WO2022206041A1 - 光伏硅片清洗设备 - Google Patents

光伏硅片清洗设备 Download PDF

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Publication number
WO2022206041A1
WO2022206041A1 PCT/CN2021/139132 CN2021139132W WO2022206041A1 WO 2022206041 A1 WO2022206041 A1 WO 2022206041A1 CN 2021139132 W CN2021139132 W CN 2021139132W WO 2022206041 A1 WO2022206041 A1 WO 2022206041A1
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WIPO (PCT)
Prior art keywords
water supply
sealing
fixing
limit
plate
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PCT/CN2021/139132
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English (en)
French (fr)
Inventor
钱诚
李刚
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江苏亚电科技有限公司
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Publication of WO2022206041A1 publication Critical patent/WO2022206041A1/zh

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S40/00Components or accessories in combination with PV modules, not provided for in groups H02S10/00 - H02S30/00
    • H02S40/10Cleaning arrangements
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Definitions

  • the invention relates to the field of photovoltaic silicon wafer cleaning, in particular to photovoltaic silicon wafer cleaning equipment.
  • the purpose of the present invention is to provide photovoltaic silicon wafer cleaning equipment in order to solve the above problems.
  • the present invention realizes above-mentioned purpose through following technical scheme:
  • Photovoltaic silicon wafer cleaning equipment including a sealing mechanism, a fixing mechanism, a front-end limiting mechanism, and a rear-end limiting mechanism, the sealing mechanism is provided with the fixing mechanism, and the front end of the fixing mechanism is connected to the the sealing mechanism, the rear end of the fixing mechanism is connected to the sealing mechanism through the rear end limiting mechanism;
  • the sealing mechanism includes a sealing box, a sealing cover, a central shaft, and a cover-opening cylinder.
  • the upper end of the sealing box is provided with two sealing covers, the front end of the sealing cover is connected with the central shaft, and the power end of the central shaft is are connected with the cover opening cylinder, and the lower end of the sealing box is provided with a water supply pipeline;
  • the fixing mechanism includes a side plate, a fixing rod, a limit block, and a spout, six of the fixing rods are arranged between the two side plates, and the limit blocks are installed on the inner side of the fixing rods.
  • the spout is provided on the limit block, and the rear end of the fixing rod is provided with a joint;
  • the front-end limit mechanism includes a front-end center limit block, a front-end positioning block, a front-end fixing plate, and a front-end limit groove.
  • the front-end center limit block is installed at the front end of the side plate, and both sides of the front-end center limit block are
  • the front-end positioning block is provided, the front-end fixing plate is arranged on the front side of the side plate, and the front-end limiter is provided between the front-end center limit block, the front-end positioning block and the front-end fixing plate.
  • a groove, a trigger switch is provided on the inner bottom of the front-end center limit block and the corresponding front-end limit groove;
  • the rear limit mechanism includes a rear limit plate, a rear limit groove, a water supply seat, and a matching port.
  • the rear limit plate is provided with the rear limit groove, and the rear limit The groove corresponds to the joint, the water supply seat is disposed on the rear side of the rear end limit plate, the fitting port is provided between the water supply seat and the joint, and the rear limit plate and the water supply seat are provided.
  • a guide post is arranged between the seats, a matching screw is connected to the lower end of the water supply seat, a servo motor is installed at the power end of the matching screw, one side of the lower end of the water supply seat is connected to the water supply pipeline through a water lead pipe, and the matching port
