CN217717471U - Camera fine-adjustment platform for chip visual inspection - Google Patents

Camera fine-adjustment platform for chip visual inspection Download PDF

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Publication number
CN217717471U
CN217717471U CN202221342252.9U CN202221342252U CN217717471U CN 217717471 U CN217717471 U CN 217717471U CN 202221342252 U CN202221342252 U CN 202221342252U CN 217717471 U CN217717471 U CN 217717471U
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deflection
seat
axis
fastening
vertical plate
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CN202221342252.9U
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何飞
李全威
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Zhuoer Semiconductor Equipment Suzhou Co ltd
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Zhuoer Semiconductor Equipment Suzhou Co ltd
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Abstract

The utility model discloses a camera fine setting platform for chip visual detection, it relates to chip detection technology field. The technical scheme is characterized by comprising a fixed support and a deflection seat, wherein a rotating shaft, a deflection adjusting assembly and a fastening assembly are respectively arranged between the fixed support and the deflection seat; the deflection adjusting assembly is used for driving the deflection seat to perform deflection adjustment around the rotating shaft, and the fastening assembly is used for locking the relative position of the deflection seat and the fixed support; the deflection adjusting assembly comprises a fine adjustment head and a spring which are respectively positioned at two sides of the rotating shaft. The utility model discloses can deflect the regulation to camera module's optical axis, reduce the influence that parts machining error and assembly error brought camera module installation accuracy to improve the definition of shooting the image, and then improve and detect the precision.

