JP2012133742A - Image gathering device for high-precision alignment, and image gathering module thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the time and cost for alignment low and further to improve convenience in operation by performing accurate alignment with a body through easy operation.SOLUTION: When an image gathering module 1 is positioned at one image acquisition position, a plurality of light input sides 110 face a mount base 2 and a carry base 3 respectively, and a plurality of light output sides 111 face two image acquisition units 12, 12' respectively. Light beams at the places of the mount base 2 and carry base 3 pass through the plurality of light input sides 110 simultaneously to enter two light reflection prisms 112a, 112b, and light beams reflected by light reflection surfaces R1, R2 of the two light reflection prisms 112a, 112b reach the two image acquisition units 12, 12' through the plurality of light output sides 111 along a light transmission line.

Description

  The present invention relates to an image collecting apparatus that can collect images on both sides at the same time, and more particularly to an extension type image collecting apparatus for aligning two objects with high accuracy.

  The application range of the alignment technique for both objects or double-layer plates is very wide. For example, in the fields of semiconductors, flat panel displays, printed circuit boards, etc., the alignment techniques for both objects or double-layer plates must be used. Therefore, by improving the alignment technology for both objects or double-layer plates in each industry, the high-precision alignment technology for both objects or double-layer plates is achieved, and the time for high-precision alignment is shortened. Trying to keep manufacturing costs low.

  Describes the current application of alignment technology for double-layer plates. Regarding the conventional two-layer plate alignment technique and the image processing method thereof, for example, “Regulatory fiducial mark design and its reference mark design of the two-layer plate motion alignment control system of the Chinese public notice No. I288365 (see Patent Document 1) In the “image processing method”, two image acquisition devices are used to collect alignment symbols of the two-layer plates between the two-layer plates, and are transmitted to one image processing module to be transmitted between the two-layer plates. Some have been designed to allow precise alignment.

  Further, as an automatic alignment technique for assisting image collection of a conventional image visual device, for example, as shown in FIG. 9, the image collection alignment device 9 includes one image collection module 91, one alignment device 92, and one attachment. Including tool 93. The alignment apparatus is used to place one lower layer object 94, and the fixture 93 uses one mounting end 931 to catch one upper layer object 95 by negative pressure adsorption, and the upper layer object 95 is lower layer. Located above the object 94. Further, a pair of corresponding alignment reference marks 951 and 941 are included on the surfaces of the upper layer object 95 and the lower layer object 94, respectively, and the image acquisition module 91 is formed to face the alignment reference marks 951 and 941, respectively.

  Also, as shown in FIGS. 10a and 10b, when the image collection alignment apparatus 9 performs alignment, the image collection module 91 is used to collect images of the alignment reference marks 951 and 941 of the upper layer object 95 and the lower layer object 94, respectively. Then, the rotation angle between the upper layer object 95 and the lower layer object 94 is determined together with the determination by the assistance of the computer again, and further, the position error in the horizontal direction and the vertical direction orthogonal to the horizontal direction is determined, and the alignment device 92 and / or the fixture 93 to adjust the relative positions of the upper layer object 95 and the lower layer object 94, and then align the upper layer object 95 and the lower layer object 94 in an overlapping manner using the alignment reference marks 951 and 941. To achieve the high accuracy required in the manufacturing process There is a thing that was.

  As for the conventional image acquisition alignment apparatus, for example, as shown in FIG. 11 a, the image acquisition alignment apparatus 8 includes a plurality of image acquisition modules 81, a pair of positioning tables 82 and a single rotation table 83. The positioning table 82 is used to place one lower layer object 84, the rotary table 83 is used to fix the upper layer object 85, and the upper layer object 85 is formed to align above the lower layer object 84. The A plurality of mutually corresponding alignment reference marks 851 and 841 are provided on the surfaces of the upper layer object 85 and the lower layer object 84, respectively, and a plurality of image collection modules 81 are formed to face the alignment reference marks 851 and 841, respectively. Is done.