  • a mating valve is provided between the interior and the joint.
  • the sealing cover is connected to the sealing box through the central shaft, and the central shaft is connected to the cover opening cylinder through a coupling.
  • the sealing cover performs a sealing function
  • the sealing box performs a supporting and sealing function
  • the fixing rods are connected to the side plates by bolts, and the joints are connected to the fixing rods by screws.
  • the fixing rod plays the role of supporting and transmitting the cleaning liquid
  • the side plate plays the role of installing and supporting.
  • the front-end center limit block and the front-end positioning block are connected to the side plate by bolts
  • the front-end fixing plate is connected to the sealing box by bolts
  • the trigger switch is embedded in the front-end fixing plate.
  • the front-end center limit block and the front-end positioning block play a positioning and limiting role, and cooperate with the front-end fixing plate to ensure the overall stability of the fixing mechanism.
  • the rear limit groove is integrally formed on the rear limit plate
  • the water supply seat is slidably connected to the sealing box
  • the guide post is connected to the rear limit plate by bolts
  • the guide A post is slidably connected to the water supply seat.
  • the rear end limiting groove plays a limiting role, and the guide post is used to match the water supply seat.
  • the matching screw is connected to the water supply seat through a thread
  • the matching port is integrally formed on the water supply seat
  • the matching valve is connected to the water supply seat through a screw thread.
  • the water supply seat can slide back and forth, so that the fitting port and the fitting valve fit with the joint, so as to transmit the cleaning fluid.
  • a sealing ring is installed inside the matching port at the front end of the matching valve for matching with the joint.
  • This arrangement ensures hermeticity.
  • the use of the front-end limiting mechanism and the rear-end limiting mechanism can provide effective support and limit when placing the fixing mechanism inside the sealing mechanism, thereby ensuring the overall stability of the fixing mechanism during placement and use;
  • the joint can be quickly connected, thereby improving the cleaning efficiency.
  • FIG. 1 is a schematic diagram of the external structure of the photovoltaic silicon wafer cleaning equipment according to the present invention.
  • FIG. 2 is a schematic diagram of the internal structure of the photovoltaic silicon wafer cleaning equipment according to the present invention.
  • FIG. 3 is a schematic structural diagram of the relative positions of the sealing mechanism, the fixing mechanism and the front-end limiting mechanism of the photovoltaic silicon wafer cleaning equipment according to the present invention
  • FIG. 4 is a schematic diagram of the structure of the rear end limit groove of the photovoltaic silicon wafer cleaning equipment according to the present invention.
  • FIG. 5 is a schematic view of the structure of the front-end limit groove of the photovoltaic silicon wafer cleaning equipment according to the present invention.
  • FIG. 6 is a schematic diagram of the internal structure of the mating port of the photovoltaic silicon wafer cleaning equipment according to the present invention.
  • the terms “installed”, “connected” and “connected” should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements.
  • installed should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements.
  • the photovoltaic silicon wafer cleaning equipment includes a sealing mechanism 1, a fixing mechanism 2, a front-end limiting mechanism 3, and a rear-end limiting mechanism 4.
  • the sealing mechanism 1 is provided with a fixing mechanism 2, and the fixing mechanism 2
  • the front end is connected to the sealing mechanism 1 through the front end limiting mechanism 3, and the rear end of the fixing mechanism 2 is connected to the sealing mechanism 1 through the rear end limiting mechanism 4;
