CN112782823B - Five-dimensional adjustment mechanism of high stable grating concatenation - Google Patents

Five-dimensional adjustment mechanism of high stable grating concatenation Download PDF

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Publication number
CN112782823B
CN112782823B CN202110085798.4A CN202110085798A CN112782823B CN 112782823 B CN112782823 B CN 112782823B CN 202110085798 A CN202110085798 A CN 202110085798A CN 112782823 B CN112782823 B CN 112782823B
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adjusting
base
self
block
grating
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CN112782823A (en
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陈忆
新其其格
王磊
韩建
张凯
朱永田
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

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Abstract

The invention discloses a high-stability grating splicing five-dimensional adjusting mechanism which comprises a base, a spliced grating unit, a substrate, a stable fine-tuning self-locking mechanism, a spring pre-tightening part, a stable fine-tuning mechanism and a slidable spherical hinge fine-tuning mechanism. The stable fine adjustment mechanism and the slidable spherical hinge fine adjustment mechanism are arranged at the bottom of the spliced grating unit, the stable fine adjustment self-locking mechanism is distributed in an isosceles triangle shape and arranged at the back of the spliced grating unit, and the stable fine adjustment mechanism, the slidable spherical hinge fine adjustment mechanism and the stable fine adjustment self-locking mechanism are jointly used for five-dimensional adjustment decoupling. The invention applies pretightening force to the grating unit and the adjusting mechanism by adopting the spring to finish five-dimensional stable fine adjustment of the grating unit, and ensures that the fixation of the grating unit does not generate over-constraint and does not generate interference in the multi-dimensional adjusting process of the grating unit by utilizing the flexibility of the extension spring and the slidable spherical hinge mechanism.

Description

Five-dimensional adjustment mechanism of high stable grating concatenation
Technical Field
The invention belongs to the field of adjustment and installation of optical precision instruments, and particularly relates to a five-dimensional stable fine adjustment mechanism for grating splicing.
Background
In the field of astronomical technology, gratings are the most commonly used dispersion elements in optical precision instruments such as spectrometers, and as the volumes of astronomical optical telescopes and spectrometers become larger, the application size of echelle gratings reaches 1200mm × 300mm, the direct manufacturing size of the existing gratings cannot reach 1 meter level, so that the application size is reached by adopting a mechanical splicing mode. The adjusting error range of six degrees of freedom of the grating units is in submicron and submicron radian levels when splicing and adjusting the mechanical splicing grating mechanism, and higher requirements are provided for the short-term stability and even the long-term stability of the mechanism. The existing grating splicing is mainly applied to the laser field, optical instruments mostly adopt a confocal splicing method with light energy as a main target, the confocal splicing can be compensated and adjusted among multiple degrees of freedom, grating splicing mechanisms mostly adopt a non-manual driving mode, and a plurality of unstable factors and errors can be introduced relative to manual driving. The adjustment and locking of the existing optical precision adjusting mechanism are mutually independent, the slight change of the adjusting mechanism can be caused in the locking process, and the adjustment dislocation can be brought by the looseness of the adjusting mechanism or the locking mechanism, so that the long-time stability can not be maintained.
Disclosure of Invention
The invention aims to provide a set of high-stability five-dimensional fine adjustment mechanism for grating splicing, which can achieve stable and accurate adjustment aiming at the splicing of a rectangular large-caliber grating, and the splicing error can reach a submicron level. The invention has the advantages that the invention can realize independent decoupling within the fine adjustment precision range, realize self-locking in the fine adjustment process and achieve high-stability adjustment.
