WO2023142491A1 - Optical fiber angle adjustment device and chip testing apparatus - Google Patents

Abstract

An optical fiber angle adjustment device, which relates to the technical field of optical fiber fixtures, comprises a base (5), a first adjustment base (10), a second adjustment base (1), a first adjustment mechanism and a second adjustment mechanism. The first adjustment base (10) is rotatably mounted on the base, the second adjustment base (1) is rotatably mounted on the first adjustment base (10), the first adjustment mechanism is arranged between the base and the first adjustment base (10), and the second adjustment mechanism is arranged between the first adjustment base (10) and the second adjustment base (1). By means of controlling the first adjustment mechanism, the first adjustment base (10) can rotate around the base (5), and by means of controlling the second adjustment mechanism, the second adjustment base (1) can rotate around the first adjustment base (10); and during the rotation of the first adjustment base (10) and the second adjustment base (1), the second adjustment base (1) carries an optical fiber to rotate and swing so as to adjust an angle of the optical fiber, so that a receiving end of the optical fiber is aligned with a collimating focusing lens to accurately receive an optical signal output by a chip. Further provided is a chip testing apparatus.

Description

Optical fiber angle adjustment device and chip detection equipment

Cross References to Related Applications

This application claims the priority of a Chinese patent application filed with the China Patent Office on January 29, 2022, with application number 202210110030.2, and the title of the invention is "Optical fiber angle adjustment device and chip detection equipment", the entire content of which is incorporated by reference In this article.

technical field

The present application relates to the technical field of optical fiber clamps, in particular to an optical fiber angle adjustment device and chip detection equipment.

Background technique

Optical fiber is an abbreviation for optical fiber, which is a fiber made of glass or plastic and can be used as a carrier for light transmission.

Integrated circuit (Integrated circuit, referred to as IC) or microcircuit (microcircuit), microchip (microchip), chip/chip (chip) is a kind of circuit in electronics (mainly including semiconductor equipment, including passive components, etc.) miniaturized and often fabricated on the surface of a semiconductor wafer.

The manufactured chips need to be tested. During the detection process, the optical signal sent by the chip needs to be transmitted to the optical analysis instrument through the optical fiber, and the optical signal is also required to be transmitted by the optical fiber to the equipment for detecting the chip. Since the light emitted by some chips is diffuse, the divergent light is generally focused by a collimating lens and then sent to the receiving end of the optical fiber. Since the direction of the light emitted by different types of chips deviates, and the installation position of the light-emitting chip also has different degrees of error, it is usually necessary to adjust the position of the receiving end of the optical fiber so that the receiving end of the optical fiber is aligned with the collimating and focusing lens. Accurate, so that the receiving end of the optical fiber can accurately receive the optical signal from the chip.

Contents of the invention

Therefore, the present application provides an optical fiber angle adjustment device and a chip detection device that are convenient for adjusting the receiving end of the optical fiber.

In order to solve the above technical problems, the application provides an optical fiber angle adjustment device, including:

Base, suitable for installation on the testing equipment;

The first adjustment seat is rotatably mounted on the base;

The second adjustment seat is rotatably mounted on the first adjustment seat, and the second adjustment seat is suitable for clamping optical fibers;

A first adjustment mechanism, arranged between the base and the first adjustment seat, the first adjustment mechanism is suitable for adjusting the rotation angle of the first adjustment seat;

The second adjustment mechanism is arranged between the first adjustment seat and the second adjustment seat, and the second adjustment mechanism is suitable for adjusting the rotation angle of the second adjustment seat.

Optionally, there is a mounting part on the optical fiber, the mounting part is suitable for receiving the optical signal transmitted by the chip to be detected, and the mounting part is clamped on the second adjustment seat;

The second adjustment seat is suitable for driving the installation part to swing up and down along the vertical plane where the installation part is located;

The first adjustment seat is suitable for driving the second adjustment seat and the installation part to swing left and right along the horizontal plane where the installation part is located, and the vertical plane and the horizontal plane are perpendicular to each other.