Description

Camera fine-adjustment platform for chip visual inspection
Technical Field
The utility model relates to a chip testing technical field, more specifically say that it relates to a camera fine setting platform for chip visual detection.
Background
In the semiconductor industry, machine vision technology is generally used for chips to automatically detect defects on the surfaces of the chips.
The prior Chinese patent with the publication number of CN214794502U discloses an intelligent detection system for surface defects of a bare chip, which comprises a camera, a lens, a lifting support, a detection workbench and a computer, wherein the camera is arranged on the lifting support, moves up and down through the lifting support, adjusts the distance between the camera and the bare chip, and the lens adopts a zoom lens and can carry out focal length conversion.
With the increasing precision of chips, the mounting accuracy of cameras is also important to ensure the detection accuracy.
However, the camera in the above patent can only move up and down, and if the optical axis deflects, the camera cannot be adjusted, and the photographing effect is affected. The existing fine adjustment platform can only be adjusted in a translation mode or a rotation mode generally, and cannot adjust the deflection of an optical axis.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art exists, the utility model aims to provide a camera fine setting platform for chip visual detection, it can deflect the regulation to camera module's optical axis, reduces the influence that parts machining error and assembly error brought camera module installation accuracy to improve the definition of shooting the image, and then improve and detect the precision.
In order to achieve the above purpose, the utility model provides a following technical scheme:
a camera fine adjustment platform for chip visual inspection comprises a fixed support and a deflection seat, wherein a rotating shaft, a deflection adjusting assembly and a fastening assembly are respectively arranged between the fixed support and the deflection seat; the deflection adjusting assembly is used for driving the deflection seat to perform deflection adjustment around the rotating shaft, and the fastening assembly is used for locking the relative position of the deflection seat and the fixed support;
the deflection adjusting assembly comprises a fine adjustment head and a spring which are respectively positioned at two sides of the rotating shaft.
Furthermore, the number of the eccentric bases is multiple, and the fixed support and the eccentric bases are sequentially connected;
the plurality of offset seats include at least two of an X-axis offset seat, a Y-axis offset seat, or a Z-axis offset seat.
Furthermore, a plurality of the deflection seats respectively comprise an X-axis deflection seat, a Y-axis deflection seat and a Z-axis rotating shaft, and the fixed support, the X-axis deflection seat, the Y-axis deflection seat and the Z-axis deflection seat are sequentially connected.
Further, a first rotating shaft arranged along the X-axis direction, a first deflection adjusting assembly and a first fastening assembly are arranged between the fixed support and the X-axis deflection seat;
a second rotating shaft arranged along the Y-axis direction, a second deflection adjusting assembly and a second fastening assembly are arranged between the X-axis deflection seat and the Y-axis deflection seat;
and a third rotating shaft arranged along the Z-axis direction, a third deflection adjusting assembly and a third fastening assembly are arranged between the Y-axis deflection seat and the Z-axis deflection seat.
Further, the fixed support comprises a first vertical plate, two first vertical side plates are symmetrically arranged on the first vertical plate, and the X-axis deflection seat is positioned between the two first vertical side plates;
the X-axis deflection seat comprises a second vertical plate, two horizontal side plates are symmetrically arranged on the second vertical plate, and the Y-axis deflection seat is positioned between the two horizontal side plates;
the Y-axis deflection seat comprises a third vertical plate, two second vertical side plates are symmetrically arranged on the third vertical plate, and the Z-axis deflection seat is positioned between the two second vertical side plates;
the first rotating shaft is arranged between the first vertical side plate and the second vertical plate, the second rotating shaft is arranged between the horizontal side plate and the third vertical plate, and the third rotating shaft is arranged between the Z-axis eccentric seat and the third vertical plate.
Further, the first deflection adjusting assembly comprises a first fine tuning head mounted on one horizontal side plate of the first deflection adjusting assembly, and a first spring arranged between the first vertical plate and the second vertical plate;
the second deflection adjusting assembly comprises a second fine turning head mounted on the third vertical plate and a second spring arranged between the second vertical plate and the third vertical plate;
the third deflection adjusting assembly comprises a third fine tuning head arranged on the second vertical side plate of the third deflection adjusting assembly and a third spring arranged between the second vertical side plate and the Z-axis deflection base.
Further, the fastening assembly includes a fastening bolt;
