WO2023014897A1 - Descending etching resistance in advanced substrate patterning - Google Patents

Descending etching resistance in advanced substrate patterning Download PDF

Info

Publication number
WO2023014897A1
WO2023014897A1 PCT/US2022/039443 US2022039443W WO2023014897A1 WO 2023014897 A1 WO2023014897 A1 WO 2023014897A1 US 2022039443 W US2022039443 W US 2022039443W WO 2023014897 A1 WO2023014897 A1 WO 2023014897A1
Authority
WO
WIPO (PCT)
Prior art keywords
encapsulation layer
disposed over
sub
thickness
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2022/039443
Other languages
English (en)
French (fr)
Inventor
Chung-Chia Chen
Ji-Young Choung
Dieter Haas
Yu-Hsin Lin
Jungmin Lee
Wen-hao WU
Si Kyoung Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to KR1020247006921A priority Critical patent/KR20240045246A/ko
Priority to JP2024506944A priority patent/JP2024528264A/ja
Priority to CN202280063768.6A priority patent/CN117981494A/zh
Publication of WO2023014897A1 publication Critical patent/WO2023014897A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/351—Thickness

Definitions

  • Embodiments described herein generally relate to a display. More specifically, embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic lightemitting diode (OLED) display.
  • OLED organic lightemitting diode
  • OLED organic light-emitting diode
  • LED light-emitting diode
  • the emissive electroluminescent layer is a film of an organic compound that emits light in response to an electric current.
  • OLED devices are classified as bottom emission devices if light emitted passes through the transparent or semitransparent bottom electrode and substrate on which the panel was manufactured.
  • Top emission devices are classified based on whether or not the light emitted from the OLED device exits through the lid that is added following the fabrication of the device.
  • OLEDs are used to create display devices in many electronics today. Today’s electronics manufacturers are pushing these display devices to shrink in size while providing higher resolution than just a few years ago.
  • OLED pixel patterning is currently based on a process that restricts panel size, pixel resolution, and substrate size. Rather than utilizing a fine metal mask, photolithography should be used to pattern pixels.
  • OLED pixel patterning requires lifting off organic material after the patterning process. When lifted off, the organic material leaves behind a particle issue that disrupts OLED performance. Accordingly, what is needed in the art are sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic OLED display.
  • a device in one embodiment, includes a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining subpixels of the device, and a plurality overhang structures.
  • Each overhang structure is defined by a top extension of a top structure extending laterally past a body structure.
  • Each body structure is disposed over an upper surface of each PDL structure.
  • the overhang structures define a plurality of sub-pixels including a first sub-pixel and a second sub-pixel.
  • the first sub-pixel includes a first anode, a first organic lightemitting diode (OLED) material, a first cathode, and a first encapsulation layer.
  • OLED organic lightemitting diode
  • the first OLED material is disposed over and in contact with the first anode and under the adjacent overhang structures.
  • the first cathode is disposed over the first OLED material and under the adjacent overhang structures.
  • the first encapsulation layer disposed over the first cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the adjacent overhang structures.
  • the first encapsulation layer has a first thickness.
  • the second sub-pixel includes a second anode, a second OLED material, a second cathode, and a second encapsulation layer.
  • the second organic light-emitting diode (OLED) material is disposed over and in contact with the second anode and under the overhang structures.
  • the second cathode is disposed over the second OLED material and under the adjacent overhang structures.
  • the second encapsulation layer is disposed over the second cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the adjacent overhang structures.
  • the second encapsulation layer having a second thickness different than the first thickness.
  • a device in another embodiment, includes a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device, and a plurality overhang structures.
  • Each overhang structure is defined by a top extension of a top structure extending laterally past a body structure to form an overhang.
  • Each body structure is disposed over an upper surface of each PDL structure.
  • the adjacent overhang structures of the plurality overhang structures define a plurality of sub-pixels including a first sub-pixel and a second sub-pixel.
  • the first sub-pixel includes a first anode, a first organic lightemitting diode (OLED) material, a first cathode and a first encapsulation layer.
  • OLED organic lightemitting diode
  • the first OLED material is disposed over and in contact with the first anode and under the adjacent overhang structures.
  • the first cathode is disposed over the first OLED material and under the adjacent overhang structures.
  • the first encapsulation layer disposed over the first cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the overhang structures.
  • the first encapsulation layer is in an entire area of the overhang and has a first thickness.
  • the second sub-pixel includes a second anode, a second OLED material, a second cathode, and a second encapsulation layer.
  • the second OLED material is disposed over and in contact with the second anode and under the adjacent overhang structures.
  • the second cathode disposed over the second OLED material and under the adjacent overhang structures.
  • the second encapsulation layer is disposed over the second cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the adjacent overhang structures.
  • the second encapsulation layer has a second thickness that is different from the first thickness.
  • a device in yet another embodiment, includes a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device, and a plurality overhang structures.
  • Each overhang structure is defined by a top extension of a top structure extending laterally past a body structure to form an overhang.
  • Each body structure disposed over an upper surface of each PDL structure.
  • the adjacent overhang structures of the plurality overhang structures define a plurality of sub-pixels including a first sub-pixel, a second sub-pixel, and a third sub-pixel.
  • the first sub-pixel includes a first anode, a first organic light emitting diode (OLED), a first cathode, and a first encapsulation layer.
  • the first OLED material is disposed over and in contact with the first anode and under the adjacent overhang structures.
  • the first cathode is disposed over the first OLED material, the first cathode extends under the adjacent overhang structures and contacting a portion of the overhang structures.
  • the first encapsulation layer is disposed over the first cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the overhang structures.
  • the encapsulation layer has a first thickness.
  • the second sub-pixel a second anode, a second OLED material, a second cathode, and a second encapsulation layer.
  • the second OLED material is disposed over and in contact with the second anode and under the adjacent overhang structures.
  • the second cathode is disposed over the second OLED material, the second cathode extending under the adjacent overhang structures and contacting a portion of the overhang structures.
  • the second encapsulation layer is disposed over the second cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the overhang structures.
  • the second encapsulation layer has a second thickness that is different than the first thickness.
  • the third sub-pixel includes a third anode, a third OLED material, a third cathode, and a third encapsulation layer.
  • the third OLED material is disposed over and in contact with the third anode and under the adjacent overhang structures.
  • the third cathode is disposed over the third OLED material extending under the adjacent overhang structures and contacting a portion of a body structure.
  • the third encapsulation layer is disposed over the third cathode, extending under the adjacent overhang structures and contacting a portion of the sidewall of the overhang structures.
  • the encapsulation layer has a third thickness that is different from the first thickness and the second thickness.
  • a device in yet another embodiment, includes a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device, and a plurality overhang structures.
  • Each overhang structure is defined by a top extension of a top structure extending laterally past a body structure.
  • Each body structure is disposed over an upper surface of each PDL structure.
  • the adjacent overhang structures of the plurality overhang structures are define a plurality of sub-pixels including a first sub-pixel and a second sub-pixel.
  • the first sub-pixel includes a first anode, a first organic light-emitting diode (OLED) material, a first cathode, and a first encapsulation layer.
  • OLED organic light-emitting diode
  • the first OLED material is disposed over and in contact with the first anode and under the adjacent overhang structures.
  • the first cathode is disposed over the first OLED material and under the adjacent overhang structures.
  • the first encapsulation layer is disposed over the first cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the adjacent overhang structures.
  • the first encapsulation layer comprises at least two layers of a silicon-containing material.
  • the second sub-pixel includes a second anode, a second OLED, a second cathode, and a second encapsulation layer.
