TWI434157B - An image acquisition device for the precision alignment and its module - Google Patents

Description

Image capturing device for precise alignment and image capturing assembly thereof

The invention relates to an image capturing device capable of simultaneously capturing double-sided images, in particular to a penetrating image capturing device for precise alignment of two objects.

The application of double object or double-layer aligning technology is very wide. For the fields of semiconductor, flat panel display, printed circuit board, etc., it is necessary to implement dual object or double-layer aligning technology. Therefore, various industries have adopted this pair. The object or double layer alignment technology is improved to increase the precision of the dual or double layer alignment technology, thereby shortening the precision alignment time and reducing the manufacturing cost.

At present, the application of the double-layer aligning technology is as follows: Please refer to FIG. 1 to disclose a technique for assisting automatic alignment by image capturing using an image visual device, the image capturing device 9 The invention comprises an image capturing component 91, a pair of positioning devices 92 and a clamping fixture 93. The positioning platform 92 is used for carrying the lower layer object 94, and the clamping fixture 93 is suctioned by a clamping end 931. The upper layer object 95 is located above the lower layer object 94, and the surface layers of the upper and lower objects 95, 94 respectively have a corresponding set of alignment marks 951, 941, and the The image capturing component 91 is oriented toward the alignment marks 951, 941, respectively. Referring to FIGS. 2a and 2b, when the image capturing and aligning device 9 is aligned, the image capturing component 91 is used to capture the alignment marks 951 and 941 of the upper and lower objects 95 and 94, respectively. Imagery The method of computer-aided judgment determines the error of the rotation angle between the upper and lower objects 95, 94, the horizontal direction, and the longitudinal position perpendicular to the horizontal direction, and accordingly is adjusted by the alignment device 92 and/or the fixture 93. The relative positions of the upper and lower objects 95, 94 are such that the upper and lower objects 95, 94 are superposed by the alignment marks 951, 941 to achieve the precision required for the process.

However, since the image capturing and aligning device 9 directly faces the alignment mark 951 and 941 with the image capturing component 91, only the upper layer object 95 can be sufficiently transparent in the visible area of the image capturing component 91. At this time, the image capturing component 91 of the image capturing device 9 can be used to complete the image capturing operation of the alignment marks 951 and 941. Therefore, due to the special limitation of the material of the upper layer member 95, the image capturing and aligning device 9 cannot be widely applied to objects that cannot provide a transparent material with sufficient transparent areas but still need precise alignment technology (for example: Wafers, printed stencils, flexible boards, etc.).

Moreover, since most of the current industries are moving toward small precision, the size of the object to be aligned is also slightly fine, so when the size of the upper object 95 is only slightly larger than the shape of the clip 931 of the fixture 93. It is not only difficult to mark the alignment mark 951 at the position of the upper object 95 beyond the clamping end 931, and the image capturing component 91 cannot be mounted around the upper object 95 to capture the image of the alignment mark 951. . Therefore, the conventional image capturing and collating device 9 cannot accurately perform image capturing alignment on a small-sized object.

In order to further improve the above disadvantages, another dual object or double layer alignment technique is provided. Please refer to Fig. 3a to reveal another image. The aligning device 8 includes a plurality of image capturing components 81, a pair of positioning platforms 82, and a rotating table 83. The alignment platform 82 is configured to carry a lower layer object 84, and the rotating table 83 is used for the upper layer. The object 85 is fixed, and the upper object 85 is located above the lower object 84, and the surface of the upper and lower objects 85, 84 respectively have a plurality of corresponding alignment marks 851, 841, and the image capturing group is obtained by the image The members 81 face the alignment marks 851, 841, respectively.

