WO2022091977A1 - Scribing tool, scribing device, and joint - Google Patents

Scribing tool, scribing device, and joint Download PDF

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Publication number
WO2022091977A1
WO2022091977A1 PCT/JP2021/039113 JP2021039113W WO2022091977A1 WO 2022091977 A1 WO2022091977 A1 WO 2022091977A1 JP 2021039113 W JP2021039113 W JP 2021039113W WO 2022091977 A1 WO2022091977 A1 WO 2022091977A1
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WO
WIPO (PCT)
Prior art keywords
axis
holder
joint
cutting edge
scribe
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Application number
PCT/JP2021/039113
Other languages
French (fr)
Japanese (ja)
Inventor
春香 竹原
良太 阪口
浩 曽山
慎太郎 大澤
Original Assignee
三星ダイヤモンド工業株式会社
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Priority to JP2022559095A priority Critical patent/JPWO2022091977A1/ja
Publication of WO2022091977A1 publication Critical patent/WO2022091977A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor

Definitions

  • the present invention relates to a scribe tool, a scribe device and a joint.
  • a break process may be performed due to the division of brittle material substrates.
  • a break step of a glass substrate is usually performed.
  • a scribe process is performed to form a scribe line on the brittle material substrate.
  • the brittle material substrate is broken along this scribe line.
  • the scribe line is a groove formed on the brittle material substrate for the break process.
  • a scribe device is used to efficiently form the scribe line.
  • the scribe device is attached to an installation means (for example, a table, a conveyor, etc.) on which a brittle material substrate is installed and a brittle material substrate on the installation means.
  • an installation means for example, a table, a conveyor, etc.
  • a scribe head provided so as to face each other, a holder joint provided at the tip of the scribe head, and a wheel tip for forming a scribe line, one end of which is detachably attached to the holder joint and the other end of which is rotatably attached.
  • a scribe head provided so as to face each other
  • a holder joint provided at the tip of the scribe head
  • a wheel tip for forming a scribe line, one end of which is detachably attached to the holder joint and the other end of which is rotatably attached.
  • the scribe device uses a wheel tip, that is, a wheel cutting edge. Since the wheel cutting edge rolls on the brittle substrate instead of sliding, it is less susceptible to friction. Therefore, the wheel cutting edge generally has a long life. On the other hand, from the viewpoint of avoiding a decrease in strength reliability at the scribed portion, a fixed cutting edge is usually preferable.
  • a fixed cutting edge is usually preferable.
  • the configuration of the combination of the joint and the holder has been studied when the cutting edge is the wheel cutting edge as described above, the case where the cutting edge is the fixed cutting edge has not been sufficiently studied so far.
  • the configuration of the combination of the joint and the holder suitable for optimizing the posture of the cutting edge with respect to the brittle material substrate has not been sufficiently studied so far.
  • the fixed cutting edge slides on the substrate instead of rolling, so it receives strong friction. Therefore, the fixed cutting edge is easily worn and therefore has a short life. For example, when a point cutting edge made of single crystal diamond is used as a typical fixed cutting edge and a glass substrate is scribed, it is often the case that only a scribe distance of about several tens of meters can be secured without replacing the cutting edge.
  • the present invention has been made to solve the above problems, one of which is a scribe tool having a fixed cutting edge, holder and joint, and the posture of the cutting edge with respect to a brittle material substrate. It is to provide a scribe tool that can be optimized. A further object is to provide a scribe tool that can extend the life of the cutting edge due to wear.
  • the scribe tool of the present invention has a joint, a holder, and a cutting edge.
  • the joint is rotatably supported around the first axis.
  • the holder is fixed to the joint along a second axis tilted from the first axis.
  • the cutting edge is fixed to the holder.
  • the cutting edge has an on-axis point, which is a point located on the first axis.
  • the posture angle of the holder around the second axis can be changed with respect to the joint, and the cutting edge has a plurality of points that can be regarded as on-axis points by changing the posture angle.
  • a holder is fixed to a joint rotatably supported around the first axis along a second axis inclined from the first axis.
  • the holder fixes the cutting edge, and the cutting edge has an on-axis point on the first axis.
  • the cutting edge having the on-axis point on the first axis can be fixed by the holder along the second axis inclined from the first axis. Therefore, even if the direction of the first axis is limited to one due to the specifications of the scribe device, the posture of the cutting edge with respect to the brittle material substrate can be adjusted by appropriately adjusting the design of the angle of the second axis with respect to the first axis. Can be optimized.
  • the cutting edge has a plurality of points that can be regarded as on-axis points by changing the posture angle of the holder around the second axis.
  • a plurality of points can be switched and used as on-axis points for scribe. Therefore, the life of the cutting edge due to wear can be significantly extended.
  • FIG. It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG. It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG. It is a figure which shows the structure which attached the spare joint instead of the joint in the scribe tool of FIG. It is sectional drawing which shows the modification of the scribe tool of FIG. It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG.
  • FIG. 1 is a perspective view schematically showing an example of the configuration of the scribe device 1 according to the embodiment.
  • the z-axis is upward along gravity, so each of the x-axis and y-axis is horizontal perpendicular to the direction of gravity, in other words the xy plane is a horizontal plane.
  • the scribe device 1 has a table 106 that supports a brittle material substrate 107 (for example, a glass substrate), a scribe head 112, and a scribe tool 1100 attached thereto.
  • the scribe tool 1100 has a joint 210, a holder 310U, and a cutting edge 900 (see FIG. 2).
  • the joint 210 is attached to the tip end portion (lower end portion in FIG. 1) of the scribe head 112.
  • the holder 310U is attached to the joint 210, whereby is indirectly attached to the scribe head 112 via the joint 210.
  • a cutting edge is fixed to the lower end of the holder 310U so as to face the table 106.
  • the scribe device 1 scribs the brittle material substrate 107 by relatively moving the table 106 and the scribe head 112 in the xy in-plane direction while pressing the cutting edge onto the brittle material substrate 107.
  • the scribe head 112 holds the joint 210 so that the joint 210 can rotate around the z-axis for the purpose of adjusting the direction of the cutting edge 900 on the xy plane. This rotation may be performed by a motor (not shown) built into the scribe head 112. By rotating the joint 210 around the z-axis, the orientation of the cutting edge 900 around the z-axis can be adjusted. By adjusting the direction of the cutting edge 900 during the scribe operation, it is possible to stably perform scribe along a curve. When it is not necessary to adjust the direction of the cutting edge 900 as in the case where a linear scribe process is performed, the scribe head 112 stops the motor so that the motor does not rotate during the process. By keeping it at, the orientation of the joint 210 around the z-axis may be kept constant.
  • the moving table 101 is movably held along a pair of guide rails 102a and 102b in the y-axis direction.
  • the ball screw 103 is screwed with the moving table 101.
  • the ball screw 103 is rotated by the drive of the motor 104, and the moving table 101 is moved along the guide rails 102a and 102b in the y-axis direction.
  • a motor 105 is provided on the upper surface of the moving table 101.
  • the motor 105 rotates the table 106 in the xy plane and positions it at a predetermined angle.
  • the brittle material substrate 107 is placed on the table 106 and held by, for example, vacuum suction means (not shown).
  • a bridge 110 is erected by columns 11la and 11lb along the x-axis direction so as to straddle the moving table 101 and the table 106 above the moving table 101.
  • the scribe head 112 is movable in the x-axis direction along the guide 113 provided on the bridge 110.
  • the motor 114 moves the scribe head 112 along the x-axis direction.
  • the motor 104, the guide rails 102a, 102b, and the ball screw 103 are moving portions for moving the table 106 in the y-axis direction, and the bridge 110, the columns 11la, 111b, and the guide 113 are scribe heads. It is a moving part that moves 112 in the x-axis direction, and the motor 105 is a moving part that rotates the table 106, and these moving parts make the table 106 and the scribe head 112 relatively movable.
  • ⁇ Structure of scribe tool> 2 to 5 are diagrams schematically showing the configuration of the scribe tool 1100 from various viewpoints, and FIG. 6 is a cross-sectional view schematically showing the configuration of the scribe tool 1100.
  • the scribe tool 1100 has a joint 210, a holder 310U, and a cutting edge 900.
  • the holder 310U is configured by assembling a plurality of parts.
  • these plurality of parts include an outer member 310, an inner member 410, and a mounting screw 500.
  • the inner member 410 has a main body portion 411 and a claw portion 412 for gripping the cutting edge 900.
  • the inner member 410 is inserted into the hollow portion of the outer member 310.
  • a part of this cavity constitutes a screw hole for the mounting screw 500.
  • the mounting screw 500 is attached to the outer member 310 by being inserted into the screw hole.
  • a recess 500h for inserting a wrench is provided at one end of the mounting screw 500. By turning the mounting screw 500 with a wrench, the other end of the set screw collides with the main body 411 of the inner member 410. As a result, the inner member 410 is fixed to the outer member 310.
  • the scribe head 112 holds the joint 210 so that the joint 210 can rotate about the z-axis.
  • the first axis AX1 is along the z-axis, so that the joint 210 is rotatably supported around the first axis AX1 by the scribe head 112.
  • the joint 210 may have a shaft portion MA and a main body portion MM fixed to the shaft portion MA.
  • the shaft portion MA and the main body portion MM may be integrally formed of the same material.
  • the joint 210 is fixed to the scribe head 112 by gripping the shaft portion MA to the scribe head 112.
  • the shaft portion MA preferably has a shape corresponding to the orientation of the joint 210 around the first shaft portion AX1 (in FIG.
  • the shaft portion MA preferably extends along the first axis AX1, and in the configuration shown in FIG. 2, the shaft portion MA has a cylindrical shape extending along the first shaft portion AX1 (assuming that the notch portion is ignored).