  • the second OLED material is disposed over and in contact with the second anode and under the adjacent overhang structures.
  • the second cathode is disposed over the second OLED material and under the adjacent overhang structures.
  • the second encapsulation layer is disposed over the second cathode, extending under the adjacent overhang structures and contacting a portion of a sidewall of the adjacent overhang structures.
  • the second encapsulation layer comprises the silicon-containing material with a different composition than the first encapsulation layer.
  • Figure 1A is a schematic, cross-sectional view of a sub-pixel circuit, according to embodiments.
  • Figure 1 B is a schematic, cross-sectional view of a sub-pixel circuit, according to embodiments.
  • Figure 1 C is a schematic, top sectional view of a sub-pixel circuit having a dot-type architecture, according to embodiments.
  • Figure 1 D is a schematic, cross-sectional view of a sub-pixel circuit having a line-type architecture, according to embodiments.
  • Figure 2A is a schematic, cross-sectional view of an overhang structure of a sub-pixel circuit, according to embodiments.
  • Figure 2B is a schematic, cross-sectional view of an overhang structure of a sub-pixel circuit, according to embodiments.
  • Figure 3 is a flow a flow diagram of an on-demand method for forming a sub-pixel circuit according to embodiments.
  • Figures 4A-4K are schematic, cross-sectional views of a substrate during a method for forming a sub-pixel circuit according embodiments.
  • Figure 5 is a flow a flow diagram of a one-step method for forming a subpixel circuit according to embodiments.
  • Figures 6A-6H are schematic, cross-sectional views of a substrate during a method for forming a sub-pixel circuit according embodiments described herein.
  • identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements disclosed in one embodiment may be beneficially utilized on other embodiments without specific recitation.
  • Embodiments described herein generally relate to a display. More specifically, embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic lightemitting diode (OLED) display.
  • OLED organic lightemitting diode
  • Each of the embodiments described herein of the sub-pixel circuit include a plurality of sub-pixels with each of the sub-pixels defined by adjacent overhang structures that are permanent to the sub-pixel circuit. While the Figures depict three sub-pixels with each sub-pixel defined by adjacent overhang structures, the sub-pixel circuit of the embodiments described herein include a plurality of sub-pixels, such as three or more sub-pixels. Each sub-pixel has the OLED material configured to emit a white, red, green, blue or other color light when energized.
  • the OLED material of a first sub-pixel emits a red light when energized
  • the OLED material of a second sub-pixel emits a green light when energized
  • the OLED material of a third subpixel emits a blue light when energized.
  • the overhang structures are permanent to the sub-pixel circuit and include at least a top structure disposed over a body structure.
  • the adjacent overhang structures defining each sub-pixel of the sub-pixel circuit of the display provide for formation of the sub-pixel circuit using evaporation deposition and provide for the overhang structures to remain in place after the sub-pixel circuit is formed.
  • Evaporation deposition is utilized for deposition of OLED materials (including a hole injection layer (HIL), a hole transport layer (HTL), an emissive layer (EML), and an electron transport layer (ETL)) and cathode.
  • HIL hole injection layer
  • HTL hole transport layer
  • EML emissive layer
  • ETL electron transport layer
  • cathode cathode.
  • the HIL layer has a greater conductivity than the HTL layer.
  • the HIL layer has a greater energy level than the HTL layer.
  • an encapsulation layer may be disposed via evaporation deposition.
  • the capping layers are disposed between the cathode and the encapsulation layer.
  • the overhang structures and the evaporation angle set by the evaporation source define the deposition angles, i.e. , the overhang structures provide for a shadowing effect during evaporation deposition with the evaporation angle set by the evaporation source.
  • the evaporation source is configured to emit the deposition material at a particular angle with regard to the overhang structure.
  • the encapsulation layer of a respective sub-pixel is disposed over the cathode with the encapsulation layer extending under at least a portion of each of the adjacent overhang structures.
  • the encapsulation layer of each sub-pixel contacts at least a portion of a sidewall of each of the adjacent overhang structures.
  • the encapsulation layer can be varied by thickness, composition, and deposition method depending on the OLED materials deposited on the sub-pixels.
  • Figure 1A is a schematic, cross-sectional view of a sub-pixel circuit 100 having an arrangement 101 A.
  • the cross-sectional view of Figure 1A is taken along section line 1”-1” of Figures 1 C and 1 D.
  • Figure 1 B is a schematic, cross-sectional view of a sub-pixel circuit 100 having arrangement 101 B.
  • the cross-sectional view of Figure 1 B is taken along section line 1 ”-1 ” of Figures 1 C and 1 D.
  • the sub-pixel circuit 100 includes a substrate 102.
  • Metal-containing layers 104 may be patterned on the substrate 102 and are defined by adjacent pixel-defining layer (PDL) structures 126 disposed on the substrate 102.
  • the metal-containing layers 104 are pre-patterned on the substrate 102.
  • the substrate 102 is a pre-patterned indium tin oxide (ITO) glass substrate.
  • ITO indium tin oxide
  • the metalcontaining layers 104 are configured to operate anodes of respective sub-pixels.
  • the metal-containing layers 104 include, but are not limited to, chromium, titanium, gold, silver, copper, aluminum, ITO, a combination thereof, or other suitably conductive materials.
  • the PDL structures 126 are disposed on the substrate 102.
  • the PDL structures 126 include one of an organic material, an organic material with an inorganic coating disposed thereover, or an inorganic material.
  • the organic material of the PDL structures 126 includes, but is not limited to, polyimides.
  • the inorganic material of the PDL structures 126 includes, but is not limited to, silicon oxide (SiC>2), silicon nitride (SisN4), silicon oxynitride (Si 2 N 2 O), magnesium fluoride (MgF2), or combinations thereof.
  • Adjacent PDL structures 126 define a respective sub-pixel and expose the anode (i.e., metal-containing layer 104) of the respective sub-pixel of the sub-pixel circuit 100.
  • the sub-pixel circuit 100 has a plurality of sub-pixels 106 including at least a first sub-pixel 108a, a second sub-pixel 108b, and a third sub-pixel 108c. While the Figures depict the first sub-pixel 108a, the second sub-pixel 108b, and the third subpixel 108c, the sub-pixel circuit 100 of the embodiments described herein may include three or more sub-pixels 106, such as a fourth and a fifth sub-pixel. Each sub-pixel 106 has an organic light-emitting diode (OLED) material 112 configured to emit a white, red, green, blue or other color light when energized.
  • OLED organic light-emitting diode
  • the OLED material 112 of the first sub-pixel 108a emits a red light when energized
  • the OLED material of the second sub-pixel 108b emits a green light when energized
  • the OLED material of a third sub-pixel 108c emits a blue light when energized
  • the OLED material of a fourth sub-pixel and a fifth sub-pixel emits another color light when energized.
  • Overhang structures 110 are disposed on an upper surface 103 of each of the PDL structures 126.
  • the overhang structures 110 are permanent to the sub-pixel circuit.
  • the overhang structures 110 further define each sub-pixel 106 of the subpixel circuit 100.
  • the overhang structures 110 include at least a top structure 110B disposed over a body structure 110A.
  • the top structure 110B is disposed on the body structure 110A.
  • the body structure 110A is disposed over the upper surface 103 of the PDL structure 126.
  • the body structure 110A is disposed on the upper surface 103 of the PDL structure 126.
  • Each overhang structure 110 includes adjacent overhangs 109.
  • the adjacent overhangs 109 are defined by a top extension 109A of the top structure 110B extending laterally past a sidewall 111 of the body structure 110A.
  • the top structure 110B includes one of a non-conductive material, inorganic material, or metal-containing material.
  • the body structure 110A includes an inorganic material or metal-containing material.
  • the non-conductive material includes, but it not limited to, an inorganic silicon-containing material.
  • the silicon-containing material includes oxides or nitrides of silicon, or combinations thereof.
  • the metalcontaining materials include at least one of a metal or metal alloy such as titanium (Ti), aluminum (Al), aluminum neodymium (AINd), molybdenum (Mo), molybdenum tungsten (MoW), copper (Cu), or combinations thereof.
  • the inorganic materials of the body structure 110A and the top structure 110B include titanium (Ti), silicon nitride (S isN4) , silicon oxide (S iC>2) , silicon oxynitride (Si2N2O), or combinations thereof.
  • the overhang structures 110 are able to remain in place, i.e., are permanent. Thus, organic material from lifted off overhang structures that disrupt OLED performance would not be left behind. Eliminating the need for a lift-off procedure also increases throughput.
  • the top structure 110B includes a non-conductive inorganic material and the body structure 110A includes a conductive inorganic material or a metal-containing material.
  • the top structure 11 OB includes a conductive inorganic material or metal-containing material and the body structure 110A includes a conductive inorganic material or metal-containing material.
