WO2022196496A1 - 光反射装置、センサ装置、および照明装置 - Google Patents
光反射装置、センサ装置、および照明装置 Download PDFInfo
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- WO2022196496A1 WO2022196496A1 PCT/JP2022/010342 JP2022010342W WO2022196496A1 WO 2022196496 A1 WO2022196496 A1 WO 2022196496A1 JP 2022010342 W JP2022010342 W JP 2022010342W WO 2022196496 A1 WO2022196496 A1 WO 2022196496A1
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- Prior art keywords
- light
- light reflecting
- mirror surface
- reflecting member
- invisible
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims abstract description 11
- 230000001105 regulatory effect Effects 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 21
- 238000005286 illumination Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 6
- 230000033228 biological regulation Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000004397 blinking Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/60—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution
- F21S41/67—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on reflectors
- F21S41/675—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on reflectors by moving reflectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60Q—ARRANGEMENT OF SIGNALLING OR LIGHTING DEVICES, THE MOUNTING OR SUPPORTING THEREOF OR CIRCUITS THEREFOR, FOR VEHICLES IN GENERAL
- B60Q1/00—Arrangement of optical signalling or lighting devices, the mounting or supporting thereof or circuits therefor
- B60Q1/0017—Devices integrating an element dedicated to another function
- B60Q1/0023—Devices integrating an element dedicated to another function the element being a sensor, e.g. distance sensor, camera
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Definitions
- the present disclosure relates to a light reflecting device that reflects light emitted from a light source in a desired direction.
- the present disclosure also relates to each of a sensor device and a lighting device comprising such a light reflecting device.
- Patent Document 1 discloses a LiDAR system mounted on a vehicle.
- a LiDAR system includes a light reflector that periodically changes the traveling direction of light emitted from a light source in order to detect objects outside the vehicle.
- a light reflector comprising: a light reflecting member having a mirror surface that reflects light; a deflection mechanism for swinging the light reflecting member about a swing axis extending in a direction along the mirror surface; a regulating member that faces a portion of the light reflecting member including the swing shaft with a gap interposed therebetween in a direction that intersects the mirror surface, and that regulates displacement of the swing shaft in a direction that intersects the mirror surface; It has
- a light reflector comprising: a light reflecting member having a mirror surface that reflects light; a deflection mechanism for swinging the light reflecting member about a swing axis extending in a direction along the mirror surface; It is arranged so as to be axially symmetrical with respect to the swing axis, faces the light reflecting member with a gap in the direction intersecting the mirror surface, and emits the light in the direction intersecting the mirror surface.
- a pair of regulating members that regulate displacement of the reflecting member; It has
- the inventor of the present application has noticed that the direction of light reflection by the light reflection device may deviate from the predetermined direction as the light reflection member swings.
- the inventors of the present application have found through study and analysis that the position of the oscillation axis may be displaced in the direction intersecting the mirror surface as the light reflection member oscillates, and that the amount of deviation of the light reflection direction from the predetermined direction may be displaced.
- the inventor of the present application came up with the idea that by restricting the displacement of the rocking shaft that accompanies the rocking of the light reflecting member, it is possible to suppress the deviation of the light reflecting direction from the predetermined direction.
- the restricting member comes into contact with a part of the light reflecting member.
- the displacement of the swing shaft in the direction intersecting the mirror surface due to the swing of the light reflecting member is restricted. Therefore, it is possible to suppress the deterioration of the accuracy of the light reflection direction by the light reflection device.
- An example of an aspect that may be provided by the present disclosure is a sensor device comprising: a light reflecting device according to any one of the above aspects; a light-emitting element that emits invisible light; a light receiving element that outputs a signal corresponding to the intensity of incident invisible light; and The mirror surface of the light reflecting device reflects the invisible light emitted from the light emitting element toward the detection area, and directs the invisible light reflected by the object located within the detection area toward the light receiving element. to reflect.
- the object can be detected by the sensor device using the mirror surface. Decrease in detection accuracy can also be suppressed.
- An example of an aspect that may be provided by the present disclosure is a lighting device comprising: a light reflecting device according to any one of the above aspects; a light source that emits visible light; and The mirror surface of the light reflector reflects the visible light toward an illumination area.
