CN112904522B - High-precision grating splicing error correction device and method - Google Patents
High-precision grating splicing error correction device and method Download PDFInfo
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- CN112904522B CN112904522B CN202110346767.XA CN202110346767A CN112904522B CN 112904522 B CN112904522 B CN 112904522B CN 202110346767 A CN202110346767 A CN 202110346767A CN 112904522 B CN112904522 B CN 112904522B
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Abstract
The invention relates to a high-precision grating splicing error correction device and a method, wherein a two-dimensional correction unit of the high-precision grating splicing error correction device is combined with a linear actuator and a flexible hinged structure to adjust the position and the attitude of a first grating, so that the correction of a two-dimensional splicing error with high precision and high stability is realized; the three-dimensional correction unit of the high-precision grating splicing error correction device is combined with the structure adopting the linear actuator and the elastic column to adjust the position and the posture of the second grating, so that the correction of three-dimensional splicing errors with high precision and high stability is realized, and the high-precision correction of five-dimensional grating splicing errors of the spliced grating is comprehensively realized through the coupling of the error correction effects of the two-dimensional correction unit and the three-dimensional correction unit, so that the high-precision grating splicing error correction device has the advantages of high splicing error correction precision and high working stability.
Description
Technical Field
The invention relates to the technical field of grating splicing, in particular to a high-precision grating splicing error correction device and method.
Background
In the astronomy field and the laser nuclear fusion field, a large-size diffraction grating is a main factor influencing the resolution of a spectrometer and the energy output of a laser in a kilowatt level. With the starting of items such as 30-meter telescopes and 12-meter telescopes, the requirement of large-size diffraction gratings is more and more urgent. Because diffraction grating ruling has a plurality of problems, grating splicing technology is the main technology for manufacturing large-size diffraction gratings at present.
The grating splicing is that a mechanical device is utilized to splice two or more small-size gratings with the same parameters together, the relative position posture of the gratings is adjusted, and the splicing error between the gratings is corrected, so that the phase change of incident beams introduced by each grating is approximate, and the gratings can be used as a whole block of grating under a certain precision requirement. Therefore, the grating splicing error correction device is the key of grating splicing.
The existing grating splicing error correction device has the defects of complex structure, low error adjusting structure precision and low stability, and the grating copying process is as follows: firstly, placing a master grating on a horizontal table, then pouring a replication adhesive on the master grating, finally placing a replication grating blank on the master grating and the adhesive, and separating the master grating and the replication grating after the adhesive is solidified. Therefore, the grating replication process cannot be realized by using the vertical structure. Most of the existing grating splicing error correction devices are of vertical structures and cannot be used for splicing and copying gratings. Therefore, the development of a grating stitching error correction device with high precision, high stability and horizontal structure is a problem to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a high-precision grating splicing error correction device and a high-precision grating splicing error correction method.
The invention provides a high-precision grating splicing error correction device which comprises a base, a two-dimensional correction unit and a three-dimensional correction unit, wherein the two-dimensional correction unit is arranged on the base and used for assembling a first grating, the three-dimensional correction unit is arranged on the base and used for assembling a second grating, the first grating and the second grating are spliced to form a spliced grating, the two-dimensional correction unit is used for adjusting the position and the posture of the first grating so as to correct the rotation error delta theta of the spliced grating around the normal direction of the gratingzAnd a translation error delta x along the grating vector direction, wherein the three-dimensional correction unit is used for adjusting the position posture of the second grating so as to correct the rotation error delta theta of the spliced grating around the grating vector directionxSquare around grating lineRotational error of direction Δ θyAnd a translation error delta z along the normal direction of the grating, wherein the normal direction of the grating is the z-axis direction, the vector direction of the grating is the x-axis direction, and the grid line direction of the grating is the y-axis direction, and the five-dimensional splicing error correction of the spliced grating is realized by adjusting the position and the posture of the first grating and the second grating respectively by the two-dimensional correction unit and the three-dimensional correction unit.
In an embodiment of the invention, the base includes a bottom plate and a supporting seat disposed on the bottom plate, the two-dimensional calibration unit is supported on the supporting seat, and the three-dimensional calibration unit is supported on the bottom plate.
In an embodiment of the invention, the supporting seat is an i-shaped supporting seat.
In an embodiment of the present invention, the two-dimensional calibration unit includes a two-dimensional motion platform supported on the support base, a first grating seat fixed on the two-dimensional motion platform, an x-axis nut disposed on the two-dimensional motion platform, an x-axis linear actuator fixed on the x-axis nut, a y-axis nut disposed on the two-dimensional motion platform, and a y-axis linear actuator fixed on the y-axis nut; the first grating seat is used for assembling the first grating, the two-dimensional motion platform is provided with a plurality of flexible structures, and the plurality of flexible structures comprise two first flexible structures and a second flexible structure arranged between the two first flexible structures; the two-dimensional motion platform is used for enabling the two-dimensional motion platform to rotate by taking the second flexible structure as an axis in a mode of adjusting the displacement of the y-axis linear actuator by taking the second flexible structure as an axis, so that the rotation error delta theta of the spliced grating around the normal direction of the grating is realizedzCorrecting; the two-dimensional motion platform adjusts the displacement of the x-axis linear actuator by taking the two first flexible structures as axes, so that the two-dimensional motion platform displaces along the x-axis direction by taking the two first flexible structures as axes, and the correction of the translation error delta x of the spliced grating along the grating vector direction is realized.
