WO2022153389A1 - 波長可変光フィルタ - Google Patents

波長可変光フィルタ Download PDF

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Publication number
WO2022153389A1
WO2022153389A1 PCT/JP2021/000807 JP2021000807W WO2022153389A1 WO 2022153389 A1 WO2022153389 A1 WO 2022153389A1 JP 2021000807 W JP2021000807 W JP 2021000807W WO 2022153389 A1 WO2022153389 A1 WO 2022153389A1
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Prior art keywords
component
optical filter
tunable optical
transparent electrode
incident surface
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PCT/JP2021/000807
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English (en)
French (fr)
Japanese (ja)
Inventor
優理奈 田中
尊 坂本
勇一 赤毛
宗一 岡
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NTT Inc
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Nippon Telegraph and Telephone Corp
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Priority to US18/261,008 priority Critical patent/US12578520B2/en
Priority to PCT/JP2021/000807 priority patent/WO2022153389A1/ja
Priority to JP2022574906A priority patent/JP7485091B2/ja
Publication of WO2022153389A1 publication Critical patent/WO2022153389A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters

Definitions

  • the present invention relates to a Fabry-Perot interferometer type tunable optical filter.
  • a tunable wavelength light filter that can select an arbitrary transmission wavelength is used as a basic technology for laser application, such as controlling the oscillation wavelength of a laser.
  • Optical imaging is one of the laser application techniques using a tunable optical filter.
  • Optical Coherence Tomography (OCT) is widely used because it can visualize the inside of a living body in a non-destructive and non-contact manner by using optical interference.
  • Some light sources used in OCT realize a wavelength sweep light source by sweeping a wavelength variable light filter in the light source, and the speed of imaging is determined by the sweep speed of the wavelength variable light filter. Further, since the wavelength sweep width determines the measurement resolution, a tunable optical filter having a higher speed and a wider sweep width is required.
  • Patent Document 1 there is a tunable optical filter using a MEMS mirror and a diffracting element (Patent Document 1).
  • the wavelength of the reflected light is changed by changing the angle of incidence of the light on the diffraction grating by the MEMS mirror.
  • the angle of the MEMS mirror can be greatly changed, a large filterable wavelength band can be obtained, but the drive speed is about several tens of kHz and the configuration is as large as several tens of cm.
  • Non-Patent Document 1 There is also a wavelength filter that uses the electrostatic force of MEMS (Non-Patent Document 1).
  • the length of the resonator is changed by fixing the mirror to the flexible beam, and it functions as a wavelength filter. Since it is a MEMS mechanism that uses electrostatic force, it is smaller than the above-mentioned tunable optical filter and can sweep a wide wavelength band at high speed, but the configuration is complicated and beam manufacturing accuracy is an issue. There is.
  • Patent Document 2 A tunable optical filter using an electrostrictive crystal has also been proposed (Patent Document 2). With this technique, a filter can be realized with a simple configuration, and high-speed operation of several hundred kHz is possible.
  • the tunable optical filter using an electrostrictive crystal has a large drive voltage of 400 V when the wavelength sweep width is 100 nm (Patent Document 2).
  • a commercial voltage source capable of high-speed drive of several hundred kHz to MHz can only obtain an output of about 100 Vpp, which makes it difficult to put it into practical use.
  • the size of the high voltage source is generally large, it is conceivable that the applicable applications will be limited.
  • the amount of heat generated by the device is proportional to the square of the voltage, the heat generated by the device also increases when the drive voltage is large, which requires a higher-performance cooling mechanism and operates normally when cooling is insufficient. It is possible not to do so.
  • a conventional tunable optical filter using an electrostrictive crystal requires a high driving voltage that is difficult to put into practical use and makes it difficult to operate normally. ..
  • the present invention has been made to solve the above problems, and an object of the present invention is to reduce the driving voltage of a tunable optical filter using an electrostrictive crystal.
  • the variable wavelength light filter according to the present invention includes a first incident surface and a first exit surface arranged on the opposite side of the first incident surface, and is made of a material having an electrostrictive effect and transmitting light. It includes a plate-shaped first component in which a first incident surface and a first emitting surface are arranged on an optical axis, and a second emitting surface arranged on a side opposite to the second incident surface and the second incident surface.
  • a plate-like material composed of a material that transmits light, the second incident surface and the second exit surface are arranged on the optical axis, and the distance between the first incident surface and the second incident surface is constant on the optical axis.