Referring to FIG. 3a again, when the image capturing and aligning device 8 is aligned, the image capturing component 81 captures the alignment marks 851 and 841 of the upper and lower objects 85 and 84 for transmission. The computer performs image processing and auxiliary operations of the mark coordinates, and the relative spatial difference between the upper and lower objects 85 and 84 is obtained by calculation. Referring to FIG. 3b, after the end of the auxiliary operation, the value of the spatial error compensation is obtained, and accordingly, the relative positions of the upper and lower objects 85 and 84 are adjusted through the positioning table 82 and/or the rotating table 83. After the adjustment, the upper table member 85 is rotated 180 degrees by the rotating table 83, so that the alignment mark 851 of the upper layer member 85 is turned to correspond to the alignment mark 841 of the lower layer member 84, and then the upper layer object is further used. The lower layer object 84 is subjected to a related process, wherein the compensation for the spatial error includes three directions of a horizontal direction, a vertical direction perpendicular to the horizontal direction, and a rotation.

However, since the image capturing and collating device 8 adjusts the spatial error of the upper and lower objects 85 and 84, and then rotates the upper object 85 by 180 degrees, it is easy to make the upper and lower objects. 85, 84 additionally produces a rotation error during the rotation process, and reduces the alignment accuracy.

Furthermore, since the image captures several images set up by the alignment device 8 The precise relative position of the capture component 81 has a great influence on the final alignment accuracy. If the correction is not good or the lock is slack and collided, the image capture component 81 is displaced, which will cause the image capture component 81 to be between the components. A relative error is generated to affect the entire image capturing device 8, causing the spatial error between the upper and lower objects 85, 84 not to be compensated properly, and reducing the pair between the upper and lower objects 85, 84. Bit accuracy.

In view of the above various shortcomings, the conventional image capturing device for precise alignment and its image capturing assembly are still necessary for improvement.

The invention improves the above disadvantages, and provides an image capturing device for precise alignment and an image capturing component thereof, which can accurately perform image capturing alignment on an object in a simple operation mode to shorten the image. The time and cost required to capture the alignment process and improve the ease of operation.

The second object of the present invention is to provide an image capturing device for precise alignment and an image capturing component thereof, which can prevent the image capturing component from being affected by different image capturing modes or other external factors, thereby reducing the image capturing process. The relative error generated to increase the accuracy of the alignment.

A further object of the present invention is to provide an image capturing device for precise alignment and an image capturing assembly thereof, which can accurately perform image capturing alignment without being limited to the size of the object, and is widely used in various needs. Precision alignment object.

In order to achieve the foregoing object, the technical content of the present invention includes: an image capturing device for precise alignment, comprising: a carrier, The image capturing device includes a light guiding component and two image capturing components, and each of the two image capturing components and the light guiding component has an optical transmission. a path, the light guiding component has a plurality of light incident sides and a plurality of light exiting sides, and the light guiding component further comprises two reflective light beams, wherein the two reflective light beams each form a reflective surface; wherein the image capturing group When the component is in an image capturing position, the light entering sides are respectively directed toward the carrying platform and the carrier, and the light emitting side is respectively directed toward the two image capturing components to simultaneously pass light of the loading platform and the carrier. The light incident side is respectively incident on the two reflecting beams, and the light reflected by the reflecting surface of the two reflecting rays passes through the light emitting side to emit light to the two image capturing elements.

The above and other objects, features, and advantages of the present invention will become more apparent from the description of the appended claims. The image capturing device for precision alignment of the first embodiment of the present invention comprises an image capturing component 1, a loading platform 2 and a carrier 3, wherein the carrier 3 is displaced relative to the loading platform 2, The image capturing unit 1 is located between the carrying platform 2 and the carrier 3 for aligning the carrying platform 2 and performing image capturing.

