CN111948781A - Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment - Google Patents

Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment Download PDF

Info

Publication number
CN111948781A
CN111948781A CN202010662759.1A CN202010662759A CN111948781A CN 111948781 A CN111948781 A CN 111948781A CN 202010662759 A CN202010662759 A CN 202010662759A CN 111948781 A CN111948781 A CN 111948781A
Authority
CN
China
Prior art keywords
adjusting
plate
seat
screw
adjusting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010662759.1A
Other languages
Chinese (zh)
Other versions
CN111948781B (en
Inventor
张兆会
韩亚娟
李立波
李思远
王春来
胡炳樑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XiAn Institute of Optics and Precision Mechanics of CAS
Original Assignee
XiAn Institute of Optics and Precision Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XiAn Institute of Optics and Precision Mechanics of CAS filed Critical XiAn Institute of Optics and Precision Mechanics of CAS
Priority to CN202010662759.1A priority Critical patent/CN111948781B/en
Publication of CN111948781A publication Critical patent/CN111948781A/en
Application granted granted Critical
Publication of CN111948781B publication Critical patent/CN111948781B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention provides an off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment, and solves the problems of poor stability and single reflector freedom adjustment existing in the support of a large relative aperture reflector. The mechanism comprises an off-axis reflector, a mirror seat, an adjusting plate and a supporting seat; the mirror base comprises a base body, a groove arranged on the front end surface of the base body, a plurality of pressing plates used for pressing the off-axis reflecting mirror in the groove, a plurality of bonding columns arranged in the groove and a plurality of supporting columns; the top end of each bonding column is provided with an adhesive; the adjusting plate is connected with the rear end face of the seat body through a plurality of first adjusting units; the first adjusting unit comprises a jacking screw assembly for adjusting the distance between the adjusting plate and the base body and a locking and tensioning screw assembly for fixing the adjusting plate and the base body; the supporting seat is a hollow frame body structure sleeved on the outer sides of the seat body and the adjusting plate; the supporting seat is connected with the side face of the adjusting plate through a second adjusting unit, and the second adjusting unit is used for adjusting the adjusting plate to move horizontally in the vertical and horizontal directions.

