WO2022048259A1 - 化学品输送系统和消除化学品输送管路静电的方法 - Google Patents

化学品输送系统和消除化学品输送管路静电的方法 Download PDF

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Publication number
WO2022048259A1
WO2022048259A1 PCT/CN2021/102295 CN2021102295W WO2022048259A1 WO 2022048259 A1 WO2022048259 A1 WO 2022048259A1 CN 2021102295 W CN2021102295 W CN 2021102295W WO 2022048259 A1 WO2022048259 A1 WO 2022048259A1
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WIPO (PCT)
Prior art keywords
aerosol
chemical
port
aerosol generating
pipe
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/102295
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English (en)
French (fr)
Inventor
邱垂翰
王青
秦红星
张玉
安建路
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Changxin Memory Technologies Inc
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Changxin Memory Technologies Inc
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Priority to US17/431,150 priority Critical patent/US20230352318A1/en
Publication of WO2022048259A1 publication Critical patent/WO2022048259A1/zh
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0408—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying

Definitions

  • the present application relates to the technical field of semiconductor equipment, and in particular, to a chemical delivery system and a method for eliminating static electricity in chemical delivery pipelines.
  • wafers are essential basic components. To improve production efficiency, a quick drying of the wafer is usually required after wafer cleaning. High-concentration isopropanol can improve wafer drying efficiency after wafer cleaning due to its high volatility.
  • PVDF polyvinylidene fluoride
  • the polyvinylidene fluoride material is a high-resistance medium, so the static electricity accumulated in the chemical reagent delivery pipeline cannot be dissipated in time, and the volatilization of high-concentration isopropanol will form a flammable gas in the chemical reagent delivery pipeline, and its concentration is as high as 5000ppm.
  • static electricity may cause fire or explosion hazards when encountering high concentrations of isopropyl alcohol.
  • a chemical delivery system comprising:
  • a liquid storage device for storing the aerosol-generating solution
  • an aerosol generating device which is respectively communicated with the liquid storage device and the pipe wall of the chemical reagent delivery pipe, and is used for converting the aerosol generating solution from a liquid state to an aerosol state, and transporting the aerosol to the into the chemical reagent delivery pipe to eliminate static electricity in the chemical reagent delivery pipe.
  • the aerosol generating device comprises:
  • a Venturi tube the Venturi tube has a first port and a second port, a reducing portion located between the first port and the second port, and a liquid inlet connected to the reducing portion, so
  • the first port is provided with a gas interface
  • the second port is communicated with the chemical reagent delivery pipe
  • the liquid inlet is communicated with the liquid storage device
  • the aerosol generating solution enters the liquid inlet through the liquid inlet.
  • the diameter reducing portion wherein from the first port and the second port to the reducing diameter portion, the diameter of the Venturi tube decreases step by step.
  • a pressure control device is further included, the pressure control device is connected to the gas interface of the venturi, and is used for controlling the pressure of the gas entering the gas interface.
  • the aerosol generating device includes a solution transport tube, the liquid storage device includes a liquid treatment device, and the liquid treatment device is disposed in the solution transport tube and located between the liquid storage device and the liquid storage device. between the venturis.
  • an aerosol delivery device is further included, the aerosol delivery device is used for connecting the second port of the venturi tube and the wall of the chemical reagent delivery tube, and the aerosol delivery device is connected to The walls of the chemical reagent delivery pipes are connected vertically.
  • the aerosol delivery device further comprises a plurality of first communication ports, the plurality of first communication ports are arranged at intervals along the extension direction of the chemical agent delivery pipe, The output end of the aerosol generating device communicates with the plurality of first communication ports.
  • it further includes a control device, which is electrically connected to the aerosol generating device and configured to control the aerosol generating device to generate the aerosol when the chemical agent flows in the chemical agent delivery pipe.
  • the solution is converted from a liquid state to an aerosol state.
  • Embodiments of the present application also provide a method for eliminating static electricity in a chemical delivery pipeline, including:
  • the aerosol generating device is controlled to deliver aerosol to the chemical agent delivery pipe, so as to eliminate static electricity in the chemical agent delivery pipe.
  • controlling the aerosol generating device to deliver aerosol to the chemical agent delivery pipe so as to eliminate static electricity in the chemical agent delivery pipe comprises:
  • the aerosol is delivered to the chemical delivery tube to eliminate static electricity in the chemical delivery tube.
  • the pressure of spraying the aerosol by the aerosol generating device is controlled according to the flow rate of the chemical reagent in the chemical reagent delivery pipe.
  • the chemical delivery system and the method for eliminating static electricity in a chemical delivery pipeline include a chemical reagent delivery tube, a liquid storage device, and an aerosol generating device.
  • the liquid storage device is used for storing the aerosol generating solution.
  • the input end and the output end of the aerosol generating device are respectively communicated with the liquid storage device and the chemical reagent delivery pipe.
  • the aerosol-generating solution in the liquid storage device enters the aerosol-generating device.
  • the aerosol generating device converts the aerosol generating solution from a liquid state to an aerosol state.
  • the aerosol diffuses into the chemical agent delivery pipe, and adsorbs and eliminates charged ions in the chemical agent delivery pipe, so as to avoid fire or explosion caused by electrostatic ions encountering flammable and explosive chemical agents.
  • FIG. 1 is a schematic structural diagram of a chemical delivery system according to an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of a chemical delivery system provided by another embodiment of the present application.
  • FIG. 3 is a schematic structural diagram of a chemical delivery system according to another embodiment of the present application.
  • Chemical delivery system 10 liquid storage device 100, aerosol generating device 200, venturi tube 210, gas interface 211, diameter reducing part 212, spray head 217, solution transport pipe 220, on-off valve 213, pressure control device 214, pressure gauge 215, gas flow meter 216, first port 218, second port 219, liquid inlet 223, filter 221, liquid flow meter 222, static elimination pipeline system 20, chemical reagent delivery pipe 300, first communication port 310, The dispersion pipe 400 , the transfer port 410 , the second communication port 420 , the dispersion branch pipe 430 , and the vacuum pump 500 . Liquid processing device 600 , aerosol delivery device 700 , control device 800 .
  • first and second are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature delimited with “first”, “second” may expressly or implicitly include at least one of that feature.
  • plurality means at least two, such as two, three, etc., unless expressly and specifically defined otherwise.
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between the two elements, unless otherwise specified limit.
  • installed may be a fixed connection or a detachable connection , or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between the two elements, unless otherwise specified limit.
  • a first feature "on” or “under” a second feature may be in direct contact with the first and second features, or the first and second features indirectly through an intermediary touch.
  • the first feature being “above”, “over” and “above” the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is level higher than the second feature.
  • the first feature being “below”, “below” and “below” the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.
  • an embodiment of the present application provides a chemical delivery system 10 .
  • the chemical delivery system 10 includes a chemical reagent delivery pipe 300 , a liquid storage device 100 and an aerosol generating device 200 .
  • the aerosol generating device 200 is communicated with the liquid storage device 100 and the chemical reagent delivery pipe 300 respectively.
  • the liquid storage device 100 is used for storing the aerosol generating solution.
  • the aerosol generating device 200 is used to convert the aerosol generating solution from a liquid state to an aerosol state, and transport the aerosol into the chemical agent delivery pipe 300 to eliminate the chemical agent delivery pipe Static electricity in 300.
  • the liquid storage device 100 may be a pressure vessel.
  • the liquid storage device 100 can be made of polyester material or metal material, as long as the liquid storage device 100 is not easily corroded by the solution generated by the aerosol.