- FIG. 1 illustrates a configuration of part of a light reflecting device according to an embodiment
- 2 shows the configuration of the light reflecting device of FIG. 1 viewed from the normal direction of the mirror surface.
- fluctuation axis is illustrated.
- FIG. 4 is a diagram for explaining the function of a first restricting member in FIG. 3; 2 illustrates the operation of the light reflector of FIG. 1; 2 shows another example of the configuration of the light reflecting device of FIG. 1; 2 shows another example of the configuration of the light reflecting device of FIG. 1; 2 shows another example of the configuration of the light reflecting device of FIG. 1; 2 shows another example of the configuration of the light reflecting device of FIG. 1; The configuration of the light reflecting device of FIG. 8 viewed from the direction along the swing axis is illustrated.
- FIG. 9 illustrates the operation of the light reflector of FIG. 8; 2 illustrates the configuration of a sensor device in which the light reflecting device of FIG. 1 can be mounted. 2 illustrates a configuration of an illumination device in which the light reflecting device of FIG. 1 can be mounted; A vehicle in which the above sensor device and lighting device can be mounted is illustrated. 2 shows another example of the configuration of the light reflecting device of FIG. 1; A case where the sensor device and the lighting device described above are installed in a traffic infrastructure facility is illustrated.
- the light reflecting device 10 has a light reflecting member 11 and a deflection mechanism 12 .
- the light reflecting member 11 has a mirror surface 111 that reflects the light L.
- the deflection mechanism 12 is configured to swing the light reflecting member 11 around a swing axis A extending in a direction along the mirror surface 111 .
- the deflection mechanism 12 includes a frame 121, a torsion bar 122, and a coil 123.
- the light reflecting member 11 is supported by a frame 121 via torsion bars 122 .
- a force is generated to swing the light reflecting member 11 around the torsion bar 122 . That is, the swing axis A extends along the torsion bar 122 .
- the reflection direction of the light L changes periodically.
- the light reflecting device 10 includes a first restricting member 131. As shown in FIG. The first restricting member 131 faces a portion of the light reflecting member 11 including the swing axis A with a gap in the direction intersecting the mirror surface 111 .
- the inventor of the present application has noticed that the reflection direction of the light L may deviate from the predetermined direction as the light reflecting member 11 swings, as illustrated in FIG.
- the inventors of the present application have found through study and analysis that the position of the swing axis A may be displaced in a direction intersecting the mirror surface 111 as the light reflecting member 11 swings, and that the light L is reflected in a predetermined direction. It was found that there is a correlation between the change in the amount of deviation from and the displacement of the swing axis A. As a result, the inventor of the present application came up with the idea that by restricting the displacement of the swing axis A due to the swing of the light reflecting member 11, it is possible to suppress the deviation of the reflection direction of the light L from the predetermined direction.
- the first restricting member 131 It abuts on part of the light reflecting member 11 .
- the displacement of the swing axis A in the direction intersecting with the mirror surface 111 due to the swing of the light reflecting member 11 is restricted. Therefore, it is possible to suppress the deterioration of the accuracy of the light reflection direction by the light reflection device 10 .
- the size of the gap is determined so that the amount of displacement of the swing axis A in the direction intersecting the mirror surface 111 does not exceed the allowable range while allowing the light reflecting member 11 to swing in a predetermined amount.
- the hardness of the material forming the first restricting member 131 is set lower than the hardness of the material forming the portion of the light reflecting member 11 facing the first restricting member 131 . It is defined.
- the first restricting member 131 can be made of silicon, for example.
- the portion of the light reflecting member 11 facing the first restricting member 131 is made of a material having hardness higher than that of silicon.
- the shape of the tip of the first restricting member 131 can be changed as appropriate.
- the shape is determined so that when the first restricting member 131 abuts on the light reflecting member 11, both are in line contact or point contact.
- the tip of the first restricting member 131 has a semi-cylindrical shape having an axis extending in the direction along the swing axis A, or a plurality of hemispherical shapes arranged in the direction along the swing axis A. It has a shape with projections.
- the tip of the first restricting member 131 has a triangular prism shape having an axis extending in the direction along the swing axis A, or a plurality of triangular pyramid shapes arranged in the direction along the swing axis A. It has a shape with projections.