the first fastening assembly comprises a first fastening bolt, a first adjusting hole matched with the first fastening bolt is formed in the first vertical side plate, and a first fastening hole matched with the first fastening bolt is formed in the side wall of the second vertical plate;
the second fastening assembly comprises a second fastening bolt, a second adjusting hole matched with the second fastening bolt is formed in the horizontal side plate, and a second fastening hole matched with the second fastening bolt is formed in the third vertical plate;
the third fastening assembly comprises a third fastening bolt, a third adjusting hole matched with the third fastening bolt is formed in the Z-axis eccentric seat, and a third fastening hole matched with the third fastening bolt is formed in the third vertical plate.
Furthermore, an adapter plate for connecting a camera is arranged on the Z-axis deflection seat.
To sum up, the utility model discloses following beneficial effect has:
1. the camera fine-tuning platform can perform deflection adjustment on the optical axis of the camera module to reduce the influence of part machining errors and assembly errors on the installation precision of the camera module, so that the definition of a shot image is improved, and the detection precision is further improved;
2. the deflection adjustment is realized by matching the fine tuning head with the spring, the precision of the fine tuning head is high, the elastic force of the spring can realize the pre-positioning in the adjustment process, the adjustment can be conveniently carried out, and the device has the advantages of simple structure, low production cost and convenient production and processing;
3. the camera fine tuning platform can provide three mutually perpendicular's deflection adjustment direction for the camera module, is favorable to improving the position precision of camera module, improves the shooting effect.
Drawings
FIG. 1 is a schematic diagram illustrating an overall structure of a camera trimming platform for chip vision inspection according to an embodiment;
FIG. 2 is an exploded view of a camera trimming platform for chip vision inspection according to one embodiment;
fig. 3 is a schematic structural diagram of a camera trimming platform and a camera module according to an embodiment.
In the figure: 1. fixing a support; 11. a first vertical plate; 12. a first vertical side plate; 13. a first shaft hole; 14. a first adjustment aperture; 15. a first spring hole; 2. an X-axis deflection base; 21. a second vertical plate; 22. a horizontal side plate; 23. a second shaft hole; 24. a first fastening hole; 25. a second spring hole; 26. a fourth shaft hole; 27. a second adjustment aperture; 3. a Y-axis deflection seat; 31. a third vertical plate; 32. a second vertical side plate; 33. a third shaft hole; 34. a second fastening hole; 35. a sixth shaft hole; 36. a third fastening hole; 4. a Z-axis deflection seat; 41. a fifth shaft hole; 42. a third adjustment aperture; 43. a third spring hole; 5. an adapter plate; 6. a first fine tuning; 7. a second fine turning; 8. third fine turning; 9. a camera module.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The specific embodiments are only for explaining the present invention, and it is not a limitation to the present invention, and those skilled in the art can make modifications to the embodiments without inventive contribution as required after reading the present specification, but all the embodiments are protected by patent law within the scope of the claims of the present invention.
Example (b):
a camera fine adjustment platform for chip visual inspection, referring to fig. 1 to 3, comprises a fixed support 1 and a deflection seat, wherein a rotating shaft, a deflection adjusting assembly and a fastening assembly are respectively arranged between the fixed support and the deflection seat; the deflection adjusting assembly is used for driving the deflection seat to perform deflection adjustment around the rotating shaft, and the fastening assembly is used for locking the relative position of the deflection seat and the fixed support 1; the deflection adjusting component comprises a fine adjustment head and a spring which are respectively positioned at two sides of the rotating shaft; the camera fine-tuning platform in the embodiment can perform deflection adjustment on the optical axis of the camera module 9, so that the influence of part processing errors and assembly errors on the installation precision of the camera module 9 is reduced, the definition of a shot image is improved, and the detection precision is improved; adopt fine tuning and spring cooperation to realize deflecting the regulation in this embodiment, the precision of fine tuning is high, and the elastic force of spring can realize the prepositioning in the accommodation process, can conveniently adjust, simple structure moreover, low in production cost, and the production and processing of being convenient for.