  • the aerosol generating device 200 can atomize the aerosol generating solution to generate the aerosol.
  • the liquid storage device 100 can deliver the aerosol to the aerosol generating device 200 through a power device.
  • the aerosol device can also generate negative pressure to absorb the aerosol generating solution into the aerosol generating device 200 .
  • the aerosol generating device 200 can utilize the principle of fluid mechanics to vaporize the liquid aerosol generating solution into an aerosol state through the flow rate and pressure changes of the aerosol generating solution.
  • the aerosol can be sprayed into the chemical agent delivery pipe 300 from the output end of the aerosol generating device 200 . Since the aerosol can be continuously diffused in the chemical reagent delivery tube 300, it can combine with the charged ions in the chemical reagent delivery tube 300, and can flow out of the chemical reagent along with the chemical reagent solution Delivery tube 300. It can be understood that when the chemical delivery system 10 is applied to a semiconductor production line, the chemical agent may be an isopropanol solution.
  • the chemical delivery system 10 includes a chemical reagent delivery pipe 300 , a liquid storage device 100 and an aerosol generating device 200 .
  • the liquid storage device 100 is used for storing the aerosol generating solution.
  • the input end and the output end of the aerosol generating device 200 are respectively communicated with the liquid storage device 100 and the chemical reagent delivery pipe 300 .
  • the aerosol generating solution in the liquid storage device 100 enters the aerosol generating device 200 .
  • the aerosol generating device 200 converts the aerosol generating solution from a liquid state to an aerosol state.
  • the aerosol enters the chemical reagent delivery pipe 300 and diffuses, and absorbs and eliminates the charged ions in the chemical reagent delivery pipe 300, so as to prevent electrostatic ions from encountering flammable and explosive isopropanol gas and causing a fire Or explode.
  • the aerosol generating device includes a venturi 210 .
  • the venturi 210 has a first port 218 and a second port 219 , a reducing portion 212 located between the first port 218 and the second port 219 , and an inlet liquid connected to the reducing portion 212 mouth 223.
  • the first port 218 is provided with a gas interface 211 .
  • the second port 219 communicates with the chemical reagent delivery tube 300 .
  • the liquid inlet 223 communicates with the liquid storage device 100 .
  • the aerosol generating solution enters the variable diameter portion 212 through the liquid inlet 223 . Wherein, from the first port 218 and the second port 219 to the diameter reducing portion 212, the diameter of the venturi tube 210 decreases step by step.
  • the venturi 210 can be made of ceramic, glass or polyester material.
  • the gas port 211 can be installed with a VCR connector. Through the gas port 211 , an inert gas can be introduced into the venturi 210 through the first port 218 and the second port 219 . In one embodiment, nitrogen gas may be introduced into the venturi tube 210 through the gas interface 211 .
  • the reducing portion 212 may be located in the middle of the venturi 210, that is, between the first port 218 and the second port 219. It can be understood that the diameter of the venturi tube 210 may be the same at both ends of the diameter reducing portion 212 . That is, the diameters of the first port 218 and the second port 219 may be the same.
  • the diameter of the venturi 210 may gradually become smaller and then gradually larger. That is, the diameter of the Venturi tube 210 is the smallest in the diameter reducing portion 212 . It can be understood that the diameter of the Venturi tube 210 also gradually decreases from the two ends of the reduced diameter portion 212 to the middle portion of the reduced diameter portion 212 .
  • the diameter of the venturi tube 210 decreases step by step, and the cross-sectional area of the venturi tube 210 may decrease at the same rate of change, or it may decrease stepwise according to different rates of change.
  • the liquid storage device 100 may contain an aerosol generating solution.
  • the aerosol-generating solution may be an inorganic salt solution.
  • the aerosol generating solution may be a sodium chloride solution.
  • the solubility of the sodium chloride solution may range from 5% to 10%.
  • the size of the aerosol particle size can be regulated by regulating the solubility of the sodium chloride solution.
  • the liquid inlet 223 may be disposed on the side wall of the smallest diameter portion of the reducing portion 212 .
  • the variable diameter portion 212 communicates with 223 the liquid storage device 100 through the liquid inlet.
  • the chemical delivery system further includes a solution delivery tube 220 . Both ends of the solution transport pipe 220 are communicated with the solution transport pipe 220 and the Venturi pipe 210 respectively. One end of the solution transporting pipe 220 may communicate with the venturi pipe 210 through the liquid inlet 233 .
  • the connection between the solution transport tube 220 and the venturi tube 210 may be the position where the diameter of the venturi tube 210 is the smallest, that is, the solution transport tube 220 may be located between the diameter reducing portion 212 and the Venturi tube. Tube 210 communicates.
  • gas can be introduced into the venturi tube 210 through the gas interface 211 .
  • the pressure in the solution transport pipe 220 is higher than the pressure at the reducing portion 212 . That is, compared with the solution transport pipe 220 , a negative pressure is formed at the diameter reducing portion 212 . Under the action of negative pressure, the aerosol-generating solution in the liquid storage device 100 is sucked into the venturi tube 210 .
  • the aerosol generating solution can be ejected from the second port 219 of the venturi tube 210 in an aerosol state.
  • the aerosol can be sprayed into the chemical reagent delivery tube 300 through the second port 219, and adsorb and eliminate the charged ions in the chemical reagent delivery tube 300, so as to prevent electrostatic ions from encountering higher concentrations.
  • High isopropyl alcohol solution gas can cause fire or explosion.
  • the chemical delivery system 10 also includes a pressure control device 214 .
  • the pressure control device 214 is connected to the gas port 211 of the venturi 210 . It is used to control the pressure of the gas entering the gas interface 211 .
  • the pressure control device 214 may be a pressure regulating valve 214 .
  • the chemical delivery system 10 also includes an on-off valve 213, a pressure gauge 215, and a gas flow meter 216.
  • the on-off valve 213 , the pressure control device 214 , the pressure gauge 215 and the gas flow meter 216 are provided on the venturi 210 .
  • the on-off valve 213 , the pressure regulating valve 214 , the pressure gauge 215 and the gas flow meter 216 are located between the gas port 211 and the diameter reducing portion 212 in sequence. That is, in the direction toward the variable diameter portion 212 , the on-off valve 213 , the pressure control device 214 , the pressure gauge 215 and the gas flow meter 216 are sequentially arranged on the gas port 211 and the variable diameter. between the diameter portions 212 .
  • the entry of gas into the venturi tube 210 can be controlled by the on-off valve 213 .
  • the pressure control device 214 can adjust the pressure of the gas injected into the venturi 210 .
  • the pressure control device 214 can be adjusted in time so that the aerosol is ejected from the end of the venturi tube 210 away from the gas port 211 .
  • the pressure gauge 215 can display the pressure value in the venturi 210 .
  • the gas flow meter 216 may reflect the flow rate of the gas in the venturi 210 .
  • the liquid storage device 100 includes a liquid handling device 600 .
  • the liquid treatment device 600 is disposed in the solution transport pipe 220 and is located between the liquid storage device 100 and the venturi pipe 210 .
  • the liquid processing device 600 can monitor and control parameters such as flow rate, flow rate, temperature, pressure, and the like of the aerosol-generating solution output from the liquid storage device 100 .
  • the liquid processing device 600 can also control whether the aerosol generating solution is output from the liquid storage device 100 .
  • the liquid treatment device 600 can also filter the aerosol-generating solution in the liquid storage device 100 .
  • the liquid treatment device 600 includes a filter 221 and a liquid flow meter 222 .
