WO2023037892A1 - 光検出装置 - Google Patents

光検出装置 Download PDF

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Publication number
WO2023037892A1
WO2023037892A1 PCT/JP2022/032095 JP2022032095W WO2023037892A1 WO 2023037892 A1 WO2023037892 A1 WO 2023037892A1 JP 2022032095 W JP2022032095 W JP 2022032095W WO 2023037892 A1 WO2023037892 A1 WO 2023037892A1
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WO
WIPO (PCT)
Prior art keywords
optical
light
unit
partition
projected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/032095
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
一寿 恩田
光宏 清野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to EP22867214.3A priority Critical patent/EP4400862A4/en
Priority to CN202280061012.8A priority patent/CN117957465A/zh
Publication of WO2023037892A1 publication Critical patent/WO2023037892A1/ja
Priority to US18/581,467 priority patent/US20240192485A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4813—Housing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition

Definitions

  • the present disclosure relates to a photodetector.
  • a photodetector that scans a projection beam toward a detection area in the external world and detects a beam reflected from the detection area with respect to the projection beam is widely known.
  • a partition plate for blocking light transmission is arranged between a light projecting part that projects a projected light beam and a light receiving part that receives a reflected beam. . This makes it possible to suppress erroneous detection due to leakage of light from the light projecting section to the light receiving section.
  • Patent Literature 1 requires space for arranging the light projecting unit and the light receiving unit with the partition plate therebetween so as to be spaced apart from each other. end up
  • An object of the present disclosure is to provide a photodetector that achieves both miniaturization and ensuring detection accuracy.
  • a photodetector that scans a projected light beam toward a detection area in the external world and detects a reflected beam from the detection area with respect to the projected light beam, an optical unit including a light projecting part for projecting a projected beam and a light receiving part for receiving a reflected beam whose footprint of the optical path overlaps with the projected beam; an accommodation unit that forms an accommodation chamber that accommodates the optical unit therein;
  • the containment unit is an optical window for transmitting the projected beam from the containment chamber to the detection region and for transmitting the reflected beam from the detection region to the containment chamber; a holding portion that surrounds and holds the optical window portion from the outer peripheral side;
  • An optic placed between the optical unit and the optical window having a lower reflectance with respect to the projected beam on the optical window side than the holding part, and a higher absorptance with respect to the projected beam on the optical window side than the holding part and a partition.
  • the footprints of the optical paths of the projected beam projected from the light projecting unit and the reflected beam received by the light receiving unit overlap.
  • the light projecting section and the light receiving section can be arranged as close as possible in the direction in which the footprints overlap. Therefore, it is possible to reduce the size of the housing unit, and thus the size of the photodetector as a whole.
  • the optical window portion that transmits the projected beam from the housing chamber to the detection area and transmits the reflected beam from the detection region to the housing chamber is surrounded by the holding portion and held from the outer peripheral side. be. Therefore, in the housing unit, the optical partition has a lower reflectance for the projected beam on the optical window side than the holding section and a higher absorptance for the projected beam on the optical window side than the holding section. Placed between the divisions.
  • direct entry into the optical unit can be restricted by blocking the noise light generated by the projection beam being reflected by the optical window portion by the optical partition portion.
  • noise light can be blocked by the optical partition so that it can be restricted from indirectly entering the optical unit via reflection or scattering by elements surrounding the optical unit in the accommodation chamber.
  • FIG. 1 is a perspective view showing a photodetector according to a first embodiment
  • FIG. 1 is a perspective view showing a photodetector according to a first embodiment
  • FIG. 1 is a front view showing a photodetector according to a first embodiment
  • FIG. FIG. 4 is a schematic diagram corresponding to the sectional view taken along line IV-IV of FIG. 3
  • FIG. 4 is a schematic diagram corresponding to the cross-sectional view taken along the line VV of FIG. 3
  • FIG. 4 is a schematic diagram corresponding to the sectional view taken along the line VI-VI of FIG. 3
  • It is a schematic diagram which shows the light projector by 1st embodiment.
  • It is a schematic diagram which shows the light receiver by 1st embodiment.
  • FIG. 4 is a perspective view showing an optical partition according to the first embodiment;
  • FIG. 4 is a perspective view showing an optical partition according to the first embodiment; It is a perspective view for demonstrating the formation method of the accommodation unit by 1st embodiment.
  • FIG. 7 is an enlarged view showing a configuration example of an accommodation unit according to the first embodiment, corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a second embodiment corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a third embodiment corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a fourth embodiment corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a fifth embodiment corresponding to FIG. 6;
  • FIG. 13 is a schematic diagram showing a configuration example of an accommodation unit according to a variation, corresponding to FIG. 12;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 6 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 6 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 13 is a schematic diagram showing a
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • FIG. 7 is a schematic diagram showing a photodetector according to a modification corresponding to FIG. 6;
  • the photodetector 10 is LiDAR (Light Detection and Ranging/Laser Imaging Detection and Ranging) for optically observing the external world of a moving object.
  • the photodetector 10 is mounted in a vehicle, such as an automobile, which is capable of at least one type of operation among manual operation, automatic operation, and remote operation as a moving body.
  • a vehicle such as an automobile
  • front, rear, up, down, left, and right directions are defined with respect to the vehicle on a horizontal plane.
  • the horizontal direction and the vertical direction indicate the parallel direction and the vertical direction, respectively, with respect to the vehicle on the horizontal plane.
  • the photodetector 10 is arranged in at least one place in the vehicle, for example, among the front part, the left and right side parts, the rear part, the upper roof, and the like. As shown in FIGS. 4 and 6, the photodetector 10 scans the projected light beam PB toward the detection area DA corresponding to the location of the vehicle outside the vehicle. The photodetector 10 detects the return light as the reflected beam RB that is returned when the projected light beam PB is reflected by the target in the detection area DA. Light in the near-infrared region, which is difficult for humans in the outside world to visually recognize, is usually selected as the projected light beam PB that becomes the reflected beam RB.
  • the photodetector 10 observes the target in the detection area DA by detecting the reflected beam RB.
  • the observation of the target is at least one of, for example, the distance from the photodetector 10 to the target, the direction in which the target exists, the reflection intensity of the reflected beam RB from the target, and the like.
  • a typical target to be observed in the photodetector 10 applied to a vehicle may be at least one of moving objects such as pedestrians, cyclists, animals other than humans, and other vehicles.