Description

Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment
Technical Field
The invention relates to an off-axis reflector mechanism, in particular to an off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment.
Background
The optical system of the hyperspectral imager generally consists of a preposed imaging objective lens, a collimating objective lens, a light splitting system, an imaging objective lens and a detector. The pre-imaging objective lens images a ground target object on an incident slit of the light splitting system, the light is split by the light splitting system to separate one-dimensional spectral information, and slit images of various wave bands are imaged on a detector by the imaging objective lens to obtain spatial information and spectral information of the target object. The pre-imaging objective lens plays a role in imaging a ground target on an object plane of the collimation-dispersion-imaging system in the system.
The front-mounted imaging objective lens is a key element for realizing an ultra-wide field of view of the hyperspectral imager, and the structural type of the front-mounted imaging objective lens can be divided into the following three types: refractive, catadioptric and reflective. The first two structural types contain transmission materials, so that the optical fiber is not suitable for a broadband system, a reflective structure is preferably considered, the reflective structure system does not generate chromatic aberration, has good heat resistance and is suitable for light weight, and the aberration can be corrected by utilizing an aspheric surface or a free-form surface, so that the system has a simple structure and excellent image quality. The two-mirror, three-mirror and multi-mirror systems can all realize ultra-wide field of view design. Because the optical system requires a large field of view, the general two-mirror optical system has poor off-axis point imaging quality. In recent years, free-form optical elements have brought more design freedom to two-mirror optical systems, and effectively improve the imaging quality of the systems.
The development of the front-end imaging objective is closely related to the development of the spectral imaging technology, and the hyperspectral imager requires to continuously improve the relative aperture in order to obtain more energy so as to improve the spectral resolution and the spatial resolution of the hyperspectral imager. Meanwhile, research and development of hyperspectral imagers based on the Offner relay system have been increasingly conducted in order to make the aberration of the system small and compact.
The Offner hyperspectral imaging system has the advantages of symmetry, compact structure, good image quality, low distortion and the like. The width of the slit determines the spectral resolution of the system; the narrower the slit, the higher the spectral resolution of the system, but the reduced energy entering the slit requires that the detector response sensitivity must be increased, which increases the cost of the detector. In this case, increasing the numerical aperture of the system is an effective way to increase the energy collection capability of the system and reduce the cost of the detector, and designers desire to increase the numerical aperture of the Offner-type spectral imager. However, the problem cannot be completely solved only by increasing the numerical aperture of the hyperspectral imaging system, and the real purpose can be achieved only by increasing the numerical aperture of the front-end imaging objective matched with the hyperspectral imaging system. The development of the preposed imaging objective with large relative aperture becomes a necessary condition for the development of the slit-type hyperspectral imager, and has important significance for the deep research of the slit-type hyperspectral imager.
The support of speculum in leading formation of image objective mainly adopts single back or radial fixed stay at present, or designs complicated gentle festival structure and realize switching fixed stay, nevertheless to the support of big relative aperture speculum, its poor stability to and the degree of freedom adjustment of speculum is comparatively single.
Disclosure of Invention
The invention provides an off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment, and aims to solve the technical problems of poor stability and single reflector freedom adjustment in the existing support of a reflector with a large relative aperture.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
an off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment is characterized in that: comprises an off-axis reflector, a mirror seat, an adjusting plate and a supporting seat;
the mirror base comprises a base body, a groove which is arranged on the front end face of the base body and is matched with the bottom of the off-axis reflector in shape, a plurality of pressing plates which are arranged on the periphery of the groove, a plurality of bonding columns and a plurality of supporting columns which are arranged on the inner bottom surface of the groove; the top end of each bonding column is provided with an adhesive, and the total height of the bonding columns and the adhesive is equal to the height of the support column; one end of each compression plate is connected with the base body, the other end of each compression plate is used for compressing and fixing the off-axis reflector in the groove, and a gap is formed between the side surface of the off-axis reflector and the groove wall of the groove;
the adjusting plate is connected with the rear end face of the seat body through a plurality of first adjusting units;
each first adjusting unit comprises a jacking screw assembly and a locking tensioning screw assembly; the jacking screw assembly is arranged on the adjusting plate, the front end of the jacking screw assembly abuts against the rear end face of the seat body, and the jacking screw assembly is used for adjusting the distance between the adjusting plate and the seat body; the locking and tensioning screw assembly comprises a locking and tensioning screw penetrating through a through hole in the adjusting plate, and the front end of the locking and tensioning screw is in threaded connection with the rear end face of the seat body and is used for fixing the adjusting plate and the seat body;
the supporting seat is a hollow frame body structure sleeved on the outer sides of the seat body and the adjusting plate, and the left side and the right side of the lower end of the supporting seat are both provided with connecting lug seats; the supporting seat is connected with the side face of the adjusting plate through a second adjusting unit;
the second adjusting unit is arranged on the supporting seat and used for adjusting the adjusting plate to move horizontally in the up-down direction and the left-right direction.
Furthermore, the jacking screw assembly comprises an external compression spring, a pressing plate, a moving column with a ball socket, an adjusting bracket and a jacking screw which are sequentially arranged from front to back;
the rear end surface of the seat body is provided with an outer spring seat which is an annular groove;
the adjusting plate is provided with a step through hole which comprises a first through hole and a second through hole, wherein the diameters of the first through hole and the second through hole are sequentially reduced from front to back;
the pressing plate is arranged in the first through hole, the front end face of the pressing plate is provided with an annular outer spring support extending into the outer spring seat, and the rear end face of the pressing plate is provided with an adjusting ball head;