The image capturing component 1 has a plurality of light guiding components 11 and two image capturing components 12 and 12 ′. In this embodiment, each image capturing component comprises a charge coupled device (CCD) and a lens. The light guiding component 11 is respectively corresponding to the two image capturing elements 12 and 12 ′, and the light guiding component 11 has a plurality of light incident sides 110 and a plurality of light emitting sides 111 to simultaneously make The light from the carrier 2 and the carrier 3 are respectively incident on the corresponding light guiding component 11 via the plurality of light incident sides 110, and are emitted through the light emitting side 111 to the two image capturing corresponding to the light guiding component 11. Element 12, 12'. The light guiding component 11 can be selected to take various materials with reflective properties (for example, mirrors, cymbals, etc.). In this embodiment, the second reflecting reflectors 112a and 112b are selected to achieve better selection. For example, the reflective surfaces R1 and R2 of the two reflecting reflectors 112a and 112b are respectively oriented toward the corresponding light-incident sides 110a and 110b and the light-emitting sides 111a and 111b, thereby simultaneously placing the carrying platform 2 and the carrier 3 The light rays are respectively incident on the reflecting surfaces R1 and R2 of the two reflecting beams 112a and 112b via the two light incident sides 110a and 110b, and the light reflected by the reflecting surfaces R1 and R2 of the two reflecting beams 112a and 112b are respectively Light is emitted through the two light exiting sides 111a, 111b to the two image taking elements 12, 12', wherein the two reflecting beams 112a, 112b preferably respectively receive the light received by the light incident sides 110a, 110b at a 90 degree angle. Reflected to the two image taking elements 12, 12'. Moreover, a light transmission path is formed between the two image capturing elements 12, 12 ′ and the light guiding component 11 respectively, and the light transmission path means that each light received by the light guiding component 11 is emitted to the two images. The light travels through the elements 12, 12'. In this embodiment, the two image capturing elements 12, 12' are respectively directed toward the light exiting sides 111a, 111b of the light guiding component 11, and the two image capturing components 12, 12' respectively have an image capturing end 121, 121. The image taking ends 121, 121' are used to capture light incident from the carrier 2 and the carrier 3, and the two image taking elements 12, 12' can be selected to be high magnification, low magnification and The combined photographic lens is used to increase the integrity of the image of the carrier 2 and the carrier 3. In this embodiment, the image capturing assembly 1 further has a positioning member 13 , and the two ends of the positioning member 13 are respectively fixed. The light guiding component 11 and the two image capturing components 12, 12' are used to maintain the position between the two image capturing components 12, 12' and maintain the relative distance between the light guiding component 11 and the image capturing components 12, 12'. And achieving a precise image focal length, so that the light guiding component 11 and the two image taking components 12, 12' can be combined with the supportable support in various combinations.

The loading platform 2 is abutted against a supportable support by various combinations (for example, snapping, screwing, fitting, adhesive, etc.), and the loading platform 2 has a bearing surface 21, and the bearing surface 21 For fixing the object 5a (as shown in FIG. 5), the bearing surface 21 can be aligned toward the light guiding component 11 when the image capturing component 1 is in an image capturing position. The image capturing device 1 is located between the carrier 2 and the carrier 3 for image capturing by the image capturing component 1 . In this embodiment, the carrier 2 is further provided with a driver 22 (shown as shown in the figure) for driving the bearing surface 21 to generate displacement.

The carrier 3 is located above the loading platform 2 and is coupled to the supportable support by various combinations (for example, snapping, screwing, fitting, bonding, etc.), the carrier 3 has a fixture 31 for fixing another object 5b (as shown in FIG. 5) for subsequent operation, and when the image capturing assembly 3 is located at the image capturing position, the clamping device The 31 series can be aligned toward the light incident side 110a of the light guiding component 11. In this embodiment, the carrier 3 is further provided with a driver 32 (shown in the figure) for driving the carrier 3 to generate displacement.

Furthermore, in order to eliminate the error generated in the image capturing process, the present invention electrically connects the two image capturing components 12, 12', the driver 22 of the carrier 2 and the carrier 3 by a control component 4, respectively. Drive 32, the control The component 4 includes an image analysis program, a drive control program, and related control hardware, etc., so that the image data received by the two image capturing components 12, 12' are analyzed by an image analysis program, and the drive control program is utilized. The carrier 2 and the drivers 22, 32 of the carrier 3 are activated to produce a relative displacement alignment.