In order to achieve the purpose, the invention provides the following technical scheme:
a high-stability grating splicing five-dimensional adjusting mechanism comprises a base, a splicing grating unit, a substrate, a stable fine adjustment self-locking mechanism, a spring pre-tightening part, a stable fine adjustment mechanism and a slidable spherical hinge fine adjustment mechanism; wherein,
the stable fine-tuning self-locking mechanism comprises an adjusting base and a first ejector block arranged on the adjusting base, a first ejector block position adjusting self-locking mechanism is arranged between the first ejector block and the adjusting base, a first pre-tightening extension spring is connected between the first ejector block and the adjusting base, and the adjusting base is fixedly connected with the base plate; the spring pre-tightening component comprises a connecting plate and a second pre-tightening extension spring which is connected with the connecting plate and plays a pre-tightening role, the base plate and the connecting plate are connected through the second pre-tightening extension spring, the first ejector block is in point contact with the connecting plate, the connecting plate is connected with the back of the spliced grating unit, and the stable fine-tuning self-locking mechanism is arranged between the connecting plate and the base plate;
the stable fine adjustment mechanism comprises a chute base and a second ejector block arranged on the chute base, a second ejector block position adjusting self-locking mechanism is arranged between the second ejector block and the chute base, and the chute base is fixedly connected with the base;
the sliding spherical hinge fine adjustment mechanism comprises a transverse adjustment sliding chute, a spherical hinge and a gasket fixedly connected with the spherical hinge, the spherical hinge is installed in a V-shaped base, the V-shaped base is arranged in the transverse adjustment sliding chute, a gasket position adjustment self-locking mechanism is arranged between the V-shaped base and the transverse adjustment sliding chute, and the transverse adjustment sliding chute is fixedly connected with the base;
the stable fine adjustment mechanism and the slidable spherical hinge fine adjustment mechanism are arranged at the bottom of the spliced grating unit, the stable fine adjustment self-locking mechanism is distributed in an isosceles triangle shape and arranged at the back of the spliced grating unit, and the stable fine adjustment mechanism, the slidable spherical hinge fine adjustment mechanism and the stable fine adjustment self-locking mechanism are jointly used for five-dimensional adjustment decoupling.
Furthermore, the first ejector block position adjusting self-locking mechanism comprises a wedge surface matching sliding block and a wedge surface matching fixing block, the ejector block, the wedge surface matching sliding block, the wedge surface matching fixing block and the adjusting base are assembled from top to bottom, and a first adjusting screw used for adjusting the position of the wedge surface matching sliding block relative to the wedge surface matching fixing block is installed on the side face of the adjusting base.
Furthermore, the spring pre-tightening component further comprises a bonding gasket fixedly connected with the connecting plate, and the bonding gasket is bonded to the back of the spliced grating unit corresponding to the position of the stable fine-tuning self-locking mechanism.
Furthermore, second kicking block position control self-locking mechanism still includes the scarf slider, the bottom surface of second kicking block is the scarf, second kicking block, scarf slider, spout base from top to bottom assemble, and spout base side-mounting has the second adjusting screw that is used for adjusting the scarf slider for the second kicking block position.
Furthermore, the upper surface of the second ejector block is a spherical surface and is in point contact with the bottom of the spliced grating unit.
Furthermore, guide plates are arranged on two sides of the second ejector block, and guide grooves are formed in two sides of the sliding groove base.
Furthermore, the gasket position adjusting self-locking mechanism comprises a transverse adjusting wedge block and a pre-tightening compression spring, the V-shaped base is in surface contact with the transverse adjusting sliding groove, the pre-tightening compression spring is arranged on one side of the V-shaped base, the other side of the V-shaped base is abutted to the wedge surface of the transverse adjusting wedge block, and a third adjusting screw used for adjusting the position of the transverse adjusting wedge block relative to the V-shaped base is arranged on the side surface of the transverse adjusting sliding groove.
Furthermore, the spherical hinge can rotate in the V-shaped base and translate along the Z direction, the gasket is bonded with the bottom of the spliced grating unit, the V-shaped base can slide along the X direction in the transverse adjusting sliding groove, and the translation and self-locking of the V-shaped base are completed under the combined action of the third adjusting screw, the adjusting transverse adjusting wedge block and the pre-tightening compression spring.
Furthermore, the second pre-tightening extension spring, the first pre-tightening extension spring and the pre-tightening compression spring act together to enable each fine adjustment mechanism to be self-locked at an adjustment position, wherein the stable fine adjustment mechanism is self-locked by applying pressure through the gravity of the spliced grating unit.