the outer pressure spring is arranged in the annular groove, the front end of the outer pressure spring is limited by the bottom surface of the annular groove, and the rear end of the outer pressure spring is sleeved on the annular outer spring support;
the moving column with the ball socket is arranged in the second through hole, and the ball socket at the front end is arranged on the adjusting ball head;
the adjusting support is fixed on the rear end face of the adjusting plate, a threaded hole is formed in the adjusting support, and the jacking screw penetrates through the threaded hole and abuts against the rear end face of the moving column.
Furthermore, the jacking screw assembly also comprises an inner compression spring coaxially arranged in the outer compression spring;
the rear end face of the seat body is provided with an inner spring seat which is a cylindrical groove;
the front end surface of the pressing plate is provided with an inner spring column extending into the inner spring seat;
the inner pressure spring is arranged in the cylindrical groove, the front end of the inner pressure spring is limited through the bottom surface of the cylindrical groove, and the rear end of the inner pressure spring is sleeved on the inner spring column.
Furthermore, the rear end face of the seat body is provided with a plurality of connecting tables, the number of the connecting tables is equal to that of the jacking screw assemblies, and the connecting tables correspond to the jacking screw assemblies in position one by one;
the inner spring seat and the outer spring seat are both arranged on the rear end face of the connecting table.
Further, the adjusting plate is of a rectangular structure;
the number of the first adjusting units is 4, and the 4 first adjusting units are arranged at four corners of the adjusting plate in a rectangular shape.
Furthermore, the supporting seat is of a rectangular hollow frame structure and comprises a left supporting plate, a lower supporting plate, a right supporting plate and an upper supporting plate which are sequentially connected end to end;
the second adjusting unit comprises a left-right adjusting component and an up-down adjusting component;
the left and right adjusting component comprises a left adjusting screw and a right adjusting screw which are symmetrically arranged, the left adjusting screw is arranged on the left supporting plate, and the inner end surface of the left adjusting screw abuts against the left end surface of the adjusting plate; the right adjusting screw is arranged on the right supporting plate, and the inner end surface of the right adjusting screw abuts against the right end surface of the adjusting plate;
the upper and lower adjusting components comprise upper adjusting screws and lower adjusting screws which are symmetrically arranged, the upper adjusting screws are arranged on the upper supporting plate, and the inner end surface of the upper adjusting screws is abutted against the upper end surface of the adjusting plate; the lower adjusting screw is arranged on the lower supporting plate, and the inner end face of the lower adjusting screw abuts against the lower end face of the adjusting plate.
Furthermore, the position of the left end surface of the adjusting plate matched with the left adjusting screw, the position of the right end surface of the adjusting plate matched with the right adjusting screw, the position of the upper end surface of the adjusting plate matched with the upper adjusting screw and the position of the lower end surface of the adjusting plate matched with the lower adjusting screw are provided with positioning grooves.
Further, the locking tensioning screw assembly further comprises a spherical washer disposed on the locking tensioning screw;
the range of a gap between the side surface of the off-axis reflector and the groove is 0.06-0.15mm, and the gap is filled with adhesive.
Further, the side of the connecting table is provided with an open slot for reducing stress.
Furthermore, a central through hole is formed at the bottom of the groove of the seat body; the middle part of the adjusting plate is provided with a hexagonal lightening hole;
the number of the bonding columns is 4, the bonding columns are uniformly distributed on the periphery of the central through hole, the diameter of the bonding column top end adhesive is 20mm, and the thickness of the bonding column top end adhesive is 0.5 mm;
the quantity of support column is 4, and is located the outside of bonding post.
Compared with the prior art, the invention has the advantages that:
1. according to the off-axis reflector mechanism, the off-axis reflector is arranged in the groove of the seat body, the adhesive column and the support column which are arranged on the bottom surface of the groove form the bottom surface positioning reference of the off-axis reflector, the adhesive column and the support column can be ground to ensure the better mounting plane precision of the off-axis reflector, and the off-axis reflector is tightly pressed and fixed in the groove through the pressing plate to ensure the reliable support of the off-axis reflector in the seat body; the first adjusting unit and the second adjusting unit can realize multi-degree-of-freedom high-precision rotation and translation adjustment of the off-axis reflector, effectively ensure excellent image quality of the objective lens, can be suitable for clamping and fixing and freedom degree adjustment of the medium reflector and achieve high adjustment precision.
2. The first adjusting unit comprises a jacking screw assembly and a locking and tensioning screw assembly, the distance between the adjusting plate and the seat body can be adjusted through the jacking screw assembly, and after the distance is properly adjusted, the adjusting plate and the seat body are fixed through the locking and tensioning screw assembly.
3. According to the jacking screw assembly, the jacking screws are rotated to realize the opposite and back-to-back movement of the pressing plate relative to the seat body, the adjusting ball head on the rear end surface of the pressing plate is in spherical contact fit with the ball socket at the front end of the moving column, and if the positions of the pressing plate and the moving column are slightly deviated, the pressing plate can be quickly restored to the centering position through the spherical surface, so that the moving stability of the pressing plate is ensured; and the outer spring seat behind the seat body is an annular groove, so that the moving stability of the pressing plate is improved, and the position adjustment precision of the off-axis reflector is further ensured.
4. The jacking screw assembly further comprises an inner pressure spring, so that a guiding effect is provided for the movement process of the outer pressure spring, and the moving stability of the pressure plate is further improved.
5. In order to facilitate the connection of the jacking screw assembly and the seat body, a connecting platform is arranged on the rear end face of the seat body.
6. The adjusting plate is of a rectangular structure, the number of the first adjusting units is 4, the first adjusting units are arranged at four corners of the adjusting plate in a rectangular shape, the 4 first adjusting units form a four-point adjusting assembly and are carried out by adopting a right-angle jacking principle, and the lower left corner is a fixed adjusting point and serves as an adjusting reference and an adjusting fulcrum; the upper left corner adjustment point is the rotatory adjustment of pitching from top to bottom, and the lower right corner adjustment point is the rotatory adjustment of position about, and the upper right corner is as locking point and locks fixedly, can realize the adjustment of two degrees of freedom directions, and the adjustment mode is simple.
