WO2023153373A1 - 電磁波偏向装置及び電磁波走査装置 - Google Patents

電磁波偏向装置及び電磁波走査装置 Download PDF

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Publication number
WO2023153373A1
WO2023153373A1 PCT/JP2023/003853 JP2023003853W WO2023153373A1 WO 2023153373 A1 WO2023153373 A1 WO 2023153373A1 JP 2023003853 W JP2023003853 W JP 2023003853W WO 2023153373 A1 WO2023153373 A1 WO 2023153373A1
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WIPO (PCT)
Prior art keywords
electromagnetic wave
mirror
axis
substrate
tilt angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/003853
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English (en)
French (fr)
Japanese (ja)
Inventor
浩希 岡田
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Kyocera Corp
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Kyocera Corp
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Publication date
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Priority to US18/835,092 priority Critical patent/US20250138301A1/en
Priority to JP2023580244A priority patent/JPWO2023153373A1/ja
Publication of WO2023153373A1 publication Critical patent/WO2023153373A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • the present disclosure relates to an electromagnetic wave deflection device and an electromagnetic wave scanning device.
  • a mirror unit that suppresses noise by having a transmitting member that is inclined with respect to the MEMS mirror is known (see Patent Document 1, for example).
  • An electromagnetic wave deflection device includes a mirror that reflects electromagnetic waves, a housing that houses the mirror and has an opening, and a transmission member that is provided in the opening.
  • the transmission member is configured to transmit at least a portion of electromagnetic waves.
  • the housing has a bottom surface opposite the opening.
  • the mirror is housed in the housing while being inclined with respect to the bottom surface.
  • An electromagnetic wave scanning device includes the electromagnetic wave deflection device, and an irradiation section that causes electromagnetic waves to be incident on the transmission member at a predetermined angle.
  • FIG. 1 is a plan view showing a configuration example of an electromagnetic wave deflection device according to an embodiment of the present disclosure
  • FIG. FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1
  • FIG. 5 is a cross-sectional view showing an example of the traveling direction of electromagnetic waves when the mirror rotates around the first axis and is tilted
  • FIG. 4 is a cross-sectional view showing an example of traveling directions of electromagnetic waves when a mirror rotates and tilts around a first axis and a second axis
  • FIG. 3 is a cross-sectional view showing a configuration example in which a transmissive member 30 has a convex portion on its surface
  • FIG. 6 is a cross-sectional view showing an example of traveling directions of electromagnetic waves when a mirror rotates around a first axis and tilts in the configuration example of FIG. 5 ;
  • both reduction of noise and securing of sealing performance can be realized.
  • an electromagnetic wave deflection device 1 includes a housing 10, a reflection device 20, and a transmission member 30. As shown in FIGS. The housing 10 accommodates the reflecting device 20 inside. The transmissive member 30 is joined to the housing 10 while the reflecting device 20 is accommodated inside the housing 10 . By bonding the housing 10 and the transmissive member 30 together, the reflecting device 20 is sealed inside. The reflector 20 is configured to reflect an electromagnetic wave incident from the outside through the transparent member 30 and to emit the electromagnetic wave to the outside through the transparent member 30 .
  • the housing 10 includes side walls 12 , a mounting portion 14 and a bottom surface 16 .
  • Side wall 12 is positioned to surround housing 10 .
  • the housing 10 is joined to the transmissive member 30 at the upper ends 12A of the side walls 12 .
  • the side wall 12 is configured such that the posture of the transmissive member 30 is substantially horizontal or horizontal when the transmissive member 30 is joined to the upper end 12A.
  • the sidewall 12 may be configured such that the difference in height of the upper end 12A at each portion is small.
  • the housing 10 has an opening surrounded by the upper ends 12A of the side walls 12 .
  • the transparent member 30 is provided in the opening of the housing 10 .
  • the placing section 14 is configured so that the reflecting device 20 can be placed thereon.
  • the mounting section 14 is configured to support the reflecting device 20 at four points in FIG.
  • the number of portions where the reflecting device 20 is supported by the mounting portion 14 may be three or less, or may be five or more.
  • the mounting portion 14 is configured to support the corner portions of the reflecting device 20 in FIG. may be configured to support at least a portion of the
  • the bottom surface 16 corresponds to the surface on the opposite side of the transmission member 30 .
