaped concave portion ( The bottom surface of the HM) and the deformation prevention portion 144 are spaced apart from each other. In other words, when the elastic portion S is not compressed, the deformation prevention portion 144 is received without contacting the bottom surface of the groove-shaped concave portion HM.
  • connection terminal (SD) is located in the upper center of the electrically conductive contact pin 100 of the first embodiment, so that a uniform pressing force (hereinafter referred to as uniform pressing force) is not eccentric in the positional relationship with the electrically conductive contact pin 100. ), each of the first and second deformation prevention parts 144a and 144b contacts the inner surface of the support part 130 at the corresponding position. Accordingly, a current path leading to the first connection part 110 and the support part 130 is formed.
  • the support portion 130 is provided with a support extension portion 131 at a lower portion of the concave portion HM corresponding to the deformation prevention portion 144.
  • the support extension part 131 is provided in the middle part of the support part 130.
  • the support extension portion 131 is located within the first support extension portion 131a and the second support portion 132 extending in the width direction ( ⁇ x direction) and inward (+x direction) from the inner surface of the first support portion 131. It includes a second support extension portion 131b extending from the side in the width direction ( ⁇ x direction) and inward (-x direction).
  • the elastic portion (S) includes a plurality of straight portions (L) and a curved portion (CV) connecting two adjacent straight portions (L).
  • the first support extension portion 131a is connected to a curved portion CV connecting two adjacent straight portions L on one side (-x direction) in the width direction ( ⁇ x direction), and the second support extension One end of the portion 131b is connected to a curved portion CV that connects two adjacent straight portions L in the width direction ( ⁇ x direction) and on the other side (+x direction).
  • the support portion 130 and the elastic portion (S) are formed in an integrated form.
  • the first and second support extensions 131a and 131b are provided below the concave portion HM in the longitudinal direction ( ⁇ y direction) and are located at the same height in the longitudinal direction ( ⁇ y direction).
  • the electrically conductive contact pin 100 of the first embodiment connects the first and second support extension portions 131a and 131b, respectively, to the curved portion CV located toward the middle portion in the longitudinal direction ( ⁇ y direction).
  • the first connection portion 110 moves downward (-y direction) in the longitudinal direction ( ⁇ y direction) due to the pressing force.
  • the first and second support extension parts 131a and 131b may provide a function of limiting further lowering of the first and second deformation prevention parts 144a and 144b through the upper surface.
  • the support part 130 has a first locking part 161 at one end (-y direction) in the longitudinal direction ( ⁇ y direction).
  • the first locking portion 161 is provided at one end of the support portion 130 close to the second connecting portion 120 side.
  • the first locking portion 161 is provided at the lower end of the support portion 130 and protrudes outward in the width direction ( ⁇ x direction).
  • the support portion 130 is provided with a second locking portion 162 at the other end (+y direction) in the longitudinal direction ( ⁇ y direction).
  • the second locking portion 162 has an inclined portion 162a and a protruding protrusion 162b on its outer surface.
  • the electrically conductive contact pin 100 of the first embodiment When the electrically conductive contact pin 100 of the first embodiment is inserted into the guide hole GH, the upper end of the support portion 130 including the second locking portion 162 is compressed and deformed inward in the width direction ( ⁇ x direction). and is inserted into the first opening OP1 (lower opening) of the guide hole GH. Then, the electrically conductive contact pin 100 of the first embodiment is pressed from the bottom (-y direction) to the top (+y direction) based on the longitudinal direction ( ⁇ y direction) and forced into the guide hole GH. It is put in.
  • the second locking portion 162 passes through the second opening OP2 (upper opening) of the guide hole GH, the upper end of the support portion 130 is formed in the width direction ( ⁇ x) due to the elastic restoring force of the support portion 130. Direction) It is restored by spreading outward. At this time, the upper surface of the first locking portion 161 is supported by contacting the lower surface of the guide housing HS existing around the first opening OP1 (lower
  • the support part 130 also has a concave portion on the inner surface of the lower end in the longitudinal direction ( ⁇ y direction) having the first locking part 161.
  • the concave portion (HM) corresponding to the first and second deformation prevention portions 144a and 144b is provided close to the upper end side including the second locking portion 162.
  • the support portion 130 has a concave portion on the inner surface of the lower end, and the concave portion on the lower portion corresponds to the outer surface of the end consisting of the free end of the second connection portion 120.
  • the second connection portion 120 is in contact with the pad of the circuit board.
  • the second connection portion 120 includes a connection body portion 121 and a connection extension portion extending from both sides in the width direction ( ⁇ x direction) of the connection body portion 121 to the top (+y direction) in the longitudinal direction ( ⁇ y direction). It includes a connection cavity 123 formed in the central portion of 122.