7. The second adjusting unit comprises a left adjusting component, a right adjusting component and an up-down adjusting component, wherein a left adjusting screw and a right adjusting screw are matched for use, and the left adjusting screw and the right adjusting screw are loosened and tightened to realize the left-right translational motion of the adjusting plate in the supporting seat; the upper adjusting screw and the lower adjusting screw are matched for use, and the adjusting plate can move up and down in the supporting seat in a translation manner by one loosening and one tightening manner; and then the translation adjustment of the off-axis reflector in the up-down and left-right two freedom directions is realized, and the adjustment mode is simple and convenient.
8. In order to adjust the stability of the vertical translation and the horizontal translation of the adjusting plate, positioning grooves are arranged on four end faces of the adjusting plate, and inner end faces of four adjusting screws of the second adjusting unit are located in the positioning grooves.
9. The range of the gap between the side surface of the off-axis reflector and the groove is 0.06-0.15mm, so that the off-axis reflector is convenient to mount, and the damage to the off-axis reflector in the mounting process is prevented; after the off-axis reflector is installed, the adhesive is filled in the gap, so that the stability of fixing the off-axis reflector and the base body is improved.
10. The connecting platform is provided with an open slot for reducing the influence of connecting stress on the surface shape of the off-axis reflector.
11. The central through hole is formed at the bottom of the groove of the seat body, so that the weight of the seat body can be reduced, and the seat body is convenient to adjust; and can also be used as a fabrication hole when the off-axis reflector is installed.
Similarly, the middle part of the adjusting plate is provided with a hexagonal lightening hole, so that the weight of the adjusting plate is reduced, and the adjusting is convenient.
Drawings
FIG. 1 is a schematic structural view of an off-axis mirror mechanism capable of achieving high precision support and multi-degree of freedom adjustment according to the present invention;
FIG. 2 is an exploded view of an off-axis mirror mechanism for high precision support and multiple degrees of freedom adjustment according to the present invention;
FIG. 3 is a schematic structural diagram of a mirror base of the off-axis mirror mechanism capable of achieving high-precision support and multi-degree-of-freedom adjustment according to the present invention;
FIG. 4 is a rear view of a mirror base of the off-axis mirror mechanism capable of achieving high precision support and multi-degree of freedom adjustment according to the present invention;
FIG. 5 is a schematic view of the assembly of the off-axis mirror base and the off-axis mirror in the off-axis mirror mechanism capable of achieving high precision support and multi-degree of freedom adjustment according to the present invention;
FIG. 6 is a schematic view of an off-axis mirror, a mirror base and an adjusting plate assembly in the off-axis mirror mechanism capable of achieving high precision support and multi-degree of freedom adjustment according to the present invention;
FIG. 7 is a cross-sectional view of an off-axis mirror mechanism of the present invention (locking tensioning screw assembly not shown) that can achieve high precision support and multiple degrees of freedom adjustment;
FIG. 8 is a partial cross-sectional view of a set screw assembly in the off-axis mirror mechanism for high precision support and multiple degrees of freedom adjustment according to the present invention;
wherein the reference numbers are as follows:
1-seat body, 11-groove, 12-pressure plate, 13-central through hole, 14-bonding column, 15-support column, 16-glue injection through hole, 17-connecting table, 171-open slot, 18-outer spring seat, 19-inner spring seat, 110-strip hole and 111-circular exhaust hole;
2-adjusting plate, 21-wedge-shaped pressing plate, 22-first through hole, 23-second through hole, 24-upper end surface, 25-left end surface, 26-lower end surface, 27-right end surface, 28-positioning groove and 29-hexagonal lightening hole;
3-supporting seat, 31-left supporting plate, 32-lower supporting plate, 33-right supporting plate, 34-upper supporting plate, 35-connecting lug seat, 36-screw and 37-lightening hole;
41-left adjusting screw, 42-upper adjusting screw, 43-right adjusting screw, 44-lower adjusting screw;
5-a tightening screw component, 51-an external pressure spring, 52-a pressing plate, 521-an annular external spring support, 522-an adjusting ball head, 523-an internal spring column, 53-a moving column with a ball socket, 54-an adjusting support, 55-a tightening screw and 56-an internal pressure spring;
6-locking tensioning screw assembly, 61-locking tensioning screw, 62-spherical washer;
7-off-axis mirror.
Detailed Description
The invention is described in further detail below with reference to the figures and specific embodiments.
As shown in fig. 1, 2, 6 and 7, an off-axis mirror mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment includes an off-axis mirror 7, a mirror base, an adjusting plate 2, a support base 3, a second adjusting unit and a plurality of first adjusting units; the off-axis reflector 7 is installed on the front end face of the mirror base, the adjusting plate 2 is arranged on the rear end face of the mirror base, the supporting base 3 is of a hollow frame body structure, the mirror base and the adjusting plate 2 are sleeved with the supporting base, and the second adjusting unit and the first adjusting unit can achieve rotation and translation adjustment of the off-axis reflector 7.
The parameters of the off-axis mirror 7 of this embodiment are length × width: 244mm × 184mm, spectral range: 0.43 to 2.5 μm.
As shown in fig. 3 and 4, the mirror base includes a base body 1, the base body 1 is designed in a rectangular shape, a groove 11 is formed in the front end surface of the base body 1, and the shape of the groove 11 is matched with the shape of the bottom of the off-axis reflector 7; the groove 11 of the base body 1 is also provided with an assembly hole which comprises a strip hole 110 and a circular exhaust hole 111. In this embodiment, the bottom of the off-axis reflector 7 is a rectangular structure, and the groove 11 is a rectangular groove, and the size of the rectangular groove is slightly larger than the size of the bottom of the off-axis reflector 7, so that a gap exists between the side surface of the off-axis reflector 7 and the groove wall of the groove 11, the gap range can be 0.06-0.15mm, the off-axis reflector 7 is convenient to mount, and meanwhile, the damage to the off-axis reflector 7 in the mounting process is prevented. A central through hole 13 is arranged in the middle of the bottom of the groove 11, a plurality of adhesive columns 14 and a plurality of support columns 15 are arranged on the periphery of the central through hole 13 at the bottom of the groove 11, an adhesive for fixing the off-axis reflector 7 is arranged at the top ends of the adhesive columns 14, the height of each support column 15 is equal to the sum of the thickness of the adhesive and the height of the adhesive column 14, and the height of the supporting columns 15 is smaller than the depth of the grooves 11, the number of the adhesive columns 14 and the number of the supporting columns 15 in the embodiment are 4, in other embodiments, the number of the adhesive columns 14 and the number of the support columns 15 are reasonably designed according to actual needs, 4 adhesive columns 14 are uniformly distributed on the periphery of the central through hole 13, 4 support columns 15 are arranged on the outer sides of the adhesive columns 14, and are located at four corners of the rectangular groove, and 4 adhesive posts 14 and 4 support posts 15 form 8 support surfaces (4 adhesive posts 14 and 4 support posts 15) and 4 adhesive fixing points (4 adhesive posts 14). The 8 supporting surfaces form the bottom surface positioning reference of the off-axis reflector 7, and the better mounting plane precision of the off-axis reflector 7 can be ensured by grinding the adhesive column 14 and the supporting column 15, so that the flatness of the off-axis reflector 7 is not more than 0.01 mm; 4 bonding posts 14 in the middle of the groove 11 of the base body 1 are bonding positions, the diameter of the adhesive on the top end of each bonding post 14 is 20mm, the thickness of the adhesive is 0.5mm, the bonding area is large, the requirement on mechanical strength can be met, and accordingly the diameter of each bonding post 14 is slightly larger than 20 mm.
