WO2022162723A1 - 流体温調システム - Google Patents
流体温調システム Download PDFInfo
- Publication number
- WO2022162723A1 WO2022162723A1 PCT/JP2021/002565 JP2021002565W WO2022162723A1 WO 2022162723 A1 WO2022162723 A1 WO 2022162723A1 JP 2021002565 W JP2021002565 W JP 2021002565W WO 2022162723 A1 WO2022162723 A1 WO 2022162723A1
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- WIPO (PCT)
- Prior art keywords
- temperature side
- low
- refrigerator
- refrigerant
- evaporator
- Prior art date
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- 239000012530 fluid Substances 0.000 title claims abstract description 119
- 239000003507 refrigerant Substances 0.000 claims abstract description 203
- 238000005057 refrigeration Methods 0.000 claims abstract description 50
- 238000011144 upstream manufacturing Methods 0.000 claims description 25
- 238000001704 evaporation Methods 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 14
- 238000001816 cooling Methods 0.000 description 25
- 239000007788 liquid Substances 0.000 description 15
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000012267 brine Substances 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 2
- 238000010792 warming Methods 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
- F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
- F25B29/003—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously of the compression type system
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B39/00—Evaporators; Condensers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B40/00—Subcoolers, desuperheaters or superheaters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
- F25B41/31—Expansion valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/022—Compressor control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0403—Refrigeration circuit bypassing means for the condenser
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0409—Refrigeration circuit bypassing means for the evaporator
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0253—Compressor control by controlling speed with variable speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/21—Refrigerant outlet evaporator temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2513—Expansion valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2515—Flow valves
Definitions
- the embodiment of the present invention relates to a fluid temperature control system that cools fluid with a heat pump type refrigerating device.
- JP2014-97156 discloses a ternary refrigeration system.
- the three-dimensional refrigeration system includes a high temperature side refrigerator, an intermediate temperature side refrigerator, and a low temperature side refrigerator each having a compressor, a condenser, an expansion valve, and an evaporator, and the high temperature side refrigerator circulates the high temperature side refrigerant.
- the medium temperature side refrigerator circulates the medium temperature side refrigerant
- the low temperature side refrigerator circulates the low temperature side refrigerant.
- a high-medium-side cascade condenser that exchanges heat between the high-temperature side refrigerant and the medium-temperature side refrigerant is composed of the evaporator of the high-temperature side refrigerator and the condenser of the medium-temperature side refrigerator, and exchanges heat between the medium-temperature side refrigerant and the low-temperature side refrigerant.
- a mid-to-low side cascade condenser is composed of the evaporator of the medium temperature side refrigerator and the condenser of the low temperature side refrigerator.
- the evaporator of the low temperature side refrigerator cools the gas or liquid to an extremely low temperature range, and the cooled gas or liquid cools the temperature controlled object to an extremely low temperature range.
- the object of temperature control may be space or a specific object.
- a ternary refrigeration system may require a high-performance compressor in each refrigerator in order to stably cool the temperature controlled object to the target cooling temperature.
- the compressor of the low temperature side refrigerator in addition to high performance, there may be cases where a special structure is required to ensure durability performance (cold resistance performance) against extremely low temperature side refrigerant. As a result, the overall size of the apparatus may become excessively large, or the manufacturing cost may increase or the construction period may be delayed due to difficulty in obtaining the compressor.
- the present invention has been made in consideration of the above circumstances, and aims to provide a fluid temperature control system that can easily and stably cool a temperature-controlled object to a desired temperature.
- a fluid temperature control system includes: a high temperature side refrigerator having a high temperature side refrigerating circuit in which a high temperature side compressor, a high temperature side condenser, a high temperature side expansion valve, and a high temperature side evaporator are connected in this order so as to circulate the high temperature side refrigerant;
- the intermediate temperature side compressor, the intermediate temperature side condenser, the intermediate temperature side first expansion valve, and the intermediate temperature side first evaporator have an intermediate temperature side refrigeration circuit connected in this order so as to circulate the intermediate temperature side refrigerant, and the intermediate temperature side refrigeration
- a portion of the circuit downstream of the intermediate temperature side condenser and upstream of the intermediate temperature side first expansion valve and branching from the portion downstream of the intermediate temperature side first evaporator and upstream of the intermediate temperature side compressor a branch passage through which the intermediate temperature side refrigerant branched from the intermediate temperature side refrigerating circuit flows, an intermediate temperature side second expansion valve provided in the branch passage, and the intermediate temperature side second expansion valve in the branch passage
- the intermediate temperature side second evaporator of the intermediate temperature side refrigerator and the low temperature side condenser of the low temperature side refrigerator constitute a second cascade condenser that enables heat exchange between the intermediate temperature side refrigerant and the low temperature side refrigerant.
- the fluid temperature control system cools the fluid circulated by the fluid circulation device by the intermediate temperature side first evaporator of the intermediate temperature side refrigerator, and then cools the fluid through the low temperature side evaporator of the low temperature side refrigerator. Cool by
- the above fluid temperature control system After the fluid circulated by the fluid flow device is cooled (precooled) by the intermediate temperature side first evaporator of the intermediate temperature side refrigerator, it has a refrigerating capacity greater than that of the intermediate temperature side first evaporator. It is cooled by the low temperature side evaporator of the low temperature side refrigerator that can output.
- the above-described fluid temperature control system can achieve cooling to the desired target temperature of the temperature-controlled object more easily than a simple three-dimensional refrigeration system that employs a high-performance compressor in the low-temperature side refrigerator. , the temperature controlled object can be easily and stably cooled to a desired temperature.
- the upstream portion may constitute an internal heat exchanger that enables heat exchange of the low-temperature side refrigerant passing through each of the portions.
- the low temperature side refrigerant that flows out from the low temperature side condenser and before flowing into the low temperature side expansion valve and the low temperature side refrigerant that flows out from the low temperature side evaporator and before flowing into the low temperature side compressor They exchange heat with each other in a heat exchanger.
- the low temperature side refrigerant flowing out of the low temperature side condenser can be cooled before flowing into the low temperature side expansion valve, and the low temperature side refrigerant flowing out of the low temperature side evaporator can be heated before flowing into the low temperature side compressor. can do.
- the refrigerating capacity of the low-temperature side evaporator can be easily increased, and the burden of securing the durability performance (cold resistance performance) of the low-temperature side compressor can be reduced. Therefore, the desired cooling can be easily achieved without excessively increasing the capacity of the low-temperature side compressor, so that the ease of manufacture can be improved.
- the low-temperature side refrigerant is R23, and may be cooled to -70°C or lower by being expanded by the low-temperature side expansion valve.
- the low-temperature side refrigerant is R1132a or R508A, and may be cooled to -70°C or lower by being expanded by the low-temperature side expansion valve.