In addition, in order to prevent the image capturing component 1 from being affected by external factors, and the unpredictable collision causes the two image capturing components 12, 12' to be offset, and affect the accuracy of the object alignment, please refer to FIG. As shown in the figure, the outer side of the image capturing unit 1 is covered with a shell member 6. The outer peripheral wall of the shell member 6 is formed with a second light entrance 61 and a second receiving port 62. Opposing the light-receiving surfaces R1, R2 of the two reflecting lamps 112a, 112b, respectively, on the light-inputting sides 110a, 110b, and for the light incident on the carrying table 2 and the carrier 3, and then the housing The internal space 63 of 6 carries out the transmission of light. The image capturing unit 1 is placed in the inner space 63 of the casing 6 via the two accommodating ports 62, and the two accommodating ports 62 are used to erect the two image taking elements 12, 12'. The image capturing ends 121, 121' of the two image taking elements 12, 12' extend into the inner space 63 of the housing 6 for receiving the light reflected by the two reflecting beams 112a, 112b.

Referring to FIGS. 6 and 7, the image capturing device for precision alignment according to the first embodiment of the present invention performs object alignment according to the above components, and precedes the bearing surface 21 of the carrier 2 and the carrier. The fixtures 31 having 3 are combined with the objects 5a, 5b, respectively, so that the objects 5a, 5b are in the upper and lower alignment positions, and the surfaces of the objects 5a, 5b respectively have a plurality of alignment marks 51a, 51b ( As shown in Fig. 7, the plurality of alignment marks 51a, 51b can be selected as a cross, a square, a triangle or the like to obtain a centroid. The mark geometry 51, and the mark 51a of the object 5a and the mark 51b of the object 5b are preferably in a corresponding shape in which the left and right sides and the upper and lower sides are symmetrical to each other.

Then, the image capturing component 1 is inserted between the upper and lower objects 5a and 5b, so that the reflective surfaces R1 and R2 of the two reflecting reflectors 112a and 112b of the light guiding component 11 are aligned. The objects 5a, 5b capture the alignment marks 51a, 51b of the objects 5a, 5b at the same time, and the images of the alignment marks 51a, 51b are incident on the two reflectors via the two light incident sides 110a, 110b, respectively. The reflective surfaces R1 and R2 of the 112a and 112b, and the images reflected by the reflective surfaces R1 and R2 of the two reflecting reflectors 112a and 112b are respectively transmitted through the two light emitting sides 111a and 111b to emit light along the optical transmission path. The image taking ends 121, 121' of the image taking elements 12, 12'. Finally, the images received by the two image capturing elements 12, 12' (as shown in FIG. 7) are transmitted to the control component 4, and the image analysis program performs image analysis, and performs spatial direction conversion and position error compensation operations. Obtaining the horizontal direction of the object 5a, 5b, the vertical direction of the horizontal direction and the rotational movement axis, and transmitting the signal to the carrier 2 and the carrier 3 by the driving control program of the control component 4 The drivers 22 and 32 adjust the relative positions of the upper and lower objects 5a and 5b by the carrier 2 and the carrier 3 to perform spatial error compensation to generate relative displacement, so that the carrier can be transmitted through the carrier 2 and / or the longitudinal movement and rotation of the carrier 3 to directly adjust the object 5a, 5b, so that the light guide assembly 11 is removed from the upper and lower aligned objects 5a, 5b and then the object 5a, 5b is loaded The relevant process actions after the alignment are performed to achieve the precise alignment between the objects 5a and 5b.

It is known from the above that the image capturing device for precise alignment of the present invention is inserted by the sides of the upper and lower aligned objects 5a, 5b, therefore, The utility model can overcome the disadvantage that the image capturing device for precise alignment is difficult to set, so that the image capturing device for precise alignment can be applied to various types without being limited by the size of the object. The object, and can avoid the phenomenon that only one set of image capturing elements 12 is used to create image overlap during the image capturing process, so as to improve the alignment accuracy between the objects 5a, 5b. In this way, the object can be accurately imaged and aligned in a simple operation mode, which not only shortens the time and cost required for the image capturing and aligning process, but also improves the alignment accuracy between any objects. With convenience.