  • a typical target to be observed in the photodetector 10 applied to a vehicle is at least one of stationary objects such as guardrails, road signs, roadside structures, and fallen objects on the road. There may be.
  • a three-dimensional orthogonal coordinate system is defined by three axes, the X-axis, the Y-axis, and the Z-axis.
  • the Y-axis direction is defined along the vertical direction of the vehicle.
  • the X-axis direction and the Z-axis direction which are both orthogonal to the Y-axis direction and are orthogonal to each other, are defined along the horizontal direction of the vehicle.
  • the photodetector 10 includes a housing unit 1, an optical unit 2, a scanning unit 3, a control unit 5, and an accessory unit 6.
  • the housing unit 1 comprises a casing section 12, a holding section 14 and an optical window section 16 to form a housing chamber 11 for housing these elements 1-3, 5 and 6 therein.
  • the casing part 12 is mainly made of a base material such as metal or synthetic resin, and is formed in the shape of a bottomed cup as a whole. At least one of the exterior surface and the interior surface of the casing part 12 is provided with a light-shielding property by setting a low transmittance and a high absorptance as optical characteristics for light in the near-infrared region and the visible region.
  • the casing part 12 has a casing opening 13 that opens in one direction in the X-axis direction.
  • the casing part 12 has the casing opening 13 covered by the holding part 14 and the optical window part 16 from one side in the X-axis direction, thereby forming the housing chamber 11 together with the holding part 14 and the optical window part 16.
  • This housing chamber 11 is provided in common to the light projecting section 20 and the light receiving section 40 that constitute the optical unit 2 .
  • the holding part 14 is formed mainly of a base material such as metal or synthetic resin, and is formed in the shape of a tubular frame as a whole.
  • a light-shielding surface composed of at least one of the exterior surface and the interior surface and the inner surface of the opening in the holding portion 14 is set to have a low transmittance and a high absorptance as optical characteristics for light in the near-infrared region and the visible region. Thus, light shielding properties are provided.
  • the holding portion 14 has an assembly opening 15a and an optical opening 15b that open toward one side and the other side of the X-axis direction, respectively.
  • the outer peripheral side edge of the holding portion 14 surrounding the assembly opening 15a is assembled and fixed to the outer peripheral side edge of the casing portion 12 surrounding the casing opening 13 by screwing as shown in FIGS. .
  • the size of the optical aperture 15b in the holding portion 14 is designed to be smaller than the size of the assembly aperture 15a in the Z-axis direction. As a result, the geometric center of the optical aperture 15b is substantially aligned with the geometric center of the optical window portion 16 held by the holding portion 14 as described later. may be deviated.
  • the optical window portion 16 is formed in a substantially rectangular flat plate shape as a whole, mainly using a base material such as synthetic resin or glass.
  • the optical window portion 16 is provided with translucency by setting a high transmittance and a low absorptance as optical characteristics for light in the near-infrared region.
  • the optical window 16 has a high transmittance for light in the near-infrared region and light in the visible region, for example, by coloring the base material, forming an optical thin film, or attaching a film to the surface of the base material.
  • a low transmittance may be set for .
  • the outer peripheral edge of the optical window 16 is in contact with the inner peripheral edge of the holding section 14 surrounding the optical opening 15b over the entire circumference, for example by adhesion. etc. is fixed.
  • the interior surface on the storage chamber 11 side and the exterior surface on the detection area DA side are inclined at substantially the same angle with respect to the Y-axis direction.
  • the optical window portion 16 is surrounded from the outer peripheral side by the holding portion 14 and is held in an inclined state, thereby blocking the optical opening 15b.
  • the optical window 16 transmits the projected light beam PB from the storage chamber 11 to the detection area DA, transmits the reflected beam RB from the detection area DA to the storage chamber 11, and transmits the reflected beam RB from the detection area DA side to the storage chamber 11. It is possible to regulate the intrusion of foreign matter into.
  • the optical unit 2 includes a light projecting section 20 and a light receiving section .
  • the light projecting section 20 will be described first, and the light receiving section 40 will be described after the scanning unit 3 is described.
  • the light projecting section 20 has a light projector 22 and a light projecting lens system 26 .
  • the light projector 22 emits a laser beam in the near-infrared region that becomes the light beam PB.
  • the light projector 22 is arranged in the housing chamber 11 and held by the casing section 12 .
  • the light projector 22 is constructed by arranging a plurality of laser oscillation elements 24 in an array on a substrate.
  • Each laser oscillation element 24 is arranged in a single row along the Y-axis direction.
  • Each laser oscillating element 24 emits phase-matched coherent laser light with a resonator structure that resonates the laser light oscillated in the PN junction layer and a mirror layer structure that repeatedly reflects the laser light across the PN junction layer. emit.
  • Each laser oscillation element 24 generates pulsed laser light that becomes a part of the projected light beam PB in accordance with a control signal from the control unit 5 .
  • the light projector 22 has a light projection opening 25 defined by a pseudo-rectangular outline formed on one side of the substrate.
  • the light projection port 25 is configured as an assembly of laser oscillation apertures in each laser oscillation element 24 .
  • the aspect ratio of the light projection port 25 is set such that the long side extends along the Y-axis direction and the short side extends along the X-axis direction.
  • the laser light projected from the laser oscillation aperture of each laser oscillation element 24 is projected as a projection beam PB artificially formed into a line elongated in the Y-axis direction in the detection area DA as shown in FIGS.
  • the light is projected from the light projection port 25 .
  • the projected light beam PB may include non-light-emitting portions corresponding to the arrangement intervals of the laser oscillation elements 24 in the Y-axis direction. Even in this case, it is preferable to form a linear projected light beam PB in which the non-light-emitting portion is macroscopically eliminated by the diffraction action in the detection area DA.
  • the projection lens system 26 shown in FIGS. 5 and 6 projects the projection beam PB from the light projector 22 toward the mirror section 30 of the scanning unit 3 .
  • the projection lens system 26 is arranged in the housing chamber 11 between the projector 22 and the mirror section 30 in the Z-axis direction.
  • the projection lens system 26 exerts at least one type of optical action among, for example, condensing, collimating, and shaping.
  • the projection lens system 26 forms a projection optical axis POA along the Z-axis direction.