  • the main body portion MM has a cavity portion 210f extending along the second axis AX2 inclined from the first axis AX1.
  • the holder 310U is fixed to the joint 210 along the second axis AX2 by being inserted into the hollow portion 210f of the joint 210.
  • the second axis AX2 is tilted from the first axis AX1.
  • the angle formed by the first axis AX1 and the second axis AX2 is larger than 0 ° and smaller than 90 °.
  • the second axis AX2 is preferably tilted from the first axis AX1 by 50 ° or more and 55 ° or less, and more preferably 51 ° or more and 53 ° or less.
  • the cutting edge 900 is fixed to the holder 310U.
  • the cutting edge 900 is not a wheel cutting edge but a fixed cutting edge.
  • the cutting edge 900 has an on-axis point PAX, which is a point located on the first axis AX1.
  • the cutting edge 900 has at least a point PTa (first point) and a point PTb (second point) as a plurality of points.
  • any of the plurality of points can be set as the on-axis point PAX.
  • FIG. 5 shows a case where the point Pta is selected as the on-axis point PAX.
  • the cutting edge 900 is preferably made of diamond.
  • the cutting edge 900 is preferably a diamond piece.
  • the diamond preferably has a ⁇ 100> orientation along the second axis AX2.
  • the posture angle of the holder 310U around the second axis AX2 with respect to the joint 210 can be changed.
  • the fitting structure between the joint 210 and the holder 310U is configured by the hollow portion 210f provided in the main body portion MM of the joint 210 so that the posture angle can be changed only discretely.
  • the holder 310U is partially inserted into the cavity 210f (FIG. 6) of the joint 210.
  • the posture angle of the holder 310U can be changed by changing the orientation of the holder 310U at the time of this insertion.
  • the holder 310U can take at least a first posture angle and a second posture angle with respect to the joint 210.
  • the first posture angle of the holder 310U is the posture angle shown in FIG. 5
  • the second posture angle of the holder 310U is the case where the holder 310U is rotated by 180 ° in the joint 210 in FIG. Posture angle.
  • the point PTa and the point PTb correspond to the first posture angle and the second posture angle, respectively, and become the on-axis point PAX (FIG. 6).
  • the point Pta and the point PTb (FIG. 5) of the cutting edge 900 are arranged so that they can be made into an on-axis point PAX (FIG. 6) simply by changing the posture angle of the holder 310U around the second axis AX2. ..
  • the points PTa and the point PTb are located at different positions from each other, they are arranged at the same position in the direction along the second axis AX2 and are separated from the second axis AX2 by the same distance. In order to satisfy such a dimensional condition, as shown in FIG.
  • the distance between the end face 310p of the holder 310U and each of the points PTa and the point PTb is the extending direction of the holder 310U (vertical direction in FIG. 7). ) Is commonly used as the distance LN. In order to control the dimensions in this way, it is preferable that the cutting edge 900 is precisely polished after the unit shown in FIG. 7 is assembled. After the unit is mounted in the cavity 210f of the joint 210, the direction of the distance LN (the extending direction of the holder 310U) becomes the direction along the second axis AX2.
  • the holder 310U has rotational symmetry around the second axis AX2. Specifically, as can be seen from FIG. 5, the holder 310U has a double symmetry around the second axis AX2. It should be noted that in the present specification, a structure that does not substantially affect the fixing of the holder 310U to the joint 210 (for example, a small hole or notch for indicating the orientation of the member) is used when considering the rotational symmetry of the holder 310U. It shall be ignored. Further, in the present embodiment, the holder 310U having double symmetry is exemplified, but the number of times of symmetry is not limited to two times.
  • the scribe tool 1100 preferably has a positioning pin 600 (positioning member).
  • the positioning pin 600 limits the position of the holder 310U along the second axis AX2 with respect to the joint 210 by partially closing the cavity 210f.
  • the positioning pin 600 is attached to the joint 210 by being inserted into a hole provided in the joint 210.
  • the holder 310U is prohibited from being positioned above the positioning pin 600 in the direction of the second axis AX2.
  • the scribe tool 1100 preferably has a set screw 700.
  • the set screw 700 secures the holder 310U to the joint 210 at the position defined by the positioning pin 600.
  • the set screw 700 is attached to the joint 210 by being inserted into a screw hole provided in the joint 210.
  • a recess 700h for inserting a wrench is provided at one end of the set screw 700.
  • the set screw 700 By turning the set screw 700 with a wrench, the other end of the set screw collides with one side of the holder 310U.
  • the other side portion of the holder 310U is pressed against the V-shaped recess SV (FIG. 5) of the cavity portion 210f (FIG. 6) of the joint 210.
  • the holder 310U is firmly fixed to the joint 210.
  • ⁇ Assembly method of scribe tool> 9 to 13 are diagrams schematically showing the steps of the assembly method of the scribe tool 1100 (FIG. 6) in this order.
  • the positioning pin 600 is inserted into the hole of the joint 210.
  • the cutting edge 900 is attached to the claw portion 412 of the inner member 410.
  • the inner member 410 to which the cutting edge 900 is fixed is housed in the outer member 310 and is attached by the mounting screw 500.
  • the holder 310U is partially inserted into the cavity 210f of the joint 210 with reference to FIGS. 12 and 13, both of which are partially cross-sectional views. Then, the holder 310U is fixed to the joint 210 by the set screw 700. From the above, the scribe tool 1100 can be obtained.
  • FIG. 14 is a diagram schematically showing a configuration in which a spare joint 210M is attached in place of the joint 210 in the scribe tool 1100 (FIG. 6).
  • the spare joint 210M will be rotatably supported around the first axis AX1 by being replaced with the joint 210.
  • the spare joint 210M has a fitting structure for fixing the holder 310U to the spare joint 210M along the third axis AX3.
  • the third axis AX3 is tilted from the first axis AX1 and the second axis AX2. Since the configurations of the spare joint 210M other than the above are almost the same as those of the joint 210 (FIG. 6) described above, the same or corresponding elements are designated by the same reference numerals, and the description thereof will not be repeated.
  • FIG. 15 is a cross-sectional view showing the configuration of the scribe tool 1200M, which is a modification of the scribe tool 1100 (FIG. 6).
  • the scribe tool 1200M has a joint 210, a holder 310U including an outer member 310, and a joint 220 and a holder 320U including an outer member 320 in place of (FIG. 6).
  • the holder 320U is at least partially made of magnetic material.
  • the scribe tool 1200M has a magnet 800.
  • the magnet 800 generates a magnetic force acting on the holder 320U so that the positioning pin 600 and the holder 320U are pressed against each other.
  • the magnet of the holder 320U is opposed to the other end (upper right end in the figure) opposite to the one end (lower left end in the figure) to which the cutting edge 900 is fixed. 800 is arranged.
  • the magnet 800 is mounted in the cavity 220f of the joint 220. Further, the joint 220 may be provided with a cover plate 880 that covers the magnet 800.
  • the holder 320U is prohibited from being positioned beyond the positioning pin 600 in the direction of the second axis AX2 by the side inclined surface 320p of the holder 320U hitting the positioning pin 600. It is preferable that the side inclined surface 320p is arranged away from the distance between the magnet 800 and the holder 320U.
  • the side inclined surface 320p may be inclined from a plane perpendicular to the second axis AX2.
  • 16 to 21 are diagrams schematically showing the steps of the assembly method of the scribe tool 1200M (FIG. 15) in this order.
  • the positioning pin 600 is inserted into the hole of the joint 210.
  • the magnet 800 is attached to the joint 220 so as to be arranged in the cavity 220f of the joint 220.
  • a cover plate 880 covering the magnet 800 is attached to the joint 220.
  • the cutting edge 900 is attached to the claw portion 412 of the inner member 410.
  • the inner member 410 to which the cutting edge 900 is fixed is housed in the outer member 320 and is attached by the mounting screw 500.
  • the holder 320U is partially inserted into the cavity 220f of the joint 220 with reference to FIGS. 21 and 22, both of which are partial cross-sectional views.
  • the position of the holder 320U is fixed by the side inclined surface 320p of the holder 320U hitting the positioning pin 600 while the holder 320U receives an attractive force toward the magnet 800 by the magnetic force. From the above, the scribe tool 1200M can be obtained.
  • the holder 310U is fixed to the joint 210 rotatably supported around the first axis AX1 along the second axis AX2 tilted from the first axis AX1.
  • the holder 310U fixes the cutting edge 900, and the cutting edge 900 has an on-axis point PAX on the first axis AX1.
  • the cutting edge 900 having the on-axis point PAX on the first axis AX1 can be fixed by the holder 310U along the second axis AX2 tilted from the first axis AX1. Therefore, when the direction of the first axis AX1 is limited to one due to the specifications of the scribe device 1 (FIG.
  • the cutting edge may have only one point as a point that can be an on-axis point PAX.
  • the cutting edge 900 has a plurality of points PTa and PTb (FIG. 5) which can be regarded as an on-axis point PAX (FIG. 6) by changing the posture angle of the holder 310U around the second axis AX2. )have.
  • a plurality of points can be switched and used as the on-axis point PAX for scribe. Therefore, the life of the cutting edge 900 due to wear can be significantly extended.
  • a fitting structure is provided between the joint 210 and the holder 310U so that the posture angle can be changed only discretely.
  • the point Pta and the point PTb (FIG. 5) of the cutting edge 900 correspond to the first attitude angle and the second attitude angle of the holder 310U, respectively, and become the on-axis point PAX (FIG. 6). This makes it possible to prevent the posture of the on-axis point PAX from shifting with respect to the brittle material substrate 107.
  • the plurality of points PTa and PTb (FIG. 5) of the cutting edge 900 are arranged so as to be the on-axis point PAX (FIG. 6) only by changing the posture angle of the holder 310U around the second axis AX2. ..
