CN216210098U - Optical fiber adjusting component - Google Patents

Abstract

The embodiment of the application discloses optic fibre adjusting part is convenient for satisfy the alignment and measure the adjustment demand to the incident position of light source, includes: the optical fiber adjusting device comprises an optical fiber mounting seat, an adjusting body seat, a base component and at least one adjusting component of a first direction adjusting component, a second direction adjusting component, a third direction adjusting component, an inclined plane adjusting component and a pitching plane adjusting component; the optical fiber mounting seat is used for loading the adjusting body seat, and the base component is used for bearing the adjusting body seat; the first direction adjusting component and the second direction adjusting component are respectively used for adjusting the relative positions of the optical fiber installation seat and the adjusting body seat in the first direction and the second direction; the third direction adjusting assembly is used for adjusting the relative position of the optical fiber mounting seat and the base assembly in the third direction; the inclined plane adjusting assembly and the pitching plane adjusting assembly are respectively used for adjusting a first angle and a second angle of the optical fiber mounting base relative to the base assembly.

Description

Optical fiber adjusting component

The present application claims priority from the chinese patent application entitled "an optical fiber adjusting assembly" filed at 5.7.2021 by the chinese patent office under the application number 202110760090.4, the entire contents of which are incorporated herein by reference.

Technical Field

The embodiment of the application relates to the field of semiconductors, in particular to an optical fiber adjusting assembly.

Background

With the continuous development of semiconductor technology, people put higher demands on measuring the wafer overlay error after photoetching, an overlay measurement technology (DBO) based on diffraction light detection is gradually replacing the traditional overlay measurement technology (IBO) based on imaging and image recognition to become the main technical means of overlay measurement, and a detection device for overlay measurement is also deeply studied.

A conventional detection device based on diffracted light includes a light source, a light source adjustment unit, an optical path device, and a detection unit. In order to meet the requirement of high-precision manufacturing process of the wafer, firstly, the light source adjusting component needs to perform azimuth adjustment such as offset and/or pitch on the detection light emitted by the light source so as to change the incident azimuth of the detection light to the lens barrel in the light path equipment, and then the light path equipment further processes the detection light and sends the processed detection light to the detection unit for overlay error measurement.

However, the adjustment of the light source to each incident direction by the conventional light source adjusting assembly is correlated, and when a certain incident direction of the light source needs to be adjusted, other incident directions are also unnecessarily changed due to the correlation, so that error terms such as mechanical errors or light source deviation are generated, and the accuracy of overlay measurement is influenced.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides an optical fiber adjusting component, which is convenient for meeting the adjustment requirement of alignment measurement on the incident direction of a light source.

An optical fiber adjusting assembly provided by the embodiment of the application comprises: the optical fiber adjusting device comprises an optical fiber mounting seat, an adjusting body seat, a base component and at least one adjusting component of a first direction adjusting component, a second direction adjusting component, a third direction adjusting component, an inclined plane adjusting component and a pitching plane adjusting component;

the optical fiber mounting seat is loaded in the adjusting body seat, and the base component is used for bearing the adjusting body seat;

the first direction adjusting component is arranged on the adjusting body seat and used for adjusting the relative position of the optical fiber mounting seat and the adjusting body seat in the first direction;

the second direction adjusting component is arranged on the adjusting body seat and used for adjusting the relative position of the optical fiber mounting seat and the adjusting body seat in a second direction, and the first direction is vertical to the second direction or has an acute included angle;

the third direction adjusting assembly is used for adjusting the relative position of the optical fiber mounting seat and the base assembly in a third direction, and the third direction is along the arrangement direction of the adjusting body seat and the base assembly;

one part of the inclined surface adjusting component is arranged on the adjusting body seat and used for adjusting a first angle of the optical fiber mounting seat relative to the base component around a first rotating axis;

and one part of the pitching surface adjusting component is arranged on the adjusting body seat and is used for adjusting a second angle of the optical fiber mounting seat relative to the base component around a second rotating axis, and the second angle is perpendicular to the first angle or has an acute included angle.

Optionally, the first direction adjusting assembly comprises a first adjusting bolt and a first limiting module;

the side surface of the adjusting body seat is oppositely provided with a first transverse hole and a first open slot in a first direction;

the first adjusting bolt penetrates through the first transverse hole to abut against the optical fiber mounting seat;

the first limiting module is arranged on the adjusting body seat through the first groove and matched with the first adjusting bolt to guide the optical fiber mounting seat to adjust the relative position of the adjusting body seat in the first direction.

Optionally, the optical fiber adjusting assembly further comprises: and the reset spring is positioned between the optical fiber mounting seat and the adjusting body seat and sleeved on the first adjusting bolt.

Optionally, the first limiting module comprises a first guide block and a first fixed block;

the first guide block is arranged in the first open slot, and the first guide block is fixed on the adjusting body seat by the first fixing block;

one end of the first guide block, which is close to the optical fiber mounting seat, is provided with a clamping groove, and the clamping groove is used for clamping the optical fiber mounting seat so as to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the first direction;

the extending direction of the clamping groove is the same as the first direction.