  • the projection lens system 26 is constructed such that at least one projection lens 27a is held by the casing section 12 via a lens barrel 27b.
  • At least one projection lens 27a is mainly made of a light-transmitting base material such as synthetic resin or glass, and is formed into a lens shape corresponding to the optical action to be exhibited.
  • the projection optical axis POA is defined as a virtual ray axis that passes through, for example, the center of curvature of the lens surface of at least one projection lens 27a.
  • the principal ray of the projected light beam PB which is to be emitted from the center of the light projection port 25 described above, receives an optical action from the projection lens system 26, and is thus projected along the projection optical axis POA as shown in FIG. light is guided by
  • the scanning unit 3 includes a mirror section 30 and a motor section 35.
  • the mirror unit 30 scans the projection beam PB projected from the projection lens system 26 of the light projection unit 20 toward the detection area DA, and transmits the reflected beam RB from the detection area DA with respect to the projection beam PB to the light receiving unit. 40 is reflected toward the receiving lens system 42 .
  • the mirror section 30 is arranged to be shifted to one side in the Z-axis direction from the light projecting lens system 26 and the light receiving lens system 42 that constitute the optical unit 2. At the same time, the mirror section 30 is displaced to one side in the X-axis direction from the optical window section 16 in the housing chamber 11 .
  • the mirror part 30 is mainly made of a base material such as synthetic resin or glass, and is formed in a flat plate shape as a whole.
  • a reflective film of aluminum, silver, gold, or the like is vapor-deposited on one side of the base material, so that the reflective surface 33 is formed in a mirror-like shape as shown in FIGS.
  • the mirror section 30 has a rotating shaft 31 that is rotatably arranged within the storage chamber 11 .
  • the mirror unit 30 rotates around the rotation center line of a rotation shaft 31 extending along the Y-axis direction, thereby adjusting the normal direction of the reflecting surface 33 around the rotation center line.
  • the mirror section 30 is capable of rocking motion within a limited drive range DR, for example, by a mechanical or electrical stopper or the like. Thereby, the projected light beam PB reflected by the mirror section 30 is restricted so as not to deviate from the optical window section 16 .
  • the mirror section 30 is commonly provided for the light projecting section 20 and the light receiving section 40. As shown in FIG. That is, the mirror section 30 is provided in common for the projected light beam PB and the reflected beam RB. As a result, the mirror section 30 has a light projecting reflecting section 34a used for projecting the projected light beam PB and a light receiving reflecting section 34b used for receiving the reflected beam RB, which are shifted in the Y-axis direction on the reflecting surface 33. are doing.
  • the projection beam PB is transmitted through the optical window portion 16 by being reflected by the projection reflection portion 34a whose normal direction is adjusted according to the rotational driving of the mirror portion 30. to temporally and spatially scan the detection area DA. Scanning of the projection beam PB over the detection area DA is substantially limited to scanning in the horizontal direction in accordance with the rotational driving of the mirror section 30 . Accordingly, the drive range DR of the mirror section 30 defines the horizontal angle of view in the detection area DA.
  • the projected light beam PB becomes a reflected beam RB returning to the photodetector 10 by being reflected by a target existing in the detection area DA.
  • the reflected beam RB is transmitted through the optical window portion 16 again and enters the light receiving/reflecting portion 34 b of the mirror portion 30 .
  • the velocities of the projected light beam PB and the reflected beam RB are sufficiently large with respect to the rotational motion velocity of the mirror section 30 .
  • the reflected beam RB is reflected by the light-receiving reflecting portion 34b of the mirror portion 30, which can be assumed to have substantially the same rotation angle as the projected beam PB.
  • the light is guided to the lens system 42 .
  • the footprint PF of the optical path formed by the projected light beam PB and the footprint RF of the optical path formed by the reflected beam RB form an overlapping area SA partially overlapping in the Y-axis direction. is formed at a rotation angle of
  • the footprint PF of the projected beam PB and the footprint RF of the reflected beam RB are defined by the surfaces on the side of the housing chamber 11 and the side of the detection area DA on which the projected beam PB and the reflected beam RB respectively enter in the optical window 16. It is designed to be superimposed on at least one of
  • the footprints PF and RF mean spatial regions in which the optical paths that are the trajectories of the beams PB and RB that contribute to detection can be formed according to the rotation of the mirror section 30 .
  • the motor section 35 is arranged around the mirror section 30 inside the storage chamber 11 .
  • the motor unit 35 is, for example, a voice coil motor, a brushed DC motor, a stepping motor, or the like.
  • the output shaft of the motor section 35 is coupled to the rotating shaft 31 of the mirror section 30 directly or indirectly via a drive mechanism such as a speed reducer.
  • the motor portion 35 is held by the casing portion 12 so as to be able to rotate the rotary shaft 31 together with the output shaft.
  • the motor section 35 rotationally drives the mirror section 30 within the driving range DR by following the control signal from the control unit 5 .
  • the light receiving section 40 that configures the optical unit 2 together with the light projecting section 20 described above has a light receiving lens system 42 and a light receiver 45 .
  • the light receiving lens system 42 collects the reflected beam RB reflected by the mirror section 30 toward the light receiver 45 .
  • the light-receiving lens system 42 is arranged in the housing chamber 11 between the mirror section 30 and the light receiver 45 in the Z-axis direction.
  • the light receiving lens system 42 is positioned so as to be shifted downward from the light projecting lens system 26 in the Y-axis direction.
  • the light receiving lens system 42 exerts an optical action so as to image the reflected beam RB on the light receiver 45 .
  • the light receiving lens system 42 forms a light receiving optical axis ROA along the Z-axis direction.
  • the light-receiving lens system 42 is constructed such that at least one light-receiving lens 43a is held by the casing portion 12 via a barrel 43b.
  • At least one light-receiving lens 43a is mainly made of a light-transmitting base material such as synthetic resin or glass, and is formed into a lens shape corresponding to the optical action to be exhibited.
  • the light-receiving optical axis ROA is defined as a virtual ray axis that passes through the center of curvature of the lens surface of at least one light-receiving lens 43a, for example.
  • the light-receiving optical axis ROA of the light-receiving lens system 42 is shifted in the Y-axis direction with respect to the light-projecting optical axis POA of the light-projecting lens system 26 .