- the contact area between the light reflecting member 11 and the first restricting member 131 can be reduced, so that the occurrence of electrostatic attraction between the light reflecting member 11 and the first restricting member 131 during restriction can be suppressed.
- a geometric and fine uneven pattern can be formed on the surface of the first regulation member 131 .
- a plurality of linear grooves are arranged.
- the width and depth of each groove can each be on the order of several microns.
- a plurality of triangular pyramid-shaped protrusions are arranged two-dimensionally.
- the width and height of each protrusion can each be on the order of several ⁇ m.
- the contact area between the light reflecting member 11 and the first restricting member 131 can be reduced, so the occurrence of electrostatic attraction between the light reflecting member 11 and the first restricting member 131 during restriction can be suppressed.
- each of the uneven pattern P1 and the uneven pattern P2 can be formed by an etching technique such as reactive ion etching or photoetching.
- a geometric and fine uneven pattern can be accurately formed by a relatively simple technique.
- the material for forming the first regulating member 131 and the shape of the uneven pattern on the surface are appropriately determined according to the etching technique to be applied.
- the light reflecting device 10 can include a vibrating device 14 .
- the vibrating device 14 applies ultrasonic vibration to at least one of the light reflecting member 11 and the first restricting member 131 when electrostatic attraction occurs between the light reflecting member 11 and the first restricting member 131.
- the frequency and application time of the ultrasonic vibration are appropriately determined to such an extent that electrostatic attraction that may occur between the light reflecting member 11 and the first regulation member 131 can be eliminated.
- the light reflecting device 10 can include a pair of second regulating members 132.
- the pair of second regulating members 132 are arranged so as to be axially symmetrical with respect to the swing axis A. As shown in FIG. Each second regulating member 132 faces the light reflecting member 11 with a gap therebetween in a direction intersecting the mirror surface 111 .
- the size of the gap is determined so that the amount of displacement of the light reflecting member 11 in the direction intersecting with the mirror surface 111 does not exceed the allowable range while allowing the light reflecting member 11 to swing in a predetermined manner.
- each second regulation member 132 the hardness of the material forming each second regulation member 132 is lower than the hardness of the material forming the portion of the light reflecting member 11 facing the second regulation member 132.
- Each second regulating member 132 can be made of silicon, for example.
- the portions of the light reflecting member 11 that face the second regulating members 132 are made of a material having hardness higher than that of silicon.
- each second regulating member 132 can be appropriately changed in the same manner as the shape of the tip of the first regulating member 131 described with reference to FIGS. Also, on the surface of each second regulating member 132, a geometric and fine uneven pattern can be formed in the same manner as the surface of the first regulating member 131 described with reference to FIG.
- the contact area between the light reflecting member 11 and each second regulating member 132 can be reduced, so the occurrence of electrostatic attraction between the light reflecting member 11 and each second regulating member 132 during regulation can be suppressed. As a result, it is possible to suppress the occurrence of a situation in which the oscillation of the light reflecting member 11 is hindered by each of the second restricting members 132 .
- the uneven pattern can be formed by etching techniques such as reactive ion etching and photoetching. In this case, a geometric and fine uneven pattern can be accurately formed by a relatively simple technique.
- the material for forming each second regulating member 132 and the shape of the uneven pattern on the surface are appropriately determined according to the applied etching technique.
- the vibrating device 14 causes the light reflecting member 11 and the second restricting member 132 to move when electrostatic adsorption occurs between the light reflecting member 11 and any of the second restricting members 132 .
- the number and positions of the first restricting members 131 can be appropriately determined as long as they are arranged so as to face the portion including the swing axis A of the light reflecting member 11 .
- the number and positions of the second restricting members 132 can be appropriately determined as long as they are arranged so as to be axially symmetrical with respect to the swing axis A.
- the light reflecting direction of the light reflecting device 10 is restricted by the pair of second restricting members 132 regulating the displacement of the light reflecting member 11 in the direction intersecting the mirror surface 111 of the swing axis A.
- the first restricting member 131 may be omitted as long as it is possible to suppress the decrease in accuracy of .
- the light reflecting device 10 described above can be mounted on the sensor device 20 illustrated in FIG.