  • the filter 221 and the liquid flow meter 222 are disposed in the solution transport pipe 220 and are sequentially located between the liquid storage device 100 and the venturi pipe 210 . That is, the filter 221 is disposed closer to the liquid storage device 100 .
  • the filter 221 can filter impurities in the aerosol-generating solution output from the liquid storage device 100 to prevent the impurities from entering the venturi tube 210 and causing blockage.
  • the liquid flow meter 222 can monitor the flow of the aerosol generating solution in the solution transport pipe 220 .
  • the chemical delivery system 10 further includes an aerosol delivery device 700 .
  • the aerosol delivery device 700 is used for connecting the second port 219 of the venturi tube 210 and the wall of the chemical reagent delivery tube 300 , and the aerosol delivery device 700 is connected to the chemical reagent delivery tube 300 .
  • the walls are connected vertically.
  • the aerosol delivery device 700 can make the aerosol enter the chemical reagent delivery tube 300 as uniformly as possible.
  • the aerosol delivery device 700 may further include a spray head 217 .
  • the spray head 217 is disposed at the second port 219 of the venturi 210 .
  • the diameter of the spray head 217 away from the second port 219 is the smallest, so the rate of the aerosol spray can be increased.
  • the cross-sectional area of the spray head 217 can vary from small to large. Therefore, when the aerosol enters the part of the spray head 217 with a larger cross-sectional area, the flow rate decreases and the pressure increases, which can cause the aerosol to disturb, thereby preventing the aerosol particles from agglomerating.
  • the aerosol delivery device 700 further includes a plurality of first communication ports 310 .
  • the plurality of first communication ports 310 are arranged at intervals in the chemical agent delivery pipe 300 along the extending direction of the chemical agent delivery pipe 300 .
  • the output end of the aerosol generating device 200 communicates with the plurality of first communication ports 310 . That is, along the extending direction of the chemical agent delivery pipe 300 , the chemical agent delivery pipe 300 is provided with a plurality of first communication ports 310 at intervals.
  • the output end of the aerosol generating device 200 communicates with the plurality of first communication ports 310 .
  • the plurality of first communication ports 310 may be uniformly distributed along the axis of the chemical reagent delivery pipe 300 .
  • the aerosol output from the output end of the aerosol generating device 200 may enter the chemical reagent delivery pipe 300 from the different first communication ports 310 respectively.
  • the aerosol can be uniformly diffused into a larger space in the chemical agent delivery tube 300 . Therefore, static electricity at different positions in the chemical reagent delivery tube 300 can be adsorbed and eliminated by the aerosol, thereby further reducing the charged ions in the chemical reagent delivery tube 300 .
  • the aerosol delivery device 700 further includes a dispersion tube 400 .
  • the dispersing pipe 400 is provided with an adapter port 410 .
  • the adapter port 410 communicates with the output end of the aerosol generating device 200 .
  • the dispersion pipe 400 is provided with a plurality of second communication ports 420 at intervals.
  • the plurality of first communication ports 310 and the second communication ports 420 communicate in one-to-one correspondence.
  • the transfer port 410 is disposed between any two adjacent second communication ports 420 . It can be understood that, similar to the arrangement of the first communication port 310 , the second communication port 420 may also be uniformly arranged in the axial direction of the dispersion pipe 400 .
  • the second communication ports 420 may be arranged at equal intervals in the axial direction of the dispersion pipe 400 .
  • the first connection port and the second connection port may communicate with each other through a flexible pipe or a hard pipe.
  • the aerosol output from the output end of the aerosol generating device 200 can fill the dispersion pipe 400, and then enter the plurality of first communication ports 310 through the plurality of second communication ports 420 respectively.
  • the diameter of the dispersing pipe 400 may be larger than the diameter of the chemical reagent delivery pipe 300, so that the aerosol can be sufficiently diffused in the dispersing pipe 400, so that the second communication port 420
  • the amount of the aerosol entering the first communication port 310 is as uniform as possible.
  • the distribution of the aerosol in the chemical delivery tube 300 is also more uniform.
  • the number of the second communication ports 420 on both sides of the adapter port 410 is the same. That is, the transfer port 410 is disposed in the middle of the plurality of second communication ports 420 . In one embodiment, the adapter port 410 is further disposed in the middle of the chemical reagent delivery tube 300 . Therefore, the diffusion rate of the aerosol output from the adapter port 410 to both ends of the dispersion tube 400 is relatively uniform. The amount of the aerosol entering the plurality of second communication ports 420 also tends to be the same.
  • the dispersion pipe 400 is disposed between the output end of the aerosol generating device 200 and the chemical agent delivery pipe 300 .
  • the dispersion pipe 400 is arranged in parallel with respect to the chemical reagent delivery pipe 300 .
  • the plurality of first communication ports 310 and the plurality of second communication ports 420 are in direct communication with each other.
  • the dispersion pipe 400 and the chemical reagent delivery pipe 300 are arranged on the same plane.
  • the aerosol output from the adapter port 410 can enter the chemical reagent delivery pipe 300 through the dispersion pipe 400 .
  • the dispersing pipe 400 and the chemical reagent delivery pipe 300 are arranged in parallel, so that the first communication port 310 and the second communication port 420 are directly opposite, reducing the communication between the first communication port 310 and the second communication port Length of tubing between ports 420.
  • the length of the pipeline distance between the plurality of first communication ports 310 and the plurality of second communication ports 420 is the same.
  • the rate of the aerosol entering the plurality of second communication ports 420 is more uniform.
  • the diameter of the dispersing pipe 400 gradually increases. It can be understood that the flow rate of the aerosol is related to the diameter of the dispersion pipe 400 .
  • the diameter of the dispersion pipe 400 corresponding to the transfer port 410 is the smallest, the flow velocity of the aerosol at this position becomes larger, and the pressure becomes smaller.
  • the diameter of the dispersing pipe 400 gradually increases from the transfer port 410 to both ends, so the flow rate of the aerosol to the two ends of the dispersing pipe 400 will gradually slow down, but the pressure of the aerosol will gradually increase .
  • the higher the pressure of the aerosol the higher the rate of spraying to the first communication port 310 .
  • the aerosol will be generated when the second communication port 420 near the adapter port 410 sprays the aerosol into the first communication port 310 . larger diversion.
  • the concentration of the aerosol has become smaller.
  • the aerosol distribution in the chemical reagent delivery tube 300 can be made as uniform as possible.
  • the distance before the second communication port 420 gradually increases. That is, the density of the second communication ports 420 close to the adapter port 410 is higher, while the density of the second communication ports 420 away from the adapter port 410 is lower. It can be understood that the density of the aerosol near the transfer port 410 is higher and the flow rate is higher. Therefore, the aerosol is not easily ejected from the second connection port near the dispersion pipe 400 . Therefore, by increasing the density of the second connection port, the amount of the aerosol sprayed can be increased.
  • the flow rate of the aerosol in the dispersion pipe 400 decreases, and the amount of the aerosol output by each of the second communication ports 420 will be larger.
  • the distribution density of the second communication port 420 close to the adapter port 410 is set to be larger, and the distribution density of the second communication port 420 away from the adapter port 410 is set smaller, which can make the spray.
  • the aerosol entering different positions in the chemical reagent delivery tube 300 is more uniform.
  • the aerosol delivery device 700 further includes a plurality of dispersing branch pipes 430 .
  • the plurality of dispersing branch pipes 430 are respectively connected between the first communication ports 310 and the second communication ports 420 in one-to-one correspondence. That is, one dispersing branch pipe 430 may be connected between the correspondingly disposed first communication port 310 and the second communication port 420 .