Compared with the prior art, the invention has the beneficial effects that:
the invention ensures that the large-size spliced grating unit can realize five dimensions
Figure BDA0002910751890000031
High precision, high stability fine tuning, self-locking and four degrees of freedom
Figure BDA0002910751890000032
Adjusting decoupling and the like.
Drawings
Fig. 1 is an overall appearance diagram of a double grating splicing five-dimensional stable fine adjustment mechanism;
FIG. 2 is a schematic diagram of the structure of FIG. 1 with the tiled grating elements removed;
FIG. 3 is an external view of the grating stabilizing and fine-tuning self-locking mechanism;
FIG. 4 is a first side sectional view of the grating stabilizing, fine tuning, and self-locking mechanism;
FIG. 5 is a second side cross-sectional view of the grating stabilizing, fine tuning, and self-locking mechanism;
FIG. 6 is an external view of the fine tuning mechanism for stabilizing the grating;
FIG. 7 is a cross-sectional view of a grating stabilization fine adjustment mechanism;
FIG. 8 is an external view of the fine adjustment mechanism of the grating slidable spherical hinge;
FIG. 9 is a cross-sectional view of a grating slidable ball hinge fine adjustment mechanism;
FIG. 10 is a top view of a grating slidable ball hinge fine adjustment mechanism;
FIG. 11 is a diagram of the distribution of the back support points of the grating;
FIG. 12 is a schematic diagram of the adjustment of the grating bottom support.
The labels in the figure are: 1. a base; 2. splicing grating units; 3. a substrate; 4. the self-locking mechanism is stably and finely adjusted; 4-1, a first adjusting screw; 4-2, adjusting the base; 4-3, matching the wedge surface with a fixed block; 4-4, matching the wedge surface with the sliding block; 4-5, a first top block; 4-6, a first pre-tightening extension spring; 5. a stable fine adjustment mechanism; 5-1, a second top block; 5-2, wedge surface slide blocks; 5-3, a second adjusting screw; 5-4, a chute base; 6. a slidable spherical hinge fine adjustment mechanism; 6-1, a gasket; 6-2, a stop block; 6-3, transversely adjusting the sliding chute; 6-4, a third adjusting screw; 6-5, transversely adjusting the wedge block; 6-6, pre-tightening the compression spring; 6-7, a first V-shaped chute; 6-8, spherical hinge; 6-9, a second V-shaped chute; 6-10, connecting pin; 7. bonding a gasket; 8. a connecting plate; 9. and a second pre-tensioned tension spring.
Detailed Description
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawings.
The present embodiment provides a dual grating split five-dimensional stable fine tuning mechanism as shown in fig. 1. The double-grating splicing five-dimensional stable fine adjustment mechanism comprises a splicing grating unit 2, a base 1, a substrate 3, a stable fine adjustment self-locking mechanism 4, a stable fine adjustment mechanism 5, a slidable spherical hinge fine adjustment mechanism 6 and a spring pre-tightening component. In this embodiment, the base 1 and the substrate 3 are vertically distributed and used as a fixed reference for grating splicing.
In the grating splicing process, in order to ensure coplanarity of two spliced gratings and parallelism and whole periodicity of grating grooves, five-dimensional degrees of freedom of spliced grating units are required to be adjusted respectively
Figure BDA0002910751890000041
In which the degree of freedom is adjusted
Figure BDA0002910751890000042
To achieve a gratingCoplanarity, adjustment of degrees of freedom
Figure BDA0002910751890000043
Achieve the parallelism of grating grooves and adjust the degree of freedom
Figure BDA0002910751890000044
The whole periodicity of the grating grooves is ensured, and the two spliced grating units are mutually reference gratings in the adjusting process, so that the adjusting stroke is improved.
As shown in fig. 2, in this embodiment, the spring pre-tightening component is composed of a connection plate 8, an adhesive pad 7, and a second pre-tightening extension spring 9, the adhesive pad 7 is adhered to the back of the grating unit at a position corresponding to the stable fine-tuning self-locking mechanism 4, the connection plate 8 is fixedly connected to the adhesive pad 7, the substrate 3 and the connection plate 8 are connected by the second pre-tightening extension spring 9, the stable fine-tuning self-locking mechanism 4 is installed between the connection plate 8 and the substrate 3, the stable fine-tuning self-locking mechanism 4 is in point contact with the connection plate 8, and the second pre-tightening extension spring 9 performs a stretching pre-tightening and flexible function, so that the grating unit can be tensioned, a plane where the grating unit is located is restrained at three points according to the point contact between the dome top block 4-5 and the connection plate 8, and it can be ensured that no interference occurs in the multi-dimensional adjustment process.