- the low-temperature side refrigerant may contain R1132a or R508A, and may be cooled to -70°C or lower by being expanded by the low-temperature side expansion valve.
- the intermediate temperature side refrigerant and the low temperature side refrigerant may be the same refrigerant.
- the medium temperature side refrigerant compressed by the medium temperature side compressor is condensed by the first cascade condenser and branched so as to be sent to the first medium temperature expansion valve and the second medium temperature expansion valve.
- the intermediate temperature side first expansion valve expands the intermediate temperature side refrigerant
- the intermediate temperature side second expansion valve expands the intermediate temperature side refrigerant
- the low temperature side expansion valve expands the low temperature side refrigerant. may be used to lower its temperature.
- the fluid circulated by the fluid circulation device is cooled by the intermediate temperature side first evaporator of the intermediate temperature side refrigerator and then cooled by the low temperature side evaporator of the low temperature side refrigerator. good too.
- the following operations (1) to (3) may be performed when the fluid temperature control system is activated.
- the high temperature side refrigerator is operated so that the high temperature side compressor is driven at a constant predetermined number of revolutions;
- the intermediate temperature side refrigerator is operated so that the intermediate temperature side compressor is driven at a constant predetermined number of revolutions, and the both the intermediate temperature side first expansion valve and the intermediate temperature side second expansion valve are opened;
- the low temperature side refrigerator is operated so that the low temperature side compressor is driven at a constant predetermined number of revolutions.
- the number of rotations of the high temperature side compressor, the number of rotations of the medium temperature side compressor, and the number of rotations of the low temperature side compressor and the At least one of the rotation speeds of the side compressors may be changed.
- the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side first evaporator may be set to a temperature higher than the evaporation temperature of the low temperature side refrigerant in the low temperature side evaporator.
- the rotation speed of the high temperature side compressor, the rotation speed of the intermediate temperature side compressor, and the low temperature side At least one of the rotation speeds of the compressor may be changed. Then, the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side first evaporator may be changed to a temperature lower than that at the time of startup.
- the refrigeration apparatus includes: A first refrigeration circuit in which a first compressor, a first condenser, a first expansion valve, and a first evaporator are connected in this order so as to circulate a first refrigerant; 1 branches from a portion downstream of the condenser and upstream of the first expansion valve, is connected to a portion downstream of the first evaporator and upstream of the first compressor, and is connected to the first refrigeration a branch passage through which the first refrigerant branched from a circuit flows; a cascade expansion valve provided in the branch passage; and a cascade expansion valve provided downstream of the cascade expansion valve in the branch passage.
- a first refrigerator having a cascade bypass circuit including an evaporator
- a second refrigerator having a second refrigeration circuit in which a second compressor, a second condenser, a second expansion valve, and a second evaporator are connected in this order so as to circulate the second refrigerant
- the cascade evaporator of the first refrigerator and the second condenser of the second refrigerator constitute a cascade condenser that enables heat exchange between the first refrigerant and the second refrigerant.
- the temperature controlled object may be cooled by the first evaporator of the first refrigerator and then cooled by the second evaporator of the second refrigerator.
- the refrigeration apparatus includes: A refrigeration circuit in which a compressor, a condenser, an expansion valve and an evaporator are connected in this order so as to circulate the refrigerant, A portion of the refrigeration circuit downstream of the condenser and upstream of the expansion valve and a portion of the refrigeration circuit downstream of the evaporator and upstream of the compressor pass through each of said portions. and an internal heat exchanger that enables heat exchange of the refrigerant.
- FIG. 1 is a schematic diagram of a fluid temperature control system according to one embodiment
- FIG. 2 is an enlarged view of an intermediate temperature side refrigerator and a low temperature side refrigerator that constitute the fluid temperature control system of FIG. 1
- FIG. FIG. 2 is an enlarged view of a low-temperature side refrigerator that constitutes the fluid temperature control system of FIG. 1
- FIG. 2 is a diagram showing the operation of the fluid temperature control system of FIG. 1 at startup;
- FIG. 1 is a schematic diagram of a fluid temperature control system 1 according to one embodiment of the present invention.
- a fluid temperature control system 1 includes a multidimensional refrigeration device 10 , a fluid circulation device 20 that causes fluid to flow, and a control device 30 .
- the fluid temperature control system 1 cools the fluid that is circulated by the fluid circulating device 20 by the multidimensional refrigerating device 10 .
- the multidimensional refrigeration system 10 cools the liquid that is circulated by the fluid flow device 20, but the fluid flow system 20 may circulate a gas, and the multidimensional refrigeration system 10 cools the gas. Allow to cool.
- the control device 30 is electrically connected to the multidimensional refrigeration system 10 and the fluid circulation system 20 and controls the operations of the multidimensional refrigeration system 10 and the fluid circulation system 20 .
- the control device 30 may be, for example, a computer including a CPU, a ROM, a RAM, etc., and may control the operations of the multidimensional refrigeration system 10 and the fluid circulation device 20 according to a stored computer program.
- the fluid temperature control system 1 is configured to cool the fluid circulated by the fluid circulation device 20 to ⁇ 70° C. or less, preferably ⁇ 80° C. or less.
- the refrigerating capacity and coolable temperature are not particularly limited.
- the multi-dimensional refrigerating device 10 is a ternary refrigerating device, and includes a high-temperature-side refrigerator 100, an intermediate-temperature-side refrigerator 200, and a low-temperature-side refrigerator 300 each configured as a heat-pump refrigerator.
- a first cascade capacitor CC1 is configured between the high temperature side refrigerator 100 and the intermediate temperature side refrigerator 200
- a second cascade capacitor CC2 is configured between the intermediate temperature side refrigerator 200 and the low temperature side refrigerator 300.
- the multi-component refrigerating apparatus 10 can cool the intermediate temperature side refrigerant circulated by the intermediate temperature side refrigerator 200 with the high temperature side refrigerant circulated by the high temperature side refrigerator 100, and the cooled intermediate temperature side refrigerant can cool the low temperature side refrigerator. It is possible to cool the low-temperature side refrigerant circulated by 300 .
- the high temperature side refrigerator 100 includes a high temperature side compressor 101, a high temperature side condenser 102, a high temperature side expansion valve 103, and a high temperature side evaporator 104, which are connected by piping members (pipes) so as to circulate the high temperature side refrigerant in this order.
- a high temperature side refrigeration circuit 110 , a high temperature side hot gas circuit 120 , and a cooling bypass circuit 130 are provided.
- the high-temperature side compressor 101 compresses the high-temperature side refrigerant, which is basically in a gaseous state, which has flowed out of the high-temperature side evaporator 104, and increases the temperature and pressure of the high-temperature side condenser 101. 102.
- the high-temperature side condenser 102 cools and condenses the high-temperature side refrigerant compressed by the high-temperature side compressor 101 with cooling water, converts it into a high-pressure liquid state at a predetermined temperature, and supplies it to the high-temperature side expansion valve 103 .