In one embodiment of the present invention, the three dimensions areThe correcting unit comprises a fixed plate supported on the bottom plate, an elastic column, a first linear actuator, a second linear actuator and a third linear actuator which are arranged on the fixed plate at intervals, a three-dimensional moving platform flexibly fixed on the elastic column, the first linear actuator, the second linear actuator and the third linear actuator, and a second grating seat fixed on the three-dimensional moving platform; the elastic column and the first linear actuator are arranged on one side of the fixed plate close to the supporting seat at intervals, the elastic column and the second linear actuator are arranged in a diagonal manner, the first linear actuator and the third linear actuator are arranged in a diagonal manner, and the second grating seat is used for assembling the second grating; wherein the three-dimensional motion platform corrects the rotation error delta theta of the spliced grating around the grating vector direction in a mode of adjusting the displacement amount of the first linear actuator and the second linear actuator along the grating normal direction by fixing the elastic column and the third linear actuatorxThe three-dimensional motion platform corrects the rotation error delta theta of the spliced grating around the grating grid line direction in a mode of fixing the elastic column and the first linear actuator to adjust the displacement of the second linear actuator and the third linear actuator along the grating normal directionyAnd the three-dimensional motion platform corrects the translation error delta z of the spliced grating along the grating normal direction in a mode of adjusting the displacement amount of the elastic column, the first linear actuator, the second linear actuator and the third linear actuator along the grating normal direction.
In an embodiment of the present invention, the elastic column includes an external thread cylinder, a z-axis nut rotatably sleeved on the external thread cylinder, a gasket disposed in the external thread cylinder, a compression spring fixed on the gasket, and a support pillar fixed between the compression spring and the three-dimensional motion platform, wherein the gasket extends to have at least two symmetrically disposed sliding blocks, the external thread cylinder is provided with corresponding sliding slots, and the sliding blocks are disposed on or below the z-axis nut in a state of protruding from the corresponding sliding slots, so that when the z-axis nut is rotated along the external thread cylinder, the two sliding blocks are linked by the z-nut and slide along the sliding slots, so that the gasket is linked with the compression spring to move, thereby adjusting a displacement of the elastic column along a normal direction of the grating.
In an embodiment of the present invention, the gasket includes four sliding blocks, that is, the gasket is a cross-shaped gasket.
In an embodiment of the present invention, the three-dimensional moving platform and the fixed plate are provided with corresponding fixed holes, and the three-dimensional correction unit further includes a first extension spring and a second extension spring fixed between the three-dimensional moving platform and the fixed plate via the fixed holes for maintaining a state of rigid contact between the three-dimensional moving platform and the elastic column, the first linear actuator, the second linear actuator, and the third linear actuator.
The invention also provides a high-precision grating splicing error correction method in another aspect, which comprises the following steps:
s1, assembling a first grating in a two-dimensional correction unit, and assembling a second grating in a three-dimensional correction unit, wherein the first grating and the second grating form a spliced grating;
s2, adjusting the position posture of the first grating through the two-dimensional correction unit to correct the rotation error delta theta of the spliced grating around the normal direction of the gratingzAnd a translation error Δ x along the grating vector direction; and
s3, adjusting the position posture of the second grating through the three-dimensional correction unit to correct the rotation error delta theta of the spliced grating around the grating vector directionxRotation error Δ θ around the grating lineyAnd a translation error delta z along the normal direction of the grating, wherein the normal direction of the grating is the z-axis direction, the vector direction of the grating is the x-axis direction, and the grating line direction of the grating is the y-axis direction.
In an embodiment of the present invention, the two-dimensional calibration unit includes a two-dimensional motion platform, a first grating seat fixed on the two-dimensional motion platform, an x-axis nut disposed on the two-dimensional motion platform, an x-axis linear actuator fixed on the x-axis nut, a y-axis nut disposed on the two-dimensional motion platform, and a y-axis linear actuator fixed on the y-axis nut; the first grating mount is configured to mount the first grating, the two-dimensional moving platform has a plurality of flexible structures, the plurality of flexible structures includes two first flexible structures and a second flexible structure disposed between the two first flexible structures, and the step S2 includes the steps of:
s21, adjusting the displacement of the y-axis linear actuator by taking the second flexible structure as an axis, so that the two-dimensional motion platform rotates by taking the second flexible structure as an axis, and further realizing the rotation error delta theta of the spliced grating around the normal direction of the gratingzCorrecting; and
and S22, adjusting the displacement of the x-axis linear actuator by taking the two first flexible structures as axes, so that the two-dimensional motion platform displaces along the x-axis direction by taking the two first flexible structures as axes, thereby realizing the correction of the translation error delta x of the spliced grating along the grating vector direction.