  • the dispersing branch pipe 430 may be vertically disposed relative to the dispersing pipe 400 and the chemical reagent delivery pipe 300 .
  • the dispersing branch pipe 430 may be made of anti-corrosion materials such as polyester.
  • the lengths between the plurality of dispersing branch pipes 430 may be the same.
  • the aerosol can be delivered to the different first communication ports 310 through the dispersing branch pipe 430 .
  • At least one of the dispersing branch pipes 430 extends into the chemical agent delivery pipe 300 through the first communication port 310 and is spaced from the inner wall of the chemical agent delivery pipe 300 set up. It can be understood that charged ions are easily attached to the inner wall of the chemical reagent delivery tube 300 .
  • the aerosol is easy to float in the chemical reagent delivery tube 300 due to its low density. Therefore, the aerosol easily adsorbs the charged ions on the top of the inner wall of the chemical agent delivery tube 300 . But the isopropanol solution will flow at the bottom of the chemical reagent delivery pipe 300 . Therefore, it is more difficult for the aerosol to contact the charged ions at the bottom of the chemical delivery tube 300 .
  • At least one of the dispersing branch pipes 430 penetrates deep into the chemical reagent conveying pipe 300 , that is, the outlet of the dispersing branch pipe 430 can extend to the bottom of the chemical reagent conveying pipe 300 .
  • the aerosol output from the dispersing branch pipe 430 can be directly sprayed to the bottom of the chemical agent delivery pipe 300 , so that the charged ions at the bottom of the chemical agent delivery pipe 300 can be adsorbed.
  • the outlet of the dispersing branch pipe 430 is spaced apart from the inner wall of the chemical reagent delivery pipe 300 , which can leave space for the aerosol output to avoid affecting the ejection of the aerosol from the outlet of the dispersing branch pipe 430 .
  • a plurality of the dispersing branch pipes 430 alternately extend into the chemical agent delivery pipe 300 along the extending direction of the chemical agent delivery pipe 430 .
  • a vacuum pump 500 is provided on the side of the chemical reagent delivery pipe 300 away from the output end of the aerosol generating device 200 . It can be understood that after the aerosol adsorbs the charged ions, the large aerosol particles that are gradually fused will collide with each other. Under the action of gravity, the large particle aerosol will fall into the isopropanol solution and flow out with the isopropanol solution. When the isopropanol solution is a used waste solution, the particulate aerosol will be discharged into the waste liquid pool together with the isopropanol solution. And some of the aerosols that are not fused will still float in the chemical reagent delivery tube 300 .
  • the aerosol can be absorbed by the vacuum pump 500, so the effect of the aerosol on the isopropanol solution can be minimized Influence, improve the purity of the isopropanol solution.
  • the chemical delivery system 10 further includes a control device 800 .
  • the control device 800 is electrically connected to the aerosol generating device 200 .
  • the control device 800 is configured to control the aerosol generating device 200 to convert the aerosol generating solution from a liquid state to an aerosol state when the chemical solution is flowing in the chemical reagent delivery pipe 300 . That is, the aerosol generating device 200 can have two states of pause and open. It can be understood that the isopropanol waste liquid is not always generated during the production process. That is, the isopropanol waste liquid of the chemical reagent delivery pipe 300 can be generated periodically.
  • the aerosol generating device 200 can be turned on, and the chemical agent delivery pipe 300 can be filled with the aerosol. It can be understood that the time when the aerosol generating device 200 is turned on can be preset, as long as it is synchronized with the time when the waste isopropanol is discharged into the chemical reagent delivery pipe 300 . In one embodiment, whether there is the isopropanol waste liquid in the chemical reagent delivery pipe 300 may be sensed by a sensing device. When sensing the presence of the isopropanol waste liquid, the control device 800 controls the aerosol generating device 200 to turn on. The control device 800 controls the aerosol generating device 200 to work periodically. It can be understood that when the aerosol generating device 200 works once, the aerosol can be sprayed into the chemical reagent delivery pipe 300 once. Under the requirement of removing static electricity, the amount of aerosol and electricity can be saved. .
  • the embodiment of the present application also provides a method for eliminating static electricity in a chemical delivery pipeline.
  • the method includes:
  • the aerosol enters the chemical reagent delivery pipe 300 and diffuses, and absorbs and eliminates the charged ions in the chemical reagent delivery pipe 300, so as to prevent electrostatic ions from encountering flammable and explosive isopropanol gas and causing a fire Or explode.
  • the S20 includes:
  • the aerosol generating device 200 periodically generates the aerosol, that is, the aerosol generating device 200 can suspend and work periodically, and spray the aerosol to the chemical reagent delivery pipe 300 once at a certain interval, and then Under the requirement of removing static electricity, the amount of aerosol can be saved and the production cost can be reduced. It can be understood that the working cycle of the aerosol generating device 200 may be synchronized with the cycle of discharging the isopropanol waste liquid into the chemical reagent delivery pipe 300 .
  • the pressure of the aerosol sprayed by the aerosol generating device 200 is controlled according to the flow rate of the chemical agent in the chemical agent delivery pipe 300.
  • the flow of the chemical reagent in the chemical reagent delivery pipe 300 usually carries the flow of the aerosol.
  • the aerosol may be discharged out of the chemical reagent delivery tube 300 along with the chemical reagent before the aerosol can eliminate static electricity. If the pressure to generate the aerosol is not high enough, the aerosol will be discharged before it touches the bottom of the chemical agent delivery pipe 300 . At this time, it is necessary to increase the spray intensity of the aerosol generating device 200 so that the aerosol contacts the bottom of the chemical agent delivery pipe 300 as soon as possible. Conversely, when the flow rate of the chemical reagent is relatively slow, the pressure of the aerosol generating device 200 to generate the aerosol can be reduced.