As shown in fig. 3-5, in the present embodiment, the stable fine tuning self-locking mechanism 4 is installed on the base 1 and contacts with the grating unit point. The first ejector block 4-5 (preferably a dome), the wedge surface matching slide block 4-4, the wedge surface matching fixing block 4-3 and the adjusting base 4-2 are assembled from top to bottom, a first adjusting screw 4-1 is installed on the adjusting base 4-2 and pushes the wedge surface matching slide block 4-4 to slide relatively, so that the first ejector block 4-5 is pushed to move up and down along the guide plate, the first pre-tightening tension spring 4-6 is connected with the first ejector block 4-5 and the adjusting base 4-2 to eliminate vertical gaps, and meanwhile, self-locking is generated in the up-and-down adjusting process of the first ejector block 4-5 by applying force. The adjusting base 4-2 is fixedly connected with the base plate 3, and the first ejector block 4-5 is in point contact with the connecting plate 8. Two guide plates can be arranged on the adjusting base 4-2, and the sliding block in wedge surface matching can slide through the adjusting screw, so that the first jacking block 4-5 is pushed to move up and down along the guide plates. The first pre-tightening extension spring 4-6 generates pressure on the first ejector block 4-5, the wedge surface matching sliding block 4-4 and the wedge surface matching fixing block 4-3 in the up-and-down moving process of the first ejector block 4-5, so that the wedge surface matching sliding block 4-4 is self-locked, the wedge surface matching fixing block 4-3 and the wedge surface matching sliding block 4-4 in wedge surface matching are independent parts, and wedge surface parts with different angles can be replaced according to requirements.
As shown in fig. 6-7, in the present embodiment, in the stabilizing fine adjustment mechanism 5, a second top block 5-1 (preferably, the bottom surface is a wedge), a wedge surface slider 5-2, and a chute base 5-4 are matched from top to bottom, a second adjusting screw 5-3 is installed on the chute base 5-4, the wedge surface slider 5-2 is pushed by adjusting the second adjusting screw 5-3, so that the second top block 5-1 moves up and down along the guide, the upper surface of the second top block 5-1 is a spherical surface and is in point contact with the bottom of the grating unit, and the chute base 5-4 is fixedly connected with the base 1. In this embodiment, the upper surface of the second top block 5-1 is preferably spherical and is in point contact with the bottom of the grating unit. And guide plates can be arranged on two sides of the second ejector block 5-1, guide grooves matched with the guide plates are arranged on two sides of the sliding groove base 5-4, and when the second adjusting screw 5-3 pushes the wedge surface sliding block 5-2 to move, the second ejector block 5-1 is pushed to move up and down along the guide grooves in the sliding groove base 5-4.
In this embodiment, as shown in fig. 8-10, the slidable spherical hinge fine adjustment mechanism 6 is mounted on the base and is attached to the bottom of the grating unit by a bottom gasket. The slidable spherical hinge fine adjustment mechanism 6 is mounted on the base plate, is in point contact with the connecting plate, and is located between the connecting plate and the base plate. The gasket 6-1 is fixedly connected with the spherical hinge 6-8 (preferably connected through a connecting pin 6-10), the spherical hinge 6-8 rotates in the V-shaped base (preferably comprising a first V-shaped chute 6-7 and a second V-shaped chute 6-9) and translates along the Z direction, and the spherical hinge 6-8 can slide and rotate in the spherical hinge chute. The V-shaped base is in surface contact with the transverse adjusting sliding groove 6-3, and the position of the V-shaped sliding groove is restrained by pre-tightening the compression spring 6-6 and the transverse adjusting wedge block 6-5. The gasket 6-1 is bonded with the bottom of the grating unit, so that the grating unit is ensured not to interfere in the multidimensional adjustment project. The V-shaped base can slide in the transverse adjusting sliding groove 6-3 along the X direction, and the translation and self-locking of the V-shaped base are completed under the combined action of the third adjusting screw 6-4, the transverse adjusting wedge 6-5 and the pre-tightening compression spring 6-6. A stop 6-2 can also be arranged above the transverse adjusting wedge 6-5. The transverse adjusting chute 6-3 is fixedly connected with the base 1. The V-shaped base is in contact with the side of the transverse adjusting chute 6-3 through a pre-tightening compression spring 6-6 and a transverse adjusting wedge block 6-5, the bottom of the V-shaped base is in contact with the surface of the transverse adjusting chute 6-3, and the V-shaped base can be translated in the transverse adjusting chute 6-3 by pushing the transverse adjusting wedge block 6-5 through a third adjusting screw 6-4.