  • the sealing mechanism 1 includes a sealing box 11, a sealing cover 12, a central shaft 13, and a cover opening cylinder 14.
  • the upper end of the sealing box 11 is provided with two sealing covers 12, the front end of the sealing cover 12 is connected with a central shaft 13, and the power ends of the central shaft 13 are connected
  • the fixing mechanism 2 includes a side plate 21 , a fixing rod 22 , a limit block 23 and a spout 24 .
  • Six fixing rods 22 are arranged between the two side plates 21 , and a limit block 23 is installed on the inner side of the fixed rod 22 .
  • a spout 24 is provided on the top, and a joint 25 is provided at the rear end of the fixing rod 22;
  • the front-end limit mechanism 3 includes a front-end center limit block 31 , a front-end positioning block 32 , a front-end fixing plate 33 , and a front-end limit groove 34 . Both are provided with a front end positioning block 32, a front end fixing plate 33 is arranged on the front side of the side plate 21, a front end limit slot 34 is provided between the front end center limit block 31, the front end positioning block 32 and the front end fixing plate 33, and the front end center limit A trigger switch 35 is provided on the inner bottom of the block 31 and the corresponding front limit groove 34;
  • the rear limit mechanism 4 includes a rear limit plate 41 , a rear limit groove 42 , a water supply seat 43 and a matching port 44 .
  • the rear limit plate 41 is provided with a rear limit groove 42 .
  • the rear limit groove 42 corresponds to the joint 25, a water supply seat 43 is arranged on the rear side of the rear end limit plate 41, a fitting port 44 is arranged between the water supply seat 43 and the joint 25, and a guide post 45 is arranged between the rear end limit plate 41 and the water supply seat 43
  • the lower end of the water supply seat 43 is connected with a matching screw 46, the power end of the matching screw 46 is installed with a servo motor 47, the lower end of the water supply seat 43 is connected to the water supply pipeline 15 through a water lead pipe 48, and a matching port 44 is provided between the inside and the joint 25. valve 49.
  • the sealing cover 12 is connected to the sealing box 11 through the central shaft 13, the central shaft 13 is connected to the cover opening cylinder 14 through a coupling, the sealing cover 12 plays a sealing role, and the sealing box 11 plays a supporting and sealing role;
  • the fixing rod 22 is connected by bolts
  • the side plate 21 and the joint 25 are connected to the fixing rod 22 by screws, the fixing rod 22 plays the role of supporting and transmitting the cleaning fluid, and the side plate 21 plays the role of installation and support;
  • the front-end fixing plate 33 is connected to the sealing box 11 by bolts, the trigger switch 35 is embedded in the front-end fixing plate 33, the front-end center limit block 31 and the front-end positioning block 32 play the role of positioning and limiting, and cooperate with the front-end fixing plate 33 to ensure the fixing mechanism 2
  • the rear limit groove 42 is integrally formed on the rear limit plate 41, the water supply seat 43 is slidably connected to the sealing box 11, the guide post 45 is connected to the rear limit plate 41 by bolts, and the guide post 45 is slidably
  • the rear limit groove 42 plays a limiting role
  • the guide post 45 is used to cooperate with the water supply seat 43;
  • the matching screw 46 is connected to the water supply seat 43 through a thread,
  • the matching port 44 is integrally formed in the water supply seat 43, and
  • the matching valve 49 is connected to the water supply through a screw thread.
  • the seat 43, the water supply seat 43 can slide back and forth, so that the fitting port 44 and the fitting valve 49 are matched with the joint 25, so as to transmit the cleaning fluid;
  • the inside of the fitting port 44 is located at the front end of the fitting valve 49.
  • a sealing ring is installed for fitting the joint 25, thereby Guaranteed tightness.