Optionally, it also includes a first rotating shaft installed on the base, and the first adjustment seat is rotatably installed on the first rotating shaft;

The second rotating shaft is mounted on the first adjusting seat, the second adjusting seat is rotatably mounted on the second rotating shaft, and the second rotating shaft and the first rotating shaft are arranged perpendicular to each other.

Optionally, the first adjustment mechanism includes a first rotating block, which is rotatably mounted on the base;

The second rotating block is rotatably mounted on the first adjustment seat;

The first adjusting rod passes through the first rotating block and is connected to the second rotating block in a rotatable and anti-slip manner, and the first adjusting rod is threadedly connected to the first rotating block.

Optionally, a third adjusting rod is further included, which passes through the first rotating block and is threadedly connected with the second rotating block, and the third adjusting rod is connected with the first rotating block in a rotatable and anti-slip manner.

Optionally, a third rotating shaft and a fourth rotating shaft are also included, the third rotating shaft is mounted on the base, and the first rotating block is rotatably mounted on the third rotating shaft;

The fourth rotating shaft is installed on the first adjustment seat, and the second rotating block is rotatably installed on the fourth rotating shaft.

Optionally, the second adjusting mechanism includes a third rotating block, which is rotatably mounted on the first adjusting seat;

The fourth rotating block is rotatably mounted on the second adjustment seat;

The second adjusting rod passes through the third rotating block and is connected to the fourth rotating block in a rotatable and anti-slip manner, and the second adjusting rod is threadedly connected to the third rotating block.

Optionally, a fourth adjusting rod is further included, threadedly connected with the fourth rotating block through the third rotating block, and the fourth adjusting rod is connected with the third rotating block in a rotatable and anti-slip manner.

Optionally, a fifth rotating shaft and a sixth rotating shaft are also included, the fifth rotating shaft is mounted on the first adjustment seat, and the third rotating block is rotatably mounted on the fifth rotating shaft;

The sixth rotating shaft is installed on the second adjustment seat, and the fourth rotating block is rotatably installed on the sixth rotating shaft.

Also provided is a chip detection device, including the above-mentioned optical fiber angle adjustment device.

The technical solution of the present application has the following advantages:

1. The optical fiber angle adjustment device provided by this application is suitable for being installed on the base of the detection equipment. The first adjustment seat is rotatably installed on the base, and the second adjustment seat is rotatably installed on the first adjustment seat. The second adjustment The seat is suitable for clamping the optical fiber, a first adjustment mechanism is provided between the base and the first adjustment seat, and a second adjustment mechanism is provided between the first adjustment seat and the second adjustment seat. By controlling the first adjustment mechanism, the first adjustment seat can be rotated around the base, and by controlling the second adjustment mechanism, the second adjustment seat can be rotated around the first adjustment seat. During the rotation process, the second adjustment seat carries the optical fiber to rotate and swing to adjust the angle of the optical fiber so that the receiving end of the optical fiber is aligned with the collimating and focusing lens to accurately receive the optical signal output by the chip.

2. In the optical fiber angle adjustment device provided by this application, the first adjustment mechanism includes a first rotation block rotatably installed on the base, a second rotation block rotatably installed on the first adjustment seat, and a first adjustment lever. The first adjustment The rod passes through the first rotating block and is connected to the second rotating block in a rotatable and anti-slip manner, and the first adjusting rod is threadedly connected to the first rotating block. By controlling the rotation of the first adjusting rod, under the action of the thread, the The second rotating block is far away from or close to the first rotating block, so as to realize the rotation of the first adjustment seat around the base. The thread control has high precision and can accurately control the rotation angle of the first adjustment seat. At the same time, the thread control can also perform automatic locking Tight, that is, after the angle of the first adjustment seat is adjusted, the first adjustment seat will not rotate under the action of the thread, that is, there is no need to fix the first adjustment seat, so that the whole device structure is simple and compact.