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Abstract

本申请涉及一种化学品输送系统和消除化学品输送管路静电的方法，包括化学试剂输送管、储液装置和气溶胶发生装置。所述储液装置用于储存气溶胶产生溶液。所述气溶胶发生装置的输入端和输出端分别与所述储液装置和所述化学试剂输送管连通。所述储液装置中的气溶胶产生溶液进入所述气溶胶发生装置。所述气溶胶发生装置将所述气溶胶产生溶液由液态转换为气溶胶的状态。所述气溶胶进入所述化学试剂输送管内扩散，并吸附消除所述化学试剂输送管中的带电荷的离子，从而可以避免静电离子遇到易燃易爆的化学试剂发生火灾或者爆炸。

Description

化学品输送系统和消除化学品输送管路静电的方法
本申请要求于2020年9月3日提交中国专利局，申请号为2020109157297，申请名称为“化学品输送系统和消除化学品输送管路静电的方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及半导体设备技术领域，特别是涉及化学品输送系统和消除化学品输送管路静电的方法。
背景技术
在半导体器件的制造过程中，晶圆是必不可少的基础元件。为了提高生产效率，在晶圆清洗后通常需要对晶圆进行快速烘干。高浓度异丙醇因其高挥发性，能够在晶圆清洗后提高晶圆的烘干效率。
但是，高浓度异丙醇具有较强的腐蚀性，用不锈钢管传输高浓度异丙醇容易对不锈钢管造成腐蚀，增加管路泄漏风险。因此大部分厂家会选择有超强抗拉、抗温度的聚偏氟乙烯(PVDF)材质的化学试剂输送管路输送高浓度异丙醇溶液。但聚偏氟乙烯材质属高阻介质，因此致使化学试剂输送管路内积聚的静电无法及时消散，而高浓度异丙醇挥发会在化学试剂输送管内形成可燃性气体，其浓度高达5000ppm。在化学试剂输送管路内，静电遇到高浓度异丙醇可能会造成火灾或者爆炸等危险。
发明内容
基于此，有必要针对在化学试剂输送管路内，静电遇到高浓度异丙醇可能会造成火灾或者爆炸等危险的问题，提供一种化学品输送系统和消除化学品输送管路静电的方法。
一种化学品输送系统，包括：
化学试剂输送管；
储液装置，用于储存气溶胶产生溶液；以及
气溶胶发生装置，分别与所述储液装置和所述化学试剂输送管管壁连通，用于将所述气溶胶产生溶液由液态转换为气溶胶的状态，并将所述气溶胶输送至所述化学试剂输送管内，以消除所述化学试剂输送管中的静电。
在一个实施例中，所述气溶胶发生装置包括：
文丘里管，所述文丘里管具有第一端口和第二端口、位于所述第一端口和所述第二端口之间的变径部以及与所述变径部连接的进液口，所述第一端口设置有气体接口，所述第二端口与所述化学试剂输送管连通，所述进液口与所述储液装置连通，所述气溶胶产生溶液经由所述进液口进入所述变径部，其中，从所述第一端口和所述第二端口到所述变径部，所述文丘里管的直径逐级减小。
在一个实施例中，还包括压力控制装置，所述压力控制装置与所述文丘里管的所述气体接口连接，用于控制进入所述气体接口的气体的压力。
在一个实施例中，所述气溶胶发生装置包括溶液运输管，所述储液装置包括液体处理装置，所述液体处理装置设置于所述溶液运输管，并位于所述储液装置和所述文丘里管之间。
在一个实施例中，还包括气溶胶输送装置，所述气溶胶输送装置用于连接所述文丘里管的所述第二端口与所述化学试剂输送管管壁，所述气溶胶输送装置与所述化学试剂输送管管壁垂直连接。
在一个实施例中，所述气溶胶输送装置还包括多个第一连通口，所述多个第一连通口沿着所述化学试剂输送管的延伸方向在所述化学试剂输送管间隔设置，所述气溶胶发生装置的输出端与所述多个第一连通口连通。
在一个实施例中，还包括控制装置，与所述气溶胶发生装置电连接，用于在所述化学试剂输送管中流动所述化学试剂时控制所述气溶胶发生装置将所述气溶胶产生溶液由液态转换为气溶胶的状态。
本申请实施例还提供一种消除化学品输送管路静电的方法，包括：
提供气溶胶发生装置；
控制所述气溶胶发生装置向化学试剂输送管输送气溶胶，以消除所述化学试剂输送管中的静电。
在一个实施例中，所述控制所述气溶胶发生装置向化学试剂输送管输送气溶胶，以消除所述化学试剂输送管中的静电包括：
控制所述气溶胶发生装置周期性产生所述气溶胶；
将所述气溶胶输送至所述化学试剂输送管，以消除所述化学试剂输送管中的静电。
在一个实施例中，根据所述化学试剂输送管中化学试剂的流速控制所述气溶胶发生装置喷射所述气溶胶的压强。
本申请实施例提供的化学品输送系统和消除化学品输送管路静电的方法，包括化学试剂输送管、储液装置和气溶胶发生装置。所述储液装置用于储存气溶胶产生溶液。所述气溶胶发生装置的输入端和输出端分别与所述储液装置和所述化学试剂输送管连通。所述储液装置中的气溶胶产生溶液进入所述气溶胶发生装置。所述气溶胶发生装置将所述气溶胶产生溶液由液态转换为气溶胶的状态。所述气溶胶进入所述化学试剂输送管内扩散，并吸附消除所述化学试剂输送管中的带电荷的离子，从而可以避免静电离子遇到易燃易爆的化学试剂发生火灾或者爆炸。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请一个实施例提供的化学品输送系统结构示意图；
图2为本申请另一个实施例提供的化学品输送系统结构示意图；
图3为本申请又一个实施例提供的化学品输送系统结构示意图。
附图标记说明：
化学品输送系统10、储液装置100、气溶胶发生装置200、文丘里管210、气体接口211、变径部212、喷头217、溶液运输管220、开关阀213、压力控制装置214、压力表215、气体流量计216、第一端口218、第二端口219、进液口223，过滤器221、液体流量计222、静电消除管路系统20、化学试剂输送管300、第一连通口310、分散管400、转接口410、第二连通口420、分散支管430、真空泵500。液体处理装置600、气溶胶输送装置700、控制装置800。
具体实施方式
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本申请内涵的情况下做类似改进，因此本申请不受下面公开的具体实施例的限制。
在本申请的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本申请中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
在本申请中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的，并不表示是唯一的实施方式。
参阅图1，本申请实施例提供一种化学品输送系统10。所述化学品输送系统10包括化学试剂输送管300、储液装置100和气溶胶发生装置200。所述气溶胶发生装置200分别与所述储液装置100和所述化学试剂输送管300连通。所述储液装置100用于储存气溶胶产生溶液。所述气溶胶发生装置200用于将所述气溶胶产生溶液由液态转换为气溶胶的 状态，并将所述气溶胶输送至所述化学试剂输送管300内，以消除所述化学试剂输送管300中的静电。
所述储液装置100可以为压力容器。所述储液装置100可以采用聚酯材料或者金属材料，只要所述储液装置100不易被所述气溶胶产生溶液腐蚀即可。气溶胶发生装置200可以将所述气溶胶产生溶液雾化生成所述气溶胶。所述储液装置100可以通过动力装置将所述气溶胶输送到所述气溶胶发生装置200。所述气溶胶装置也可以产生负压将所述气溶胶产生溶液吸收到所述气溶胶发生装置200。所述气溶胶发生装置200可以利用流体力学原理，通过所述气溶胶产生溶液的流速和压力变化将液态的所述气溶胶产生溶液气化为气溶胶的状态。所述气溶胶可以从所述气溶胶发生装置200的输出端喷射进入到所述化学试剂输送管300内。由于所述气溶胶在所述化学试剂输送管300内可以不断扩散，因此可以与所述化学试剂输送管300内的带电荷的离子结合，并可以随着所述化学试剂溶液流出所述化学试剂输送管300。可以理解，当所述化学品输送系统10应用于半导体生产线时，所述化学试剂可以为异丙醇溶液。