  Referring again to FIG. 11a, when the image acquisition and alignment device 8 performs alignment, the image acquisition module 81 is used to collect alignment reference marks 851 and 841 of the upper layer object 85 and the lower layer object 84, respectively, and transmit them to the computer. Then, the image processing and the auxiliary calculation of the reference mark coordinates are performed, and the error of the relative spatial position where the upper layer object 85 and the lower layer object 84 exist is acquired by the calculation. Referring to FIG. 11b again, after the auxiliary calculation is finished, the relative position between the upper layer object 85 and the lower layer object 84 is obtained through the positioning table 82 and / or the rotary table 83 by obtaining a compensation value of the spatial position error. After adjustment and accurate adjustment, the upper object 85 is rotated 180 ° using the turntable 83. Thereby, the alignment reference mark 851 of the upper layer object 85 is rotated so as to correspond to the alignment reference mark 841 of the lower layer object 84, and then the upper layer object 85 is used again to relate to the lower layer object 84. To perform the operation. Among them, the spatial position error compensation includes a horizontal direction, a vertical direction orthogonal to the horizontal direction, and three directions such as rotation.

Republic of China Notice No. I288365

  As for the automatic alignment technique for assisting image acquisition of the conventional image visual device shown in FIGS. 9, 10 a, and 10 b described above, the image acquisition module 91 is directly connected to the alignment reference marks 951 and 941 in the image acquisition alignment device 9. Only when the visible area where the upper layer object 95 is located in the image acquisition module 91 can sufficiently transmit light, the alignment reference mark 951 is used by using the image acquisition module 91 of the image acquisition alignment device 9 only. The 941 image acquisition operation can be completed. Therefore, since the upper layer object 95 is subjected to special restrictions on the material, the image collection alignment apparatus 9 must perform a highly accurate alignment technique using a non-transparent material that cannot provide an area through which light can be sufficiently transmitted. There has been a problem that it cannot be widely applied to objects (for example, wafers, screen printed boards, flexible circuit boards, etc.).

  At present, the industry is developing toward miniaturization and precision, and the size of the object to be aligned is becoming increasingly smaller and finer. If it is slightly larger than the mounting end 931, not only is it difficult to mark the alignment reference mark 951 at the position of the mounting end 931 beyond the upper layer object 95, but an image collection module 91 is installed around the upper layer object 95. As a result, the image of the alignment reference mark 951 cannot be collected. For this reason, the conventional image acquisition alignment apparatus 9 has a problem in that image acquisition alignment cannot be performed accurately on an object having a small size.

  Further, in the conventional image acquisition alignment apparatus shown in FIGS. 11 a and 11 b described above, after the image acquisition alignment apparatus 8 performs compensation adjustment of the spatial position error between the upper layer object 85 and the lower layer object 84, the upper layer object is again displayed. By rotating 180 ° with respect to 85, the upper layer object 85 and the lower layer object 84 are more likely to cause a rotation error in the process of rotation, and the accuracy of alignment is lowered. .

  Further, the accurate relative positions of the plurality of image acquisition modules 81 installed on the image acquisition alignment apparatus 8 greatly affect the accuracy of the final alignment. If the image acquisition module 81 is loosened or given an impact, the position of the image acquisition module 81 is biased, so that a relative error occurs between the respective image acquisition modules 81, and the image acquisition alignment device 8 is affected as a whole. As a result, it is not possible to obtain a compensation that there should be an error in the spatial position between the upper layer object 85 and the lower layer object 84, and lower the accuracy of alignment between the upper layer object 85 and the lower layer object 84. There was a problem of end.

  Based on the above-mentioned problems, the conventional image acquisition and alignment apparatus as described above must be further improved.

  The present invention has been invented in view of such problems, and the main object of the present invention is to perform accurate image acquisition alignment with respect to an object in a simple operation form. An object of the present invention is to provide a high-accuracy alignment image acquisition device and an image acquisition module thereof that can reduce the time and cost required in the process of acquisition alignment and can further improve the convenience of work.

  A second object of the present invention is to reduce the relative errors that occur during the image acquisition process by avoiding the image acquisition module from being affected by different image acquisition types or other external influences, and An object of the present invention is to provide an image acquisition device for high-precision alignment and an image acquisition module thereof that can increase the precision of alignment.

  The third object of the present invention is not limited to the size of the object, but can be widely applied to objects of various high-precision alignments by accurately performing image acquisition alignment. An object is to provide an image acquisition device for alignment and an image acquisition module thereof.