  • the maximum diameter of the lens barrel 43b that forms the outermost shell of the light receiving lens system 42 is the X axis that is closer to the optical window 16 than the maximum diameter of the lens barrel 43b that forms the outermost shell of the light projecting lens system 26. It overhangs on both sides of the direction.
  • the principal ray of the reflected beam RB reflected from the light-receiving reflecting portion 34b of the mirror portion 30 receives an optical action from the light-receiving lens system 42 at an arbitrary rotation angle within the driving range DR, so that as shown in FIG.
  • Light is guided along the light receiving optical axis ROA. That is, the light-receiving optical axis ROA along which the reflected beam RB extends becomes the optical axis along which the reflected beam RB extends over the driving range DR of the mirror section 30 that is rotationally driven.
  • the light receiver 45 shown in FIGS. 5 and 6 outputs a detection signal by receiving the reflected beam RB imaged by the light receiving lens system 42 .
  • the light receiver 45 is arranged in the housing chamber 11 and held by the casing section 12 .
  • the light receiver 45 is constructed by arranging a plurality of light receiving pixels 46 in an array on the substrate.
  • Each light receiving pixel 46 is arranged in a single row along the Y-axis direction.
  • Each light-receiving pixel 46 has a plurality of light-receiving elements 47 . That is, since a plurality of light-receiving elements 47 exist for each light-receiving pixel 46, the output value differs according to the number of responses of the light-receiving elements 47.
  • FIG. therefore, by bundling a plurality of light-receiving elements 47 for each light-receiving pixel 46 as an output, it is possible to increase the dynamic range.
  • the light-receiving element 47 of each light-receiving pixel 46 is mainly formed of a photodiode such as a single photon avalanche diode (SPAD).
  • the light receiving element 47 of each light receiving pixel 46 may be integrally constructed by stacking a microlens array in front of the photodiode array.
  • some of the reference numerals attached to the light receiving element 47 are omitted.
  • the light receiver 45 has a light receiving surface 48 with a rectangular outline on one side of the substrate.
  • the light-receiving surface 48 is configured as a collection of incident surfaces of the respective light-receiving pixels 46 .
  • Each light-receiving pixel 46 receives and detects the reflected beam RB incident on the incident surface constituting the light-receiving surface 48 with the respective light-receiving element 47 .
  • the reflected beam RB becomes a linearly spread beam corresponding to the projected light beam PB which is simulated linearly in the detection area DA. Therefore, the aspect ratio of the light-receiving surface 48 is set such that the long side is along the Y-axis direction and the short side is along the X-axis direction or its tilt direction.
  • the photodetector 45 has a decoder 49 integrally.
  • the decoder 49 sequentially reads the electrical pulses generated by the light receiving pixels 46 in response to detection of the reflected beam RB by sampling processing.
  • the decoder 49 outputs the sequentially read electrical pulses to the control unit 5 as detection signals.
  • the control unit 5 shown in FIG. 5 is arranged at least one of the periphery of the optical unit 2 and the periphery of the scanning unit 3 in the housing chamber 11 .
  • the control unit 5 controls observation of targets in the detection area DA.
  • the control unit 5 is mainly composed of at least one computer including a processor and a memory.
  • the control unit 5 is electrically connected to the light projector 22 , the motor section 35 and the light receiver 45 .
  • the control unit 5 outputs a control signal to the projector 22 so that the projection beam PB is generated by the oscillation of each laser oscillation element 24 at the light emission timing.
  • the control unit 5 outputs a control signal to the motor section 35 so as to control scanning and reflection by the mirror section 30 in synchronization with the emission timing of the projection beam PB.
  • the control unit 5 performs arithmetic processing on the electric pulse output as a detection signal from the decoder 49 of the light receiver 45 in accordance with the light emission timing of the light projector 22 and the scanning and reflection by the mirror section 30, thereby detecting the object in the detection area DA. Generate target observation data.
  • the accessory units 6 shown in FIGS. 4 to 6 are arranged at a plurality of locations, which are at least one of the periphery of the optical unit 2 and the periphery of the scanning unit 3 in the housing chamber 11 .
  • the accessory unit 6 includes, for example, cables and connectors for electrically connecting the electrical elements 5, 22, 35, 45 to the outside or to each other, holders for holding the cables in the casing section 12, and the electrical elements 5, 22, 35 , 45, the necessary types of heat sinks, etc. are included.
  • the housing unit 1 of the photodetector 10 includes an optical partition 18 shown in FIGS.
  • the optical partition 18 is mainly made of a base material such as metal or synthetic resin, and is formed in the shape of a stepped plate frame having an optical hole 19 as a whole.
  • the outer peripheral side edge of the optical partition 18 is formed to be slightly larger than the outer peripheral side edge of the optical window 16 .
  • the outer peripheral side edge of the optical partition 18 is assembled and fixed to the fixed portion 120 in the casing 12 by screwing from the side of the casing opening 13 in the X-axis direction. It is held in the casing part 12 concerned.
  • the outer peripheral side edge of the optical partition 18 may be supported by the holding portion 14 by being assembled and fixed to the holding portion 14 from the side of the casing opening 13 in the X-axis direction.
  • the optical partitioning portion 18 is fitted to the holding portion 14 assembled and fixed to the casing portion 12 from the casing opening 13 side, as shown in FIGS. It is held and positioned within the housing chamber 11 .
  • the optical partition 18 is arranged so that the footprints PF and RF of the projected light beam PB and the reflected beam RB are surrounded by the optical hole 19 from the outer peripheral side.
  • the optical partition 18 surrounds the superimposition area SA where the footprints PF and RF of the projected light beam PB and the reflected beam RB are superimposed with the optical hole 19 from the outer peripheral side.
  • the optical partitioning portion 18 partitions the portions 20 and 40 of the optical unit 2 and the optical window portion 16 in the X-axis direction in the housing chamber 11 except for the inner portion of the optical hole 19. are placed. Furthermore, in the X-axis direction in the storage chamber 11, between the optical window portion 16 and the attached unit 6 at each location including the locations on the optical window portion 16 side and the opposite side with respect to the optical unit 2, It is partitioned by the optical partitioning portion 18 except for the inner portion of the optical hole 19 .
  • the optical partition 18 forms a low reflection light shielding surface 180 at least by the plate surface on the optical window 16 side.
  • the low-reflection light-shielding surface 180 is set to have a lower reflectance than the above-described light-shielding surface of the holding part 14 and a higher absorptance than the light-shielding surface. of light-blocking properties are provided.