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  • Cleaning By Liquid Or Steam (AREA)
  • Photovoltaic Devices (AREA)

Abstract

提供一种光伏硅片清洗设备,包括密封机构(1)、固定机构(2)、前端限位机构(3)、后端限位机构(4),密封机构(1)内部设置有固定机构(2),固定机构(2)前端通过前端限位机构(3)连接密封机构(1),固定机构(2)后端通过后端限位机构(4)连接密封机构(1)。利用前端限位机构(3)和后端限位机构(4)能够在将固定机构(2)放置在密封机构(1)内侧时提供有效的支撑和限位,从而保证固定机构(2)整体在放置和使用时的稳定性,利用供水座(43)前后平移能够快速对接接头,从而提高清洁的工作效率。

Description

光伏硅片清洗设备 技术领域
本发明涉及光伏硅片清洗领域,特别是涉及光伏硅片清洗设备。
背景技术
目前,在光伏硅片的生产过程中,需要对光伏硅片进行深度清洗,需要使用花篮将很多光伏硅片以花篮的形式进行传输,并以花篮连同光伏硅片一起置入清洗槽内进行清洗,花篮传输区别于传统的单个光伏硅片清洗,能够极大地提高清洗效率。
而在将清洁篮放置在清洗设备时,需要将清洗设备的清洗液输出口连接清洁篮的喷水管,一般都是人工手动对接,并且在放置时,机械手无法精准定位,需要手扶或后期定位,造成了工作效率不高。
发明内容
本发明的目的就在于为了解决上述问题而提供光伏硅片清洗设备。
本发明通过以下技术方案来实现上述目的:
光伏硅片清洗设备,包括密封机构、固定机构、前端限位机构、后端限位机构,所述密封机构内部设置有所述固定机构,所述固定机构前端通过所述前端限位机构连接所述密封机构,所述固定机构后端通过所述后端限位机构连接所述密封机构;
所述密封机构包括密封箱、密封盖、中心轴、开盖气缸,所述密封箱上端设置有两个所述密封盖,所述密封盖前端连接有所述中心轴,所述中心轴动力端均连接有所述开盖气缸,所述密封箱下端设置有供水管路;
所述固定机构包括侧板、固定杆、限位块、喷口,两个所述侧板之间设置有六个所述固定杆,所述固定杆内侧均安装有所述限位块,所述限位块上设置 有所述喷口,所述固定杆后端设置有接头;
所述前端限位机构包括前端中心限位块、前端定位块、前端固定板、前端限位槽,所述前端中心限位块安装在所述侧板前端,所述前端中心限位块两侧均设置有所述前端定位块,所述前端固定板设置在所述侧板前侧,所述前端中心限位块、所述前端定位块和所述前端固定板之间设置有所述前端限位槽,所述前端中心限位块和对应的所述前端限位槽内侧底部设置有触发开关;
所述后端限位机构包括后端限位板、后端限位槽、供水座、配合口,所述后端限位板上设置有所述后端限位槽,所述后端限位槽对应所述接头,所述后端限位板后侧设置有所述供水座,所述供水座和所述接头之间设置有所述配合口,所述后端限位板和所述供水座之间设置有导柱,所述供水座下端连接有配合螺杆,所述配合螺杆动力端安装有伺服电机,所述供水座下端一侧通过引水管连接所述供水管路,所述配合口内部和所述接头之间设置有配合阀。
优选的:所述密封盖通过所述中心轴连接所述密封箱,所述中心轴通过联轴器连接所述开盖气缸。
如此设置,所述密封盖起密封作用,所述密封箱起支撑和密封作用。
优选的:所述固定杆通过螺栓连接所述侧板,所述接头通过螺纹连接所述固定杆。
如此设置,所述固定杆起支撑和传输清洗液作用,所述侧板起安装和支撑作用。
优选的:所述前端中心限位块、所述前端定位块通过螺栓连接所述侧板,所述前端固定板通过螺栓连接所述密封箱,所述触发开关镶嵌于所述前端固定板。
如此设置,所述前端中心限位块和所述前端定位块起定位和限位作用,配 合所述前端固定板从而保证所述固定机构整体的稳定性。
优选的:所述后端限位槽一体成型于所述后端限位板,所述供水座滑动连接所述密封箱,所述导柱通过螺栓连接所述后端限位板,所述导柱滑动连接所述供水座。
如此设置,所述后端限位槽起限位作用,所述导柱用于配合所述供水座。
优选的:所述配合螺杆通过螺纹连接所述供水座,所述配合口一体成型于所述供水座,所述配合阀通过螺纹连接所述供水座。
如此设置,所述供水座能够前后滑动,从而使得所述配合口和所述配合阀配合所述接头,从而进行传输清洗液。
优选的:所述配合口内部位于所述配合阀前端安装有密封圈,用于配合所述接头。
如此设置,从而保证密封性。
与现有技术相比,本发明的有益效果如下:
1、利用前端限位机构和后端限位机构能够在将固定机构放置在密封机构内侧时提供有效的支撑和限位,从而保证固定机构整体在放置和使用时的稳定性;
2、利用供水座前后平移能够快速对接接头,从而提高清洁的工作效率。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。