3. In the optical fiber angle adjustment device provided by this application, the second adjustment mechanism includes a third rotation block rotatably mounted on the first adjustment seat, a fourth rotation block and a second adjustment rod rotatably mounted on the second adjustment seat, and the second adjustment rod The two adjusting rods pass through the third rotating block and are connected to the fourth rotating block in a rotatable and anti-slip manner, and the second adjusting rod is threadedly connected to the third rotating block. By controlling the rotation of the second adjusting rod, under the action of the thread, The fourth rotating block can be kept away from or close to the third rotating block, and then the second adjusting seat can be rotated around the first adjusting seat. The thread control has high precision, and can accurately control the rotation angle of the second adjusting seat. At the same time, the thread control can also Automatic locking is possible, that is, after the angle of the second adjustment seat is adjusted, the second adjustment seat will not rotate under the action of the thread, that is, there is no need to fix the second adjustment seat to prevent the second adjustment The seat rotates, the whole device has a simple and compact structure, low cost, and is relatively convenient to manufacture and process.

4. In the optical fiber angle adjustment device provided in this application, the first adjustment mechanism further includes a third adjustment rod, and the second adjustment mechanism further includes a fourth adjustment rod, which can further control the rotation of the first adjustment seat and the second adjustment seat.

5. In the optical fiber angle adjustment device provided by this application, the first rotating block, the second rotating block, the third rotating block and the fourth rotating block are all installed in rotation. When the first adjusting seat rotates around the base, due to the first adjusting A certain angle will be formed between the seat and the base. If the first rotating block and the second rotating block are fixedly installed on the base and the first adjusting block, the adjusting rod will be bent with the rotation of the first adjusting seat. Even fracture; Similarly, when the second adjustment seat rotates around the first adjustment seat, since a certain angle will be formed between the second adjustment seat and the first adjustment seat, if the third rotating block and the fourth rotating block are fixedly installed on the second On the first adjustment seat and the second adjustment seat, along with the rotation of the second adjustment seat, the adjustment rod will be bent or even broken.

Description of drawings

In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the specific embodiments or prior art. Obviously, the accompanying drawings in the following description The figures show some implementations of the present application, and those skilled in the art can obtain other figures based on these figures without any creative effort.

FIG. 1 is a schematic structural diagram of an optical fiber angle adjustment device provided in an embodiment of the present application;

Fig. 2 is a schematic diagram of the connection of the first adjustment mechanism in the optical fiber angle adjustment device provided by the embodiment of the present application.

Explanation of reference signs:

1. The second adjustment seat; 2. The second rotating shaft; 3. The fourth rotating block; 4. The sixth rotating shaft; 5. The base; 6. The fourth adjusting rod; 7. The second adjusting rod; 8. The fifth rotating shaft ; 9, the third rotating block; 10, the first adjusting seat; 11, the second rotating block; 12, the fourth rotating shaft; 13, the first adjusting rod; 14, the third adjusting rod; 15, the first rotating block; 16 , the third rotating shaft; 17, the first rotating shaft.

Detailed ways

The technical solutions of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplification of the description, rather than indicating or implying that the referred device or element must have a specific orientation, use a specific orientation construction and operation, therefore should not be construed as limiting the application. In addition, the terms "first", "second", "third", "fourth", "fifth", and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

In the description of this application, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application in specific situations.

In addition, the technical features involved in the different embodiments of the present application described below may be combined as long as they do not constitute a conflict with each other.

Example 1

This embodiment provides a specific implementation of the optical fiber angle adjustment device, as shown in Figure 1 and Figure 2, it is suitable for being installed on the base 5 on the detection equipment, and the first adjustment seat is installed on the base 5 in rotation 10. The second adjustment seat 1 is rotatably installed on the first adjustment seat 10. The second adjustment seat 1 is suitable for clamping the optical fiber. There is a first adjustment mechanism between the base 5 and the first adjustment seat 10. The first adjustment seat A second adjustment mechanism is provided between 10 and the second adjustment seat 1 . By controlling the first adjustment mechanism, the first adjustment seat 10 can be rotated around the base 5, and by controlling the second adjustment mechanism, the second adjustment seat 1 can be rotated around the first adjustment seat 10. In the process of rotating with the second adjustment seat 1, the second adjustment seat 1 carries the optical fiber to rotate and swing to adjust the angle of the optical fiber, so that the receiving end of the optical fiber is aligned with the collimating and focusing lens to accurately receive the optical signal output by the chip .