  • the low-reflection light-shielding surface 180 has a lower reflectance with respect to the projected light beam PB and the reflected beam RB and a higher absorptance with respect to the beams PB and RB than the light-shielding surface of the holding portion 14 .
  • the reflectance on the low-reflection light shielding surface 180 may be defined as a regular reflectance or as a total light reflectance.
  • the transmittance of the low-reflection light-shielding surface 180 is set, for example, to be approximately the same as that of the light-shielding surface of the holder 14, or less than or equal to that of the light-shielding surface.
  • the optical characteristics of the low-reflection light-shielding surface 180 are preferably set by at least one of anodizing such as anodizing, surface roughening such as blasting, spray painting, and plating.
  • anodizing such as anodizing
  • surface roughening such as blasting, spray painting, and plating.
  • the low-reflection light-shielding surface 180 formed at least on the plate surface on the optical window portion 16 side of the optical partition portion 18 means the plate surface on the optical window portion 16 side of the optical partition portion 18 and on the opposite side thereof. Of course, it may be formed.
  • the optical partition section 18 has a separation structure 182 in which the low-reflection light shielding surface 180 is separated from the optical window section 16 in the X-axis direction toward the optical unit 2 side. They are provided in both of the two locations sandwiching the hole 19 and in one of the two locations sandwiching the optical hole 19 in the Z-axis direction.
  • one of the two separation structures 182 sandwiching the optical hole 19 in the Y-axis direction and one of the two separation structures 182 sandwiching the optical hole 19 in the Z-axis direction are low reflection light shielding surfaces.
  • 180 constitute a parallel surface structure 181 .
  • Each parallel plane structure 181 is inclined with respect to the Y-axis direction, which is the direction of the rotation axis 31 in the mirror section 30 .
  • each parallel surface structure 181 is inclined toward the optical window portion 16 side in the X-axis direction from the lower side, which is the light receiving section 40 side, in the Y-axis direction toward the upper side, which is the light projecting section 20 side in the Y-axis direction.
  • the optical window portion 16 has an inclined surface structure 160 that is inclined toward the detection area DA side in the X-axis direction from the lower side to the upper side in the Y-axis direction on the interior surface on the storage chamber 11 side described above. ing. Therefore, the parallel surface structures 181 on the optical window portion 16 side of the optical partitioning portion 18 are arranged in parallel as shown in FIGS. ing.
  • the optical partition 18 has a separation structure 183 in which the low-reflection light-shielding surface 180 is separated from the optical window 16 in the X-axis direction toward the light projection section 20 of the optical unit 2. It is provided closer to the optical window portion 16 in the X-axis direction than the light projecting portion 20 .
  • the optical partitioning portion 18 has a separation structure 184 in which the low-reflection light shielding surface 180 is separated from the optical window portion 16 in the X-axis direction toward the light receiving portion 40 side of the optical unit 2. 16 side.
  • a spacing structure 184 between the light receiving section 40 and the optical window section 16 is arched toward the optical window section 16 side in the X-axis direction from a spacing structure 183 between the light projecting section 20 and the optical window section 16.
  • the deflection structure 185 is as close as possible to the optical window 16 than each of the side-by-side structures 181 that are the spacing structures 182 . This ensures the minimum necessary distance from the optical window part 16 while matching the light receiving lens system 42 formed with a large diameter projecting toward the optical window part 16 from the light projecting lens system 26 as described above. This is for forming the low-reflection light-shielding surface 180 of the spacing structure 184 in the range.
  • the light projecting section 20 and the light receiving section 40 are brought as close as possible in the Y-axis direction where the footprints PF and RF are superimposed. can be placed Therefore, it is possible to reduce the physical size of the housing unit 1, and thus the physical size of the photodetector 10 as a whole.
  • the optical window portion 16 that transmits the projected light beam PB from the storage chamber 11 to the detection area DA and transmits the reflected beam RB from the detection area DA to the storage chamber 11 is held. It is surrounded by the portion 14 and held from the outer peripheral side. Therefore, in the accommodation unit 1, the optical partitioning portion has a lower reflectance for the projected light beam PB on the optical window portion 16 side than the holding portion 14, and a higher absorptance for the projected light beam PB on the optical window portion 16 side than the holding portion 14. 18 is arranged between the optical unit 2 and the optical window 16 as a partition.
  • noise light generated by reflection of the projected light beam PB by the optical window portion 16 is blocked by the optical partition portion 18, thereby preventing direct penetration into the optical unit 2. can be restricted.
  • the noise light is blocked by the optical partition section 18 , so that the noise light can be restricted from indirectly entering the optical unit 2 through reflection or scattering by the attached unit 6 around the optical unit 2 in the storage chamber 11 .
  • the first embodiment it is possible to ensure detection accuracy by suppressing erroneous detection caused by the intrusion of noise light while simultaneously achieving the miniaturization described above.
  • noise is reduced in the detection signal from the light receiving unit 40 by restricting entry of noise light, and the SN ratio is increased, so the SN ratio is high especially for the short distance position in the detection area DA. It is also possible to ensure detection accuracy.
  • the optical partitioning section 18 of the first embodiment is arranged to surround the footprints PF and RF of the projected light beam PB and the reflected beam RB from the outer peripheral side. According to this, by forming the inner peripheral side edge of the optical partition 18 as close as possible to the footprints PF and RF of the projected light beam PB and the reflected beam RB, the penetration rate of noise light is reduced. can do. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the spacing structures 182, 183, and 184 in the optical partition section 18 of the first embodiment are spaced apart from the optical window section 16 toward the optical unit 2 side. According to this, even if the noise light becomes stray light because it is also reflected by the optical partitioning portion 18, the location of the reflection on the optical partitioning portion 18 is the footprint PF, RF of the projected beam PB and the reflected beam RB. intrusion into the optical unit 2 can be limited. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the light-receiving lens system 42 that guides the reflected beam RB in the light-receiving section 40 of the first embodiment extends closer to the optical window section 16 than the light-projecting lens system 26 that guides the light-projecting beam PB in the light-projecting section 20 . It is formed in a large diameter that comes out. Therefore, the optical partitioning portion 18 of the first embodiment has a deviation structure 185 between the light receiving lens system 42 and the optical window portion 16 side, rather than between the optical partitioning portion 18 and the light projecting lens system 26 . According to this, the deviation structure 185 of the optical partition 18 can limit the entry of noise light into the light-receiving lens system 42 with a wide angle of view, in which the condensing rate can be increased by increasing the diameter. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the scanning unit 3 accommodated in the accommodation chamber 11 scans the light projecting beam PB from the light projecting unit 20 toward the detection area DA, and the reflected beam RB from the detection area DA to the light receiving unit 40. reflect towards.
