WO2023158274A1 - Procédé de fabrication de substrat d'antenne transparente et antenne transparente ainsi fabriquée - Google Patents
Procédé de fabrication de substrat d'antenne transparente et antenne transparente ainsi fabriquée Download PDFInfo
- Publication number
- WO2023158274A1 WO2023158274A1 PCT/KR2023/002363 KR2023002363W WO2023158274A1 WO 2023158274 A1 WO2023158274 A1 WO 2023158274A1 KR 2023002363 W KR2023002363 W KR 2023002363W WO 2023158274 A1 WO2023158274 A1 WO 2023158274A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- glass substrate
- base glass
- transparent antenna
- metal
- forming
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 108
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 110
- 239000002184 metal Substances 0.000 claims abstract description 110
- 239000006121 base glass Substances 0.000 claims abstract description 80
- 239000010410 layer Substances 0.000 claims description 110
- 238000000034 method Methods 0.000 claims description 104
- 239000010949 copper Substances 0.000 claims description 79
- 229920002120 photoresistant polymer Polymers 0.000 claims description 51
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 45
- 229910052802 copper Inorganic materials 0.000 claims description 43
- 238000005530 etching Methods 0.000 claims description 37
- 238000004381 surface treatment Methods 0.000 claims description 35
- 239000012790 adhesive layer Substances 0.000 claims description 28
- 239000000243 solution Substances 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 22
- 230000003746 surface roughness Effects 0.000 claims description 22
- 238000007747 plating Methods 0.000 claims description 20
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 18
- 238000003486 chemical etching Methods 0.000 claims description 18
- 239000007921 spray Substances 0.000 claims description 17
- 238000007650 screen-printing Methods 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 9
- 238000007772 electroless plating Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 239000011651 chromium Substances 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 239000003518 caustics Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 5
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 4
- 125000003277 amino group Chemical group 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910001120 nichrome Inorganic materials 0.000 claims description 2
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 239000011521 glass Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000002070 nanowire Substances 0.000 description 4
- 229910017855 NH 4 F Inorganic materials 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000003426 chemical strengthening reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002074 nanoribbon Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 208000017983 photosensitivity disease Diseases 0.000 description 1
- 231100000434 photosensitization Toxicity 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J9/00—Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
- C09J9/02—Electrically-conducting adhesives
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
Definitions
- the chemical surface treatment process may be performed by applying a silane coupling agent to one surface of the base glass substrate and then drying it.
- FIG. 1 is a technical flow chart of a method for manufacturing a transparent antenna substrate according to a preferred embodiment of the present invention.
- the present invention performs a surface treatment process on one surface of a base glass substrate to form a first surface having improved adhesion (S10), and sputtering a first metal on the first surface to form an adhesive layer.
- S10 improved adhesion
- the spray coating method using the spraying method may be performed by spraying a urethane-based silane coupling agent on a product to a thickness of 1 to 5 ⁇ m and then performing heat treatment.
- the heat treatment may be performed in a method of drying by passing through a rail in equipment in a high temperature environment.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Electrochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Details Of Aerials (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
