WO2022110424A1 - 陀螺仪 - Google Patents

陀螺仪 Download PDF

Info

Publication number
WO2022110424A1
WO2022110424A1 PCT/CN2020/138912 CN2020138912W WO2022110424A1 WO 2022110424 A1 WO2022110424 A1 WO 2022110424A1 CN 2020138912 W CN2020138912 W CN 2020138912W WO 2022110424 A1 WO2022110424 A1 WO 2022110424A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibrating member
vibrating
base body
gyroscope
gyroscope according
Prior art date
Application number
PCT/CN2020/138912
Other languages
English (en)
French (fr)
Inventor
刘雨微
孟珍奎
张睿
Original Assignee
瑞声声学科技(深圳)有限公司
瑞声科技（南京）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 瑞声声学科技(深圳)有限公司, 瑞声科技（南京）有限公司 filed Critical 瑞声声学科技(深圳)有限公司
Publication of WO2022110424A1 publication Critical patent/WO2022110424A1/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Definitions

  • the present application relates to the technical field of gyroscopes, and in particular, to a gyroscope.
  • a MEMS resonant gyroscope is an inertial sensor that measures angular velocity with inertial-grade accuracy.
  • the performance of the existing gyroscope is mainly affected by the vibration performance of the vibration component, and the vibration performance of the vibration component is affected by its mass, structure and other factors.
  • the present application provides a gyroscope, which improves the performance of the gyroscope by optimizing the structure of the vibrating element.
  • the present application proposes a gyroscope, comprising:
  • the vibrating assembly includes a vibrating member and an electrode, the electrode is arranged on the outer side of the vibrating member; the vibrating member is movably connected to one side of the base body, and a plurality of resonance holes are uniformly opened on the vibrating member.
  • the cross-section of the resonance hole is circular.
  • the cross-section of the resonance hole is a regular polygon.
  • the number of sides of the resonant hole of the regular polygon is even.
  • the vibration assembly further includes a connecting member, the connecting member is respectively connected to the vibration member and the base body, and the connecting member has elasticity.
  • the vibrating member includes a body portion and a fixing portion, the fixing portions are respectively connected to the body portion and the connecting member; along the direction from the vibrating member to the base body, the fixing portion is at The orthographic projection on the base covers the connector.
  • the body portion is provided with a mounting hole, and the fixing portion is accommodated in the mounting hole.
  • the cross-sectional shape of the mounting hole is the same as the cross-sectional shape of the resonance hole.
  • the outer contour of the vibrating member is circular, and the connecting member and the vibrating member are coaxially arranged.
  • the plurality of the electrodes there are a plurality of the electrodes, and the plurality of electrodes are evenly arranged around the vibrating member.
  • a plurality of resonance holes are evenly opened on the vibrating member of the vibrating component to reduce the mass of the vibrating member, thereby effectively improving the thermoelastic damping of the vibrating component, and improving the performance of the gyroscope.
  • Fig. 1 is the simplified structural schematic diagram of the gyroscope in the embodiment of the present application
  • FIG. 2 is a simplified cross-sectional structural schematic diagram of a gyroscope in an embodiment of the present application
  • FIG. 3 is a simplified partial structural schematic diagram of a gyroscope in an embodiment of the present application.
  • FIG. 4 is a simplified exploded schematic diagram of a gyroscope in an embodiment of the present application.
  • FIG. 5 is a simplified schematic diagram of a gyroscope in another embodiment of the present application.
  • gyroscope 100, base body; 200, vibration assembly; 210, vibration part; 211, body part; 2111, resonance hole; 2112, mounting hole; 212, fixing part; 220, electrode;
  • an embodiment of the present application provides a gyroscope 10 , which includes a base body 100 and a vibration assembly 200 .
  • the base body 100 is used to carry the vibration assembly 200
  • the vibration assembly 200 is connected to the base body 100 and can move relative to the base body 100 . .
  • the vibration assembly 200 includes a vibration member 210 and an electrode 220.
  • the electrode 220 is disposed outside the vibration member 210 and is used to sense the vibration signal of the vibration member 210, or to drive the vibration member 210 to vibrate, and to sense the vibration of the vibration member 210.
  • Vibration signal; the vibrating member 210 is movably connected to one side of the base body 100 , and a plurality of resonance holes 2111 are evenly opened on the vibrating member 210 .