In one embodiment of the invention, the three-dimensional correction unit comprises a fixed plate, an elastic column, a first linear actuator, a second linear actuator and a third linear actuator which are arranged on the fixed plate at intervals, a three-dimensional motion platform flexibly fixed on the elastic column, the first linear actuator, the second linear actuator and the third linear actuator, and a second grating seat fixed on the three-dimensional motion platform; wherein the elastic column and the first linear actuator are disposed at an interval on a side of the fixed plate close to the two-dimensional correction unit, and the elastic column and the second linear actuator are disposed diagonally, the first linear actuator and the third linear actuator are disposed diagonally, and the second grating mount is used to mount the second grating, the step S3 includes the steps of:
s31, fixing the elastic column and the third linear actuator, adjusting the first linear actuator and the second linear actuatorThe displacement of the linear actuator along the normal direction of the grating is used for correcting the rotation error delta theta of the spliced grating around the vector direction of the gratingx；
S32, fixing the elastic column and the first linear actuator, and adjusting the displacement of the second linear actuator and the third linear actuator along the normal direction of the grating to correct the rotation error delta theta of the spliced grating around the grating line directiony(ii) a And
s33, adjusting the displacement of the elastic column, the first linear actuator, the second linear actuator and the third linear actuator along the normal direction of the grating to correct the translation error deltaz of the spliced grating along the normal direction of the grating.
In an embodiment of the present invention, the elastic column includes an external thread cylinder, a z-axis nut rotatably sleeved on the external thread cylinder, a spacer disposed in the external thread cylinder, a compression spring fixed on the spacer, and a top pillar fixed between the compression spring and the three-dimensional motion platform, wherein the spacer extends with at least two sliding blocks protruding out of the external thread cylinder, the two sliding blocks are symmetrically supported on the z-axis nut, and in step S33, the three-dimensional motion platform controls and adjusts a displacement amount of the spacer moving in linkage with the compression spring by controlling a feeding amount of the z-axis nut, so as to adjust a displacement amount of the elastic column along a normal direction of the grating.
According to the high-precision grating splicing error correction device, the high-precision five-dimensional splicing error correction of the spliced grating formed by the first grating and the second grating is realized by adopting a mode that two independent correction units are used for respectively correcting the position postures of the first grating and the second grating, and the high-precision grating splicing error correction device has the advantages of compact structure, simplicity and convenience in operation, high splicing precision, high stability and the like. The high-precision grating splicing error correction device is of a horizontal structure and can be used for splicing and copying of gratings.
Further objects and advantages of the invention will be fully apparent from the ensuing description and drawings.
Drawings
Fig. 1 is a schematic perspective view of a high-precision grating stitching error correction device according to a preferred embodiment of the present invention.
Fig. 2 is a schematic front view of the high-precision grating stitching error correction apparatus shown in fig. 1.
Fig. 3 is a schematic top view of a two-dimensional correction unit of the high-precision grating stitching error correction apparatus shown in fig. 1.
Fig. 4 is a schematic perspective view of a three-dimensional correction unit of the high-precision grating stitching error correction device shown in fig. 1.
Fig. 5 is a schematic perspective view of the elastic column of the high-precision grating stitching error correction device shown in fig. 1.
Fig. 6 is a partial structural view of the elastic column of the high-precision grating stitching error correction device shown in fig. 1.
Fig. 7 is a schematic diagram of the high-precision grating stitching error correction device shown in fig. 1 for correcting grating stitching errors.
The reference numbers illustrate: a high-precision grating stitching error correction device 100; a base 10; a base plate 11; a support base 12; a two-dimensional correction unit 20; a two-dimensional motion platform 21; the first flexible structure 211; a second flexible structure 212; a first grating mount 22; an x-axis nut 23; an x-axis linear actuator 24; a y-axis nut 25; a y-axis linear actuator 26; a first grating 30; a three-dimensional correction unit 40; a fixed plate 41; a resilient post 42; an externally threaded barrel 421; a chute 4211; a z-axis nut 422; a shim 423; a slider 4231; a compression spring 424; a top post 425; a first linear actuator 43; a second linear actuator 44; a third linear actuator 45; a three-dimensional motion platform 46; a second grating mount 47; a fixing hole 401; a first tension spring 48; a second tension spring 49; a second grating 50.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "vertical," "lateral," "up," "down," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above terms should not be construed as limiting the present invention.
It is understood that the terms "a" and "an" should be interpreted as meaning that a number of one element or element is one in one embodiment, while a number of other elements is one in another embodiment, and the terms "a" and "an" should not be interpreted as limiting the number.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
As shown in fig. 1 to 7, a detailed structure and a detailed error correction method of a high-precision grating stitching error correction apparatus 100 according to a preferred embodiment of the present invention are illustrated.
As shown in fig. 1 and 2, the present invention provides, in one aspect, a high-precision grating stitching error correction apparatus 100 that corrects a grating stitching error in a predetermined directionThe device 100 comprises a base 10, a two-dimensional correction unit 20 arranged on the base 10 and used for assembling a first grating 30, and a three-dimensional correction unit 40 arranged on the base 10 and used for assembling a second grating 50, wherein the first grating 30 and the second grating 50 are spliced to form a spliced grating, the two-dimensional correction unit 20 is used for adjusting the position and the posture of the first grating 30 to correct the rotation error delta theta of the spliced grating around the normal direction of the gratingzAnd a translation error Deltax along the grating vector direction, wherein the three-dimensional correction unit 40 is used for adjusting the position posture of the second grating 50 to correct the rotation error Deltatheta of the spliced grating around the grating vector directionxRotation error Δ θ around the grating lineyAnd a translation error Δ z along a grating normal direction, wherein the grating normal direction is a z-axis direction, the grating vector direction is an x-axis direction, and the grating grid line direction is a y-axis direction, and five-dimensional splicing error correction of the spliced grating is realized by adjusting the position and posture of the first grating 30 and the second grating 50 respectively by the two-dimensional correction unit 20 and the three-dimensional correction unit 40.