  • the second connection part 120 has the bottom surface of the connection body part 121 convex to have a predetermined curvature. The second connection part 120 is pressed in contact with the pad of the circuit board through the bottom surface of the connection body part 121.
  • the second connection part 120 is provided with a connection extension part 122 extending upward (+y direction) in the longitudinal direction ( ⁇ y direction) at both ends of the connection body part 121 in the width direction ( ⁇ x direction).
  • the connection extension portion 122 is a first connection extension extending upward (+y direction) in the longitudinal direction ( ⁇ y direction) to one end (-x direction) in the width direction ( ⁇ x direction) of the connection body portion 121.
  • a second connection extension portion 122b extending upward (+y direction) in the longitudinal direction ( ⁇ y direction) to the other end (+x direction) in the width direction (+x direction) of the portion 122a and the connection body portion 121. ) includes.
  • connection extension part 122 protrudes outward in the width direction ( ⁇ x direction) than the outer surface of the connection body part 121.
  • the first and second connection extension parts 122a and 122b are inserted for a predetermined length in the longitudinal direction ( ⁇ y direction) so as to be located inside the support part 130.
  • the first and second connection extension parts 122a and 122b are located in the width direction ( ⁇ x direction) to correspond to the concave portion at the lower end of the support part 130.
  • the first and second connection extension portions (122a, 122b) The concave portions on the lower end of the support portion 130 are spaced apart from each other.
  • the elastic part S connected to the second connection part 120 is compressed and deformed in the longitudinal direction ( ⁇ y direction). Accordingly, the first and second connection extension parts 122a and 122b come into contact with the inner surface of the support part 130. As a result, a current path leading to the second connection part 120 and the support part 130 is formed.
  • the elastic part S is provided between the first connection part 110 and the second connection part 120 in the longitudinal direction ( ⁇ y direction) and is provided inside the first and second connection parts 110 and 120.
  • One end of the elastic part (S) is connected to the first connection part 110, and the other end is connected to the second connection part 120, so that the first and second connection parts 110 and 120 are integrally connected through the elastic part (S). .
  • the elastic portion S has a shape in which a plate-shaped plate having an actual width t is repeatedly bent into an S shape, and the actual width t of the plate-shaped plate is constant throughout.
  • the elastic portion (S) includes a plurality of straight portions (L) and a curved portion (CV) connecting vertically adjacent straight portions (L).
  • the elastic portion (S) is formed by alternately contacting a plurality of straight portions (L) and a plurality of curved portions (CV).
  • the straight portion (L) connects adjacent curved portions (CV) to the left and right in the width direction ( ⁇ x direction).
  • the curved portion (CV) connects the straight portions (L) that are adjacent above and below.
  • the curved portion CV is provided in an arc shape.
  • the elastic portion (S) has a straight portion (L) parallel to the width direction ( ⁇ x direction) to make it easier to deform the curved portion (CV) according to the pressing force caused by the connection terminal (SD).
  • the electrically conductive contact pin 100 of the first embodiment is pressed by the connection terminal SD, and the elastic portion S is elastically deformed.
  • the first connection part 110 descends in the longitudinal direction ( ⁇ y direction) as the elastic part S is elastically deformed, and the flange part 140 It descends downward (-y direction) in the space between the support portion 130 and the elastic portion (S). More specifically, the first flange portion 141 descends in the space between the first support portion 131 and the elastic portion (S), and the second flange portion 142 descends in the space between the second support portion 132 and the elastic portion (S). ) descends in the space between. As the flange portion 140 descends in the space between the support portion 130 and the elastic portion (S), the deformation prevention portion 144 contacts the concave portion (HM) of the support portion 130. Accordingly, a current path leading to the first connection part 110 and the support part 130 is formed.
  • the flange portion 140 rises upward (+y direction) in the space between the support portion 130 and the elastic portion (S). More specifically, the first flange part 141 rises in the space between the first support part 131 and the elastic part (S), and the second flange part 142 rises in the space between the second support part 132 and the elastic part (S). ) rises in the space between. As the flange portion 140 rises in the space between the support portion 130 and the elastic portion (S), the concave portion (HM) of the support portion 130 and the deformation prevention portion 144 are spaced apart.
  • an eccentric pressing force may be applied to the electrically conductive contact pin 100 of the first embodiment by the connection terminal (SD) for reasons such as assembly errors and manufacturing tolerances.
  • the electrically conductive contact pin 100 of the first embodiment is applied with an eccentric pressing force in at least one of the left and right directions based on the width direction ( ⁇ x direction), or in the forward and backward directions based on the thickness direction ( ⁇ z direction).
  • An eccentric pressing force may be applied in at least one direction.
  • Figure 3 is a front view showing a state in which an eccentric pressing force is applied to the electrically conductive contact pin 100 of the first embodiment in the left and right directions based on the width direction ( ⁇ x direction), and
  • Figure 4 is a plan view of Figure 3.
