CN205787318U - Reflecting mirror fixing device - Google Patents
Reflecting mirror fixing device Download PDFInfo
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- CN205787318U CN205787318U CN201620518899.0U CN201620518899U CN205787318U CN 205787318 U CN205787318 U CN 205787318U CN 201620518899 U CN201620518899 U CN 201620518899U CN 205787318 U CN205787318 U CN 205787318U
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- reflecting mirror
- fixing device
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- ball head
- mirror fixing
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Abstract
This utility model provides a kind of Reflecting mirror fixing device, including mirror mount (109), fixed plate (101), attachment screw (110), lens pre-tightening apparatus (100), described lens pre-tightening apparatus (100) includes spherical connection seat (108), it is connected with described spherical connection seat (108) ball pivot and has ball head (102), described ball head (102) is socketed with compression spring (104), the excircle of described ball head (102) slidably connects stud (105), described stud (105) is threadeded with described fixed plate (101), the thrust end of described ball head (102) is connected by snap ring (103) and described stud (105) are fixing；The bottom surface of described spherical connection seat (108) connects cushion pad (107).The Reflecting mirror fixing device that this utility model provides, it is possible to increase the hard-wired precision and stability of reflecting mirror.
Description
Technical field
This utility model relates to photoetching machine technique field, particularly to the Reflecting mirror fixing device in a kind of litho machine.
Background technology
Field is manufactured at precision optical instrument, during light path design, commonly used plane mirror changes the deflection angle of light, reach to change optical path direction, layout image forming optics, the purposes such as compression stroke or segmentation light beam, during opto-mechanical design, because reflecting mirror is in the angular error of light path, the image error of optical axis twice can be introduced, so precision instrument installs location for optical flat reflecting mirror and surface precision has higher requirement, especially in litho machine alignment and focusing photodetector system, often require that compact conformation space realizes the fixed installation of high-precision high-reliability.
The fixed installation following several ways of employing generally for reflecting mirror:
One, fixed form for dispensing glue is used, mode the most for dispensing glue is suitable in the environment of general positioning precision, friction impact, and on the premise of variations in temperature expands without impact for glue, along with the utilization of EUV light source in litho machine, this light source is aging to the decomposition of glue so that scheme for dispensing glue exists bigger risk in using of litho machine.
Two, trim ring fixed form, as shown in Figure 1, it is made up of microscope base 11, reflecting mirror 12 and trim ring 13, which is identical with the fixed form of lens, but because the radius-thickness ratio (thickness and the ratio of diameter) of lens is better than plane mirror, the stress introduced after Gu Ding is less, and relatively thin reflecting mirror is easily deformed, the program generally is suitable for thicker reflecting mirror and fixes, and trim ring is in rundown process simultaneously, because of contact friction force, easily cause reflecting mirror rotary motion, contact surface is insufficient, causes reflecting mirror to cross the instability such as location, as shown in Figure 2.
Three, using spring leaf or plunger to be fixed mode, which compares the purpose meeting flexible stationary mirror, but because spring leaf pretightning force is wayward, the medium problem of contact point stress collection, level requirement is operated for integrated assembly crewman higher.
In sum, in reflecting mirror fixation procedure, machining accuracy or accuracy of screw machining impact because of mirror support seat location plane, existing scheme cannot ensure that trim ring is tightened rear end face and fitted completely with minute surface, causing reflecting mirror stress deformation or fixing labile state, this alignment error affects imaging system performance.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of Reflecting mirror fixing device, to improve the hard-wired precision and stability of reflecting mirror.
In order to solve above-mentioned technical problem, the technical solution of the utility model is: a kind of Reflecting mirror fixing device, including mirror mount, fixed plate, attachment screw, lens pre-tightening apparatus, described lens pre-tightening apparatus includes spherical connection seat, it is connected with described spherical connection seat ball pivot and has ball head, described ball head is socketed with compression spring, the excircle of described ball head slidably connects stud, described stud is threadeded with described fixed plate, and the thrust end of described ball head is connected by snap ring and described stud are fixing；The bottom surface of described spherical connection seat connects cushion pad.