In order to achieve the above object, an image acquisition apparatus for high-precision alignment according to the present invention is as follows.
It includes one mounting table, one carrying table and one image acquisition module. The carriage is used to align with the mounting table. The image acquisition module has one light guide unit and two image acquisition units, each of which has one light transmission path between the two image acquisition units and the light guide unit. It has a light input side and a plurality of light output sides, and the light guide unit has two other light reflecting prisms. One light reflecting surface is formed on each of the two light reflecting prisms. When the image acquisition module is located at one image acquisition position, the plurality of light input sides are formed to face the mounting table and the carriage, respectively, and the plurality of light output sides are respectively connected to two image acquisition units. By being formed to face each other, the light beams at the mounting table and the carrying table are simultaneously incident on the two light reflecting prisms via the plurality of light input sides, and the light of the two light reflecting prisms. Light rays reflected by the reflecting surface are formed so as to reach two image acquisition units along the light transmission path through a plurality of light output sides.

  The outside of the image acquisition module is covered with another casing, and the outer peripheral wall of the casing is formed with two light inlets and two receiving openings, each having two light inlets. The two light-receiving prisms are formed so as to face the light-reflecting surface of the light-reflecting prism, and two image acquisition units can be installed in the two receiving ports. In addition, one positioning member may be included, and both ends of the positioning member may be fixed to the light guide unit and the image acquisition unit, respectively. In addition, one driver can be electrically connected to each of the mounting table and the carrying table. In addition, another control unit may be included, and each control unit may be electrically connected to a mounting table driver, a carriage driver, and two image acquisition units.

  The image collection module of the high-accuracy alignment image collection apparatus according to the present invention includes one light guide unit and two image acquisition units. The light guide unit has a plurality of light input sides and a plurality of light output sides, and the light guide unit has two other light reflecting prisms. One light reflecting surface is formed on each of the two light reflecting prisms. Each of the image acquisition unit and the light guide unit has one light transmission path. When the image acquisition module is located at one image acquisition position, the plurality of light output sides are formed to face two image acquisition units, respectively, so that the light beam passes through the plurality of light input sides simultaneously. The light beams incident on the two light reflecting prisms and reflected on the light reflecting surfaces of the two light reflecting prisms pass through a plurality of light output sides to each of the two image acquisition units along the light transmission path. Formed to reach.

  The outside of the image acquisition module is covered with another casing, and the outer peripheral wall of the casing is formed with two light inlets and two receiving openings, each having two light inlets. The two light-receiving prisms are formed so as to face the light-reflecting surface of the light-reflecting prism, and two image acquisition units can be installed in the two receiving ports. In addition, one positioning member may be included, and both ends of the positioning member may be fixed to the light guide unit and the image acquisition unit, respectively.

  According to the high-accuracy alignment image acquisition apparatus and the image acquisition module of the present invention, it is necessary in the process of image acquisition alignment by performing accurate image acquisition alignment on an object in a simple operation form. There are advantages in that time and cost can be kept low, and convenience in work can be further enhanced.

  According to the image acquisition device for high-precision alignment and the image acquisition module of the present invention, the relativity that occurs in the process of image acquisition by avoiding the image acquisition module from being affected by different image acquisition types or other external influences. There is an advantage that the error of the above can be kept low and the precision of alignment can be increased.

  According to the high-accuracy alignment image acquisition apparatus and the image acquisition module of the present invention, it is widely used for various high-precision alignment objects by accurately performing image acquisition alignment without being limited by the size of the object. There is an advantage that it can be applied.

FIG. 1 is an explanatory diagram (1) of the structure of the first embodiment of the present invention. FIG. 2 is an explanatory diagram (2) of the structure of the first embodiment of the present invention. FIG. 3 is an explanatory diagram of the operation of the first embodiment of the present invention. FIG. 4 is an explanatory diagram of an image according to the first embodiment of the present invention. FIG. 5 is a perspective view of the structure of the second embodiment of the present invention. FIG. 6 is a cross-sectional view of the structure of the second embodiment of the present invention. FIG. 7 is an explanatory diagram of the structure of the third embodiment of the present invention. FIG. 8 is an explanatory diagram of an image according to the third embodiment of the present invention. FIG. 9 is an explanatory diagram of the structure of a conventional image collection device (1). FIG. 10A is an explanatory view (1) of the operation of the conventional image collection device (1). FIG. 10 b is an explanatory diagram (2) of the operation of the conventional image acquisition device (1). FIG. 11 a is an explanatory diagram of the structure of a conventional image acquisition device (2). FIG. 11 b is an explanatory diagram of the operation of the conventional image collection device (2).

