JPWO2023153373A5 - - Google Patents

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Publication number
JPWO2023153373A5
JPWO2023153373A5 JP2023580244A JP2023580244A JPWO2023153373A5 JP WO2023153373 A5 JPWO2023153373 A5 JP WO2023153373A5 JP 2023580244 A JP2023580244 A JP 2023580244A JP 2023580244 A JP2023580244 A JP 2023580244A JP WO2023153373 A5 JPWO2023153373 A5 JP WO2023153373A5
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JP
Japan
Prior art keywords
mirror
electromagnetic wave
axis
substrate
tilt angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023580244A
Other languages
English (en)
Japanese (ja)
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JPWO2023153373A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/003853 external-priority patent/WO2023153373A1/ja
Publication of JPWO2023153373A1 publication Critical patent/JPWO2023153373A1/ja
Publication of JPWO2023153373A5 publication Critical patent/JPWO2023153373A5/ja
Pending legal-status Critical Current

Links

JP2023580244A 2022-02-10 2023-02-06 Pending JPWO2023153373A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022019760 2022-02-10
PCT/JP2023/003853 WO2023153373A1 (ja) 2022-02-10 2023-02-06 電磁波偏向装置及び電磁波走査装置

Publications (2)

Publication Number Publication Date
JPWO2023153373A1 JPWO2023153373A1 (https=) 2023-08-17
JPWO2023153373A5 true JPWO2023153373A5 (https=) 2024-10-18

Family

ID=87564345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023580244A Pending JPWO2023153373A1 (https=) 2022-02-10 2023-02-06

Country Status (3)

Country Link
US (1) US20250138301A1 (https=)
JP (1) JPWO2023153373A1 (https=)
WO (1) WO2023153373A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI900351B (zh) * 2023-11-27 2025-10-01 鴻海精密工業股份有限公司 用於產生擬設電路的量子電腦和方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100815358B1 (ko) * 2004-10-08 2008-03-19 삼성전기주식회사 경사진 광투과성 덮개를 가진 광변조기 패키지
JP2009069457A (ja) * 2007-09-13 2009-04-02 Seiko Epson Corp 光走査素子及び画像表示装置
DE102008012384A1 (de) * 2008-03-04 2009-09-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Deckel für Mikro-Systeme und Verfahren zur Herstellung eines Deckels
JP2016099567A (ja) * 2014-11-25 2016-05-30 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP7024612B2 (ja) * 2018-05-31 2022-02-24 株式会社リコー 光偏向装置及びその製造方法、画像投影装置、物体認識装置、レーザヘッドランプ装置、光書込装置、並びに移動体
JP7569622B2 (ja) * 2019-11-21 2024-10-18 浜松ホトニクス株式会社 ミラーユニット

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