Further, the Reflecting mirror fixing device that this utility model provides, described fixed plate is provided with multiple lens pre-tightening apparatus, the plurality of lens pre-tightening apparatus is annulus or matrix distribution setting.
Further, the Reflecting mirror fixing device that this utility model provides, described spherical connection seat is one and is more than hemispheroidal ball-crown body.
Further, the Reflecting mirror fixing device that this utility model provides, described ball head includes the first axle and the second axle, the diameter of described second axle is more than the diameter of described first axle, described second axle is arranged near the bulb end of ball head, and described stud hollow is provided with the first hole and the second hole, and the diameter in described second hole is more than the diameter in described first hole, described first axle inserts in described first hole, and described second axle matches with described second hole and is slidably connected；The lower end of described compression spring is being against described first axle and the step surface of the second axle formation, and the upper end of described compression spring is against described first hole and the step surface of the second hole formation.
Further, the Reflecting mirror fixing device that this utility model provides, described snap ring is made up of semicircular ring and three fulcrums.
Further, the Reflecting mirror fixing device that this utility model provides, the thrust end of described ball head is provided with ring groove, and described snap ring is fixing with described stud in being connected to described ring groove to be connected.
Further, the Reflecting mirror fixing device that this utility model provides, described stud is provided with ring flange.
Further, the Reflecting mirror fixing device that this utility model provides, described ring flange is provided with two cylindrical holes.
Further, the Reflecting mirror fixing device that this utility model provides, described cushion pad is rubber blanket or nylon cushion.
Further, the Reflecting mirror fixing device that this utility model provides, the reduction length of described compression spring is 1mm-3mm.
When this utility model uses, make ball head, by spherical connection seat and cushion pad, reflecting mirror be applied pretightning force by rotating stud；Spherical hinge connecting structure due to spherical connection seat Yu ball head, then when stud applies pretightning force rotation, ball head drives compression spring to compress downwards, when the pretightning force applied produces direction skew, ball head produces skew in spherical connection seat, spherical connection seat and cushion pad below then make to keep eventually the position relationship of the contact surface with reflecting mirror, thus ensure that the effect of the pretightning force that reflecting mirror do not applied and produce position and offset, therefore improve installation accuracy and the stability of reflecting mirror.Compared with prior art, avoid the location excessively that reflecting mirror is caused by pretightning force, overcome reflecting mirror stress deformation or fixing labile state, and overcome alignment error to affect imaging system performance, there is the technique effect improving the hard-wired precision and stability of reflecting mirror.
Accompanying drawing explanation
Fig. 1-2 is the structural representation of Reflecting mirror fixing device in prior art；
Fig. 3 is the axonometric chart of this utility model Reflecting mirror fixing device；
Fig. 4 is the sectional view of this utility model Reflecting mirror fixing device；
Fig. 5 is Reflecting mirror installation structure schematic diagram of the present utility model；
Fig. 6 is the perspective view of pre-tightening apparatus of the present utility model；
Fig. 7 is the structural representation of snap ring of the present utility model；
Fig. 8 is the structural representation of annular connection seat of the present utility model.
Prior art illustration: 11, microscope base, 12, reflecting mirror, 13, trim ring.
This utility model illustrates: 100, lens pre-tightening apparatus, and 101, fixed plate, 102, ball head, 103, snap ring, 104, compression spring, 105, stud, 106, reflecting mirror, 107, cushion pad, 108, spherical connection seat, 109, mirror mount, 110, attachment screw.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is described in detail:
Refer to Fig. 3 to 8, this utility model provides a kind of Reflecting mirror fixing device, including mirror mount 109, fixed plate 101, attachment screw 110, lens pre-tightening apparatus 100, described lens pre-tightening apparatus 100 includes spherical connection seat 108, it is connected with described spherical connection seat 108 ball pivot and has ball head 102, described ball head 102 is socketed with compression spring 104, the excircle of described ball head 102 slidably connects stud 105, described stud 105 is threadeded with described fixed plate 101, and the thrust end of described ball head 102 is connected by snap ring 103 is fixing with described stud 105；The bottom surface of described spherical connection seat 108 connects cushion pad 107.