Optionally, the second direction adjusting assembly comprises a second adjusting bolt and a second limiting module;

a second transverse hole and a second open slot are oppositely arranged on the side surface of the adjusting body seat in the second direction;

the second adjusting bolt penetrates through the second transverse hole to be abutted against the optical fiber mounting seat;

the second limiting module is arranged on the adjusting body seat through the second groove and matched with the second adjusting bolt to guide the optical fiber mounting seat to adjust the relative position of the adjusting body seat in the second direction.

Optionally, the second limiting module comprises a second guide block and a second fixed block which are connected with each other;

the second guide block is arranged in the second groove, and the second guide block is fixed on the adjusting body seat by the second fixing block;

one end, close to the optical fiber mounting seat, of the second guide block is provided with a clamping groove, and the clamping groove is used for clamping the optical fiber mounting seat so as to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the second direction;

the extending direction of the clamping groove is the same as the second direction.

Optionally, the third direction adjusting assembly comprises a third adjusting bolt, one end of the third adjusting bolt is in threaded connection with the adjusting body seat, and the other end of the third adjusting bolt abuts against the base assembly;

the third adjusting bolt penetrates through a first vertical hole formed in the adjusting body seat, and the axial line of the first vertical hole is located on the mirror symmetry plane of the installation positions of the first direction adjusting assembly and the second direction adjusting assembly.

Optionally, the inclined surface adjusting assembly comprises a fourth adjusting bolt and a connecting piece, one end of the fourth adjusting bolt is in threaded connection with the adjusting body seat, and the other end of the fourth adjusting bolt abuts against the base assembly; two ends of the connecting piece are respectively connected with the adjusting body seat and the base component;

the fourth adjusting bolt penetrates through a second vertical hole formed in the adjusting body seat, the fourth adjusting bolt and the connecting piece are respectively located on two sides of the first direction adjusting assembly, and the inclined plane adjusting assembly is used for enabling the adjusting body seat and the optical fiber mounting seat to rotate around the first direction adjusting assembly relatively.

Optionally, the pitch surface adjustment assembly comprises a fifth adjustment bolt and a connector; the fifth adjusting bolt and the connecting piece are respectively positioned at two sides of the second direction adjusting component, and the pitching surface adjusting component is used for enabling the adjusting body seat and the optical fiber mounting seat to rotate relatively around the second direction adjusting component;

a fifth adjusting bolt penetrates through a third vertical hole formed in the adjusting body seat;

one end of the connecting piece is connected with the adjusting body seat, and the other end of the connecting piece is connected with the base component;

and the fifth adjusting bolt is matched with the connecting piece to adjust a second angle of the optical fiber mounting seat relative to the base component.

Optionally, the connecting member comprises a third direction adjustment assembly, or the connecting member is an elastic member.

Optionally, the connector comprises a tension spring;

the top of the tension spring is connected with the adjusting body seat, and the bottom of the tension spring is connected with the base component; the number of the tension springs is one or more.

Optionally, the base assembly includes a base and a lens barrel mount connected to the base;

the lens cone mounting seat is connected with the base in an adaptive manner through a concave-convex groove;

the lens cone mounting seat is provided with a lens cone mounting hole for mounting a fixing piece, and the fixing piece is used for fixing the lens cone.

Optionally, the base of the base component is provided with three limiting grooves for limiting the third direction adjusting component, the inclined plane adjusting component and the pitching plane adjusting component respectively; preferably, the limiting groove is three v-shaped limiting grooves.

Optionally, a first limiting step and a second limiting step are arranged on the side surface of the optical fiber mounting seat;

the first limiting step is in butt joint with a first guide block included by the first direction adjusting assembly;

the second limiting step is in butt joint with a second guide block included by the second direction adjusting assembly.

Optionally, the first direction adjusting assembly and/or the second direction adjusting assembly includes an anti-slip member, and the anti-slip member is disposed at one end of the first adjusting bolt and the second adjusting bolt close to the optical fiber mounting seat; preferably, the anti-slip means is a stainless steel plate.

Optionally, the base assembly is C-slot shaped, the C-slot being for mounting the polarizing wheel.

Optionally, the optical fiber mounting hole of the optical fiber mounting seat is used for mounting the light source component; preferably, the light source assembly is a fiber optic head assembly.

Optionally, the adjusting body seat and/or the base is provided with lightening holes.