The image capturing device for precision alignment according to the second embodiment of the present invention includes an image capturing component 1, a carrier 2 and a carrier 3'. The image capturing assembly 1 also includes a light guiding component 11 and two image capturing components 12, 12', and the light guiding component 11 and the two image capturing components 12, Each of the 12's has an optical transmission path. In the second embodiment, the two imaging elements 12, 12' are respectively directed toward the light exiting sides 111a, 111b of the light guiding component 11, wherein the image capturing group The structural features and embodiments of the device 1, the carrier 2 and the carrier 3' are the same as those described in the first embodiment, except that the arrangement positions of the carrier 2 and the carrier 3' of the second embodiment are different. At this time, the carrier 3' is located on one side of the carrier 2, and the carrier 3' is formed at an angle of 90 degrees with the carrier 2, and therefore, in order to accommodate the carrier of the second embodiment 2, the arrangement position of the carrier 3' is a steering operation of the light guide assembly 11 that is mounted in the alignment direction of the carrier 3', such that the light incident side 110a of the light guide assembly 11 faces the carrier 3' At this time, the reflective diaphragm 112a facing the carrier 3' is turned 90 degrees and aligned with the carrier 3', so that the light at the carrier 3' and the carrier 2 can also pass through the binary light. Side 110a, 110b is incident on the reflecting surfaces R1 and R2 of the two reflecting beams 112a and 112b, and the light reflected by the reflecting surfaces R1 and R2 of the two reflecting beams 112a and 112b is respectively transmitted through the light emitting sides 111a and 111b along the light. The transmission paths each emit light to the two imaging elements 12, 12'. In this way, the light-directed sides 110a, 110b of the light-guiding component 11 can be relatively received by the carrier 3' and the carrier 2 by using any steering of the two reflectors 112a, 112b of the light-guiding component 11. Light rays, and light rays reflected by the reflecting surfaces R1 and R2 of the two reflecting beams 112a and 112b are respectively transmitted through the light-emitting paths 111a and 111b to the two image capturing elements 12 and 12'. It is applied to the equipment configuration implemented by various industries for the required aligning objects, and achieves the wide application effect of the image capturing device for precise alignment of the present invention.

Referring to FIG. 10, an image capturing device for precision alignment according to a third embodiment of the present invention includes an image capturing component 1, a carrier 2, and a carrier 3. The carrier 3 is The image capturing unit 1 includes a light guiding component 11 and an image capturing component 12, and the image capturing component 12 and the light guiding component 11 respectively have the light transmission path. In this embodiment, the image capturing elements 12 are respectively aligned toward the light emitting sides 111a and 111b of the light guiding component 11 respectively, wherein the structural features of the carrier 2, the carrier 3 and the light guiding component 11 are The first embodiment is the same as the first embodiment. The difference is that the image capturing end 121 of the image capturing component 12 receives the image reflected by the two reflecting beams 112a and 112b simultaneously, so that the object is to be subsequently processed. The alignment between 5a and 5b. In addition, the light guiding component 11 and the image capturing component 12 are respectively fixed by the positioning member 13, and the relative distance between the light guiding component 11 and the image capturing component 12 is maintained, and the precise image capturing focal length is achieved.