It should be understood that the key to the error correction of the grating splicing in the present invention is that the structures of the correction units used for adjusting the position and the attitude of the two gratings are independent from each other, but the error correction effects are coupled. That is, although the first grating 30 and the second grating 50 are two independent gratings and the two-dimensional correction unit 20 and the three-dimensional correction unit 40 are also two independent correction units, the high-precision grating stitching error correction apparatus 100 can comprehensively realize five-dimensional stitching error correction on the stitched gratings by adjusting the position and orientation of the first grating 30 by the two-dimensional correction unit 20 and adjusting the position and orientation of the second grating 50 by the three-dimensional correction unit 40.
In other words, the high-precision grating stitching error correction apparatus 100 makes the phase changes of the incident beams introduced by the first grating 30 and the second grating 50 close to each other by adjusting the position and orientation of the first grating 30 by using the two-dimensional correction unit 20 and by adjusting the position and orientation of the second grating 50 by using the three-dimensional correction unit 40, so that the first grating 30 and the second grating 50 can be used as a whole grating.
It should be noted that the base 10 includes a bottom plate 11 and a support base 12 disposed on the bottom plate 11, the two-dimensional calibration unit 20 is supported on the support base 12, and the three-dimensional calibration unit 40 is supported on the bottom plate 11.
It should be noted that, in the preferred embodiment of the present invention, the supporting seat 12 is an i-shaped supporting seat.
Further, as shown in fig. 3, the two-dimensional calibration unit 20 includes a two-dimensional moving platform 21 supported on the supporting base 12, a first grating 30 base 22 fixed on the two-dimensional moving platform 21, an x-axis nut 23 disposed on the two-dimensional moving platform 21, an x-axis linear actuator 24 fixed on the x-axis nut 23, a y-axis nut 25 disposed on the two-dimensional moving platform 21, and a y-axis linear actuator 26 fixed on the y-axis nut 25; the first grating 30 seat 22 is used for assembling the first grating 30, and the two-dimensional motion platform 21 has a plurality of flexible structures, wherein the plurality of flexible structures comprise two first flexible structures 211 and a second flexible structure 212 arranged between the two first flexible structures 211; the two-dimensional motion platform 21 rotates around the second flexible structure 212 by using the second flexible structure 212 as an axis to adjust the displacement of the y-axis linear actuator 26, so as to realize a rotation error Δ θ of the spliced grating around the grating normal directionzCorrecting; the two-dimensional motion platform 21 adjusts the displacement of the x-axis linear actuator 24 by using the two first flexible structures 211 as axes, so that the two-dimensional motion platform 21 displaces along the x-axis direction by using the two first flexible structures 211 as axes, thereby realizing the correction of the translation error Δ x of the tiled grating along the grating vector direction.
It is worth mentioning that the flexible structure is a structure with two wide ends and a narrow middle.
It should be noted that the x-axis linear actuator 24 and the y-axis linear actuator 26 are respectively assembled on the two-dimensional moving platform 21 through the x-axis nut 23 and the y-axis nut 25, and the x-axis nut 23 and the y-axis nut 25 are used to ensure that the assembly of the x-axis linear actuator 24 and the y-axis linear actuator 26 is simpler and does not involve adjusting the position and the posture of the first grating 30. That is, the high-precision grating stitching error correction apparatus 100 adjusts the position and orientation of the first grating 30 by using the x-axis linear actuator 24 and the y-axis linear actuator 26.
It will be appreciated that the accuracy of adjustment of the raster stitching error correction is dependent on the accuracy of operation of the actuator, the higher the accuracy of adjustment of the error. Since the two-dimensional correction unit 20 combines a linear actuator and a flexible structure to adjust the position and orientation of the first grating 30, it is possible to realize high-precision correction of a two-dimensional grating stitching error of the stitched grating.
Specifically, the two-dimensional correction unit 20 combines a linear actuator and a flexible structure to adjust the position and the posture of the first grating 30, and the purpose of the flexible structure is to adjust the rotation and the translation of the first grating 30 by the high-precision grating stitching error correction device 100 through the stressed deformation of the flexible structure. Meanwhile, the high-precision grating splicing error correction device 100 can have high adjustment precision by utilizing a flexible structure. The x-axis linear actuator 24 and the y-axis linear actuator 26 have high operational accuracy and thrust by themselves. That is, the high-precision grating stitching error correction apparatus 100 of the present invention combines a linear actuator and a flexible structure to realize high-precision correction of a two-dimensional grating stitching error of the stitched grating.
Further, as shown in fig. 4, the three-dimensional calibration unit 40 includes a fixed plate 41 supported on the base plate 11, an elastic column 42 spaced apart from the fixed plate 41, a first linear actuator 43, a second linear actuator 44, and a third linear actuator 45A three-dimensional motion platform 46 linearly fixed above the elastic column 42, the first linear actuator 43, the second linear actuator 44 and the third linear actuator 45, and a second grating 50 seat 47 fixed above the three-dimensional motion platform 46; the elastic column 42 and the first linear actuator 43 are arranged at an interval on one side of the fixed plate 41 close to the support seat 12, the elastic column 42 and the second linear actuator 44 are arranged diagonally, the first linear actuator 43 and the third linear actuator 45 are arranged diagonally, and the second grating 50 seat 47 is used for assembling the second grating 50; wherein the three-dimensional motion platform 46 corrects the rotation error Delta theta of the spliced grating around the grating vector direction by fixing the elastic column 42 and the third linear actuator 45 and adjusting the displacement amount of the first linear actuator 43 and the second linear actuator 44 along the grating normal directionxThe three-dimensional motion platform 46 corrects the rotation error Δ θ of the tiled grating around the grating grid line direction by fixing the elastic column 42 and the first linear actuator 43 and adjusting the displacement amounts of the second linear actuator 44 and the third linear actuator 45 along the grating normal directionyThe three-dimensional motion platform 46 corrects the translational error Δ z of the tiled grating in the grating normal direction by adjusting the displacement amounts of the elastic column 42, the first linear actuator 43, the second linear actuator 44, and the third linear actuator 45 in the grating normal direction.