  • the second component of the above, the first reflective film formed on the first exit surface that partially reflects light, the second reflective film formed on the second incident surface and partially reflecting light, and the first A fabric perot interferometer is composed of a first reflective film and a second reflective film, including a voltage applying unit that applies a voltage in the plate thickness direction of the component and a charge injection unit that injects light into the first component. ..
  • the electric charge is injected into the first component made of a material having an electrolytic distortion effect and transmitting light, driving of a wavelength-variable optical filter using an electrolytic distortion crystal
  • the voltage can be reduced.
  • FIG. 1 is a cross-sectional view showing the configuration of a tunable optical filter according to the first embodiment of the present invention.
  • FIG. 2 is a characteristic diagram showing a change in the electric field Ez (in) at the position z inside the KTN crystal due to the internal charge as the position z in the direction perpendicular to the electrode surface in the first component when the KTN crystal is used.
  • FIG. 3 shows the electric field Ez at the position z inside the KTN crystal when the electric field due to the external voltage is added to the electric field due to the internal charge as the position z in the direction perpendicular to the electrode surface in the first component when the KTN crystal is used. It is a characteristic diagram which shows the change of.
  • FIG. 2 is a characteristic diagram showing a change in the electric field Ez (in) at the position z inside the KTN crystal due to the internal charge as the position z in the direction perpendicular to the electrode surface in the first component when the KTN crystal is used.
  • FIG. 3 shows the electric field
  • FIG. 4 is an explanatory diagram for explaining that the KTN crystal obtained by adding the electric field due to the internal charge to the electric field due to the external voltage warps so that the cathode side becomes convex.
  • FIG. 5 is a characteristic diagram showing actual measurement values of displacement distribution in the Z-axis direction when a constant voltage of 400 V is applied to an electrode that makes ohmic contact with a KTN crystal.
  • FIG. 6 is a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the second embodiment of the present invention.
  • FIG. 7A is an explanatory diagram for explaining the displacement when the elastic sheets are provided on both sides of the first component.
  • FIG. 7B is an explanatory diagram for explaining the displacement when the elastic sheet is provided on one side of the first component.
  • FIG. 8 is a characteristic diagram showing the result of calculating the relationship between the displacement of the KTN crystal due to electric strain and the driving voltage by the finite element method.
  • FIG. 9A is a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the third embodiment of the present invention.
  • FIG. 9B is a plan view showing a partial configuration of the wavelength tunable optical filter according to the third embodiment of the present invention.
  • FIG. 10 is a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the fourth embodiment of the present invention.
  • FIG. 11 is an explanatory diagram for explaining the displacement when different elastic sheets are provided on both sides of the first component.
  • This tunable optical filter includes a plate-shaped first component 101, a plate-shaped second component 102, a first reflective film 103, and a second reflective film 104.
  • the first component 101 includes a first incident surface 101a and a first exit surface 101b arranged on the opposite side of the first incident surface 101a. Further, the first component 101 is made of a material having an electrostrictive effect and transmitting light. The first component 101 can be made of, for example, a dielectric having an electrostrictive effect. The first component 101 is made of a material having high transparency to light in the target wavelength band.
  • the first component 101 is, for example, a KTN [KTa 1- ⁇ Nb ⁇ O 3 (0 ⁇ ⁇ 1)] crystal or a lithium-added KLTN [K 1- ⁇ Li ⁇ Ta 1- ⁇ Nb ⁇ O 3 ( It can be composed of any of 0 ⁇ ⁇ 1,0 ⁇ ⁇ 1)] crystals.
  • KTN crystals and KLTN crystals are known as crystals having an electrostrictive effect. It is known that the electric strain effect of these crystals can obtain a strain amount proportional to the square of the electric field defined by the voltage / distance between electrodes.
  • the first component 101 can also be composed of barium titanate (BaTIO 3 ), lithium niobate (LiNbO 3 ), calcium fluoride (CaF 2 ) and the like.
  • the surface accuracy (maximum shape error) of the first incident surface 101a and the first exit surface 101b can be set to about the wavelength of the target light / 10.
  • the second component 102 includes a second incident surface 102a and a second exit surface 102b arranged on the side opposite to the second incident surface 102a. Further, the second component 102 is made of a material through which light is transmitted. The second component 102 can be made of a material having high transparency to light in the target wavelength band. The second component 102 can be made of, for example, BK7 glass or quartz glass. The second component 102 is a KTN [KTa 1- ⁇ Nb ⁇ O 3 (0 ⁇ ⁇ 1)] crystal or a lithium-added KLTN [K 1- ⁇ Li ⁇ Ta 1- ⁇ Nb ⁇ O 3 ( It can also be composed of any of 0 ⁇ ⁇ 1,0 ⁇ ⁇ 1)] crystals.
  • the second component 102 can also be composed of barium titanate (BaTIO 3 ), lithium niobate (LiNbO 3 ), calcium fluoride (CaF 2 ) and the like.
  • the surface accuracy (maximum shape error) of the second incident surface 102a and the second exit surface 102b of the second component 102 can be set to about the wavelength of the target light / 10.
  • the first incident surface 101a and the first exit surface 101b of the first component 101 are arranged on the optical axis (optical path) 131, and both the second incident surface 102a and the second exit surface 102b of the second component 102 It is arranged on the optical axis 131. Further, the distance between the first incident surface 101a and the second incident surface 102a is constant on the optical axis 131. For example, if the first component 101 and the second component 102 are fixedly arranged on a surface plate (not shown), the distance between the first incident surface 101a and the second incident surface 102a can be fixed on the optical axis 131. can.
  • first reflective film 103 is formed on the first exit surface 101b and partially reflects light.
  • the second reflective film 104 is formed on the second incident surface 102a and partially reflects light.
  • the first reflective film 103 and the second reflective film 104 constitute a Fabry-Perot interferometer having a resonator length of the distance between them.
  • first exit surface 101b and the second incident surface 102a can be arranged so as to face each other and have a parallel relationship with each other. Further, the first incident surface 101a and the first exit surface 101b can be in a parallel relationship with each other. Similarly, the second incident surface 102a and the second exit surface 102b can be in a parallel relationship with each other.
  • the first exit surface 101b and the second incident surface 102a face each other. There is no need to place the position.
  • the first exit surface 101b and the second incident surface 102a can be planes perpendicular to the optical axis 131.
  • the positional relationship between the first exit surface 101b and the second incident surface 102a described above is synonymous with the relationship between the reflection surface of the first reflection film 103 and the reflection surface of the second reflection film 104.
  • the wavelength variable optical filter according to the embodiment is a voltage application unit that applies a voltage so that an electric field is generated in the plate thickness direction of the first component 101, and also has a charge injection unit that injects a charge into the first component 101.
  • the first transparent electrode 105 and the second transparent electrode 106 are provided.
  • the first transparent electrode 105 is formed on the first incident surface 101a and is ohmic connected (contacted) with the first component 101.
  • the second transparent electrode 106 is formed between the first exit surface 101b and the first reflective film 103, and is ohmic-connected (contacted) to the first component 101.
  • a voltage can be applied so that the first transparent electrode 105 serves as an anode and the second transparent electrode 106 serves as a cathode.
  • the first transparent electrode 105 and the second transparent electrode 106 can be made of, for example, indium tin oxide (ITO). If the first component 101 is composed of a KTN crystal or a KLTN crystal, the first transparent electrode 105 and the second transparent electrode 106 composed of ITO are ohmic-connected to the first component 101. For example, when the first component 101 is composed of a KTN crystal or a KLTN crystal, the transparent electrode can be charged with a material having a work function of less than 5.0 eV. The distance between the first transparent electrode 105 and the second transparent electrode 106, in other words, the plate thickness of the first component 101 can be smaller than the beam diameter of light.
  • ITO indium tin oxide
  • the first transparent electrode 105 and the second transparent electrode 106 When a voltage is applied to the first transparent electrode 105 and the second transparent electrode 106 by a voltage source (not shown), an electric field is generated in the first component 101 in the plate thickness direction.
  • an electric charge (electrons) is injected into the first component 101.
  • the first component 101 in which the electric charge is injected in addition to the application of the voltage, is warped so as to be convex toward the electrode serving as the cathode. This is because, as will be described later, in addition to the electric field due to the application of the voltage, the electric field of the internal charge due to the injected electric charge acts on the first component 101.
  • the displacement of the first component 101 can be increased as compared with the conventional case.
  • the magnitude of the displacement described above depends on the applied voltage, it is variable by changing the voltage. Further, the Fabry-Perot interferometer transmits light whose resonator length satisfies an integral multiple of a half wavelength. Therefore, if a voltage is applied to the first component 101 via the first transparent electrode 105 and the second transparent electrode 106 and the resonator length is changed by using the electrostrictive effect, the filtered wavelength is changed. I can get it.
  • the polarization P is proportional to the electric field E.
  • E the electric field due to the external voltage
  • This electrostriction effect is a phenomenon that occurs when the KTN crystal is a cubic crystal.
  • the crystal structure of a KTN crystal depends on the temperature, and when the crystal is above the Curie temperature, it becomes a cubic crystal.
  • the polarization P can be regarded as being proportional to the relative permittivity ⁇ r . Since this relative permittivity ⁇ r has temperature dependence, temperature control is also important in order to stably generate the electrolytic strain effect.
  • the polarization Pz satisfies the following relationship.
  • the amount of shrinkage of the crystal in the X-axis direction and the Y-axis direction differs depending on the position z in the Z-axis direction.
  • the size of the above-mentioned shrinkage amount is shown by the size of the black triangle.
  • the amount of shrinkage is larger toward the anode side. As a result, a warp such that the cathode side becomes convex occurs in the crystal having an electrostrictive effect.
  • ⁇ z be the difference (displacement) in the position of the center of gravity of the crystal surface on the cathode side between when the applied voltage is 0V and when the voltage is applied. Further, the distance from the position of the center of gravity of the crystal surface on the cathode side to the position of the center of gravity of the crystal surface on the anode side when no voltage is applied is d1. Further, the distance from the position of the center of gravity of the crystal surface on the cathode side to the position of the center of gravity of the crystal surface on the anode side when there is no internal charge and a voltage is applied is d1'.
  • d2 be the distance from the position of the center of gravity of the crystal surface on the cathode side to the position of the center of gravity of the crystal surface on the anode side when there is an internal charge and a voltage is applied.
  • the relationship between these distances is d1 ⁇ d1' ⁇ d2.
  • the resonator length of the Fabry-Perot resonator composed of the first reflective film 103 formed on the first component 101 and the second reflective film 104 formed on the second component 102 is the first reflective film 103 and the first. 2 Defined as the distance from the reflective film 104.
  • This resonator length becomes shorter due to the displacement of the first component 101 to which the voltage is applied.
  • the resonator length changes by the amount of the displacement ⁇ z [(b) in FIG. 4].
  • the first component 101 since the first component 101 has an internal charge, the first component 101 to which the voltage is applied warps so as to be convex toward the anode side. Therefore, the displacement ⁇ z becomes larger than that in the case where there is no internal charge, and even if the voltage is the same, a larger change in the resonator length can be obtained.
  • FIG. 5 shows the measured values of the displacement distribution in the Z-axis direction when a constant voltage of 400 V is applied to the KTN crystal.
  • the X-axis and Y-axis of FIG. 5 indicate the position of the crystal, the Z-axis indicates the displacement, and the displacement of the cathode surface when a voltage of 400 V is applied is measured.
  • the displacement was measured using a laser displacement meter.
  • the size of the KTN crystal is 4 ⁇ 3.2 ⁇ 1.2 mm, and a titanium electrode is formed on the surface of 4 ⁇ 3.2. This titanium electrode has a small work function and is charged when a high voltage (> 200V) is applied. Therefore, as explained with reference to FIG.
  • This tunable optical filter has the first component 101, the second component 102, the first reflective film 103, the second reflective film 104, the first transparent electrode 105, and the second transparent electrode, as in the first embodiment described above. 106 is provided.
  • the first transparent electrode 105, the first component 101, the second transparent electrode 106, and the first holder 107a and the second holder 107b that sandwich and hold the laminated body by the first reflective film 103 are provided. ..
  • an elastic sheet 108 that is elastically deformed in the thickness direction is provided between the first reflective film 103 and the second holder 107b.
  • the elastic sheet 108 can be made of, for example, graphite or carbon.
  • a Pelche element can be provided on the first holder 107a. By providing the Pelche element, it is possible to control the temperature of the first component 101 to be constant via the first holder 107a made of metal. As described above, when the temperature control is carried out, it is desirable that the holder is made of a metal having a thermal conductivity higher than 50 W / (m ⁇ K).
  • the first holder 107a and the second holder 107b can be made of, for example, a metal such as Au. Further, the first holder 107a and the second holder 107b are formed with holes penetrating in the optical axis direction so that the target light can pass therethrough. Similarly, the elastic sheet 108 is also formed with a hole penetrating in the optical axis direction so that the target light can pass through.
  • the first component 101 composed of KTN crystals can be a square with a side of 5 mm and a plate shape with a thickness of 0.5 mm.
  • the first transparent electrode 105 and the second transparent electrode 106 made of ITO can be formed as a square having a side of 5 mm in a plan view.
  • the first reflective film 103 can be composed of a dielectric multilayer film having a reflectance of 99%.
  • An antireflection film can be formed on the surface of the first transparent electrode 105.
  • the second component 102 can be made of quartz glass.
  • a hole having a diameter of 5 mm can be formed in the central portion in a plan view.
  • the outer shape can be the same as that of the first holder 107a, and a hole of ⁇ 5 mm can be formed in the central portion in a plan view like the first holder 107a.
  • the elastic sheet can be provided on both sides of the first component, but by providing it on only one side (cathode side), a larger displacement can be obtained. This point will be described with reference to FIGS. 7A and 7B.
  • FIG. 7A consider a case where an elastic sheet 208a and an elastic sheet 208b are provided on both sides of the first component 201, and these are sandwiched between the first holder 207a and the second holder 207b.
  • the first component 201 warps so that the cathode side becomes convex, as shown in FIG. 7A.
  • the distance of the center of gravity of the crystal surface on the cathode side from the center of gravity of the crystal surface on the anode side is d2.
  • the central portion of the first component 201 along the cathode side enters the side of the elastic sheet 208a, and the end portion on the anode side enters the side of the elastic sheet 208b.
  • the position of the center of gravity of the crystal surface on the anode side of the first component 201 does not change so much, and the end portion enters the elastic sheet 208b side by the amount of displacement ⁇ 1 due to the warp.
  • the position of the center of gravity of the crystal surface on the cathode side of the first component 201 moves from the state of d1 in which no voltage is applied to the side of the second component (not shown) by d2-d1.
  • the central portion of the first component 201 along the cathode side enters the side of the elastic sheet 208, but since the first holder 207a, which is a rigid body, is on the anode side, the end portion on the anode side is the first. 1 It does not enter the side of the holder 207a. In this state, the position of the center of gravity of the crystal surface on the anode side of the first component 201 moves from the surface of the initial first holder 207a to the cathode side by the amount of displacement ⁇ 1 due to the warp.
  • FIG. 8 shows the result of calculating the relationship between the displacement of the KTN crystal due to the electric strain and the driving voltage by the finite element method.
  • the first component is composed of KTN crystals, and has a square shape with a side of 5 mm and a plate shape with a thickness of 0.5 mm. Further, it is a calculation result assuming that a voltage is applied to both sides of a square of 5 ⁇ 5 mm in a plan view with an internal charge of -60 C / m 3 .
  • the triangle shows the result of adding the displacement of the warp in addition to the displacement of the applied voltage. This is the case where the displacement is the above-mentioned “d2-d1 + ⁇ 1”.
  • the square shows the result of the above-mentioned “d2-d1” in the displacement of the warp.
  • circles show the results when there is no displacement due to warpage.
  • This tunable optical filter has the same as the first embodiment, the first component 101, the second component 102', the first reflective film 103, the second reflective film 104a, the first transparent electrode 105, and the second transparent film.
  • the electrode 106 is provided.
  • the first holder 107a and the second holder 107b are provided, and the elastic sheet 108 arranged between the first reflective film 103 and the second holder 107b is provided.
  • the second component 102' is formed into a cylindrical shape, and the second reflective film 104a is formed on one end surface thereof.
  • the shape of the second component 102' is ⁇ 2.5 to 4.5 mm, which is smaller than the hole diameter of the hole 171. be able to.
  • the second component 102' can be inserted into the hole 171 and arranged, and the hole 171 can be used as a holding portion to hold the second component 102'. According to this configuration, even if the second holder 107b thicker in the optical axis direction is used, it is possible to construct a resonator in which the distance between the second reflective film 104a and the first reflective film 103 is reduced.
  • This tunable optical filter has the first component 101, the second component 102, the first reflective film 103, the second reflective film 104, the first transparent electrode 105, and the second transparent electrode, as in the first embodiment described above. 106 is provided. Further, as in the second embodiment described above, the first holder 107a and the second holder 107b are provided, and the elastic sheet 108 arranged between the first reflective film 103 and the second holder 107b is provided.
  • an elastic sheet (another elastic sheet) 109 arranged between the first transparent electrode 105 and the first holder 107a is further provided.
  • the elastic sheet 109 is made of a material having a modulus of elasticity or hardness higher than that of the elastic sheet 108.
  • the elastic sheet 209 is made of a material having a modulus of elasticity or hardness higher than that of the elastic sheet 208.
  • the first component 201 When a voltage is applied to the first component 201 having an internal charge, the first component 201 warps so that the cathode side becomes convex. In this state, the distance of the center of gravity of the crystal surface on the cathode side from the center of gravity of the crystal surface on the anode side is d2.
  • the central portion of the first component 201 along the cathode side enters the side of the elastic sheet 208, and the end portion on the anode side enters the side of the elastic sheet 209.
  • the end portion of the first component 201 enters the amount of displacement ⁇ 2 due to the warp toward the elastic sheet 209.
  • the elastic modulus or hardness of the elastic sheet 209 is larger than that of the elastic sheet 208. , ⁇ 2 ⁇ 1.
  • the displacement amount “d2-d1 + ⁇ 1- ⁇ 2” described above is “ ⁇ 1- ⁇ 2” larger than the displacement amount “d2-d1” described with reference to FIG. 7A. Further, since the elastic sheet 109 is also provided on the side of the first holder 107a, it is possible to prevent the first component 101 from being damaged by vibration as compared with the case where only the elastic sheet 108 is used.
  • the driving voltage of the wavelength tunable optical filter using the electrolytic distortion crystal is lowered. Will be able to.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
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PCT/JP2021/000807 2021-01-13 2021-01-13 波長可変光フィルタ Ceased WO2022153389A1 (ja)

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US18/261,008 US12578520B2 (en) 2021-01-13 2021-01-13 Wavelength tunable optical filter
PCT/JP2021/000807 WO2022153389A1 (ja) 2021-01-13 2021-01-13 波長可変光フィルタ
JP2022574906A JP7485091B2 (ja) 2021-01-13 2021-01-13 波長可変光フィルタ

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995023993A1 (en) * 1994-03-03 1995-09-08 E-Tek Dynamics, Inc. A multielectrode, tunable optical filter
JP2001208911A (ja) * 2000-01-26 2001-08-03 Fujitsu Ltd エアギャップ型エタロンおよびそれを用いた装置
WO2004111717A1 (ja) * 2003-06-13 2004-12-23 Nippon Telegraph And Telephone Corporation 波長可変光フィルタ
US20100027096A1 (en) * 2008-07-31 2010-02-04 Jing Jong Pan Tunable Optical Filter and Method of Manufacture Thereof
JP2011248231A (ja) * 2010-05-28 2011-12-08 Nippon Telegr & Teleph Corp <Ntt> 電気光学デバイス
US20140362442A1 (en) * 2013-06-06 2014-12-11 Zhuhai FTZ Oplink Communications, Inc. Tunable optical filter
JP2017126037A (ja) * 2016-01-15 2017-07-20 日本電信電話株式会社 波長可変光フィルタ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6545739B1 (en) * 1997-09-19 2003-04-08 Nippon Telegraph And Telephone Corporation Tunable wavelength filter using nano-sized droplets of liquid crystal dispersed in a polymer
JP2011091209A (ja) 2009-10-22 2011-05-06 Sun Tec Kk 波長走査型レーザ光源
JP2013195916A (ja) 2012-03-22 2013-09-30 Nippon Telegr & Teleph Corp <Ntt> 光偏向器の保持機構
US20180143479A1 (en) * 2016-11-21 2018-05-24 Gopro, Inc. Holographic Polymer Dispersed Liquid Crystal Diffraction Grating
CN109884837A (zh) * 2019-04-26 2019-06-14 昆山锐芯微电子有限公司 光波滤波器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995023993A1 (en) * 1994-03-03 1995-09-08 E-Tek Dynamics, Inc. A multielectrode, tunable optical filter
JP2001208911A (ja) * 2000-01-26 2001-08-03 Fujitsu Ltd エアギャップ型エタロンおよびそれを用いた装置
WO2004111717A1 (ja) * 2003-06-13 2004-12-23 Nippon Telegraph And Telephone Corporation 波長可変光フィルタ
US20100027096A1 (en) * 2008-07-31 2010-02-04 Jing Jong Pan Tunable Optical Filter and Method of Manufacture Thereof
JP2011248231A (ja) * 2010-05-28 2011-12-08 Nippon Telegr & Teleph Corp <Ntt> 電気光学デバイス
US20140362442A1 (en) * 2013-06-06 2014-12-11 Zhuhai FTZ Oplink Communications, Inc. Tunable optical filter
JP2017126037A (ja) * 2016-01-15 2017-07-20 日本電信電話株式会社 波長可変光フィルタ

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