  • a plurality of resonance holes 2111 are evenly opened on the vibrating member 210 of the vibrating component 200 to reduce the mass of the vibrating member 210 , thereby effectively improving the thermoelastic damping of the vibrating component 200 and the performance of the gyroscope 10 . be improved.
  • the cross-section of the resonance hole 2111 is a regular polygon.
  • the resonance hole 2111 is a regular hexagon.
  • the number of sides of the resonant hole 2111 of the regular polygon is even, and the number of sides is greater than 2.
  • the resonance hole 2111 is a regular hexagon.
  • the resonance hole 2111 can also be configured as a regular quadrilateral, a regular octagon, etc., which is not limited herein.
  • the cross section of the resonance hole 2111 may also be set to be circular.
  • the resonant hole 2111 of the gyroscope 10 shown in FIGS. 1 to 5 is only for illustration. Specifically, on the vibrating member 210 , the ratio of the aperture size of the resonant hole 2111 to the outer diameter of the body portion 211 Very small, the resonant hole 2111 shown in FIGS. 1 to 5 is a simplified schematic diagram after an isometric enlargement.
  • the resonance hole 2111 is disposed through the vibrating member 210 .
  • the resonance hole 2111 may also be opened only on one side surface of the vibrating member 210 , which is not limited herein.
  • the vibration assembly 200 further includes a connecting member 230 , the connecting member 230 is respectively connected to the vibration member 210 and the base 100 , and the connecting member 230 has elasticity.
  • the vibrating member 210 and the base body 100 are spaced apart from each other and connected by the connecting member 230; thus, when the connecting member 230 of this embodiment is used, the connecting member 230 can be deformed with the vibration of the vibrating member 210, On the one hand, the vibration member 210 can be supported, and at the same time, the connecting member 230 also stores elastic potential energy during the deformation process, and provides elastic force for the vibration member 210 to reset the vibration member 210 .
  • the vibrating member 210 includes a body portion 211 and a fixing portion 212, the fixing portion 212 is respectively connected to the body portion 211 and the connecting member 230, and the resonance hole 2111 is opened on the body portion 211; In the direction of the base body 100 , the orthographic projection of the fixing portion 212 on the base body 100 covers the connecting piece 230 .
  • the resonance hole 2111 is only opened on the body portion 211 , and the body portion 211 is fixedly connected with the connecting member 230 through the fixing portion 212 , so that the resonance hole 2111 on the vibrating member 210 can be avoided.
  • the joint area between the vibration member 210 and the connecting member 230 is reduced, so that the vibration member 210 can be stably connected to the base body 100 .
  • the fixed portion 212 can select a fixed electrode and be connected to an external control circuit. During the vibration of the body portion 211, the capacitance of the fixed portion 212 will change, and the control circuit receives the fixed portion 212. The capacitance change signal of the vibrating member 210 is then judged, and then converted into a position signal.
  • the body portion 211 and the fixing portion 212 can be made of conductive materials.
  • the body portion 211 defines a mounting hole 2112 , and the fixing portion 212 is accommodated in the mounting hole 2112 .
  • the mounting holes 2112 are provided through the body portion 211 .
  • the fixing portion 212 By opening the mounting hole 2112 for accommodating the fixing portion 212 on the body portion 211, the fixing portion 212 can be inserted into the body portion 211 or embedded in the body portion 211, so that the vibrating member 210 can have a compact structure as a whole. , which occupies less space and facilitates the arrangement of the vibration assembly 200 .
  • the cross-sectional shape of the mounting hole 2112 is the same as the cross-sectional shape of the resonance hole 2111 .
  • the outer contour of the vibrating member 210 is circular, and the connecting member 230 and the vibrating member 210 are coaxially disposed. It can be understood that, with this arrangement, when the vibration member 210 vibrates in parallel along the X and Y directions, the connecting member 230 can provide stable support for the vibration member 210, and the force is uniform.
  • FIG. 1 and FIG. 4 there are a plurality of electrodes 220 , and the plurality of electrodes 220 are evenly arranged around the vibrating member 210 .
  • the 8 electrodes 220 there are 8 electrodes 220 , and the 8 electrodes 220 are all arc-shaped, and are arranged around the vibrating member 210 at intervals.
  • the number of electrodes 220 may also be two, three, or more than four according to requirements, which is not limited herein.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