  • a plurality of electrically conductive contact pins 100 of the first embodiment are inserted into the guide hole GH of the guide housing HS.
  • connection terminal (SD) is attached to the upper width direction ( ⁇ x direction) outer portion (specifically, the width direction ( ⁇ It may be contacted in the x-direction) at least one of the left and right sides.
  • the electrically conductive contact pin 100 of the first embodiment located on the left side in the width direction ( ⁇ x direction) has a connection terminal (SD) in contact with the upper left outer portion of the first connection portion 110.
  • An eccentric pressing force is applied in the left direction.
  • the electrically conductive contact pin 100 of the first embodiment, located on the right side in the width direction ( ⁇ x direction) is contacted with the connection terminal (SD) on the outer right side of the upper surface of the first connection portion 110 in the right direction. An eccentric pressing force is applied.
  • connection terminal SD may be in contact with an outer portion of the first connection portion 110 in the thickness direction ( ⁇ z direction) (specifically, at least one of the front side and the rear side in the thickness direction ( ⁇ z direction)).
  • FIG. 5 is a plan view showing a state in which an eccentric pressing force is applied to the electrically conductive contact pin 100 of the first embodiment in the front, rear, left, and right directions based on the thickness direction ( ⁇ z direction), and FIG. 6 is FIG. 5 This is the front view.
  • the left electrically conductive contact pin 100 is contacted with the connection terminal (SD) on the rear outer portion of the upper right surface in the width direction ( ⁇ x direction) of the first connection portion 110, so that an eccentric pressing force is applied. It is inflicted.
  • the right electrically conductive contact pin 100 is connected to the front outer portion of the upper left surface in the width direction ( ⁇ x direction) of the first connection portion 110, and an eccentric pressing force is applied. all.
  • the left electrically conductive contact pin 100 is pressed and tilted in the left direction.
  • the second deformation prevention part 144b of the second flange part 142 is supported by the second support part 132 while contacting the inner surface of the second support part 132.
  • the left electrically conductive contact pin 100 is pressed in the left direction by the eccentric pressing force and generates a supporting force against tilting deformation, thereby preventing excessive deformation in the left direction.
  • the second deformation prevention part 144b When the second deformation prevention part 144b is in contact with the second support part 132, the second extension part 143b of the second flange part 142 is in contact with the upper inner surface of the second support part 132.
  • the first deformation prevention part 144a may be in contact with the middle portion of the inner surface of the first support part 131.
  • the left electrically conductive contact pin 100 generates a predetermined support force against tilt deformation even on the left side in the width direction ( ⁇ x direction), so that deformation can be prevented more effectively.
  • the right electrically conductive contact pin 100 is tilted while being pressed in the right direction due to an eccentric pressing force being applied to the right outer portion of the upper surface.
  • the first deformation prevention part 144a of the first flange part 141 is supported by the first support part 131 while contacting the inner surface of the first support part 131.
  • the first extension part 143a of the first flange part 141 is in contact with the upper end of the inner surface of the first support part 131
  • the second deformation prevention part 144b is in contact with the middle part of the inner surface of the second support part 132. can be contacted.
  • the right electrically conductive contact pin 100 is pressed to the right by an eccentric pressing force and generates a supporting force against tilting deformation, thereby preventing excessive deformation in the right direction.
  • the left electrically conductive contact pin 100 is tilted while being pressed toward the rear right as elastic deformation of the elastic portion S occurs as an eccentric pressing force is applied.
  • the flange portion (specifically, the first and second flange portions 141 and 142) of the left electrically conductive contact pin 100 is in contact with the front inner wall (FW) of the guide hole (GH) and the front inner wall ( It is supported by FW).
  • the left electrically conductive contact pin 100 is connected to the front inner wall (FW) of the guide hole GH through the first and second extension parts 143a and 143b of the first and second flange parts 141 and 142. It is in contact with and supported.
  • the extension portion 143 of the flange portion 140 is an area located around the x-z plane of the flange portion 140 when the elastic portion (S) is elastically deformed by an eccentric pressing force (for example, an eccentric pressing force in the front and rear directions).
  • an eccentric pressing force for example, an eccentric pressing force in the front and rear directions.
  • the left electrically conductive contact pin 100 is tilted by an eccentric pressing force applied in the right rear direction so that any position of the first and second extensions 143a and 143b is on the front inner wall FW of the guide hole GH. It comes into contact, and through this, a resistance force (supporting force) against the eccentric force applied in the right rear direction is generated. As a result, the left electrically conductive contact pin 100 generates a supporting force that prevents the left electrically conductive contact pin 100 from being excessively tilted and deformed due to the eccentric pressing force applied from the right rearward direction by the connection terminal (SD).
  • SD connection terminal
  • the right electrically conductive contact pin 100 is tilted while being pressed toward the left front as an eccentric pressing force is applied to the front side of the left upper surface in the width direction ( ⁇ x direction).