  • the posture angle of the holder 310U can be changed at such a limited position. can.
  • the holder 310U has rotational symmetry (specifically, double symmetry) around the second axis AX2. Thereby, the posture angle of the holder 310U can be changed corresponding to the rotational symmetry.
  • the cutting edge 900 is crystallographically made of diamond having a ⁇ 100> orientation along the second axis AX2. Thereby, the processing for forming the surface inclined at a predetermined angle from the ⁇ 100> direction on the cutting edge 900 can be easily performed by using the direction corresponding to the second axis AX2 as a reference. Specifically, after the unit shown in FIG. 7 is assembled, the cutting edge 900 is precisely machined with reference to the normal direction of the end face 310p (the extending direction of the holder 310U). The crystallographic properties of each of PTa and PTb can be precisely controlled.
  • the ⁇ 100> direction of the cutting edge 900 can be tilted from the first axis AX1.
  • This inclination that is, the inclination of the second axis AX2 from the first axis AX1 is preferably 50 ° or more and 55 ° or less, and more preferably 51 ° or more and 53 ° or less.
  • the spare joint 210M (FIG. 14) has a fitting structure for fixing the holder 310U to the spare joint 210M along the third axis AX3, and the third axis AX3 has a fitting structure. It is tilted from the first axis AX1 and the second axis AX2 (FIG. 6).
  • the wear of the cutting edge 900 progresses to a non-negligible level while using the joint 210 (FIG. 6)
  • the posture of the cutting edge 900 is adjusted by using the spare joint 210M instead of the joint 210.
  • the contact angle between the cutting edge 900 and the brittle material substrate 107 (FIG. 1) changes.

Abstract

This joint (210) is supported in a manner rotatable about a first axis (AX1). A holder (310U) is fixed to the joint (210) along a second axis (AX2) inclined from the first axis (AX1). A blade tip (900) is fixed to the holder (310U). The blade tip (900) has an on-axis point (PAX) which is a point located on the first axis (AX1).

Description

スクライブツール、スクライブ装置およびジョイントScribe tools, scribe devices and joints
 本発明は、スクライブツール、スクライブ装置およびジョイントに関するものである。 The present invention relates to a scribe tool, a scribe device and a joint.
 電子機器などの製品の製造工程において、脆性材料基板の分断のためにブレイク工程が行われることがある。例えば、表示装置の製造工程において、通常、ガラス基板のブレイク工程が行われる。ブレイク工程に先立って、脆性材料基板にスクライブラインを形成するスクライブ工程が行われる。ブレイク工程においては、このスクライブラインに沿って脆性材料基板がブレイクされる。よってスクライブラインは、ブレイク工程のために脆性材料基板上に形成される溝である。スクライブラインを効率的に形成するためには、スクライブ装置が用いられる。 In the manufacturing process of products such as electronic devices, a break process may be performed due to the division of brittle material substrates. For example, in the manufacturing process of a display device, a break step of a glass substrate is usually performed. Prior to the break process, a scribe process is performed to form a scribe line on the brittle material substrate. In the break process, the brittle material substrate is broken along this scribe line. Thus, the scribe line is a groove formed on the brittle material substrate for the break process. A scribe device is used to efficiently form the scribe line.
 例えば、国際公開第2007/063979号(特許文献1)によれば、スクライブ装置は、脆性材料基板が設置される設置手段(例えば、テーブル、コンベア等)と、前記設置手段上の脆性材料基板に対向するように設けられるスクライブヘッドと、前記スクライブヘッドの先端に設けられるホルダジョイントと、一端が前記ホルダジョイントに着脱自在に取付けられ、他端に回転自在に取付けられたスクライブライン形成用のホイールチップとを備える。 For example, according to International Publication No. 2007/063979 (Patent Document 1), the scribe device is attached to an installation means (for example, a table, a conveyor, etc.) on which a brittle material substrate is installed and a brittle material substrate on the installation means. A scribe head provided so as to face each other, a holder joint provided at the tip of the scribe head, and a wheel tip for forming a scribe line, one end of which is detachably attached to the holder joint and the other end of which is rotatably attached. And prepare.
国際公開第2007/063979号International Publication No. 2007/063979
 第1に、上記スクライブ装置は、ホイールチップ、すなわちホイール刃先を用いている。ホイール刃先は、脆性基板上を摺動ではなく転動するので、摩擦を受けにくい。よってホイール刃先は一般に寿命が長い。一方で、スクライブされた箇所での強度信頼性の低下を避ける観点では、通常、固定刃先の方が好ましい。しかしながら、ジョイントおよびホルダの組み合わせの構成について、上記のように刃先がホイール刃先の場合は検討がなされているものの、刃先が固定刃先の場合については、これまで十分に検討がなされてきていない。具体的には、脆性材料基板への刃先の姿勢を最適化するのに適した、ジョイントおよびホルダの組み合わせの構成について、これまで十分に検討がなされてきていない。 First, the scribe device uses a wheel tip, that is, a wheel cutting edge. Since the wheel cutting edge rolls on the brittle substrate instead of sliding, it is less susceptible to friction. Therefore, the wheel cutting edge generally has a long life. On the other hand, from the viewpoint of avoiding a decrease in strength reliability at the scribed portion, a fixed cutting edge is usually preferable. However, although the configuration of the combination of the joint and the holder has been studied when the cutting edge is the wheel cutting edge as described above, the case where the cutting edge is the fixed cutting edge has not been sufficiently studied so far. Specifically, the configuration of the combination of the joint and the holder suitable for optimizing the posture of the cutting edge with respect to the brittle material substrate has not been sufficiently studied so far.
 第2に、ホイール刃先とは異なり固定刃先は、基板上を転動ではなく摺動するので、強い摩擦を受ける。したがって、固定刃先は摩耗が進みやすく、よってその寿命が短い。例えば、典型的な固定刃先として、単結晶ダイヤモンドからなるポイント刃先が用いられて、ガラス基板がスクライブされる場合、刃先の交換なしでは数十m程度のスクライブ距離しか確保できない場合がしばしばある。 Secondly, unlike the wheel cutting edge, the fixed cutting edge slides on the substrate instead of rolling, so it receives strong friction. Therefore, the fixed cutting edge is easily worn and therefore has a short life. For example, when a point cutting edge made of single crystal diamond is used as a typical fixed cutting edge and a glass substrate is scribed, it is often the case that only a scribe distance of about several tens of meters can be secured without replacing the cutting edge.
 本発明は以上のような課題を解決するためになされたものであり、その一の目的は、固定された刃先、ホルダおよびジョイントを有するスクライブツールであって、脆性材料基板への刃先の姿勢を最適化することができるスクライブツールを提供することである。また、さらなる目的は、摩耗に起因しての刃先の寿命を長くすることができるスクライブツールを提供することである。 The present invention has been made to solve the above problems, one of which is a scribe tool having a fixed cutting edge, holder and joint, and the posture of the cutting edge with respect to a brittle material substrate. It is to provide a scribe tool that can be optimized. A further object is to provide a scribe tool that can extend the life of the cutting edge due to wear.
 本発明のスクライブツールは、ジョイントと、ホルダと、刃先とを有している。ジョイントは、第1軸の周りに回転可能に支持されている。ホルダは、第1軸から傾いた第2軸に沿ってジョイントに固定されている。刃先は、ホルダに固定されている。刃先は、第1軸上に位置するポイントである軸上ポイントを有する。 The scribe tool of the present invention has a joint, a holder, and a cutting edge. The joint is rotatably supported around the first axis. The holder is fixed to the joint along a second axis tilted from the first axis. The cutting edge is fixed to the holder. The cutting edge has an on-axis point, which is a point located on the first axis.
 好ましくは、ジョイントに対して第2軸の周りでのホルダの姿勢角が変更可能であり、姿勢角の変更によって軸上ポイントとされ得る複数のポイントを刃先が有している。 Preferably, the posture angle of the holder around the second axis can be changed with respect to the joint, and the cutting edge has a plurality of points that can be regarded as on-axis points by changing the posture angle.
 本発明によれば、第1軸の周りに回転可能に支持されたジョイントに、第1軸から傾いた第2軸に沿ってホルダが固定されている。ホルダは刃先を固定しており、刃先は、第1軸上に軸上ポイントを有する。これにより、第1軸上に軸上ポイントを有する刃先を、第1軸から傾いた第2軸に沿ったホルダによって固定することができる。よって、第1軸の方向が、スクライブ装置の仕様上、ひとつに限られる場合においても、第1軸に対する第2軸の角度の設計を適宜調整することによって、脆性材料基板への刃先の姿勢を最適化することができる。 According to the present invention, a holder is fixed to a joint rotatably supported around the first axis along a second axis inclined from the first axis. The holder fixes the cutting edge, and the cutting edge has an on-axis point on the first axis. Thereby, the cutting edge having the on-axis point on the first axis can be fixed by the holder along the second axis inclined from the first axis. Therefore, even if the direction of the first axis is limited to one due to the specifications of the scribe device, the posture of the cutting edge with respect to the brittle material substrate can be adjusted by appropriately adjusting the design of the angle of the second axis with respect to the first axis. Can be optimized.
 刃先は、第2軸の周りでのホルダの姿勢角の変更によって、軸上ポイントとされ得る複数のポイントを有していることが好ましい。この場合、スクライブのための軸上ポイントとして複数のポイントを切り替えて用いることができる。よって、摩耗に起因しての刃先の寿命を顕著に長くすることができる。 It is preferable that the cutting edge has a plurality of points that can be regarded as on-axis points by changing the posture angle of the holder around the second axis. In this case, a plurality of points can be switched and used as on-axis points for scribe. Therefore, the life of the cutting edge due to wear can be significantly extended.