La présente invention améliore la force adhésive d'un substrat en verre de base et peut ainsi empêcher le décollement d'un motif métallique formé sur la surface du substrat en verre de base. De plus, la présente invention améliore l'adhérence entre le substrat en verre de base et une couche de germe et peut ainsi former un motif d'antenne à maillage métallique, qui n'est pas déformé thermiquement et présente une dimension critique fine permettant une sortie de signal à puissance élevée.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20220020808 | 2022-02-17 | ||
| KR10-2022-0020808 | 2022-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2023158274A1 true WO2023158274A1 (fr) | 2023-08-24 |
Family
ID=87578643
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2023/002363 WO2023158274A1 (fr) | 2022-02-17 | 2023-02-17 | Procédé de fabrication de substrat d'antenne transparente et antenne transparente ainsi fabriquée |
| PCT/KR2023/002362 WO2023158273A1 (fr) | 2022-02-17 | 2023-02-17 | Procédé de fabrication d'un substrat d'antenne transparent et antenne transparente fabriquée à partir de celui-ci |
| PCT/KR2023/002364 WO2023158275A1 (fr) | 2022-02-17 | 2023-02-17 | Procédé de fabrication d'un substrat d'antenne transparent et antenne transparente ainsi fabriquée |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2023/002362 WO2023158273A1 (fr) | 2022-02-17 | 2023-02-17 | Procédé de fabrication d'un substrat d'antenne transparent et antenne transparente fabriquée à partir de celui-ci |
| PCT/KR2023/002364 WO2023158275A1 (fr) | 2022-02-17 | 2023-02-17 | Procédé de fabrication d'un substrat d'antenne transparent et antenne transparente ainsi fabriquée |
Country Status (2)
| Country | Link |
|---|---|
| KR (3) | KR20230123903A (fr) |
| WO (3) | WO2023158274A1 (fr) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080010384A (ko) * | 2005-05-26 | 2008-01-30 | 군제 가부시키가이샤 | 투명 평면체 및 투명 터치스위치 |
| JP2011077116A (ja) * | 2009-09-29 | 2011-04-14 | Sharp Corp | 配線構造およびそれを備えた表示装置 |
| KR20110047468A (ko) * | 2009-10-30 | 2011-05-09 | 삼성전기주식회사 | 회로기판의 제조방법 |
| KR20170019151A (ko) * | 2015-08-11 | 2017-02-21 | 한국항공대학교산학협력단 | 다중금속막 식각 방법 및 식각액 |
| CN107634328A (zh) * | 2017-09-01 | 2018-01-26 | 中国科学院重庆绿色智能技术研究院 | 一种石墨烯透明天线及其制备方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101113854B1 (ko) * | 2006-03-11 | 2012-02-29 | 삼성테크윈 주식회사 | 전극 구조체와 그 제조방법 |
| KR100901017B1 (ko) * | 2007-10-11 | 2009-06-04 | 성균관대학교산학협력단 | 기판의 금속패턴 형성방법 |
| KR100975565B1 (ko) * | 2008-12-24 | 2010-08-13 | 한국과학기술원 | 투습률 및 투산소율이 낮은 플렉시블 디스플레이 기판의 제조 방법 |
| KR101095380B1 (ko) * | 2010-01-29 | 2011-12-16 | 대덕전자 주식회사 | 미세 피치의 인쇄회로기판 제조 방법 |
| JP2012207265A (ja) * | 2011-03-29 | 2012-10-25 | Toppan Printing Co Ltd | ディスプレイ用フィルム基板の製造方法 |
| KR101333087B1 (ko) * | 2011-11-29 | 2013-12-03 | 삼원에프에이 (주) | 안테나에 적용되는 다층 금속 패턴, 이러한 다층 금속 패턴을 가지는 안테나 및 안테나 제조 방법 |
| KR101926558B1 (ko) * | 2012-07-31 | 2019-03-12 | 엘지이노텍 주식회사 | 안테나 모듈 및 이의 제조방법 |
| CN111355026B (zh) * | 2020-03-03 | 2023-02-03 | 安徽精卓光显技术有限责任公司 | 透明天线及其制作方法、电子设备 |
-
2023
- 2023-02-17 WO PCT/KR2023/002363 patent/WO2023158274A1/fr unknown
- 2023-02-17 WO PCT/KR2023/002362 patent/WO2023158273A1/fr unknown
- 2023-02-17 KR KR1020230021778A patent/KR20230123903A/ko not_active Application Discontinuation
- 2023-02-17 KR KR1020230021777A patent/KR102608978B1/ko active IP Right Grant
- 2023-02-17 KR KR1020230021776A patent/KR102639992B1/ko active IP Right Grant
- 2023-02-17 WO PCT/KR2023/002364 patent/WO2023158275A1/fr unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080010384A (ko) * | 2005-05-26 | 2008-01-30 | 군제 가부시키가이샤 | 투명 평면체 및 투명 터치스위치 |
| JP2011077116A (ja) * | 2009-09-29 | 2011-04-14 | Sharp Corp | 配線構造およびそれを備えた表示装置 |
| KR20110047468A (ko) * | 2009-10-30 | 2011-05-09 | 삼성전기주식회사 | 회로기판의 제조방법 |
| KR20170019151A (ko) * | 2015-08-11 | 2017-02-21 | 한국항공대학교산학협력단 | 다중금속막 식각 방법 및 식각액 |
| CN107634328A (zh) * | 2017-09-01 | 2018-01-26 | 中国科学院重庆绿色智能技术研究院 | 一种石墨烯透明天线及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230123902A (ko) | 2023-08-24 |
| KR20230123901A (ko) | 2023-08-24 |
| KR102608978B1 (ko) | 2023-12-01 |
| KR102639992B1 (ko) | 2024-03-19 |
| WO2023158275A1 (fr) | 2023-08-24 |
| KR20230123903A (ko) | 2023-08-24 |
| WO2023158273A1 (fr) | 2023-08-24 |
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Legal Events
| Date | Code | Title | Description |
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