  • the flange portion (specifically, the first and second flange portions 141 and 142) of the right electrically conductive contact pin 100 is in contact with the rear inner wall (BW) of the guide hole (GH) and the rear inner wall (BW) of the right electrically conductive contact pin 100. It is supported by BW).
  • the right electrically conductive contact pin 100 is located at which positions of the first and second extension parts 143a and 143b of the first and second flange parts 141 and 142 are located on the rear inner wall of the guide hole GH. It is supported by contacting (BW).
  • BW contacting
  • the plan The flange portion 140 contacts the peripheral portion provided on the x-z plane of the branch 140 to generate a supporting force against tilting deformation. Accordingly, even if the electrically conductive contact pin 100 of the first embodiment is tilted and deformed due to an eccentric pressing force, excessive tilt can be prevented by the supporting force generated through the flange portion 140. Furthermore, the electrically conductive contact pin 100 of the first embodiment can be prevented from being damaged due to excessive tilting deformation by the flange portion 140.
  • Figure 7 is a cross-sectional view of an electrically conductive contact pin of a second preferred embodiment of the present invention (hereinafter referred to as 'electrically conductive contact pin 100a of the second embodiment') inserted into the guide housing (HS).
  • 'electrically conductive contact pin 100a of the second embodiment' an electrically conductive contact pin of a second preferred embodiment of the present invention
  • the electrically conductive contact pin 100a of the second embodiment corresponds to the first connection portion 110 and the first connection portion 110 in the longitudinal direction ( ⁇ y direction) and has a longitudinal direction ( ⁇ y direction).
  • the second connection part 120 includes a support part 130 extending upwardly (+y direction) and is provided between the first and second connection parts 110 and 120 in the longitudinal direction ( ⁇ y direction) to form the first and second connection parts. It includes an elastic portion (S) connecting (110, 120).
  • the electrically conductive contact pin 100a of the second embodiment has a relatively longer longitudinal ( ⁇ y-direction) dimension of the flange portion 140 compared to the electrically conductive contact pin 100 of the first embodiment.
  • the electrically conductive contact pin 100a of the second embodiment has a flange portion 140 whose longitudinal direction ( ⁇ y direction) is larger than that of the electrically conductive contact pin 100 of the first embodiment. Accordingly, in the electrically conductive contact pin 100a of the second embodiment, the insertion length IL at which at least a portion of the flange portion 140 is inserted into the inside of the support portion 130 based on the longitudinal direction ( ⁇ y direction) is, It is larger than the insertion length (IL) of the flange portion 140 in the electrically conductive contact pin 100 of the first embodiment.
  • the length of the flange portion 140 located inside the guide hole GH is 10% to 30% of the length in the longitudinal direction ( ⁇ y direction) of the guide hole GH, and in the second embodiment, The length of the flange portion 140 located inside the guide hole GH is more than 30% and less than 50% of the length in the longitudinal direction ( ⁇ y direction) of the guide hole GH.
  • the electrically conductive contact pin 100a of the second embodiment has a relatively long flange portion 140 and a relatively large longitudinal ( ⁇ y-direction) dimension of the extension portion 143.
  • the area occupied by the extension part 143 inside the support part 130 in the longitudinal direction ( ⁇ y direction) is relatively large.
  • the electrically conductive contact pin 100a of the second embodiment has a relatively long insertion length IL of the flange portion 140, so that the deformation prevention portion 144 is relatively located at the lower end of the support portion 130. It is located close to .
  • the concave formed on the inner surface of the support part 130 corresponds to the fact that the position of the deformation prevention part 144 inserted in the longitudinal direction ( ⁇ y direction) inside the support part 130 is close to the lower end of the support part 130.
  • the portion HM is also formed relatively close to the lower end of the support portion 130. Accordingly, in the electrically conductive contact pin 100a of the second embodiment, the concave portion of the inner surface of the support portion 130 and the deformation prevention portion 144 correspond to each other in the width direction ( ⁇ x direction).
  • any position of at least a portion of the extension portion 143 forming the insertion length IL is located in the guide hole. It may be in contact with the posterior inner wall (BW) of (GH).
  • the electrically conductive contact pin 100a of the second embodiment is provided with a relatively long flange portion 140, so that it extends relatively far from the deformation prevention portion 144 in the longitudinal direction ( ⁇ y direction). A certain position of the portion 143 is brought into contact with the rear inner wall (BW).
  • the electrically conductive contact pin 100a of the second embodiment has a deformation prevention portion 144 from the inside to the outside of the support portion 130 in the longitudinal direction ( ⁇ y direction) as it is tilted in the pressing direction by the eccentric pressing force.
  • a holding force can be generated to prevent tilting deformation more stably with a very low possibility of separation.