- the cooling water supply pipe 40 is connected to the high temperature side condenser 102, and the cooling water supplied from the cooling water supply pipe 40 cools the high temperature side refrigerant.
- cooling water for cooling the high-temperature side refrigerant water may be used, or other refrigerants may be used.
- the high temperature side condenser 102 may be configured as an air-cooled condenser.
- the high-temperature-side expansion valve 103 expands the high-temperature-side refrigerant supplied from the high-temperature-side condenser 102 to reduce the pressure of the high-temperature-side refrigerant, thereby reducing the temperature and pressure of the high-temperature-side refrigerant in a gas-liquid mixture or liquid state compared to before expansion. It is supplied to the high temperature side evaporator 104 .
- the high-temperature side evaporator 104 constitutes a first cascade condenser CC1 together with an intermediate-temperature side condenser 202 of the intermediate-temperature side refrigerator 200, which will be described later.
- the intermediate temperature side refrigerant is cooled by heat exchange. After exchanging heat with the intermediate temperature side refrigerant, the temperature of the high temperature side refrigerant rises and ideally becomes a gaseous state.
- the high temperature side hot gas circuit 120 branches from a portion downstream of the high temperature side compressor 101 and upstream of the high temperature side condenser 102 in the high temperature side refrigerating circuit 110 to provide a high temperature gas circuit downstream of the high temperature side expansion valve 103 and at a high temperature. It has a hot gas flow path 121 connected to the upstream portion of the side evaporator 104 and a flow control valve 122 provided in the hot gas flow path 121 .
- the high-temperature-side hot gas circuit 120 mixes the high-temperature-side refrigerant flowing out of the high-temperature-side compressor 101 with the high-temperature-side refrigerant expanded by the high-temperature-side expansion valve 103 according to the opening/closing and opening degree adjustment of the flow control valve 122. , the refrigerating capacity of the high temperature side evaporator 104 is adjusted. That is, the high temperature side hot gas circuit 120 is provided for capacity control of the high temperature side evaporator 104 . In the high-temperature side refrigerator 100, the provision of the high-temperature side hot gas circuit 120 makes it possible to quickly adjust the refrigerating capacity of the high-temperature side evaporator 104. FIG.
- the cooling bypass circuit 130 branches from a portion of the high temperature side refrigeration circuit 110 downstream of the high temperature side condenser 102 and upstream of the high temperature side expansion valve 103 to provide a cooling flow connected to the high temperature side compressor 101 . It has a passage 131 and a cooling expansion valve 132 provided in the cooling passage 131 .
- the cooling bypass circuit 130 expands the high-temperature side refrigerant that has flowed out of the high-temperature side condenser 102, and can cool the high-temperature side compressor 101 with the high-temperature side refrigerant whose temperature has been lowered compared to before expansion.
- the high-temperature-side refrigerant used in the high-temperature-side refrigerator 100 as described above is not particularly limited, but is appropriately determined according to the target cooling temperature for the temperature control target.
- the fluid circulated by the fluid circulation device 20 is cooled to ⁇ 70° C. or less, preferably ⁇ 80° C. or less, and the cooled fluid cools the object to be temperature-controlled. is used, but the type of high temperature side refrigerant is not particularly limited.
- the high-temperature side refrigerant R32, R125, R134a, R407C, HFO, CO2 , ammonia, or the like may be used.
- the high temperature side refrigerant may be a mixed refrigerant.
- a refrigerant added with n-pentane may be used as an oil carrier.
- the oil for lubricating the high temperature side compressor 101 can be suitably circulated together with the refrigerant, and the high temperature side compressor 101 can be stably operated.
- Propane may also be added as an oil carrier.
- the intermediate temperature side refrigerator 200 includes piping members (pipes) such that the intermediate temperature side compressor 201, the intermediate temperature side condenser 202, the intermediate temperature side first expansion valve 203, and the intermediate temperature side first evaporator 204 circulate the intermediate temperature side refrigerant in this order. ), a cascade bypass circuit 220, and an intermediate temperature side hot gas circuit 230.
- the intermediate-temperature-side compressor 201 compresses the intermediate-temperature-side refrigerant that has flowed out of the intermediate-temperature-side first evaporator 204 and is basically in a gaseous state, and the intermediate-temperature-side refrigerant is It feeds the condenser 202 .
- the intermediate temperature side condenser 202 constitutes the first cascade condenser CC1 together with the high temperature side evaporator 104 of the high temperature side refrigerator 100 as described above. It is cooled by the refrigerant and condensed to be in a state of a high-pressure liquid at a predetermined temperature, and supplied to the intermediate temperature side first expansion valve 203 .
- the intermediate-temperature side first expansion valve 203 expands the intermediate-temperature side refrigerant supplied from the intermediate-temperature side condenser 202 to reduce the pressure, thereby reducing the temperature and pressure of the intermediate-temperature side refrigerant in a gas-liquid mixture or liquid state compared to before expansion.
- Refrigerant is supplied to the intermediate temperature side first evaporator 204 .
- the intermediate-temperature-side first evaporator 204 exchanges heat between the supplied intermediate-temperature-side refrigerant and the fluid circulated by the fluid circulation device 20 to cool the fluid. After exchanging heat with the fluid circulated by the fluid circulation device 20, the temperature of the intermediate temperature side refrigerant rises and ideally becomes a gaseous state. be done.
- the cascade bypass circuit 220 branches from a portion downstream of the intermediate temperature side condenser 202 in the intermediate temperature side refrigeration circuit 210 and upstream of the intermediate temperature side first expansion valve 203, and downstream of the intermediate temperature side first evaporator 204. and a branch flow path 221 connected to the upstream side of the intermediate temperature side compressor 201 and through which the intermediate temperature side refrigerant branched from the intermediate temperature side refrigerating circuit 210 flows; 223 , and an intermediate temperature side second evaporator 224 provided downstream of the intermediate temperature side second expansion valve 223 in the branch passage 221 .
- the intermediate-temperature side second expansion valve 223 expands the intermediate-temperature side refrigerant branched from the intermediate-temperature side refrigerating circuit 210 to reduce the pressure, and the intermediate-temperature side refrigerant in the state of gas-liquid mixture or liquid whose temperature and pressure are lowered compared to before expansion. is supplied to the intermediate temperature side second evaporator 224 .
- the intermediate temperature side second evaporator 224 constitutes a second cascade condenser CC2 together with a low temperature side condenser 302, which will be described later, of the low temperature side refrigerator 300, and the low temperature side refrigerator 300 circulates the supplied intermediate temperature side refrigerant.