Referring to FIG. 10 and FIG. 11 again, in the third embodiment of the present invention, the image capturing device for precision alignment is arranged according to the above-mentioned components, and the image capturing component 1 is inserted into the object. Between 5a and 5b, the light incident sides 110a, 110b of the light guiding component 11 are respectively aligned toward the object 5a, 5b to simultaneously capture the alignment marks 51a, 51b of the objects 5a, 5b (as shown in Fig. 11). As shown in the figure, the image of the alignment marks 51a, 51b is incident on the reflective surfaces R1, R2 of the two reflectors 112a, 112b via the two light incident sides 110a, 110b, respectively. The images reflected by the reflecting surfaces R1 and R2 of the reflecting beams 112a and 112b are simultaneously emitted to the image capturing element 12 along the light transmitting path via the two light emitting sides 111a and 111b, and the image received by the image capturing element 12 is received. (As shown in Fig. 11) is transmitted to the control unit 4, and image analysis and precise alignment are performed in the same manner as in the first embodiment. In this way, the two images of the image capturing component 12 can be used to capture the two images for subsequent precise alignment to reduce the manufacturing cost and time of the present invention.

The image capturing device for precise alignment of the present invention is capable of accurately taking an image alignment position of an object in a simple operation mode, thereby shortening the time required for the image capturing and aligning process, and further Achieve the effect of reducing costs.

The image capturing device for precise alignment of the present invention can prevent the image capturing component from being affected by external factors, thereby reducing the relative error generated by the image capturing process, thereby improving the efficiency of the alignment accuracy, and Improve work convenience.

The image capturing device for precise alignment of the present invention can accurately perform image capturing alignment without being limited to the size of the object, and is widely applied. A variety of objects that require precise alignment.

While the invention has been described in connection with the preferred embodiments described above, it is not intended to limit the scope of the invention. The technical scope of the invention is protected, and therefore the scope of the invention is defined by the scope of the appended claims.

〔this invention〕

1‧‧‧Image capture component

11‧‧‧Light guide components

110‧‧‧light side

110a‧‧‧light side

110b‧‧‧light side

111‧‧‧Lighting side

111a‧‧‧light side

111b‧‧‧light side

112a‧‧‧Reflection

112b‧‧‧Reflection

R1‧‧‧reflective surface

R2‧‧‧ Reflective surface

12‧‧‧Image taking components

12’‧‧‧Image taking components

121‧‧‧Image terminal

121’‧‧‧ takes the image

13‧‧‧ Positioning parts

2‧‧‧bearing station

21‧‧‧ bearing surface

22‧‧‧ Drive

3‧‧‧ Vehicles

31‧‧‧Clamping fixture

32‧‧‧ drive

3’‧‧‧ Vehicles

31’‧‧‧Clamps

32’‧‧‧ drive

4‧‧‧Control components

5a‧‧‧ objects

5b‧‧‧ Objects

51a‧‧‧ alignment mark

51b‧‧‧ alignment mark

6‧‧‧Shell

61‧‧‧Into the light port

62‧‧‧ 容口

63‧‧‧Internal space

[study]

9‧‧‧Image capture alignment device

91‧‧‧Image capture component

92‧‧‧ Positioning table

93‧‧‧Clamping fixture

931‧‧‧Certificate

94‧‧‧Underlying objects

941‧‧‧ alignment mark

95‧‧‧Upper objects

951‧‧‧ alignment mark

8‧‧‧Image capture device

81‧‧‧Image capture component

82‧‧‧ positioning table

83‧‧‧Rotating table

84‧‧‧Underlying objects

841‧‧‧ alignment mark

85‧‧‧Upper objects

851‧‧‧ alignment mark

Figure 1: Schematic diagram of the conventional image capturing device (1).

Figure 2a: Schematic diagram of the operation of the conventional image capturing device (1) (1).

Figure 2b: Schematic diagram of the operation of the conventional image capturing device (1) (2).

Figure 3a: Schematic diagram of the conventional image capturing device (2).

Figure 3b: Schematic diagram of the operation of the conventional image capturing device (2).

Fig. 4 is a view showing the structure (1) of the first embodiment of the present invention.

Fig. 5 is a structural schematic view (2) of the first embodiment of the present invention.

Figure 6 is a schematic view showing the operation of the first embodiment of the present invention.

Fig. 7 is a view showing the image of the first embodiment of the present invention.

Fig. 8 is a perspective view showing the structure of a second embodiment of the present invention.