According to the technical scheme, the embodiment of the application has the following advantages:

the optical fiber adjusting assembly of the embodiment of the application comprises: the optical fiber adjusting device comprises an optical fiber mounting seat, an adjusting body seat, a base component and at least one adjusting component of a first direction adjusting component, a second direction adjusting component, a third direction adjusting component, an inclined plane adjusting component and a pitching plane adjusting component; the optical fiber mounting seat is used for loading the adjusting body seat, the optical fiber mounting seat and the adjusting body seat can be regarded as the position relation of the inner periphery and the outer periphery, and the base component is used for bearing the adjusting body seat; the adjusting body seat is provided with a first direction adjusting component and a second direction adjusting component; a part of the third direction adjusting component, the inclined plane adjusting component and the pitching plane adjusting component is arranged on the adjusting body seat, and a part of the third direction adjusting component, the inclined plane adjusting component and the pitching plane adjusting component is arranged on the base component; the adjusting components are respectively and independently used for adjusting the optical fiber installation seat in different directions, namely the first direction adjusting component and the second direction adjusting component are respectively used for adjusting the relative positions of the optical fiber installation seat and the adjusting body seat in the first direction and the second direction, the third direction adjusting component is used for adjusting the relative positions of the optical fiber installation seat and the base component in the third direction, the inclined plane adjusting component and the pitching plane adjusting component are respectively used for adjusting the first angle and the second angle of the optical fiber installation seat relative to the base component, the adjusting processes of the optical fiber installation seat among the different adjusting components are independent, therefore, no relevance exists in the adjusting process of each incident direction of the light source, the accurate adjusting requirement of the alignment error measurement on the incident direction of the light source is met, and the detection accuracy of the wafer alignment error is improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art according to the drawings.

FIG. 1 is a schematic diagram of a fiber conditioning assembly according to an embodiment of the present application;

FIG. 2 is another schematic structural view of an optical fiber conditioning assembly according to an embodiment of the present application;

FIG. 3 is another schematic structural view of an optical fiber conditioning assembly according to an embodiment of the present application;

FIG. 4 is another schematic structural view of an optical fiber conditioning assembly according to an embodiment of the present application;

wherein the reference numerals are:

11. an optical fiber mount; 111. a first limit step; 112. a second limiting step; 113. an optical fiber mounting hole; 12. adjusting the body seat; 121. a first cross bore; 122. a first slot; 123. a second cross bore; 124. a second slot; 125. a first vertical hole; 126. a second vertical hole; 127. a third vertical hole; 13. a base assembly; 131. a base; 132. a lens barrel mount; 141. a first adjusting bolt; 142. a first limit module; 1421. a first guide block; 1422. a first fixed block; 151. a second adjusting bolt; 152. a second limit module; 1521. a second guide block; 1522. a second fixed block; 161. a third adjusting bolt; 171. a fourth adjusting bolt; 181. a fifth adjusting bolt; 19. a tension spring; 20. a lens barrel; 21. a limiting groove; 22. an anti-slip member; 23. lightening holes; 24. a lens barrel mounting hole.

Detailed Description

In order to make the technical solutions of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless explicitly stated or limited otherwise; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. Specific meanings of the above terms in the embodiments of the present application can be understood in specific cases by those of ordinary skill in the art.

The optical fiber adjusting assembly provided by the embodiment of the application comprises at least one of a first direction adjusting assembly, a second direction adjusting assembly, a third direction adjusting assembly, an inclined plane adjusting assembly and a pitching plane adjusting assembly. In one embodiment, in order to ensure that the optical fiber mounting seat can realize all-directional adjustment in five degrees of freedom, the optical fiber adjusting assembly comprises the five adjusting assemblies, but in the specific implementation process, the five adjusting assemblies can be combined randomly according to actual adjusting requirements to obtain an optical fiber adjusting assembly meeting the requirements.

For ease of understanding, embodiments of the fiber conditioning assembly provided herein are described in conjunction with fig. 1-4. In the embodiment of the present application, the light source is an optical fiber, and the optical fiber mounting hole 113 of the optical fiber mounting seat 11 is used for mounting the optical fiber. Optionally, the first direction, the second direction and the third direction are different moving directions, which can be understood to correspond to the x-direction, the y-direction and the z-direction shown in fig. 1, respectively, and the first direction is perpendicular to the second direction or has an acute included angle. The third direction is along the alignment direction of the adjustment body seat and the base assembly. Preferably, the first direction and the second direction are perpendicular to each other, and the third direction is a direction perpendicular to a plane in which the first direction and the second direction are located. It should be noted that the first rotation direction and the second rotation direction are different rotation directions, assuming that two axial lines perpendicular to each other of the base assembly 13 divide the cross section of the base assembly 13 into four regions (similar to four quadrant regions in a rectangular coordinate system), a direction from the upper half region to the lower half region (or from the lower half region to the upper half region) may be considered as the first rotation direction, and a direction from the left half region to the right half region (or from the right half region to the left half region) may be considered as the second rotation direction, and it should be noted that the rotation axis of the first rotation direction may not be one of the two axial lines, and may be a direction from one of the upper half region and the lower half region to the other region, and similarly, the second rotation direction may be a direction from one of the left half region and the right half region to the other region. For ease of understanding, reference may be made to: when a person holds a book with his right hand, the book is tilted by being deflected in the left-hand direction, and the book is tilted by being deflected in the face direction.