  • the bottom surface 16 corresponds to the surface located opposite to the side (opening) to which the transmissive member 30 is joined.
  • the bottom surface 16 may face the vertical direction (the direction in which gravity acts) when the electromagnetic wave deflection device 1 is used, or may face the direction other than the vertical direction. It is assumed that the bottom surface 16 faces the vertical direction when the transparent member 30 is joined to the housing 10 .
  • the transparent member 30 is joined to the upper end 12A of the side wall 12 of the housing 10 in a state where the bottom surface 16 of the housing 10 is in contact with a workbench or the like.
  • the transmissive member 30 is joined so as to be substantially parallel or parallel to the bottom surface 16 .
  • the bottom surface 16 extends along the XY plane.
  • the normal to bottom surface 16 is along the Z-axis.
  • the normal to the surface 30A of the transmissive member 30 is along the Z-axis.
  • the transmission member 30 is configured to transmit electromagnetic waves incident on the reflecting device 20 and electromagnetic waves reflected by the reflecting device 20 .
  • the transmissive member 30 may be configured to contain glass, resin, or the like.
  • the transmissive member 30 has a surface 30A facing out of the space enclosing the reflector 20 . It can also be said that the transmissive member 30 seals the reflecting device 20 by being joined to the housing 10 .
  • the reflector 20 includes a mirror 22 that reflects electromagnetic waves and a substrate 24 that holds the mirror 22 .
  • Mirror 22 is configured to be tiltable with respect to substrate 24 .
  • Reflector 20 may further comprise a drive 26 for tilting mirror 22 .
  • the reflecting device 20 is configured to be able to control the attitude of the mirror 22 .
  • the mirror 22 may be configured including metal, semiconductor, resin, or the like.
  • the substrate 24 may be composed of resin, ceramic, semiconductor, metal, or the like.
  • the drive unit 26 may be configured including an actuator such as a piezoelectric element or a motor.
  • the mirror 22 and the driver 26 may be formed on the substrate 24 by a manufacturing process based on MEMS (Micro Electro Mechanical Systems) technology.
  • MEMS Micro Electro Mechanical Systems
  • the mirror 22 may be configured to be tiltable with respect to the substrate 24 around an axis extending in a direction perpendicular to the plane of the paper (an axis extending along the Y-axis).
  • the axis extending in the direction perpendicular to the plane of the paper (the axis extending along the Y-axis) is also called the first axis. It can also be said that the first axis extends in a direction along the substrate 24 .
  • Mirror 22 may be configured to be tiltable about a first axis.
  • Mirror 22A represents the state in which mirror 22 is rotated through a maximum angle in a counterclockwise direction about the first axis and tilted.
  • Mirror 22B represents the state in which mirror 22 is rotated through a maximum angle in a clockwise direction about the first axis and tilted.
  • the electromagnetic waves incident on the reflector 20 are also referred to as incident electromagnetic waves 40 .
  • the electromagnetic waves reflected by the reflector 20 are also referred to as reflected electromagnetic waves 50 .
  • Reflected electromagnetic wave 50 travels in a direction represented as reflected electromagnetic wave 50A when mirror 22 is tilted to the maximum in the counterclockwise direction, represented as mirror 22A.
  • Reflected electromagnetic wave 50 travels in a direction represented as reflected electromagnetic wave 50B when mirror 22 is tilted most in the clockwise direction, represented as mirror 22B. If mirror 22 is tilted between the state represented as mirror 22A and the state represented as mirror 22B, reflected electromagnetic wave 50 is contained between the direction of reflected electromagnetic wave 50A and the direction of reflected electromagnetic wave 50B. direction.
  • the reflected electromagnetic wave 50 is scanned between the direction of the reflected electromagnetic wave 50A and the direction of the reflected electromagnetic wave 50B as the tilt angle of the mirror 22 changes.
  • the range scanned by the reflected electromagnetic waves 50 is also referred to as a scanning range 52 . If the mirror 22 tilts about one axis, the reflected electromagnetic wave 50 is linearly (one-dimensionally) scanned. That is, the scanning range 52 is expressed as a linear range.
  • At least part of the incident electromagnetic wave 40 is transmitted through the transmissive member 30 and enters the reflecting device 20 .