Specifically, the base 5 is provided with a first rotating shaft 17, and the first adjusting seat 10 is rotatably mounted on the first rotating shaft 17; the first adjusting seat 10 is provided with a second rotating shaft 2, and the second adjusting seat 1 is rotatably mounted on the On the second rotating shaft 2, and the second rotating shaft 2 and the first rotating shaft 17 are arranged perpendicular to each other. In this embodiment, the first rotating shaft 17 is arranged vertically, and the second rotating shaft 2 is arranged horizontally.

Specifically, there is a mounting portion on the optical fiber, and a receiving end is provided on the mounting portion. The mounting portion of the optical fiber can receive the optical signal transmitted by the chip to be tested through the receiving end, and the mounting portion is clamped on the second adjustment seat 1, as shown in FIG. 1 , the cylindrical optical fiber installation part is clamped on the second adjustment seat 1, and the extension direction of the installation part is perpendicular to the second rotation axis 2 and the first rotation axis 17, so that the rotation of the first adjustment seat 10 and the second adjustment The rotation of the seat 1 corresponds to the adjustment of the swing angle and the elevation angle of the mounting part respectively. The horizontal plane where the installation part is located is perpendicular to the first rotating shaft 17, so that the first adjustment seat 10 can drive the second adjustment seat 1 and the installation part to adjust the horizontal swing angle, and the second adjustment seat 1 can drive the installation to adjust the vertical elevation angle. adjust.

Specifically, there is an installation space for installing optical fibers under the second adjustment seat 1, and the bottom of the second adjustment seat 1 is a partially disconnected structure. After clamping the optical fiber, screws need to be screwed in from the side to fasten the second adjustment seat 1 , to prevent the fiber from slipping out.

In this embodiment, the first adjusting mechanism includes a first rotating block 15 rotatably installed on the base 5, a second rotating block 11 rotatably installed on the first adjustment seat 10, and a first adjusting rod 13. The first adjusting rod 13 passes through the first rotating block 15 and is connected to the second rotating block 11 in a rotatable and non-sliding manner, and the first adjusting rod 13 is threadedly connected to the first rotating block 15. By controlling the rotation of the first adjusting rod 13, the threaded Under the action, the second rotating block 11 can be moved away from or close to the first rotating block 15, and then the first adjusting seat 10 can be rotated around the base 5. The thread control precision is higher, and the rotation angle of the first adjusting seat 10 can be accurately controlled. At the same time, the thread control can also be automatically locked, that is, after the angle of the first adjustment seat 10 is adjusted, the first adjustment seat 10 will not rotate under the action of the thread, that is, there is no need to adjust the first adjustment seat 10. 10 to fix, so that the whole device structure is simple and compact.

Specifically, the first adjustment mechanism also includes a third adjustment rod 14, the third adjustment rod 14 is threaded through the first rotation block 15 and the second rotation block 11, the third adjustment rod 14 and the first rotation block 15 are rotatable and Attached without slipping. As shown in Figure 2, a flange protrudes radially from the end of the first adjusting rod 13, which can be engaged in the second rotating block 11, and when the first adjusting rod 13 moves along the thread axis, it can drive the second The two rotating blocks 11 move together; the third adjusting rod 14 is provided with a wedge at the connection position with the first rotating block 15, and the wedge is nailed into the third adjusting rod 14, and the rod of the wedge and the third adjusting rod 14 The cap forms a clamping connection to the first rotating block 15, so that the first rotating block 15 moves along with the third adjusting rod 14, and when the third adjusting rod 14 moves along the thread axis, it can drive the first rotating block 15 to move together , during the adjustment process, the first rotating block 15 and the second rotating block 11 rotate relative to the base 5 and the first adjusting seat 10, and the first adjusting rod 13 and the third adjusting rod 14 maintain a parallel state.