  • the indirect entry of the noise light into the scanning unit 3 after being reflected or scattered by the attached unit 6 around the optical unit 2 is also restricted. can be Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the inclined surface structure 160 on the housing chamber 11 side of the optical window section 16 of the first embodiment is inclined with respect to the Y-axis direction, which is the rotation axis direction of the mirror section 30 that is rotationally driven in the scanning unit 3 . According to this, it is possible to reduce the fact that the projected light beam PB reflected by the inclined surface structure 160 on the storage chamber 11 side becomes noise light entering the optical unit 2 and the scanning unit 3 itself. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the parallel surface structures 181 in the optical partitioning section 18 of the first embodiment are arranged in parallel along the inclined surface structure 160 . According to this, in the X-axis direction, which is the parallel facing direction of the parallel surface structure 181 of the optical partitioning portion 18 and the inclined surface structure 160 of the optical window portion 16, the enlargement of the housing unit 1 is minimized. can be suppressed. Therefore, it is possible to promote miniaturization of the photodetector 10 as a whole.
  • the optical partition 18 extends from the side of the opening 13 with respect to the casing 12 that covers the casing opening 13 with the optical window 16 and the holding portion 14 to define the storage chamber 11. Assembled and fixed. According to this, even in the compact storage unit 1, the optical partition 18 can be easily and accurately positioned by assembly and fixation in the X-axis direction, which is one specific direction. Therefore, it is possible to appropriately construct a structure for restricting entry of noise light, and to exhibit the effect of suppressing erroneous detection and, by extension, the effect of securing detection accuracy as desired.
  • the second embodiment is a modification of the first embodiment.
  • the inner peripheral side edge 2186 forming the optical hole 19 of the optical partitioning section 2018 is the outer peripheral side edge of the optical window section 16 and the inner peripheral side of the holding section 14. It is in contact with both edges.
  • the tip surface and the outer peripheral surface of the inner peripheral side edge portion 2186 protruding in the shape of a cylindrical wall toward the optical window portion 16 are respectively the inner surface of the optical window portion 16 and the inner peripheral surface of the holding portion 14.
  • the inner periphery side edge portion 2186 of the optical partition portion 2018 may be adhesively fixed to at least one of the contact portions with the optical window portion 16 and the holding portion 14 .
  • the inner peripheral surface of the inner peripheral side edge 2186 of the optical partition 2018 has the optical characteristics of the low-reflection light-shielding surface 180 as a part of the low-reflection light-shielding surface 180 .
  • the optical partitioning portion 2018 of the second embodiment contacts both the outer peripheral side edge portion of the optical window portion 16 and the inner peripheral side edge portion of the holding portion 14 . According to this, even noise light generated by reflection of the projected light beam PB on the outer peripheral side edge of the optical window portion 16 held by the inner peripheral side edge portion of the holding portion 14 does not enter the optical unit 2 . can be restricted. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the third embodiment is a modification of the first embodiment.
  • the window-side optical partition 18 as the optical partition 18 arranged to partition between the optical unit 2 and the optical window 16, and an additional scanning-side optical partition 3018 is provided.
  • the scanning-side optical partition 3018 is formed in a flat plate shape as a whole, mainly using a base material such as metal or synthetic resin.
  • the scanning-side optical partitioning portion 3018 is formed either integrally with or separately from the window-side optical partitioning portion 18 .
  • the scanning side optical partitioning section 3018 is directly or indirectly held by the casing section 12 in both the integrally formed and separate formed configurations.
  • the scanning-side optical partitioning section 3018 is arranged on the opposite side of the scanning unit 3 in the Z-axis direction from the sections 20 and 40 constituting the optical unit 2 .
  • the Z-axis direction in which the scanning unit 3 is sandwiched between the scanning-side optical partitioning portion 3018 and the respective portions 20 and 40 of the optical unit 2 is different from the Y-axis direction, which is the rotation axis direction of the mirror portion 30 in the scanning unit 3. , are designed in orthogonal directions.
  • the scanning unit 3 is partitioned from the attached unit 6 on the opposite side of the scanning unit 3 from the optical unit 2 by the scanning side optical partition 3018 . ing.
  • the scanning-side optical partition 3018 forms a low-reflection light-shielding surface 3180 with at least the plate surface on the scanning unit 3 side.
  • the low-reflection light-shielding surface 3180 is set with a reflectance lower than that of the light-shielding surface of the holding portion 14 and an absorptivity higher than that of the light-shielding surface, thereby achieving a low-reflection type light. Provides opacity.
  • the low-reflection light-shielding surface 3180 has a lower reflectance with respect to the projected beam PB and the reflected beam RB and a higher absorptance with respect to the beams PB and RB than the light-shielding surface of the holding portion 14 .
  • the optical characteristics of the low-reflection light-shielding surface 3180 are preferably set by a process similar to that for the low-reflection light-shielding surface 180 of the window-side optical partition 18 .
  • the definition of the reflectance and the setting of the transmittance for the low-reflection light-shielding surface 3180 are the same as those for the low-reflection light-shielding surface 180 .
  • the accommodation unit 3001 of the third embodiment includes the window-side optical partition 18 arranged between the optical unit 2 and the optical window 16, and the optical unit 2 arranged on the side opposite to the optical unit 2 with the scanning unit 3 interposed therebetween. It further includes a scanning-side optical partition 3018 .
  • the scanning-side optical partitioning portion 3018 the reflectance of the projected beam PB and the reflected beam RB on the scanning unit 3 side is lower than that of the holding portion 14, and the absorption ratio of the beams PB and RB on the scanning unit 3 side is lower than that of the holding portion 14. higher than 14.
  • the projected light beam PB and the reflected beam RB are reflected by the scanning unit 3
  • even noise light leaking out of the optical paths of the beams PB and RB can It can be blocked by an optical partition 3018 .