- the sensor device 20 is a device for detecting an object OB positioned within a predetermined detection area SA.
- the sensor device 20 has a light emitting element 21 .
- the light emitting element 21 is configured to emit invisible light IV.
- the light emitting element 21 can be implemented by a light emitting diode, laser diode, or the like.
- the sensor device 20 has a light receiving element 22 .
- the light receiving element 22 has sensitivity to the wavelength of the invisible light IV emitted by the light emitting element 21, and is configured to output a light detection signal LS corresponding to the intensity of the incident light.
- the light receiving element 22 can be implemented by a photodiode, phototransistor, photoresistor, or the like.
- the sensor device 20 has a control section 23 .
- the control unit 23 is configured to output an emission control signal C1 that causes the light emitting element 21 to emit the invisible light IV and a reflection control signal C2 that causes the light reflecting device 10 to adjust the posture of the light reflecting member 11.
- the control section 23 is configured to receive the photodetection signal LS output from the light receiving element 22 .
- the control unit 23 causes the light emitting element 21 to emit pulsed invisible light IV by outputting the emission control signal C1.
- Invisible light IV emitted from the light emitting element 21 enters the light reflecting member 11 .
- An appropriate optical system can be arranged between the light emitting element 21 and the light reflecting member 11 .
- the invisible light IV reflected by the mirror surface 111 of the light reflecting member 11 travels toward the detection area SA.
- the invisible light IV is reflected by the object OB and returns toward the light reflecting member 11 .
- the control unit 23 causes the deflection mechanism 12 of the light reflecting device 10 to swing the light reflecting member 11 by outputting the reflection control signal C2. Thereby, the angle of reflection by the mirror surface 111 is changed. Specifically, the attitude of the light reflecting member 11 is adjusted so that the return light from the object OB is reflected toward the light receiving element 22 .
- An appropriate optical system can be arranged between the light reflecting member 11 and the light receiving element 22 .
- the light-receiving element 22 detects a pulse-shaped change in received light intensity.
- the light receiving element 22 outputs a photodetection signal LS corresponding to the change.
- the control unit 23 determines whether the object OB is positioned on the path of the invisible light IV emitted from the light emitting element 21 and reflected by the light reflecting member 11. can be detected. Further, the control unit 23 can detect the distance to the object OB based on the time from when the light emitting element 21 emits the invisible light IV until when the light receiving element 22 detects the returned light.
- the control unit 23 repeats the above process while changing the posture of the light reflecting member 11 at the time when the light emitting element 21 emits the invisible light IV using the reflection control signal C2. As a result, the traveling direction of the invisible light IV is changed within the range indicated by the dashed-dotted line in FIG. 11 .
- the range corresponds to the detection area SA. Therefore, a configuration can be realized in which the object OB is detected by scanning the detection area SA with the invisible light IV emitted from the single light emitting element 21 .
- the control unit 23 having the functions as described above includes an output interface that outputs the emission control signal C1 and the reflection control signal C2, an input interface that receives the light detection signal LS, an emission control signal C1, the reflection control signal C2, and a light detection signal. It can be implemented by a processor that performs processing related to the signal LS.
- the processor may be implemented by a dedicated integrated circuit such as a microcontroller, ASIC, FPGA.
- the processor may be implemented by a general purpose microprocessor operating in conjunction with a general purpose memory.
- the light reflecting device 10 described above can be mounted on a lighting device 30 illustrated in FIG.
- the illumination device 30 is a device that illuminates a predetermined illumination area LA with visible light V. As shown in FIG.
- the illumination device 30 includes a light source 31.
- the light source 31 is configured to emit visible light V. As shown in FIG.
- the light source 31 can be implemented by a semiconductor light-emitting device such as a light-emitting diode, laser diode, or EL device.
- the lighting device 30 has a control section 32 .
- the control unit 32 is configured to output an emission control signal C3 for causing the light source 31 to emit the visible light V and a reflection control signal C4 for causing the light reflecting device 10 to adjust the posture of the light reflecting member 11 .
- the control unit 32 causes the light source 31 to emit the visible light V by outputting the emission control signal C3. Visible light V emitted from the light source 31 enters the light reflecting member 11 .
- An appropriate optical system can be arranged between the light source 31 and the light reflecting member 11 .
- the visible light V reflected by the mirror surface 111 of the light reflecting member 11 travels toward the illumination area LA.
- the visible light V forms part of a predetermined light distribution pattern P in the illumination area LA.
- the control unit 32 repeats the above-described processing while changing the posture of the light reflecting member 11 at the time when the light source 31 emits the visible light V using the reflection control signal C4.
- the traveling direction of the visible light V is changed within the range indicated by the dashed line in FIG.
- the range corresponds to the illumination area LA.
- the control unit 32 outputs an emission control signal so that the light source 31 stops emitting the visible light V when the light reflecting member 11 is in a posture capable of reflecting the visible light V in a specific direction within the illumination area LA.
- the combination of C3 and reflection control signal C4 can be changed.
- a light distribution pattern P including a partial non-illumination area UA within the illumination area LA can be formed.
- the control unit 32 having the functions described above can be realized by an output interface that outputs the emission control signal C3 and the reflection control signal C4, and a processor that executes processing related to the emission control signal C3 and the reflection control signal C4.
- the processor may be implemented by a dedicated integrated circuit such as a microcontroller, ASIC, FPGA.
- the processor may be implemented by a general purpose microprocessor operating in conjunction with a general purpose memory.
- At least one of the sensor device 20 and the lighting device 30 can be mounted on the vehicle 40 as illustrated in FIG.
- Vehicle 40 is an example of a mobile object.
- at least one of the sensor device 20 and the lighting device 30 is mounted on the left front portion of the vehicle 40 .
- the left front portion of the vehicle 40 is a portion located to the left of the center of the vehicle 40 in the left-right direction and to the front of the center of the vehicle 40 in the front-rear direction.
- a detection area SA of the sensor device 20 and an illumination area LA of the illumination device 30 are set outside the vehicle 40 .
- the non-illumination area UA described above is formed to suppress glare that may be given to passengers of other vehicles and pedestrians located in the illumination area LA.
- the light reflecting member 11 of the single light reflecting device 10 is combined with the light emitting element 21 and the light receiving element 22 of the sensor device 20 and the light source of the lighting device 30 . 31 may be shared.
- the swing axis A of the light reflecting member 11 is likely to be displaced in the direction intersecting the mirror surface 111 due to acceleration/deceleration and vibration. Therefore, the various effects described so far become more remarkable.
- the configuration of the deflection mechanism 12 can be appropriately determined.
- the deflection mechanism 12 can comprise a first arm member 124, a second arm member 125, a first actuator 126, and a second actuator 127. As shown in FIG. 14,
- Each of the first arm member 124 and the second arm member 125 extends in a direction intersecting the mirror surface 111 of the light reflecting member 11 as its longitudinal direction.
- One longitudinal end of the first arm member 124 and one longitudinal end of the second arm member 125 are each coupled to the light reflecting member 11 .
- the first actuator 126 supports the first arm member 124.
- the first actuator 126 displaces the first arm member 124 in a direction intersecting the mirror surface 111 of the light reflecting member 11 .
- a second actuator 127 supports the second arm member 125 .
- the second actuator 127 displaces the second arm member 125 in a direction intersecting the mirror surface 111 of the light reflecting member 11 .
- first actuator 126 and second actuator 127 may each be configured to include a piezoelectric element that expands and contracts along that direction in response to an applied voltage.
- the light L reflected by the light reflecting member 11 travels. You can adjust the direction.
- the position where at least one of the sensor device 20 and the lighting device 30 is arranged in the vehicle 40 depends on at least one of the preset detection area SA and the lighting area LA. can be determined as appropriate.
- the moving object on which at least one of the sensor device 20 and the lighting device 30 is mounted is not limited to the vehicle 40.
- Examples of other moving bodies include railroads, flying bodies, aircraft, ships, and the like.
- a moving object on which at least one of the sensor device 20 and the lighting device 30 is mounted may not require a driver.
- the sensor device 20 can be applied to a crime prevention system that is installed in a house or facility and detects an object that has entered a detection area.
- the illumination device 30 can also be applied to a device that temporarily displays predetermined figures, characters, signs, etc. on a specific road surface or wall surface.
- At least one of the sensor device 20 and the lighting device 30 can be mounted on traffic infrastructure equipment such as street lights 50 and traffic signals 60.
- the detection area SA illustrated in FIG. 11 is set within the area A1.
- the illumination device 30 may draw information (characters, signs, blinking warning colors, etc.) in the area A2 to warn the vehicle 40 about to enter the intersection from another direction. That is, the illumination area LA illustrated in FIG. 12 is set within the area A2.
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Abstract
Description
光を反射する鏡面を有している光反射部材と、
前記鏡面に沿う方向に延びる揺動軸を中心に前記光反射部材を揺動させる偏向機構と、
前記鏡面と交差する方向に間隙を介して前記光反射部材における前記揺動軸を含む部分と対向しており、前記鏡面と交差する方向への前記揺動軸の変位を規制する規制部材と、
を備えている。
光を反射する鏡面を有している光反射部材と、
前記鏡面に沿う方向に延びる揺動軸を中心に前記光反射部材を揺動させる偏向機構と、
前記揺動軸に対して軸対称をなすように配置されており、前記鏡面と交差する方向に間隙を介して前記光反射部材と対向しており、かつ前記鏡面と交差する方向への前記光反射部材の変位を規制する一対の規制部材と、
を備えている。
上記のいずれかの態様に係る光反射装置と、
非可視光を出射する発光素子と、
入射した非可視光の強度に対応する信号を出力する受光素子と、
を備えており、
前記光反射装置の前記鏡面は、前記発光素子から出射された非可視光を検出領域へ向けて反射するとともに、当該検出領域内に位置する物体に反射された非可視光を前記受光素子へ向けて反射する。
上記のいずれかの態様に係る光反射装置と、
可視光を出射する光源と、
を備えており、
前記光反射装置の前記鏡面は、前記可視光を照明領域へ向けて反射する。
Claims (16)
- 光を反射する鏡面を有している光反射部材と、
前記鏡面に沿う方向に延びる揺動軸を中心に前記光反射部材を揺動させる偏向機構と、
前記鏡面と交差する方向に間隙を介して前記光反射部材における前記揺動軸を含む部分と対向しており、前記鏡面と交差する方向への前記揺動軸の変位を規制する第一規制部材と、
を備えている、
光反射装置。 - 前記第一規制部材を形成している材料の硬度は、前記光反射部材における前記第一規制部材と対向している部分を形成している材料の硬度よりも低い、
請求項1に記載の光反射装置。 - 前記第一規制部材には、幾何学的な凹凸パターンが形成されている、
請求項1または2に記載の光反射装置。 - 前記凹凸パターンは、エッチング技術により形成されている、
請求項3に記載の光反射装置。 - 前記光反射部材と前記第一規制部材の少なくとも一方に超音波振動を印加する加振装置を備えている、
請求項1から4のいずれか一項に記載の光反射装置。 - 前記揺動軸に対して軸対称をなすように配置されており、前記鏡面と交差する方向に間隙を介して前記光反射部材と対向しており、かつ前記鏡面と交差する方向への前記光反射部材の変位を規制する一対の第二規制部材を備えている、
請求項1から5のいずれか一項に記載の光反射装置。 - 前記一対の第二規制部材を形成している材料の硬度は、前記光反射部材における前記一対の第二規制部材と対向している部分を形成している材料の硬度よりも低い、
請求項6に記載の光反射装置。 - 前記一対の第二規制部材の各々には、幾何学的な凹凸パターンが形成されている、
請求項6または7に記載の光反射装置。 - 前記凹凸パターンは、エッチング技術により形成されている、
請求項8に記載の光反射装置。 - 前記光反射部材と前記一対の第二規制部材の少なくとも一方に超音波振動を印加する加振装置を備えている、
請求項6から9のいずれか一項に記載の光反射装置。 - 光を反射する鏡面を有している光反射部材と、
前記鏡面に沿う方向に延びる揺動軸を中心に前記光反射部材を揺動させる偏向機構と、
前記揺動軸に対して軸対称をなすように配置されており、前記鏡面と交差する方向に間隙を介して前記光反射部材と対向しており、かつ前記鏡面と交差する方向への前記光反射部材の変位を規制する一対の規制部材と、
を備えている、
光反射装置。 - 請求項1から11のいずれか一項に記載の光反射装置と、
非可視光を出射する発光素子と、
入射した非可視光の強度に対応する光検出信号を出力する受光素子と、
を備えており、
前記光反射装置の前記鏡面は、前記発光素子から出射された非可視光を検出領域へ向けて反射するとともに、当該検出領域内に位置する物体に反射された非可視光を前記受光素子へ向けて反射する、
センサ装置。 - 移動体に搭載されるように構成されている、
請求項12に記載のセンサ装置。 - 請求項1から11のいずれか一項に記載の光反射装置と、
可視光を出射する光源と、
を備えており、
前記光反射装置の前記鏡面は、前記可視光を照明領域へ向けて反射する、
照明装置。 - 非可視光を出射する発光素子と、
入射した非可視光の強度に対応する光検出信号を出力する受光素子と、
を備えており、
前記鏡面は、前記発光素子から出射された非可視光を検出領域へ向けて反射するとともに、当該検出領域内に位置する物体に反射された非可視光を前記受光素子へ向けて反射する、
請求項14に記載の照明装置。 - 移動体に搭載されるように構成されている、
請求項14または15に記載の照明装置。
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JP2007293331A (ja) * | 2006-04-06 | 2007-11-08 | Asml Netherlands Bv | 非線形バネによる大変形memsミラーを用いる露光装置及びデバイス製造方法 |
JP2008292703A (ja) * | 2007-05-23 | 2008-12-04 | Panasonic Electric Works Co Ltd | 可動構造体、同構造体を用いた光走査ミラー素子、及び可動構造体の製造方法 |
JP2010026147A (ja) * | 2008-07-17 | 2010-02-04 | Panasonic Electric Works Co Ltd | 可動構造体及びそれを用いた光走査ミラー |
JP2010117265A (ja) * | 2008-11-13 | 2010-05-27 | Alps Electric Co Ltd | Memsセンサの製造方法 |
JP2017003414A (ja) * | 2015-06-10 | 2017-01-05 | 株式会社Jvcケンウッド | レーザレーダ装置および検知方法 |
US20190383909A1 (en) * | 2017-02-20 | 2019-12-19 | Robert Bosch Gmbh | Lidar sensor for detecting an object |
JP2021043885A (ja) | 2019-09-13 | 2021-03-18 | 大日本印刷株式会社 | 衣類販売システム |
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2022
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- 2022-03-09 EP EP22771247.8A patent/EP4310574A1/en active Pending
- 2022-03-09 CN CN202280021522.2A patent/CN116997840A/zh active Pending
- 2022-03-09 JP JP2023507030A patent/JPWO2022196496A1/ja active Pending
Patent Citations (8)
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JPS61187179A (ja) * | 1985-02-15 | 1986-08-20 | Nippon Telegr & Teleph Corp <Ntt> | 磁気ヘツドスライダ |
JP2007293331A (ja) * | 2006-04-06 | 2007-11-08 | Asml Netherlands Bv | 非線形バネによる大変形memsミラーを用いる露光装置及びデバイス製造方法 |
JP2008292703A (ja) * | 2007-05-23 | 2008-12-04 | Panasonic Electric Works Co Ltd | 可動構造体、同構造体を用いた光走査ミラー素子、及び可動構造体の製造方法 |
JP2010026147A (ja) * | 2008-07-17 | 2010-02-04 | Panasonic Electric Works Co Ltd | 可動構造体及びそれを用いた光走査ミラー |
JP2010117265A (ja) * | 2008-11-13 | 2010-05-27 | Alps Electric Co Ltd | Memsセンサの製造方法 |
JP2017003414A (ja) * | 2015-06-10 | 2017-01-05 | 株式会社Jvcケンウッド | レーザレーダ装置および検知方法 |
US20190383909A1 (en) * | 2017-02-20 | 2019-12-19 | Robert Bosch Gmbh | Lidar sensor for detecting an object |
JP2021043885A (ja) | 2019-09-13 | 2021-03-18 | 大日本印刷株式会社 | 衣類販売システム |
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CN116997840A (zh) | 2023-11-03 |
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