The operation method of the double-grating splicing five-dimensional stable fine adjustment mechanism of the embodiment is as follows:
in the five-dimensional adjustment of the spliced grating unit, the translation in the X direction is completed by a third adjusting screw 6-4, the rotation around the Z axis is completed by a second adjusting screw 5-3, the rotation around the X axis and the rotation around the Y axis are completed by a first adjusting screw 4-1 in a single stable fine-tuning self-locking mechanism 4, the translation in the Z direction is completed by a first adjusting screw 4-1 in three stable-tuning self-locking mechanisms 4 behind the single grating unit in the same amount, each adjusting mechanism is locked under the combined action of a second pre-tightening tension spring 9, a first pre-tightening tension spring 4-6 and a pre-tightening compression spring 6-6, the self-locking is carried out at an adjusting position, the stable adjusting mechanism 5 exerts pressure by the gravity of the grating to realize self-locking, stably restricts the whole grating unit and is not influenced by the first adjusting screw 4-1, the second adjusting screw 5-3, The loosening effect of the third adjusting screw 6-4.
In this embodiment, six stable fine-tuning self-locking mechanisms 4 are mounted on the substrate 3 and distributed in two symmetrical isosceles triangles, and the distribution mode is as shown in fig. 11, where the short side of the rectangular grating is the parallel side of the bottom side of the isosceles triangle. Three stable fine-tuning self-locking mechanisms are arranged behind each grating unit to control the coplanarity of the gratings. The rotation motion of the grating unit around the Y axis by taking the bottom side of the isosceles triangle as a rotating axis is realized by adjusting the fine adjustment mechanism on the vertex of the isosceles triangle; adjusting the fine adjustment mechanism on one of two points on the bottom edge of the isosceles triangle to realize the rotation motion of the grating unit around the X-axis which is close to the rotation of the X-axis and takes the symmetrical edge of the isosceles triangle as a rotating shaft, and completing the parallel of the spliced grating relative to the grating surface of the reference grating by adjusting the single fine adjustment mechanism when the height ratio of the bottom edge of the isosceles triangle is smaller; the translation in the Z-axis direction of the grating unit can be realized by adjusting three fine adjustment mechanisms distributed in an isosceles triangle in equal amount at the same time. The invention is applied to splicing of large rectangular gratings, the distribution distance of the grating bottom adjusting mechanisms (the stable fine adjustment mechanism 5 and the slidable spherical hinge fine adjustment mechanism 6) and the isosceles triangle distribution mode of the grating back adjusting mechanism (the three stable fine adjustment self-locking mechanisms 4) can realize five-dimensional adjustment decoupling within an error range.