  • part of the incident electromagnetic wave 40 is reflected by the surface 30A of the transmission member 30 .
  • the electromagnetic waves reflected by the surface 30 ⁇ /b>A of the transmission member 30 travel in a fixed direction regardless of the scanning direction of the reflected electromagnetic waves 50 .
  • the electromagnetic waves reflected by the surface 30A of the transmissive member 30 are also called reflected waves.
  • the electromagnetic waves reflected by the surface 30A of the transmissive member 30 are unnecessary electromagnetic waves for scanning the reflected electromagnetic waves 50 within the scanning range 52 and are also called noise electromagnetic waves 60 .
  • the reflection device 20 is arranged so that the intensity of the reflected electromagnetic waves 50 reaching each part included in the scanning range 52 during one cycle of scanning becomes uniform (the difference in the integrated value of the intensity of the electromagnetic waves reaching each part is small). ) to control the tilt of the mirror 22 . If the noise electromagnetic wave 60 travels within the scanning range 52, the integrated value of the intensity of the electromagnetic wave increases only in the portion where the noise electromagnetic wave 60 travels.
  • the electromagnetic wave deflection device 1 is configured so that the noise electromagnetic wave 60 (reflected wave) travels outside the scanning range 52 .
  • the substrate 24 of the reflecting device 20 is attached to the mounting section 14 so as to be tilted about the axis in the direction along the first axis, which is the axis when the mirror 22 is tilted with respect to the bottom surface 16 of the housing 10 . may be placed.
  • the mirror 22 may be housed in the housing 10 at an angle with respect to the bottom surface 16 .
  • the axis along the first axis which is the axis for tilting the mirror 22, corresponds to the axis extending in the direction perpendicular to the plane of the paper (the axis extending along the Y-axis).
  • the electromagnetic wave deflection device 1 widens the scanning range 52 so that the traveling direction of the noise electromagnetic wave 60 determined by the surface 30 ⁇ /b>A of the transparent member 30 is outside the scanning range 52 . can be moved. As a result, noise when scanning electromagnetic waves within scanning range 52 can be reduced.
  • the mirror 22 is configured to be able to control its posture so that the reflecting surface of the electromagnetic wave is not parallel to the transmitting member 30 .
  • the substrate 24 of the reflector 20 rotates and tilts at an angle larger than a predetermined angle around the axis in the direction along the first axis, which is the axis when the mirror 22 tilts with respect to the bottom surface 16 of the housing 10. may be placed on the placing portion 14 at the same time.
  • the direction in which the substrate 24 is tilted may be clockwise or counterclockwise with respect to the axis.
  • the predetermined angle is determined based on the angle at which the mirror 22 is tilted.
  • the mirror 22 tilts clockwise and counterclockwise with respect to the axis up to the maximum tilt angle, using a state in which it is substantially parallel or parallel to the substrate 24 as a reference posture. Assume that the maximum clockwise tilt angle is equal to the maximum counterclockwise tilt angle.
  • the predetermined angle may be set to twice the maximum tilt angle. This is because the angle between the traveling direction of the reflected electromagnetic wave 50 when the mirror 22 is in the reference posture and the traveling direction of the reflected electromagnetic wave 50 when the mirror 22 is tilted is twice the tilt angle of the mirror 22 . be.
  • the predetermined angle may be set to a different value for each direction of tilt.
  • the predetermined angle when the substrate 24 of the reflector 20 is tilted clockwise may be set to twice the maximum clockwise tilt angle of the mirror 22 .
  • the predetermined angle for tilting the substrate 24 of the reflector 20 counterclockwise may be set to twice the maximum counterclockwise tilt angle of the mirror 22 .
  • the substrate 24 of the reflecting device 20 may be mounted on the mounting section 14 so as to tilt about an axis along a direction intersecting the first axis, which is the axis along which the mirror 22 tilts. That is, the substrate 24 may be tilted around the axis in the direction in which the electromagnetic waves are not scanned.
  • the electromagnetic wave deflection device 1 can also move the scanning range 52 so that the traveling direction of the noise electromagnetic wave 60 determined by the surface 30A of the transmitting member 30 is outside the scanning range 52 .
  • the substrate 24 is mounted on the mounting portion 14 so as to be inclined around both the axis in the scanning direction of the electromagnetic wave (the axis along the first axis) and the axis in the non-scanning direction of the electromagnetic wave. Alternatively, it may be placed on the placement portion 14 so as to be inclined only around one of the axes.
  • the electromagnetic wave deflection device 1 can move the traveling direction of the noise electromagnetic wave 60 out of the scanning range 52 by inclining the reflection device 20 . As a result, noise can be reduced.
  • the transmission member 30 is inclined with respect to the bottom surface 16 of the housing 10 in order to make the traveling direction of the noise electromagnetic waves 60 out of the scanning range 52 .
  • the transparent member 30 is inclined with respect to the bottom surface 16 of the housing 10 , it is necessary to place the transparent member 30 on the housing 10 in an inclined state when joining the transparent member 30 to the housing 10 .
  • Various conditions in the process of joining the transmissive member 30 and the housing 10 are such that the transmissive member 30 is placed substantially horizontally on the housing 10 so as to ensure the sealing performance of the transmissive member 30 and the housing 10. It is determined on the premise that it will be joined in the state.
  • the sealing performance between the transparent member 30 and the housing 10 may be deteriorated by joining the transparent member 30 on the housing 10 in an inclined state. If various conditions in the bonding process are re-determined according to the inclination of the transmissive member 30 in order to ensure the sealing performance, the workload of re-determining the conditions may increase. In addition, it becomes necessary to re-determine the conditions each time the tilt angle of the transmissive member 30 is changed, which may further increase the workload.
  • the substrate 24 of the reflection device 20 is tilted with respect to the bottom surface 16 inside the housing 10, so that the noise electromagnetic wave 60 is deflected without tilting the transmitting member 30. can be advanced outside the scanning range 52 .
  • noise can be reduced without affecting the process of joining the transmissive member 30 to the housing 10 .
  • both noise reduction and sealing performance can be achieved.
  • the electromagnetic wave deflection device 1 is configured so that the noise electromagnetic wave 60 travels to a region beyond the distance (on the extension of the scanning range 52 and outside the scanning range 52). Equivalent effects to those of the present embodiment can also be obtained by configuring as follows.
  • Incident electromagnetic waves 40 may be emitted from a light source 70 as shown in FIG.
  • the light source 70 causes electromagnetic waves to enter the transmissive member 30 at a predetermined angle.
  • the light source 70 is also called an irradiation section.
  • a configuration including the irradiation unit and the electromagnetic wave deflection device 1 is also called an electromagnetic wave scanning device.
  • the electromagnetic wave scanning device may include a controller that controls the posture of the mirror 22 so that the electromagnetic wave reflected by the mirror 22 scans a predetermined range.
  • the controller may control the posture of the mirror 22 within a range in which the electromagnetic wave reflecting surface of the mirror 22 is not parallel to the transmitting member 30 .
  • the electromagnetic wave deflection device 1 or the electromagnetic wave scanning device advances the reflected electromagnetic wave 50 toward a predetermined object.
  • the reflected electromagnetic wave 50 is reflected or scattered by a predetermined object and is detected by an electromagnetic wave detection device provided separately.
  • a given object is also referred to as a detection target.
  • the electromagnetic wave detection device acquires, for example, an image of the detection target or acquires distance data from the detection target to the electromagnetic wave detection device based on the detection result of the electromagnetic waves reflected or scattered by the detection target.
  • the electromagnetic wave detection device may detect the electromagnetic wave from the detection target in accordance with the scanning period of the electromagnetic wave by the electromagnetic wave deflection device 1 .
  • the electromagnetic wave deflection device 1 may scan the electromagnetic waves so as to synchronize with the timing of detection of the electromagnetic waves by the electromagnetic wave detection device.
  • the electromagnetic wave deflection device 1 may scan the electromagnetic wave at a predetermined cycle regardless of the timing of detection of the electromagnetic wave by the electromagnetic wave detection device.
  • mirror 22 was configured to be tiltable about an axis extending along the Y axis.
  • the mirror 22 may also be configured to be tiltable around an axis extending along the X-axis, as illustrated in FIG. That is, the mirror 22 may be configured to be tiltable about two axes.
  • the mirror 22 may be configured not only to be tiltable about a first axis, but also to be tiltable about a second axis that intersects the first axis. It can also be said that the first axis and the second axis extend in the direction along the substrate 24 .
  • the reflected electromagnetic wave 50 is planarly (two-dimensionally) scanned by configuring the mirror 22 to be tiltable about two axes. That is, the scanning range 52 is expressed as a planar range.
  • the substrate 24 of the reflector 20 may be mounted on the mounting part 14 so as to be rotated and tilted about the first axis by an angle greater than a predetermined angle, and about the second axis by an angle greater than the predetermined angle. may be placed on the placement portion 14 so as to rotate and incline.
  • the predetermined angle is determined based on the angle at which the mirror 22 is tilted.
  • the maximum tilt angle when the mirror 22 rotates about the first axis is also referred to as the first maximum tilt angle.
  • the maximum tilt angle when mirror 22 rotates about the second axis is also referred to as the second maximum tilt angle.
  • the substrate 24 of the reflector 20 is at an angle greater than twice the first maximum tilt angle with respect to the bottom surface 16 of the housing 10 about the first axis. may be placed on the placing portion 14 so as to be inclined at . By doing so, the noise electromagnetic waves 60 can be outside the scanning range 52 .
  • the substrate 24 of the reflector 20 is at an angle greater than twice the second maximum tilt angle with respect to the bottom surface 16 of the housing 10 about the second axis. may be placed on the placing portion 14 so as to be inclined at . By doing so, the noise electromagnetic waves 60 can be outside the scanning range 52 .
  • the substrate 24 of the reflector 20 is at a first tilt relative to the bottom surface 16 of the housing 10 about at least one of the first axis and the second axis. It may be mounted on the mounting portion 14 so as to be tilted at an angle larger than twice the maximum tilt angle (or the second maximum tilt angle). By doing so, the noise electromagnetic waves 60 can be outside the scanning range 52 .
  • Substrate 24 of reflector 20 may be tilted with respect to bottom surface 16 of housing 10 about only one of the first axis and the second axis, or about both the first axis and the second axis. may be tilted with respect to the bottom surface 16 of the housing 10 about the axis of .
  • the electromagnetic wave deflection device 1 may be configured so that the traveling direction of the noise electromagnetic wave 60 is outside the scanning range 52 depending on the shape of the transmitting member 30 .
  • the substrate 24 of the reflector 20 may not be inclined with respect to the bottom surface 16 of the housing 10, but may be substantially parallel.
  • the transmissive member 30 may have protrusions 32 on the surface 30A, as illustrated in FIG. Assume that the substrate 24 of the reflector 20 is parallel to the bottom surface 16 of the housing 10 . Other configurations are assumed to be the same as those shown in FIGS.
  • the transmitting member 30 has a convex portion 32 on the portion of the surface 30A on which the incident electromagnetic wave 40 is incident, at least part of the incident electromagnetic wave 40 from the light source 70 is transmitted through the convex portion 32. Incident on the member 30 .
  • An incident electromagnetic wave 40 that enters from the convex portion 32 and reaches the reflecting device 20 is reflected by the reflecting device 20 .
  • Reflected electromagnetic wave 50 travels in a direction represented as reflected electromagnetic wave 50A when mirror 22 is tilted to the maximum in the counterclockwise direction, represented as mirror 22A.
  • Reflected electromagnetic wave 50 travels in a direction represented as reflected electromagnetic wave 50B when mirror 22 is tilted most in the clockwise direction, represented as mirror 22B.
  • reflected electromagnetic wave 50 is contained between the direction of reflected electromagnetic wave 50A and the direction of reflected electromagnetic wave 50B. direction.
  • the reflected electromagnetic wave 50 is scanned within a scanning range 52 between the direction of the reflected electromagnetic wave 50A and the direction of the reflected electromagnetic wave 50B by changing the tilt angle of the mirror 22 .
  • a part of the incident electromagnetic wave 40 is reflected by the surface of the convex portion 32 and becomes a noise electromagnetic wave 60 .