图1是本发明所述光伏硅片清洗设备的外部结构示意图;
图2是本发明所述光伏硅片清洗设备的内部结构示意图;
图3是本发明所述光伏硅片清洗设备的密封机构、固定机构、前端限位机构相对位置结构示意图;
图4是本发明所述光伏硅片清洗设备的后端限位槽结构示意图;
图5是本发明所述光伏硅片清洗设备的前端限位槽结构示意图;
图6是本发明所述光伏硅片清洗设备的配合口内部结构示意图。
附图标记说明如下:
1、密封机构;2、固定机构;3、前端限位机构;4、后端限位机构;11、密封箱;12、密封盖;13、中心轴;14、开盖气缸;15、供水管路;21、侧板;22、固定杆;23、限位块;24、喷口;25、接头;31、前端中心限位块;32、前端定位块;33、前端固定板;34、前端限位槽;35、触发开关;41、后端限位板;42、后端限位槽;43、供水座;44、配合口;45、导柱;46、配合螺杆;47、伺服电机;48、引水管;49、配合阀。
具体实施方式
在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”等的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以通过具体情况理解上述术语在本发明中的具体含义。
下面结合附图对本发明作进一步说明:
实施例1
如图1-图6所示,光伏硅片清洗设备,包括密封机构1、固定机构2、前端限位机构3、后端限位机构4,密封机构1内部设置有固定机构2,固定机构2前端通过前端限位机构3连接密封机构1,固定机构2后端通过后端限位机构4连接密封机构1;
密封机构1包括密封箱11、密封盖12、中心轴13、开盖气缸14,密封箱11上端设置有两个密封盖12,密封盖12前端连接有中心轴13,中心轴13动力端均连接有开盖气缸14,密封箱11下端设置有供水管路15;
固定机构2包括侧板21、固定杆22、限位块23、喷口24,两个侧板21之间设置有六个固定杆22,固定杆22内侧均安装有限位块23,限位块23上设置有喷口24,固定杆22后端设置有接头25;
前端限位机构3包括前端中心限位块31、前端定位块32、前端固定板33、前端限位槽34,前端中心限位块31安装在侧板21前端,前端中心限位块31两侧均设置有前端定位块32,前端固定板33设置在侧板21前侧,前端中心限位块31、前端定位块32和前端固定板33之间设置有前端限位槽34,前端中心限位块31和对应的前端限位槽34内侧底部设置有触发开关35;
后端限位机构4包括后端限位板41、后端限位槽42、供水座43、配合口44,后端限位板41上设置有后端限位槽42,后端限位槽42对应接头25,后端限位板41后侧设置有供水座43,供水座43和接头25之间设置有配合口44,后端限位板41和供水座43之间设置有导柱45,供水座43下端连接有配合螺杆46,配合螺杆46动力端安装有伺服电机47,供水座43下端一侧通过引水管48连接供水管路15,配合口44内部和接头25之间设置有配合阀49。
优选的:密封盖12通过中心轴13连接密封箱11,中心轴13通过联轴器连接开盖气缸14,密封盖12起密封作用,密封箱11起支撑和密封作用;固定杆22通过螺栓连接侧板21,接头25通过螺纹连接固定杆22,固定杆22起支撑和传输清洗液作用,侧板21起安装和支撑作用;前端中心限位块31、前端定位块32通过螺栓连接侧板21,前端固定板33通过螺栓连接密封箱11,触发开关35镶嵌于前端固定板33,前端中心限位块31和前端定位块32起定位和限位作用,配合前端固定板33从而保证固定机构2整体的稳定性;后端限位槽42一体成型于后端限位板41,供水座43滑动连接密封箱11,导柱45通过螺栓连接后端限位板41,导柱45滑动连接供水座43,后端限位槽42起限位作用,导柱45用于配合供水座43;配合螺杆46通过螺纹连接供水座43,配合口44一体成型于供水座43,配合阀49通过螺纹连接供水座43,供水座43能够前后滑动,从而使得配合口44和配合阀49配合接头25,从而进行传输清洗液;配合口44内部位于配合阀49前端安装有密封圈,用于配合接头25,从而保证密封性。
工作原理:利用机械手将固定机构2整体吊装到密封箱11内侧后,在放置时,前端中心限位块31接触到前端固定板33内侧的触发开关35后,伺服电机47启动带动配合螺杆46配合供水座43旋转,从而使得供水座43向前端位移,此时配合口44对准接头25,使得配合阀49和接头25对接,待密封盖12关闭 后,通过引水管48向接头25和固定杆22供水,对光伏板进行清洗。
以上显示和描述了本发明的基本原理、主要特征和优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。