  • the electrically conductive contact pin 100a of the second embodiment connects both ends in the width direction ( ⁇ x direction) of the connection body portion 121 to the lower end of the support portion 130 and is connected to the support portion 130. It is provided with a second connection part 120 that is integrally connected.
  • connection body portion 121 extends upward in the longitudinal direction ( ⁇ y direction) in a form that expands the dimension in the width direction ( ⁇ x direction) and is connected to the inner surface of the lower end of the first support portion 131. do.
  • the right end of the connection body portion 121 also extends upward in the longitudinal direction ( ⁇ y direction) in a form that expands the dimension in the width direction ( ⁇ x direction) and is connected to the inner surface of the lower end of the second support portion 132.
  • the electrically conductive contact pin 100a of the second embodiment has a support extension portion ( 131').
  • the support extension 131 is formed in a straight line with one end connected to the inner surface of the first support part 131 and the other end connected to the inner surface of the second support part 132.
  • the electrically conductive contact pin 100a of the second embodiment is provided with a support extension portion 131' on the upper part (+y direction) of the area where both ends of the connection body portion 121 are connected, thereby forming the connection body portion 121.
  • a connection cavity 123 is formed between the support extension portion 131 and the support extension portion 131.
  • the electrically conductive contact pin 100a of the second embodiment is provided with support extension parts 131 on the upper portions of both ends of the connection body 121 connected to the support part 130 and is provided on the lower end of the support part 130. do.
  • the electrically conductive contact pin 100 of the first embodiment is provided with a support extension portion 131 on the middle portion of the support portion 130.
  • the electrically conductive contact pin 100a of the second embodiment has a support extension portion 131 at the lower end of the support portion 130.
  • the electrically conductive contact pin 100a of the second embodiment includes a support extension 131 at the lower end of the support 130 to ensure a distance between the flange 140 and the support extension 131.
  • the electrically conductive contact pin 100a of the second embodiment has a first connection portion 110 including a flange portion 140 having a relatively long length when the elastic portion S is elastically deformed by a pressing force.
  • the length of the flange portion 140 can be made relatively longer while preventing the problem of interference with the support extension portion 131 as it descends (-y direction).
  • the electrically conductive contact pin 100a of the second embodiment connects one end of the elastic portion (S) to the lower surface of the contact portion 111, and the other end of the elastic portion (S) is connected to the support extension portion 131. ) and has a structure that integrally connects the first and second connection parts 110 and 120 through the elastic part (S).
  • Figure 8a is a perspective view of the cover part 170
  • Figure 8b is a front view of the cover part 170
  • Figure 9a is a diagram of the electrically conductive contact pin 100b of the third embodiment of the present invention inserted into the guide housing (HS). It is a cross-sectional view
  • FIG. 9B is a cross-sectional view of the electrically conductive contact pin 100b of the third embodiment inserted into the guide housing HS with the cover portion 170 coupled thereto
  • FIG. 9C is a plan view of FIG. 9B.
  • the electrically conductive contact pin 100b of the third embodiment includes a first connection portion 110 including a relatively long flange portion 140, and a second connection portion including a support portion 130. It includes (120) and an elastic portion (S) connecting the first and second connection portions (110, 120).
  • the contact cavity 112 is formed in the central portion of the contact portion 111. Accordingly, the first connection part 110 has a shape in which the contact part 111 surrounds the contact cavity 112 on the outside including the top, bottom ( ⁇ y direction) and left and right sides ( ⁇ x direction).
  • the contact portion 111 having a predetermined spare area in the longitudinal direction ( ⁇ y direction) exists above and below the contact cavity 112 ( ⁇ y direction).
  • the electrically conductive contact pin 100b of the third embodiment has a coupling portion CB formed on the upper margin MG formed at least as a part of the contact portion 111 provided at the upper portion (+y direction) of the contact cavity 112. Equipped with The coupling portion CB is preferably provided in the central portion of the upper margin portion MG and is provided in the form of a concave groove having a flat bottom surface.
  • the first connection part 110 is provided with two protrusions (PT) around the coupling part CB.
  • the electrically conductive contact pin 100b of the third embodiment is connected to the connection terminal (PT) through the two protrusions PT. SD) can be provided.
  • the electrically conductive contact pin 100b of the third embodiment can be coupled to the cover portion 170 by providing a coupling portion CB.
  • the cover portion 170 includes a front length extension portion 173 located on one side (+z direction) based on the thickness direction ( ⁇ z direction), and a front length extension portion 173. ) and is provided between the front length extension 173 and the rear length extension 174 in the thickness direction ( ⁇ z direction) and a rear length extension 174 located on the other side (-z direction), which is opposite to the front, It includes a connection coupling portion 175 connecting the rear length extension portions 173 and 174.
  • the cover portion 170 is provided with front and rear extension portions 173 and 174 having a long length in the longitudinal direction ( ⁇ y direction).