The second adjusting mechanism includes the third rotating block 9 rotatably installed on the first adjusting seat 10, the fourth rotating block 3 rotatably installed on the second adjusting seat 1 and the second adjusting rod 7, the second adjusting rod 7 passes through The third rotating block 9 is connected to the fourth rotating block 3 in a rotatable and non-slip manner, and the second adjusting rod 7 is threadedly connected to the third rotating block 9. By controlling the rotation of the second adjusting rod 7, under the action of the thread, The fourth rotating block 3 can be kept away from or close to the third rotating block 9, and then the second adjusting seat 1 can be rotated around the first adjusting seat 10. The thread control precision is high, and the rotation angle of the second adjusting seat 1 can be precisely controlled. At the same time, the thread control can also be automatically locked, that is, after the angle of the second adjustment seat 1 is adjusted, the second adjustment seat 1 will not rotate under the action of the thread, that is, there is no need to adjust the second adjustment seat 1 again. It is fixed to prevent the second adjustment seat 1 from rotating. The whole device has a simple and compact structure, low cost, and is relatively convenient to manufacture and process.

The second adjusting mechanism also includes a fourth adjusting rod 6, the fourth adjusting rod 6 passes through the third rotating block 9 and is threadedly connected with the fourth rotating block 3, the fourth adjusting rod 6 and the third rotating block 9 are rotatable and anti-slip Connection, the connection method can refer to the connection method of the first adjustment mechanism.

In this embodiment, the first rotating block 15 is rotatably mounted on the base 5 through the third rotating shaft 16, the second rotating block 11 is rotatably mounted on the first adjustment seat 10 through the fourth rotating shaft 12, and the third rotating block 9 is rotatably mounted on the first adjustment base 10 through the fourth rotating shaft 12. The fifth rotating shaft 8 is rotatably installed on the first adjustment seat 10, and the fifth rotating shaft 8 and the fourth rotating shaft 12 are arranged perpendicular to each other. The fourth rotating block 3 is rotatably installed on the second adjusting seat 1 through the sixth rotating shaft 4. When the adjustment base 10 rotates around the base 5, since a certain angle will be formed between the first adjustment base 10 and the base 5, if the first rotating block 15 and the second rotating block 11 are fixedly installed on the base 5 and the first adjustment block, with the rotation of the first adjustment seat 10, the adjustment rod will be bent or even broken; similarly, when the second adjustment seat 1 rotates around the first adjustment seat 10, due to the second adjustment seat 1 and the first adjustment A certain angle will be formed between the seats 10. If the third rotating block 9 and the fourth rotating block 3 are fixedly installed on the first adjusting seat 10 and the second adjusting seat 1, then along with the rotation of the second adjusting seat 1, there will be Bending or even breaking the adjustment rod. This installation method can ensure that the first adjusting rod 13 and the third adjusting rod 14 , the second adjusting rod 7 and the fourth adjusting rod 6 are kept parallel and all are in a straight state during the fiber angle adjustment process.

As an alternative embodiment, the first adjustment mechanism and the second adjustment mechanism can also be set as springs or extension springs, by fixing the two ends of the spring or extension springs on the base 5 and the first adjustment seat 10 respectively, On the first adjustment seat 10 and the second adjustment seat 1 , the angles are controlled by the elastic force of the spring or extension spring.

In this embodiment, the mounting surfaces of the first rotating block 15 and the second rotating block 11 and the mounting surfaces of the third rotating block 9 and the fourth rotating block 3 are arranged perpendicular to each other. observe intuitively. As an alternative embodiment, the two mounting surfaces can also be set at an angle, and an irregular shape is used for the rotating block, so that the first adjusting rod 13 and the third adjusting rod 14, the second adjusting rod 7 and the fourth adjusting rod The rods 6 are kept parallel, and the first adjusting rod 13 is perpendicular to the second adjusting rod 7 .

Example 2

This embodiment provides a specific implementation of the chip detection equipment. The optical fiber angle adjustment device in Embodiment 1 is adopted, the base 5 is installed on the chip detection equipment, and the angle of the optical fiber is adjusted by the optical fiber angle adjustment device, so as to Align the receiving end of the optical fiber with the collimating and focusing lens, so that the optical fiber can accurately receive the optical signal transmitted by the chip to be detected.

Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. However, the obvious changes or variations derived therefrom are still within the scope of protection of the present invention.