本申请实施例提供的所述化学品输送系统10包括化学试剂输送管300、储液装置100和气溶胶发生装置200。所述储液装置100用于储存气溶胶产生溶液。所述气溶胶发生装置200的输入端和输出端分别与所述储液装置100和所述化学试剂输送管300连通。所述储液装置100中的气溶胶产生溶液进入所述气溶胶发生装置200。所述气溶胶发生装置200将所述气溶胶产生溶液由液态转换为气溶胶的状态。所述气溶胶进入所述化学试剂输送管300内扩散，并吸附消除所述化学试剂输送管300中的带电荷的离子，从而可以避免静电离子遇到易燃易爆的异丙醇气体发生火灾或者爆炸。
在一个实施例中，所述气溶胶发生装置包括文丘里管210。所述文丘里管210具有第一端口218和第二端口219、位于所述第一端口218和所述第二端口219之间的变径部212以及与所述变径部212连接的进液口223。所述第一端口218设置有气体接口211。所述第二端口219与所述化学试剂输送管300连通。所述进液口223与所述储液装置100连通。所述气溶胶产生溶液经由所述进液口223进入所述变径部212。其中，从所述第一端口218和所述第二端口219到所述变径部212，所述文丘里管210的直径逐级减小。
所述文丘里管210可以为陶瓷、玻璃或者聚酯材料。所述气体接口211可以安装VCR接头。通过所述气体接口211可以通过所述第一端口218和所述第二端口219向所述文丘里管210通入惰性气体。在一个实施例中，可以通过所述气体接口211向所述述文丘里管210通入氮气。所述变径部212可以位于所述文丘里管210的中部，即位于所述第一端口 218和所述第二端口219之间。可以理解，在所述变径部212的两端，所述文丘里管210的直径可以相同。即所述第一端口218和所述第二端口219的直径可以相同。从所述文丘里管210的所述第一端口218到所述第二端口219，所述文丘里管210的直径可以逐渐变小，然后再逐渐变大。即在所述变径部212，所述文丘里管210的直径最小。可以理解，从所述变径部212的两端到所述变径部212的中部，所述文丘里管210的直径也逐渐减小。所述文丘里管210的直径逐级减小，可以是所述文丘里管210的横截面积以相同的变化率减小，也可以是按照不同的变化率阶梯变小。
所述储液装置100中可以容纳气溶胶产生溶液。在一个实施例中，所述气溶胶产生溶液可以为无机盐溶液。在一个实施例中，所述气溶胶产生溶液可以为氯化钠溶液。所述氯化钠溶液的溶度范围可以为5％到10％。通过调控所述氯化钠溶液的溶度可以调控气溶胶粒径的大小。所述进液口223可以设置在所述变径部212直径最小部分的侧壁。所述变径部212通过所述进液口与223所述储液装置100连通。
在一个实施例中，所述化学品输送系统还包括溶液运输管220。所述溶液运输管220的两端分别与所述溶液运输管220和所述文丘里管210连通。所述溶液运输管220的一端可以通过所述进液口233与所述文丘里管210连通。所述溶液运输管220与所述文丘里管210的连接处可以为所述文丘里管210的直径最小的位置，即所述溶液运输管220可以在所述变径部212与所述文丘里管210连通。
可以理解，当通过所述气体接口211可以向所述文丘里管210中通入气体。所述气体在经过所述变径部212时，由于所述文丘里管210的直径变小，所述气体的流速变大，在所述变径部212的压强随之减小。因此，所述溶液运输管220中的压强大于所述变径部212处的压强。即相比于所述溶液运输管220，所述变径部212处形成负压。在负压作用下，所述储液装置100中的所述气溶胶产生溶液被吸入到所述文丘里管210。当所述变径部212的压力达到一定值后，所述气溶胶产生溶液可以以气溶胶的状态从所述文丘里管210的所述第二端口219喷出。所述气溶胶可以通过所述第二端口219喷入到所述化学试剂输送管300中，并吸附消除所述化学试剂输送管300中的带电荷的离子，从而可以避免静电离子遇到浓度较高的异丙醇溶液气体发生火灾或者爆炸。
在一个实施例中，所述化学品输送系统10还包括压力控制装置214。所述压力控制装置214与所述文丘里管210的所述气体接口211连接。用于控制进入所述气体接口211的气体的压力。在一个实施例中，所述压力控制装置214可以为调压阀214。
在一个实施例中，所述化学品输送系统10还包括开关阀213、压力表215和气体流 量计216。所述开关阀213、压力控制装置214、所述压力表215和所述气体流量计216设置于所述文丘里管210。所述开关阀213、调压阀214、压力表215和气体流量计216依次位于所述气体接口211和所述变径部212之间。即在朝向所述变径部212的方向，所述开关阀213、所述压力控制装置214、所述压力表215和所述气体流量计216依次排布于所述气体接口211和所述变径部212之间。
通过所述开关阀213可以控制气体进入所述文丘里管210。所述压力控制装置214可以调节所述气体射入所述文丘里管210的压力。可以适时调整所述压力控制装置214，使得所述文丘里管210远离所述气体接口211的一端喷出所述气溶胶。所述压力表215可以显示所述文丘里管210中的压力数值。所述气体流量计216可以反应所述文丘里管210中所述气体的流量。
在一个实施例中，所述储液装置100包括液体处理装置600。所述液体处理装置600设置于所述溶液运输管220，并位于所述储液装置100和所述文丘里管210之间。所述液体处理装置600可以起到对所述储液装置100中输出的所述气溶胶产生溶液流速、流量、温度、压力等参数的监测和控制。所述液体处理装置600还可以控制所述储液装置100中是否输出所述气溶胶产生溶液。在一个实施例中，所述液体处理装置600还可以对所述储液装置100中的所述气溶胶产生溶液起到过滤的作用。
在一个实施例中，所述液体处理装置600包括过滤器221和液体流量计222。所述过滤器221和所述液体流量计222设置于所述溶液运输管220，并依次位于所述储液装置100和所述文丘里管210之间。即所述过滤器221更靠近所述储液装置100设置。所述过滤器221可以将所述储液装置100输出的所述气溶胶产生溶液中的杂质过滤，避免所述杂质进入所述文丘里管210造成阻塞。所述液体流量计222可以监测所述溶液运输管220中所述气溶胶产生溶液的流量。
在一个实施例中，所述化学品输送系统10还包括气溶胶输送装置700。所述气溶胶输送装置700用于连接所述文丘里管210的所述第二端口219与所述化学试剂输送管300管壁，所述气溶胶输送装置700与所述化学试剂输送管300管壁垂直连接。所述气溶胶输送装置700可以使所述气溶胶尽可能均匀进入所述化学试剂输送管300内。
在一个实施例中，所述气溶胶输送装置700还可以包括喷头217。所述喷头217设置于所述文丘里管210的所述第二端口219。所述喷头217远离所述第二端口219的直径最小，因此可以提高所述气溶胶喷射的速率。在一个实施例中，由所述喷头217靠近所述文丘里管210的一端到所述喷头217远离所述文丘里管210的一端，所述喷头217的横截面 积可以由小到大在到小，因此，当所述气溶胶进入到横截面积较大的所述喷头217的部分时，流速减小压力增大，可以引起所述气溶胶扰动，进而避免所述气溶胶颗粒聚集。