Figure 9 is a cross-sectional view showing the structure of a second embodiment of the present invention.

Figure 10 is a schematic view showing the structure of a third embodiment of the present invention.

Figure 11 is a view showing an image of a third embodiment of the present invention.

1‧‧‧Image capture component

11‧‧‧Light guide components

110‧‧‧light side

110a‧‧‧light side

110b‧‧‧light side

111‧‧‧Lighting side

111a‧‧‧light side

111b‧‧‧light side

112a‧‧‧Reflection

112b‧‧‧Reflection

R1‧‧‧reflective surface

R2‧‧‧ Reflective surface

12‧‧‧Image taking components

121‧‧‧Image terminal

12’‧‧‧Image taking components

121’‧‧‧ takes the image

13‧‧‧ Positioning parts

2‧‧‧bearing station

21‧‧‧ bearing surface

22‧‧‧ Drive

3‧‧‧ Vehicles

31‧‧‧Clamping fixture

32‧‧‧ drive

4‧‧‧Control components

Claims (8)

An image capturing device for precision alignment, comprising: a carrying platform; a carrier for positioning on the carrying platform; and an image capturing component, the image capturing component comprising a light guiding component and a second image capturing component comprising a charge coupled component and a lens, wherein each of the two image capturing components and the light guiding component has an optical transmission path, and the light guiding component has a plurality of light incident sides and a plurality of a light-emitting side, and the light-guiding assembly further comprises two reflective yokes, each of the two reflective shinning systems respectively forming a reflective surface; wherein when the image capturing component is located at an image capturing position, the light-injecting side is respectively facing the light-emitting side And a light-emitting side of the light-receiving side facing the two image-receiving elements, respectively, so that light of the light-bearing surface of the carrier and the carrier is respectively incident on the two reflective light through the light-incident side, and the two reflective elements are respectively reflected The light reflected by the reflective surface of the crucible passes through the light-emitting side to emit light to the two image capturing elements. The image capturing device for precise alignment according to the first aspect of the patent application, wherein the outer side of the image capturing assembly is additionally covered with a shell member, and the outer peripheral wall of the shell member is formed with two inlet openings and two The accommodating port is respectively facing the reflecting surface of the two reflecting sills, and the two accommodating ports are provided with the two image taking elements. The image capturing device for precise alignment according to the first aspect of the patent application, wherein the image capturing device has a positioning member, and the two ends of the positioning member are respectively fixed to the light guiding component and the image capturing component. The image capturing device for precise alignment according to the first aspect of the patent application, wherein the carrier and the carrier are each electrically connected to a driver. The image capturing device for precise alignment according to the fourth aspect of the patent application, further comprising a control component, wherein the control component is electrically connected to the driver of the carrier, the driver of the carrier, and the second Like components. An image capturing component for a precision alignment image capturing device includes: a light guiding component having a plurality of light incident sides and a plurality of light exiting sides, and the light guiding component further comprises two Reflectively, the two reflective systems each form a reflective surface. And two image capturing components, the two image capturing components comprising a charge coupled component and a lens, each of the two image capturing components and the light guiding component having an optical transmission path; wherein the image capturing component is located at an image capturing position The light exiting side faces the two image capturing elements respectively, so that light is incident on the two reflecting rays through the light incident side, and the light reflected by the reflecting surface of the two reflecting rays passes through the light emitting side edge. The light transmission paths each emit light to the two image taking elements. An image capturing assembly for a precision alignment image capturing device according to the sixth aspect of the invention, wherein the outer side of the image capturing assembly is additionally covered with a shell member, and the outer peripheral wall of the shell member is formed with two The light entrance port and the second accommodating port respectively face the reflective surface of the two reflective sills, and the two accommodating ports are provided with the two image capturing elements. An image capturing assembly for a precision alignment image capturing device according to the sixth aspect of the patent application, wherein the image capturing device has a positioning member, and the two ends of the positioning member are respectively fixed to the light guiding component and Like components.