  • connection coupling portion 175 has a predetermined length in the thickness direction ( ⁇ z direction).
  • a separation distance between the front and rear extension parts 173 and 174 is formed corresponding to the thickness direction ( ⁇ z direction) length of the connection coupling part 175.
  • front and rear extension portions 173 and 174 are provided on both sides of the connection portion 175 in the thickness direction ( ⁇ z direction).
  • the cover portion 170 includes a separation prevention portion 171 extending downward for a predetermined length from the lower surface of the central portion of the connection coupling portion 175.
  • the separation prevention portion 171 has a separation prevention protrusion 172 protruding inward in the thickness direction ( ⁇ z direction) at the lower end, which is the free end.
  • the separation prevention unit 171 includes a first separation prevention unit 171a provided close to the front extension part 173 and a first separation prevention unit 171a provided close to the rear extension part 174. It includes a second separation prevention portion 171b opposite to the.
  • the first separation prevention part 171a is provided at a predetermined distance from the front longitudinal extension part 173 in the thickness direction ( ⁇ z direction), and the second separation prevention part 171b is provided with the rear longitudinal extension part 174. It is provided at a predetermined distance in the thickness direction ( ⁇ z direction).
  • a first separation prevention bump 172a is provided at the lower end of the first separation prevention part 171a, and a second separation prevention bump 172b is provided at the lower end of the second separation prevention part 171b.
  • the first and second separation prevention parts 171a and 171b are opposed to each other at a distance in the thickness direction ( ⁇ z direction).
  • the width direction ( ⁇ direction) dimension corresponding to the thickness direction ( ⁇ z direction) separation distance of the first and second separation prevention portions 171a and 171b is the thickness direction ( ⁇ direction) of the electrically conductive contact pin 100b of the third embodiment. It may be larger than or equal to the z-direction) dimension.
  • the cover portion 170 may be made of a material having a predetermined elastic restoring force.
  • the cover portion 170 can be fitted onto the top of the electrically conductive contact pin 100b of the third embodiment. Referring to FIG. 9B, the cover portion 170 is fitted to the upper part of the electrically conductive contact pin 100b of the third embodiment through the coupling portion CB.
  • the cover portion 170 rotates 90° clockwise or counterclockwise from the front-facing state and makes the electrically conductive contact of the third embodiment. It may be fitted into the upper part of the pin 100b. As an example, the cover portion 170 is rotated 90° clockwise when facing the front and is fitted into the coupling portion CB.
  • the first and second separation prevention portions 171a , 171b) is opened by a predetermined amount and is coupled to the electrically conductive contact pin 100b of the third embodiment.
  • the cover portion 170 positions the front length extension portion 173 in front of the elastic portion (S) and positions the rear length extension portion 174 in the rear of the elastic portion (S). It is coupled at the top of the first connection part 110 so as to do so.
  • the first and second separation prevention bumps 172a and 172b are located on the upper side of the contact cavity 112.
  • the protruding surfaces of the first and second separation prevention bumps 172a and 172b are at least part of the contact portion 111 existing between the coupling portion CB and the longitudinal direction ( ⁇ y direction) of the contact cavity 112. It touches some surfaces. Accordingly, separation of the cover portion 170 in the upper direction ( ⁇ y direction) is prevented.
  • the central portion of the connecting portion 175 is seated on the coupling portion CB.
  • the central portion of the connection coupling portion 175 is between the first and second separation prevention portions 171a and 171b among the entire area of the connection coupling portion 175 based on the width direction ( ⁇ x direction) in FIGS. 8A and 8B. It is a part located in the area corresponding to the separation distance.
  • connection coupling portion 175 preferably has a longitudinal direction ( ⁇ y direction) dimension that is the same as the longitudinal direction ( ⁇ y direction) dimension of the coupling portion CB. Accordingly, the cover portion 170 does not protrude upward ( ⁇ y direction) beyond the two protrusions PT in the fully coupled state. Accordingly, when the protrusion PT of the electrically conductive contact pin 100b of the third embodiment comes into contact with the connection terminal SD, contact interference due to the cover portion 170 can be prevented.
  • the electrically conductive contact pin 100b of the third embodiment includes a cover portion 170, so that when an eccentric pressing force is applied in at least one of the front and rear directions, a supporting force due to the eccentric pressing force can be generated more effectively.
  • an eccentric pressing force may be applied to the electrically conductive contact pin 100b of the third embodiment in the left forward direction.
  • the electrically conductive contact pin 100b of the third embodiment is tilted in the forward direction, and the rear longitudinal extension portion 174 of the cover portion 170 is formed on the central portion of the rear inner wall BW of the guide hole GH. is contacted and supported by the posterior inner wall (BW).
  • the electrically conductive contact pin 100b of the third embodiment generates a supporting force against tilting deformation.