  • An assistant cathode 202 (shown in Figure 2B) may be disposed under the body structure 110A
  • Adjacent overhangs 109 are defined by the top extension 109A of the top structure 110B. At least a bottom surface 107 of the top structure 110B is wider than a top surface 105 of the body structure 110A to form the top extension 109A (as shown in Figure 1 B) of the overhang 109.
  • the top structure 110B is disposed over a top surface 105 of the body structure 110A.
  • the top extension 109A of the top structure 110B forms the overhang 109 and allows for the top structure 110B to shadow the body structure 110A.
  • the shadowing of the overhang 109 provides for evaporation deposition of each of the OLED material 112 and a cathode 114.
  • the OLED material 112 is disposed under the overhang 109.
  • the cathode 114 is disposed over the OLED material 112 and extends under the overhang 109. In one embodiment, as shown in Figure 2A and 2B, the cathode 114 contacts a first portion 220 of the sidewall 111 of the body structure 110A.
  • the overhang structures 110 and an evaporation angle set by an evaporation source define deposition angles, i.e. , the overhang structures 110 provide for a shadowing effect during evaporation deposition with the evaporation angle set by the evaporation source.
  • the overhang 109 and the evaporation source define an OLED angle OOLED of the OLED material 112 and a cathode angle Ocathode of the cathode 114 (shown in Figure 2A and 2B).
  • the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114 result from the overhang structures 110 and the evaporation angle set by the evaporation source, i.e., the overhang structures 110 provide for a shadowing effect during evaporation deposition of the OLED material 112 and the cathode 114 with the evaporation angle set by the evaporation source.
  • the OLED material 112 and the cathode 114 contact the sidewall 111 of the body structure 110A of the overhang structures 110.
  • the cathode 114 contacts the sidewall 111 of the body structure 110A of the overhang structures 110.
  • the encapsulation layer 116 is disposed over the sidewall 111 of the body structure 110A and a bottom surface 107 of the top structure 110B.
  • the body structure 110A is disposed over an assistant cathode 202.
  • the assistant cathode 202 is disposed over a portion of the upper surface 103 of the PDL structure 126.
  • the cathode 114 contacts at least the assistant cathode 202.
  • the cathode 114 contacts busbars (not shown) outside of an active area of the sub-pixel circuit 100.
  • the cathode 114 and the assistant cathode 202 include a conductive material, such as a metal or metal alloy.
  • the cathode 114 and/or the assistant cathode 202 include, but are not limited to, chromium, titanium, aluminum, ITO, or a combination thereof.
  • the material of the cathode 114 is different from the material of the body structure 110A and the top structure 110B.
  • Each sub-pixel 106 includes include an encapsulation layer 116, e.g., the first sub-pixel 108a has a first encapsulation layer 116A, the second sub-pixel 108b has a second encapsulation layer 116B, and the third sub-pixel 108c has a third encapsulation layer 116C.
  • the encapsulation layer 116 may be or may correspond to a local passivation layer.
  • the encapsulation layer 116 of a respective sub-pixel is disposed over the cathode 114 (and OLED material 112) with the encapsulation layer 116 extending under at least a portion of the overhang structures 110 and over at least a portion of a sidewall of each of the adjacent overhang structures 110.
  • the second encapsulation layer 116B and third encapsulation layer 116C are disposed over the cathode 114 and extends under the adjacent overhangs 109 to contact a second portion (not shown) the sidewall 111 of the body structure 110A.
  • the first encapsulation layer 116A is disposed over the sidewall 111 of the body structure 110A and a bottom surface 107 of the top structure 110B.
  • the first encapsulation layer 116A is disposed over the sidewall 111 of the body structure 110A, the bottom surface 107 of the top structure 110B, a sidewall 113 of the top structure 110B, and a portion of a top surface 115 of the top structure 110B of the overhang structures 110.
  • the encapsulation layer 116 further includes a top surface 119 that defines the uppermost edge of the encapsulation layer 116 between the sidewalls 111 of the body structure 110A.
  • the capping layers are disposed between the cathode 114 and the encapsulation layer 116.
  • a first capping layer and a second capping layer are disposed between the cathode 114 and the encapsulation layer 116.
  • Each of the embodiments described herein may include one or more capping layers disposed between the cathode 114 and the encapsulation layer 116.
  • the first capping layer may include an organic material.
  • the second capping layer may include an inorganic material, such as lithium fluoride.
  • the first capping layer and the second capping layer may be deposited by evaporation deposition.
  • the sub-pixel circuit 100 further includes at least a global passivation layer 120 disposed over the overhang structure 110 and the encapsulation layer 116.
  • the sub-pixel includes an intermediate passivation layer disposed over the overhang structures 110 of each of the sub-pixels 106, and disposed between the encapsulation layer 116 and the global passivation layer 120.
  • the arrangement 101 A and the arrangement 101 B of the sub-pixel circuit 100 further include at least a global passivation layer 120 disposed over the overhang structures 110 and the encapsulation layers 116.
  • an intermediate layer 118 may be disposed between the global passivation layer 120 and the overhang structures 110 and the encapsulation layers 116.
  • the intermediate layer 118 may include an inkjet material, such as an acrylic material.
  • Figure 1 C is a schematic, top sectional view of a sub-pixel circuit 100 having a dot-type architecture 101 C.
  • Figure 1 D is a schematic, cross-sectional view of a subpixel circuit 100 having a line-type architecture 101 D.
  • Each of the top sectional views of Figure 1 C and 1 D are taken along section line 1 ’-1 ’ of Figures 1 A and 1 B.
  • the dottype architecture 101 C includes a plurality of pixel openings 124A from adjacent PDL structures 126.
  • Each of pixel opening 124A is surrounded by overhang structures 110, as shown in Figure 1A, that defines each of the sub-pixels 106 of the dot-type architecture 101 C.
  • the line-type architecture 101 D includes a plurality of pixel openings 124B from adjacent PDL structures 126. Each of pixel opening 124B is abutted by overhang structures 110, as shown in Figure 1A, that define each of the sub-pixels 106 of the line-type architecture 101 D.
  • Figure 2A is a schematic, cross-sectional view of an overhang structure 110 of a sub-pixel circuit 100.
  • Figure 2B is a schematic, cross-sectional view of an overhang structure 110 of a sub-pixel circuit 100.
  • the overhang structures 110 include a top structure 110B of a non-conductive inorganic material and a body structure 110A of a conductive inorganic material.
  • the overhang structures 110 including the top structure 110B of a conductive inorganic material and the body structure 110A of a conductive inorganic material.
  • the cathode 114 contacts the body structure 110A of the overhang structures 110.
  • the body structure 110A is disposed over an assistant cathode 202.
  • the cathode 114 contacts at least the assistant cathode 202.
  • the cathode 114 contacts busbars (not shown) outside of an active area of the sub-pixel circuit 100.
  • the top structure 110B includes an underside edge 206 and an overhang vector 208.
  • the underside edge 206 extends past the sidewall 111 of the body structure 110A.
  • the overhang vector 208 is defined by the underside edge 206 and the PDL structure 126.
  • the OLED material 112 is disposed over the metal-containing layer 104, over the sidewall 127 of the PDL structure 126, and over a first portion 210 of the upper surface 103 of the PDL structure 126, extending under the overhang 109 to an OLED endpoint 218.
  • the OLED material 112 forms an OLED angle OOLED between an OLED vector 212 and the overhang vector 208.
  • the OLED vector 212 is defined by an OLED endpoint 218 extending under the top structure 110B and the underside edge 206 of the top structure 110B.
  • the OLED material 112 may include one or more of a HIL, a HTL, an EML, and an ETL.
  • the cathode 114 is disposed over the OLED material 112, over the first portion 210 of the PDL structure 126, and over a second portion 211 of the upper surface 103 of the PDL structures 126 in each sub-pixel 106. In some embodiments, which can be combined with other embodiments described herein, the cathode 114 is disposed on a first portion 220 of the sidewall 111 of the body structure 110A. In other embodiments, as shown in Figure 2B, which can be combined with other embodiments described herein, the cathode 114 contacts a portion 222 of the assistant cathode 202.
  • the cathode 114 may also contact the first portion 220 of the sidewall 111 of the body structure 110A.
  • the cathode 114 forms a cathode angle Ocathode between a cathode vector 224 and the overhang vector 208.
  • the cathode vector 224 is defined by a cathode endpoint 226 extending under the top structure 110B and the underside edge 206 of the top structure 110B.
  • the encapsulation layer 116 is disposed over the cathode 114 (and OLED material 112) with the encapsulation layer 116 extending at least under the top structure 110B of the overhang structure 110 and over at least a portion of a sidewall of the overhang structure 110.
  • the second encapsulation layer 116B and 116C are disposed over the cathode 114 and extends under the adjacent overhangs 109 to contact a second portion (not shown) of the sidewall 111 of the body structure 110A.
  • the first encapsulation layer 116A is disposed over the sidewall 111 of the body structure 110A and a bottom surface 107 of the top structure 110B.
  • the first encapsulation layer 116A contacts the sidewall 111 of the body structure 110A, the bottom surface 107 of the top structure 110B, a sidewall 113 of the top structure 110B, and a portion of a top surface 115 of the top structure 110B of the overhang structures 110.
  • the encapsulation layer 116 further includes a top surface 119 that defines the uppermost edge of the encapsulation layer 116 between the sidewalls 111 of the body structure 110A.
  • the encapsulation layer 116 may be varied using deposition thicknesses. Each encapsulation layer 116 has a thickness. The thickness is the distance from the bottom surface of the encapsulation layer to the top surface of the encapsulation layer 116.
  • the first encapsulation layer 116A has a first thickness ti
  • the second encapsulation layer 116B has a second thickness t2
  • the third encapsulation layer 116C has a third thickness t3.
  • the second thickness t2 is different from the first thickness ti
  • the third thickness t3 that is different from the first thickness ti and the second thickness t2.
  • the thickness ti is greater than the thicknesses t2 and t3, and thickness t2 is greater than thickness t3.
  • the thickness ti is lesser than the thicknesses t2 and t3, and thickness t2 is lesser than thickness t3.
  • the thickness t2 is greater than the thicknesses ti and ts, and thickness ti is greater than thickness fa.
  • the thickness t2 is greater than the thicknesses ti and fs, and thickness fa is greater than thickness ti.
  • the thickness of the encapsulation layer 116 is increased as the wavelength of the light emitted increases, e.g., the first encapsulation layer 116A thickness ti is thickest at sub-pixel 108a having a red OLED material 112 ( ⁇ 580 nm), the second encapsulation layer 116B thickness fa is thinner at second subpixel 108b having a green OLED material 112 ( ⁇ 540 nm), and the third encapsulation layer 116C thickness ts is thinnest at sub-pixel 108c having a blue OLED material 112 ( ⁇ 440 nm).
  • the thickness of the encapsulation layer 116 is decreased as the wavelength of light emitted increases, e.g.
  • the first encapsulation layer 116A thickness ti is thinnest at sub-pixel 108a having a red OLED material 112 ( ⁇ 580 nm)
  • the second encapsulation layer 116B thickness t2 is thicker at second sub-pixel 108b having a green OLED material 112 ( ⁇ 540 nm)
  • the third encapsulation layer 116C thickness fa is thickest at sub-pixel 108c having a blue OLED material 112 ( ⁇ 440 nm).
  • the thickness of the encapsulation layer 116 may vary independent from the type of OLED light used at the sub-pixels 108a, 108b, and 108c.
  • the encapsulation layer in each sub-pixel are varied in thickness in order to protect deposited layers during etching of subsequent encapsulation layers.
  • the thicknesses ti, t2 and fa can range between about 0.5 pm and about 2.0 pm, such as about 0.8 pm to about 1 .2 pm.
  • the encapsulation layer 116 includes the non-conductive inorganic material, such as the silicon-containing material.
  • the silicon-containing material may include silicon nitride (e.g., SisN4) materials, silicon oxynitride materials (e.g., Si2N2O), silicon oxide materials (e.g., SiC>2), or a combination thereof.
  • the first encapsulation layer 116A includes silicon nitride materials
  • the second encapsulation layer 116B includes a silicon oxynitride material
  • the third encapsulation layer 116C includes silicon oxide.
  • the thicknesses of the encapsulation layer 116 may depend on the etch selectivity of the material of the encapsulation layer 116.
  • the silicon-containing materials can further be varied to change the optical properties of the encapsulation layer 116.
  • the silicon- containing materials can be tuned to increase or decrease the refractive index.
  • the difference in refractive index can also effect the etching rate of the encapsulation layer 116. This allows for additional etch selectivity control of the encapsulation layer 116.
  • the first encapsulation layer 116A has a first refractive index
  • the second encapsulation layer 116B has a second refractive index
  • the third encapsulation layer 116C has a third refractive index.
  • the first refractive index, the second refractive index, and the third refractive index are different from each other.
  • At least one of the first encapsulation layer 116A, the second encapsulation layer 116B, and the third encapsulation layer 116C may include at least two layers of the silicon-containing material. At least one of the first encapsulation layer 116A, the second encapsulation layer 116B, and the third encapsulation layer 116C includes a composition for at least one of the layers of the silicon-containing material that is different from the compositions of the other encapsulation layers 116.
  • the first encapsulation layer 116A includes a silicon oxynitride material over a silicon nitride material.
  • the second encapsulation layer 116B includes a silicon oxide layer over a silicon nitride layer.
  • the third encapsulation layer 116C includes a silicon nitride layer over a silicon oxide layer.
  • the first encapsulation layer 116A includes a silicon oxide layer over a silicon oxynitride layer.
  • the second encapsulation layer 116B includes a silicon nitride layer over a silicon oxynitride layer.
  • the third encapsulation layer 116C has a silicon oxynitride layer over a silicon oxide layer.
  • the silicon nitride material has a thickness of about 0.8 pm to about 1.2 pm.
  • the silicon oxynitride layer has a thickness of about 0.2 pm to about 0.4 pm.
  • the silicon oxide layer has a thickness of about 0.2 pm to about 0.4 pm.
  • the encapsulation layer 116 may further be varied using different modes of deposition, e.g., atomic layer deposition (ALD), chemical vapor deposition (CVD), and physical vapor deposition (PVD).
  • ALD atomic layer deposition
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • the first sub-pixel 108a includes silicon nitride is deposited using CVD and silicon oxide deposited using ALD.
  • the second sub-pixel 108b includes silicon nitride deposited using CVD and silicon oxynitride deposited using CVD.
  • the third sub-pixel 108c includes silicon nitride deposited using CVD.
  • the encapsulation layer 116 may further be varied between using an inductively coupled plasma (IDP) or a conductively coupled plasma (CCP) for the deposition processes.
  • IDP inductively coupled plasma
  • CCP conductively coupled plasma
  • the encapsulation layer in each sub-pixel protects deposited layers during deposition of subsequent layers and improves process yield and efficiency.
  • the variation in encapsulation layer 116 thicknesses further controls the distance between the underside edge 206 and the top surface of the encapsulation layer 116, as shown in sub-pixels 108b and 108c in Figure 1 and Figure 2, and the distance between an encapsulation edge 230 of the encapsulation layer 116 and top surface 119 of the encapsulation layer 116.
  • the distances control the amount of etching and deposition that occurs under the overhang structures 110, leading to increased OLED material 112 protection during subsequent deposition and etching.
  • the encapsulation layer 116 extends under the overhang structure 110 to contact the second portion of the body structure 110A. A distance is defined between an encapsulation edge 230 and the top surface 119 of the encapsulation layer 116.
  • the first encapsulation layer 116A is in an entire area of the overhang 109.
  • the thickness ti of the encapsulation is from the bottom surface 107 of the top structure 110B to the bottom surface of the first encapsulation layer 116A. E.g., there is no distance between an encapsulation edge 230 and the top surface 119 of the encapsulation layer 116.
  • the first encapsulation layer 116A extends under the overhang structure 110 to contact the body structure 110A, the bottom surface 107 of the top structure 110B, the sidewall 113 of the top structure 110B, and a portion 117 of the top surface 115 of the top structure 110B.
  • the first encapsulation layer 116A has a thickness ti to fill a portion of the area under the overhang 109.
  • a gap is defined between the first encapsulation layer 116A on the bottom surface 107 of the top structure 110B and the first encapsulation layer 116A over the cathode 114.
  • the thickness ti determines the distance D1 of the gap between the encapsulation edge 230 and the top surface 119 of the first encapsulation layer 116A.
  • the second encapsulation layer 116B extends under the overhang structure 110 to contact a portion of the body structure 110A.
  • the second encapsulation layer 116B has a second thickness t2 at the second sub-pixel to fill a portion of the area under the overhang 109.
  • a gap is defined between underside edge 206 of the top structure 110B and the second encapsulation layer 116B over the cathode 114.
  • the second thickness t2 determines the distance D2 of the gap between the underside edge 206 and the top surface 119 of the second encapsulation layer 116B.
  • the third encapsulation layer 116C extends under the overhang structure 110 to contact a portion of the body structure 110A.
  • the third encapsulation layer 116C having a third thickness t3 at the third sub-pixel 108c to fill a portion of the area under the overhang 109.
  • a gap is defined between underside edge 206 of the top structure 110B and the third encapsulation layer 116C over the cathode 114.
  • the third thickness t3 determines the distance D3 of the gap between the underside edge 206 and the top surface 119 of the third encapsulation layer 116C.
  • the first encapsulation layer 116A with a first thickness ti the second encapsulation layer 116B has a second thickness t2
  • the second thickness t2 is different from the first thickness ti.
  • the third thickness t3 being different from the first thickness ti and the second thickness t2.
  • Figure 1A depicts an embodiment with the first encapsulation layer 116A of the first sub-pixel 108a in an entire area of the overhang
  • Figure 1 B depicts an embodiment with the first encapsulation layer 116A of the first sub-pixel 108a containing a portion of a top surface 115 of the top structure 110B
  • the first encapsulation layer 116A of the first sub-pixel 108a, the second encapsulation layer 116B of the second sub-pixel 108b, and the third encapsulation layer 116C the third sub-pixel 108c may include any combination of the embodiments described herein.
  • the underside edge 206 of the top structure 110B defines the position of the OLED endpoint 218.
  • the OLED material 112 is evaporated at an OLED maximum angle that corresponds to the OLED vector 212 and the underside edge 206 ensures that the OLED material 112 is not deposited past the OLED endpoint 218.
  • the underside edge 206 of the top structure 110B defines the position of the cathode endpoint 226.
  • the cathode 114 is evaporated at a cathode maximum angle that corresponds to the cathode vector 224 and the underside edge 206 ensures that the cathode 114 is not deposited past the cathode endpoint 226.
  • the OLED angle OOLED is less than the cathode angle Ocathode.
  • Figure 3 is a flow diagram of a method 300 for forming a sub-pixel circuit 100, according to embodiments.
  • Figures 4A-4K are schematic, cross-sectional views of a substrate 102 during the method 300 for forming the sub-pixel circuit 100, according to embodiments described herein.
  • the method 300 described herein provides for the ability to fabricate both the sub-pixel circuit 100 with the dot-type architecture 101 C and the sub-pixel circuit 100 with the line-type architecture 101 D.
  • a body structure layer 402A and top structure layer 402B are deposited over the substrate 102.
  • the body structure layer 402A is disposed over the PDL structures 126 and the metal-containing layers 104.
  • the top structure layer 402B is disposed over the body structure layer 402A.
  • the body structure layer 402A corresponds to the body structure 110A and the top structure layer 402B corresponds to the top structure 110B of the overhang structures 110.
  • an assistant cathode layer (not shown) is disposed between the body structure layer 402A and the PDL structures 126 and the metal-containing layers 104.
  • a resist 406 is disposed and patterned.
  • the resist 406 is disposed over the top structure layer 402B.
  • the resist 406 is a positive resist or a negative resist.
  • a positive resist includes portions of the resist, which, when exposed to electromagnetic radiation, are respectively soluble to a resist developer applied to the resist after the pattern is written into the resist using the electromagnetic radiation.
  • a negative resist includes portions of the resist, which, when exposed to radiation, will be respectively insoluble to the resist developer applied to the resist after the pattern is written into the resist using the electromagnetic radiation.
  • the chemical composition of the resist 406 determines whether the resist is a positive resist or a negative resist.
  • the resist 406 is patterned to form one of a pixel opening 124A of the dot-type architecture 101 C or a pixel opening 124B of the line-type architecture 101 D of a first sub-pixel 108a.
  • the patterning is one of a photolithography, digital lithography process, or laser ablation process.
  • portions of the top structure layer 402B and the body structure layer 402A exposed by the pixel opening 124A, 124B are removed.
  • the top structure layer 402B exposed by the pixel opening 124A, 124B may be removed a dry etch process or a wet etch process.
  • the body structure layer 402A exposed by the pixel opening 124A, 124B may be removed by a dry etch process of a wet etch process.
  • a portion of the assistant cathode layer may be removed by a dry etch process or a wet etch process to form the assistant cathode 202 disposed under the body structure 110A.
  • Operation 303 forms the overhang structures 110 of the first sub-pixel 108a.
  • the etch selectivity of the between the materials of the top structure layer 402B corresponding to the top structure 11 OB and the body structure layer 402A corresponding to the body structure 110A and the etch processes to remove the exposed portions of the top structure layer 402B and the body structure layer 402A provide for the bottom surface 107 of the top structure 110B being wider than the top surface 105 of the body structure 110A to form the top extension 109A that defines the overhang 109 (as shown in Figures 1A, 1 B, 2A, and 2B).
  • the shadowing of the overhang 109 provides for evaporation deposition the OLED material 112 and the cathode 114.
  • the OLED material 112 of the first sub-pixel 108a, the cathode 114, and the encapsulation layer 116 are deposited.
  • the shadowing of the overhang 109 provides for evaporation deposition each of the OLED material 112 and a cathode 114.
  • the shadowing effect of the overhang structures 110 define the OLED angle OOLED (shown in Figure 1A and 2A) of the OLED material 112 and the cathode angle Ocathode (shown in Figure 1A and 2A) of the cathode 114.
  • the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114 result from evaporation deposition of the OLED material 112 and the cathode 114.
  • the cathode 114 contacts the body structure 110A of the overhang structures 110.
  • the cathode 114 contacts at least the assistant cathode 202.
  • the encapsulation layer 116 is deposited over the cathode 114 with a thickness ti.
  • the capping layers are deposited between the cathode 114 and the encapsulation layer 116.
  • the capping layers may be deposited by evaporation deposition.
  • a resist 408 is formed in a well 410 of the first sub-pixel 108a.
  • a thickness of the resist 408 is different from a thickness of the resist 406.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by the resist 408 are removed.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by resist 408 may be removed by wet etch processes.
  • the resist 408 is removed from the well, leaving behind the overhang structures 110.
  • a resist 412 is disposed and patterned.
  • a thickness of the resist 412 is different from the thickness of the resist 406 and the resist 408.
  • the resist 412 is disposed over the top structure layer 402B and the top structure 110B of the first sub-pixel 108a.
  • the resist 412 is patterned to form one of the pixel opening 124A of the dot-type architecture 101 C or the pixel opening 124B of the line-type architecture 101 D of a second sub-pixel 108b.
  • portions of the top structure layer 402B and the body structure layer 402A exposed by the pixel opening 124A, 124B of the second sub-pixel 108b are removed.
  • the top structure layer 402B exposed by the pixel opening 124A, 124B may be removed a dry etch process or wet etch process.
  • the body structure layer 402A exposed by the pixel opening 124A, 124B may be removed by a dry etch process or a wet etch process.
  • a portion of the assistant cathode layer may be removed by a dry etch process or a wet etch process to form the assistant cathode 202 disposed under the body structure 110A.
  • Operation 308 forms the overhang structures 110 of the second sub-pixel 108b.
  • the etch selectivity of the materials of the top structure layer 402B corresponding to the top structure 110B and the body structure layer 402A corresponding to the body structure 110A and the etch processes to remove the exposed portions of the top structure layer 402B and the body structure layer 402A provide for the bottom surface 107 of the top structure 110B being wider than the top surface 105 of the body structure 110A to form the top extension 109A that defines the overhang 109 (as shown in Figure 1A).
  • the shadowing of the overhang 109 provides for evaporation deposition the OLED material 112 and the cathode 114.
  • the OLED material 112 of the second sub-pixel 108b, the cathode 114, and the encapsulation layer 116 are deposited.
  • the capping layers are deposited between the cathode 114 and the encapsulation layer 116.
  • the capping layers may be deposited by evaporation deposition.
  • the shadowing of the overhang 109 provides for evaporation deposition of the OLED material 112 and a cathode 114.
  • the shadowing effect of the overhang structures 110 define the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114.
  • the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114 result from evaporation deposition of the OLED material 112 and the cathode 114.
  • the cathode 114 contacts the body structure 110A of the overhang structures 110.
  • the cathode 114 contacts at least the assistant cathode 202.
  • the encapsulation layer 116 is deposited over the cathode 114 with a thickness t2. In one embodiment, the thickness t2 is lesser than the thickness ti. In another embodiment, the thickness t2 is greater than the thickness ti.
  • a resist 416 is formed in a well of the second sub-pixel 108b.
  • a thickness of the resist 416 is different from a thickness of the resist 406, the resist 408, and the resist 412.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by the resist 416 are removed.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by resist 416 may be removed by wet etch processes.
  • the resist 416 is removed from the well, leaving behind the overhang structures 110.
  • Operations 301 -311 described herein form the sub-pixel circuit 100 including two sub-pixels 106. Operations 306- 310 may be repeated for each addition sub-pixel, e.g. for a third and/or a fourth subpixel.
  • the encapsulation layer 116 for a third sub-pixel 108c has a thickness t3. Any additional pixels 108/? have an encapsulation layer 116 with a thickness t n . In one embodiment, the thickness ts of the encapsulation layer 116 in sub-pixel 108c is lesser than the thicknesses ti and t2.
  • the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is greater than the thicknesses ti and t2. In another embodiment, the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is lesser than the thickness f? and greater than the thickness t2. In another embodiment, the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is greater than the thickness ti and lesser than the thickness t2. In another embodiment, the thickness of the encapsulation layer 116 is increased as the wavelength of light emitted increases. In another embodiment, the thickness of the encapsulation layer 116 is decreased as the wavelength of light emitted increases.
  • Thicknesses, compositions, and deposition methods of the encapsulation layer 116 may be varied, as described above. By varying the encapsulation layer 116 compositions and deposition methods to create variations in thicknesses, the encapsulation layer 116 protects the deposited OLED material 112 from damage during layering and improves process yield and efficiency.
  • the variation in encapsulation layer 116 thicknesses further controls the distance between the underside edge 206 and the top surface of the encapsulation layer 116, as shown in sub-pixels 108b and 108c in Figure 1 and Figure 2, and the distance between an encapsulation edge 230 of the encapsulation layer 116 and top surface 119 of the encapsulation layer 116. The distances control the amount of etching and deposition that occurs under the overhang structures 110, leading to increased OLED material 112 protection during subsequent deposition and etching.
  • Figure 5 is a flow a flow diagram of a method 500 for forming a sub-pixel circuit 100.
  • Figures 6A-6H are schematic, cross-sectional views of a substrate 102 during the method 500 for forming the sub-pixel circuit 100 according embodiments described herein.
  • a body structure layer 402A and a top structure layer 402B are deposited over the substrate 102.
  • the body structure layer 402A is disposed over the PDL structures 126 and the metal-containing layers 104.
  • the top structure layer 402B is disposed over the body structure layer 402A.
  • the body structure layer 402A corresponds to the body structure 110A and the top structure layer 402B corresponds to top structure 110B of the overhang structures 110.
  • an assistant cathode layer 404 is disposed between the body structure layer 402A and the PDL structures 126 and the metal-containing layers 104.
  • the assistant cathode layer 404 corresponds to the assistant cathode 202.
  • a resist 406 is disposed and patterning over the top structure layer 402B to expose pixel openings 124A, 124B.
  • the overhang structure portions of the top structure layer 402B and the body structure layer 402A exposed by the pixel opening 124A, 124B are removed.
  • the top structure layer 402B exposed by the pixel opening 124A, 124B may be removed a dry etch process or a wet etch process.
  • the body structure layer 402A exposed by the pixel opening 124A, 124B may be removed by a dry etch process or a wet etch process.
  • the OLED material 112 of the first sub-pixel 108a, the cathode 114, and the encapsulation layer 116 are deposited.
  • the capping layers are deposited between the cathode 114 and the encapsulation layer 116.
  • the capping layers may be deposited by evaporation deposition.
  • the shadowing effect of the overhang structures 110 define the OLED angle OOLED (shown in Figure 2B) of the OLED material 112 and the cathode angle Ocathode (shown in Figure 2B) of the cathode 114.
  • the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114 result from evaporation deposition of the OLED material 112 and the cathode 114.
  • the cathode 114 contacts the body structure 110A of the overhang structures 110.
  • the cathode 114 contacts at least the assistant cathode 202.
  • the encapsulation layer 116 is deposited over the cathode 114 with a thickness ti.
  • a resist 602 is formed in a well of the first sub-pixel 108a.
  • the resist 602 has a thickness that is different from a thickness of the resist 406.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by the resist 602 are removed.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by resist 602 may be removed by wet etch processes.
  • the resist 602 is removed.
  • the OLED material 112 of the second sub-pixel 108b, the cathode 114, and the encapsulation layer 116 are deposited.
  • a resist 604 is formed in a well of the first sub-pixel 108a and the OLED material 112, the cathode 114 and the encapsulation layer 116 are deposited over the resist 604.
  • the resist 604 has a thickness that is different from the thickness of the resist 602 and the resist 406.
  • the capping layers are deposited between the cathode 114 and the encapsulation layer 116.
  • the capping layers may be deposited by evaporation deposition.
  • the shadowing of the overhang 109 provides for evaporation deposition each of the OLED material 112 and a cathode 114.
  • the shadowing effect of the overhang structures 110 define the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114.
  • the OLED angle OOLED of the OLED material 112 and the cathode angle Ocathode of the cathode 114 result from evaporation deposition of the OLED material 112 and the cathode 114.
  • the cathode 114 contacts the body structure 110A of the overhang structures 110. In the cathode 114 contacts at least the assistant cathode 202.
  • the encapsulation layer 116 is deposited over the cathode 114 with a thickness t2. In one embodiment, the thickness t2 is lesser than the thickness ti. In another embodiment, the thickness t2 is greater than the thickness ti. [0063]
  • a resist 606 is formed in a well of the second sub-pixel 108b. In one embodiment, the resist 606 has a thickness that is different from the thickness of the resist 406, the resist 602, and the resist 604.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by the resist 416 are removed.
  • the encapsulation layer 116, the cathode 114, and the OLED material 112 exposed by resist 606 may be removed by wet etch processes. The resist 606 is removed.
  • Operations 501-508 described herein form the sub-pixel circuit 100 including two or more sub-pixels 106. Operations 505-508 may be repeated for each addition sub-pixel, e.g. for a third and/or a fourth sub-pixel.
  • the encapsulation layer 116 for a third sub-pixel 108c has a thickness t3. Any additional pixels 108/? have an encapsulation layer 116 with a thickness t n .
  • the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is lesser than the thicknesses ti and t2.
  • the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is greater than the thicknesses ti and t2. In another embodiment, the thickness ts of the encapsulation layer 116 in sub-pixel 108c is lesser than the thickness ti and greater than the thickness t2. In another embodiment, the thickness t3 of the encapsulation layer 116 in sub-pixel 108c is greater than the thickness ti and lesser than the thickness t2. In another embodiment, the thickness of the encapsulation layer 116 is increased as the wavelength of light emitted increases. In another embodiment, the thickness of the encapsulation layer 116 is decreased as the wavelength of light emitted increases.
  • Thicknesses, compositions, and deposition methods of the encapsulation layer 116 may be varied, as described above. By varying the encapsulation layer 116 compositions and deposition methods to create variations in thicknesses, the encapsulation layer 116 protects the deposited OLED material 112 from damage during layering and improves process yield and efficiency.
  • the variation in encapsulation layer 116 thicknesses further controls the distance between the underside edge 206 and the top surface of the encapsulation layer 116, as shown in sub-pixels 108b and 108c in Figure 1 and Figure 2, and the distance between an encapsulation edge 230 of the encapsulation layer 116 and top surface 119 of the encapsulation layer 116. The distances control the amount of etching and deposition that occurs under the overhang structures 110, leading to increased OLED material 112 protection during subsequent deposition and etching.
  • sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display.
  • OLED organic light-emitting diode
  • the adjacent overhang structures defining each sub-pixel of the sub-pixel circuit of the display provide for formation of the sub-pixel circuit using evaporation deposition and provide for the overhang structures to remain in place after the sub-pixel circuit is formed (e.g., utilizing the methods of the fifth, sixth, or seventh exemplary embodiments).
  • Evaporation deposition may be utilized for deposition of an OLED material and cathode.
  • the overhang structures define deposition angles, i.e., provide for a shadowing effect during evaporation deposition, for each of the OLED material and the cathode such the OLED material does not contact the body structure (and assistant cathode according to embodiments) and the cathode contacts the body structure according to some embodiments.
  • the encapsulation layer of a respective sub-pixel is disposed over the cathode with the encapsulation layer extending under at least a portion of each of the adjacent overhang structures and over a sidewall of each of the adjacent overhang structures.
  • the encapsulation layer in each sub-pixel are varied in thickness in order to protect deposited layers during etching of encapsulation subsequent layers. The variation in thickness can be descending, ascending, or dependent on the OLED material deposited (e.g., the color of the OLED).