When this utility model uses, reflecting mirror 106 is arranged in mirror mount 109, is connected fixing with mirror mount 109 for fixed plate 101 by attachment screw 110；It is threaded connection and lens pre-tightening apparatus 100 is fixedly connected in fixed plate 101.Installation accuracy and the stability connection of reflecting mirror 106 is regulated by the pretightning force of lens pre-tightening apparatus 100.I.e. make ball head 102, by spherical connection seat 108 and cushion pad 107, reflecting mirror 106 be applied pretightning force by rotation stud 105；Spherical hinge connecting structure due to spherical connection seat 108 with ball head 102, then when stud 105 applies pretightning force rotation, ball head 102 drives compression spring 104 to compress downwards, when the pretightning force applied produces direction skew, ball head 102 produces skew in spherical connection seat 108, spherical connection seat 108 and cushion pad below 107 then make to keep eventually the position relationship of the contact surface with reflecting mirror 106, thus ensure that the effect of the pretightning force that reflecting mirror 106 do not applied and produce position and offset, therefore improve installation accuracy and the stability of reflecting mirror 106.Compared with prior art, avoid the location excessively that reflecting mirror is caused by pretightning force, overcome reflecting mirror stress deformation or fixing labile state, and overcome alignment error to affect imaging system performance, there is the technique effect improving the hard-wired precision and stability of reflecting mirror.
Refer to Fig. 3, Fig. 5, the Reflecting mirror fixing device that this utility model provides, described fixed plate 101 is provided with multiple lens pre-tightening apparatus 100, the plurality of lens pre-tightening apparatus 100 is in annulus or matrix distribution is arranged.For example with three lens pre-tightening apparatus 100, in annulus, distribution is arranged；Four lens pre-tightening apparatus 100 can also be used, arrange, to realize multiple spot pretension in four dot matrix distributions.In order to reduce supporting surface mismachining tolerance, by processing multiple strong point on reflecting mirror 106 in the program, reduce working (finishing) area, improve machining accuracy.The layout of the strong point is generally multiple spot, it is to avoid eyeglass cantilever or deformation induced by gravity.Concrete placement position determines according to the strong point of reflecting mirror.In the present embodiment, the elastic pretension of fixing employing of reflecting mirror 106, contact with employing part plan at lens contacts simultaneously, increase contact surface, it is to avoid point cantact produces local stress.The ball pivot that the direction of applying power is perpendicular in minute surface, this device meets this requirement；General eyeglass is different with the thermal coefficient of expansion of fixing material, and when running into variation of ambient temperature, elastic pretension can discharge because difference expands the displacement introduced, and plays cushioning effect in vibration environment simultaneously.This device can reach the purpose of reliable stationary mirror 106.
Refer to Fig. 4, Fig. 8, the Reflecting mirror fixing device that this utility model provides, described spherical connection seat 108 is one and is more than hemispheroidal ball-crown body.Purpose is the bulb in order to wrap up ball head 102, and without coming off, the program is suitable for the ball pivot of tight space and connects, and the processing mode of ball-crown body can process hemisphere by turning mode, and retain parcel annulus exceeding hemispherical part, for the parcel limit of follow-up bulb press-in assembling.Wherein the radius of spherical crown is more than the bulb diameter of ball head 102, it is simple to spheric seat 108 can be freely rotatable by ball head relatively.
Refer to Fig. 4, the Reflecting mirror fixing device that this utility model provides, described ball head 102 includes the first axle and the second axle, the diameter of described second axle is more than the diameter of described first axle, described second axle is arranged near the bulb end of ball head 102, and described stud 105 hollow is provided with the first hole and the second hole, and the diameter in described second hole is more than the diameter in described first hole, described first axle inserts in described first hole, and described second axle matches with described second hole and is slidably connected；The lower end of described compression spring 104 is being against described first axle and the step surface of the second axle formation, and the upper end of described compression spring 104 is against described first hole and the step surface of the second hole formation.