As shown in fig. 5, in this embodiment, a single-side gap of 0.1mm is left between the periphery of the off-axis reflector 7 and the groove wall of the groove 11 of the base 1, the off-axis reflector 7 is placed in the groove 11 of the base 1 by a tool with a standard thickness of 0.1mm during installation, a plurality of glue injection through holes 16 are formed in the groove wall of the groove 11 of the base 1, and after a bonding agent flows through the glue injection through holes 16, the gap of 0.1mm is filled, so that the stability of fixing the off-axis reflector 7 and the base 1 is improved.
The preceding terminal surface of pedestal 1 still is equipped with a plurality of pressure strips 12, and a plurality of pressure strips 12 arrange in the periphery on the long limit of rectangle recess, and the one end of every pressure strip 12 is articulated with pedestal 1, and the other end is used for compressing tightly off-axis mirror 7 and fixes in the recess 11 of pedestal 1.
The base 1 and the bottom surface of the off-axis reflector 7 are bonded and fixed by 4 bonding fixing points, the periphery of the side surface of the off-axis reflector 7 is bonded and fixed by an auxiliary adhesive, and the compression plate 12 is used for axial elastic auxiliary compression, so that the off-axis reflector 7 can be stably fixed on the base 1.
As shown in fig. 2 and 6, the adjusting plate 2 is a rectangular plate disposed on the rear end face of the seat body 1, and four outer side faces of the adjusting plate 2 are provided with wedge-shaped pressing plates 21; the middle part of the adjusting plate 2 is provided with a hexagonal lightening hole 29.
The supporting seat 3 is a rectangular hollow frame structure sleeved outside the seat body 1 and the adjusting plate 2, and the supporting seat 3 is provided with a lightening hole 37; the supporting seat 3 comprises a left supporting plate 31, a lower supporting plate 32, a right supporting plate 33 and an upper supporting plate 34 which are sequentially connected end to end; the second adjusting unit is arranged on the supporting seat 3 and used for adjusting the translation of the adjusting plate 2 in the up-down direction and the left-right direction, and specifically comprises a left-right adjusting assembly and an up-down adjusting assembly; the left-right adjusting component comprises a left adjusting screw 41 and a right adjusting screw 43 which are symmetrically arranged, the left adjusting screw 41 is arranged on the left support plate 31, and the inner end surface of the left adjusting screw abuts against the left end surface 25 of the adjusting plate 2; the right adjusting screw 43 is arranged on the right support plate 33, and the inner end surface abuts against the right end surface 27 of the adjusting plate 2; the up-down adjusting component comprises an upper adjusting screw 42 and a lower adjusting screw 44 which are symmetrically arranged, the upper adjusting screw 42 is arranged on the upper supporting plate 34, and the inner end surface is abutted against the upper end surface 24 of the adjusting plate 2; the lower adjusting screw 44 is provided on the lower support plate 32 with the inner end surface abutting against the lower end surface 26 of the adjusting plate 2.
The adjusting plate 2 is arranged in the supporting seat 3 by means of the matching of four wedge-shaped pressing plates 21 in two orthogonal directions, the adjusting plate 2 is pressed and fixed in the supporting seat 3 by pressing the wedge-shaped pressing plates 21 by 4 adjusting screws (an upper adjusting screw 42, a lower adjusting screw 44, a left adjusting screw 41 and a right adjusting screw 43), in order to improve the adjusting precision, the positions of the four wedge-shaped pressing plates 21 matched with the left adjusting screw 41, the position of the right adjusting screw 43, the position of the upper adjusting screw 42 and the position of the lower adjusting screw 44 are respectively provided with a positioning groove 28, and the inner end surface of the adjusting screw 36 extends into the positioning groove 28. During translational adjustment, the left adjusting screw 41 and the right adjusting screw 43 are matched for use, and the left adjusting screw and the right adjusting screw are loosened and tightened, so that the adjusting plate 2 can perform left-right translational movement in the supporting seat 3 along the guide surface; the upper adjusting screw 42 and the lower adjusting screw 44 are matched for use, and the adjusting plate 2 can move up and down in a translation manner along the guide surface in the supporting seat 3 by one loosening and one tightening; and further realize the translational adjustment of the off-axis reflector 7 in the up-down and left-right directions.
The lower extreme outside of left branch fagging 31 and right branch fagging 33 all is equipped with connection ear seat 35, and connection ear seat 35 sets up on the base plate, and the lower terminal surface of connection ear seat 35 be equipped with the base plate on the direction locating surface matched with straight line sliding guide, through two outside adjustment posts with supporting seat 3 along the direction locating surface removal on the base plate, realize the axial translation adjustment of off-axis speculum 7, have higher translation adjustment precision. The connecting lug seat 35 is connected with the substrate through a screw 36, and the rotation adjustment of the supporting seat 3 relative to the substrate is realized by adjusting the tightness of the screw 36 on the lower end connecting lug of the left supporting plate 31 and the tightness of the screw 36 on the lower end connecting lug of the right supporting plate 33, so that the rotation adjustment of the off-axis reflector 7 is realized.
In order to improve the adjustment precision of the off-axis reflector 7 on the mirror base and increase the adjustment linear displacement reference, the adjusting plate 2 is connected with the rear end face of the base body 1 through a plurality of first adjusting units, in the embodiment, the number of the first adjusting units is 4, the 4 first adjusting units are arranged on four corners of the adjusting plate 2 in a rectangular shape, the 4 first adjusting units form a four-point adjusting assembly, the adjusting principle is carried out by adopting a right-angle top pulling principle, the lower left corner is a fixed adjusting point and serves as an adjusting reference and an adjusting fulcrum; the upper left corner adjustment point is adjusted in a vertical pitching rotation mode, the lower right corner adjustment point is adjusted in a left-right direction rotation mode, and the upper right corner serves as a locking point to be locked and fixed.