  • the longitudinal ( ⁇ x-direction) dimensions of the front and rear longitudinal extension portions 173 and 174 are preferably the same as the longitudinal ( ⁇ y-direction) dimensions of the flange portion 140. Accordingly, the cover portion 170 has a larger area in the width direction ( ⁇ x direction) than the flange portion 140.
  • the width direction ( ⁇ x direction) dimensions of the front and rear longitudinal extension parts 173 and 174 are larger than the width direction ( ⁇ x direction) dimension of the flange portion 140. .
  • the electrically conductive contact pin 100b of the third embodiment, including the cover portion 170, can be further improved in supporting force due to the eccentric pressing force applied in at least one of the front and rear directions.
  • the cover portion 170 includes not only the electrically conductive contact pin 100b of the third embodiment, but also the electrically conductive contact pin 100 of the first embodiment, the electrically conductive contact pin 100a of the second embodiment, and the third embodiment described later. It may also be provided in the electrically conductive contact pins 100c, 100d, and 100e of embodiments 1 to 6.
  • the first connection part 110 is provided with a coupling part CB.
  • Figure 10 is a cross-sectional view of the electrically conductive contact pin 100c of the fourth embodiment inserted into the guide housing HS.
  • the electrically conductive contact pin 100c of the fourth embodiment includes a first connection part 110, a second connection part 120 provided at the lower part of the first connection part 110, and a longitudinal direction ( ⁇ It includes an elastic part (S) provided between the first and second connection parts in the y direction) and a support part 130 provided on the outside of the first connection part 110.
  • the electrically conductive contact pin 100c of the fourth embodiment differs from the electrically conductive contact pin 100 of the first embodiment in that the outer wall of the support portion 130 is provided at an angle.
  • the guide housing (HS) is preferably made of a material containing polyimide (PI) and silicon nitride (Si 3 N 4 ).
  • the guide housing (HS) can be provided with a guide hole (GH) through hole processing using a laser.
  • the guide hole GH preferably has a square cross-section, and the horizontal cross-sectional area of the first opening OP1 and the horizontal cross-sectional area of the second opening OP2 are formed differently, so that the inner wall IW has an inclined angle. ( ⁇ ) is less than 90°.
  • the guide hole GH has a first opening OP1 in the direction in which the laser is positioned, and a second opening OP2 at an opposing position in the longitudinal direction ( ⁇ y direction).
  • the horizontal cross-sectional area of the first opening OP1 is larger than the horizontal cross-sectional area of the second opening OP2.
  • the inner wall IW of the guide hole GH is inclined so that the horizontal cross-sectional area of the hole becomes smaller as it moves from the first opening OP1 side to the second opening OP2 side.
  • the electrically conductive contact pin 100c of the fourth embodiment includes one end including the first locking portion 161 and the second locking portion 162 among the entire portion in the longitudinal direction ( ⁇ y direction) of the support portion 130.
  • the outer wall (OW) of the middle portion provided between the other ends is provided at an angle.
  • the inclined direction of the outer wall OW of the support portion 130 is the same angle as the inclined direction of the inner wall IW of the guide housing HS.
  • the inner wall IW of the guide hole GH is inclined so that the horizontal cross-sectional area becomes smaller as it moves from the first opening OP1 to the second opening OP2.
  • the outer wall OW in the middle portion is aligned with the inclined direction of the inner wall IW.
  • the copper is provided with a support portion 130 that is inclined in an inclined direction.
  • the electrically conductive contact pin 100c of the fourth embodiment is provided with a support portion 130 inclined at the same angle as the inclination direction of the inner wall IW of the guide hole GH, thereby providing a guide hole having an inclined inner wall IW ( When the insertion into the GH) is completed, the clearance distance with the inner wall (IW) of the guide hole (GH) can be removed.
  • the guide hole (GH) When the inner wall (IW) of the guide hole (GH) is inclined and the outer wall of the support portion of the electrically conductive contact pin is provided as a vertical outer wall, the guide hole (GH) is inserted with the electrically conductive contact pin inserted into the guide hole (GH). ) A gap may occur between the inclined inner wall (IW) and the vertical outer wall of the support portion 130. In other words, a gap occurs between the guide hole GH and the electrically conductive contact pin. If a gap occurs between the guide hole (GH) and the electrically conductive contact pin, the electrically conductive contact pin installed in the guide housing (HS) is shaken and the alignment between the electrically conductive contact pin and the connection terminal (SD) is distorted, causing inspection. Problems with inspection errors may occur regarding the object. Additionally, it may cause damage or breakage of the electrically conductive contact pins.
  • the electrically conductive contact pin 100c of the fourth embodiment includes a support portion 130 whose outer wall OW is inclined at the same angle as the inclination direction of the inner wall IW of the guide hole GH.