  • the electromagnetic wave deflection device 1 can set the traveling direction of the noise electromagnetic wave 60 outside the scanning range 52 by providing the convex portion 32 . If the surface 30A of the transmissive member 30 is flat without the projections 32, the incident electromagnetic wave 40 reflected by the flat surface 30A travels as hypothetical noise electromagnetic waves 62. FIG. The direction of travel of the hypothetical noise electromagnetic wave 62 may be within the scanning range 52 . Therefore, it can be said that the convex portion 32 causes the noise electromagnetic wave 60 to advance outside the scanning range 52 .
  • the transmissive member 30 may have a recess in a portion of the surface 30A where the incident electromagnetic wave 40 is incident. Further, the transmission member 30 may have an inclined surface at a portion of the surface 30A on which the incident electromagnetic wave 40 is incident. Even if the transmissive member 30 has a concave portion or an inclined surface in the portion of the surface 30 ⁇ /b>A on which the incident electromagnetic wave 40 is incident, the traveling direction of the noise electromagnetic wave 60 on which the incident electromagnetic wave 40 is incident may be outside the scanning range 52 .
  • Descriptions such as “first” and “second” in this disclosure are identifiers for distinguishing the configurations. Configurations that are differentiated in descriptions such as “first” and “second” in this disclosure may interchange the numbers in that configuration. For example, a first axis can exchange identifiers “first” and “second” with a second axis. The exchange of identifiers is done simultaneously. The configurations are still distinct after the exchange of identifiers. Identifiers may be deleted. Configurations from which identifiers have been deleted are distinguished by codes. The description of identifiers such as “first” and “second” in this disclosure should not be used as a basis for interpreting the order of the configuration or the existence of lower numbered identifiers.
  • X-axis, Y-axis, and Z-axis are provided for convenience of explanation and may be interchanged with each other.
  • Configurations according to the present disclosure have been described using a Cartesian coordinate system formed by X, Y, and Z axes.
  • the positional relationship of each configuration according to the present disclosure is not limited to an orthogonal relationship.
  • electromagnetic wave deflection device 10 housing (12: side wall, 12A: upper end of side wall, 14: mounting section, 16: bottom surface)
  • reflection device 22, 22A, 22B: mirrors
  • 24 substrate
  • 26 drive unit
  • Transmissive member (30A: surface, 32: convex portion) 40 incident electromagnetic waves 50, 50A, 50B reflected electromagnetic waves 52 scanning range 60 noise electromagnetic waves 62 hypothetical noise electromagnetic waves 70 light source

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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PCT/JP2023/003853 2022-02-10 2023-02-06 電磁波偏向装置及び電磁波走査装置 Ceased WO2023153373A1 (ja)

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US18/835,092 US20250138301A1 (en) 2022-02-10 2023-02-06 Electromagnetic wave deflection device and electromagnetic wave scanning device
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TWI900351B (zh) * 2023-11-27 2025-10-01 鴻海精密工業股份有限公司 用於產生擬設電路的量子電腦和方法

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JP2009069457A (ja) * 2007-09-13 2009-04-02 Seiko Epson Corp 光走査素子及び画像表示装置
JP2011517626A (ja) * 2008-03-04 2011-06-16 フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ マイクロシステムのためのカバー及びカバーを製造する方法
JP2016099567A (ja) * 2014-11-25 2016-05-30 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2019211526A (ja) * 2018-05-31 2019-12-12 株式会社リコー 光偏向装置及びその製造方法、画像投影装置、物体認識装置、レーザヘッドランプ装置、光書込装置、並びに移動体
WO2021100300A1 (ja) * 2019-11-21 2021-05-27 浜松ホトニクス株式会社 ミラーユニット

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Publication number Priority date Publication date Assignee Title
US20060078256A1 (en) * 2004-10-08 2006-04-13 Samsung Electro-Mechanics Co., Ltd. Light modulator package having inclined light transmissive lid
JP2009069457A (ja) * 2007-09-13 2009-04-02 Seiko Epson Corp 光走査素子及び画像表示装置
JP2011517626A (ja) * 2008-03-04 2011-06-16 フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ マイクロシステムのためのカバー及びカバーを製造する方法
JP2016099567A (ja) * 2014-11-25 2016-05-30 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2019211526A (ja) * 2018-05-31 2019-12-12 株式会社リコー 光偏向装置及びその製造方法、画像投影装置、物体認識装置、レーザヘッドランプ装置、光書込装置、並びに移動体
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