One embodiment of a fiber conditioning assembly provided herein includes:

the optical fiber adjusting component comprises an optical fiber mounting seat 11, an adjusting body seat 12, a base component 13, and at least one adjusting component of a first direction adjusting component, a second direction adjusting component, a third direction adjusting component, an inclined plane adjusting component and a pitching plane adjusting component; the optical fiber mounting seat 11 is used for being loaded in the adjusting body seat 12, and the two can be regarded as the position relation of the inner periphery and the outer periphery; the base assembly 13 is used for carrying the adjusting body seat 12; the adjusting body seat 12 is provided with a first direction adjusting component and a second direction adjusting component; the third direction adjusting element, the inclined plane adjusting element and the pitching plane adjusting element are partially installed on the adjusting body base 12 and partially installed on the base element 13.

The five adjusting assemblies have independent and corresponding effects on the optical fiber installation base 11, and specifically, the first direction adjusting assembly and the second direction adjusting assembly are respectively used for adjusting the relative positions of the optical fiber installation base 11 and the adjusting body base 12 in the first direction and the second direction; the third direction adjusting component is used for adjusting the relative position of the optical fiber mounting seat 11 and the base component 13 in the third direction; the inclined plane adjusting assembly and the pitching plane adjusting assembly are respectively used for adjusting a first angle of the optical fiber mounting seat 11 relative to the base assembly 13 around a first rotating axis and a second angle around a second rotating axis, wherein the second angle is perpendicular to the first angle or has an acute included angle; when any one of the first direction, the second direction, the third direction, the inclination and the pitching incidence direction of the optical fiber mounting base 11 needs to be adjusted, only the corresponding first direction adjusting assembly, the second direction adjusting assembly, the third direction adjusting assembly, the inclined plane adjusting assembly and the pitching plane adjusting assembly need to be adjusted. Because the five adjusting assemblies have independent and corresponding adjusting functions, the adjustment of different incidence directions has no relevance, so that five degrees of freedom are realized, namely, one adjusting assembly is adjusted, and the optical fiber mounting seat 11 does not need to be adjusted in other directions.

To sum up, the optical fiber adjusting assembly of the embodiment of the present application integrates adjusting assemblies related to five degrees of freedom under the cooperation of the optical fiber mounting seat 11, the adjusting body seat 12 and the base assembly 13, not only embodies the functional advantages of integral modularization, but also can perform independent adjustment of different incidence directions on the light source installed on the optical fiber mounting seat 11, and this kind of adjusting mode can avoid the influence of linkage adjustment on the alignment measurement precision, and meets the requirement of accurate adjustment of the alignment measurement on the incidence direction of the light source.

Referring to fig. 1 to 4, the first direction adjustment assembly and the second direction adjustment assembly are similar in arrangement and application, and the inclined plane adjustment assembly and the pitch plane adjustment assembly are similar in arrangement and application, and the five adjustment assemblies will be described in detail below.

The assembly is adjusted with respect to a first direction. In a specific implementation manner, the first direction adjustment assembly may include a first adjustment bolt 141 and a first limit module 142, the first adjustment bolt 141 may abut against one end of the optical fiber installation seat 11 by penetrating through the first transverse hole 121, and the first limit module 142 may abut against the other end of the optical fiber installation seat 11 by penetrating through the first slot 122. The optical fiber installation seat 11 is abutted by the first limiting module 142 and the first adjusting bolt 141 in two phases in the first direction, and can generate relative displacement in the first direction with the adjusting body seat 12; meanwhile, the first limiting module 142 is fixedly installed in the first slot 122 on the side surface of the adjusting body seat 12, so that the optical fiber installation seat 11 abutted against the first limiting module can be guided to move without deviating in the first direction. Therefore, under the cooperation of the first limiting module 142, the relative position of the optical fiber installation seat 11 and the adjusting body seat 12 in the first direction can be adjusted by tightening or loosening the first adjusting bolt 141.

In a specific implementation manner, the optical fiber adjusting assembly further comprises a return spring located between the optical fiber mounting seat and the adjusting body seat, and the return spring is sleeved on the first adjusting bolt.

In one embodiment, the first transverse hole 121 and the first slot 122 are opened at the side opposite positions of the adjusting body seat 12 to provide the best assistance for the cooperation of the first limiting module 142 and the first adjusting bolt 141, so as to facilitate the first-direction movement of the optical fiber installation seat 11 with guiding non-offset rail.