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is an explanatory diagram (1) of the structure of the first embodiment of the present invention. Referring to FIG. 1, the high-accuracy alignment image acquisition apparatus according to the first embodiment of the present invention includes one image acquisition module 1, one mounting table 2, and one carrying table 3. The carrying table 3 can be aligned with respect to the mounting table 2 by performing displacement movement relative to the mounting table 2. When performing image collection, the image collection module 1 is formed so as to be positioned between the mounting table 2 and the carrying table 3.

  The image acquisition module 1 includes a plurality of light guide units 11 and two image acquisition units 12 and 12 '. In the present embodiment, each image acquisition unit 12, 12 'includes a charge coupled device (CCD) and a lens. The light guide unit 11 is formed so as to correspond to the two image acquisition units 12 and 12 ′, respectively, and the light guide unit 11 has a plurality of light input sides 110 and a plurality of light output sides 111. The light beams at the mounting table 2 and the carrying table 3 are simultaneously incident on the corresponding light guide unit 11 via the plurality of light input sides 110 and correspond to the light guide unit 11 through the light output side 111. The two image acquisition units 12, 12 ′ are reached.

  The light guide unit 11 selectively acquires images using various light reflective materials (for example, a light reflecting mirror, prism glass, etc.). In the present embodiment, a relatively good image acquisition effect can be achieved by selectively using the two light reflecting prisms 112a and 112b. The light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b are formed so as to face the corresponding light input sides 110a and 110b and the light output sides 111a and 111b, respectively.

  Thereby, the light beam at the place of the mounting table 2 and the carrying table 3 is simultaneously incident on the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b via the two light input sides 110a and 110b, respectively. The light beams reflected by the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b are made to reach the two image acquisition units 12 and 12 'through the two light output sides 111a and 111b, respectively. Among them, the two light reflecting prisms 112a, 112b preferably reflect the light rays received by the two light input sides 110a, 110b, respectively, to the two image acquisition units 12, 12 'at an angle of 90 °.

  In addition, one light transmission path is formed between each of the two image acquisition units 12 and 12 ′ and the light guide unit 11. This light transmission path indicates a light passing path through which the light received by the light guide unit 11 reaches the two image acquisition units 12 and 12 ′, respectively. In this embodiment, the two image acquisition units 12 and 12 ′ are formed so as to face the light output sides 111 a and 111 b of the light guide unit 11, respectively, and the two image acquisition units 12 and 12 ′ are one each. It has image acquisition ends 121, 121 ′, and the image acquisition ends 121, 121 ′ are used to collect light rays reflected from the places of the mounting table 2 and the carriage 3. Further, the two image acquisition units 12 and 12 'are selectively composed of a photographic lens having a high magnification and a low magnification, and a combination thereof, thereby improving the completeness of image acquisition performed on the objects on the mounting table 2 and the carrying table 3. Can be increased.

  In this embodiment, the image acquisition module 1 has another positioning member 13, and both ends of the positioning member 13 are fixed to the light guide unit 11 and the two image acquisition units 12 and 12 ′, respectively. The positioning member 13 is used to maintain the position between the two image acquisition units 12, 12 'and to hold the relative distance between the light guide unit 11 and the image acquisition units 12, 12'. Further, in order to obtain an accurate focal length for image acquisition, the light guide unit 11 and the two image acquisition units 12 and 12 'can all be coupled to a support base that can be supported using various coupling methods.

  The mounting table 2 is brought into contact with a support table that can be supported by various coupling methods (for example, locking, screwing, fitting, adhesion, etc.). The mounting table 2 has one mounting surface 21, and the mounting surface 21 is used for fixing one object 5a in a subsequent process (see FIG. 2). When the image acquisition module 1 is positioned at one image acquisition position, the placement surface 21 is aligned and formed to face the light input side 110 b of the light guide unit 11. Among them, the image acquisition position refers to a position when the image collection module 1 performs image collection when the image collection module 1 is located between the mounting table 2 and the carrying table 3. In this embodiment, the mounting table 2 has another driver 22, which is used to drive the mounting surface 21 so as to be displaced (as shown in the drawing).