- the low-temperature side refrigerant is cooled by exchanging heat with the low-temperature side refrigerant. After exchanging heat with the low-temperature refrigerant, the medium-temperature refrigerant rises in temperature, ideally becomes a gaseous state, flows out from the second cascade condenser CC2, and joins with the medium-temperature refrigerant flowing out from the first medium-temperature evaporator 204. .
- the intermediate temperature side hot gas circuit 230 is branched from a portion downstream of the intermediate temperature side compressor 201 in the intermediate temperature side refrigeration circuit 210 and upstream of the intermediate temperature side condenser 202 to form a second intermediate temperature expansion in the cascade bypass circuit 220 . It has a hot gas flow path 231 connected to a portion downstream of the valve 223 and upstream of the intermediate temperature side second evaporator 224, and a flow control valve 232 provided in the hot gas flow path 231. .
- the intermediate temperature side hot gas circuit 230 mixes the intermediate temperature side refrigerant flowing out of the intermediate temperature side compressor 201 with the intermediate temperature side refrigerant expanded by the intermediate temperature side second expansion valve 223 in accordance with the opening/closing and opening adjustment of the flow control valve 232 . refrigerating capacity of the second cascade condenser CC2 (intermediate-temperature side second evaporator 224) is adjusted. That is, the intermediate temperature side hot gas circuit 230 is provided for capacity control of the second cascade capacitor CC2. In the intermediate temperature side refrigerator 200, the provision of the intermediate temperature side hot gas circuit 230 makes it possible to quickly adjust the refrigerating capacity of the second cascade capacitor CC2.
- the intermediate temperature side refrigerant used in the intermediate temperature side refrigerator 200 as described above is not particularly limited, but is appropriately determined according to the target cooling temperature for the temperature control object, as in the case of the high temperature side refrigerant.
- R23 is used as the medium temperature side refrigerant in order to cool the fluid circulated by the fluid flow device 20 to ⁇ 70° C. or less, preferably ⁇ 80° C. or less. It is not limited.
- low temperature side refrigerator In the low temperature side refrigerator 300, a low temperature side compressor 301, a low temperature side condenser 302, a low temperature side expansion valve 303, and a low temperature side evaporator 304 are connected by piping members (pipes) so as to circulate the low temperature side refrigerant in this order. It has a low temperature side refrigeration circuit 310 and a low temperature side hot gas circuit 320 .
- the low-temperature side compressor 301 compresses the low-temperature side refrigerant, which is basically in a gaseous state, which has flowed out of the low-temperature side evaporator 304, and raises the temperature and pressure of the low-temperature side refrigerant to the low-temperature side condenser.
- the low temperature side condenser 302 constitutes the second cascade condenser CC2 together with the middle temperature side second evaporator 224 of the middle temperature side refrigerator 200 as described above, and the supplied low temperature side refrigerant is transferred to the second cascade condenser CC2. It is cooled and condensed by the medium-temperature side refrigerant, converted into a high-pressure liquid at a predetermined temperature, and supplied to the low-temperature side expansion valve 303 .
- the low-temperature-side expansion valve 303 expands the low-temperature-side refrigerant supplied from the low-temperature-side condenser 302 to depressurize the low-temperature-side refrigerant, thereby reducing the temperature and pressure of the low-temperature-side refrigerant in a gas-liquid mixture or liquid state compared to before expansion. It is supplied to the low temperature side evaporator 304 .
- the low-temperature side evaporator 304 exchanges heat between the supplied low-temperature side refrigerant and the fluid circulated by the fluid circulation device 20 to cool the fluid.
- the low-temperature side refrigerant that has exchanged heat with the fluid flowed by the fluid circulation device 20 rises in temperature and ideally becomes a gaseous state, flows out from the low-temperature side evaporator 304, and is again compressed by the low-temperature side compressor 301. .
- the low-temperature side hot gas circuit 320 branches from a portion downstream of the low-temperature side compressor 301 and upstream of the low-temperature side condenser 302 in the low-temperature side refrigeration circuit 310 to provide a low-temperature It has a hot gas flow path 321 connected to the upstream portion of the side evaporator 304 and a flow control valve 322 provided in the hot gas flow path 321 .
- the low temperature side hot gas circuit 320 mixes the low temperature side refrigerant flowing out of the low temperature side compressor 301 with the low temperature side refrigerant expanded by the low temperature side expansion valve 303 according to the opening/closing and opening degree adjustment of the flow control valve 322 . , the refrigerating capacity of the low temperature side evaporator 304 is adjusted. That is, the low temperature side hot gas circuit 320 is provided for capacity control of the low temperature side evaporator 304 . In the low-temperature-side refrigerator 300, the provision of the low-temperature-side hot gas circuit 320 makes it possible to quickly adjust the refrigerating capacity of the low-temperature-side evaporator 304. FIG.
- a first portion 311 downstream of the low temperature side condenser 302 in the low temperature side refrigeration circuit 310 and upstream of the low temperature side expansion valve 303 and a low temperature side evaporator in the low temperature side refrigeration circuit 310 are provided.
- a second portion 312 on the downstream side of 304 and on the upstream side of the low temperature side compressor 301 constitutes an internal heat exchanger IE that enables heat exchange between the low temperature side refrigerants passing through the respective portions 311 and 312.
- the low temperature side refrigerant flowing out of the low temperature side condenser 302 can be cooled before flowing into the low temperature side expansion valve 303, and the low temperature side refrigerant flowing out of the low temperature side evaporator 304 flows into the low temperature side compressor 301.
- the refrigerating capacity of the low-temperature side evaporator 304 can be simply increased, and the burden of securing the durability performance (cold resistance performance) of the low-temperature side compressor 301 can be reduced.
- the low-temperature side refrigerant used in the low-temperature side refrigerator 300 as described above is not particularly limited, it is appropriately determined according to the target cooling temperature for the temperature control object, as in the case of the high-temperature side refrigerant and the medium-temperature side refrigerant. .
- R23 is used as the low-temperature side refrigerant in order to cool the fluid circulated by the fluid flow device 20 to ⁇ 70° C. or less, preferably ⁇ 80° C. or less. It is not limited.
- both the intermediate temperature side refrigerator 200 and the low temperature side refrigerator 300 in the present embodiment use R23, but the intermediate temperature side refrigerator 200 and the low temperature side refrigerator 300 may use different refrigerants.
- R1132a may be used in place of R23 in at least one of the medium temperature side refrigerator 200 and the low temperature side refrigerator 300 .
- R1132a has a boiling point of about ⁇ 83° C. or less under atmospheric pressure and can be cooled to ⁇ 70° C. or less, so it can be suitably used for cooling to extremely low temperatures.
- the global warming potential (GWP) of R1132a is extremely low, the device can be constructed in an environmentally friendly manner.
- R508A may be used instead of R23.
- a mixed refrigerant containing R23 and other refrigerants or a mixed refrigerant containing R1132a and other refrigerants may be used.
- a mixed refrigerant in which R1132a and CO 2 (R744) are mixed may be used. In this case, handling can be facilitated while realizing extremely low-temperature cooling and suppression of global warming potential.
- a mixed refrigerant in which R1132a, R744, and R23 are mixed may be used.
- a refrigerant in which n-pentane is added to R23, R1132a, or a mixed refrigerant containing at least one of these is used.
- n-pentane functions as an oil carrier
- the oil for lubricating the compressors 201, 301 can be circulated appropriately together with the refrigerant, and the compressors 201, 301 can be stably operated.
- Propane may also be added as an oil carrier.
- a fluid circulation device 20 in the present embodiment has a fluid flow path 21 through which fluid flows, and a pump 22 that imparts a driving force for causing the fluid to flow through the fluid flow path.
- the fluid flow path 21 in the present embodiment is connected to the intermediate temperature side first evaporator 204 of the intermediate temperature side refrigerator 200, is connected to the low temperature side evaporator 304 of the low temperature side refrigerator 300, and is further connected to the temperature controlled object 50. It is connected.
- the fluid flowing out of the pump 22 is cooled by the intermediate temperature side refrigerant in the intermediate temperature side first evaporator 204 and then cooled by the low temperature side refrigerant in the low temperature side evaporator 304 .
- the fluid is then supplied to temperature controlled object 50 and returned to pump 22 .
- the fluid flowing out of the pump 22 returns to the pump 22 after passing through the temperature controlled object 50, but the fluid communication device 20 is not limited to such a configuration.
- the fluid communication device 20 may control the temperature of the fluid flowing out of the pump 22, supply it to the temperature controlled object 50, and then discharge it.
- the fluid passed by the fluid flow device 20 is not particularly limited, in the present embodiment, ultra-low temperature brine is used.
- the temperature control object 50 may be a stage of a semiconductor manufacturing apparatus, or a member for mounting a substrate on which a semiconductor is mounted. Further, when the fluid communication device 20 allows gas to flow, the temperature control target 50 may be a space.
- the high temperature side compressor 101 of the high temperature side refrigerator 100, the medium temperature side compressor 201 of the medium temperature side refrigerator 200, and the low temperature side refrigerator 300 , and the pump 22 of the fluid communication device 20 are driven.
- the high-temperature side refrigerant circulates in the high-temperature side refrigerator 100
- the medium-temperature side refrigerant circulates in the medium-temperature side refrigerator 200
- the low-temperature side refrigerant circulates in the low-temperature side refrigerator 300
- the control device 30 controls the high temperature side expansion valve 103, the flow control valve 122 and the cooling expansion valve 132 in the high temperature side refrigerator 100, the intermediate temperature side first expansion valve 203 in the intermediate temperature side refrigerator 200, the intermediate temperature side
- the opening degrees of the second expansion valve 223 and the flow control valve 232, and the low temperature side expansion valve 303 and the flow control valve 322 in the low temperature side refrigerator 300 can be appropriately adjusted.
- Each of the valves described above is an electronic expansion valve whose opening degree can be adjusted based on an external signal in the present embodiment.
- the high temperature side refrigerant compressed by the high temperature side compressor 101 is condensed in the high temperature side condenser 102 and supplied to the high temperature side expansion valve 103 .
- the high temperature side expansion valve 103 expands the high temperature side refrigerant condensed by the high temperature side condenser 102 to lower the temperature thereof, and supplies the high temperature side refrigerant to the high temperature side evaporator 104 .
- the high temperature side evaporator 104 constitutes the first cascade condenser CC1 together with the intermediate temperature side condenser 202 of the intermediate temperature side refrigerator 200 as described above, and the intermediate temperature side refrigerator 200 circulates the supplied high temperature side refrigerant.
- the medium temperature side refrigerant is cooled by heat exchange with the medium temperature side refrigerant.
- the intermediate temperature side refrigerant compressed by the intermediate temperature side compressor 201 is condensed in the first cascade condenser CC1 and branched at the branch point BP shown in FIG. It is sent to the side first expansion valve 203 and the intermediate temperature side second expansion valve 223 .
- the intermediate temperature side first expansion valve 203 expands the intermediate temperature side refrigerant condensed by the first cascade condenser CC ⁇ b>1 to lower the temperature thereof, and supplies the intermediate temperature side refrigerant to the intermediate temperature side first evaporator 204 .
- the intermediate temperature side second expansion valve 223 expands the intermediate temperature side refrigerant condensed by the first cascade condenser CC1 to lower the temperature thereof, and supplies the intermediate temperature side refrigerant to the intermediate temperature side second evaporator 224 .
- the intermediate temperature side first evaporator 204 cools the fluid that is circulated by the fluid circulation device 20 with the intermediate temperature side refrigerant.
- the intermediate-temperature-side second evaporator 224 constitutes the second cascade condenser CC2 together with the low-temperature-side condenser 302 of the low-temperature-side refrigerator 300 as described above, and the supplied intermediate-temperature-side refrigerant is supplied to the low-temperature-side refrigerator 300.
- the low-temperature side refrigerant is cooled by exchanging heat with the circulating low-temperature side refrigerant.
- the low temperature side refrigerant compressed by the low temperature side compressor 301 is condensed in the second cascade condenser CC2, and flows through the internal heat exchanger IE to the low temperature side expansion valve 303 as shown in FIG. Sent.
- the low temperature side expansion valve 303 expands the low temperature side refrigerant that has passed through the internal heat exchanger IE to lower the temperature, and supplies the low temperature side refrigerant to the low temperature side evaporator 304 . Then, the low temperature side evaporator 304 cools the fluid that is caused to flow by the fluid flow device 20 with the low temperature side refrigerant.
- the intermediate temperature side refrigerant compressed by the intermediate temperature side compressor 201 is condensed in the intermediate temperature side first condenser 202 (first cascade condenser CC1), It is branched so as to be sent to the side second expansion valve 223 .
- the intermediate temperature side first expansion valve 203 expands the intermediate temperature side refrigerant
- the intermediate temperature side second expansion valve 223 expands the intermediate temperature side refrigerant
- the low temperature side expansion valve 303 expands the low temperature side refrigerant to lower the
- the fluid circulated by the fluid circulation device 20 is cooled by the intermediate temperature side first evaporator 204 of the intermediate temperature side refrigerator 200 and then cooled by the low temperature side evaporator 304 of the low temperature side refrigerator 300 .
- the low temperature side refrigerant that flows out from the low temperature side condenser 302 and before flowing into the low temperature side expansion valve 303 and the low temperature side refrigerant that flows out from the low temperature side evaporator 304 and flows into the low temperature side compressor 301 The low-temperature side refrigerant before the heat exchanges with each other.
- the low-temperature side refrigerant that has flowed out of the low-temperature side condenser 302 can be given a degree of supercooling.
- the fluid temperature control system 1 performs the following operations (0) to (3) in order at startup.
- the pump 22 is driven, and the fluid is circulated within the fluid circulating device 20 .
- the high temperature side refrigerator 100 is operated so that the high temperature side compressor 101 is driven at a constant predetermined number of revolutions.
- the intermediate temperature side refrigerator 200 is operated so that the intermediate temperature side compressor 201 is driven at a constant predetermined number of revolutions.
- the intermediate temperature side first expansion valve 203 and the intermediate temperature side second expansion valve 223 are both opened.
- the low temperature side refrigerator 300 is operated so that the low temperature side compressor 301 is driven at a constant predetermined number of revolutions.
- the high temperature side expansion valve 103 is opened to a predetermined degree of opening, and the flow control valve 122 is closed.
- both the intermediate temperature side first expansion valve 203 and the intermediate temperature side second expansion valve 223 are opened to a predetermined degree of opening. Meanwhile, the flow control valve 232 is closed.
- the low temperature side expansion valve 303 is opened to a predetermined degree of opening, and the flow control valve 322 is closed.
- the intermediate temperature side refrigerant and the low temperature side refrigerant are the same refrigerant. However, at the time of startup, the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side first evaporator 204 and the intermediate temperature side second evaporator 224 is higher than the evaporation temperature of the low temperature side refrigerant in the low temperature side evaporator 304. set.
- the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side first evaporator 204 can be changed by adjusting the opening degree of the intermediate temperature side first expansion valve 203 .
- the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side second evaporator 224 can be changed by adjusting the opening degree of the intermediate temperature side second expansion valve 223 .
- the evaporation temperature of the low temperature side refrigerant in the low temperature side evaporator 304 can be changed by adjusting the opening degree of the low temperature side expansion valve 303 .
- the fluid temperature control system 1 is turned on by the fluid circulation device 20. At least one of the rotation speed of the high temperature side compressor 101, the rotation speed of the intermediate temperature side compressor 201, and the rotation speed of the low temperature side compressor 301 is changed according to the temperature of the flowing fluid. Specifically, the rotation speed of the high temperature side compressor 101, the rotation speed of the medium temperature side compressor 201, and the rotation speed of the low temperature side compressor 301 are changed according to the difference between the temperature of the fluid discharged from the pump 22 and the target temperature. be done. The target temperature is recorded in control device 30 .
- automatic control automatic operation of the compressor is started.
- the evaporation temperature of the intermediate-temperature side refrigerant in the intermediate-temperature side first evaporator 204 is changed to a temperature lower than that at startup.
- the flow control valve 122, the flow control valve 232, and the flow control valve 322 are also controlled during the automatic control operation.
- the fluid temperature control system 1 cools the fluid that is circulated by the fluid circulation device 20 with the medium temperature side first evaporator 204 and then with the low temperature side evaporator 304 .
- the fluid circulated by the fluid circulation device 20 is cooled (pre-cooled) by the intermediate temperature side first evaporator 204 of the intermediate temperature side refrigerator 200, and then It is cooled by the low temperature side evaporator 304 of the low temperature side refrigerator 300 capable of outputting a larger refrigerating capacity than the evaporator 204 .
- the fluid temperature control system 1 achieves cooling to the target desired temperature for the temperature controlled object more easily than a simple ternary refrigeration system that employs a high-performance compressor in the low-temperature side refrigerator 300. cooling of the temperature controlled object to the desired temperature can be achieved easily and stably.
- the high temperature side refrigerator 100, the intermediate temperature side refrigerator 200, and the low temperature side refrigerator 300 start to operate in this order step by step.
- the evaporation temperature of the intermediate temperature side refrigerant in the intermediate temperature side first evaporator 204 and the intermediate temperature side second evaporator 224 is set to a temperature higher than the evaporation temperature of the low temperature side refrigerant in the low temperature side evaporator 304. be done.
- the medium temperature side compressor 201 and the low temperature side compressor 301 can be prevented from being overloaded, and the temperature control target can be cooled safely and efficiently to the desired temperature. can.
- the low temperature side refrigerant that flows out from the low temperature side condenser 302 and before flowing into the low temperature side expansion valve 303 and the low temperature side refrigerant that flows out from the low temperature side evaporator 304 and flows into the low temperature side compressor 301 The low-temperature side refrigerant before the heat exchanges with each other.
- the low temperature side refrigerant flowing out of the low temperature side condenser 302 can be cooled before flowing into the low temperature side expansion valve 303, and the low temperature side refrigerant flowing out of the low temperature side evaporator 304 flows into the low temperature side compressor 301. Can be heated before use.
- the refrigerating capacity of the low-temperature side evaporator 304 can be simply increased, and the burden of securing the durability performance (cold resistance performance) of the low-temperature side compressor 301 can be reduced. Therefore, the desired cooling can be easily achieved without excessively increasing the capacity of the low temperature side compressor 301, so that the ease of manufacture can be improved.
- the intermediate temperature side refrigerator 200 and the low temperature side refrigerator 300 in the present embodiment are useful even when configured as a binary refrigeration system. That is, the following binary type refrigerating apparatus having the intermediate temperature side refrigerator 200 as the first refrigerator and the low temperature side refrigerator 300 as the second refrigerator is also useful.
- a first refrigeration circuit in which a first compressor, a first condenser, a first expansion valve, and a first evaporator are connected in this order so as to circulate a first refrigerant; 1 branches from a portion downstream of the condenser and upstream of the first expansion valve, is connected to a portion downstream of the first evaporator and upstream of the first compressor, and is connected to the first refrigeration a branch passage through which the first refrigerant branched from the circuit flows; a cascade expansion valve provided in the branch passage; and a cascade expansion valve provided downstream of the cascade expansion valve in the branch passage.
- a first refrigerator having a cascade bypass circuit including an evaporator
- a second refrigerator having a second refrigeration circuit in which a second compressor, a second condenser, a second expansion valve, and a second evaporator are connected in this order so as to circulate the second refrigerant
- Refrigeration wherein the cascade evaporator of the first refrigerator and the second condenser of the second refrigerator constitute a cascade condenser that enables heat exchange between the first refrigerant and the second refrigerant.
- the low-temperature side refrigerator 300 in the present embodiment is useful even when configured as a unit type refrigerator as described below.
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Abstract
Description
高温側圧縮機、高温側凝縮器、高温側膨張弁及び高温側蒸発器が、この順に高温側冷媒を循環させるように接続された高温側冷凍回路を有する高温側冷凍機と、
中温側圧縮機、中温側凝縮器、中温側第1膨張弁及び中温側第1蒸発器が、この順に中温側冷媒を循環させるように接続された中温側冷凍回路を有するとともに、前記中温側冷凍回路における前記中温側凝縮器の下流側で且つ前記中温側第1膨張弁の上流側の部分から分岐し、前記中温側第1蒸発器の下流側で且つ前記中温側圧縮機の上流側の部分に接続され、前記中温側冷凍回路から分岐する前記中温側冷媒を通流させる分岐流路、前記分岐流路に設けられた中温側第2膨張弁、及び前記分岐流路において前記中温側第2膨張弁よりも下流側に設けられた中温側第2蒸発器を含むカスケード用バイパス回路を有する中温側冷凍機と、
低温側圧縮機、低温側凝縮器、低温側膨張弁及び低温側蒸発器が、この順に低温側冷媒を循環させるように接続された低温側冷凍回路を有する低温側冷凍機と、
流体を通流させる流体通流装置と、を備え、
前記高温側冷凍機の前記高温側蒸発器と前記中温側冷凍機の前記中温側凝縮器とが、前記高温側冷媒と前記中温側冷媒との熱交換を可能とする第1カスケードコンデンサを構成し、
前記中温側冷凍機の前記中温側第2蒸発器と前記低温側冷凍機の前記低温側凝縮器とが、前記中温側冷媒と前記低温側冷媒との熱交換を可能とする第2カスケードコンデンサを構成する。
そして、当該流体温調システムは、前記流体通流装置が通流させる流体を、前記中温側冷凍機の前記中温側第1蒸発器によって冷却した後、前記低温側冷凍機の前記低温側蒸発器によって冷却する。
これにより、上記流体温調システムは、温度制御対象物に対する目標の所望温度までの冷却を実現する際に、低温側冷凍機において高性能な圧縮機を採用した単純な三元冷凍装置よりも容易に製作され得ることで、所望温度までの温度制御対象の冷却を容易に且つ安定的に実現できる。
(1)一定の所定回転数で前記高温側圧縮機が駆動するように前記高温側冷凍機が運転され、
(2)次いで、前記高温側冷凍機の運転時間が第1の運転時間を越えた後、一定の所定回転数で前記中温側圧縮機が駆動するように前記中温側冷凍機が運転され、前記中温側第1膨張弁及び前記中温側第2膨張弁がともに開状態とされ、
(3)次いで、前記中温側冷凍機の運転時間が第2の運転時間を越えた後、一定の所定回転数で前記低温側圧縮機が駆動するように前記低温側冷凍機が運転される。
第1圧縮機、第1凝縮器、第1膨張弁及び第1蒸発器が、この順に第1冷媒を循環させるように接続された第1冷凍回路を有するとともに、前記第1冷凍回路における前記第1凝縮器の下流側で且つ前記第1膨張弁の上流側の部分から分岐し、前記第1蒸発器の下流側で且つ前記第1圧縮機の上流側の部分に接続され、前記第1冷凍回路から分岐する前記第1冷媒を通流させる分岐流路、前記分岐流路に設けられたカスケード用膨張弁、及び前記分岐流路において前記カスケード用膨張弁よりも下流側に設けられたカスケード用蒸発器を含むカスケード用バイパス回路を有する第1冷凍機と、
第2圧縮機、第2凝縮器、第2膨張弁及び第2蒸発器が、この順に第2冷媒を循環させるように接続された第2冷凍回路を有する第2冷凍機と、を備え、
前記第1冷凍機の前記カスケード用蒸発器と前記第2冷凍機の前記第2凝縮器とが、前記第1冷媒と前記第2冷媒との熱交換を可能とするカスケードコンデンサを構成する。
当該冷凍装置は、温度制御対象を、前記第1冷凍機の前記第1蒸発器によって冷却した後、前記第2冷凍機の前記第2蒸発器によって冷却してもよい。
圧縮機、凝縮器、膨張弁及び蒸発器が、この順に冷媒を循環させるように接続された冷凍回路を備え、
前記冷凍回路における前記凝縮器の下流側で且つ前記膨張弁の上流側の部分と、前記冷凍回路における前記蒸発器の下流側で且つ前記圧縮機の上流側の部分とが、各前記部分を通過する前記冷媒の熱交換を可能とする内部熱交換器を構成する。
多元式冷凍装置10は三元式冷凍装置であり、それぞれヒートポンプ式の冷凍機として構成される高温側冷凍機100と、中温側冷凍機200と、低温側冷凍機300と、を備えている。
高温側冷凍機100は、高温側圧縮機101、高温側凝縮器102、高温側膨張弁103及び高温側蒸発器104が、この順に高温側冷媒を循環させるように配管部材(パイプ)によって接続された高温側冷凍回路110と、高温側ホットガス回路120と、冷却用バイパス回路130と、を有している。
中温側冷凍機200は、中温側圧縮機201、中温側凝縮器202、中温側第1膨張弁203及び中温側第1蒸発器204が、この順に中温側冷媒を循環させるように配管部材(パイプ)により接続された中温側冷凍回路210と、カスケード用バイパス回路220と、中温側ホットガス回路230と、を有している。
低温側冷凍機300は、低温側圧縮機301、低温側凝縮器302、低温側膨張弁303及び低温側蒸発器304が、この順に低温側冷媒を循環させるように配管部材(パイプ)により接続された低温側冷凍回路310と、低温側ホットガス回路320と、を有している。
例えば、中温側冷凍機200及び低温側冷凍機300の少なくともいずれかにおいては、R1132aと、CO2(R744)とを混合させた混合冷媒が用いられてもよい。この場合、極めて低温の冷却と地球温暖化係数の抑制を実現しつつ、取り扱いも容易になり得る。
また、中温側冷凍機200及び低温側冷凍機300の少なくともいずれかにおいて、R1132aと、R744と、R23とを混合させた混合冷媒が用いられてもよい。
続いて流体通流装置20について説明する。本実施の形態における流体通流装置20は、流体が通流する流体流路21と、流体流路で流体を通流させるための駆動力を付与するポンプ22と、を有している。本実施の形態における流体流路21は、中温側冷凍機200の中温側第1蒸発器204に接続され、低温側冷凍機300の低温側蒸発器304に接続され、さらには温度制御対象50に接続されている。
次に、流体温調システム1の動作の一例を説明する。
(1)次いで、ポンプ22の運転時間が所定時間を越えた後、一定の所定回転数で高温側圧縮機101が駆動するように高温側冷凍機100が運転される。
(2)次いで、高温側冷凍機100の運転時間が第1の運転時間を越えた後、一定の所定回転数で中温側圧縮機201が駆動するように中温側冷凍機200が運転される。この際、中温側第1膨張弁203及び中温側第2膨張弁223がともに開状態とされる。
(3)次いで、中温側冷凍機200の運転時間が第2の運転時間を越えた後、一定の所定回転数で低温側圧縮機301が駆動するように低温側冷凍機300が運転される。
詳しくは、高温側圧縮機101の回転数、中温側圧縮機201の回転数及び低温側圧縮機301の回転数は、ポンプ22から吐出される流体の温度と目標温度との差分に応じて変更される。目標温度は、制御装置30に記録されている。
第2圧縮機、第2凝縮器、第2膨張弁及び第2蒸発器が、この順に第2冷媒を循環させるように接続された第2冷凍回路を有する第2冷凍機と、を備え、
前記第1冷凍機の前記カスケード用蒸発器と前記第2冷凍機の前記第2凝縮器とが、前記第1冷媒と前記第2冷媒との熱交換を可能とするカスケードコンデンサを構成する、冷凍装置。
この際、温度制御対象を、前記第1冷凍機の前記第1蒸発器によって冷却した後、前記第2冷凍機の前記第2蒸発器によって冷却することが良い。
前記冷凍回路における前記凝縮器の下流側で且つ前記膨張弁の上流側の部分と、前記冷凍回路における前記蒸発器の下流側で且つ前記圧縮機の上流側の部分とが、各前記部分を通過する前記冷媒の熱交換を可能とする内部熱交換器を構成する、冷凍装置。
Claims (8)
- 高温側圧縮機、高温側凝縮器、高温側膨張弁及び高温側蒸発器が、この順に高温側冷媒を循環させるように接続された高温側冷凍回路を有する高温側冷凍機と、
中温側圧縮機、中温側凝縮器、中温側第1膨張弁及び中温側第1蒸発器が、この順に中温側冷媒を循環させるように接続された中温側冷凍回路を有するとともに、前記中温側冷凍回路における前記中温側凝縮器の下流側で且つ前記中温側第1膨張弁の上流側の部分から分岐し、前記中温側第1蒸発器の下流側で且つ前記中温側圧縮機の上流側の部分に接続され、前記中温側冷凍回路から分岐する前記中温側冷媒を通流させる分岐流路、前記分岐流路に設けられた中温側第2膨張弁、及び前記分岐流路において前記中温側第2膨張弁よりも下流側に設けられた中温側第2蒸発器を含むカスケード用バイパス回路を有する中温側冷凍機と、
低温側圧縮機、低温側凝縮器、低温側膨張弁及び低温側蒸発器が、この順に低温側冷媒を循環させるように接続された低温側冷凍回路を有する低温側冷凍機と、
流体を通流させる流体通流装置と、を備え、
前記高温側冷凍機の前記高温側蒸発器と前記中温側冷凍機の前記中温側凝縮器とが、前記高温側冷媒と前記中温側冷媒との熱交換を可能とする第1カスケードコンデンサを構成し、
前記中温側冷凍機の前記中温側第2蒸発器と前記低温側冷凍機の前記低温側凝縮器とが、前記中温側冷媒と前記低温側冷媒との熱交換を可能とする第2カスケードコンデンサを構成し、
前記中温側冷媒と、前記低温側冷媒とが同じ冷媒であり、
起動時においては、
(1)一定の所定回転数で前記高温側圧縮機が駆動するように前記高温側冷凍機が運転され、
(2)次いで、前記高温側冷凍機の運転時間が第1の運転時間を越えた後、一定の所定回転数で前記中温側圧縮機が駆動するように前記中温側冷凍機が運転され、前記中温側第1膨張弁及び前記中温側第2膨張弁がともに開状態とされ、
(3)次いで、前記中温側冷凍機の運転時間が第2の運転時間を越えた後、一定の所定回転数で前記低温側圧縮機が駆動するように前記低温側冷凍機が運転され、
起動後において、前記流体通流装置が通流させる流体を、前記中温側冷凍機の前記中温側第1蒸発器によって冷却した後、前記低温側冷凍機の前記低温側蒸発器によって冷却する、流体温調システム。 - 前記低温側冷凍機の運転時間が第3の運転時間を越えた後、前記流体の温度に応じて、前記高温側圧縮機の回転数、前記中温側圧縮機の回転数及び前記低温側圧縮機の回転数のうちの少なくともいずれかを変化させる、請求項1に記載の流体温調システム。
- 前記起動時において、前記中温側第1蒸発器での前記中温側冷媒の蒸発温度は、前記低温側蒸発器での前記低温側冷媒の蒸発温度よりも高い温度に設定される、請求項2に記載の流体温調システム。
- 前記低温側冷凍機の運転時間が第3の運転時間を越えた後、
前記流体の温度に応じて、前記高温側圧縮機の回転数、前記中温側圧縮機の回転数及び前記低温側圧縮機の回転数のうちの少なくともいずれかを変化させ、
前記中温側第1蒸発器での前記中温側冷媒の蒸発温度は、前記起動時のときよりも低い温度に変更される、請求項1に記載の流体温調システム。 - 前記起動後において、前記中温側圧縮機によって圧縮される前記中温側冷媒は、前記第1カスケードコンデンサで凝縮されて、前記中温側第1膨張弁及び前記中温側第2膨張弁に送られるように分岐され、
前記中温側第1膨張弁は前記中温側冷媒を膨張させ、前記中温側第2膨張弁は前記中温側冷媒を膨張させ、同時に、前記低温側膨張弁が、前記低温側冷媒を膨張させてその温度を低下させ、これにより、前記流体通流装置が通流させる流体を、前記中温側冷凍機の前記中温側第1蒸発器によって冷却した後、前記低温側冷凍機の前記低温側蒸発器によって冷却する、請求項1に記載の流体温調システム。 - 前記低温側冷媒は、R23であり、前記低温側膨張弁によって膨張されることにより、-70℃以下まで降温される、請求項1に記載の流体温調システム。
- 前記低温側冷媒は、R508Aであり、前記低温側膨張弁によって膨張されることにより、-70℃以下まで降温される、請求項1に記載の流体温調システム。
- 前記低温側冷媒は、R508Aを含み、前記低温側膨張弁によって膨張されることにより、-70℃以下まで降温される、請求項1に記載の流体温調システム。
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03263556A (ja) * | 1990-03-12 | 1991-11-25 | Sanyo Electric Co Ltd | 多元冷凍装置 |
WO2017141722A1 (ja) * | 2016-02-17 | 2017-08-24 | パナソニックヘルスケアホールディングス株式会社 | 冷凍装置 |
WO2020095381A1 (ja) * | 2018-11-07 | 2020-05-14 | 伸和コントロールズ株式会社 | 流体温調システム及び冷凍装置 |
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JPH03263556A (ja) * | 1990-03-12 | 1991-11-25 | Sanyo Electric Co Ltd | 多元冷凍装置 |
WO2017141722A1 (ja) * | 2016-02-17 | 2017-08-24 | パナソニックヘルスケアホールディングス株式会社 | 冷凍装置 |
WO2020095381A1 (ja) * | 2018-11-07 | 2020-05-14 | 伸和コントロールズ株式会社 | 流体温調システム及び冷凍装置 |
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