It is worth mentioning that the elastic column 42 is used for balancing the gravity borne by the first linear actuator 43, the second linear actuator 44 and the third linear actuator 45 to ensure the accuracy of the three-dimensional correction unit 40 in adjusting the position and orientation of the second grating 50.
That is, the three-dimensional correction unit 40 employs a structure in which a linear actuator is combined with the elastic column 42 to adjust the position and orientation of the second grating 50, and since the linear actuator itself has high operation accuracy and thrust and the elastic deformation of the elastic column 42 is combined to balance the gravity borne by the first linear actuator 43, the second linear actuator 44 and the third linear actuator 45, the three-dimensional correction unit 40 can achieve high-accuracy adjustment of the three-dimensional stitching error of the stitched grating.
It is worth mentioning that, as shown in fig. 4, the three-dimensional moving platform 46 and the fixing plate 41 are provided with corresponding fixing holes 401, and the three-dimensional correction unit 40 further includes a first extension spring 48 and a second extension spring 49, and the first extension spring 48 and the second extension spring 49 are fixed between the three-dimensional moving platform 46 and the fixing plate 41 through the fixing holes 401, for maintaining the state of rigid contact between the three-dimensional moving platform 46 and the elastic column 42, the first linear actuator 43, the second linear actuator 44, and the third linear actuator 45, so as to ensure the adjustment accuracy of the three-dimensional correction unit 40 in adjusting the position and the posture of the second grating 50.
As shown in fig. 5 and 6, the elastic column 42 includes an external threaded cylinder 421, a z-axis nut 422 rotatably sleeved on the external threaded cylinder 421, a washer 423 disposed in the external threaded cylinder 421, a compression spring 424 fixed on the washer 423, and a top column 425 fixed between the compression spring 424 and the three-dimensional moving platform 46, wherein the gasket 423 extends with at least two symmetrically arranged sliding blocks 4231, the external thread cylinder 421 is provided with corresponding sliding grooves 4211, the sliders 4231 are disposed above or below the z-axis nut 422 in a state of protruding from the corresponding slide groove 4211, thereby, when the z-nut 422 is rotated along the externally threaded cylinder 421, the two sliders 4231 are interlocked by the z-nut to slide along the slide slot 4211, thereby causing the washer 423 to move in conjunction with the compression spring 424, thereby achieving adjustment of the displacement amount of the elastic column 42 in the grating normal direction.
It should be noted that the displacement of the elastic column 42 is the expansion of the compression spring 424 in the elastic column 42.
It is understood that the sliding block 4231 of the gasket 423 may be disposed below the z-axis nut 422, so that the sliding block 4231 can be pushed to slide downwards along the sliding groove 4211 by the rotational thrust of the z-axis nut 422 along the external threaded cylinder 421, so that the gasket 423 is linked with the compression spring 424 to move downwards, thereby adjusting the compression amount of the compression spring 424, and further adjusting the displacement amount of the elastic column 42 in the grating normal direction.
It is also understood that the sliding block 4231 of the gasket 423 may be disposed above the z-axis nut 422, so that the sliding block 4231 can be pushed to slide upwards along the sliding groove 4211 by the rotational thrust of the z-axis nut 422 along the external threaded cylinder 421, so that the gasket 423 is linked with the compression spring 424 to move upwards (i.e. move along the grating normal direction), thereby adjusting the compression amount of the compression spring 424, and further adjusting the displacement amount of the elastic column 42 along the grating normal direction.
That is, the three-dimensional motion platform 46 controls and adjusts the displacement of the washer 423 in conjunction with the compression spring 424 by controlling the feeding amount of the z-axis nut 422, thereby adjusting the displacement of the elastic column 42 in the normal direction of the grating. The displacement of the elastic column 42 along the normal direction of the grating can be adjusted by controlling the extension and contraction of the compression spring 424 of the elastic column 42, which is not limited by the invention.
Preferably, in this embodiment of the present invention, the slider 4231 of the washer 423 is disposed above the z-axis nut 422.
Further preferably, in this embodiment of the present invention, the shim 423 includes four sliders 4231, that is, the shim 423 is a cross-shaped shim, so as to ensure that the shim 423 can be smoothly pushed and moved by the z-axis nut 422, so as to ensure the precision of adjusting the position and the posture of the second optical grating 50 by the three-dimensional correction unit 40 and ensure the stability of the operation of the three-dimensional correction unit 40.