  The carrying table 3 is aligned above the mounting table 2 and is coupled to a support table that can be supported by various coupling methods (for example, locking, screwing, fitting, adhesion, etc.). The carriage 3 has one fixture 31, and the fixture 31 is used to fix another object 5b in a subsequent process (see FIG. 2). When the image acquisition module 1 is positioned at one image acquisition position, the fixture 31 is aligned and formed to face the light input side 110 a of the light guide unit 11. In this embodiment, the carriage 3 has another driver 32, which is used to drive the carriage 3 so as to be displaced (as shown in the drawings).

  Further, in order to eliminate the occurrence of errors in the image collection process, in the present invention, one control unit 4 includes two image acquisition units 12 and 12 ′, the driver 22 of the mounting table 2, and the carriage 3. It is electrically connected to the driver 32. The control unit 4 has an image analysis program, a drive control program, and other related control hardware, so that the image material received by the two image acquisition units 12 and 12 'is passed through the image analysis program. Then, by using the drive control program to activate the drivers 22 and 32 of the mounting table 2 and the carriage 3, alignment by relative displacement is caused.

  FIG. 2 is an explanatory diagram (2) of the structure of the first embodiment of the present invention. Referring to FIG. 2, in order to avoid that the image acquisition module 1 shifts the two image acquisition units 12, 12 ′ due to unexpected collisions due to the influence of external elements and affects the accuracy of object alignment. In the present invention, one housing 6 is coated on the outside of the image collection module 1, and two light inlets 61 and two housing ports 62 are formed on the outer peripheral wall of the housing 6.

  The two light inlets 61 are respectively aligned with the two light input sides 110a and 110b, and the light beams at the places of the mounting table 2 and the carriage 3 are reflected by the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b. And is formed so as to transmit light in the internal space 63 of the housing 6. In addition, the image collection module 1 is placed in the internal space 63 of the housing 6 via the two storage ports 62, and the two storage ports 62 are used for installing the two image acquisition units 12 and 12 ′. By being used, the image acquisition ends 121 and 121 ′ of the two image acquisition units 12 and 12 ′ extend to the internal space 63 of the housing 6 and receive the light rays reflected by the two light reflecting prisms 112 a and 112 b. be able to.

  FIG. 3 is an explanatory diagram of the operation of the first embodiment of the present invention, and FIG. 4 is an explanatory diagram of an image of the first embodiment of the present invention. Referring to FIGS. 3 and 4, the high-accuracy alignment image acquisition apparatus according to the first embodiment of the present invention displays a state in which an object is aligned based on the above-described members. First, the objects 5a and 5b are coupled to each other on the mounting surface 21 of the mounting table 2 and the fixture 31 of the carrying table 3, and the objects 5a and 5b are formed so as to be vertically aligned. Further, a plurality of alignment reference marks 51a and 51b (see FIG. 4) are formed on the surfaces of the objects 5a and 5b, respectively. The plurality of alignment reference marks 51a, 51b are of a geometric shape that can selectively acquire a cross, square, triangle, or other centroid coordinates, and the reference mark 51a of the object 5a and the reference mark 51b of the object 5b are preferably It has a shape corresponding to each other vertically and horizontally.

  The image acquisition module 1 extends between the vertically aligned objects 5a and 5b, and the objects 5a and 5b so as to align the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b of the light guide unit 11, respectively. , The alignment reference marks 51a and 51b of the objects 5a and 5b are collected at the same time, and the images of the alignment reference marks 51a and 51b are reflected by the two light input sides 110a and 110b, respectively. The light is incident on the light reflecting surfaces R1 and R2 of the prisms 112a and 112b, and the images reflected on the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b are respectively transmitted through the two light output sides 111a and 111b. Image acquisition ends 12 of the two image acquisition units 12, 12 ′ along the optical transmission path, respectively. , To reach 121 '.