本申请提供了一种陀螺仪，其包括基体以及振动组件：振动组件包括振动件和电极，所述电极设于所述振动件的外侧；所述振动件可活动地连接于所述基体的一侧，所述振动件上均匀开设有多个谐振孔。在本实施例的陀螺仪中，振动组件的振动件上均匀开设有多个谐振孔，以降低振动件的质量，从而有效改善振动组件热弹性阻尼，陀螺仪的性能得以提高。

Description

陀螺仪 技术领域
本申请涉及陀螺仪技术领域，尤其涉及一种陀螺仪。
 背景技术
MEMS谐振陀螺仪是一种测量角速度的惯性传感器，其精度可达惯性级。现有陀螺仪的性能主要受到振动部件的振动性能影响，而振动部件的振动性能受到其质量、结构等因素的影响。
 技术问题
随着技术的发展以及需求的提高，因此有必要针对现有陀螺仪进行改进，以提高其性能。
 技术解决方案
有鉴于此，本申请提供了一种陀螺仪，通过对振动件的结构进行优化，从而提高陀螺仪的性能。
本申请提出一种陀螺仪，包括：
基体；以及
振动组件，包括振动件和电极，所述电极设于所述振动件的外侧；所述振动件可活动地连接于所述基体的一侧，所述振动件上均匀开设有多个谐振孔。
在本申请的一些实施例中，沿所述基体至所述振动件的方向，所述谐振孔的横截面为圆形。
在本申请的一些实施例中，沿所述基体至所述振动件的方向，所述谐振孔的横截面为正多边形。
在本申请的一些实施例中，正多边形的所述谐振孔的边数为偶数。
在本申请的一些实施例中，所述振动组件还包括连接件，所述连接件分别连接于所述振动件和所述基体，且所述连接件具有弹性。
在本申请的一些实施例中，所述振动件包括本体部和固定部，所述固定部分别连接于本体部和连接件；沿所述振动件至所述基体的方向，所述固定部在所述基体上的正投影覆盖所述连接件。
在本申请的一些实施例中，所述本体部开设有安装孔，所述固定部容置于安装孔内。
在本申请的一些实施例中，沿所述振动件至所述基体的方向，所述安装孔的横截面形状与所述谐振孔的横截面形状相同。
在本申请的一些实施例中，所述振动件的外轮廓为圆形，所述连接件与所述振动件同轴设置。
在本申请的一些实施例中，所述电极设置有多个，且多个所述电极环绕所述振动件均匀设置。
 有益效果
实施本申请实施例，具有如下有益效果：
在本实施例的陀螺仪中，振动组件的振动件上均匀开设有多个谐振孔，以降低振动件的质量，从而有效改善振动组件热弹性阻尼，陀螺仪的性能得以提高。
 附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
其中：
图1是本申请的实施例中陀螺仪的简化结构示意图；
图2是本申请的实施例中陀螺仪的简化剖面结构示意图；
图3是本申请的实施例中陀螺仪的简化部分结构示意图；
图4是本申请的实施例中陀螺仪的简化爆炸示意图；
图5是本申请的另一实施例中陀螺仪的简化示意图；
图中：
10、陀螺仪；100、基体；200、振动组件；210、振动件；211、本体部；2111、谐振孔；2112、安装孔；212、固定部；220、电极；230、连接件。
 本发明的实施方式
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
参阅图1所示，本申请实施例提供了一种陀螺仪10，其包括基体100以及振动组件200，基体100用于承载振动组件200，振动组件200连接于基体100并能够相对于基体100移动。
具体地，振动组件200包括振动件210和电极220，电极220设于振动件210的外侧，并用于感应振动件210的振动信号，或用于驱动振动件210进行振动，并感应振动件210的振动信号；振动件210可活动地连接于基体100的一侧，振动件210上均匀开设有多个谐振孔2111。
在本实施例的陀螺仪10中，振动组件200的振动件210上均匀开设有多个谐振孔2111，以降低振动件210的质量，从而有效改善振动组件200热弹性阻尼，陀螺仪10的性能得以提高。
具体地，沿基体100至振动件210的方向，谐振孔2111的横截面为正多边形。参阅图1至图4所示，在本实施例中，谐振孔2111为正六边形。通过在振动件210上开设多个正六边形的谐振孔2111，由此组成类似“蜂窝状”的结构，一方面可以降低振动件210的质量，同时通过正六边形的“蜂窝状”结构支撑振动件210，可以保证振动件210的结构稳定。
优选地，正多边形的谐振孔2111的边数为偶数，并且边数大于2。如上述实施例中所述内容，谐振孔2111为正六边形，在其他实施例中谐振孔2111也可以设置为正四边形、正八边形等结构，在此不做唯一限定。
参阅图5所示，在另一实施例中，谐振孔2111的横截面也可以设置为圆形。
在此需要说明的是，图1至图5中所示的陀螺仪10的谐振孔2111仅作示意，具体在振动件210上，谐振孔2111的孔径尺寸与本体部211的外径尺寸的比例极小，图1至图5中的所示的谐振孔2111为等比例放大之后的简化示意图。
参阅图2所示，在本实施例中，沿基体100至振动件210的方向，谐振孔2111贯穿振动件210设置。在其他实施例中，谐振孔2111也可以仅开设于振动件210的一侧表面，在此不做唯一限定。
具体地，参阅图2和图4所示，振动组件200还包括连接件230，连接件230分别连接于振动件210和基体100，且连接件230具有弹性。
在本实施例中，振动件210与基体100互相间隔，并通过连接件230连接；由此设置，在使用本实施例的连接件230，连接件230可以随振动件210的振动而发生形变，一方面可以对振动件210进行支撑，同时连接件230在形变过程中也会储存弹性势能，并为振动件210提供弹性力，以使振动件210复位。
进一步地，参阅图3所示，振动件210包括本体部211和固定部212，固定部212分别连接于本体部211和连接件230，谐振孔2111开设于本体部211上；沿振动件210至基体100的方向，固定部212在基体100上的正投影覆盖连接件230。
在本实施例中，谐振孔2111仅开设于本体部211上，并且本体部211通过固定部212与连接件230实现固定连接，由此设置，可以避免由于振动件210上开设有谐振孔2111而降低振动件210与连接件230之间的接合面积，从而使振动件210能够稳定地连接于基体100。
需要说明的是，在本实施例中，固定部212可以选用固定电极，并连接于外部的控制电路，本体部211在振动的过程中会引起固定部212的电容变化，控制电路接收固定部212的电容变化信号进而判断振动件210的运动状态，进而转换为位置信号；具体地，本体部211和固定部212均可以采用导电材料制成。
参阅图2至图4所示的实施例中，本体部211开设有安装孔2112，固定部212容置于安装孔2112内。具体参阅图2所示，在本实施例中，沿基体100至振动件210的方向，安装孔2112贯穿本体部211设置。
通过在本体部211上开设有用于容置固定部212的安装孔2112，固定部212可以穿插在本体部211内，或嵌入在本体部211内，由此可以使振动件210整体具有紧凑的结构，占用空间较小，便于振动组件200的布置。
进一步地，在本实施例中，沿振动件210至基体100的方向，安装孔2112的横截面形状与谐振孔2111的横截面形状相同。
具体在本实施例中，振动件210的外轮廓为圆形，连接件230与振动件210同轴设置。可以理解地是，由此设置，在振动件210沿X和Y方向所处平行进行振动的过程中，连接件230可以为振动件210提供稳定的支撑作用，并且受力均匀。
参阅图1和图4所示，电极220设置有多个，且多个电极220环绕振动件210均匀设置。
具体如图4所示实施例，电极220设置有8个，且8个电极220均为圆弧形，并首尾间隔的环绕振动件210设置。在其他实施例中，电极220也可以根据需求设置为两个、三个或四个以上，在此不做唯一限定。
以上所揭露的仅为本申请较佳实施例而已，当然不能以此来限定本申请之权利范围，因此依本申请权利要求所作的等同变化，仍属本申请所涵盖的范围。

Claims (10)

  1. 一种陀螺仪，其特征在于，包括：
    基体；以及
    振动组件，包括振动件和电极，所述电极设于所述振动件的外侧；所述振动件可活动地连接于所述基体的一侧，所述振动件上均匀开设有多个谐振孔。
  2. 根据权利要求1所述的陀螺仪，其特征在于，沿所述基体至所述振动件的方向，所述谐振孔的横截面为圆形。
  3. 根据权利要求1所述的陀螺仪，其特征在于，沿所述基体至所述振动件的方向，所述谐振孔的横截面为正多边形。
  4. 根据权利要求3所述的陀螺仪，其特征在于，正多边形的所述谐振孔的边数为偶数。
  5. 根据权利要求1所述的陀螺仪，其特征在于，所述振动组件还包括连接件，所述连接件分别连接于所述振动件和所述基体，且所述连接件具有弹性。
  6. 根据权利要求5所述的陀螺仪，其特征在于，所述振动件包括本体部和固定部，所述固定部分别连接于本体部和连接件，所述谐振孔开设于所述本体部上；沿所述振动件至所述基体的方向，所述固定部在所述基体上的正投影覆盖所述连接件。
  7. 根据权利要求6所述的陀螺仪，其特征在于，所述本体部开设有安装孔，所述固定部容置于安装孔内。
  8. 根据权利要求7所述的陀螺仪，其特征在于，沿所述振动件至所述基体的方向，所述安装孔的横截面形状与所述谐振孔的横截面形状相同。
  9. 根据权利要求5所述的陀螺仪，其特征在于，所述振动件的外轮廓为圆形，所述连接件与所述振动件同轴设置。
  10. 根据权利要求1所述的陀螺仪，其特征在于，所述电极设置有多个，且多个所述电极环绕所述振动件均匀设置。
PCT/CN2020/138912 2020-11-26 2020-12-24 陀螺仪 WO2022110424A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202022790106.XU CN213932550U (zh) 2020-11-26 2020-11-26 陀螺仪
CN202022790106.X 2020-11-26

Publications (1)

Publication Number Publication Date
WO2022110424A1 true WO2022110424A1 (zh) 2022-06-02

Family

ID=77144769

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/138912 WO2022110424A1 (zh) 2020-11-26 2020-12-24 陀螺仪

Country Status (2)

Country Link
CN (1) CN213932550U (zh)
WO (1) WO2022110424A1 (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040154400A1 (en) * 2003-02-07 2004-08-12 Johnson Burgess R. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
CN101553734A (zh) * 2006-03-27 2009-10-07 佐治亚科技研究公司 容性体声波盘状陀螺仪
CN104197909A (zh) * 2014-08-08 2014-12-10 上海交通大学 一种双半球结构微型谐振陀螺仪及其制备方法
CN107040230A (zh) * 2015-10-19 2017-08-11 精工爱普生株式会社 压电振动片、压电振子、电子设备以及移动体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040154400A1 (en) * 2003-02-07 2004-08-12 Johnson Burgess R. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
CN101553734A (zh) * 2006-03-27 2009-10-07 佐治亚科技研究公司 容性体声波盘状陀螺仪
CN104197909A (zh) * 2014-08-08 2014-12-10 上海交通大学 一种双半球结构微型谐振陀螺仪及其制备方法
CN107040230A (zh) * 2015-10-19 2017-08-11 精工爱普生株式会社 压电振动片、压电振子、电子设备以及移动体

Also Published As

Publication number Publication date
CN213932550U (zh) 2021-08-10

Similar Documents

Publication Publication Date Title
JP6627912B2 (ja) 圧電回転ｍｅｍｓ共振器
JP2007530918A (ja) 可撓性振動型微小電気機械デバイス
JPH04504617A (ja) ジャイロに意図されたセンサー素子
EP3249354B1 (en) Systems and methods for a tuned mass damper in mems resonators
JP2019203883A (ja) ジャイロスコープのための同期構造
US20110185829A1 (en) Rotational vibration gyro
US8573057B2 (en) Sensor mount vibration reduction
WO2022110424A1 (zh) 陀螺仪
JPH0313006A (ja) 振動子の支持構造
JP6787437B2 (ja) ピエゾリングジャイロスコープ
CN111912399A (zh) 一种改进比例因子的微型陀螺仪敏感单元及陀螺仪
US20230003760A1 (en) Accelerometer with two seesaws
JP2020144065A (ja) センサ
JP5599128B2 (ja) 振動梁の節点位置修正方法
JP4163031B2 (ja) 音叉型角速度センサ
JP2741620B2 (ja) 振動子の支持構造
JPH0989569A (ja) 振動ジャイロ
US11874112B1 (en) Vibratory gyroscopes with resonator attachments
JP3527797B2 (ja) 圧電振動ジャイロ
US5557045A (en) Vibrating gyroscope
JPH09105632A (ja) 振動ジャイロ
US6105426A (en) Tuning fork type vibration element and tuning fork type vibration gyro
US20230266123A1 (en) Sensor
WO2021134678A1 (zh) Mems陀螺仪
WO2021217667A1 (zh) 陀螺仪

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20963312

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20963312

Country of ref document: EP

Kind code of ref document: A1