Claims (7)

  1. 光伏硅片清洗设备,其特征在于:包括密封机构(1)、固定机构(2)、前端限位机构(3)、后端限位机构(4),所述密封机构(1)内部设置有所述固定机构(2),所述固定机构(2)前端通过所述前端限位机构(3)连接所述密封机构(1),所述固定机构(2)后端通过所述后端限位机构(4)连接所述密封机构(1);
    所述密封机构(1)包括密封箱(11)、密封盖(12)、中心轴(13)、开盖气缸(14),所述密封箱(11)上端设置有两个所述密封盖(12),所述密封盖(12)前端连接有所述中心轴(13),所述中心轴(13)动力端均连接有所述开盖气缸(14),所述密封箱(11)下端设置有供水管路(15);
    所述固定机构(2)包括侧板(21)、固定杆(22)、限位块(23)、喷口(24),两个所述侧板(21)之间设置有六个所述固定杆(22),所述固定杆(22)内侧均安装有所述限位块(23),所述限位块(23)上设置有所述喷口(24),所述固定杆(22)后端设置有接头(25);
    所述前端限位机构(3)包括前端中心限位块(31)、前端定位块(32)、前端固定板(33)、前端限位槽(34),所述前端中心限位块(31)安装在所述侧板(21)前端,所述前端中心限位块(31)两侧均设置有所述前端定位块(32),所述前端固定板(33)设置在所述侧板(21)前侧,所述前端中心限位块(31)、所述前端定位块(32)和所述前端固定板(33)之间设置有所述前端限位槽(34),所述前端中心限位块(31)和对应的所述前端限位槽(34)内侧底部设置有触发开关(35);
    所述后端限位机构(4)包括后端限位板(41)、后端限位槽(42)、供水座(43)、配合口(44),所述后端限位板(41)上设置有所述后端限位槽(42),所述后端限位槽(42)对应所述接头(25),所述后端限位板(41)后侧设置 有所述供水座(43),所述供水座(43)和所述接头(25)之间设置有所述配合口(44),所述后端限位板(41)和所述供水座(43)之间设置有导柱(45),所述供水座(43)下端连接有配合螺杆(46),所述配合螺杆(46)动力端安装有伺服电机(47),所述供水座(43)下端一侧通过引水管(48)连接所述供水管路(15),所述配合口(44)内部和所述接头(25)之间设置有配合阀(49)。
  2. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述密封盖(12)通过所述中心轴(13)连接所述密封箱(11),所述中心轴(13)通过联轴器连接所述开盖气缸(14)。
  3. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述固定杆(22)通过螺栓连接所述侧板(21),所述接头(25)通过螺纹连接所述固定杆(22)。
  4. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述前端中心限位块(31)、所述前端定位块(32)通过螺栓连接所述侧板(21),所述前端固定板(33)通过螺栓连接所述密封箱(11),所述触发开关(35)镶嵌于所述前端固定板(33)。
  5. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述后端限位槽(42)一体成型于所述后端限位板(41),所述供水座(43)滑动连接所述密封箱(11),所述导柱(45)通过螺栓连接所述后端限位板(41),所述导柱(45)滑动连接所述供水座(43)。
  6. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述配合螺杆(46)通过螺纹连接所述供水座(43),所述配合口(44)一体成型于所述供水座(43),所述配合阀(49)通过螺纹连接所述供水座(43)。
  7. 根据权利要求1所述的光伏硅片清洗设备,其特征在于:所述配合口(44)内部位于所述配合阀(49)前端安装有密封圈,用于配合所述接头(25)。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115491668A (zh) * 2022-10-31 2022-12-20 江苏亨通精工金属材料有限公司 一种基于浸渍法的铜杆生产设备及其生产工艺
CN116394233A (zh) * 2023-01-12 2023-07-07 江苏启威星装备科技有限公司 机械臂控制方法、存储介质及电子设备

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182243B (zh) * 2021-03-29 2022-06-10 江苏亚电科技有限公司 光伏硅片清洗设备

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06151401A (ja) * 1992-11-05 1994-05-31 Tokyo Electron Ltd 被処理体検出装置
CN103748974A (zh) * 2011-07-20 2014-04-23 伊利诺斯工具制品有限公司 用于批量清洁印刷电路板的批量清洁装置和方法
CN103799940A (zh) * 2014-01-26 2014-05-21 宁波方太厨具有限公司 一种清洗机的侧向进水结构
CN206259324U (zh) * 2016-12-16 2017-06-16 中芯国际集成电路制造(北京)有限公司 一种晶圆固定装置及晶圆清洗系统
CN110610887A (zh) * 2019-10-24 2019-12-24 上海釜川自动化设备有限公司 一种硅片清洗烘干用花篮装置
CN111463153A (zh) * 2020-04-29 2020-07-28 西安奕斯伟硅片技术有限公司 硅片清洗装置及其控制方法
CN212041662U (zh) * 2019-09-28 2020-12-01 合肥金尼克机械制造有限公司 一种全自动清洗消毒器的清洗架与设备喷淋口对接系统
CN113182244A (zh) * 2021-03-29 2021-07-30 江苏亚电科技有限公司 光伏硅片清洗方法
CN113182243A (zh) * 2021-03-29 2021-07-30 江苏亚电科技有限公司 光伏硅片清洗设备
CN215613508U (zh) * 2021-03-29 2022-01-25 江苏亚电科技有限公司 光伏硅片清洗设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10154675A (ja) * 1996-11-22 1998-06-09 Kaijo Corp 基板保持カセット及びこれを用いた基板洗浄装置
CN201243010Y (zh) * 2008-07-25 2009-05-20 深圳市捷佳创精密设备有限公司 一种硅片花篮
CN102784765B (zh) * 2012-08-30 2015-06-10 常州捷佳创精密机械有限公司 一种硅料酸洗设备连体槽
CN104525513B (zh) * 2014-11-20 2016-08-31 老肯医疗科技股份有限公司 一种医用全自动清洗机
CN206179841U (zh) * 2016-10-28 2017-05-17 北京南轩兴达电子科技有限公司 自动硅料清洗装置
CN208787056U (zh) * 2018-07-13 2019-04-26 江苏林洋光伏科技有限公司 篮齿可更换的实验用花篮
CN210223978U (zh) * 2019-10-24 2020-03-31 上海釜川自动化设备有限公司 一种硅片清洗烘干用花篮装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06151401A (ja) * 1992-11-05 1994-05-31 Tokyo Electron Ltd 被処理体検出装置
CN103748974A (zh) * 2011-07-20 2014-04-23 伊利诺斯工具制品有限公司 用于批量清洁印刷电路板的批量清洁装置和方法
CN103799940A (zh) * 2014-01-26 2014-05-21 宁波方太厨具有限公司 一种清洗机的侧向进水结构
CN206259324U (zh) * 2016-12-16 2017-06-16 中芯国际集成电路制造(北京)有限公司 一种晶圆固定装置及晶圆清洗系统
CN212041662U (zh) * 2019-09-28 2020-12-01 合肥金尼克机械制造有限公司 一种全自动清洗消毒器的清洗架与设备喷淋口对接系统
CN110610887A (zh) * 2019-10-24 2019-12-24 上海釜川自动化设备有限公司 一种硅片清洗烘干用花篮装置
CN111463153A (zh) * 2020-04-29 2020-07-28 西安奕斯伟硅片技术有限公司 硅片清洗装置及其控制方法
CN113182244A (zh) * 2021-03-29 2021-07-30 江苏亚电科技有限公司 光伏硅片清洗方法
CN113182243A (zh) * 2021-03-29 2021-07-30 江苏亚电科技有限公司 光伏硅片清洗设备
CN215613508U (zh) * 2021-03-29 2022-01-25 江苏亚电科技有限公司 光伏硅片清洗设备

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115491668A (zh) * 2022-10-31 2022-12-20 江苏亨通精工金属材料有限公司 一种基于浸渍法的铜杆生产设备及其生产工艺
CN115491668B (zh) * 2022-10-31 2023-09-08 江苏亨通精工金属材料有限公司 一种基于浸渍法的铜杆生产设备及其生产工艺
CN116394233A (zh) * 2023-01-12 2023-07-07 江苏启威星装备科技有限公司 机械臂控制方法、存储介质及电子设备
CN116394233B (zh) * 2023-01-12 2024-03-19 江苏启威星装备科技有限公司 机械臂控制方法、存储介质及电子设备

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