  • the electrically conductive contact pin 100c of the fourth embodiment does not have a gap with the guide hole GH when inserted into the guide hole GH. Accordingly, the inspection efficiency of the inspection object (SP) through the electrically conductive contact pin 100c of the fourth embodiment can be improved.
  • the electrically conductive contact pin 100c of the fourth embodiment forms a supporting force against eccentric pressure in at least one of the front, rear, left, and right directions through the flange portion 140, so that it is damaged due to excessive tilt. This can be advantageous in terms of prevention.
  • Figure 11 is a cross-sectional view of the electrically conductive contact pin 100d of the fifth embodiment inserted into the guide housing HS.
  • the inner wall IW of the guide hole GH is inclined at an inclination angle ⁇ such that the horizontal cross-sectional area increases from the first opening OP1 side to the second opening OP2 side.
  • the inclination angle ( ⁇ ) is less than 90°.
  • the electrically conductive contact pin 100d of the fifth embodiment is provided such that the outer wall OW of the support portion 130 is inclined at an inclination angle ⁇ equal to the inclination direction of the inner wall IW of the guide hole GH. Accordingly, the outer wall OW of the middle portion of the support portion 130 of the electrically conductive contact pin 100d of the fifth embodiment increases with an inclination angle ⁇ as it moves from the first locking portion 161 side to the second locking portion 162 side. It is provided inclined at an angle.
  • the electrically conductive contact pin 100d of the fifth embodiment has an inner wall (IW) where the guide hole GH is inclined so that the horizontal cross-sectional area of the hole increases as it moves from the first opening OP1 side to the second opening OP2 side. ), it is possible to prevent clearance from occurring between the inner wall (IW) of the guide hole (GH) and the electrically conductive contact pin (100d) of the fifth embodiment.
  • the electrically conductive contact pin 100d of the fifth embodiment has a shape in which a supporting force against eccentric pressing force in at least one of the front, rear, left, and right directions is formed through the flange portion 140, thereby preventing excessive tilt. It can be advantageous in terms of preventing damage.
  • the electrically conductive contact pin of the sixth preferred embodiment of the present invention (hereinafter referred to as the 'electrically conductive contact pin 100e of the sixth embodiment') will be described.
  • Figure 12 is a cross-sectional view of the electrically conductive contact pin 100e of the sixth embodiment inserted into the guide housing HS.
  • the inner wall IW of the guide hole GH is inclined at an angle ⁇ so that the horizontal cross-sectional area of the hole increases from the first opening OP1 side to the second opening OP2 side. It slopes.
  • the electrically conductive contact pin 100e of the sixth embodiment is provided such that the outer wall OW of the support portion 130 is inclined at an inclination angle ⁇ equal to the inclination direction of the inner wall IW of the guide hole GH. Accordingly, the outer wall OW of the middle portion of the support portion 130 of the electrically conductive contact pin 100e of the sixth embodiment increases with an inclination angle ⁇ as it moves from the first locking portion 161 side to the second locking portion 162 side. It is provided inclined at an angle.
  • the electrically conductive contact pin 100e of the sixth embodiment has an inner wall (IW) where the guide hole GH is inclined so that the horizontal cross-sectional area of the hole increases as it moves from the first opening OP1 side to the second opening OP2 side. ), it is possible to prevent clearance from occurring between the inner wall (IW) of the guide hole (GH) and the electrically conductive contact pin (100d) of the fifth embodiment.
  • the electrically conductive contact pin 100e of the sixth embodiment is formed on the outer surface of the extension portion 143 of the flange portion 140 opposite to the inner surface of the upper end of the support portion 130 having the second locking portion 162. It is provided in a parallel form. Accordingly, the separation distance in the width direction ( ⁇ x direction) between the inner surface of the upper end side of the support part 130 and the outer surface of the extension part 143 of the flange part 140 opposing it is formed to be small.

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Abstract

La présente invention concerne une broche de contact électroconductrice et un dispositif de test la comprenant, la broche de contact améliorant la fiabilité de test pour un objet de test, et générant une force de support pour une pression excentrique, empêchant ainsi une déformation d'inclinaison excessive.
PCT/KR2023/010513 2022-08-10 2023-07-20 Broche de contact électroconductrice et dispositif de test la comprenant WO2024034908A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2022-0099817 2022-08-10
KR1020220099817A KR20240021462A (ko) 2022-08-10 2022-08-10 전기 전도성 접촉핀 및 이를 구비하는 검사 장치

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US20170244189A1 (en) * 2016-02-22 2017-08-24 Jf Microtechnology Sdn. Bhd. Spring contact in a testing apparatus for integrated circuits
KR20180014860A (ko) * 2016-06-17 2018-02-09 오므론 가부시키가이샤 소켓
KR20180016615A (ko) * 2016-06-17 2018-02-14 오므론 가부시키가이샤 프로브 핀
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