実施の形態におけるスクライブ装置の構成を概略的に示す斜視図である。It is a perspective view which shows schematic structure of the scribe device in embodiment. 実施の形態におけるスクライブツールの構成を一の視点で概略的に示す図である。It is a figure which shows roughly the structure of the scribe tool in embodiment from one viewpoint. 実施の形態におけるスクライブツールの構成を他の視点で概略的に示す図である。It is a figure which shows roughly the structure of the scribe tool in embodiment from another viewpoint. 実施の形態におけるスクライブツールの構成をさらに他の視点で概略的に示す図である。It is a figure which shows the structure of the scribe tool in an embodiment schematicly from another viewpoint. 実施の形態におけるスクライブツールの構成をさらに他の視点で概略的に示す図である。It is a figure which shows the structure of the scribe tool in an embodiment schematicly from another viewpoint. 実施の形態におけるスクライブツールの構成を概略的に示す断面図である。It is sectional drawing which shows schematic structure of the scribe tool in embodiment. 実施の形態における、ホルダおよびそれに固定された刃先の構成を概略的に示す断面図である。It is sectional drawing which shows schematically the structure of the holder and the cutting edge fixed to the holder in embodiment. 図6のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図6のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図6のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図6のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図6のスクライブツールの組立方法の一工程を概略的に示す一部断面斜視図である。It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG. 図6のスクライブツールの組立方法の一工程を概略的に示す一部断面斜視図である。It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG. 図6のスクライブツールにおいてジョイントに代わって予備ジョイントが取り付けられた構成を概略的に示す図である。It is a figure which shows the structure which attached the spare joint instead of the joint in the scribe tool of FIG. 図6のスクライブツールの変形例を示す断面図である。It is sectional drawing which shows the modification of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す斜視図である。It is a perspective view which shows roughly one process of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す一部断面斜視図である。It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG. 図15のスクライブツールの組立方法の一工程を概略的に示す一部断面斜視図である。It is a partial cross-sectional perspective view schematically showing one step of the assembly method of the scribe tool of FIG.
 以下、図面に基づいて本発明の実施の形態について説明する。なお、いくつかの図において、方向の理解を容易とするために、直交座標系を表すxyz軸が示されている。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In some figures, the xyz axis representing the Cartesian coordinate system is shown to facilitate understanding of the direction.
 <スクライブ装置の構成の例>
 図1は、実施の形態におけるスクライブ装置1の構成の例を概略的に示す斜視図である。本例においては、z軸は重力に沿っての上方向であり、よってx軸およびy軸の各々は重力方向に垂直な水平方向であり、言い換えればxy面が水平面である。
<Example of configuration of scribe device>
FIG. 1 is a perspective view schematically showing an example of the configuration of the scribe device 1 according to the embodiment. In this example, the z-axis is upward along gravity, so each of the x-axis and y-axis is horizontal perpendicular to the direction of gravity, in other words the xy plane is a horizontal plane.
 まずスクライブ装置1の主な構成について、以下に説明する。スクライブ装置1は、脆性材料基板107(例えば、ガラス基板)を支持するテーブル106と、スクライブヘッド112と、それに取り付けられたスクライブツール1100とを有している。スクライブツール1100は、ジョイント210と、ホルダ310Uと、刃先900(図2を参照)とを有している。ジョイント210は、スクライブヘッド112の先端部(図1における下端部)に取り付けられている。ホルダ310Uは、ジョイント210に取り付けられており、これによりスクライブヘッド112にジョイント210を介して間接的に取り付けられている。ホルダ310Uの下端には、テーブル106に対向するように刃先が固定されている。スクライブ装置1は、脆性材料基板107上に刃先を押し付けつつテーブル106とスクライブヘッド112とをxy面内方向において相対的に移動させることによって、脆性材料基板107をスクライブする。 First, the main configuration of the scribe device 1 will be described below. The scribe device 1 has a table 106 that supports a brittle material substrate 107 (for example, a glass substrate), a scribe head 112, and a scribe tool 1100 attached thereto. The scribe tool 1100 has a joint 210, a holder 310U, and a cutting edge 900 (see FIG. 2). The joint 210 is attached to the tip end portion (lower end portion in FIG. 1) of the scribe head 112. The holder 310U is attached to the joint 210, whereby is indirectly attached to the scribe head 112 via the joint 210. A cutting edge is fixed to the lower end of the holder 310U so as to face the table 106. The scribe device 1 scribs the brittle material substrate 107 by relatively moving the table 106 and the scribe head 112 in the xy in-plane direction while pressing the cutting edge onto the brittle material substrate 107.
 スクライブヘッド112は、刃先900の向きをxy面において調整する目的で、z軸周りにジョイント210が回転することができるようにジョイント210を保持している。この回転は、スクライブヘッド112に内蔵されたモータ(図示せず)によって行われてよい。ジョイント210がz軸周りに回転することによって、z軸周りにおける刃先900の向きを調整することができる。スクライブ動作中に刃先900の向きを調整することによって、曲線に沿ったスクライブを安定的に行うことができる。なお、直線的なスクライブ工程が行われる場合のように、刃先900の向きを調整する必要性が低い場合、スクライブヘッド112は、上記工程の間は上記モータが回転しないように上記モータを停止状態に維持することによって、z軸周りにおけるジョイント210の向きを一定に維持してよい。 The scribe head 112 holds the joint 210 so that the joint 210 can rotate around the z-axis for the purpose of adjusting the direction of the cutting edge 900 on the xy plane. This rotation may be performed by a motor (not shown) built into the scribe head 112. By rotating the joint 210 around the z-axis, the orientation of the cutting edge 900 around the z-axis can be adjusted. By adjusting the direction of the cutting edge 900 during the scribe operation, it is possible to stably perform scribe along a curve. When it is not necessary to adjust the direction of the cutting edge 900 as in the case where a linear scribe process is performed, the scribe head 112 stops the motor so that the motor does not rotate during the process. By keeping it at, the orientation of the joint 210 around the z-axis may be kept constant.
 次にスクライブ装置1の細部の例について、以下に説明する。スクライブ装置1は、移動台101が1対の案内レール102a、102bに沿って、y軸方向に移動自在に保持されている。ボールネジ103は移動台101と螺合している。ボールネジ103はモータ104の駆動により回転し、移動台101を案内レール102a,102bに沿ってy軸方向に移動させる。移動台101の上面にはモータ105が設けられている。モータ105はテーブル106をxy平面で回転させて所定角度に位置決めするものである。脆性材料基板107はテーブル106上に載置され、例えば、真空吸引手段(図示せず)により保持される。スクライブ装置1の上部には、脆性材料基板107のアライメントマークを撮像する2台のCCDカメラ108が設けられている。スクライブ装置1には、移動台101とその上部のテーブル106をまたぐようにブリッジ110がx軸方向に沿って支柱11la,11lbにより架設されている。スクライブヘッド112は、ブリッジ110に設けられたガイド113に沿ってx軸方向に移動可能とされている。モータ114はスクライブヘッド112をx軸方向に沿って移動させるものである。ここで、モータ104と、案内レール102a,102bと、ボールネジ103とは、テーブル106をy軸方向に移動させる移動部であり、ブリッジ110と、支柱11la,111bと、ガイド113とは、スクライブヘッド112をx軸方向に移動させる移動部であり、モータ105はテーブル106を回転させる移動部であり、これら移動部によってテーブル106とスクライブヘッド112とが相対的に移動可能とされている。 Next, an example of the details of the scribe device 1 will be described below. In the scribe device 1, the moving table 101 is movably held along a pair of guide rails 102a and 102b in the y-axis direction. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by the drive of the motor 104, and the moving table 101 is moved along the guide rails 102a and 102b in the y-axis direction. A motor 105 is provided on the upper surface of the moving table 101. The motor 105 rotates the table 106 in the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by, for example, vacuum suction means (not shown). At the top of the scribe device 1, two CCD cameras 108 that capture the alignment mark of the brittle material substrate 107 are provided. In the scribe device 1, a bridge 110 is erected by columns 11la and 11lb along the x-axis direction so as to straddle the moving table 101 and the table 106 above the moving table 101. The scribe head 112 is movable in the x-axis direction along the guide 113 provided on the bridge 110. The motor 114 moves the scribe head 112 along the x-axis direction. Here, the motor 104, the guide rails 102a, 102b, and the ball screw 103 are moving portions for moving the table 106 in the y-axis direction, and the bridge 110, the columns 11la, 111b, and the guide 113 are scribe heads. It is a moving part that moves 112 in the x-axis direction, and the motor 105 is a moving part that rotates the table 106, and these moving parts make the table 106 and the scribe head 112 relatively movable.
 <スクライブツールの構成>
 図2~図5は、スクライブツール1100の構成を様々な視点で概略的に示す図であり、図6は、スクライブツール1100の構成を概略的に示す断面図である。前述したように、スクライブツール1100は、ジョイント210と、ホルダ310Uと、刃先900とを有している。
<Structure of scribe tool>
2 to 5 are diagrams schematically showing the configuration of the scribe tool 1100 from various viewpoints, and FIG. 6 is a cross-sectional view schematically showing the configuration of the scribe tool 1100. As described above, the scribe tool 1100 has a joint 210, a holder 310U, and a cutting edge 900.