In a specific implementation manner, the first limiting module 142 may include a first guide block 1421 and a first fixing block 1422, the first guide block 1421 is a spring block, the spring block includes two spring posts at the tail for clamping the first fixing block 1422, and the first fixing block 1422 may fix the first guide block 1421 in the first slot 122 by clamping the two spring posts. First adjusting bolt 141 butt optical fiber mount pad 11's one end, first guide block 1421 then passes through the joint groove joint optical fiber mount pad 11 other end, and wherein, the extending direction and the first direction syntropy in this joint groove, the joint groove is seted up and is being close the one end of optical fiber mount pad 11 at first guide block 1421 for under the cooperation of joint effect, transfer first adjusting bolt 141, the aversion of first direction can be done to optical fiber mount pad 11. The optical fiber installation seat 11 is abutted by the first guide block 1421 and the first adjusting bolt 141 in two phases in the first direction, and can generate relative displacement with the adjusting body seat 12 in the first direction; meanwhile, the first guide block 1421 is fixedly installed in the first slot 122, so that it can guide the optical fiber installation seat 11 abutted thereto to move without deviating from the rail in the first direction. Therefore, the relative position of the optical fiber installation base 11 to the adjustment body base 12 in the first direction can be adjusted by tightening or loosening the first adjustment bolt 141 in cooperation with the first guide block 1421.

In a specific implementation manner, the base assembly 13 includes a base 131 and a lens barrel mounting seat 132 connected to the base 131, optionally, the lens barrel mounting seat 132 is provided with a lens barrel mounting hole 24, and the lens barrel mounting seat 132 and the lens barrel 20 are provided with a mechanical docking position, for example, corresponding concave-convex slots are provided to couple the lens barrel mounting seat 132 and the lens barrel 20 together in a fitting manner, and the lens barrel mounting seat 132 and the lens barrel 20 are fastened by a fixing member, such as a bolt, inserted through the lens barrel mounting hole 24. In a specific implementation manner, the base 131 of the base assembly 13 is provided with a limiting groove 21 for preventing the third adjusting bolt 161, the fourth adjusting bolt 171, or the fifth adjusting bolt 181 from deviating when being loosened, and optionally, the limiting groove 21 is a v-shaped limiting groove 21 or a groove with another shape. In a specific implementation manner, a first limiting step 111 and a second limiting step 112 are disposed on a side surface of the optical fiber mounting seat 11, the first limiting step 111 is in butt joint with a first guide block 1421 included in the first direction adjusting assembly, and the second limiting step 112 is in butt joint with a second guide block 1521 included in the second direction adjusting assembly, and is used for clamping positions of the optical fiber mounting seat 11 in the first direction and the second direction respectively. In a specific implementation manner, the first direction adjustment assembly and/or the second direction adjustment assembly includes a slip-preventing member 22 for preventing the first adjustment bolt 141 and the second adjustment bolt 151 from colliding against the optical fiber installation seat 11 to cause slipping, the slip-preventing member 22 is disposed at one end of the first adjustment bolt 141 and the second adjustment bolt 151 close to the optical fiber installation seat 11, and the slip-preventing member 22 is preferably a stainless steel plate. The optical fiber installation hole 113 of the optical fiber installation base 11 is used for installing the light source assembly. In one embodiment, the adjustment body seat 12 and/or the base 131 may be provided with lightening holes 23. One end of the third adjusting bolt is connected with the adjusting body seat through threads, and the other end of the third adjusting bolt is abutted to the base component.

The assembly is adjusted with respect to the second direction. In a specific implementation manner, the second direction adjustment assembly may include a second adjustment bolt 151 and a second limiting module 152, the second adjustment bolt 151 may abut against one end of the optical fiber installation seat 11 by penetrating through the second transverse hole 123, and the second limiting module 152 may abut against the other end of the optical fiber installation seat 11 by penetrating through the second slot 124. The optical fiber installation seat 11 is abutted by the second limiting module 152 and the second adjusting bolt 151 in the second direction, and can generate relative displacement with the adjusting body seat 12 in the second direction; meanwhile, the second limiting module 152 is fixedly installed in the second slot 124 on the side surface of the adjusting body seat 12, so that the second limiting module can guide the optical fiber installation seat 11 abutted against the second limiting module to move in the second direction without deviating from the rail. Therefore, the relative position of the optical fiber installation seat 11 and the adjusting body seat 12 in the second direction can be adjusted by tightening or loosening the second adjusting bolt 151 in cooperation with the second limiting module 152.

In one embodiment, the second cross hole 123 and the second slot 124 are opened at the side face of the adjusting body seat 12 for providing the best assistance for the cooperation of the second limiting module 152 and the second adjusting bolt 151, so as to facilitate the second-direction movement of the optical fiber installation seat 11 with guiding non-offset rail.