Each first adjusting unit comprises a jacking screw assembly 5 and a locking tensioning screw assembly 6; the jacking screw assembly 5 is arranged on the adjusting plate 2, and the front end of the jacking screw assembly abuts against the rear end face of the seat body 1 and is used for adjusting the distance between the adjusting plate 2 and the seat body 1. As shown in fig. 8, the tightening screw assembly 5 includes an external compression spring 51, a pressing plate 52, a moving column 53 with a ball socket, an adjusting bracket 54 and a tightening screw 55 which are arranged in sequence from front to back; the rear end face of the seat body 1 is provided with 4 connecting tables 17 which are distributed in a rectangular shape, the positions of the 4 connecting tables 17 correspond to the positions of the jacking screw assemblies 5 one by one, the rear end face of each connecting table 17 is provided with an outer spring seat 18, and each outer spring seat 18 is an annular groove; the adjusting plate 2 is provided with a step through hole which comprises a first through hole 22 and a second through hole 23, wherein the diameters of the first through hole and the second through hole are sequentially reduced from front to back; the pressing plate 52 is arranged in the first through hole 22, the front end surface of the pressing plate 52 is provided with an annular outer spring bracket 521 extending into the outer spring seat 18, and the rear end surface is provided with an adjusting ball head 522; the outer compression spring 51 is arranged in the annular groove, the front end of the outer compression spring is limited by the bottom surface of the annular groove, and the rear end of the outer compression spring is sleeved on the annular outer spring support 521; the moving column is arranged in the second through hole 23, a ball socket at the front end is arranged on the adjusting ball head 522, and the inner wall of the outer side of the second through hole 232 is provided with an annular limiting boss; the adjusting bracket 54 is fixed on the rear end face of the adjusting plate 2 through a screw, a threaded hole is formed in the adjusting bracket 54, and a jacking screw 55 passes through the threaded hole and abuts against the rear end face of the moving column 53 with the ball socket. In the process of tensioning and adjusting, the external pressure spring always keeps pretightening force.
In order to improve the moving stability of the pressing plate 52, the rear end surface of the connecting platform 17 is provided with an inner spring seat 19, the inner spring seat 19 is a cylindrical groove coaxially arranged in the annular groove, and the front end surface of the pressing plate 52 is provided with an inner spring column 523 extending into the cylindrical groove; an inner compression spring 56 is arranged in the cylindrical groove, the front end of the inner compression spring 56 is limited through the bottom surface of the cylindrical groove, the rear end of the inner compression spring 56 is sleeved on an inner spring column 523, and the inner spring seat 19 and the inner spring column 523 are matched to provide a guiding effect for the movement of the pressing plate 52.
The locking and tensioning screw assembly 6 comprises a locking and tensioning screw 61 with a spherical washer 62, the locking and tensioning screw 61 passes through a through hole on the adjusting plate 2, and the front end of the locking and tensioning screw is in threaded connection with the rear end surface of the seat body 1 for fixing the adjusting plate 2 and the seat body 1.
In order to improve the stability of the seat body, after the position of the seat body is adjusted, the seat body and the seat body are fixed by sequentially penetrating the supporting seat and the seat body through screws.
4 connection platforms 17 that the rear end face of pedestal 1 was equipped with, pedestal 1 is connected with adjusting plate 2 through four points (4 connection platforms 17), and the side of connecting platform 17 is equipped with open slot 171, and pedestal 1 has carried out the opening destressing in connecting the adjustment position promptly, can reduce the influence of connecting the stress to the 7 face shapes of off-axis speculum.
Rotation adjustment accuracy of the adjustment mechanism of the present embodiment: the distance of the azimuth adjustment baseline is 154mm, the distance of the pitching adjustment baseline is 214mm, the screw pitch is 0.35mm, and the adjustment precision is 6 'in azimuth and 2.4' in pitch.
The translational adjustment precision of the adjustment mechanism of the embodiment is as follows: the adjustment of translation relies on the rotatory adjusting screw of staff to promote 2 translations of adjusting plate, and the screw is fine thread, and pitch is 0.5mm, and the sensitive precision of staff is about 5, and the staff adjustment precision is about: 0.007mm, can meet the precision requirement that the eccentric adjustment precision is not more than 20 mu m.
The adjusting process of the off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment can be realized by the embodiment:
1) firstly, connecting 4 locking tensioning screws 61 between the seat body 1 and the adjusting plate 2 in place, simultaneously loosening 1/4 circles of screws, and keeping the positions of the seat body 1 and the adjusting plate 2 by means of the elastic force of an outer pressure spring and an inner pressure spring at the front side of a jacking screw 55;
2) according to the process detection means, adjusting two radial rotational freedom degrees of the off-axis reflector 7 on the base body 1 by adjusting the tightening screws 55 at the upper left corner and the lower right corner, screwing the tightening screw 55 at the upper right corner after the adjustment is in place, adjusting the orientation freedom of the ball head 522 and the ball socket at the front end of the moving column 53 with the ball socket by using the rear end surface of the pressing plate 52, pressing the outer compression spring 51 in place, and tightening the structure to ensure the position stability; then 4 locking tightening screws 61 are screwed down to realize the fixation of the seat body 1 and the adjusting plate 2;
3) adjusting the upper adjusting screw 42 and the lower adjusting screw 44 by one degree of tightness, and adjusting the up-and-down translation of the adjusting plate 2, and further adjusting the up-and-down translation of the off-axis reflector 7; adjusting the tightness of the left adjusting screw 41 and the right adjusting screw 43, and adjusting the left-right translation of the adjusting plate 2, thereby adjusting the left-right translation of the off-axis reflector 7;
4) the supporting seat 3 moves along the guide positioning surface on the substrate, so that the supporting seat 3 can translate along the axis direction of the off-axis reflector 7, and further the axial translation of the reflector is adjusted; the rotation of the supporting seat 3 relative to the substrate is realized by adjusting the tightness of the screw 36 on the lower end connecting lug of the left supporting plate 31 and the tightness of the screw 36 on the lower end connecting lug of the right supporting plate 33, and further the rotation of the off-axis reflector 7 is realized.
The above description is only for the purpose of describing the preferred embodiments of the present invention and does not limit the technical solutions of the present invention, and any known modifications made by those skilled in the art based on the main technical concepts of the present invention fall within the technical scope of the present invention.