 ホルダ310Uは、複数の部品が組み立てられることによって構成されている。本実施の形態においては、これら複数の部品は、アウター部材310と、インナー部材410と、取付ネジ500とを含む。インナー部材410は、本体部411と、刃先900を把持する爪部412とを有している。インナー部材410は、アウター部材310の空洞部に挿入されている。この空洞部の一部は、取付ネジ500のためのネジ穴を構成している。ネジ穴に挿入されることによって取付ネジ500がアウター部材310に取り付けられている。取付ネジ500の一方端には、レンチを挿入するための凹部500hが設けられている。取付ネジ500をレンチによって回すことによって、止めネジの他方端がインナー部材410の本体部411に衝突する。これにより、インナー部材410がアウター部材310に固定される。 The holder 310U is configured by assembling a plurality of parts. In the present embodiment, these plurality of parts include an outer member 310, an inner member 410, and a mounting screw 500. The inner member 410 has a main body portion 411 and a claw portion 412 for gripping the cutting edge 900. The inner member 410 is inserted into the hollow portion of the outer member 310. A part of this cavity constitutes a screw hole for the mounting screw 500. The mounting screw 500 is attached to the outer member 310 by being inserted into the screw hole. A recess 500h for inserting a wrench is provided at one end of the mounting screw 500. By turning the mounting screw 500 with a wrench, the other end of the set screw collides with the main body 411 of the inner member 410. As a result, the inner member 410 is fixed to the outer member 310.
 前述したように、スクライブヘッド112は、ジョイント210がz軸周りに回転することができるようにジョイント210を保持している。本実施の形態においては第1軸AX1はz軸に沿っており、よってジョイント210は、スクライブヘッド112によって、第1軸AX1の周りに回転可能に支持されている。ジョイント210は、図示されているように、軸部MAと、軸部MAに固定された本体部MMとを有していてよい。軸部MAと本体部MMとは、同一材料によって一体に形成されていてもよい。軸部MAがスクライブヘッド112に把持されることによって、ジョイント210がスクライブヘッド112に固定される。軸部MAは、第1軸AX1周りにおけるジョイント210の向きに対応した形状(図2においては、右上部の切欠き)を有していることが好ましい。軸部MAは、第1軸AX1に沿って延びていることが好ましく、図2に示された構成においては、(切欠き部を無視するものとして)第1軸AX1に沿って延びる円筒形状を有している。本体部MMは、第1軸AX1から傾いた第2軸AX2に沿って延びる空洞部210fを有している。 As described above, the scribe head 112 holds the joint 210 so that the joint 210 can rotate about the z-axis. In this embodiment, the first axis AX1 is along the z-axis, so that the joint 210 is rotatably supported around the first axis AX1 by the scribe head 112. As shown in the figure, the joint 210 may have a shaft portion MA and a main body portion MM fixed to the shaft portion MA. The shaft portion MA and the main body portion MM may be integrally formed of the same material. The joint 210 is fixed to the scribe head 112 by gripping the shaft portion MA to the scribe head 112. The shaft portion MA preferably has a shape corresponding to the orientation of the joint 210 around the first shaft portion AX1 (in FIG. 2, a notch in the upper right portion). The shaft portion MA preferably extends along the first axis AX1, and in the configuration shown in FIG. 2, the shaft portion MA has a cylindrical shape extending along the first shaft portion AX1 (assuming that the notch portion is ignored). Have. The main body portion MM has a cavity portion 210f extending along the second axis AX2 inclined from the first axis AX1.
 ホルダ310Uは、ジョイント210の空洞部210fに挿入されることによって、第2軸AX2に沿ってジョイント210に固定されている。第2軸AX2は第1軸AX1から傾いている。言い換えれば、第1軸AX1と第2軸AX2とがなす角度は、0°よりも大きく90°よりも小さい。第2軸AX2は第1軸AX1から50°以上55°以下傾いていることが好ましく、51°以上53°以下傾いていることがさらに好ましい。 The holder 310U is fixed to the joint 210 along the second axis AX2 by being inserted into the hollow portion 210f of the joint 210. The second axis AX2 is tilted from the first axis AX1. In other words, the angle formed by the first axis AX1 and the second axis AX2 is larger than 0 ° and smaller than 90 °. The second axis AX2 is preferably tilted from the first axis AX1 by 50 ° or more and 55 ° or less, and more preferably 51 ° or more and 53 ° or less.
 刃先900は、ホルダ310Uに固定されている。言い換えれば、刃先900は、ホイール刃先ではなく固定刃先である。刃先900は、第1軸AX1上に位置するポイントである軸上ポイントPAXを有する。具体的には、刃先900は複数のポイントとして少なくともポイントPTa(第1ポイント)およびポイントPTb(第2ポイント)を有している。ジョイント210に対するホルダ310Uの、後述する姿勢角の変更によって、上記複数のポイントのいずれかが軸上ポイントPAXとされ得る。なお図5は、ポイントPTaが軸上ポイントPAXとして選択されている場合を示している。 The cutting edge 900 is fixed to the holder 310U. In other words, the cutting edge 900 is not a wheel cutting edge but a fixed cutting edge. The cutting edge 900 has an on-axis point PAX, which is a point located on the first axis AX1. Specifically, the cutting edge 900 has at least a point PTa (first point) and a point PTb (second point) as a plurality of points. By changing the posture angle of the holder 310U with respect to the joint 210, which will be described later, any of the plurality of points can be set as the on-axis point PAX. Note that FIG. 5 shows a case where the point Pta is selected as the on-axis point PAX.
 刃先900は、ダイヤモンドからなることが好ましい。言い換えれば、刃先900はダイヤモンド片であることが好ましい。ダイヤモンドは、結晶学的に、第2軸AX2に沿った<100>方位を有することが好ましい。 The cutting edge 900 is preferably made of diamond. In other words, the cutting edge 900 is preferably a diamond piece. Crystallographically, the diamond preferably has a <100> orientation along the second axis AX2.
 ジョイント210に対しての第2軸AX2の周りでのホルダ310Uの姿勢角は、変更可能である。具体的には、当該姿勢角が離散的にのみ変更可能であるように、ジョイント210とホルダ310Uとの間での嵌合構造が、ジョイント210の本体部MMに設けられた空洞部210fによって構成されている。この嵌合構造において、ジョイント210の空洞部210f(図6)に、ホルダ310Uが部分的に挿入されている。この挿入時におけるホルダ310Uの向きが変更されることによって、ホルダ310Uの姿勢角が変更可能である。 The posture angle of the holder 310U around the second axis AX2 with respect to the joint 210 can be changed. Specifically, the fitting structure between the joint 210 and the holder 310U is configured by the hollow portion 210f provided in the main body portion MM of the joint 210 so that the posture angle can be changed only discretely. Has been done. In this fitting structure, the holder 310U is partially inserted into the cavity 210f (FIG. 6) of the joint 210. The posture angle of the holder 310U can be changed by changing the orientation of the holder 310U at the time of this insertion.
 ジョイント210に対してホルダ310Uは、姿勢角として少なくとも第1姿勢角および第2姿勢角を取ることができる。具体的には、ホルダ310Uの第1姿勢角は、図5に示された姿勢角であり、ホルダ310Uの第2姿勢角は、図5においてホルダ310Uがジョイント210内で180°回転された場合の姿勢角である。第1姿勢角および第2姿勢角のそれぞれに対応して、ポイントPTaおよびポイントPTbが軸上ポイントPAX(図6)となる。 The holder 310U can take at least a first posture angle and a second posture angle with respect to the joint 210. Specifically, the first posture angle of the holder 310U is the posture angle shown in FIG. 5, and the second posture angle of the holder 310U is the case where the holder 310U is rotated by 180 ° in the joint 210 in FIG. Posture angle. The point PTa and the point PTb correspond to the first posture angle and the second posture angle, respectively, and become the on-axis point PAX (FIG. 6).
 刃先900のポイントPTaおよびポイントPTb(図5)は、第2軸AX2の周りでのホルダ310Uの姿勢角を変更するだけで軸上ポイントPAX(図6)とされ得るように、配置されている。言い換えれば、ポイントPTaおよびポイントPTbは、互いに異なる位置ではあるものの、第2軸AX2に沿った方向においては同じ位置に配置されており、かつ、第2軸AX2から同じ距離だけ離れている。このような寸法条件を満たすために、図7に示すように、ホルダ310Uの端面310pと、ポイントPTaおよびポイントPTbの各々との間の距離が、ホルダ310Uの延在方向(図7における縦方向)に沿って共通して距離LNとされる。このように寸法を管理するために、図7に示されたユニットが組み立てられた後に、刃先900が精密に研磨されることが好ましい。なお、当該ユニットがジョイント210の空洞部210f中に取り付けられた後は、距離LNの方向(ホルダ310Uの延在方向)が、第2軸AX2に沿った方向となる。 The point Pta and the point PTb (FIG. 5) of the cutting edge 900 are arranged so that they can be made into an on-axis point PAX (FIG. 6) simply by changing the posture angle of the holder 310U around the second axis AX2. .. In other words, although the points PTa and the point PTb are located at different positions from each other, they are arranged at the same position in the direction along the second axis AX2 and are separated from the second axis AX2 by the same distance. In order to satisfy such a dimensional condition, as shown in FIG. 7, the distance between the end face 310p of the holder 310U and each of the points PTa and the point PTb is the extending direction of the holder 310U (vertical direction in FIG. 7). ) Is commonly used as the distance LN. In order to control the dimensions in this way, it is preferable that the cutting edge 900 is precisely polished after the unit shown in FIG. 7 is assembled. After the unit is mounted in the cavity 210f of the joint 210, the direction of the distance LN (the extending direction of the holder 310U) becomes the direction along the second axis AX2.
