WO2023127317A1 - 半導体モジュール - Google Patents

半導体モジュール Download PDF

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Publication number
WO2023127317A1
WO2023127317A1 PCT/JP2022/041620 JP2022041620W WO2023127317A1 WO 2023127317 A1 WO2023127317 A1 WO 2023127317A1 JP 2022041620 W JP2022041620 W JP 2022041620W WO 2023127317 A1 WO2023127317 A1 WO 2023127317A1
Authority
WO
WIPO (PCT)
Prior art keywords
switching element
semiconductor module
wiring portion
module according
auxiliary source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/041620
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
祐平 西田
真由美 塩原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2023570717A priority Critical patent/JP7601262B2/ja
Priority to DE112022001872.0T priority patent/DE112022001872T5/de
Priority to CN202280037808.XA priority patent/CN117378047A/zh
Publication of WO2023127317A1 publication Critical patent/WO2023127317A1/ja
Priority to US18/511,954 priority patent/US20240088796A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0048—Circuits or arrangements for reducing losses
    • H02M1/0051—Diode reverse recovery losses
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
    • H10W72/07554—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/547—Dispositions of multiple bond wires
    • H10W72/5473—Dispositions of multiple bond wires multiple bond wires connected to a common bond pad
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips

Definitions

  • the auxiliary source wiring member connected to the source electrode of the first switching element of the semiconductor module may be physically separated from the output wiring between the drain electrode of the second switching element and the output terminal.
  • the first switching element and the second switching element may be provided facing each other in the second direction.
  • the second switching element and the second diode element may be provided on the lower arm and may be provided facing each other in the second direction.
  • the second switching element may be provided on the lower arm and connected to the output terminal via the first diode element provided on the upper arm.
  • a first wiring portion connected to one of the positive electrode terminal and the negative electrode terminal and extending in the second direction; a second wiring portion connected to the other of the positive electrode terminal and the negative electrode terminal and extending in the second direction; a plurality of gate external terminals provided in the first arrangement region extending to the first switching element and electrically connected to the gate electrode of the first switching element or the gate electrode of the second switching element; a plurality of auxiliary source external terminals electrically connected to the source electrode of the switching element or the source electrode of the second switching element, and the gate electrode of the first switching element and the gate external terminal corresponding to the plurality of gate external terminals a first auxiliary source wiring member for connecting a first gate wiring member to be connected with the source electrode of the first switching element and a corresponding auxiliary source external terminal of the plurality of auxiliary source external terminals; and a gate electrode of the second switching element.
  • the semiconductor module may include output terminals provided in the second arrangement region extending in the second direction.
  • the first switching element and the second switching element may be provided with the second arrangement region and the first wiring part interposed therebetween.
  • the first switching element and the second switching element may be arranged between the first wiring portion and the second wiring portion in the first direction.
  • the semiconductor module may include a plurality of upper arms and a plurality of lower arms.
  • the switching elements of the upper arm and the switching elements of the lower arm may be alternately arranged in the second direction.
  • the semiconductor module 100 may be applied to a power conversion device such as a power module that configures an inverter circuit.
  • a power conversion device such as a power module that configures an inverter circuit.
  • the semiconductor assemblies 160a to 160c may correspond to the U-phase, V-phase and W-phase of the three-phase inverter circuit, respectively.
  • the P-type wiring portion 106 is connected to the positive terminal 132 .
  • the N-type wiring portion 108 is connected to the negative terminal 134 .
  • the P-type wiring portion 106 and the N-type wiring portion 108 are provided extending in the Y-axis direction.
  • the P-type wiring portion 106 and the N-type wiring portion 108 are provided across the upper arm 102 and the lower arm 104 in the X-axis direction.
  • the P-type wiring portion 106 is provided on the positive side in the X-axis direction with respect to the N-type wiring portion 108 .
  • the P-type wiring portion 106 is provided between the N-type wiring portion 108 and the output terminal 110 in the X-axis direction.
  • the upper arm 102 of each of the multiple legs may be connected to the output terminal 110 across the P-shaped wiring portion 106 by a wire member.
  • the switching element 20 has a gate electrode 21 and a source electrode 23 as front electrodes, and a drain electrode as a back electrode.
  • the gate electrode 21 is connected to the gate external terminal 122 by the gate wiring member 22 .
  • the gate wiring member 22 is an example of a second gate wiring member that connects the gate electrode 21 of the switching element 20 and the corresponding gate external terminal 122 out of the plurality of gate external terminals 122 .
  • the source electrode 23 is connected to the auxiliary source external terminal 124 by the auxiliary source wiring member 24 .
  • the auxiliary source wiring member 24 is an example of a second auxiliary source wiring member that connects the source electrode 23 of the switching element 20 and the corresponding auxiliary source wiring member 24 among the plurality of auxiliary source external terminals 124 .
  • the source electrode 23 is also connected to the circuit board 38 by a wire member W4 and to the anode electrode 26 by a wire member W5.
  • a drain electrode of the switching element 20 is electrically connected to the circuit board 32 by solder or the like.
  • the diode element 15 is an example of a first diode element provided in parallel with the switching element 10 on the laminated substrate 150 .
  • Diode element 15 functions as a freewheeling diode for switching element 10 .
  • the diode element 15 of this example has an anode electrode 16 as a front electrode and a cathode electrode as a back electrode.
  • Anode electrode 16 is connected to circuit board 32 by wire member W2.
  • the anode electrode 16 is connected to the output terminal 110 by a wire member W3.
  • the wire member W3 of this example connects the output terminal 110 and the diode element 15 across the P-type wiring portion 106.
  • a cathode electrode of the diode element 15 is electrically connected to the circuit board 31 by solder or the like.
  • the semiconductor elements are provided to face each other in the Y-axis direction.
  • the semiconductor elements facing each other may completely overlap in the Y-axis direction.
  • both the gate electrode 11 and the gate wiring member 12 are arranged on the negative side of the upper surface of the switching element in the X-axis direction, but the present invention is not limited to this.
  • the insulating plate 151 has an arbitrary thickness in the Z-axis direction and is formed of a flat plate-shaped insulating material having an upper surface and a lower surface.
  • the main surface of the laminated substrate 150 may be the upper surface of the insulating plate 151 .
  • the insulating plate 151 may be made of a ceramic material such as alumina ( Al2O3 ), aluminum nitride (AlN) or silicon nitride ( Si3N4 ).
  • the insulating plate 151 may be made of a resin material such as epoxy, or an epoxy resin material using a ceramic material as a filler.
  • the upper arm 102 is composed of three switching elements 10U to 10W and three diode elements 15U to 15W.
  • the lower arm 104 is composed of three switching elements 20U to 20W and three diode elements 25U to 25W.
  • FIG. 4A is a circuit diagram at time T1 in FIG. 2, showing the ON state of the switching element 20 arranged on the lower arm 104.
  • the switching element 20 is turned on by the drive unit 210, the drain current Id flows through the load 200 at a constant di/dt via the inductance.
  • FIG. 5A is an enlarged view of a modification of the semiconductor assembly 160.
  • FIG. 5A is an enlarged view of a modification of the semiconductor assembly 160.
  • the auxiliary source wiring member 14 and the auxiliary source external terminal 114 are connected by a connection method different from that of the embodiment of FIG. 1B. In this example, differences from the example of FIG. 1B will be particularly described.
  • the auxiliary source wiring member 14 is physically separated from the output wiring between the drain electrode of the switching element 20 and the output terminal 110 . That is, the circuit board 33 of this example is physically separated from the circuit board 32 in the laminated board 150 . Thus, the circuit boards 32 and 33 are arranged so that the path through which the auxiliary source current Is flows does not overlap with the path through which the current flows through the output wiring. Thereby, the influence of the reverse recovery current Irr flowing through the circuit board 32 to the auxiliary source wiring member 14 can be avoided.
  • FIG. 5B is an enlarged view of a modification of the semiconductor assembly 160.
  • FIG. Semiconductor assembly 160 of this example differs from the embodiment of FIG. 5A in that circuit board 33 is physically connected to circuit board 32 . In this example, differences from the example of FIG. 5A will be particularly described.
  • FIG. 6A is an enlarged view of a modification of the semiconductor assembly 160.
  • FIG. The semiconductor assembly 160 of this example arranges the diode element 15 in a position different from that of the example of FIG. 1B.
  • the diode element 15 of this example is mounted on the P-type wiring portion 106 which is the first wiring portion. In this example, differences from the example of FIG. 1B will be particularly described.
  • FIG. 6B is an enlarged view of a modification of the semiconductor assembly 160.
  • FIG. The semiconductor assembly 160 of this example arranges the diode element 25 in a position different from that of the example of FIG. 1B. In this example, differences from the example of FIG. 1B will be particularly described.
  • the switching element 20 and the diode element 25 are provided on the lower arm 104 and are provided facing each other in the Y-axis direction.
  • the diode element 25 of this example is provided on the negative side in the Y-axis direction with respect to the switching element 20 .
  • the diode element 25 is connected to the circuit board 38 of the N-type wiring portion 108 by a wire member W5 that connects the anode electrode 26 and the circuit board 38 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Inverter Devices (AREA)
  • Dc-Dc Converters (AREA)
PCT/JP2022/041620 2021-12-27 2022-11-08 半導体モジュール Ceased WO2023127317A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2023570717A JP7601262B2 (ja) 2021-12-27 2022-11-08 半導体モジュール
DE112022001872.0T DE112022001872T5 (de) 2021-12-27 2022-11-08 Halbleitermodul
CN202280037808.XA CN117378047A (zh) 2021-12-27 2022-11-08 半导体模块
US18/511,954 US20240088796A1 (en) 2021-12-27 2023-11-16 Semiconductor module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-212199 2021-12-27
JP2021212199 2021-12-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/511,954 Continuation US20240088796A1 (en) 2021-12-27 2023-11-16 Semiconductor module

Publications (1)

Publication Number Publication Date
WO2023127317A1 true WO2023127317A1 (ja) 2023-07-06

Family

ID=86998728

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/041620 Ceased WO2023127317A1 (ja) 2021-12-27 2022-11-08 半導体モジュール

Country Status (5)

Country Link
US (1) US20240088796A1 (https=)
JP (1) JP7601262B2 (https=)
CN (1) CN117378047A (https=)
DE (1) DE112022001872T5 (https=)
WO (1) WO2023127317A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008757A (ja) * 2011-06-23 2013-01-10 Honda Motor Co Ltd 半導体装置
JP2017168582A (ja) * 2016-03-15 2017-09-21 住友電気工業株式会社 半導体モジュール
WO2017159029A1 (ja) * 2016-03-15 2017-09-21 住友電気工業株式会社 半導体モジュール
JP2020124030A (ja) * 2019-01-30 2020-08-13 株式会社 日立パワーデバイス パワー半導体モジュールおよびそれを用いた電力変換装置
JP2021158232A (ja) * 2020-03-27 2021-10-07 富士電機株式会社 半導体モジュール

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3454186B2 (ja) 1999-05-14 2003-10-06 株式会社日立製作所 電力変換装置
WO2015136603A1 (ja) 2014-03-10 2015-09-17 株式会社日立製作所 パワー半導体モジュール及びその製造検査方法
JP7198168B2 (ja) 2019-07-19 2022-12-28 株式会社 日立パワーデバイス パワー半導体モジュール

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008757A (ja) * 2011-06-23 2013-01-10 Honda Motor Co Ltd 半導体装置
JP2017168582A (ja) * 2016-03-15 2017-09-21 住友電気工業株式会社 半導体モジュール
WO2017159029A1 (ja) * 2016-03-15 2017-09-21 住友電気工業株式会社 半導体モジュール
JP2020124030A (ja) * 2019-01-30 2020-08-13 株式会社 日立パワーデバイス パワー半導体モジュールおよびそれを用いた電力変換装置
JP2021158232A (ja) * 2020-03-27 2021-10-07 富士電機株式会社 半導体モジュール

Also Published As

Publication number Publication date
CN117378047A (zh) 2024-01-09
US20240088796A1 (en) 2024-03-14
JPWO2023127317A1 (https=) 2023-07-06
JP7601262B2 (ja) 2024-12-17
DE112022001872T5 (de) 2024-01-18

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