In summary, the two-dimensional correction unit 20 of the high-precision grating stitching error correction apparatus 100 combines a linear actuator and a flexible hinge structure to adjust the position and orientation of the first grating 30, so as to correct the two-dimensional stitching error with high precision and high stability; the three-dimensional correction unit 40 combines the structure of adopting the linear actuator and the elastic column 42 to adjust the position and the posture of the second grating 50, so that the correction of the three-dimensional splicing error with high precision and high stability is realized, and thus, the high-precision correction of the five-dimensional grating splicing error of the spliced grating is comprehensively realized through the coupling of the error correction effects of the two-dimensional correction unit 20 and the three-dimensional correction unit 40. Therefore, the high-precision grating splicing error correction device 100 has the advantages of high splicing error correction precision and high working stability.
It is to be understood that the first grating 30 and the second grating 50 of the high-precision grating stitching error correction apparatus 100 of the present invention are mounted on the first grating 30 holder 22 and the second grating 50 holder 47 in a horizontal state, respectively, that is, the high-precision grating stitching error correction apparatus 100 of the present invention has a horizontal structure and can be used for grating stitching and replication.
As shown in fig. 7, in another aspect, the present invention further provides a high-precision grating stitching error correction method, including the steps of:
s1, assembling the first grating 30 on the two-dimensional correction unit 20, and assembling the second grating 50 on the three-dimensional correction unit 40, wherein the first grating 30 and the second grating 50 form a spliced grating;
s2, adjusting the position and posture of the first grating 30 by the two-dimensional correction unit 20 to correct the rotation error Δ θ of the spliced grating around the grating normal directionzAnd a translation error Δ x along the grating vector direction; and
s3, adjusting the position posture of the second grating 50 through the three-dimensional correction unit 40 to correct the rotation error delta theta of the spliced grating around the grating vector directionxRotation error Δ θ around the grating lineyAnd a translation error delta z along the normal direction of the grating, wherein the normal direction of the grating is the z-axis direction, the vector direction of the grating is the x-axis direction, and the grating line direction of the grating is the y-axis direction.
It should be understood that the step S2 and the step S3 can be performed independently, and the present invention does not limit the execution sequence of the step S2 and the step S3.
Further, the step S2 includes the steps of:
s21, adjusting the displacement of the y-axis linear actuator 26 with the second flexible structure 212 as the axis, so that the two-dimensional motion platform 21 rotates with the second flexible structure 212 as the axis, thereby realizing a rotation error Δ θ of the tiled grating around the grating normal directionzCorrecting; and
s22, adjusting the displacement of the x-axis linear actuator 24 with the two first flexible structures 211 as axes, so that the two-dimensional moving platform 21 is displaced along the x-axis direction with the two first flexible structures 211 as axes, thereby implementing the correction of the translational error Δ x of the tiled grating along the grating vector direction.
It should be understood that the steps S21 and S22 can be performed independently, and the present invention is not limited to the execution sequence of the steps S21 and S22.
Further, the step S3 includes the steps of:
s31, fixing the elastic column 42 and the third linear actuator 45, adjusting the displacement of the first linear actuator 43 and the second linear actuator 44 along the normal direction of the grating to correct the rotation error delta theta of the spliced grating around the vector direction of the gratingx；
S32, fixing the elastic column 42 and the first linear actuator 43, adjusting the displacement of the second linear actuator 44 and the third linear actuator 45 along the normal direction of the grating to correct the rotation error delta theta of the spliced grating around the grating line directiony(ii) a And
s33, adjusting displacement amounts of the elastic column 42, the first linear actuator 43, the second linear actuator 44 and the third linear actuator 45 in the grating normal direction to correct a translation error Δ z of the tiled grating in the grating normal direction.
It should be understood that the step S31, the step S32 and the step S33 can be performed independently, and the execution sequence of the step S31, the step S32 and the step S33 is not limited by the present invention.
It should also be understood that the present invention may repeatedly perform the steps S2-S33 for multiple times to adjust the position and orientation of the first grating 30 and the second grating 50, so that the phase changes of the incident light beams introduced by the first grating 30 and the second grating 50 are close to each other, and reach the precision range when the incident light beams can be used as a whole grating, and the present invention does not limit the operation times of the foregoing steps.
It should be noted that in the step S33, the three-dimensional moving platform 46 controls and adjusts the displacement of the spacer 423 in linkage with the compression spring 424 by controlling the feeding amount of the z-axis nut 422, so as to adjust the displacement of the elastic column 42 along the grating normal direction.
It can also be understood that, because the translation error Δ y of the tiled grating along the grating grid line direction (i.e. y-axis direction) does not affect the characteristics of the tiled grating, only the effective area of the tiled grating is affected, and during the tiling, the translation error Δ y along the grating grid line direction (i.e. y-axis direction) can be controlled in a small range and can be ignored. Therefore, the invention can realize the high-precision splicing error correction of the spliced grating only by correcting the grating splicing error on the five dimensions of the spliced grating.