 ホルダ310Uは第2軸AX2の周りに回転対称性を有している。具体的には、図5からわかるように、ホルダ310Uは、第2軸AX2周りの2回対称性を有している。なお本明細書において、ジョイント210へのホルダ310Uの固定に実質的に影響しない構造(例えば、部材の方位を表すための小さな穴または切欠き)は、ホルダ310Uの回転対称性を考慮する際に無視されるものとする。また本実施の形態においては、2回対称性を有するホルダ310Uが例示されているが、対称性の回数は2回に限定されるものではない。 The holder 310U has rotational symmetry around the second axis AX2. Specifically, as can be seen from FIG. 5, the holder 310U has a double symmetry around the second axis AX2. It should be noted that in the present specification, a structure that does not substantially affect the fixing of the holder 310U to the joint 210 (for example, a small hole or notch for indicating the orientation of the member) is used when considering the rotational symmetry of the holder 310U. It shall be ignored. Further, in the present embodiment, the holder 310U having double symmetry is exemplified, but the number of times of symmetry is not limited to two times.
 スクライブツール1100は位置決めピン600(位置決め部材)を有していることが好ましい。位置決めピン600は、空洞部210fを部分的に塞ぐことによって、ジョイント210に対しての第2軸AX2に沿ってのホルダ310Uの位置を制限する。具体的には、ジョイント210に設けられた穴に挿入されることによって位置決めピン600がジョイント210に取り付けられている。位置決めピン600にホルダ310Uの端面310pが当たることによって、ホルダ310Uが第2軸AX2の方向において位置決めピン600を超えて上方に位置することが禁止される。 The scribe tool 1100 preferably has a positioning pin 600 (positioning member). The positioning pin 600 limits the position of the holder 310U along the second axis AX2 with respect to the joint 210 by partially closing the cavity 210f. Specifically, the positioning pin 600 is attached to the joint 210 by being inserted into a hole provided in the joint 210. When the end face 310p of the holder 310U hits the positioning pin 600, the holder 310U is prohibited from being positioned above the positioning pin 600 in the direction of the second axis AX2.
 スクライブツール1100は止めネジ700を有していることが好ましい。止めネジ700は、位置決めピン600によって規定された位置でジョイント210に対してホルダ310Uを固定する。具体的には、ジョイント210に設けられたネジ穴に挿入されることによって止めネジ700がジョイント210に取り付けられている。止めネジ700の一方端には、レンチを挿入するための凹部700hが設けられている。止めネジ700をレンチによって回すことによって、止めネジの他方端がホルダ310Uの一方の側部に衝突する。止めネジ700をさらに回すことによって、ホルダ310Uの他方の側部が、ジョイント210の空洞部210f(図6)のV字状の凹部SV(図5)に押し付けられる。その結果、ホルダ310Uがジョイント210に強固に固定される。 The scribe tool 1100 preferably has a set screw 700. The set screw 700 secures the holder 310U to the joint 210 at the position defined by the positioning pin 600. Specifically, the set screw 700 is attached to the joint 210 by being inserted into a screw hole provided in the joint 210. A recess 700h for inserting a wrench is provided at one end of the set screw 700. By turning the set screw 700 with a wrench, the other end of the set screw collides with one side of the holder 310U. By further turning the set screw 700, the other side portion of the holder 310U is pressed against the V-shaped recess SV (FIG. 5) of the cavity portion 210f (FIG. 6) of the joint 210. As a result, the holder 310U is firmly fixed to the joint 210.
 <スクライブツールの組立方法>
 図9~図13は、スクライブツール1100(図6)の組立方法の工程を、この順に概略的に示す図である。図8を参照して、ジョイント210の穴に位置決めピン600が挿入される。図9および図10を参照して、インナー部材410の爪部412に刃先900が取り付けられる。図11を参照して、刃先900が固定されたインナー部材410が、アウター部材310内に収められ、かつ、取付ネジ500によって取り付けられる。共に一部断面図である図12および図13を参照して、ジョイント210の空洞部210f内にホルダ310Uが部分的に挿入される。そしてホルダ310Uが止めネジ700によってジョイント210に固定される。以上によりスクライブツール1100が得られる。
<Assembly method of scribe tool>
9 to 13 are diagrams schematically showing the steps of the assembly method of the scribe tool 1100 (FIG. 6) in this order. With reference to FIG. 8, the positioning pin 600 is inserted into the hole of the joint 210. With reference to FIGS. 9 and 10, the cutting edge 900 is attached to the claw portion 412 of the inner member 410. With reference to FIG. 11, the inner member 410 to which the cutting edge 900 is fixed is housed in the outer member 310 and is attached by the mounting screw 500. The holder 310U is partially inserted into the cavity 210f of the joint 210 with reference to FIGS. 12 and 13, both of which are partially cross-sectional views. Then, the holder 310U is fixed to the joint 210 by the set screw 700. From the above, the scribe tool 1100 can be obtained.
 <予備ジョイントの利用>
 図14は、スクライブツール1100(図6)においてジョイント210に代わって予備ジョイント210Mが取り付けられた構成を概略的に示す図である。予備ジョイント210Mは、ジョイント210と交換されることによって第1軸AX1の周りに回転可能に支持されることになる。予備ジョイント210Mは、予備ジョイント210Mへホルダ310Uを第3軸AX3に沿って固定させるための嵌合構造を有している。第3軸AX3は第1軸AX1および第2軸AX2から傾いている。なお、予備ジョイント210Mの、上記以外の構成については、前述したジョイント210(図6)の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
<Use of spare joint>
FIG. 14 is a diagram schematically showing a configuration in which a spare joint 210M is attached in place of the joint 210 in the scribe tool 1100 (FIG. 6). The spare joint 210M will be rotatably supported around the first axis AX1 by being replaced with the joint 210. The spare joint 210M has a fitting structure for fixing the holder 310U to the spare joint 210M along the third axis AX3. The third axis AX3 is tilted from the first axis AX1 and the second axis AX2. Since the configurations of the spare joint 210M other than the above are almost the same as those of the joint 210 (FIG. 6) described above, the same or corresponding elements are designated by the same reference numerals, and the description thereof will not be repeated.
 <変形例のスクライブツールの構成>
 図15は、スクライブツール1100(図6)の変形例であるスクライブツール1200Mの構成を示す断面図である。スクライブツール1200Mは、ジョイント210と、アウター部材310を含むホルダ310Uと(図6)に代わって、ジョイント220と、アウター部材320を含むホルダ320Uとを有している。
<Structure of scribe tool of modified example>
FIG. 15 is a cross-sectional view showing the configuration of the scribe tool 1200M, which is a modification of the scribe tool 1100 (FIG. 6). The scribe tool 1200M has a joint 210, a holder 310U including an outer member 310, and a joint 220 and a holder 320U including an outer member 320 in place of (FIG. 6).
 ホルダ320Uは少なくとも部分的に磁性体からなる。スクライブツール1200Mはマグネット800を有している。マグネット800は、位置決めピン600とホルダ320Uとが押し付け合うようにホルダ320Uへ作用する磁力を発生する。具体的には、ホルダ320Uの、刃先900が固定される一方端(図中、左下の端)とは反対の他方端(図中、右上の端)に間隔を空けて対向するように、マグネット800が配置されている。マグネット800は、ジョイント220の空洞部220f内に取り付けられている。またジョイント220に、マグネット800を覆うカバープレート880が設けられていてよい。 The holder 320U is at least partially made of magnetic material. The scribe tool 1200M has a magnet 800. The magnet 800 generates a magnetic force acting on the holder 320U so that the positioning pin 600 and the holder 320U are pressed against each other. Specifically, the magnet of the holder 320U is opposed to the other end (upper right end in the figure) opposite to the one end (lower left end in the figure) to which the cutting edge 900 is fixed. 800 is arranged. The magnet 800 is mounted in the cavity 220f of the joint 220. Further, the joint 220 may be provided with a cover plate 880 that covers the magnet 800.
 本変形例においては、位置決めピン600にホルダ320Uの側部傾斜面320pが当たることによって、ホルダ320Uが第2軸AX2の方向において位置決めピン600を超えて位置することが禁止される。側部傾斜面320pは、マグネット800とホルダ320Uとに挟まれた間隔から外れて配置されていることが好ましい。側部傾斜面320pは第2軸AX2に垂直な平面から傾いていてよい。 In this modification, the holder 320U is prohibited from being positioned beyond the positioning pin 600 in the direction of the second axis AX2 by the side inclined surface 320p of the holder 320U hitting the positioning pin 600. It is preferable that the side inclined surface 320p is arranged away from the distance between the magnet 800 and the holder 320U. The side inclined surface 320p may be inclined from a plane perpendicular to the second axis AX2.
 なお、ジョイント220と、アウター部材320を含むホルダ320Uと、の上記以外の構成については、前述した、ジョイント210と、アウター部材310を含むホルダ320Uと(図6)の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。 The configurations of the joint 220 and the holder 320U including the outer member 320 other than the above are almost the same as the configurations of the joint 210 and the holder 320U including the outer member 310 (FIG. 6) described above. , The same or corresponding elements are given the same reference numerals, and the description is not repeated.