In this embodiment, two stable fine-tuning self-locking mechanisms 4 and two slidable spherical hinge fine-tuning mechanisms 6 are respectively arranged on the base 3 in the distribution manner of the A, B point position in fig. 12, and each splicing grating unit 2 is adjusted by one stable fine-tuning self-locking mechanism 4 at the point a and one slidable spherical hinge fine-tuning mechanism 6 at the point B. The stable fine-tuning self-locking mechanism 4 is adjusted, so that the spliced grating unit 2 rotates on a grating plane by taking a spherical hinge 6-8 of the slidable spherical hinge fine-tuning mechanism 6 as a rotating point, and the grating unit rotates around a Z axis vertical to the grating plane; the slidable spherical hinge fine adjustment mechanism 6 is adjusted, so that the spliced grating unit 2 can be translated along a straight line formed by the spherical hinges 6-8 and the contact points of the stable fine adjustment self-locking mechanism 4 and the grating, and the translation of the grating unit in the direction close to the X axis can be realized. The distribution distance between the stable fine adjustment self-locking mechanism 4 and the slidable spherical hinge fine adjustment mechanism 6 is optimized by considering the fine adjustment precision of Z-axis rotation and X-axis direction translation and the support stability of the grating unit.
In summary, the present invention provides a stable five-dimensional adjusting mechanism for grating stitching, which includes: a base and a substrate which are perpendicular to each other as a mounting reference; three-point support is arranged on the back of the grating unit, a stable fine-tuning self-locking mechanism is correspondingly arranged on the substrate and is in point contact with the grating unit, and the grating theta is adjusted by adjusting the single mechanism and the three mechanisms by adjusting the same amount through adjusting screwsx、θyA degree of freedom in the Z direction; a slidable spherical hinge fine adjustment mechanism and a stable fine adjustment mechanism are arranged on the base, and the two adjustment mechanisms arranged on the base support the grating from the bottom; the stable fine adjustment mechanism completes theta by changing the height of a single point at the bottom of the gratingzFine adjustment; the slidable spherical hinge fine adjustment mechanism is characterized in that a spherical hinge is arranged in a sliding chute, so that the five-dimensional adjustment is ensured not to generate interference, the sliding chute of the spherical hinge slides on the base, and the adjustment in the X direction can be completed by fine adjustment of the position of the sliding chute; the stabilizerThe fixed fine adjustment mechanism adopts a wedge surface matched sliding mode, and adopts an adjusting screw to adjust the relative position of the sliding block to achieve fine adjustment; the adjusting mechanisms are self-locked by springs or dead weight. In the invention, a spring is adopted to apply pretightening force to the grating unit and the adjusting mechanism to complete five-dimensional stable fine adjustment of the grating unit, and the flexibility of the extension spring and the slidable spherical hinge mechanism are utilized to ensure that the fixation of the grating unit does not generate over-constraint and interference does not occur in the multi-dimensional adjusting process of the grating unit.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A high-stability grating splicing five-dimensional adjusting mechanism is characterized by comprising a base (1), a splicing grating unit (2), a substrate (3), a stable fine adjustment self-locking mechanism (4), a spring pre-tightening part, a stable fine adjustment mechanism (5) and a slidable spherical hinge fine adjustment mechanism (6); wherein,
the stable fine-tuning self-locking mechanism (4) comprises an adjusting base (4-2) and a first ejector block (4-5) arranged on the adjusting base (4-2), a first ejector block position adjusting self-locking mechanism is arranged between the first ejector block (4-5) and the adjusting base (4-2), a first pre-tightening tension spring (4-6) is connected between the first ejector block (4-5) and the adjusting base (4-2), and the adjusting base (4-2) is fixedly connected with the base plate (3); the spring pre-tightening component comprises a connecting plate (8) and a second pre-tightening extension spring (9) which is connected with the connecting plate (8) and plays a pre-tightening role, the base plate (3) and the connecting plate (8) are connected through the second pre-tightening extension spring (9), the first ejector block (4-5) is in point contact with the connecting plate (8), the connecting plate (8) is connected with the back of the spliced grating unit (2), and the stable fine-tuning self-locking mechanism (4) is installed between the connecting plate (8) and the base plate (3); the first ejector block position adjusting self-locking mechanism comprises a wedge surface matching sliding block (4-4) and a wedge surface matching fixing block (4-3), the ejector block (4-5), the wedge surface matching sliding block (4-4), the wedge surface matching fixing block (4-3) and an adjusting base (4-2) are assembled from top to bottom, and a first adjusting screw (4-1) used for adjusting the position of the wedge surface matching sliding block (4-4) relative to the wedge surface matching fixing block (4-3) is installed on the side surface of the adjusting base (4-2);