  • the noise light leaking out of the optical path from the scanning unit 3 can be restricted from indirectly entering the optical unit 2 after being reflected or scattered by the attachment unit 6 around the scanning unit 3 in the housing chamber 11 . Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the scanning-side optical partitioning section 3018 of the third embodiment separates the scanning unit 3 from the optical unit 2 in the Z-axis direction perpendicular to the Y-axis direction, which is the rotation axis direction of the mirror section 30 that is rotationally driven. placed in between. According to this, the noise light leaking from the scanning unit 3 to the outside of the optical path can be effectively blocked by the scanning-side optical partitioning portion 3018 to limit the indirect entry into the optical unit 2 . Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the fourth embodiment is a modification of the third embodiment.
  • the light-projecting side optical partitioning portion 4018a and the light-receiving side optical partitioning portion 4018b are arranged on the opposite side of the scanning side optical partitioning portion 3018 across the scanning unit 3 in the Z-axis direction. is added.
  • the projection-side optical partition 4018a is formed mainly of a base material such as metal or synthetic resin, and is formed in the shape of an annular flat plate as a whole.
  • the projection-side optical partitioning portion 4018 a is formed either integrally with or separately from the window-side optical partitioning portion 18 .
  • the light projecting side optical partition 4018a is directly or indirectly held by the casing 12 in both the integrally formed and the separately formed configurations.
  • the projection-side optical partition 4018a is arranged so as to surround the projection lens system 26 of the projection section 20 over the entire circumference from the outer peripheral side.
  • the projection-side optical partition 4018a forms a low-reflection light-shielding surface 4180a with at least the plate surface on the scanning unit 3 side.
  • the low-reflection light-shielding surface 4180a is set with a reflectance lower than that of the light-shielding surface of the holding part 14 and an absorptivity higher than that of the light-shielding surface, thereby achieving a low-reflection type light. Provides opacity.
  • the low-reflection light-shielding surface 4180a has a lower reflectance with respect to the projected beam PB and the reflected beam RB and a higher absorptivity with respect to the beams PB and RB than the light-shielding surface of the holding portion 14 .
  • the optical characteristics of the low-reflection light-shielding surface 4180a are preferably set by the same processing as for the low-reflection light-shielding surface 180 of the window-side optical partition 18 .
  • the definition of the reflectance and the setting of the transmittance for the low reflection light shielding surface 4180 a are the same as those for the low reflection light shielding surface 180 .
  • the light-receiving-side optical partitioning portion 4018b is mainly made of a base material such as metal or synthetic resin, and is formed in the shape of an annular flat plate as a whole.
  • the light-receiving-side optical partitioning portion 4018b is configured by combining either integrally formed with or separately from the window-side optical partitioning portion 18 and either integrally or separately formed with the light-projecting-side optical partitioning portion 4018a. It is
  • the light-receiving side optical partitioning portion 4018b is directly or indirectly held by the casing portion 12 in any combination configuration of integral formation and separate formation.
  • the light-receiving side optical partition 4018b is arranged so as to surround the light-receiving lens system 42 of the light-receiving section 40 from the outer peripheral side over the entire circumference.
  • the light-receiving side optical partition 4018b forms a low-reflection light-shielding surface 4180b with at least the plate surface on the scanning unit 3 side.
  • the low-reflection light-shielding surface 4180b is set with a reflectance lower than that of the light-shielding surface of the holding part 14 and an absorptivity higher than that of the light-shielding surface. Provides opacity.
  • the low-reflection light-shielding surface 4180b has a lower reflectance with respect to the projected beam PB and the reflected beam RB and a higher absorptance with respect to the beams PB and RB than the light-shielding surface of the holding portion .
  • the optical characteristics of the low-reflection light-shielding surface 4180b are preferably set by the same processing as for the low-reflection light-shielding surface 180 of the window-side optical partition 18 .
  • the definition of the reflectance and the setting of the transmittance for the low-reflection light-shielding surface 4180b are the same as those for the low-reflection light-shielding surface 180.
  • the accommodation unit 4001 of the fourth embodiment includes the window-side optical partition 18 arranged between the optical unit 2 and the optical window 16, and the scanning unit 3 arranged on the side opposite to the optical unit 2 with the scanning unit 3 interposed therebetween.
  • a projection side optical partitioning portion 4018a arranged to surround the light projecting portion 20 from the outer peripheral side is further included.
  • the reflectance for the projection beam PB and the reflected beam RB is lower than that of the holding portion 14 on the scanning unit 3 side, and the absorption ratios for the beams PB and RB are held on the scanning unit 3 side. It is higher than the part 14.
  • the light-receiving portion 40 in addition to the window-side optical partitioning portion 18, the scanning-side optical partitioning portion 3018, and the light-projecting-side optical partitioning portion 4018a as described above, the light-receiving portion 40 is surrounded from the outer peripheral side. It further includes a light-receiving side optical partition 4018b.
  • the reflectance with respect to the projected beam PB and the reflected beam RB on the scanning unit 3 side is lower than that of the holding portion 14, and the absorptivity with respect to the beams PB and RB is lower than that of the holding portion 14 on the scanning unit 3 side. higher than 14.
  • the projected beam PB and the reflected beam RB are reflected by the scanning unit 3, even noise light leaking out of the optical paths of the beams PB and RB can be projected. It can be shielded by each of the side optical partition 4018a and the light receiving side optical partition 4018b. As a result, the noise light leaked out of the optical path from the scanning unit 3 indirectly enters the light projecting unit 20 and the light receiving unit 40 after being reflected or scattered by the attached unit 6 around the scanning unit 3 in the housing chamber 11. can be restricted. Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the fifth embodiment is a modification of the fourth embodiment.
  • the storage unit 5001 of the fifth embodiment shown in FIG. 5018 has been added.
  • the scanning-side optical partition 5018 is formed in a flat plate shape as a whole, mainly using a base material such as metal or synthetic resin.
  • the scanning side optical partitioning portion 5018 is formed either integrally or separately from the scanning side optical partitioning portion 3018, integrally or separately from the light projecting side optical partitioning portion 4018a, and a light receiving side optical partitioning portion.
  • the partition part 4018b is configured by a combination of integral formation and separate formation.
  • the scanning side optical partition 5018 is directly or indirectly held by the casing section 12 in any combination of integrally formed and separately formed configurations.
  • the scanning-side optical partitioning section 5018 is arranged on the side opposite to the optical window section 16 with the scanning unit 3 interposed therebetween in the X-axis direction.