 <変形例のスクライブツールの組立方法>
 図16~図21は、スクライブツール1200M(図15)の組立方法の工程を、この順に概略的に示す図である。図16を参照して、ジョイント210の穴に位置決めピン600が挿入される。また、ジョイント220の空洞部220f内に配置されるように、マグネット800がジョイント220に取り付けられる。またマグネット800を覆うカバープレート880がジョイント220に取り付けられる。図17および図18を参照して、インナー部材410の爪部412に刃先900が取り付けられる。図19および図20を参照して、刃先900が固定されたインナー部材410が、アウター部材320内に収められ、かつ、取付ネジ500によって取り付けられる。共に一部断面図である図21および図22を参照して、ジョイント220の空洞部220f内にホルダ320Uが部分的に挿入される。ホルダ320Uが磁力によってマグネット800の方へ引力を受けつつ、ホルダ320Uの側部傾斜面320pが位置決めピン600に当たることによって、ホルダ320Uの位置が固定される。以上によりスクライブツール1200Mが得られる。
<Assembly method of scribe tool of modified example>
16 to 21 are diagrams schematically showing the steps of the assembly method of the scribe tool 1200M (FIG. 15) in this order. With reference to FIG. 16, the positioning pin 600 is inserted into the hole of the joint 210. Further, the magnet 800 is attached to the joint 220 so as to be arranged in the cavity 220f of the joint 220. Further, a cover plate 880 covering the magnet 800 is attached to the joint 220. With reference to FIGS. 17 and 18, the cutting edge 900 is attached to the claw portion 412 of the inner member 410. With reference to FIGS. 19 and 20, the inner member 410 to which the cutting edge 900 is fixed is housed in the outer member 320 and is attached by the mounting screw 500. The holder 320U is partially inserted into the cavity 220f of the joint 220 with reference to FIGS. 21 and 22, both of which are partial cross-sectional views. The position of the holder 320U is fixed by the side inclined surface 320p of the holder 320U hitting the positioning pin 600 while the holder 320U receives an attractive force toward the magnet 800 by the magnetic force. From the above, the scribe tool 1200M can be obtained.
 <効果>
 本実施の形態によれば、第1軸AX1の周りに回転可能に支持されたジョイント210に、第1軸AX1から傾いた第2軸AX2に沿ってホルダ310Uが固定されている。ホルダ310Uは刃先900を固定しており、刃先900は、第1軸AX1上に軸上ポイントPAXを有する。これにより、第1軸AX1上に軸上ポイントPAXを有する刃先900を、第1軸AX1から傾いた第2軸AX2に沿ったホルダ310Uによって固定することができる。よって、第1軸AX1の方向がスクライブ装置1(図1)の仕様上ひとつに限られる場合(典型的には、第1軸AX1が、脆性材料基板107を支持するテーブル106(図1)の支持面に垂直な方向のみに限られる場合)においても、第1軸AX1に対する第2軸AX2の角度の設計を適宜調整することによって、脆性材料基板107への刃先900の姿勢を最適化することができる。この最適化は、ジョイント210に対するホルダ310Uの姿勢の設計を調整することによって行われるので、ホルダ310Uに対する刃先900の姿勢は変更する必要がない。よって、ホルダ310Uに対する刃先900の姿勢として、ホルダ310Uに固定された刃先900を研磨しやすい姿勢を、脆性材料基板107への刃先900の姿勢にかかわらず、用いることができる。
<Effect>
According to the present embodiment, the holder 310U is fixed to the joint 210 rotatably supported around the first axis AX1 along the second axis AX2 tilted from the first axis AX1. The holder 310U fixes the cutting edge 900, and the cutting edge 900 has an on-axis point PAX on the first axis AX1. Thereby, the cutting edge 900 having the on-axis point PAX on the first axis AX1 can be fixed by the holder 310U along the second axis AX2 tilted from the first axis AX1. Therefore, when the direction of the first axis AX1 is limited to one due to the specifications of the scribe device 1 (FIG. 1) (typically, the first axis AX1 of the table 106 (FIG. 1) supporting the brittle material substrate 107. Optimizing the posture of the cutting edge 900 with respect to the brittle material substrate 107 by appropriately adjusting the design of the angle of the second axis AX2 with respect to the first axis AX1 even in the case of being limited to the direction perpendicular to the support surface). Can be done. Since this optimization is performed by adjusting the design of the posture of the holder 310U with respect to the joint 210, it is not necessary to change the posture of the cutting edge 900 with respect to the holder 310U. Therefore, as the posture of the cutting edge 900 with respect to the holder 310U, a posture in which the cutting edge 900 fixed to the holder 310U can be easily polished can be used regardless of the posture of the cutting edge 900 with respect to the brittle material substrate 107.
 なお上記本実施の形態においては、スクライブのための軸上ポイントPAX(図6)として複数のポイントPTa,PTb(図5)を切り替える場合について詳述したが、当該切替がなされない変形例においても、上述した効果は得られる。その場合、刃先は、軸上ポイントPAXとなり得るポイントとして、1つのポイントのみを有していてもよい。 In the present embodiment, the case where a plurality of points PTa and PTb (FIG. 5) are switched as the on-axis point PAX (FIG. 6) for scribe is described in detail, but even in the modified example in which the switching is not performed. , The above-mentioned effects can be obtained. In that case, the cutting edge may have only one point as a point that can be an on-axis point PAX.
 一方、本実施の形態によれば、刃先900は、第2軸AX2の周りでのホルダ310Uの姿勢角の変更によって軸上ポイントPAX(図6)とされ得る複数のポイントPTa,PTb(図5)を有している。これにより、スクライブのための軸上ポイントPAXとして複数のポイントを切り替えて用いることができる。よって、摩耗に起因しての刃先900の寿命を顕著に長くすることができる。 On the other hand, according to the present embodiment, the cutting edge 900 has a plurality of points PTa and PTb (FIG. 5) which can be regarded as an on-axis point PAX (FIG. 6) by changing the posture angle of the holder 310U around the second axis AX2. )have. As a result, a plurality of points can be switched and used as the on-axis point PAX for scribe. Therefore, the life of the cutting edge 900 due to wear can be significantly extended.
 上記姿勢角が離散的にのみ変更可能であるようにジョイント210とホルダ310Uとの間での嵌合構造が設けられている。これにより、これら離散的な姿勢角をホルダ310Uの最適な姿勢角としておくことで、最適な姿勢角からのずれの発生を防止することができる。具体的には、ホルダ310Uの第1姿勢角および第2姿勢角のそれぞれに対応して、刃先900のポイントPTaおよびポイントPTb(図5)が軸上ポイントPAX(図6)となる。これにより、脆性材料基板107への軸上ポイントPAXの姿勢のずれの発生を防止することができる。 A fitting structure is provided between the joint 210 and the holder 310U so that the posture angle can be changed only discretely. As a result, by setting these discrete posture angles as the optimum posture angles of the holder 310U, it is possible to prevent the occurrence of deviation from the optimum posture angles. Specifically, the point Pta and the point PTb (FIG. 5) of the cutting edge 900 correspond to the first attitude angle and the second attitude angle of the holder 310U, respectively, and become the on-axis point PAX (FIG. 6). This makes it possible to prevent the posture of the on-axis point PAX from shifting with respect to the brittle material substrate 107.
 刃先900の複数のポイントPTa,PTb(図5)は、第2軸AX2の周りでのホルダ310Uの姿勢角を変更するだけで軸上ポイントPAX(図6)とされ得るように配置されている。これにより、姿勢角を変更する際に、第2軸AX2に沿った方向における位置を変える必要がない。特に、ジョイント210に対しての第2軸AX2に沿ってのホルダ310Uの位置を制限する位置決めピン600が用いられる場合、このように制限された位置で、ホルダ310Uの姿勢角を変更することができる。止めネジ700(図6)(変形例(図15)においてはマグネット800)を用いることによって、当該位置からのずれを防止することができる。 The plurality of points PTa and PTb (FIG. 5) of the cutting edge 900 are arranged so as to be the on-axis point PAX (FIG. 6) only by changing the posture angle of the holder 310U around the second axis AX2. .. As a result, when changing the posture angle, it is not necessary to change the position in the direction along the second axis AX2. In particular, when a positioning pin 600 that limits the position of the holder 310U along the second axis AX2 with respect to the joint 210 is used, the posture angle of the holder 310U can be changed at such a limited position. can. By using the set screw 700 (FIG. 6) (magnet 800 in the modified example (FIG. 15)), deviation from the position can be prevented.
 ホルダ310Uは第2軸AX2の周りに回転対称性(具体的には2回対称性)を有している。これにより、回転対称性に対応してホルダ310Uの姿勢角を変更することができる。 The holder 310U has rotational symmetry (specifically, double symmetry) around the second axis AX2. Thereby, the posture angle of the holder 310U can be changed corresponding to the rotational symmetry.
 刃先900は、結晶学的に、第2軸AX2に沿った<100>方位を有するダイヤモンドからなる。これにより、<100>方位から所定の角度傾いた面を刃先900に形成するための加工を、第2軸AX2に対応する方向を基準とすることによって、容易に行うことができる。具体的には、図7に示されたユニットが組み立てられた後、端面310pの法線方向(ホルダ310Uの延在方向)を基準として、刃先900に対して精密な加工を行うことによって、ポイントPTa,PTbの各々の結晶学的な特性を精密に管理することができる。その一方で、第1軸AX1から傾いた第2軸AX2に沿ってホルダ310Uがジョイント210に固定されることによって、刃先900の<100>方位を第1軸AX1から傾けることができる。この傾きを最適化することによって、刃先900の摩耗を抑制することができる。この傾き、すなわち第1軸AX1からの第2軸AX2の傾きは、50°以上55°以下が好ましく、51°以上53°以下がさらに好ましい。 The cutting edge 900 is crystallographically made of diamond having a <100> orientation along the second axis AX2. Thereby, the processing for forming the surface inclined at a predetermined angle from the <100> direction on the cutting edge 900 can be easily performed by using the direction corresponding to the second axis AX2 as a reference. Specifically, after the unit shown in FIG. 7 is assembled, the cutting edge 900 is precisely machined with reference to the normal direction of the end face 310p (the extending direction of the holder 310U). The crystallographic properties of each of PTa and PTb can be precisely controlled. On the other hand, by fixing the holder 310U to the joint 210 along the second axis AX2 tilted from the first axis AX1, the <100> direction of the cutting edge 900 can be tilted from the first axis AX1. By optimizing this inclination, wear of the cutting edge 900 can be suppressed. This inclination, that is, the inclination of the second axis AX2 from the first axis AX1 is preferably 50 ° or more and 55 ° or less, and more preferably 51 ° or more and 53 ° or less.