  Finally, the images received by the two image acquisition units 12 and 12 '(see FIG. 4) are transmitted to the control unit 4, and image analysis is performed by an image analysis program. Then, the numerical values of the horizontal direction between the objects 5a and 5b, the vertical direction orthogonal to the horizontal direction, and the rotational motion axis are obtained through the calculation of the spatial direction change and the position error compensation. Then, the signal is transmitted again to the drivers 22 and 32 of the mounting table 2 and the carrying table 3 by the drive control program of the control unit 4, and the relative positions of the upper layer object 5 a and the lower layer object 5 b are determined by the mounting table 2 and the carrying table 3. The adjustment causes a relative displacement to compensate for the spatial error. In this way, by directly adjusting the objects 5a and 5b through the vertical movement and rotation of the mounting table 2 and / or the carrying table 3, the light guide unit 11 is transferred from between the upper and lower alignment objects 5a and 5b. After that, by performing the operation of another process after performing the vertical alignment with respect to the objects 5a and 5b, the highly accurate alignment between the objects 5a and 5b can be performed.

  As can be understood from the above description, the high-accuracy alignment image acquisition device of the present invention is difficult to install by inserting it from the sides of the vertically aligned objects 5a and 5b. The high-precision alignment image acquisition device can be applied to an object to be subjected to various types of alignment without being limited by the size of the object. Furthermore, since only one set of image acquisition units 12 is employed to avoid the phenomenon that images overlap in the image acquisition process, the accuracy of alignment between the objects 5a and 5b is further increased. be able to. In this way, by performing accurate image acquisition alignment on an object in a simple operation form, it is possible to reduce the time and cost required in the process of image acquisition alignment, and further, between objects. Alignment precision and convenience can be improved.

  FIG. 5 is a perspective view of the structure of the second embodiment of the present invention, and FIG. 6 is a cross-sectional view of the structure of the second embodiment of the present invention. 5 and 6, the high-accuracy alignment image acquisition apparatus according to the second embodiment of the present invention includes one image acquisition module 1, one mounting table 2, and one carrying table 3 '. The carrying table 3 ′ is formed so as to be located on one side of the mounting table 2. The image acquisition module 1 also includes one light guide unit 11 and two image acquisition units 12 and 12 ′, and each light transmission path is between the light guide unit 11 and the two image acquisition units 12 and 12 ′. Have In the second embodiment, the two image acquisition units 12 and 12 ′ are formed so as to face the light output sides 111 a and 111 b of the light guide unit 11, respectively. The structural features and implementation method of the image acquisition module 1, the mounting table 2 and the carrying table 3 ′ are the same as those described in the first embodiment, and the difference is the arrangement position of the mounting table 2 and the carrying table 3 ′ in the second embodiment. Is only different.

  At this time, the carrying table 3 ′ is formed so as to be positioned on one side of the mounting table 2, and an angle of 90 ° is formed between the carrying table 3 ′ and the mounting table 2. Therefore, the light of the light guide unit 11 is rotated by rotating the light guide unit 11 installed in the alignment direction of the carriage 3 ′ in order to match the position of the placement table 2 and the carriage 3 ′ in the second embodiment. Since the input side 110a is directed to the carriage 3 ′, and the light reflecting prism 112a directed to the carriage 3 ′ at this time is rotated 90 ° and is formed to be aligned with the carriage 3 ′. The light beams at the places of the carriage 3 ′ and the mounting table 2 are also incident on the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b via the two light input sides 110a and 110b, and two The light beams reflected by the light reflecting surfaces R1 and R2 of the light reflecting prisms 112a and 112b are respectively transmitted through the two light output sides 111a and 111b along the light transmission path. It is reached and the image acquisition unit 12, 12 '.

  In this way, by utilizing an arbitrary direction change by the two light reflecting prisms 112a and 112b of the light guide unit 11, the light input sides 110a and 110b of the light guide unit 11 are relatively mounted on the carriage 3 ′. The light beam incident on the place of the mounting table 2 can be received, and the light beams reflected by the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b are transmitted through the two light output sides 111a and 111b, respectively. Since two image acquisition units 12 and 12 'are respectively reached along the optical transmission path, the present invention can be applied to the arrangement of equipment to be carried out on objects of various alignments required in various industries, and this book The effect which can apply the image acquisition device for high precision alignment of the invention widely can be achieved.

  FIG. 7 is an explanatory diagram of the structure of the third embodiment of the present invention, and FIG. 8 is an explanatory diagram of an image of the third embodiment of the present invention. Referring to FIGS. 7 and 8, the high-accuracy alignment image acquisition apparatus according to the third embodiment of the present invention includes one image acquisition module 1, one mounting table 2, and one carrying table 3. The carriage 3 is formed so as to be positioned above the mounting table 2, and the image acquisition module 1 includes one light guide unit 11 and one image acquisition unit 12, and between the image acquisition unit 12 and the light guide unit 11. Each have an optical transmission path. In the third embodiment, the image acquisition unit 12 is formed so as to be aligned and directed to the two light output sides 111 a and 111 b of the light guide unit 11 at the same time.

  Among them, the characteristics of the structure of the mounting table 2, the carriage 3, and the light guide unit 11 are the same as those described in the first embodiment, and the difference is that the image acquisition of one image acquisition unit 12 in the third embodiment is different. The image which is simultaneously reflected by the two light reflecting prisms 112a and 112b by the end 121 is received, and the alignment between the objects 5a and 5b is performed in the subsequent process. In addition, the light guide unit 11 and the image acquisition unit 12 are fixed using the positioning member 13, respectively, and the relative distance between the light guide unit 11 and the image acquisition unit 12 is maintained. Get the focal length.

  Referring to FIGS. 7 and 8 again, the high-accuracy alignment image acquisition apparatus according to the third embodiment of the present invention posts a state in which an object is aligned based on the above-described members. First, the image collecting module 1 is extended between the objects 5a and 5b, and the light input sides 110a and 110b of the light guide unit 11 are directed to the objects 5a and 5b so as to align with each other. The alignment reference marks 51a and 51b are collected (see FIG. 8), and two images of the alignment reference marks 51a and 51b are transmitted via the two light input sides 110a and 110b using the optical transmission path. The light reflected on the light reflecting surfaces R1 and R2 of the light reflecting prisms 112a and 112b and reflected on the light reflecting surfaces R1 and R2 of the two light reflecting prisms 112a and 112b are respectively reflected on the two light output sides 111a and 111b. And simultaneously reach the image acquisition unit 12 along the optical transmission path.

  Then, an image (see FIG. 8) that is received by the image acquisition unit 12 is transmitted to the control unit 4 again, and image analysis and high-precision alignment are performed based on the same method as in the first embodiment. In this way, two images are collected using the single lens of the image acquisition unit 12 and high-precision alignment is performed in the subsequent process, whereby the high-precision alignment image collection device of the present invention is manufactured. Cost and time can be kept low.

  According to the high-accuracy alignment image acquisition apparatus of the present invention, by performing accurate image acquisition alignment on an object with a simple operation, the time and cost required in the image acquisition alignment process can be kept low. It is possible to improve the convenience of work.

  Further, according to the image acquisition device for high-precision alignment of the present invention, it is possible to suppress the relative error generated in the image acquisition process by avoiding the image acquisition module from being affected by external elements, and The precision of alignment can be increased, and the convenience in work can be further enhanced.

  Furthermore, according to the high-accuracy alignment image acquisition device of the present invention, it is widely used for various high-precision alignment objects by accurately performing image acquisition alignment without being limited by the size of the object. Can be applied.

  The present invention may be implemented in other ways without departing from the spirit and essential characteristics thereof. Accordingly, the preferred embodiments described herein are exemplary and not intended to be limiting.

DESCRIPTION OF SYMBOLS 1 Image acquisition module 11 Light guide unit 110,110a, 110b Light input side 111,111a, 111b Light output side 112a, 112b Light reflection prism 12,12 'Image acquisition unit 121,121' Image acquisition end 13 Positioning member 2 Mounting base Reference Signs List 21 Mounting surface 22 Driver 3, 3 'Carriage 31, 31' Attachment 32, 32 'Driver 4 Control unit 5a, 5b Object 51a, 51b Alignment reference mark 6 Housing 61 Light entrance 62 Accommodation port 63 Internal space 8,9 Image collection alignment device 81,91 Image collection module 82 Positioning table 83 Rotation table 84,94 Lower layer object 841,851,941,951 Alignment reference mark 85,95 Upper layer object 92 Alignment device 93 Mounting tool 931 Mounting end R1, R2 Light reflecting surface