Referring to fig. 1 to 3, preferably, the number of the eccentric bases in this embodiment is plural, and the fixed support 1 and the plural eccentric bases are connected in sequence; the plurality of deflection bases comprise at least two of an X-axis deflection base 2, a Y-axis deflection base 3 or a Z-axis deflection base 4, preferably, the plurality of deflection bases in the embodiment respectively comprise the X-axis deflection base 2, the Y-axis deflection base 3 and the Z-axis deflection base 4, and the fixed support 1, the X-axis deflection base 2, the Y-axis deflection base 3 and the Z-axis deflection base 4 are sequentially connected; in the embodiment, an X axis and a Y axis form a vertical plane, and the X axis and a Z axis form a horizontal plane; specifically, the adapter plate 5 connected with the camera module 9 is arranged on the Z-axis deflection base 4, so that the installation is convenient; the camera fine-tuning platform in the embodiment can provide three mutually perpendicular deflection adjusting directions for the camera module 9, which is beneficial to improving the position precision of the camera module 9 and improving the shooting effect; of course, in alternative embodiments, the number of yaw blocks may be adjusted to provide one or two yaw adjustment directions, without limitation.
Referring to fig. 1 and 2, specifically, a first rotating shaft arranged along the X-axis direction, a first deflection adjusting assembly and a first fastening assembly are arranged between the fixed support 1 and the X-axis deflection base 2; a second rotating shaft arranged along the Y-axis direction, a second deflection adjusting assembly and a second fastening assembly are arranged between the X-axis deflection seat 2 and the Y-axis deflection seat 3; a third rotating shaft arranged along the Z-axis direction, a third deflection adjusting assembly and a third fastening assembly are arranged between the Y-axis deflection seat 3 and the Z-axis deflection seat 4; the first, second and third shafts are not shown in the drawings; specifically, in the embodiment, the fixing support 1 includes a first vertical plate 11, two first vertical side plates 12 are symmetrically arranged on the first vertical plate 11, and the x-axis eccentric seat 2 is located between the two first vertical side plates 12; the X-axis deflection seat 2 comprises a second vertical plate 21, two horizontal side plates 22 are symmetrically arranged on the second vertical plate 21, and the Y-axis deflection seat 3 is positioned between the two horizontal side plates 22; the Y-axis deflector seat 3 comprises a third vertical plate 31, two second vertical side plates 32 are symmetrically arranged on the third vertical plate 31, and the Z-axis deflector seat 4 is positioned between the two second vertical side plates 32.
Referring to fig. 1 and 2, specifically, a first rotating shaft is arranged between the first vertical side plate 12 and the second vertical plate 21, and a first shaft hole 13 and a second shaft hole 23 which are matched with the first rotating shaft are respectively arranged on the first vertical side plate 12 and the second vertical plate 21; a second rotating shaft is arranged between the horizontal side plate 22 and the third vertical plate 31, and a fourth shaft hole 26 and a third shaft hole 33 which are matched with the second rotating shaft are respectively arranged on the horizontal side plate 22 and the third vertical plate 31; a third rotating shaft is arranged between the Z-axis deflecting seat 4 and the third vertical plate 31, and a fifth shaft hole 41 and a sixth shaft hole 35 which are matched with the third rotating shaft are respectively arranged on the Z-axis deflecting seat 4 and the third vertical plate 31.
Referring to fig. 1 and 2, in particular, the first deflection adjusting assembly in this embodiment includes a first fine adjustment head 6 mounted on a horizontal side plate 22 thereof, and a first spring (not shown in the drawings) disposed between a first vertical plate 11 and a second vertical plate 21, and preferably, the first vertical plate 11 is provided with a first spring hole 15 for cooperating with the first spring; the second deflection adjusting assembly comprises a second fine tuning head 7 mounted on a third vertical plate 31, and a second spring (not shown in the drawing) arranged between the second vertical plate 21 and the third vertical plate 31, and preferably, a second spring hole 25 matched with the second spring is formed on the second vertical plate 21; the third yaw adjustment assembly includes a third fine adjustment head 8 mounted on a second vertical side plate 32 thereof, and a third spring (not shown in the drawings) disposed between the second vertical side plate 32 and the Z-axis yaw base 4. Preferably, the Z-axis deflecting base 4 is opened with a third spring hole 43 for cooperating with a third spring.
Referring to fig. 1 and 2, the fastening assembly in the present embodiment includes a fastening bolt (not shown in the drawings); specifically, the first fastening assembly comprises a first fastening bolt, a first adjusting hole 14 matched with the first fastening bolt is formed in the first vertical side plate 12, and a first fastening hole 24 matched with the first fastening bolt is formed in the side wall of the second vertical plate 21; the second fastening component comprises a second fastening bolt, a second adjusting hole 27 matched with the second fastening bolt is formed in the horizontal side plate 22, and a second fastening hole 34 matched with the second fastening bolt is formed in the third vertical plate 31; the third fastening component comprises a third fastening bolt, a third adjusting hole 42 matched with the third fastening bolt is formed in the Z-axis deflection seat 4, and a third fastening hole 36 matched with the third fastening bolt is formed in the third vertical plate 31; utilize fastening bolt to realize the locking in this embodiment, have simple structure, convenient operation, and the good advantage of steadiness.