 また本実施の形態によれば、予備ジョイント210M(図14)は、予備ジョイント210Mへホルダ310Uを第3軸AX3に沿って固定させるための嵌合構造を有しており、第3軸AX3は第1軸AX1および第2軸AX2(図6)から傾いている。ジョイント210(図6)を使用している間に無視できない程度に刃先900の摩耗が進行してきた場合、ジョイント210に代わって予備ジョイント210Mを用いることで、刃先900の姿勢が調整される。その結果、刃先900と脆性材料基板107(図1)との接触角度が変化する。これにより、摩耗の影響を抑えつつスクライブをさらに継続することができるようになる。言い換えれば、ジョイント210(図6)に代わって予備ジョイント210M(図14)を取り付けることによって、刃先900の姿勢が調整され、その結果、刃先900が特に摩耗しやすい箇所も変化する。よって、スクライブツールの一部としてジョイント210および予備ジョイント210Mの組を保有しておくことによって、摩耗に起因しての刃先900の寿命を、より長くすることができる。 Further, according to the present embodiment, the spare joint 210M (FIG. 14) has a fitting structure for fixing the holder 310U to the spare joint 210M along the third axis AX3, and the third axis AX3 has a fitting structure. It is tilted from the first axis AX1 and the second axis AX2 (FIG. 6). When the wear of the cutting edge 900 progresses to a non-negligible level while using the joint 210 (FIG. 6), the posture of the cutting edge 900 is adjusted by using the spare joint 210M instead of the joint 210. As a result, the contact angle between the cutting edge 900 and the brittle material substrate 107 (FIG. 1) changes. This makes it possible to continue scribes while suppressing the effects of wear. In other words, by attaching the spare joint 210M (FIG. 14) instead of the joint 210 (FIG. 6), the posture of the cutting edge 900 is adjusted, and as a result, the part where the cutting edge 900 is particularly vulnerable to wear changes. Therefore, by holding a set of the joint 210 and the spare joint 210M as a part of the scribe tool, the life of the cutting edge 900 due to wear can be further extended.
 112       :スクライブヘッド
 210,220   :ジョイント
 210M      :予備ジョイント
 310,320   :アウター部材
 310U,320U :ホルダ
 410       :インナー部材
 500       :取付ネジ
 600       :位置決めピン
 700       :止めネジ
 800       :マグネット
 900       :刃先
 1100,1200M:スクライブツール
 AX1~AX3   :第1~第3軸
 PAX       :軸上ポイント
 PTa,PTb   :第1,第2ポイント
112: Scribe head 210, 220: Joint 210M: Spare joint 310, 320: Outer member 310U, 320U: Holder 410: Inner member 500: Mounting screw 600: Positioning pin 700: Set screw 800: Magnet 900: Cutting edge 1100, 1200M: Scrivener tool AX1 to AX3: 1st to 3rd axes PAX: On-axis points PTa, PTb: 1st and 2nd points

Claims (13)

  1.  第1軸の周りに回転可能に支持されるジョイントと、
     前記第1軸から傾いた第2軸に沿って前記ジョイントに固定されたホルダと、
     前記ホルダに固定された刃先と、
    を備え、前記刃先は、前記第1軸上に位置するポイントである軸上ポイントを有する、スクライブツール。
    A joint that is rotatably supported around the first axis,
    A holder fixed to the joint along a second axis tilted from the first axis,
    The cutting edge fixed to the holder and
    The scribe tool comprising:, the cutting edge has an on-axis point, which is a point located on the first axis.
  2.  前記ジョイントに対しての前記第2軸の周りでの前記ホルダの姿勢角が変更可能であり、
     前記刃先は、前記姿勢角の変更によって前記軸上ポイントとされ得る複数のポイントを有している、請求項1に記載のスクライブツール。
    The posture angle of the holder around the second axis with respect to the joint can be changed.
    The scribe tool according to claim 1, wherein the cutting edge has a plurality of points that can be regarded as the on-axis points by changing the posture angle.
  3.  前記姿勢角が離散的にのみ変更可能であるように前記ジョイントと前記ホルダとの間での嵌合構造が設けられている、請求項2に記載のスクライブツール。 The scribe tool according to claim 2, wherein a fitting structure is provided between the joint and the holder so that the posture angle can be changed only discretely.
  4.  前記ジョイントに対して前記ホルダは前記姿勢角として少なくとも第1姿勢角および第2姿勢角を取ることができ、前記刃先は前記複数のポイントとして少なくとも第1ポイントおよび第2ポイントを有しており、前記第1姿勢角および前記第2姿勢角のそれぞれに対応して前記第1ポイントおよび前記第2ポイントが前記軸上ポイントとなる、請求項3に記載のスクライブツール。 The holder can take at least a first posture angle and a second posture angle as the posture angle with respect to the joint, and the cutting edge has at least a first point and a second point as the plurality of points. The scribe tool according to claim 3, wherein the first point and the second point correspond to the first posture angle and the second posture angle, respectively, as the on-axis points.
  5.  前記刃先の前記複数のポイントは、前記第2軸の周りでの前記ホルダの前記姿勢角を変更するだけで前記軸上ポイントとされ得るように配置されている、請求項2から4のいずれか1項に記載のスクライブツール。 One of claims 2 to 4, wherein the plurality of points of the cutting edge are arranged so as to be an on-axis point only by changing the posture angle of the holder around the second axis. The scribe tool described in item 1.
  6.  前記ジョイントに対しての前記第2軸に沿っての前記ホルダの位置を制限する位置決め部材をさらに備える、請求項5に記載のスクライブツール。 The scribe tool according to claim 5, further comprising a positioning member that limits the position of the holder along the second axis with respect to the joint.
  7.  前記位置決め部材によって規定された位置で前記ジョイントに対して前記ホルダを固定する止めネジをさらに備える、請求項6に記載のスクライブツール。 The scribe tool according to claim 6, further comprising a set screw for fixing the holder to the joint at a position specified by the positioning member.
  8.  前記ホルダは少なくとも部分的に磁性体からなり、前記位置決め部材と前記ホルダとが押し付け合うように前記ホルダへ作用する磁力を発生するマグネットをさらに備える、請求項6に記載のスクライブツール。 The scribe tool according to claim 6, wherein the holder is at least partially made of a magnetic material, and further includes a magnet that generates a magnetic force that acts on the holder so that the positioning member and the holder are pressed against each other.
  9.  前記ホルダは、前記第2軸の周りに回転対称性を有している、請求項1から8のいずれか1項に記載のスクライブツール。 The scribe tool according to any one of claims 1 to 8, wherein the holder has rotational symmetry around the second axis.
  10.  前記刃先は、前記第2軸に沿った<100>方位を有するダイヤモンドからなる、請求項1から9のいずれか1項に記載のスクライブツール。 The scribe tool according to any one of claims 1 to 9, wherein the cutting edge is made of diamond having a <100> orientation along the second axis.
  11.  前記ジョイントと交換されることによって前記第1軸の周りに回転可能に支持されることになる予備ジョイントをさらに備え、
     前記予備ジョイントは、前記予備ジョイントへ前記ホルダを第3軸に沿って固定させるための嵌合構造を有しており、前記第3軸は前記第1軸および前記第2軸から傾いている、請求項1から10のいずれか1項に記載のスクライブツール。
    Further provided with a spare joint that will be rotatably supported around the first axis by being replaced with the joint.
    The spare joint has a fitting structure for fixing the holder to the spare joint along a third axis, and the third axis is tilted from the first axis and the second axis. The scribe tool according to any one of claims 1 to 10.
  12.  請求項1から11のいずれか1項に記載のスクライブツールと、
     前記スクライブツールの前記ジョイントを前記第1軸の周りに回転可能に保持するスクライブヘッドと、
    を備えるスクライブ装置。
    The scribe tool according to any one of claims 1 to 11.
    A scribe head that rotatably holds the joint of the scribe tool around the first axis.
    A scribe device equipped with.
  13.  刃先が固定されたホルダを保持するためのジョイントであって、
     第1軸に沿った軸部と、
     前記軸部に固定された本体部と、
     前記ホルダを挿入するために前記本体部に設けられ、前記第1軸から傾いた第2軸に沿って延び、前記第2軸の周りでの前記ホルダの姿勢角が離散的にのみ変更可能となるように嵌合構造を構成する空洞部と、
     前記空洞部を部分的に塞ぐことによって前記第2軸に沿っての前記ホルダの位置を制限するための位置決めピンと、
    を備えるジョイント。
    A joint for holding a holder with a fixed cutting edge.
    The shaft along the first axis and
    The main body fixed to the shaft and
    It is provided in the main body for inserting the holder, extends along a second axis inclined from the first axis, and the posture angle of the holder around the second axis can be changed only discretely. The cavity that constitutes the fitting structure so that
    A positioning pin for limiting the position of the holder along the second axis by partially closing the cavity.
    A joint that features.
PCT/JP2021/039113 2020-10-29 2021-10-22 Scribing tool, scribing device, and joint WO2022091977A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018052129A (en) * 2017-12-29 2018-04-05 三星ダイヤモンド工業株式会社 Scribing wheel and its manufacturing method
JP2019112294A (en) * 2017-12-21 2019-07-11 日本電気硝子株式会社 Method for manufacturing glass substrate
US20200180994A1 (en) * 2018-12-06 2020-06-11 Schott Ag Glass element with cut edge and method of producing same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019112294A (en) * 2017-12-21 2019-07-11 日本電気硝子株式会社 Method for manufacturing glass substrate
JP2018052129A (en) * 2017-12-29 2018-04-05 三星ダイヤモンド工業株式会社 Scribing wheel and its manufacturing method
US20200180994A1 (en) * 2018-12-06 2020-06-11 Schott Ag Glass element with cut edge and method of producing same

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