Claims (8)

  An image acquisition device for high-precision alignment including one mounting table (2), one carrying table (3), and one image acquisition module (1), wherein the carrying table (3) is aligned with the mounting table (2). The image acquisition module (1) has one light guide unit (11) and two image acquisition units (12, 12 ′), and two image acquisition units (12, 12 ′). The light guide unit (11) has a plurality of light input sides (110) and a plurality of light output sides (111). The light guide unit (11) has two other light reflecting prisms (112a, 112b), and each of the two light reflecting prisms (112a, 112b) has one light reflecting surface (R1, R2). An image acquisition module in it When (1) is located at one image acquisition position, the plurality of light input sides (110) are respectively formed to face the mounting table (2) and the carriage (3), and the plurality of light output sides. (111) is formed so as to face the two image acquisition units (12, 12 '), so that the light beams at the places of the mounting table (2) and the carrying table (3) can be simultaneously transmitted to a plurality of light input sides. The light rays incident on the two light reflecting prisms (112a, 112b) via (110) and reflected on the light reflecting surfaces (R1, R2) of the two light reflecting prisms (112a, 112b) are respectively An image acquisition device for high-precision alignment formed so as to reach each of the two image acquisition units (12, 12 ') along the optical transmission path through a plurality of light output sides (111).   The outside of the image acquisition module (1) is further covered with one housing (6), and two light inlets (61) and two accommodation ports (62) are provided on the outer peripheral wall of the housing (6). The two light inlets (61) are formed to face the light reflecting surfaces (R1, R2) of the two light reflecting prisms (112a, 112b), respectively, and are formed in the two receiving ports (62). The high-precision alignment image acquisition device according to claim 1, wherein two image acquisition units (12, 12 ') are installed.   The positioning member (13) further includes one positioning member (13), and both ends of the positioning member (13) are fixed to the light guide unit (11) and the image acquisition unit (12, 12 '), respectively. Image acquisition device for high-precision alignment.   The high-precision alignment image collecting apparatus according to claim 1, wherein one driver (22, 32) is electrically connected to each of the mounting table (2) and the carrying table (3).   Furthermore, it includes one control unit (4), each of which includes a driver (22) for the mounting table (2), a driver (32) for the carriage (3), and two image acquisition units (12). 12 '). The image acquisition device for high-precision alignment according to claim 4, wherein the image acquisition device is highly connected.   An image acquisition module of a high-precision alignment image acquisition device including one light guide unit (11) and two image acquisition units (12, 12 ′), wherein the light guide unit (11) has a plurality of light inputs. The light guide unit (11) has two other light reflecting prisms (112a, 112b), and two light reflecting prisms (112a). 112b) each has one light reflecting surface (R1, R2), and each has one light transmission path between the image acquisition unit (12, 12 ') and the light guide unit (11). When the image acquisition module (1) is located at one image acquisition position, the plurality of light output sides (111) are formed to face the two image acquisition units (12, 12 ′), respectively. By the same Are incident on two light reflecting prisms (112a, 112b) via a plurality of light input sides (110), and light reflecting surfaces (R1, R2) of the two light reflecting prisms (112a, 112b). The high-precision alignment image collection is formed such that the light rays reflected by the laser beam reach the two image acquisition units (12, 12 ′) along the optical transmission path through the plurality of light output sides (111). Image acquisition module of the device.   The outside of the image acquisition module (1) is further covered with one housing (6), and two light inlets (61) and two accommodation ports (62) are provided on the outer peripheral wall of the housing (6). The two light inlets (61) are formed to face the light reflecting surfaces (R1, R2) of the two light reflecting prisms (112a, 112b), respectively, and are formed in the two receiving ports (62). The image acquisition module of the high-accuracy alignment image acquisition apparatus according to claim 6, wherein two image acquisition units (12, 12 ′) are installed.   The positioning member (13) further includes one positioning member (13), and both ends of the positioning member (13) are fixed to the light guide unit (11) and the image acquisition unit (12, 12 '), respectively. Image acquisition module of high precision alignment image acquisition device.

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