请参见图2，在一个实施例中，所述气溶胶输送装置700还包括多个第一连通口310。所述多个第一连通口310沿着所述化学试剂输送管300的延伸方向在所述化学试剂输送管300间隔设置。所述气溶胶发生装置200的输出端与所述多个第一连通口310连通。即沿着所述化学试剂输送管300的延伸方向，所述化学试剂输送管300间隔设置有多个第一连通口310。所述气溶胶发生装置200的输出端与所述多个第一连通口310连通。所述多个第一连通口310可以沿着所述化学试剂输送管300的轴线均匀分布。可以理解，从所述气溶胶发生装置200的输出端输出的所述气溶胶可以分别从不同的所述第一连通口310进入到所述化学试剂输送管300中。所述气溶胶可以在所述化学试剂输送管300中均匀扩散到更大的空间。因此，在所述化学试剂输送管300中不同的位置的静电，均可以被所述气溶胶吸附和消除，从而进一步减少所述化学试剂输送管300中的带电荷离子。
在一个实施例中，所述气溶胶输送装置700还包括分散管400。所述分散管400设置有转接口410。所述转接口410与所述气溶胶发生装置200的输出端连通。沿着所述分散管400的延伸方向，所述分散管400间隔设置有多个第二连通口420。所述多个第一连通口310和所述第二连通口420一一对应连通。所述转接口410设置于任意相邻的两个所述第二连通口420之间。可以理解，与所述第一连通口310的设置方式类似，所述第二连通口420也可以在所述分散管400的轴线方向均匀设置。即所述第二连通口420可以在所述分散管400的轴线方向等间隔设置。所述第一连接口和所述第二连接口之间可以通过软接管或者硬接管连通。所述气溶胶发生装置200的输出端输出的气溶胶可以将所述分散管400充满，然后再分别通过所述多个第二连通口420进入所述多个第一连通口310。
在一个实施例中，所述分散管400的直径可以大于所述化学试剂输送管300的直径，因此可以便于所述气溶胶在所述分散管400中充分扩散，使得由所述第二连通口420进入所述第一连通口310的所述气溶胶量尽量均匀。所述气溶胶在所述化学试剂输送管300中的分配也更为均匀。
在一个实施例中，在所述化学试剂输送管300的延伸方向，所述转接口410两侧的所述第二连通口420的个数相同。即所述转接口410设置在所述多个第二连通口420的中间。在一个实施例中，所述转接口410还设置在所述化学试剂输送管300的中间。因此，从所述转接口410输出的所述气溶胶向所述分散管400两端扩散的速率较为均匀。所述气溶胶进入所述多个第二连通口420的量也趋于相同。
在一个实施例中，所述分散管400设置于所述气溶胶发生装置200的输出端和所述化学试剂输送管300之间。所述分散管400相对于所述化学试剂输送管300平行设置。所述多个第一连通口310和所述多个第二连通口420一一正对连通。所述分散管400与所述化学试剂输送管300设置于同一个平面。从所述转接口410输出的所述气溶胶可以通过所述分散管400进入所述化学试剂输送管300。所述分散管400和所述化学试剂输送管300平行设置，可以使得所述第一连通口310和所述第二连通口420正对，减少所述第一连通口310和所述第二连通口420之间的管道长度。所述多个第一连通口310和所述多个第二连通口420之间的管路距离长度相同。所述气溶胶进入所述多个第二连通口420的速率更为均匀。
在一个实施例中，由所述转接口410到所述分散管400的两侧，所述分散管400的直径逐级变大。可以理解，所述气溶胶的流速与所述分散管400的直径有关。当所述气溶胶流到所述转接口410时，所述转接口410对应的所述分散管400的直径最小，所述气溶胶在该位置的流速变大，压强变小。所述分散管400由所述转接口410向两端的直径逐级变大，因此所述气溶胶向所述分散管400两端的流速会逐渐变慢，但是所述气溶胶的压强会逐渐增大。
可以理解，在所述第二连通口420，所述气溶胶的压强越大，向所述第一连通口310喷射的速率也就越大。由于所述气溶胶进入所述化学试剂输送管300后，靠近所述转接口410的所述第二连通口420向所述第一连通口310喷射所述气溶胶时会对所述气溶胶产生较大的分流。当所述气溶胶在所述分散管400内流动到远离所述转接口410的位置时，所述气溶胶的浓度已经变小。但是由于所述分散管400的直径变大，所述气溶胶的流速变小，压强变大，因此从所述第二连通口420喷出的所述气溶胶流速相对增大，在相同时间内从远离所述转接口410的所述第二连通口420喷出的所述气溶胶的量相对于靠近所述转接口410的所述第二连通口420喷出的所述气溶胶的量趋于一致，因此可以尽量使得所述化学试剂输送管300中的气溶胶分布均匀。
在一个实施例中，由所述转接口410到所述分散管400的两侧，所述第二连通口420之前的间距逐渐变大。即靠近所述转接口410的所述第二连通口420密度较大，而远离所述转接口410的所述第二连通口420的密度较小。可以理解，靠近所述转接口410的所述气溶胶密度较大，流速也较快。因此，所述气溶胶并不容易从靠近所述分散管400的所述第二连接口喷出。因此通过提高所述第二连接口设置的密度可以提高所述气溶胶喷出的量。在远离所述转接口410的位置，所述分散管400中的所述气溶胶流速降低，每个所述 第二连通口420输出的所述气溶胶的量会较大。将靠近所述转接口410的所述第二连通口420的分布密度设置的较大，而将远离所述转接口410的所述第二连通口420的分布密度设置的较小，可以使得喷入所述化学试剂输送管300中不同位置的所述气溶胶更为均匀。
在一个实施例中，所述气溶胶输送装置700还包括多个分散支管430。所述多个分散支管430分别连接于一一对应的所述第一连通口310和所述第二连通口420之间。即对应设置的所述第一连通口310和所述第二连通口420之间可以连接一个所述分散支管430。所述分散支管430可以相对于所述分散管400和所述化学试剂输送管300垂直设置。所述分散支管430可以为聚酯等防腐蚀材料制成。所述多个分散支管430之间的长度可以相同。通过所述分散支管430可以将所述气溶胶输送到不同的所述第一连通口310中。
请参见图3，在一个实施例中，至少一个所述分散支管430通过所述第一连通口310伸入到所述化学试剂输送管300内，并与所述化学试剂输送管300的内壁间隔设置。可以理解，所述化学试剂输送管300的内壁容易附着带电荷离子。所述气溶胶由于密度较小，容易在所述化学试剂输送管300中上浮。因此所述气溶胶容易将所述化学试剂输送管300内壁顶部的所述带电荷离子吸附。但是所述异丙醇溶液会在所述化学试剂输送管300的底部流动。因此，所述气溶胶较难在所述化学试剂输送管300的底部与所述带电荷离子接触。至少一个所述分散支管430通入深入到所述化学试剂输送管300内，即所述分散支管430的出口可以伸到所述化学试剂输送管300的底部。从所述分散支管430输出的所述气溶胶可以直接喷射到所述化学试剂输送管300的底部，从而可以对所述化学试剂输送管300的底部的所述带电荷离子进行吸附。所述分散支管430的出口与所述化学试剂输送管300的内壁间隔设置，可以给所述气溶胶输出留有空间，避免影响所述气溶胶从所述分散支管430的出口射出。在一个实施例中，多个所述分散支管430沿着所述化学试剂输送管430的延伸方向交替伸入到所述化学试剂输送管300中。
在一个实施例中，沿着所述异丙醇溶液流动方向，所述化学试剂输送管300远离所述气溶胶发生装置200的输出端的一侧设置有真空泵500。可以理解，当所述气溶胶吸附所述带电荷离子后，相互之间会相互碰撞逐渐融合的气溶胶大颗粒。在重力作用下，所述大颗粒气溶胶会落到所述异丙醇溶液中并随着所述异丙醇溶液流出。当所述异丙醇溶液为使用过的废弃溶液时，所述颗粒气溶胶会随着所述异丙醇溶液一起排出到废液池中。而有些没有融合的所述气溶胶，会仍然漂浮在所述化学试剂输送管300中。如果所述化学试剂输送管300输送的是未使用的所述异丙醇溶液，可以通过所述真空泵500将所述气溶胶吸收，因此可以尽量减少所述气溶胶对所述异丙醇溶液的影响，提高所述异丙醇溶液的纯度。