Refer to Fig. 3, Fig. 4, Fig. 6, Fig. 7, the Reflecting mirror fixing device that this utility model provides, described snap ring 103 is made up of semicircular ring and three fulcrums.The thickness of this card ball 103 is typically at 0.3mm.
Refer to Fig. 3, Fig. 4, Fig. 6, the Reflecting mirror fixing device that this utility model provides, the thrust end of described ball head 102 is provided with ring groove, and described snap ring 103 is fixing with described stud 105 in being connected to described ring groove to be connected.The purpose of ring groove is set, is to make snap ring 103 be connected with the fixing of stud 105；Certainly, on the basis of realizing the purpose of this utility model, it is also applied for other known fixed form.
Refer to Fig. 3, Fig. 4, Fig. 6, the Reflecting mirror fixing device that this utility model provides, described stud 105 is provided with ring flange.Ring flange has the fixing position-limiting action for stud 105 so that it is be fixedly connected on reliably in fixed plate 101.Wherein, described ring flange can be provided with two cylindrical holes, for tightening of stud 105, use spanner, by cylindrical hole, stud 105 is applied pretightning force.This kind of structure, it is possible to save the space of stud 105.There is the effect of compact conformation.
As the most preferably embodiment, the Reflecting mirror fixing device that this utility model provides, described cushion pad 107 is rubber blanket or nylon cushion, and it can be to use the fixing connections of mode such as bonding with spherical connection seat 108.Cushion pad 107 directly contacts with reflecting mirror, is difficult to scratch and crushing eyeglass, it is to avoid the damage of minute surface crimping and spring angle.
As the most preferably embodiment, the Reflecting mirror fixing device that this utility model provides, the reduction length of described compression spring 104 is 1mm-3mm.But it is not limited to this reduction length, can calculate according to reflecting mirror 106 pretightning force according to the stiffness system of compression spring.
In sum, Reflecting mirror fixing device of the present utility model, it is suitable for the fixed installation of tight space high accuracy reflecting mirror, for solving in mount stress, stability and the optical module strict to temperature environment sensitivity requirement, and the fixing of different size reflecting mirror can be applied in batches.This device is mainly used in the fixing of reflecting mirror, coordinates other adjustment instrument, it is possible to achieve reflecting mirror being accurately positioned in light path system.
Claims (10)
1. a Reflecting mirror fixing device, including mirror mount (109), fixed plate (101), attachment screw
(110), lens pre-tightening apparatus (100), it is characterised in that described lens pre-tightening apparatus (100) includes ball
Shape connection seat (108), is connected with described spherical connection seat (108) ball pivot and has ball head (102), described ball
Head axle (102) is socketed with compression spring (104), and the excircle of described ball head (102) slidably connects
Stud (105), described stud (105) threadeds with described fixed plate (101), described ball head (102)
Thrust end fixed by snap ring (103) and described stud (105) and be connected；Described spherical connection seat (108)
Bottom surface connect have cushion pad (107).
2. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described fixed plate (101)
On be provided with multiple lens pre-tightening apparatus (100), the plurality of lens pre-tightening apparatus (100) is in annulus or square
Battle array distribution is arranged.
3. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described spherical connection seat (108)
It is one and is more than hemispheroidal ball-crown body.
4. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described ball head (102)
Including the first axle and the second axle, the diameter of described second axle is more than the diameter of described first axle, described second axle
Bulb end near ball head (102) is arranged, and described stud (105) hollow is provided with the first hole and second
Hole, the diameter in described second hole inserts in described first hole more than the diameter in described first hole, described first axle,
Described second axle matches with described second hole and is slidably connected；The lower end of described compression spring (104) is being against
The step surface that described first axle and the second axle are formed, the upper end of described compression spring (104) is against described first
The step surface that hole and the second hole are formed.
5. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described snap ring (103) by
Semicircular ring and three fulcrum compositions.
6. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described ball head (102)
Thrust end be provided with ring groove, described snap ring (103) is connected in described ring groove and described stud (105)
Fixing connection.
7. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described stud (105) sets
It is equipped with ring flange.
8. Reflecting mirror fixing device as claimed in claim 7, it is characterised in that be provided with on described ring flange
Two cylindrical holes.
9. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described cushion pad (107)
For rubber blanket or nylon cushion.
10. Reflecting mirror fixing device as claimed in claim 1, it is characterised in that described compression spring (104)
Reduction length be 1mm-3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620518899.0U CN205787318U (en) | 2016-05-31 | 2016-05-31 | Reflecting mirror fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620518899.0U CN205787318U (en) | 2016-05-31 | 2016-05-31 | Reflecting mirror fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205787318U true CN205787318U (en) | 2016-12-07 |
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ID=58135647
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620518899.0U Active CN205787318U (en) | 2016-05-31 | 2016-05-31 | Reflecting mirror fixing device |
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| CN (1) | CN205787318U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884918A (en) * | 2017-11-13 | 2018-04-06 | 中国科学院合肥物质科学研究院 | High energy ultraviolet laser gatherer under a kind of high-intensity magnetic field |
| CN108572429A (en) * | 2018-06-27 | 2018-09-25 | 长春禹衡时代光电科技有限公司 | A kind of prism installation device |
| CN109407228A (en) * | 2018-11-29 | 2019-03-01 | 大连仟面影视发展有限公司 | A kind of antidetonation optical module and anti-shock methods |
| CN109812994A (en) * | 2019-02-14 | 2019-05-28 | 浙江中控太阳能技术有限公司 | A kind of mirror support component and heliostat for heliostat |
| CN111929878A (en) * | 2020-07-10 | 2020-11-13 | 中国科学院西安光学精密机械研究所 | Off-axis three-mirror short-focus front objective lens system of hyperspectral imager |
| CN111948781A (en) * | 2020-07-10 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment |
| CN111999838A (en) * | 2020-07-10 | 2020-11-27 | 中国科学院西安光学精密机械研究所 | Adjusting component for adjusting distance between connected pieces and connecting device |
| CN112180485A (en) * | 2020-08-27 | 2021-01-05 | 四川云盾光电科技有限公司 | Efficient light reflection array structure and preparation method |
-
2016
- 2016-05-31 CN CN201620518899.0U patent/CN205787318U/en active Active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884918A (en) * | 2017-11-13 | 2018-04-06 | 中国科学院合肥物质科学研究院 | High energy ultraviolet laser gatherer under a kind of high-intensity magnetic field |
| CN108572429A (en) * | 2018-06-27 | 2018-09-25 | 长春禹衡时代光电科技有限公司 | A kind of prism installation device |
| CN109407228A (en) * | 2018-11-29 | 2019-03-01 | 大连仟面影视发展有限公司 | A kind of antidetonation optical module and anti-shock methods |
| CN109812994A (en) * | 2019-02-14 | 2019-05-28 | 浙江中控太阳能技术有限公司 | A kind of mirror support component and heliostat for heliostat |
| CN111929878A (en) * | 2020-07-10 | 2020-11-13 | 中国科学院西安光学精密机械研究所 | Off-axis three-mirror short-focus front objective lens system of hyperspectral imager |
| CN111948781A (en) * | 2020-07-10 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment |
| CN111999838A (en) * | 2020-07-10 | 2020-11-27 | 中国科学院西安光学精密机械研究所 | Adjusting component for adjusting distance between connected pieces and connecting device |
| CN111948781B (en) * | 2020-07-10 | 2021-07-27 | 中国科学院西安光学精密机械研究所 | Off-axis reflector mechanism capable of realizing high-precision support and multi-degree-of-freedom adjustment |
| CN111999838B (en) * | 2020-07-10 | 2022-03-25 | 中国科学院西安光学精密机械研究所 | Adjusting component for adjusting distance between connected pieces and connecting device |
| CN112180485A (en) * | 2020-08-27 | 2021-01-05 | 四川云盾光电科技有限公司 | Efficient light reflection array structure and preparation method |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |