WO2022250714A1 - Raidisseurs de pont pour une précision de photolithographie numérique accrue - Google Patents

Raidisseurs de pont pour une précision de photolithographie numérique accrue Download PDF

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Publication number
WO2022250714A1
WO2022250714A1 PCT/US2021/041459 US2021041459W WO2022250714A1 WO 2022250714 A1 WO2022250714 A1 WO 2022250714A1 US 2021041459 W US2021041459 W US 2021041459W WO 2022250714 A1 WO2022250714 A1 WO 2022250714A1
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WO
WIPO (PCT)
Prior art keywords
stiffener
bridge
stiffener plate
disposed
clamp plates
Prior art date
Application number
PCT/US2021/041459
Other languages
English (en)
Inventor
Benjamin M. Johnston
Jae Myung Yoo
Vasuman Ghanapaati SRIRANGARAJAN
Preston Fung
David Corriveau
Cheuk Lee
Jorge ARELLANO
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to KR1020237044100A priority Critical patent/KR20240013769A/ko
Priority to CN202280037478.4A priority patent/CN118119893A/zh
Priority to TW111119244A priority patent/TW202304276A/zh
Publication of WO2022250714A1 publication Critical patent/WO2022250714A1/fr

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Definitions

  • the instant specification generally relates to electronic device fabrication. More specifically, the instant specification relates to bridge stiffeners for increased digital photolithography precision.
  • Photolithography is used in the manufacturing of semiconductor devices and display devices, such as flat panel display devices.
  • flat panel display devices include thin- film display devices, such as, e.g., liquid crystal display (LCD) devices and organic light emitting diode (OLED) display devices.
  • LCD liquid crystal display
  • OLED organic light emitting diode
  • Large-area substrates can be used to manufacture flat panel display devices for use with computers, touch panel devices, personal digital assistants (PDAs), cell phones, television monitors, etc.
  • a bridge stiffener assembly includes a first stiffener plate and a second stiffener plate, a plurality of clamp plates for securing the first stiffener plate and the second stiffener plate to a bridge structure of a digital lithography system.
  • the plurality of clamp plates includes a first pair of clamp plates disposed on a first end of the first stiffener plate, a second pair of clamp plates disposed on a second end of the first stiffener plate and a first end of the second stiffener plate, and a third pair of clamp plates disposed on a second end of the second stiffener plate.
  • the bridge stiffener assembly further includes a plurality of reinforcement beams comprising a first reinforcement beam disposed on the first pair of clamp plates, a second reinforcement beam disposed on the second pair of clamp plates, and a third reinforcement beam disposed on the third pair of clamp plates.
  • a digital photolithography system includes an exposure unit area, a bridge structure comprising a first bridge, a second bridge and a third bridge each disposed on a base, a first bridge stiffener assembly secured to the bridge structure, and a second bridge stiffener assembly secured to the bridge structure.
  • the first bridge stiffener assembly includes a first stiffener plate and a second stiffener plate disposed between an end of the bridge structure and a first end of the exposure unit area
  • the second bridge stiffener assembly includes a third stiffener plate and a fourth stiffener plate each adjacent to a second end of the exposure unit area.
  • a method in accordance with yet another embodiment, includes placing a first set of stiffener plates and a second set of stiffener plates on a bridge structure within a digital lithography system, and forming a first bridge stiffener assembly from the first set of stiffener plates and a second bridge stiffener assembly from the second set of stiffener plates.
  • the bridge structure includes a first bridge, a second bridge and a third bridge
  • the first set of stiffener plates includes a first stiffener plate placed on the first bridge and the second bridge and a second stiffener plate placed on the second bridge and the third bridge
  • the second set of stiffener plates includes a third stiffener plate placed on the first bridge and the second bridge and a fourth stiffener plate placed on the second bridge and the third bridge.
  • FIGS. 1A and IB are perspective views of a digital photolithography system including a bridge stiffener, in accordance with some embodiments.
  • FIG. 2 is a perspective view of a first bridge stiffener assembly, in accordance with some embodiments.
  • FIG. 3 is a perspective view of a second bridge stiffener assembly, in accordance with some embodiments.
  • FIGS. 4A-4E illustrate an example top-down view of a process flow of inserting stiffener plates of a bridge stiffener assembly within a digital lithography system, in accordance with some embodiments.
  • FIG. 5 is a flowchart of an example method for integrating bridge stiffeners into a digital lithography system, in accordance with some embodiments.
  • FIG. 6 is a flowchart of an example method for forming a first bridge stiffener assembly from a first set of stiffener plates and a second bridge stiffener assembly from a second set of stiffener plates during the method of FIG. 5, in accordance with some embodiments.
  • Digital lithography can be used to generate a digitally aligned etch mask onto a substrate surface without the need for a mask (e.g., maskless lithography).
  • a droplet source e.g., inkjet source
  • digital lithography can be used to perform large-area patterning during electronic device fabrication.
  • a digital lithography system can include an array of precision optical modules or exposure units mounted to an optical support structure, or bridge structure.
  • the bridge structure generally includes a number of disjoint or disconnected bridges. That is, the bridge structure is generally not a monolithic structure.
  • the bridge structure can overhang a motion control system that transports glass or other suitable material for processing within the digital lithography system. As the motion control system supports the bridge structure, there could be induced vibrations (e.g., micro-vibrations) transmitted to the optical modules that could affect performance.
  • bridge stiffener assemblies for increased digital photolithography precision.
  • the bridge stiffener assemblies described herein can be mounted to the top of the bridge structure to clamp down on the bridges, thereby reducing and/or removing induced vibrations (e.g., micro-vibrations) and improving digital lithography system performance.
  • the bridge support stiffeners can reduce the induced vibrations by at least 40%. Due to the array of optical modules or exposure units present, there can be limited space for the bridge stiffener assemblies on the bridge structure. By placing bridge stiffener assemblies outside of the optical area and connecting the bridges of the bridge structure, the disconnected bridges can be effectively clamped down to act as a monolithic structure and reduce and/or remove induced vibrations.
  • FIGS. 1A-1B are perspective views of a digital lithography system (“system”) 100, in accordance with some embodiments.
  • the system 100 includes a ladder 110, a bridge structure including a base 120 and a number of bridges 130-1 through 130-3, an optical module or exposure unit (“EYE”) area 140 including a number of EYE cable strain relief assemblies 142, an EYE stiffener base platel44, an EYE controller box 150, an EYE bracket beam or tube 155-1 spanning across the bridge 130-1 and an EYE bracket beam or tube 155-2 spanning across the bridge 130-3.
  • EYE optical module or exposure unit
  • the EYE cable strain relief assembly 142 effectively shorts EYE cable vibrations coming to the bridge to reduce or eliminate vibrations transmitted through the EYEs via the cables.
  • the EYE stiffener base plate 144 provides support for the cable channel used for EYE stiffener pneumatic lines and sensors.
  • the EYE controller box 150 is the pneumatics control box for the EYE stiffeners.
  • the EYE bracket beams 155-1 and 155-2 are mounting structures for the EYE cable strain relief assemblies 142.
  • the bridges 130-1 through 130-3 are disjoint or disconnected from the base 120.
  • the bridge structure can include some other number of bridges, such as more bridges or fewer bridges than illustrated in FIGs. 1A-1B.
  • the system 100 further includes a first bridge stiffener assembly on the side nearest to the ladder 110 (“ladder side”), and a second bridge stiffener assembly on the side opposite the ladder side (“anti-ladder side”). More specifically, as shown, the first bridge stiffener assembly includes stiffener plates 160-1 and 160-2, reinforcement beams or tubes 162-1 through 162-3, and fasteners (e.g., screws, bolts and/or rods) 164-1 through 164-3 disposed within holes of the reinforcement beams 162-1 through 162-3, respectively.
  • the second bridge stiffener assembly includes stiffener plates 170-1 and 170-2, reinforcement beams 162-1 through 162-3, and fasteners 164-1 through 164-3 disposed within holes of the reinforcement beams 162-1 through 162-3, respectively.
  • stiffeners plates 160-1, 160- 2, 170-1 and 170-2 are clamped down to the bridges 130-1 through 130-3 to reduce and/or remove inducted vibrations (e.g., micro-vibrations) that would be generated by the bridges 130-1 through 130-3.
  • inducted vibrations e.g., micro-vibrations
  • the stiffener plates 160-1 and 160-2 of the first bridge stiffener and the stiffener plates 170-1 and 170-2 of the second bridge stiffener can have a geometry designed to fit securely within the system 100.
  • the stiffener plates 160-1 and 160-2 have a rectangular shape with dimensions defined by the EYE area 140 and the outer edges of the bridges 130-1 through 130-3.
  • the stiffener plate 170-1 has a trapezoidal shape with dimensions defined by the EYE area 140 and a region adjacent to the EYE controller box 150
  • the stiffener plate 170-2 has a rectangular shape with dimensions defined by the EYE area 140 and the EYE controller box 150.
  • FIG. 2 is a perspective view of a bridge stiffener assembly (“assembly”) 200, in accordance with some embodiments.
  • the assembly 200 can be a ladder side bridge stiffener assembly, as described above with reference to FIG. 1.
  • the assembly 200 includes a pair of stiffener plates 210-1 and 210-2.
  • the stiffener plates 210-1 and 210-2 can be formed to have a geometry and/or size suitable for placement within the ladder side of the digital lithography system shown in FIG. 1.
  • each of the stiffener plates 210-1 and 210-1 can be a rectangular prism or cuboid with suitable length, width and height (i.e., thickness) dimensions.
  • each of the stiffener plates 210-1 and 210-2 can range between about 800 millimeters (mm) and about 960 mm
  • the width of each of the stiffener plates 210-1 and 210-2 can range between about 550 mm and about 710 mm
  • the thickness of each of the stiffener plates 210-1 and 210-2 can range between about 15 mm and about 35 mm.
  • each of the stiffener plates 210-1 and 210-2 can have dimensions of about 880 mm x about 630 mm x about 25 mm.
  • such embodiments should not be considered limiting.
  • the stiffener plates 210-1 and 210-2 can be formed from a material having suitable material properties for use within a digital lithography system. In some embodiments, the stiffener plates 210-1 and 210-2 can be formed from the same material. In some embodiments, the stiffener plates 210-1 and 210-2 can each be formed from a different material.
  • the stiffener plates 210-1 and 210-2 can be formed from a material having a suitable coefficient of thermal expansion (CTE).
  • CTE coefficient of thermal expansion
  • the stiffener plates 210-1 and 210-2 can have a CTE that can sufficiently match the base structure so that it can grow and shrink with the rest of the stiffener plate assembly.
  • the stiffener plates 210-1 and 210-2 can be formed from a material having a CTE ranging from about 0 parts per million (ppm) to about 25 ppm (i.e., about 25 x 10 6 m/(m K) to about 25 x 10 6 m/(m K)).
  • At least one of the stiffener plates 210-1 and 210-2 can be formed from granite. In some embodiments, at least one of the stiffener plates 210-1 and 210-2 can be formed from steel (e.g., stainless steel). However, such embodiments should not be considered limiting, and the stiffener plates 210-1 and 210-2 can be formed from any suitable material(s) having suitable material properties in accordance with the embodiments described herein.
  • the stiffener plates 210-1 and 210-2 can be of any suitable mass or weight in accordance with the embodiments described herein. The mass or weight of the stiffener plates 210-1 and 210-2 should be chosen to be sufficiently high to enable sufficient bridge stiffening, but below an upper bound defined by system specifications.
  • a suitable lifting tool e.g., crane
  • a suitable lifting tool designed to lift and place the stiffener plates 210-1 and 210-2 within the digital lithography system may have a mass or weight limit.
  • each of the stiffener plates 210-1 and 210-2 has a mass ranging between about 100 kilogram (kg) and about 113 kg.
  • each of the stiffener plates 210-1 and 210-2 can have a mass of about 110 kg.
  • the assembly 200 includes a lifting hook hole 215-1 formed within the stiffener plate 210-1 and a lifting hook hole 215-2 formed within the stiffener plate 210-2.
  • the lifting hook holes 215-1 and 215-2 an attach point to the lifting tool.
  • the assembly 200 includes a number of reinforcement beams or tubes 220-240.
  • Reinforcement beam 220 is secured to a first end of the stiffener plate 210-1 by a pair of clamp plates 222-1 and 222-2
  • reinforcement beam 230 is secured to a second end of the stiffener plate 210-1 and to a first end of the stiffener plate 210-2 by a pair of clamp plates 232-1 and 232-2
  • reinforcement beam 240 is secured to a second end of the stiffener plate 210-2 by a pair of clamp plates 242-1 and 242-2.
  • Holes 224-244 are formed through respective ones of the reinforcement beams 220-240.
  • a mounting bracket 226 is placed about the first end of the stiffener plate 210-1 and a mounting bracket 246 is placed about the second end of the stiffener plate 210-2.
  • the holes 224-244 are each designed to receive a fastener (e.g., screw, bolt and/or rod.
  • a fastener can go through the hole 224 and a hole within the mounting bracket 226 into the bridge structure, a fastener can go through the hole 234 into the bridge structure, and a fastener can go through the hole 244 and a hole within the mounting bracket 246 into the bridge structure.
  • Components 222-1, 222-2, 230-240, 232-1, 232-2, 242-1, 242-2, 226 and 246 can be formed from any suitable material(s) in accordance with the embodiments described herein.
  • one or more of these components can be formed from steel (e.g., stainless steel). However, this should be not be considered limiting.
  • FIG. 3 is a perspective view of a bridge stiffener assembly (“assembly”) 300, in accordance with some embodiments.
  • the assembly 300 can be an anti-ladder side bridge stiffener assembly, as described above with reference to FIG. 1.
  • the assembly 300 includes a pair of stiffener plates 310-1 and 310-2.
  • the stiffener plates 310-1 and 310-2 can be formed to have a geometry and/or size suitable for placement within the ladder side of the digital lithography system shown in FIG. 1.
  • the stiffener plate 310-1 can be a trapezoidal prism with suitable length, width and height (i.e. thickness) dimensions
  • 310-1 can be a rectangular prism or cuboid with suitable length, width and height (i.e., thickness) dimensions.
  • the trapezoidal prism is a right trapezoidal prism.
  • the length of the stiffener plate 310-1 (corresponding to the non-diagonal leg of the right trapezoidal prism) can range between about 550 mm and about 710 mm
  • the width of the stiffener plate 310-1 (corresponding to the longer one of the bases of the right trapezoidal prism orthogonal to the vertical leg) can range between about 755 mm and about 915 mm
  • the thickness of the stiffener plate 310-1 can range between about 30 mm and about 70 mm.
  • the stiffener plate 310-1 can have dimensions of about 630 mm x about 835 mm x about 50 mm. However, such embodiments should not be considered limiting.
  • the length of the stiffener plate 310-2 can range between about 550 mm and about 710 mm
  • the width of the stiffener plate 310-2 can range between about 400 mm and about 560 mm
  • the thickness of the stiffener plate 310-2 can range between about 15 mm and about 35 mm.
  • the stiffener plate 310-2 can have dimensions of about 630 mm x about 480 mm x about 25 mm. However, such embodiments should not be considered limiting.
  • the stiffener plates 310-1 and 310-2 can be formed from a material having suitable material properties for use within a digital lithography system. In some embodiments, the stiffener plates 310-1 and 310-2 can be formed from the same material. In some embodiments, the stiffener plates 310-1 and 310-2 can each be formed from a different material.
  • the stiffener plates 310-1 and 310-2 can be formed from a material having a suitable CTE.
  • at least one of the stiffener plates 310-1 and 310-2 can be formed from granite.
  • at least one of the stiffener plates 310-1 and 310-2 can be formed from steel (e.g., stainless steel).
  • the stiffener plates 310-1 and 310-2 can be formed from any suitable material(s) having suitable material properties in accordance with the embodiments described herein.
  • the stiffener plates 310-1 and 310-2 can be of any suitable mass or weight in accordance with the embodiments described herein.
  • the mass or weight of the stiffener plates 310-1 and 310-2 should be chosen to be sufficiently high to enable sufficient bridge stiffening, but below an upper bound defined by system specifications.
  • a crane or other lifting tool designed to lift the stiffener plates 310-1 and 310-2 within the digital lithography system may have a mass or weight limit.
  • each of the stiffener plates 310-1 and 310-2 has a mass ranging between about 100 kilogram (kg) and about 113 kg.
  • each of the stiffener plates 310-1 and 310-2 can have a mass of about 110 kg.
  • the assembly 300 includes a lifting hook hole 3215-1 formed within the stiffener plate 310-1 and a lifting hook hole 315-2 formed within the stiffener plate 310-2.
  • the lifting hook holes 315-1 and 315-2 serves as attach points to enable a crane or other lifting tool to lift the corresponding stiffener plates 310-1 and 310-2 within the digital lithography system.
  • the assembly 300 includes a number of reinforcement beams or tubes 320-240.
  • Reinforcement beam 320 is secured to a first end of the stiffener plate 310-1 by a pair of clamp plates 322-1 and 322-2, reinforcement beam 330 is secured to a second end of the stiffener plate 310-1 and to a first end of the stiffener plate 310-2 by a pair of clamp plates 332-1 and 332-2, and reinforcement beam 340 is secured to a second end of the stiffener plate 310-2 by a pair of clamp plates 342-1 and 342-2.
  • Holes 324-344 are formed through respective ones of the reinforcement beams 320-340.
  • a mounting bracket 326 is placed about the first end of the stiffener plate 310-1 and a mounting bracket 346 is placed about the second end of the stiffener plate 310-2.
  • the holes 324-344 are each designed to receive a fastener (e.g., screw, bolt and/or rod).
  • a fastener can go through the hole 324 and a hole within the mounting bracket 326 into the bridge structure
  • a fastener can go through the hole 334 into the bridge structure
  • a fastener can go through the hole 344 and a hole within the mounting bracket 346 into the bridge structure.
  • Components 322-1, 322-2, 330-240, 332-1, 332-2, 342-1, 342-2, 326 and 346 can be formed from any suitable material(s) in accordance with the embodiments described herein.
  • one or more of these components can be formed from steel (e.g., stainless steel). However, this should be not be considered limiting.
  • FIGS. 4A-4E depict a top-down view of a process flow of inserting stiffener plates of a bridge stiffener assembly within a digital lithography system 400 (“system”), in accordance with some embodiments.
  • the stiffener plates are shown as being components of an anti-ladder side bridge stiffener assembly (e.g., the stiffener plates 170-1 and 170-2 described above with reference to FIGS. 1A-1B and/or the stiffener plates 310-1 and 310- 2 described above with reference to FIG. 3).
  • stiffener plates of a ladder side bridge assembly e.g., the stiffener plates 160-1 and 160-2 described above with reference to FIGS. 1A-1B and/or the stiffener plates 210-1 and 210-2 described above with reference to FIG. 2.
  • FIG. 4A shows the placement of a stiffener plate 410-1 within the system 400 via a suitable lifting tool (e.g., crane) (not shown).
  • a suitable lifting tool e.g., crane
  • the stiffener plate 410-1 is placed between an EYE bracket beam or tube 420-1 and an EYE stiffener controller cable duct 430-1 corresponding to an EYE stiffener controller 450.
  • the system 400 further includes a service bridge 440.
  • the EYE stiffener controller cable duct 430-1 can be used to carry the pneumatics and sensor cables for the stiffener assemblies.
  • FIG. 4B shows the sliding or translation of the stiffener plate 410-1 below the service bridge 440.
  • FIG. 4C shows the sliding or translation of the stiffener plate 410-1 below the EYE stiffener controller cable duct 430-1.
  • the diagonal leg of the right trapezoidal prism shape of the stiffener plate 410-1 enables sufficient clearance between the stiffener plate 410-1 and the EYE controller 450.
  • FIG. 4D shows the placement of a stiffener plate 410-2 within the system 400 via a suitable lifting tool (e.g., crane) (not shown).
  • a suitable lifting tool e.g., crane
  • the stiffener plate 410-2 is placed between the EYE stiffener controller cable duct 430-1 and an EYE stiffener controller cable duct 430-2 (similar to the EYE stiffener controller cable duct 430-1).
  • the system 400 further includes an EYE bracket beam or tube 420-2.
  • the service bridge 440 and the EYE stiffener controller 450 are also shown.
  • FIG. 4E shows the sliding or translation of the stiffener plate 410-2 below the EYE stiffener controller cable duct 430-2.
  • FIG. 5 depicts a flow diagram of an example method 500 for integrating bridge stiffeners into a digital lithography system, in accordance with some embodiments.
  • a first set of stiffener plates and a second set of stiffener plates are placed on a bridge structure within a digital lithography system.
  • the bridge structure includes a number of bridges disposed on a base structure.
  • the bridge structure can include a first bridge, a second bridge and a third bridge.
  • the first set of stiffener plates can include a first stiffener plate placed on the first bridge and the second bridge, and a second stiffener plate placed on the second bridge and the third bridge.
  • a gap can be formed between the first and second stiffener plates corresponding to a region above the second bridge.
  • the second set of stiffener plates can include a third stiffener plate placed on the first bridge and the second bridge, and a fourth stiffener plate placed on the second bridge and the third bridge. Similar to the first set of stiffener plates, a gap can be formed between the third and fourth stiffener plates corresponding to a region above the second bridge. Overlap of the stiffener plates should be substantially equal on the bridge structure. Special precautions can be needed for the second set of stiffener plates, as they may need to be side shifted.
  • the first set of stiffener plates can include a pair of stiffener plates associated with a “ladder side” of the digital lithography system and the second set of stiffener plates can include a pair of stiffener plates associated with an “anti-ladder side” of the digital lithography system.
  • the first stiffener plate can be placed on the first bridge and the second bridge flush with the ladder end of the first and second bridges, and the second stiffener plate can be placed on the second bridge and the third bridge flush with the ladder end of the first and second bridges.
  • the third stiffener plate can be placed on the first bridge and the second bridge flush with the anti-ladder end of the first and second bridges
  • the fourth stiffener plate can be placed on the second bridge and the third bridge flush with the ladder end of the first and second bridges.
  • the first and second stiffener plates each have a rectangular prism or cuboid shape
  • the third stiffener plate has a trapezoidal prism (e.g., right trapezoidal prism) shape
  • the fourth stiffener plate has a rectangular prism or cuboid shape.
  • each of the stiffener plates of the first set and the second set can be formed from the same material.
  • one or more of the stiffener plates can be formed from a different material.
  • the first and second sets of stiffener plates can each include stiffener plates formed from a material having a suitable CTE.
  • at least one of the stiffener plates can be formed from granite.
  • at least one of the stiffener plates can be formed from steel (e.g., stainless steel).
  • the stiffener plates can be formed from any suitable material(s) having suitable material properties in accordance with the embodiments described herein. Further details regarding the first and second sets of stiffener plates are described above with reference to FIGS. 1-4E.
  • a first bridge stiffener assembly is formed from the first set of stiffener plates and a second bridge stiffener assembly is formed from the second set of stiffener plates. Further details regarding the first and second bridge stiffener assemblies are described above with reference to FIGs. 1-4E, and further details regarding the formation of the first and second bridge stiffener assemblies will now be described below with reference to FIG. 6.
  • FIG. 6 depicts a flow diagram of an example method 600 for forming a first bridge stiffener assembly from a first set of stiffener plates and a second bridge stiffener assembly from a second set of stiffener plates, in accordance with some embodiments.
  • the first and second sets of stiffener plates can be placed within a digital lithography system as described above with reference to FIG. 5.
  • sets of spacers are installed at respective locations on the first and second sets of stiffener plates. More specifically, a first set of spacers is installed on the first stiffener plate, a second set of spacers is installed on the second stiffener plate, a third set of spacers is installed on the third stiffener plate, and a fourth set of spacers is installed on the fourth stiffener plate.
  • the spacers include shims. The purpose of the spacers is to ensure contact with the underlying bridge structure.
  • the first set of spacers can include four spacers each disposed at a respective comer of the first stiffener plate
  • the second set of spacers can include four spacers each disposed at a respective corner of the second stiffener plate
  • the third set of spacers can include four spacers each disposed at a respective corner of the third stiffener plate
  • the fourth set of spacers can include four spacers each disposed at a respective comer of the fourth stiffener plate. If one of the comers of a stiffener plate is not making contact with the bridge structure, additional spacers can be added to the stiffener plate. To test whether one of the comers of a stiffener plate is not making contact with the bridge structure, a light can be shined beneath the stiffener plate. A spacer can then be added in each location where light is determined to be visible.
  • a set of support stiffener brackets is secured to beams of the digital lithography system.
  • existing brackets of the digital lithography system can be removed and replaced with the support stiffener brackets.
  • Existing fasteners e.g., screws, bolts and/or rods
  • fasteners suitable for the support stiffener brackets can be replaced with fasteners suitable for the support stiffener brackets.
  • a first set of clamp plates and a second set of clamp plates are assembled to secure the first set of stiffener plates to the bridge structure and the second set of stiffener plates to the bridge structure, respectively.
  • Assembling the clamp plates can include placing the first set of clamp plates on the first set of stiffener plates and the second set of clamp plates on the second set of stiffener plates, placing bars on the clamp plates of the first and second sets of clamp plates, and installing fasteners to secure the first and second sets of clamp plates to respective ones of the first and second sets of stiffener plates.
  • the first set of clamp plates can include a first pair of clamp plates formed on a first end of the first stiffener plate, a second pair of clamp plates formed on a second end of the first stiffener plate and a first end of the second stiffener plate (above the gap), and a third pair of clamp plates formed on a second end of the second stiffener plate.
  • the second set of clamp plates can include a fourth pair of clamp plates formed on a first end of the third stiffener plate, a fifth pair of clamp plates formed on a second end of the third stiffener plate and a first end of the fourth stiffener plate (above the gap), and a sixth pair of clamp plates formed on a second end of the fourth stiffener plate.
  • the fasteners securing the clamp plates can be installed sufficiently loose. Once the clamp plates and bars are sufficiently aligned within the digital lithography system, the fasteners can be sufficiently tightened. Further details regarding forming a first bridge stiffener assembly from a first set of stiffener plates and a second bridge stiffener assembly from a second set of stiffener plates are described above with reference to FIGS. 1-5. [0050] The preceding description sets forth numerous specific details such as examples of specific systems, components, methods, and so forth, in order to provide a good understanding of several embodiments of the present invention. It will be apparent to one skilled in the art, however, that at least some embodiments of the present invention may be practiced without these specific details.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Un ensemble raidisseur de pont comprend une première plaque de raidisseur et une seconde plaque de raidisseur, et des plaques de serrage servant à fixer la première plaque de raidisseur et la seconde plaque de raidisseur à une structure de pont d'un système de lithographie numérique. Les plaques de serrage comprennent une première paire de plaques de serrage disposées sur une première extrémité de la première plaque de raidisseur, une deuxième paire de plaques de serrage disposées sur une seconde extrémité de la première plaque de raidisseur et une première extrémité de la seconde plaque de raidisseur, et une troisième paire de plaques de serrage disposées sur une seconde extrémité de la seconde plaque de raidisseur. L'ensemble raidisseur de pont comprend en outre des poutres de renforcement dont une première poutre de renforcement disposée sur la première paire de plaques de serrage, une deuxième poutre de renforcement disposée sur la deuxième paire de plaques de serrage, et une troisième poutre de renforcement disposée sur la troisième paire de plaques de serrage.
PCT/US2021/041459 2021-05-25 2021-07-13 Raidisseurs de pont pour une précision de photolithographie numérique accrue WO2022250714A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020237044100A KR20240013769A (ko) 2021-05-25 2021-07-13 증가된 디지털 포토리소그래피 정밀도를 위한 브릿지 보강재들
CN202280037478.4A CN118119893A (zh) 2021-05-25 2021-07-13 用于提高数字光刻精确度的网桥加固构件
TW111119244A TW202304276A (zh) 2021-05-25 2022-05-24 用於增進數位微影蝕刻精確度的橋接器加固構件

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IN202141023270 2021-05-25
IN202141023270 2021-05-25

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WO2022250714A1 true WO2022250714A1 (fr) 2022-12-01

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KR (1) KR20240013769A (fr)
CN (1) CN118119893A (fr)
TW (1) TW202304276A (fr)
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6002466A (en) * 1996-06-29 1999-12-14 Deutsches Zentrum Fuer Luft -Und Raumfahrt E.V. Lithography exposure device
US20060098175A1 (en) * 2004-11-08 2006-05-11 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20180321595A1 (en) * 2015-11-03 2018-11-08 Orbotech Ltd. Stitchless direct imaging for high resolution electronic patterning
US20200333713A1 (en) * 2017-12-28 2020-10-22 Onto Innovation, Inc Separated axis lithographic tool

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6002466A (en) * 1996-06-29 1999-12-14 Deutsches Zentrum Fuer Luft -Und Raumfahrt E.V. Lithography exposure device
US20060098175A1 (en) * 2004-11-08 2006-05-11 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20180321595A1 (en) * 2015-11-03 2018-11-08 Orbotech Ltd. Stitchless direct imaging for high resolution electronic patterning
US20200333713A1 (en) * 2017-12-28 2020-10-22 Onto Innovation, Inc Separated axis lithographic tool

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CN118119893A (zh) 2024-05-31
KR20240013769A (ko) 2024-01-30

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