the stable fine adjustment mechanism (5) comprises a chute base (5-4) and a second ejector block (5-1) arranged on the chute base (5-4), a second ejector block position adjusting self-locking mechanism is arranged between the second ejector block (5-1) and the chute base (5-4), and the chute base (5-4) is fixedly connected with the base (1); the position adjusting self-locking mechanism for the second ejector block further comprises a wedge surface sliding block (5-2), the bottom surface of the second ejector block (5-1) is a wedge surface, the second ejector block (5-1), the wedge surface sliding block (5-2) and a sliding groove base (5-4) are assembled from top to bottom, and a second adjusting screw (5-3) used for adjusting the position of the wedge surface sliding block (5-2) relative to the second ejector block (5-1) is installed on the side surface of the sliding groove base (5-4);
the sliding spherical hinge fine adjustment mechanism (6) comprises a transverse adjustment sliding chute (6-3), a spherical hinge (6-8) and a gasket (6-1) fixedly connected with the spherical hinge (6-8), the spherical hinge (6-8) is installed in a V-shaped base, the V-shaped base is arranged in the transverse adjustment sliding chute (6-3), a gasket position adjustment self-locking mechanism is arranged between the V-shaped base and the transverse adjustment sliding chute (6-3), and the transverse adjustment sliding chute (6-3) is fixedly connected with the base (1); the gasket position adjusting self-locking mechanism comprises a transverse adjusting wedge block (6-5) and a pre-tightening compression spring (6-6), the V-shaped base is in surface contact with a transverse adjusting sliding groove (6-3), the pre-tightening compression spring (6-6) is arranged on one side of the V-shaped base, the other side of the V-shaped base is abutted against a wedge surface of the transverse adjusting wedge block (6-5), and a third adjusting screw (6-4) used for adjusting the position of the transverse adjusting wedge block (6-5) relative to the V-shaped base is arranged on the side surface of the transverse adjusting sliding groove (6-3);
stabilize fine setting mechanism (5), slidable ball pivot fine setting mechanism (6) and set up in concatenation grating unit (2) bottom, it is three stabilize fine setting self-locking mechanism (4) and be isosceles triangle distribution and set up in concatenation grating unit (2) back, stabilize fine setting mechanism (5), slidable ball pivot fine setting mechanism (6), stabilize fine setting self-locking mechanism (4) and be used for five dimensions jointly and adjust the decoupling zero.
2. The high-stability grating splicing five-dimensional adjusting mechanism is characterized in that the spring pre-tightening component further comprises an adhesive gasket (7) fixedly connected with the connecting plate (8), and the adhesive gasket (7) is adhered to the back of the spliced grating unit (2) corresponding to the position of the stable fine-tuning self-locking mechanism (4).
3. The high-stability five-dimensional adjusting mechanism for splicing the grating as claimed in claim 1, wherein the upper surface of the second top block (5-1) is spherical and is in point contact with the bottom point of the spliced grating unit (2).
4. The high-stability five-dimensional adjusting mechanism for splicing gratings according to claim 1, wherein guide plates are arranged on two sides of the second ejector block (5-1), and guide grooves are arranged on two sides of the chute base (5-4).
5. The high-stability five-dimensional adjusting mechanism for grating splicing is characterized in that the spherical hinge (6-8) can rotate in a V-shaped base and can translate along the Z direction, the gasket (6-1) is bonded with the bottom of the spliced grating unit (2), the V-shaped base can slide along the X direction in a transverse adjusting sliding groove (6-3), and the translation and self-locking of the V-shaped base are completed through the combined action of a third adjusting screw (6-4), an adjusting transverse adjusting wedge block (6-5) and a pre-tightening compression spring (6-6).
6. The five-dimensional adjusting mechanism for splicing the high-stability grating as claimed in claim 1, wherein the second pre-tightening tension spring (9), the first pre-tightening tension springs (4-6) and the pre-tightening compression springs (6-6) act together to enable each fine adjustment mechanism to be self-locked at an adjustment position, and the stable fine adjustment mechanism (5) is self-locked by applying pressure through gravity of the spliced grating unit (2).
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