  • the X-axis direction in which the scanning unit 3 is sandwiched between the scanning-side optical partitioning portion 5018 and the optical window portion 16 is a direction orthogonal to the Y-axis direction, which is the rotation axis direction of the mirror portion 30 in the scanning unit 3. is designed to Furthermore, in the X-axis direction in the housing chamber 11, the scanning unit 3 is separated from the attached unit 6 on the opposite side of the scanning unit 3 from the optical window 16 by the scanning side optical partition 5018. It is
  • the scanning-side optical partitioning portion 5018 forms a low-reflection light-shielding surface 5180 with at least the plate surface on the scanning unit 3 side and the optical window portion 16 side.
  • the low-reflection light-shielding surface 5180 is set with a reflectance lower than that of the light-shielding surface of the holding portion 14 and an absorptivity higher than that of the light-shielding surface, thereby achieving a low-reflection type light. Provides opacity.
  • the low-reflection light-shielding surface 5180 has a lower reflectance with respect to the projected beam PB and the reflected beam RB and a higher absorptance with respect to the beams PB and RB than the light-shielding surface of the holding portion 14 .
  • the optical characteristics of the low-reflection light-shielding surface 5180 are preferably set by a process similar to that of the low-reflection light-shielding surface 180 of the window-side optical partition 18 .
  • the definition of the reflectance and the setting of the transmittance for the low-reflection light-shielding surface 5180 are the same as those for the low-reflection light-shielding surface 180 .
  • the accommodation unit 5001 of the fifth embodiment includes the window side optical partition 18 arranged between the optical unit 2 and the optical window 16, and the scanning side optical partition 18 arranged on the opposite side of the optical unit 2 with the scanning unit 3 interposed therebetween.
  • it further includes a scanning side optical partitioning portion 5018 arranged on the side opposite to the optical window portion 16 with the scanning unit 3 interposed therebetween.
  • the scanning-side optical partitioning portion 5018 the reflectance of the projected beam PB and the reflected beam RB on the scanning unit 3 side is lower than that of the holding portion 14, and the absorptance of the beams PB and RB is lower than that of the holding portion 14 on the scanning unit 3 side. higher than 14.
  • the projected light beam PB and the reflected beam RB are reflected by the scanning unit 3
  • even noise light leaking out of the optical paths of the beams PB and RB can It can be blocked by an optical partition 5018 .
  • the noise light leaking out of the optical path from the scanning unit 3 can be restricted from indirectly entering the optical unit 2 after being reflected or scattered by the attachment unit 6 around the scanning unit 3 in the housing chamber 11 . Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the scanning-side optical partitioning portion 5018 of the fifth embodiment separates the scanning unit 3 from the optical window portion 16 in the X-axis direction perpendicular to the Y-axis direction, which is the rotational axis direction of the mirror portion 30 that is rotationally driven. placed in between. According to this, the noise light leaking from the scanning unit 3 to the outside of the optical path can be effectively blocked by the scanning-side optical partitioning portion 5018 to limit the indirect entry into the optical unit 2 . Therefore, it is possible to enhance the effect of suppressing erroneous detection caused by the intrusion of noise light, and realize highly accurate detection.
  • the moving body on which the photodetector 10 is mounted may be, for example, an autonomous vehicle capable of remote operation.
  • the laser oscillation elements 24 may be arranged so that a plurality of element rows along the Y-axis direction are arranged in the X-axis direction.
  • the light-receiving pixels 46 may be arranged such that a plurality of pixel rows along the Y-axis direction are arranged in the X-axis direction or its tilt direction.
  • the laser oscillation elements 24 may be arranged in a single row along the X-axis direction.
  • the light-receiving pixels 46 may be arranged in a single row along the X-axis direction or its tilt direction.
  • the optical partitions 18, 2018, 3018, 4018a, 4018b, 5018 are integrally formed with any one of the optical window 16, the holder 14, and the casing 12. good too.
  • the low-reflection light-shielding surfaces 180, 3180, 4180a, 4180b, and 5180 are preferably formed on the constituent parts of the optical partition 18.
  • a low-reflection light-shielding surface 180 may be formed across the interior surface of the .
  • the light shielding surface especially the exterior surface and the opening inner surface in the figure
  • a low-reflection light-shielding surface 180 whose optical characteristics are set to have a low reflectance and high absorptance is preferably formed from the surface of the low-reflection treatment film 180a.
  • the interior surface of the outer peripheral side edge of the optical window portion 16 on the side of the housing chamber 11 is located inside the holding portion 14 surrounding the optical opening 15b. It may be fixed to the exterior surface of the plate frame-shaped wall portion including the peripheral side edge portion on the side of the detection area DA by, for example, adhesion, so as to be in contact with the entire circumference.
  • FIGS. 18 and 19 representatively showing modified examples of the first and second embodiments, respectively, the geometric center of the optical aperture 15b and the geometric center of the optical window portion 16 are deviated in the Z-axis direction.
  • the exterior surface on the detection area DA side of the outer peripheral side edge of the optical window portion 16 is a plate frame including the inner peripheral side edge of the holding portion 14. It may be fixed to the interior surface of the storage chamber 11 side of the shaped wall portion by, for example, adhesion in a state of being in contact with the entire circumference.
  • the window-side optical partition 18 may be provided with an inner peripheral side edge 2186 according to the second embodiment or its modification.
  • the scanning-side optical partition 3018 may not be provided as shown in FIG. In this case, both the light-projecting side optical partitioning portion 4018a and the light-receiving side optical partitioning portion 4018b may be provided as shown in FIG. may be provided. In modifications of the fourth and fifth embodiments, only one of the light-projecting side optical partitioning portion 4018a and the light-receiving side optical partitioning portion 4018b may be provided.
  • the scanning side optical partitioning portion 5018 is replaced by the scanning side optical partitioning portion 3018 by not providing the light emitting side optical partitioning portion 4018a and the light receiving side optical partitioning portion 4018b. It may be integrally formed or separately formed extending from. In the modification of the fifth embodiment, the scanning side optical partitioning portion 3018 is not provided as shown in FIG. It may be integrally formed or separately formed extending from. In a further modified example in which these scanning side optical partitioning portions 5018 are formed by extension, only one of the light projecting side optical partitioning portion 4018a and the light receiving side optical partitioning portion 4018b may be provided.

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