Claims (10)

1. The optical fiber angle adjustment device is characterized in that it includes:

   The base (5) is suitable for being installed on the detection equipment;

   The first adjustment seat (10) is rotatably mounted on the base (5);

   The second adjustment seat (1) is rotatably mounted on the first adjustment seat (10), and the second adjustment seat (1) is suitable for clamping optical fibers;

   A first adjustment mechanism, arranged between the base (5) and the first adjustment seat (10), the first adjustment mechanism is suitable for adjusting the rotation angle of the first adjustment seat (10);

   The second adjustment mechanism is arranged between the first adjustment seat (10) and the second adjustment seat (1), and the second adjustment mechanism is suitable for adjusting the rotation angle of the second adjustment seat (1) .
2. The optical fiber angle adjustment device according to claim 1, wherein the optical fiber has an installation part, the installation part is suitable for receiving the optical signal transmitted by the chip to be tested, and the installation part is clamped on the second On the adjustment seat (1);

   The second adjustment seat (1) is suitable for driving the installation part to swing up and down along the vertical plane where the installation part is located;

   The first adjustment seat (10) is suitable for driving the second adjustment seat (1) and the installation part to swing left and right along the horizontal plane where the installation part is located, and the vertical plane and the horizontal plane are perpendicular to each other.
3. The optical fiber angle adjustment device according to claim 1, characterized in that it further comprises a first rotating shaft (17) installed on the base (5), and the first adjustment seat (10) is rotatably installed on the on the first rotating shaft (17);

   The second rotating shaft (2) is installed on the first adjusting seat (10), the second adjusting seat (1) is rotatably installed on the second rotating shaft (2), and the second rotating shaft (2) It is arranged perpendicular to the first rotating shaft (17).
4. The optical fiber angle adjustment device according to any one of claims 1-3, characterized in that, the first adjustment mechanism includes a first rotating block (15), and the first rotating block (15) is rotatably mounted on the on the base (5);

   A second rotating block (11), which is rotatably mounted on the first adjustment seat (10);

   The first adjusting rod (13) passes through the first rotating block (15) and is connected to the second rotating block (11) in a rotatable and non-sliding manner, and the first adjusting rod (13) is connected to the second rotating block (11). A rotating block (15) is threaded connection.
5. The optical fiber angle adjustment device according to claim 4, further comprising a third adjusting rod (14), threaded through the first rotating block (15) and the second rotating block (11), The third adjusting rod (14) is connected to the first rotating block (15) in a rotatable and anti-slip manner.
6. The optical fiber angle adjustment device according to claim 4, further comprising a third rotating shaft (16) and a fourth rotating shaft (12), the third rotating shaft (16) being installed on the base (5) , the first rotating block (15) is rotatably mounted on the third rotating shaft (16);

   The fourth rotating shaft (12) is installed on the first adjustment seat (10), and the second rotating block (11) is rotatably installed on the fourth rotating shaft (12).
7. The optical fiber angle adjustment device according to any one of claims 1-3, characterized in that, the second adjustment mechanism includes a third rotating block (9), and the third rotating block (9) is rotatably mounted on the on the first adjustment seat (10);

   The fourth rotating block (3) is rotatably mounted on the second adjustment seat (1);

   The second adjusting rod (7) passes through the third rotating block (9) and is connected to the fourth rotating block (3) in a rotatable and non-sliding manner, and the second adjusting rod (7) is connected to the first rotating block (9). Three rotating blocks (9) are threaded connections.
8. The optical fiber angle adjustment device according to claim 7, further comprising a fourth adjusting rod (6), threaded through the third rotating block (9) and the fourth rotating block (3), The fourth adjusting rod (6) is connected to the third rotating block (9) in a rotatable and anti-slip manner.
9. The optical fiber angle adjustment device according to claim 7, characterized in that it further comprises a fifth rotating shaft (8) and a sixth rotating shaft (4), and the fifth rotating shaft (8) is installed on the first adjustment seat (10 ), the third rotating block (9) is rotatably mounted on the fifth rotating shaft (8);

   The sixth rotating shaft (4) is installed on the second adjustment seat (1), and the fourth rotating block (3) is rotatably installed on the sixth rotating shaft (4).
10. The chip detection equipment is characterized by comprising the optical fiber angle adjustment device according to any one of claims 1-9.

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