Claims (8)

1. The utility model provides a camera fine setting platform for chip visual inspection which characterized in that: the device comprises a fixed support and a deflection seat, wherein a rotating shaft, a deflection adjusting assembly and a fastening assembly are respectively arranged between the fixed support and the deflection seat; the deflection adjusting assembly is used for driving the deflection seat to perform deflection adjustment around the rotating shaft, and the fastening assembly is used for locking the relative position of the deflection seat and the fixed support;
the deflection adjusting assembly comprises a fine adjustment head and a spring which are respectively positioned at two sides of the rotating shaft.
2. The camera fine-tuning platform for chip visual inspection according to claim 1, wherein: the number of the deflection bases is multiple, and the fixed support and the deflection bases are sequentially connected;
the plurality of offset seats includes at least two of an X-axis offset seat, a Y-axis offset seat, or a Z-axis offset seat.
3. The camera fine-tuning platform for chip visual inspection according to claim 2, wherein: the deflection seats respectively comprise an X-axis deflection seat, a Y-axis deflection seat and a Z-axis rotating shaft, and the fixed support, the X-axis deflection seat, the Y-axis deflection seat and the Z-axis deflection seat are sequentially connected.
4. The camera trimming platform for chip vision inspection according to claim 3, wherein: a first rotating shaft arranged along the X-axis direction, a first deflection adjusting assembly and a first fastening assembly are arranged between the fixed support and the X-axis deflection seat;
a second rotating shaft arranged along the Y-axis direction, a second deflection adjusting assembly and a second fastening assembly are arranged between the X-axis deflection seat and the Y-axis deflection seat;
and a third rotating shaft arranged along the Z-axis direction, a third deflection adjusting assembly and a third fastening assembly are arranged between the Y-axis deflection seat and the Z-axis deflection seat.
5. The camera fine-tuning platform for chip visual inspection according to claim 4, wherein: the fixed support comprises a first vertical plate, two first vertical side plates are symmetrically arranged on the first vertical plate, and the X-axis deflection seat is positioned between the two first vertical side plates;
the X-axis deflection seat comprises a second vertical plate, two horizontal side plates are symmetrically arranged on the second vertical plate, and the Y-axis deflection seat is positioned between the two horizontal side plates;
the Y-axis deflection seat comprises a third vertical plate, two second vertical side plates are symmetrically arranged on the third vertical plate, and the Z-axis deflection seat is positioned between the two second vertical side plates;
be provided with between first vertical curb plate and the second riser first pivot, be provided with between horizontal curb plate and the third riser second pivot, be provided with between Z axle swivel mount and the third riser third pivot.
6. The camera trimming platform for chip vision inspection of claim 5, wherein: the first deflection adjusting assembly comprises a first fine turning head and a first spring, wherein the first fine turning head is installed on one horizontal side plate of the first deflection adjusting assembly, and the first spring is arranged between the first vertical plate and the second vertical plate;
the second deflection adjusting assembly comprises a second fine tuning head mounted on the third vertical plate and a second spring arranged between the second vertical plate and the third vertical plate;
the third deflection adjusting assembly comprises a third fine tuning head arranged on the second vertical side plate of the third deflection adjusting assembly and a third spring arranged between the second vertical side plate and the Z-axis deflection base.
7. The camera fine-tuning platform for chip visual inspection according to claim 5, wherein: the fastening assembly comprises a fastening bolt;
the first fastening assembly comprises a first fastening bolt, a first adjusting hole matched with the first fastening bolt is formed in the first vertical side plate, and a first fastening hole matched with the first fastening bolt is formed in the side wall of the second vertical plate;
the second fastening assembly comprises a second fastening bolt, a second adjusting hole matched with the second fastening bolt is formed in the horizontal side plate, and a second fastening hole matched with the second fastening bolt is formed in the third vertical plate;
the third fastening assembly comprises a third fastening bolt, a third adjusting hole matched with the third fastening bolt is formed in the Z-axis eccentric seat, and a third fastening hole matched with the third fastening bolt is formed in the third vertical plate.
8. The camera fine-tuning platform for chip visual inspection according to claim 3, wherein: and an adapter plate for connecting a camera is arranged on the Z-axis deflection seat.
CN202221342252.9U 2022-05-31 2022-05-31 Camera fine-adjustment platform for chip visual inspection Active CN217717471U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221342252.9U CN217717471U (en) 2022-05-31 2022-05-31 Camera fine-adjustment platform for chip visual inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221342252.9U CN217717471U (en) 2022-05-31 2022-05-31 Camera fine-adjustment platform for chip visual inspection

Publications (1)

Publication Number Publication Date
CN217717471U true CN217717471U (en) 2022-11-01

Family

ID=83795433

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221342252.9U Active CN217717471U (en) 2022-05-31 2022-05-31 Camera fine-adjustment platform for chip visual inspection

Country Status (1)

Country Link
CN (1) CN217717471U (en)

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