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
PCT/US2022/039443 2021-08-04 2022-08-04 Descending etching resistance in advanced substrate patterning Ceased WO2023014897A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020247006921A KR20240045246A (ko) 2021-08-04 2022-08-04 진보된 기판 패터닝에서의 내에칭성 감소
JP2024506944A JP2024528264A (ja) 2021-08-04 2022-08-04 最先端の基板パターニングにおけるエッチング抵抗の低減
CN202280063768.6A CN117981494A (zh) 2021-08-04 2022-08-04 在先进基板图案化中降低抗蚀刻性

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202163229266P 2021-08-04 2021-08-04
US63/229,266 2021-08-04

Publications (1)

Publication Number Publication Date
WO2023014897A1 true WO2023014897A1 (en) 2023-02-09

Family

ID=85152738

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2022/039443 Ceased WO2023014897A1 (en) 2021-08-04 2022-08-04 Descending etching resistance in advanced substrate patterning

Country Status (5)

Country Link
US (2) US11665931B2 (https=)
JP (1) JP2024528264A (https=)
KR (1) KR20240045246A (https=)
CN (1) CN117981494A (https=)
WO (1) WO2023014897A1 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120475884A (zh) * 2020-09-04 2025-08-12 应用材料公司 制造具有无机像素包封阻挡层的oled面板的方法
WO2023014897A1 (en) * 2021-08-04 2023-02-09 Applied Materials, Inc. Descending etching resistance in advanced substrate patterning
KR20230170166A (ko) * 2022-06-09 2023-12-19 삼성디스플레이 주식회사 표시 장치와 이의 제조 방법
US20240147825A1 (en) * 2022-10-26 2024-05-02 Applied Materials, Inc. Pixel defining encapsulating barrier for rgb color patterning
KR20240126901A (ko) * 2023-02-14 2024-08-22 삼성디스플레이 주식회사 표시 패널 및 이의 제조 방법
KR20240130185A (ko) * 2023-02-21 2024-08-29 삼성디스플레이 주식회사 표시 패널 및 이의 제조 방법
KR20240164641A (ko) * 2023-05-10 2024-11-20 삼성디스플레이 주식회사 표시 장치 및 이의 제조 방법
CN119110608A (zh) * 2023-06-09 2024-12-10 合肥维信诺科技有限公司 显示面板、显示装置及显示面板的制备方法
KR20260029270A (ko) * 2023-06-27 2026-03-04 어플라이드 머티어리얼스, 인코포레이티드 유기 발광 다이오드들을 위한 배리어 캡슐화
KR20250000970A (ko) * 2023-06-27 2025-01-06 삼성디스플레이 주식회사 표시 장치
KR20260048294A (ko) * 2023-07-31 2026-04-09 어플라이드 머티어리얼스, 인코포레이티드 진보된 패터닝 oled 오버행 서브-픽셀 회로 및 패터닝 방법
CN119968070A (zh) * 2023-11-07 2025-05-09 合肥维信诺科技有限公司 显示面板、显示面板的制备方法及电子设备
CN120018696B (zh) * 2023-11-16 2026-01-16 合肥维信诺科技有限公司 显示面板及显示装置
KR20250082052A (ko) * 2023-11-28 2025-06-09 삼성디스플레이 주식회사 표시 패널 및 이의 제조 방법
FR3157658A1 (fr) 2023-12-21 2025-06-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procédé de fabrication d’un dispositif comprenant une pluralité de pixels
US20250248272A1 (en) * 2024-01-31 2025-07-31 Applied Materials, Inc. Oled color patterning based on photolithography and chemical mechanical polishing
FR3161088A1 (fr) 2024-04-04 2025-10-10 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Procédé de fabrication d’un dispositif d’affichage electroluminescent, dispositif d’affichage electroluminescent
US20250380576A1 (en) * 2024-06-06 2025-12-11 Applied Materials, Inc. Pixel define layer opening for oled module fabrication
CN119183333A (zh) * 2024-09-20 2024-12-24 合肥维信诺科技有限公司 显示面板、显示面板的制备方法和显示装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09330792A (ja) * 1996-06-10 1997-12-22 Tdk Corp 有機エレクトロ・ルミネッセンス表示装置及びその製造方法
JP2002056986A (ja) * 2000-08-09 2002-02-22 Korai Kagi Kofun Yugenkoshi 放熱効果を有する有機エレクトロルミネッセンスデバイス、及びその製造方法
US20040180457A1 (en) * 2001-07-11 2004-09-16 Jan Birnstosk Organic, coloured, electroluminescent display and the production thereof
US20090009069A1 (en) * 2007-07-03 2009-01-08 Canon Kabushiki Kaisha Organic el display apparatus and method of manufacturing the same
KR102207605B1 (ko) * 2014-05-07 2021-01-25 엘지디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037712A (en) 1996-06-10 2000-03-14 Tdk Corporation Organic electroluminescence display device and producing method thereof
JPH10312886A (ja) * 1997-05-09 1998-11-24 Pioneer Electron Corp 有機ｅｌディスプレイとその製造方法
US6060728A (en) 1998-01-12 2000-05-09 Fed Corporation Organic light emitting device structure and process
JP3646510B2 (ja) 1998-03-18 2005-05-11 セイコーエプソン株式会社 薄膜形成方法、表示装置およびカラーフィルタ
US6664730B2 (en) 2001-07-09 2003-12-16 Universal Display Corporation Electrode structure of el device
US6963169B2 (en) 2001-11-13 2005-11-08 Kuan-Chang Peng Organic electro-luminescence device
US20040238846A1 (en) * 2003-05-30 2004-12-02 Georg Wittmann Organic electronic device
US20050099114A1 (en) * 2003-11-12 2005-05-12 Chao-Chin Wu Organic electroluminescent panel and method for manufacturing the panel
US7605533B2 (en) 2005-02-03 2009-10-20 Chunghwa Picture Tubes, Ltd. Organic electro-luminescence display
KR101322310B1 (ko) 2006-06-30 2013-10-25 엘지디스플레이 주식회사 유기전기발광소자 및 그 제조방법
CN102668706B (zh) 2009-11-17 2015-03-25 联合创新技术有限公司 有机el显示器
KR101193196B1 (ko) * 2010-07-07 2012-10-19 삼성디스플레이 주식회사 유기 발광 표시 장치 및 이의 제조 방법
KR102010429B1 (ko) * 2011-02-25 2019-08-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 발광 장치를 사용한 전자 기기
KR101933952B1 (ko) * 2011-07-01 2018-12-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치, 전자 기기 및 조명 장치
KR20140033671A (ko) 2012-09-10 2014-03-19 삼성디스플레이 주식회사 유기발광 표시장치 및 그 제조 방법
CN102945855B (zh) 2012-11-13 2016-08-03 京东方科技集团股份有限公司 发光显示背板、显示装置和像素界定层的制备方法
KR102090555B1 (ko) 2012-12-27 2020-03-18 엘지디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
KR102097443B1 (ko) 2013-05-09 2020-04-07 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
CN105742311B (zh) 2014-12-11 2018-11-13 昆山国显光电有限公司 一种显示装置及其制备方法
KR102424966B1 (ko) * 2015-02-13 2022-07-26 삼성디스플레이 주식회사 유기발광 표시장치
KR20170012707A (ko) 2015-07-22 2017-02-03 삼성디스플레이 주식회사 유기 발광 디스플레이 장치
KR102453921B1 (ko) 2015-09-03 2022-10-13 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
KR102332617B1 (ko) * 2016-06-07 2021-11-30 소니그룹주식회사 발광 소자, 및, 발광 소자를 구비한 표시 장치
JP2016225319A (ja) 2016-10-04 2016-12-28 双葉電子工業株式会社 有機エレクトロルミネッセンスデバイス及びその製造方法
KR102752841B1 (ko) * 2016-12-30 2025-01-10 엘지디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
CN116583131A (zh) * 2017-04-26 2023-08-11 Oti照明公司 用于图案化表面上覆层的方法和包括图案化覆层的装置
KR102300028B1 (ko) 2017-06-08 2021-09-09 삼성디스플레이 주식회사 유기발광표시장치의 제조방법
KR102606282B1 (ko) 2017-06-19 2023-11-27 삼성디스플레이 주식회사 디스플레이 장치
CN107331688B (zh) * 2017-07-14 2019-01-22 京东方科技集团股份有限公司 显示面板及其制备方法
US10170526B1 (en) 2017-08-16 2019-01-01 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Organic light emitting diode display panel and method for manufacturing same
TWI634468B (zh) 2017-08-18 2018-09-01 Industrial Technology Research Institute 透明顯示裝置
KR102382487B1 (ko) 2017-09-15 2022-04-01 엘지디스플레이 주식회사 유기발광 다이오드 표시장치
CN107611280B (zh) 2017-09-20 2020-04-28 京东方科技集团股份有限公司 有机发光二极管基板及其制造方法
CN108321175B (zh) 2018-01-31 2021-02-12 京东方科技集团股份有限公司 基板及其制造方法、显示装置
KR102480092B1 (ko) 2018-04-30 2022-12-23 삼성디스플레이 주식회사 디스플레이 장치
WO2019215591A1 (en) * 2018-05-07 2019-11-14 Oti Lumionics Inc. Method for providing an auxiliary electrode and device including an auxiliary electrode
KR102639567B1 (ko) 2018-05-14 2024-02-23 삼성디스플레이 주식회사 디스플레이 장치
KR102588594B1 (ko) 2018-10-16 2023-10-16 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법
US11296156B2 (en) * 2018-11-28 2022-04-05 Lg Display Co., Ltd. Organic light emitting diode device
US11145700B2 (en) 2019-03-28 2021-10-12 Apple Inc. Organic light-emitting diode display with pixel definition layers
KR102885846B1 (ko) * 2019-09-04 2025-11-13 삼성디스플레이 주식회사 표시 장치
US11069873B2 (en) * 2019-10-15 2021-07-20 Taiwan Semiconductor Manufacturing Company, Ltd. Formation of a two-layer via structure to mitigate damage to a display device
KR102751324B1 (ko) * 2019-10-17 2025-01-06 엘지디스플레이 주식회사 발광 표시 장치 및 그 제조 방법
WO2023014897A1 (en) * 2021-08-04 2023-02-09 Applied Materials, Inc. Descending etching resistance in advanced substrate patterning
US12563909B2 (en) 2021-08-04 2026-02-24 Applied Materials, Inc. Descending etching resistance in advanced substrate patterning
US11610954B1 (en) 2022-02-14 2023-03-21 Applied Materials, Inc. OLED panel with advanced sub-pixel overhangs
CN115884633B (zh) 2023-03-03 2023-05-26 惠科股份有限公司 显示面板及显示面板制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09330792A (ja) * 1996-06-10 1997-12-22 Tdk Corp 有機エレクトロ・ルミネッセンス表示装置及びその製造方法
JP2002056986A (ja) * 2000-08-09 2002-02-22 Korai Kagi Kofun Yugenkoshi 放熱効果を有する有機エレクトロルミネッセンスデバイス、及びその製造方法
US20040180457A1 (en) * 2001-07-11 2004-09-16 Jan Birnstosk Organic, coloured, electroluminescent display and the production thereof
US20090009069A1 (en) * 2007-07-03 2009-01-08 Canon Kabushiki Kaisha Organic el display apparatus and method of manufacturing the same
KR102207605B1 (ko) * 2014-05-07 2021-01-25 엘지디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법

Also Published As

Publication number Publication date
US20230041252A1 (en) 2023-02-09
US11665931B2 (en) 2023-05-30
JP2024528264A (ja) 2024-07-26
US12120925B2 (en) 2024-10-15
US20230255064A1 (en) 2023-08-10
CN117981494A (zh) 2024-05-03
KR20240045246A (ko) 2024-04-05

Similar Documents

Publication Publication Date Title
US11665931B2 (en) Descending etching resistance in advanced substrate patterning
US11910657B2 (en) OLED panel with inorganic pixel encapsulating barrier
US20230013772A1 (en) Conductive oxide overhang structures for oled devices
US12563909B2 (en) Descending etching resistance in advanced substrate patterning
US12593568B2 (en) Metal overhang for advanced patterning
WO2023154188A1 (en) Oled panel with advanced sub-pixel overhangs
EP4706351A1 (en) Descending etching resistance in advanced substrate patterning
US20250008823A1 (en) Barrier encapsulation for organic light-emitting diodes
US20260047330A1 (en) Advanced patterning oled structure for anode protection
US20240315086A1 (en) Oled panel with separate overhangs
US20250248281A1 (en) Protection layer for oled sub-pixels
US20250324886A1 (en) Oled pixel structures
WO2025165516A1 (en) Venting hole on passivation layer on top of gap-fill
WO2025165479A1 (en) Oled color patterning based on photolithography and chemical mechanical polishing
WO2025217490A1 (en) Inverse taper overhang

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2024506944

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 202280063768.6

Country of ref document: CN

122 Ep: pct application non-entry in european phase

Ref document number: 22853918

Country of ref document: EP

Kind code of ref document: A1