在一个实施例中，所述化学品输送系统10还包括控制装置800。所述控制装置800与所述气溶胶发生装置200电连接。所述控制装置800用于在所述化学试剂输送管300内流动所述化学溶液时控制所述气溶胶发生装置200将所述气溶胶产生溶液由液态转换为气溶胶的状态。即所述气溶胶发生装置200可以在可以具有暂停和开启两种状态。可以理解，生产过程中异丙醇废液并非一直产生。即所述化学试剂输送管300的异丙醇废液可以周期性产生。因此当所述化学试剂输送管300中流动有异丙醇废液时，可以开启所述气溶胶发生装置200，为所述化学试剂输送管300充入所述气溶胶。可以理解，所述气溶胶发生装置200开启的时间可以预先设置，只要与向所述化学试剂输送管300中排放所述异丙醇废液的时间同步即可。在一个实施例中，可以通过感应装置感应所述化学试剂输送管300中是否有所述异丙醇废液。当感应到有所述异丙醇废液时，所述控制装置800控制所述气溶胶发生装置200开启。所述控制装置800控制所述气溶胶发生装置200周期性工作。可以理解，当所述气溶胶发生装置200每工作一次，即可向所述化学试剂输送管300中喷射一次气溶胶，在满足去除静电的要求下，可以节省气溶胶用量，同时可以节省用电。
本申请实施例还提供一种消除化学品输送管路静电的方法。所述方法包括：
S10,提供气溶胶发生装置200；
S20,控制所述气溶胶发生装置200向化学试剂输送管300输送气溶胶，以消除所述化学试剂输送管300中的静电。
所述气溶胶进入所述化学试剂输送管300内扩散，并吸附消除所述化学试剂输送管300中的带电荷的离子，从而可以避免静电离子遇到易燃易爆的异丙醇气体发生火灾或者爆炸。
在一个实施例中，所述S20包括：
S21，控制所述气溶胶发生装置200周期性产生所述气溶胶；
S22，将所述气溶胶输送至所述化学试剂输送管300，以消除所述化学试剂输送管300中的静电。
所述气溶胶发生装置200周期性产生所述气溶胶，即所述气溶胶发生装置200可以周期性暂停和工作，每间隔一定时间向所述化学试剂输送管300喷射一次所述气溶胶，在在满足去除静电的要求下，可以节省气溶胶用量，降低生产成本。可以理解，所述气溶胶发生装置200工作的周期可以与向所述化学试剂输送管300中排放所述异丙醇废液的周期同步。
在一个实施例中，根据所述化学试剂输送管300中化学试剂的流速控制所述气溶胶发 生装置200喷射所述气溶胶的压强。
可以理解，所述化学试剂输送管300中化学试剂流动通常会带着所述气溶胶流动。当所述化学试剂的流速过快时，所述气溶胶可能还没起到消除静电的作用就随着所述化学试剂被排出所述化学试剂输送管300。如果产生所述气溶胶的压强不够高，还没接触到所述化学试剂输送管300的底部就会被排出。此时需要提高所述气溶胶发生装置200的喷射强度使所述气溶胶尽快接触所述化学试剂输送管300的底部。反之，当所述化学试剂的流速较慢时，可以降低所述气溶胶发生装置200产生所述气溶胶的压强。
实验数据证明，当未向所述化学试剂输送管300中通入所述气溶胶时，所述化学试剂输送管300内的静电电压值为1.3KV到4.7KV。向所述化学试剂输送管300中注入所述气溶胶后，所述化学试剂输送管300中的静电电压值降至-1.0KV以下，可有效将静电电压至控制在安全范围值以内。另外当所述异丙醇废液浓度超过20％时，管路材质必须为导静电材质或采取静电防护措施。而所述导静电材质或采取其它静电防护措施成本较高。使用所述静电消除管路系统20可以有效降低成本，提高安全性能。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。

Claims (15)

  1. 一种化学品输送系统，包括：
    化学试剂输送管；
    储液装置，用于储存气溶胶产生溶液；以及
    气溶胶发生装置，分别与所述储液装置和所述化学试剂输送管管壁连通，用于将所述气溶胶产生溶液由液态转换为气溶胶的状态，并将所述气溶胶输送至所述化学试剂输送管内，以消除所述化学试剂输送管中的静电。
  2. 如权利要求1所述的化学品输送系统，其中，所述气溶胶发生装置包括：
    文丘里管，所述文丘里管具有第一端口和第二端口、位于所述第一端口和所述第二端口之间的变径部以及与所述变径部连接的进液口，所述第一端口设置有气体接口，所述第二端口与所述化学试剂输送管连通，所述进液口与所述储液装置连通，所述气溶胶产生溶液经由所述进液口进入所述变径部，其中，从所述第一端口和所述第二端口到所述变径部，所述文丘里管的直径逐级减小。
  3. 如权利要求2所述的化学品输送系统，还包括压力控制装置，所述压力控制装置与所述文丘里管的所述气体接口连接，用于控制进入所述气体接口的气体的压力。
  4. 如权利要求2所述的化学品供应系统，其中，所述气溶胶发生装置包括溶液运输管，所述储液装置包括液体处理装置，所述液体处理装置设置于所述溶液运输管，并位于所述储液装置和所述文丘里管之间。
  5. 如权利要求2所述的化学品供应系统，还包括气溶胶输送装置，所述气溶胶输送装置用于连接所述文丘里管的所述第二端口与所述化学试剂输送管管壁，所述气溶胶输送装置与所述化学试剂输送管管壁垂直连接。
  6. 如权利要求5所述的化学品输送系统，其中，所述气溶胶输送装置还包括多个第一连通口，所述多个第一连通口沿着所述化学试剂输送管的延伸方向在所述化学试剂输送管间隔设置，所述气溶胶发生装置的输出端与所述多个第一连通口连通。
  7. 如权利要求1所述的化学品输送系统，还包括控制装置，与所述气溶胶发生装置电连接，用于在所述化学试剂输送管中流动所述化学试剂时控制所述气溶胶发生装置将所述气溶胶产生溶液由液态转换为气溶胶的状态。
  8. 如权利要求2所述的化学品输送系统，其中，所述文丘里管由陶瓷、玻璃或者聚酯材料制成。
  9. 如权利要求2所述的化学品输送系统，其中，在所述气体接口处安装VCR接头； 通过所述气体接口经由所述第一端口和所述第二端口向所述文丘里管通入惰性气体。
  10. 如权利要求1所述的化学品输送系统，其中，所述气溶胶产生溶液为无机盐溶液。
  11. 如权利要求3所述的化学品供应系统，其中，所述压力控制装置为调压阀。
  12. 如权利要求3所述的化学品输送系统，还包括开关阀、压力表和气体流量计；所述开关阀、压力控制装置、所述压力表和所述气体流量计设置于所述文丘里管；所述开关阀、所述调压阀、所述压力表和所述气体流量计依次位于所述气体接口和所述变径部之间。
  13. 一种消除化学品输送管路静电的方法，，包括：
    提供气溶胶发生装置；
    控制所述气溶胶发生装置向化学试剂输送管输送气溶胶，以消除所述化学试剂输送管中的静电。
  14. 如权利要求13所述的消除化学品输送管路静电的方法，其中，所述控制所述气溶胶发生装置向化学试剂输送管输送气溶胶，以消除所述化学试剂输送管中的静电，包括：
    控制所述气溶胶发生装置周期性产生所述气溶胶；
    将所述气溶胶输送至所述化学试剂输送管，以消除所述化学试剂输送管中的静电。
  15. 如权利要求14所述的消除化学品输送管路静电的方法，还包括：
    根据所述化学试剂输送管中化学试剂的流速控制所述气溶胶发生装置喷射所述气溶胶的压强。
PCT/CN2021/102295 2020-09-03 2021-06-25 化学品输送系统和消除化学品输送管路静电的方法 Ceased WO2022048259A1 (zh)

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