In a specific implementation manner, the second limiting module 152 may include a second guide block 1521 and a second fixing block 1522, in a specific implementation manner, the second guide block 1521 is a spring block, the spring block includes two spring posts at a tail portion for being clamped with the second fixing block 1522, and the second fixing block 1522 may fix the second guide block 1521 in the second slot 124 by being clamped with the two spring posts. Second adjusting bolt 151 butt optical fiber mount pad 11's one end, second guide block 1521 then passes through the joint groove joint optical fiber mount pad 11 other end, and wherein, the extending direction in here joint groove is with the second direction syntropy, and the joint groove is seted up in the one end that second guide block 1521 is close optical fiber mount pad 11 for under the cooperation of joint effect, transfer second adjusting bolt 151, the aversion of second direction can be done to optical fiber mount pad 11. The optical fiber installation seat 11 is abutted by the second guide block 1521 and the second adjusting bolt 151 in the second direction, and can generate relative displacement with the adjusting body seat 12 in the second direction; meanwhile, the second guide block 1521 is fixedly installed in the second slot 124, so that it can guide the optical fiber installation seat 11 abutted thereto to move without deviating from the rail in the second direction. Therefore, the relative position of the optical fiber installation base 11 and the adjustment body base 12 in the second direction can be adjusted by tightening or loosening the second adjustment bolt 151 in cooperation with the second guide block 1521.

In a specific implementation manner, due to the cooperation of the first limiting module 142 and the first slot 122 and the abutment of the first adjusting bolt 141 on the optical fiber installation base 11, the relative position of the optical fiber installation base 11 in the first direction and the adjusting body base 12 can be limited, that is, the optical fiber installation base 11 is fixed and limited in the first direction, so that the optical fiber installation base 11 cannot be moved in the first direction by tightening or loosening the second adjusting bolt 151; similarly, the second limiting module 152 and the second slot 124 are matched, and the second adjusting bolt 151 abuts against the optical fiber mounting base 11, so that the first adjusting bolt 141 cannot move in the second direction for the optical fiber mounting base 11.

The assembly is adjusted with respect to a third direction. In one specific implementation, the third direction adjustment assembly includes a third adjustment bolt 161, one end of which is threadedly connected to the adjustment body seat and the other end of which abuts against the base assembly. In a specific implementation manner, the third direction adjusting assembly may further include a tension spring 19, and the third adjusting bolt 161 penetrates through the first vertical hole 125 formed in the adjusting body seat 12; the tension spring 19 connects the adjusting body base 12 through one end and connects the base assembly 13 through the other end, so that the adjusting body base 12 and the base assembly 13 are connected up and down, and the third adjusting bolt 161 can be used to adjust the lifting of the adjusting body base 12 in the third direction. It should be noted that the number of the tension springs 19 may be one or more. Optionally, in order to achieve a good lifting effect, the tension springs 19 are located at the position opposite to the third adjusting bolt 161 when one tension spring is provided; when two tension springs 19 are provided, the tension springs and the third adjusting bolt 161 are respectively arranged at intervals of 120 degrees; when there are three tension springs 19, the three tension springs 19 and the third adjusting bolt 161 are respectively arranged at intervals of 90 degrees according to the circumference of the adjusting body seat 12; when there are four tension springs 19, refer to fig. 4, two of the tension springs are disposed adjacent to the third adjusting bolt 161 at an interval of 120 degrees, or are respectively close to the fourth adjusting bolt 171 and the fifth adjusting bolt 181, the other two tension springs are disposed at left and right positions of the third adjusting bolt 161, and in addition, notches for accommodating the four tension springs 19 may be correspondingly formed on the adjusting body seat 12 and the base 131.

The first vertical hole 125 is located on the mirror symmetry plane of the installation positions of the first limit module 142 in the first direction adjustment assembly and the second limit module 152 in the second direction adjustment assembly, which can be understood as the installation positions of the first limit module and the second limit module are separated by 120 degrees, so that the arrangement is considered to provide a better lifting adjustment effect for adjusting the body base 12 and the optical fiber installation base 11 associated with the body base.

Because the optical fiber installation seat 11 is clamped and fixed by the first direction adjusting component and the second direction adjusting component, the optical fiber installation seat is limited on the adjusting body seat 12 in the first direction and the second direction; therefore, adjusting the third adjusting bolt 161, the body 12 is adjusted to move up and down under the cooperation of the tension spring 19, and the optical fiber installation seat 11 is further driven to move up and down, i.e. the relative position of the optical fiber installation seat 11 and the base assembly 13 in the third direction is adjusted.

In the embodiment of the present invention, since the optical fiber mount 11 is clamped in the first direction and the second direction, the optical fiber mount 11 is not displaced in the first direction and the second direction by tightening or loosening the third adjusting bolt 161, the fourth adjusting bolt 171, or the fifth adjusting bolt 181.

Regarding the incline plane adjustment assembly. In a specific implementation manner, the inclined plane adjusting assembly comprises a fourth adjusting bolt 171 and a connecting piece, optionally, the connecting piece is a tension spring 19, one end of the third adjusting bolt is connected with the adjusting body seat through a thread, and the other end of the third adjusting bolt abuts against the base assembly; two ends of the connecting piece are respectively connected with the adjusting body seat and the base component; fourth adjusting bolt 171 runs through the second vertical hole 126 that regulation body seat 12 was seted up, and the axial line of second vertical hole 126 and the symmetrical center line of first spacing module 142 in the first direction adjusting part and the two mounted positions of the spacing module 152 of second in the second direction adjusting part have the predetermined contained angle, more accurately, fourth adjusting bolt and connecting piece are located first direction adjusting part both sides respectively, inclined plane adjusting part is used for making regulation body seat and optic fibre mount pad wind first direction adjusting part relative rotation. This is set to take into account: when the first vertical hole 125 is disposed on the center line of symmetry, a better lifting adjustment effect can be achieved, if the second vertical hole 126 does not have a predetermined included angle with the first vertical hole 125, the fourth adjusting bolt 171 is easily loosened and loosened to achieve an effect similar to that of the lifting adjustment of the body seat 12 by the fourth adjusting bolt 171, rather than the inclined adjustment of the body seat 12.

In one specific implementation, referring to fig. 4, four tension springs 19 are connected to the adjusting body base 12 at one end and to the base assembly 13 at the other end, and can cooperate with a fourth adjusting bolt 171 to adjust a first angle of the adjusting body base 12 and the optical fiber installation base 11 associated therewith; it should be understood that, by adjusting the number and direction of rotation of the fourth adjusting bolt 171, the adjusting body seat 12 and the optical fiber installation seat 11 therewith can be regarded as tilting about the first adjusting bolt 141, wherein the tension spring near the fourth adjusting bolt 171 is compressed or expanded correspondingly to provide a main fit for tilting, and the other three tension springs provide a tilting aid.

The assembly is adjusted with respect to the pitch plane. In a specific implementation, the pitching surface adjusting assembly comprises a fifth adjusting bolt 181 and a connecting member, optionally, the connecting member is a tension spring 19; and the pitching surface adjusting assembly is used for enabling the adjusting body seat and the optical fiber mounting seat to rotate relatively around the second direction adjusting assembly. The fifth adjusting bolt 181 penetrates through the third vertical hole 127 formed in the adjusting body seat 12, and it can be understood that a preset included angle exists between an axial line of the third vertical hole 127 and a symmetric center line of mounting positions of both the first limiting module 142 in the first direction adjusting assembly and the third limiting module in the second direction adjusting assembly, and it should be noted that the included angle here is different from the included angle of the second vertical hole 126 described above, that is, if an inclined plane adjusting assembly and a pitching plane adjusting assembly are simultaneously provided, the mounting position of the third vertical hole 127 is not the same as the mounting position of the second vertical hole 126 described above, but a preset angle exists, and the preset angle is any angle value in an interval range [90, 180 ], and is optimal as 90 degrees; it can be understood that when the inclined plane adjusting component and the pitching plane adjusting component exist simultaneously, the preset angle between the installation positions of the inclined plane adjusting component and the pitching plane adjusting component can enable the inclined plane adjusting component and the pitching plane adjusting component of the embodiment of the application to have independent and corresponding positioning functions, and the relevance does not exist, so that the change of other incidence directions caused by adjusting one of the adjusting components can be avoided.

In a specific implementation manner, the connecting member includes the third direction adjusting assembly, or the connecting member is an elastic member. The top of the tension spring is connected with the adjusting body seat, and the bottom of the tension spring is connected with the base component; the number of the tension springs is one or more.

In one specific implementation, referring to fig. 4, the tension spring 19 is connected to the adjusting body base 12 at one end and connected to the base assembly 13 at the other end, and can cooperate with the fifth adjusting bolt 181 to adjust the second angle of the adjusting body base 12 and the optical fiber installation base 11 associated therewith; it can be specifically understood that, by adjusting the number of revolutions and the turning direction of the fifth adjusting bolt 181, the adjusting body seat 12 and the optical fiber installation seat 11 associated therewith can be regarded as a pitch taking the second adjusting bolt 151 as an axis, wherein the tension spring near the fifth adjusting bolt 181 is correspondingly compressed or expanded by adjusting the fifth adjusting bolt 181 to provide a main fit for the pitch, and the other three tension springs provide a pitch assist.

The above examples are only for illustrating the technical solutions of the present application, and are not limited thereto.

Claims (12)

1. An optical fiber conditioning assembly, comprising: the optical fiber adjusting device comprises an optical fiber mounting seat, an adjusting body seat, a base component and at least one adjusting component of a first direction adjusting component, a second direction adjusting component, a third direction adjusting component, an inclined plane adjusting component and a pitching plane adjusting component;

the optical fiber mounting seat is loaded in the adjusting body seat, and the base assembly is used for bearing the adjusting body seat;

the first direction adjusting component is arranged on the adjusting body seat and used for adjusting the relative position of the optical fiber mounting seat and the adjusting body seat in the first direction;

the second direction adjusting component is arranged on the adjusting body seat and used for adjusting the relative position of the optical fiber mounting seat and the adjusting body seat in a second direction, and the first direction is perpendicular to the second direction or has an acute included angle;

the third direction adjusting component is used for adjusting the relative position of the optical fiber installation seat and the base component in a third direction, and the third direction is along the arrangement direction of the adjusting body seat and the base component;

a part of the inclined surface adjusting component is arranged on the adjusting body seat and is used for adjusting a first angle of the optical fiber mounting seat relative to the base component around a first rotating axis;

and one part of the pitching surface adjusting component is arranged on the adjusting body seat and is used for adjusting a second angle of the optical fiber mounting seat relative to the base component around a second rotating axis, and the second angle is perpendicular to the first angle or has an acute included angle.

2. The fiber optic adjustment assembly of claim 1, wherein the first direction adjustment assembly includes a first adjustment bolt and a first stop module;

a first transverse hole and a first open slot are oppositely arranged on the side surface of the adjusting body seat in the first direction;

the first adjusting bolt penetrates through the first transverse hole to abut against the optical fiber mounting seat;

the first limiting module is arranged on the adjusting body seat through the first groove and matched with the first adjusting bolt to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the first direction.

3. The fiber optic conditioning assembly of claim 2, further comprising: and the reset spring is positioned between the optical fiber mounting seat and the adjusting body seat and sleeved on the first adjusting bolt.

4. The fiber optic adjustment assembly of claim 2, wherein the first restraint module includes a first guide block and a first retention block;

the first guide block is arranged in the first groove, and the first guide block is fixed on the adjusting body seat by the first fixing block;

one end, close to the optical fiber mounting seat, of the first guide block is provided with a clamping groove, and the clamping groove is used for clamping the optical fiber mounting seat so as to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the first direction;

the extending direction of the clamping groove is the same as the first direction.

5. The fiber optic adjustment assembly of claim 1, wherein the second orientation adjustment assembly includes a second adjustment bolt and a second stop block;

a second transverse hole and a second open slot are oppositely arranged on the side surface of the adjusting body seat in the second direction;

the second adjusting bolt penetrates through the second transverse hole to abut against the optical fiber mounting seat;

the second limiting module is arranged on the adjusting body seat through the second groove and matched with the second adjusting bolt to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the second direction.

6. The fiber optic conditioning assembly of claim 5, wherein the second restraint module includes a second guide block and a second fixed block coupled thereto;

the second guide block is arranged in the second groove, and the second guide block is fixed on the adjusting body seat by the second fixing block;

one end, close to the optical fiber mounting seat, of the second guide block is provided with a clamping groove, and the clamping groove is used for clamping the optical fiber mounting seat so as to guide the optical fiber mounting seat to adjust the relative position of the optical fiber mounting seat and the adjusting body seat in the second direction;

the extending direction of the clamping groove is the same as the second direction.

7. The fiber optic conditioning assembly of claim 1, wherein the third directional adjustment assembly includes a third adjustment bolt having one end threadably coupled to the conditioning body housing and an opposite end abutting the base assembly;

the third adjusting bolt penetrates through a first vertical hole formed in the adjusting body seat, and the axial line of the first vertical hole is located on the mirror symmetry plane of the mounting positions of the first direction adjusting assembly and the second direction adjusting assembly.

8. The fiber optic conditioning assembly of claim 1, wherein the angled face conditioning assembly includes a fourth conditioning bolt and a connector, the fourth conditioning bolt having one end threadably coupled to the conditioning body housing and an opposite end abutting the base assembly; two ends of the connecting piece are respectively connected with the adjusting body seat and the base component;

the fourth adjusting bolt penetrates through a second vertical hole formed in the adjusting body seat, the fourth adjusting bolt and the connecting piece are respectively located on two sides of the first direction adjusting assembly, and the inclined surface adjusting assembly is used for enabling the adjusting body seat and the optical fiber installation seat to rotate around the first direction adjusting assembly relatively.

9. The fiber optic adjustment assembly of claim 7, wherein the pitch adjustment assembly includes a fifth adjustment bolt and a connector; the fifth adjusting bolt and the connecting piece are respectively positioned at two sides of the second direction adjusting component, and the pitching surface adjusting component is used for enabling the adjusting body seat and the optical fiber mounting seat to rotate relatively around the second direction adjusting component;

the fifth adjusting bolt penetrates through a third vertical hole formed in the adjusting body seat;

one end of the connecting piece is connected with the adjusting body seat, and the other end of the connecting piece is connected with the base component;

and the fifth adjusting bolt is matched with the connecting piece to adjust a second angle of the optical fiber mounting seat relative to the base component.

10. The fiber optic adjustment assembly of claims 8 or 9, wherein the connector comprises the third direction adjustment assembly or the connector comprises an elastic member.

11. The fiber optic conditioning assembly of claims 8 or 9, wherein the connector comprises a tension spring;

the top of the tension spring is connected with the adjusting body seat, and the bottom of the tension spring is connected with the base component; the number of the tension springs is one or more.

12. The fiber optic adjustment assembly of claim 1, wherein the base assembly includes a base and a barrel mount coupled to the base;

the lens cone mounting seat is connected with the base in an adaptive manner through a concave-convex groove;

the lens cone mounting seat is provided with a lens cone mounting hole for mounting a fixing piece, and the fixing piece is used for fixing the lens cone.

Images