In summary, the high-precision grating stitching error correction apparatus 100 of the present invention realizes high-precision five-dimensional stitching error correction of the stitched grating formed by the first grating 30 and the second grating 50 by using two independent correction units to respectively correct the position and the posture of the first grating 30 and the second grating 50, and has the advantages of compact structure, simple and convenient operation, high stitching precision, high stability, and the like. The high-precision grating splicing error correction device 100 of the present invention is a horizontal structure, and can be used for splicing and copying gratings.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above examples only express preferred embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. The high-precision grating splicing error correction device is characterized by comprising a base, a two-dimensional correction unit and a three-dimensional correction unit, wherein the two-dimensional correction unit is arranged on the base and used for assembling a first grating, the three-dimensional correction unit is arranged on the base and used for assembling a second grating, the first grating and the second grating are spliced to form a spliced grating, the two-dimensional correction unit is used for adjusting the position and the posture of the first grating to correct the rotation error delta theta of the spliced grating around the normal direction of the gratingzAnd a translation error delta x along the grating vector direction, wherein the three-dimensional correction unit is used for adjusting the position posture of the second grating so as to correct the rotation error delta theta of the spliced grating around the grating vector directionxRotation error Δ θ around the grating lineyAnd a translation error Δ z along a grating normal direction, wherein the grating normal direction is a z-axis direction, the grating vector direction is an x-axis direction, and the grating grid line direction is a y-axis direction, and five-dimensional splicing error correction of the spliced grating is realized by adjusting the position and the posture of the first grating and the second grating respectively by the two-dimensional correction unit and the three-dimensional correction unit;
the two-dimensional correction unit comprises a two-dimensional motion platform supported on the supporting seat, a first grating seat fixed on the two-dimensional motion platform, an x-axis linear actuator arranged on the two-dimensional motion platform, an x-axis nut used for fixing the x-axis linear actuator, a y-axis linear actuator arranged on the two-dimensional motion platform, and a y-axis nut used for fixing the y-axis linear actuator; the first grating seat is used for assembling the first grating, the two-dimensional motion platform is provided with a plurality of flexible structures, and the plurality of flexible structures comprise two first flexible structures and a second flexible structure arranged between the two first flexible structures;
the two-dimensional motion platform is used for enabling the two-dimensional motion platform to rotate by taking the second flexible structure as an axis in a mode of adjusting the displacement of the y-axis linear actuator by taking the second flexible structure as an axis, so that the rotation error delta theta of the spliced grating around the normal direction of the grating is realizedzCorrecting; the two-dimensional motion platform adjusts the displacement of the x-axis linear actuator by taking the two first flexible structures as axes, so that the two-dimensional motion platform displaces along the x-axis direction by taking the two first flexible structures as axes, and the correction of the translation error delta x of the spliced grating along the grating vector direction is realized.
2. The high-precision grating stitching error correction device according to claim 1, wherein the base comprises a bottom plate and a support seat disposed on the bottom plate, the two-dimensional correction unit is supported on the support seat, the three-dimensional correction unit is supported on the bottom plate, and the support seat is an i-shaped support seat.
3. The high-precision grating stitching error correction device according to claim 2, wherein the three-dimensional correction unit comprises a fixed plate supported on the base plate, an elastic column, a first linear actuator, a second linear actuator and a third linear actuator which are arranged on the fixed plate at intervals, a three-dimensional motion platform flexibly fixed on the elastic column, the first linear actuator, the second linear actuator and the third linear actuator, and a second grating seat fixed on the three-dimensional motion platform; the elastic column and the first linear actuator are arranged on one side of the fixed plate close to the supporting seat at intervals, the elastic column and the second linear actuator are arranged in a diagonal manner, the first linear actuator and the third linear actuator are arranged in a diagonal manner, and the second grating seat is used for assembling the second grating;
wherein the three-dimensional motion platform corrects the rotation error delta theta of the spliced grating around the grating vector direction in a mode of adjusting the displacement amount of the first linear actuator and the second linear actuator along the grating normal direction by fixing the elastic column and the third linear actuatorxThe three-dimensional motion platform corrects the rotation error delta theta of the spliced grating around the grating grid line direction in a mode of fixing the elastic column and the first linear actuator to adjust the displacement of the second linear actuator and the third linear actuator along the grating normal directionyAnd the three-dimensional motion platform corrects the translation error delta z of the spliced grating along the grating normal direction in a mode of adjusting the displacement amount of the elastic column, the first linear actuator, the second linear actuator and the third linear actuator along the grating normal direction.
4. The high precision grating stitching error correction device of claim 3, the elastic column comprises an external thread cylinder, a z-axis nut which is rotatably sleeved on the external thread cylinder, a gasket which is arranged in the external thread cylinder, a compression spring which is fixed on the gasket, and a top column which is fixed between the compression spring and the three-dimensional motion platform, wherein the gasket extends to form at least two symmetrically arranged slide blocks, the external thread cylinder is provided with corresponding slide grooves, the slide block is arranged above or below the z-axis nut in a state of protruding out of the corresponding slide groove, thereby, when the z-axis nut is rotated along the external thread cylinder, the two sliding blocks are linked by the z-axis nut to slide along the sliding groove, therefore, the gasket is linked with the compression spring to move, and therefore the displacement of the elastic column along the normal direction of the grating is adjusted.
5. The high-precision grating stitching error correction device according to claim 4, wherein corresponding fixing holes are provided on the three-dimensional moving platform and the fixing plate, and the three-dimensional correction unit further comprises a first tension spring and a second tension spring fixed between the three-dimensional moving platform and the fixing plate via the fixing holes for maintaining a state of rigid contact between the three-dimensional moving platform and the elastic column, the first linear actuator, the second linear actuator and the third linear actuator.
6. A high-precision grating splicing error correction method is characterized by comprising the following steps:
s1, assembling a first grating in a two-dimensional correction unit, and assembling a second grating in a three-dimensional correction unit, wherein the first grating and the second grating form a spliced grating;
s2, adjusting the position posture of the first grating through the two-dimensional correction unit to correct the rotation error delta theta of the spliced grating around the normal direction of the gratingzAnd a translation error Δ x along the grating vector direction;
the two-dimensional correction unit comprises a two-dimensional motion platform supported on the supporting seat, a first grating seat fixed on the two-dimensional motion platform, an x-axis linear actuator arranged on the two-dimensional motion platform, an x-axis nut used for fixing the x-axis linear actuator, a y-axis linear actuator arranged on the two-dimensional motion platform, and a y-axis nut used for fixing the y-axis linear actuator; the first grating mount is configured to mount the first grating, the two-dimensional moving platform has a plurality of flexible structures, the plurality of flexible structures includes two first flexible structures and a second flexible structure disposed between the two first flexible structures, and the step S2 includes the steps of:
s21, adjusting the displacement of the y-axis linear actuator by taking the second flexible structure as an axis, so that the two-dimensional motion platform rotates by taking the second flexible structure as an axis, and further realizing the rotation error delta theta of the spliced grating around the normal direction of the gratingzCorrecting; and
s22, adjusting the displacement of the x-axis linear actuator by taking the two first flexible structures as axes, so that the two-dimensional motion platform displaces along the x-axis direction by taking the two first flexible structures as axes, thereby realizing the correction of the translation error delta x of the spliced grating along the grating vector direction; and
s3, adjusting the position posture of the second grating through the three-dimensional correction unit to correct the rotation error delta theta of the spliced grating around the grating vector directionxRotation error Δ θ around the grating lineyAnd a translation error delta z along the normal direction of the grating, wherein the normal direction of the grating is the z-axis direction, the vector direction of the grating is the x-axis direction, and the grating line direction of the grating is the y-axis direction.
7. The method of claim 6, wherein the three-dimensional calibration unit comprises a fixed plate, an elastic column, a first linear actuator, a second linear actuator and a third linear actuator which are arranged above the fixed plate at intervals, a three-dimensional motion platform flexibly fixed above the elastic column, the first linear actuator, the second linear actuator and the third linear actuator, and a second grating seat fixed above the three-dimensional motion platform; wherein the elastic column and the first linear actuator are disposed at an interval on a side of the fixed plate close to the two-dimensional correction unit, and the elastic column and the second linear actuator are disposed diagonally, the first linear actuator and the third linear actuator are disposed diagonally, and the second grating mount is used to mount the second grating, the step S3 includes the steps of:
s31, fixing the elastic column and the third linear actuator, and adjusting the displacement of the first linear actuator and the second linear actuator along the normal direction of the grating to correct the rotation error delta theta of the spliced grating around the vector direction of the gratingx；
S32, fixing the elastic column and the first linear actuator, and adjusting the second linear actuator and the third linear actuatorThe displacement along the normal direction of the grating is used for correcting the rotation error delta theta of the spliced grating around the grating grid line directiony(ii) a And
s33, adjusting the displacement of the elastic column, the first linear actuator, the second linear actuator and the third linear actuator along the normal direction of the grating to correct the translation error deltaz of the spliced grating along the normal direction of the grating.
8. The method according to claim 7, wherein the elastic column comprises an external threaded cylinder, a z-axis nut rotatably sleeved on the external threaded cylinder, a spacer arranged in the external threaded cylinder, a compression spring fixed on the spacer, and a top column fixed between the compression spring and the three-dimensional motion platform, wherein the spacer extends with at least two sliding blocks protruding out of the external threaded cylinder, the two sliding blocks are symmetrically supported on the z-axis nut, and in step S33, the three-dimensional motion platform controls and adjusts a displacement amount of the spacer moving in linkage with the compression spring by controlling a feeding amount of the z-axis nut, so as to achieve adjustment of the displacement amount of the elastic column along a grating normal direction.
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| CN103197397A (en) * | 2013-04-13 | 2013-07-10 | 哈尔滨工业大学 | Whole four-dimensional high-precision adjusting device for grating splicing |
| CN104749673A (en) * | 2015-04-21 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Copying and splicing method of large-size plane diffraction grating |
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| JP5066494B2 (en) * | 2008-08-12 | 2012-11-07 | Ｎｔｔエレクトロニクス株式会社 | Optical multiplexer / demultiplexer |
| CN201322813Y (en) * | 2008-11-26 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Tiled grating displacement deviation monitoring system |
| CN105258923B (en) * | 2015-10-19 | 2017-10-31 | 中国科学院长春光学精密机械与物理研究所 | For making the error detection method replicated in jointing grating |
| US10444526B2 (en) * | 2016-08-01 | 2019-10-15 | The Regents Of The University Of California | Optical pulse combiner comprising diffractive optical elements |
| CN108254819A (en) * | 2017-12-26 | 2018-07-06 | 中国科学院长春光学精密机械与物理研究所 | A kind of production method of Chinese character pin-shaped displacement measurement grating |
| CN111060202B (en) * | 2019-12-25 | 2021-08-20 | 中国科学院长春光学精密机械与物理研究所 | Grating splicing correction method and device and grating splicing correction system |
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| CN103197397A (en) * | 2013-04-13 | 2013-07-10 | 哈尔滨工业大学 | Whole four-dimensional high-precision adjusting device for grating splicing |
| CN104749673A (en) * | 2015-04-21 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Copying and splicing method of large-size plane diffraction grating |
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