Claims (10)

1. The utility model provides a can realize high accuracy support and multi freedom adjustment's off-axis speculum mechanism which characterized in that: comprises an off-axis reflector (7), a reflector seat, an adjusting plate (2) and a supporting seat (3);
the mirror base comprises a base body (1), a groove (11) which is arranged on the front end face of the base body (1) and is matched with the shape of the bottom of the off-axis reflector (7), a plurality of pressing plates (12) which are arranged on the periphery of the groove (11), a plurality of bonding columns (14) which are arranged on the inner bottom face of the groove (11) and a plurality of supporting columns (15); the top end of each bonding column (14) is provided with an adhesive, and the total height of the bonding columns (14) and the adhesive is equal to the height of the support column (15); one end of each compression plate (12) is connected with the base body (1), the other end of each compression plate is used for compressing and fixing the off-axis reflector (7) in the groove (11), and a gap is formed between the side surface of the off-axis reflector (7) and the groove wall of the groove (11);
the adjusting plate (2) is connected with the rear end face of the seat body (1) through a plurality of first adjusting units; each first adjusting unit comprises a jacking screw assembly (5) and a locking tensioning screw assembly (6); the jacking screw assembly (5) is arranged on the adjusting plate (2), the front end of the jacking screw assembly is abutted against the rear end face of the seat body (1), and the jacking screw assembly is used for adjusting the distance between the adjusting plate (2) and the seat body (1); the locking and tensioning screw assembly (6) comprises a locking and tensioning screw (61) penetrating through a through hole in the adjusting plate (2), and the front end of the locking and tensioning screw (61) is in threaded connection with the rear end face of the seat body (1) and is used for fixing the adjusting plate (2) and the seat body (1);
the supporting seat (3) is a hollow frame body structure sleeved on the outer sides of the seat body (1) and the adjusting plate (2), and the left side and the right side of the lower end of the supporting seat (3) are provided with connecting lug seats (35);
the supporting seat (3) is connected with the side surface of the adjusting plate (2) through a second adjusting unit; the second adjusting unit is arranged on the supporting seat (3) and used for adjusting the translation of the adjusting plate (2) in the up-down direction and the left-right direction.
2. The off-axis mirror mechanism of claim 1 capable of high precision support and multiple degree of freedom adjustment, further comprising: the jacking screw assembly (5) comprises an external compression spring (51), a pressing plate (52), a moving column (53) with a ball socket, an adjusting bracket (54) and a jacking screw (55) which are sequentially arranged from front to back;
the rear end face of the seat body (1) is provided with an outer spring seat (18), and the outer spring seat (18) is an annular groove;
the adjusting plate (2) is provided with step through holes, and the step through holes comprise a first through hole (22) and a second through hole (23) which are sequentially reduced in diameter from front to back;
the pressing plate (52) is arranged in the first through hole (22), the front end face of the pressing plate (52) is provided with an annular outer spring support (521) extending into the outer spring seat (18), and the rear end face of the pressing plate is provided with an adjusting ball head (522);
the outer compression spring (51) is arranged in the annular groove, the front end of the outer compression spring is limited by the bottom surface of the annular groove, and the rear end of the outer compression spring is sleeved on the annular outer spring support (521);
the moving column (53) with the ball socket is arranged in the second through hole (23), and the ball socket at the front end is arranged on the adjusting ball head (522);
the adjusting support (54) is fixed on the rear end face of the adjusting plate (2), a threaded hole is formed in the adjusting support (54), and the jacking screw (55) penetrates through the threaded hole and abuts against the rear end face of the moving column (53) with the ball socket.
3. The off-axis mirror mechanism of claim 2 capable of high precision support and multiple degree of freedom adjustment, further comprising: the jacking screw assembly (5) further comprises an inner compression spring (56) coaxially arranged in the outer compression spring (51);
the rear end face of the seat body (1) is provided with an inner spring seat (19), and the inner spring seat (19) is a cylindrical groove;
the front end surface of the pressure plate (52) is provided with an inner spring column (523) extending into the inner spring seat (19);
the internal pressure spring (56) is arranged in the cylindrical groove, the front end of the internal pressure spring is limited by the bottom surface of the cylindrical groove, and the rear end of the internal pressure spring is sleeved on the internal spring column (523).
4. An off-axis mirror mechanism capable of achieving high precision support and multiple degrees of freedom adjustment according to claim 3, further comprising: the rear end face of the base body (1) is provided with a plurality of connecting tables (17), the number of the connecting tables (17) is equal to that of the jacking screw assemblies (5), and the connecting tables correspond to the jacking screw assemblies in position one by one;
the inner spring seat (19) and the outer spring seat (18) are both arranged on the rear end face of the connecting table (17).
5. An off-axis mirror mechanism capable of achieving high precision support and multiple degrees of freedom adjustment according to claim 4, wherein: the adjusting plate (2) is of a rectangular structure;
the number of the first adjusting units is 4, and the 4 first adjusting units are arranged at four corners of the adjusting plate (2) in a rectangular shape.
6. An off-axis mirror mechanism capable of achieving high precision support and multiple degree of freedom adjustment according to any one of claims 1 to 5, comprising: the supporting seat (3) is of a rectangular hollow frame structure and comprises a left supporting plate (31), a lower supporting plate (32), a right supporting plate (33) and an upper supporting plate (34) which are sequentially connected end to end;
the second adjusting unit comprises a left-right adjusting component and an up-down adjusting component;
the left and right adjusting component comprises a left adjusting screw (41) and a right adjusting screw (43) which are symmetrically arranged, the left adjusting screw (41) is arranged on the left supporting plate (31), and the inner end surface of the left adjusting screw abuts against the left end surface (25) of the adjusting plate (2); the right adjusting screw (43) is arranged on the right support plate (33), and the inner end surface abuts against the right end surface (27) of the adjusting plate (2);
the up-down adjusting assembly comprises an upper adjusting screw (42) and a lower adjusting screw (44) which are symmetrically arranged, the upper adjusting screw (42) is arranged on the upper supporting plate (34), and the inner end surface of the upper adjusting screw abuts against the upper end surface (24) of the adjusting plate (2); the lower adjusting screw (44) is arranged on the lower supporting plate (32), and the inner end surface abuts against the lower end surface (26) of the adjusting plate (2).
7. The off-axis mirror mechanism of claim 6 capable of high precision support and multiple degree of freedom adjustment, further comprising: the position of the left end face (25) of the adjusting plate (2) matched with the left adjusting screw (41), the position of the right end face (27) of the adjusting plate (2) matched with the right adjusting screw (43), the position of the upper end face (24) of the adjusting plate (2) matched with the upper adjusting screw (42), and the position of the lower end face (26) of the adjusting plate (2) matched with the lower adjusting screw (44) are all provided with positioning grooves (28).
8. The off-axis mirror mechanism of claim 7 capable of high precision support and multiple degree of freedom adjustment, further comprising: the locking tensioning screw assembly (6) further comprises a spherical washer (62) arranged on the locking tensioning screw (61);
the range of the gap between the side surface of the off-axis reflector (7) and the groove (11) is 0.06-0.15mm, and the gap is filled with adhesive.
9. An off-axis mirror mechanism capable of achieving high precision support and multiple degrees of freedom adjustment according to claim 4, wherein: the side of the connecting platform (17) is provided with an open slot (171) for reducing stress.
10. The off-axis mirror mechanism of claim 1 capable of high precision support and multiple degree of freedom adjustment, further comprising: a central through hole (13) is formed in the bottom of the groove (11) of the seat body (1); the middle part of the adjusting plate (2) is provided with a hexagonal lightening hole (29);
the number of the bonding columns (14) is 4, the bonding columns are uniformly distributed on the periphery of the central through hole (13), the diameter of the bonding column top end adhesive is 20mm, and the thickness of the bonding column top end adhesive is 0.5 mm;
the number of the supporting columns (15) is 4, and the supporting columns are located on the outer side of the bonding columns (14).
CN202010662759.1A 2020-07-10 2020-07-10 Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment Active CN111948781B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010662759.1A CN111948781B (en) 2020-07-10 2020-07-10 Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010662759.1A CN111948781B (en) 2020-07-10 2020-07-10 Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment

Publications (2)

Publication Number Publication Date
CN111948781A true CN111948781A (en) 2020-11-17
CN111948781B CN111948781B (en) 2021-07-27

Family

ID=73340294

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010662759.1A Active CN111948781B (en) 2020-07-10 2020-07-10 Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment

Country Status (1)

Country Link
CN (1) CN111948781B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111999838A (en) * 2020-07-10 2020-11-27 中国科学院西安光学精密机械研究所 Adjusting component for adjusting distance between connected pieces and connecting device
CN113777797A (en) * 2021-08-24 2021-12-10 长春理工大学 Adjusting device and adjusting method for off-axis beam-reducing optical system
CN114061529A (en) * 2021-11-01 2022-02-18 业成科技(成都)有限公司 Aspheric surface measuring jig and aspheric surface measuring device
CN114942507A (en) * 2022-05-13 2022-08-26 长光卫星技术股份有限公司 Flexible supporting structure of optical reflector and adjusting method
CN115685474A (en) * 2022-11-08 2023-02-03 哈尔滨工业大学 Lens assembly

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101216590A (en) * 2008-01-21 2008-07-09 上海微电子装备有限公司 Three freedom degree reflector adjusting apparatus
CN101441311A (en) * 2008-12-09 2009-05-27 瑞安市博业激光应用技术有限公司 Reflection mirror apparatus
CN205787318U (en) * 2016-05-31 2016-12-07 上海微电子装备有限公司 Reflecting mirror fixing device
CN205942041U (en) * 2016-08-18 2017-02-08 中国电子科技集团公司第四十一研究所 Mai keerxun fixed mirror device of angle modulation and position locking

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101216590A (en) * 2008-01-21 2008-07-09 上海微电子装备有限公司 Three freedom degree reflector adjusting apparatus
CN101441311A (en) * 2008-12-09 2009-05-27 瑞安市博业激光应用技术有限公司 Reflection mirror apparatus
CN205787318U (en) * 2016-05-31 2016-12-07 上海微电子装备有限公司 Reflecting mirror fixing device
CN205942041U (en) * 2016-08-18 2017-02-08 中国电子科技集团公司第四十一研究所 Mai keerxun fixed mirror device of angle modulation and position locking

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
M. HAFEZ ET AL.: "Design,simulations and experimental investigations of a compact single mirror tip/titl laser scanner", 《MECHATRONICS》 *
S.XU ET AL.: "A Two-Axis Water-Immersible Micro Scanning Mirror Driven by Single Inductor Coil through Dynamic Structural Filtering", 《SENSORS AND ACTUATORS A:PHYSICAL》 *
梅贵 等: "离轴多反射镜系统支撑结构的设计与装调", 《光学精密工程》 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111999838A (en) * 2020-07-10 2020-11-27 中国科学院西安光学精密机械研究所 Adjusting component for adjusting distance between connected pieces and connecting device
CN111999838B (en) * 2020-07-10 2022-03-25 中国科学院西安光学精密机械研究所 Adjusting component for adjusting distance between connected pieces and connecting device
CN113777797A (en) * 2021-08-24 2021-12-10 长春理工大学 Adjusting device and adjusting method for off-axis beam-reducing optical system
CN113777797B (en) * 2021-08-24 2023-09-26 长春理工大学 Adjusting device and adjusting method for off-axis beam shrinking optical system
CN114061529A (en) * 2021-11-01 2022-02-18 业成科技(成都)有限公司 Aspheric surface measuring jig and aspheric surface measuring device
CN114061529B (en) * 2021-11-01 2023-08-08 业成科技(成都)有限公司 Aspherical surface measuring jig and aspherical surface measuring device
CN114942507A (en) * 2022-05-13 2022-08-26 长光卫星技术股份有限公司 Flexible supporting structure of optical reflector and adjusting method
CN114942507B (en) * 2022-05-13 2024-01-30 长光卫星技术股份有限公司 Flexible supporting structure of optical reflector and adjusting method
CN115685474A (en) * 2022-11-08 2023-02-03 哈尔滨工业大学 Lens assembly

Also Published As

Publication number Publication date
CN111948781B (en) 2021-07-27

Similar Documents

Publication Publication Date Title
CN111948781B (en) Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment
CN111929878B (en) Off-axis three-mirror short-focus front objective lens system of hyperspectral imager
CN108519664B (en) Main three-mirror integrated coaxial three-reflection infrared optical imaging device
CN114660754B (en) High-precision assembling and adjusting method for large-caliber optical lens group
CN111103671B (en) Beam splitting prism assembly for off-axis three-mirror optical system and operation method thereof
CN103487911B (en) From axle optical element precision positioning adjusting gear
CN113341532B (en) High-precision, high-stability and compact telescope three-mirror pitching adjusting mechanism
CN112130273B (en) Multi-optical-axis parallelism quick adjusting device
CN111552054B (en) Off-axis three-mirror optical system assembling and adjusting method
US4826304A (en) Adjustable optical mounting assembly
CN111399168A (en) Space right angle turning combined adjusting frame
CN115826176A (en) Object lens centering structure of continuous zooming thermal infrared imager and assembling and adjusting method
CN111999838B (en) Adjusting component for adjusting distance between connected pieces and connecting device
WO2020228361A1 (en) Manufacturing method of imaging spectrometer having convex grating
CN111427224B (en) Mounting structure of projection imaging lens group and projection imaging device
CN215986682U (en) Lens adjusting device for closed system
CN108366224B (en) Panoramic imaging device
CN117055188B (en) Method for installing and adjusting coaxial three-reflector remote sensing optical system
CN217007872U (en) High-efficient refraction light path speculum debugging device
CN115268001B (en) Incident light beam adjusting mechanism applicable to off-axis integrating cavity
JP7266561B2 (en) Imaging device
CN1118712C (en) Laser radar ray receiver
RU85003U1 (en) ALIGNMENT DEVICE
CN211206924U (en) Light splitting prism assembly for off-axis three-mirror optical system
CN113759494A (en) Lens adjusting device for closed system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant