WO2022018848A1 - 距離計測装置、距離計測方法、及び工作装置 - Google Patents

距離計測装置、距離計測方法、及び工作装置 Download PDF

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Publication number
WO2022018848A1
WO2022018848A1 PCT/JP2020/028411 JP2020028411W WO2022018848A1 WO 2022018848 A1 WO2022018848 A1 WO 2022018848A1 JP 2020028411 W JP2020028411 W JP 2020028411W WO 2022018848 A1 WO2022018848 A1 WO 2022018848A1
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Prior art keywords
distance
light
frequency
unit
electric signal
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Ceased
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PCT/JP2020/028411
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English (en)
French (fr)
Japanese (ja)
Inventor
伸夫 大畠
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2022538547A priority Critical patent/JP7146146B2/ja
Priority to CN202080104884.9A priority patent/CN116113803B/zh
Priority to PCT/JP2020/028411 priority patent/WO2022018848A1/ja
Priority to KR1020237001033A priority patent/KR102535920B1/ko
Priority to TW109137068A priority patent/TW202204852A/zh
Publication of WO2022018848A1 publication Critical patent/WO2022018848A1/ja
Priority to US17/985,972 priority patent/US12605800B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4917—Receivers superposing optical signals in a photodetector, e.g. optical heterodyne detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G06F17/18—Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis

Definitions

  • This disclosure relates to a distance measuring device, a distance measuring method, and a working device.
  • Patent Document 1 describes a frequency sweep light source that outputs light whose frequency changes periodically in a machine tool provided with a machined portion for processing the machined surface by supplying cutting oil to the machined surface of the workpiece.
  • the light output from is branched into an irradiation light irradiating the work piece and a reference light, and the irradiation light is applied to the work piece and is referred to as a reflected light which is the irradiation light reflected on the work piece.
  • Interference with light A technique for detecting the peak frequency of light and measuring the distance from the machine tool to the machined surface based on the peak frequency is disclosed.
  • Patent Document 1 The conventional technique described in Patent Document 1 (hereinafter, simply referred to as "conventional technique") processes a workpiece when cutting oil having a known refractive index is present on the reflective surface of the object to be measured.
  • the first interference is based on the first interference light, which is the interference light between the reflected light from the surface and the reference light
  • the second interference light which is the interference light between the reflected light from the cutting oil and the reference light.
  • the distance from the machine tool to the machined surface is measured by acquiring the peak frequency of the light and the peak frequency of the second interference light.
  • the reflected light reflected by a substance such as cutting oil existing on the reflecting surface of the object to be measured is scattered, so that the intensity of the reflected light cannot be sufficiently obtained, and a predetermined standard is used.
  • a predetermined standard is used.
  • Scattering of reflected light may occur when the reflecting surface of the object to be measured is not uniform with respect to the optical axis direction of the irradiation light. It may not be possible to measure the distance accurately.
  • the present disclosure is for solving the above-mentioned problems, and is predetermined even when the intensity of the reflected light cannot be sufficiently obtained due to the scattering of the reflected light reflected by the object to be measured. It is an object of the present invention to provide a distance measuring device capable of accurately measuring the distance from a reference point to an object to be measured.
  • the distance measuring device of the present disclosure branches the sweep light whose frequency changes periodically into the reference light and the irradiation light irradiating the object to be measured, and irradiates the object to be measured with the irradiation light for reference.
  • An electric signal based on the interference light is acquired from an optical sensor device that generates interference light by interfering the light with the reflected light that is the irradiation light reflected by the object to be measured and generates an electric signal based on the generated interference light.
  • a frequency calculation unit that calculates the peak frequency of the electric signal based on the signal acquisition unit and the electric signal based on the interference light acquired by the signal acquisition unit, and the peak frequency calculated by the frequency calculation unit. It is equipped with a distance measurement unit that measures the distance from a predetermined reference point to the object to be measured, and a distance output unit that outputs distance information indicating the distance measured by the distance measurement unit. be.
  • the distance from a predetermined reference point to the object to be measured even when the intensity of the reflected light is not sufficiently obtained due to the scattering of the reflected light reflected by the object to be measured. Can be measured accurately.
  • FIG. 1 is a block diagram showing an example of a configuration of a main part of a machine tool to which the distance measuring device according to the first embodiment is applied.
  • FIG. 2 is a block diagram showing an example of a configuration of a main part of an optical sensor device included in the work device according to the first embodiment.
  • FIG. 3 is a block diagram showing an example of the configuration of a main part of the processing apparatus included in the working apparatus according to the first embodiment.
  • FIG. 4 is a block diagram showing an example of the configuration of a main part of the distance measuring device according to the first embodiment.
  • FIG. 5A is an example of the power spectrum of an electrical signal estimated using a general Fourier transform.
  • FIG. 5A is an example of the power spectrum of an electrical signal estimated using a general Fourier transform.
  • FIG. 5B is an example of a power spectrum estimated by using the Lasso regression with the ⁇ of the equation (1) as a threshold value for the same electric signal as in FIG. 5A.
  • FIG. 5C is an example of a power spectrum estimated by applying the equation (1) to the same electric signal as in FIG. 5A and using Lasso regression with ⁇ as an appropriate value among the values smaller than the threshold value.
  • FIG. 6 is an explanatory diagram showing an example of reflected light when cutting oil is present on the machined surface of an object.
  • FIG. 7 is an explanatory diagram showing an example of reflected light when the processed surface of the object is not uniform with respect to the optical axis direction of the irradiation light.
  • FIG. 8A is an example of a power spectrum estimated by using a general Fourier transform for an electric signal based on the reflected light reflected by the machined surface of the object shown in FIG. 7.
  • FIG. 8B is an example of a power spectrum estimated by applying the equation (1) to the same electric signal as in FIG. 8A and using Lasso regression with ⁇ as an appropriate value among the values smaller than the threshold value.
  • 9A and 9B are block diagrams showing an example of the hardware configuration of the distance measuring device according to the first embodiment.
  • FIG. 10 is a flowchart showing an example of processing of the distance measuring device according to the first embodiment.
  • FIG. 11 is a block diagram showing an example of the configuration of the main part of the distance measuring device according to the second embodiment.
  • FIG. 12 is an explanatory diagram showing an example of the vector ⁇ H obtained by the frequency calculation unit according to the second embodiment.
  • FIG. 13 is a flowchart showing an example of processing of the distance measuring device according to the second embodiment.
  • FIG. 1 is a block diagram showing an example of the configuration of a main part of the work apparatus 1 to which the distance measuring apparatus 100 according to the first embodiment is applied.
  • the machine tool 1 includes an optical sensor device 20, a processing device 40, and a distance measuring device 100.
  • FIG. 2 is a block diagram showing an example of the configuration of a main part of the optical sensor device 20 included in the work device 1 according to the first embodiment.
  • the optical sensor device 20 includes a sweep light output unit 21, a branch unit 22, an irradiation optical system 23, an interference unit 24, a photoelectric conversion unit 25, and an A / D conversion unit 26.
  • the sweep light output unit 21 outputs sweep light, which is light whose frequency changes periodically.
  • the rate and period of change in the frequency of the sweep light output by the sweep light output unit 21 are predetermined.
  • the sweep light output unit 21 is composed of a laser light source (not shown), a diffraction grating, and a sweep control unit. Since the method of generating and outputting the sweep light whose frequency changes periodically is a well-known technique, the description thereof will be omitted.
  • the branching unit 22 branches the sweeping light output by the sweeping light output unit 21 into a reference light and an irradiation light.
  • the irradiation light is light for irradiating the object 4 to be measured (hereinafter, simply referred to as "object 4").
  • the branch portion 22 is configured by an optical fiber coupler, a beam splitter, or the like.
  • the irradiation optical system 23 is an optical system for guiding the irradiation light branched by the branched portion 22 to the object 4. Further, the irradiation optical system 23 guides a reflected wave (hereinafter referred to as “reflected light”), which is the irradiation light reflected by the object 4, to the interference unit 24.
  • the irradiation optical system 23 is composed of one or more transmissive lenses, reflective lenses, and the like.
  • the interference unit 24 causes the reflected light and the reference light to interfere with each other to generate interference light.
  • the interference unit 24 is configured by a half mirror or the like.
  • the photoelectric conversion unit 25 receives the interference light generated by the interference unit 24 and converts the interference light into an analog electric signal.
  • the photoelectric conversion unit 25 is composed of a photodiode or the like.
  • the A / D conversion unit 26 converts the analog electric signal output by the photoelectric conversion unit 25 into a digital electric signal.
  • the A / D conversion unit 26 is composed of an A / D converter and the like.
  • the optical sensor device 20 outputs the converted digital electric signal converted by the A / D conversion unit 26.
  • the distance measuring device 100 receives an electric signal which is a digital electric signal output by the optical sensor device 20, measures the distance from a predetermined reference point to the object 4, and outputs the measured distance as distance information. The details of the distance measuring device 100 will be described later.
  • FIG. 3 is a block diagram showing an example of the configuration of a main part of the processing apparatus 40 included in the working apparatus 1 according to the first embodiment.
  • the processing device 40 includes a table 41, a head main body portion 42, a table drive unit 43, a head drive unit 44, a cutting oil supply unit 45, and a shape calculation unit 46.
  • the table 41 holds the object 4 on the head body 42 side.
  • the head main body 42 holds a machining tool 47 for cutting an object 4 or the like on the table 41 side.
  • the head main body 42 holds an optical sensor unit 48 that irradiates the object 4 with the irradiation light emitted by the optical sensor device 20 and receives the reflected light that is the irradiation light reflected by the object 4.
  • the head main body 42 houses the irradiation optical system 23 included in the optical sensor device 20.
  • the cutting oil supply unit 45 supplies cutting oil to the machined surface of the object 4.
  • the cutting oil supply unit 45 is held by the head main body unit 42.
  • the table driving unit 43 moves the table 41 in a direction parallel to or orthogonal to the optical axis of the irradiation light.
  • the table drive unit 43 is composed of an electric motor or the like.
  • the head drive unit 44 moves the head body unit 42 in a direction parallel to or orthogonal to the optical axis of the irradiation light.
  • the head drive unit 44 is composed of an electric motor or the like.
  • the cutting oil supply unit 45, the machining tool 47, and the optical sensor unit 48 move in conjunction with the head main body unit 42.
  • the shape calculation unit 46 acquires the distance information output by the distance measuring device 100, and calculates the shape of the object 4 based on the acquired distance information. Specifically, the shape calculation unit 46 controls the table drive unit 43 or the head drive unit 44 to change the irradiation position of the irradiation light on the machined surface of the object 4, so that the distance information for each irradiation position is distanced. Obtained from the measuring device 100, the shape of the object 4 is calculated. Further, the shape calculation unit 46 controls the table drive unit 43 or the head drive unit 44 based on the calculated shape of the object 4 and the processing information prepared in advance, and puts the processing tool 47 on the processing surface of the object 4.
  • the machined surface of the object 4 is controlled to be machined into the shape indicated by the machining information.
  • the shape calculation unit 46 controls the cutting oil supply unit 45 when the machining tool 47 cuts the machined surface of the object 4, and causes the cutting oil supply unit 45 to supply the cutting oil to the machined surface of the object 4.
  • FIG. 4 is a block diagram showing an example of the configuration of the main part of the distance measuring device 100 according to the first embodiment.
  • the distance measuring device 100 includes a signal acquisition unit 110, a frequency calculation unit 120, a distance measuring unit 130, and a distance output unit 140.
  • the signal acquisition unit 110 acquires an electric signal based on the interference light, which is an electric signal output by the optical sensor device 20, from the optical sensor device 20.
  • the electric signal acquired by the signal acquisition unit 110 is a digital electric signal.
  • the distance measuring device 100 may include an A / D conversion unit 26 included in the optical sensor device 20.
  • the optical sensor device 20 outputs an analog electric signal as an electric signal based on the interference light
  • the signal acquisition unit 110 outputs the interference light output by the optical sensor device 20.
  • the electric signal based on is acquired as an analog electric signal.
  • the distance measuring device 100 converts the analog electric signal acquired by the signal acquisition unit 110 into a digital electric signal by the A / D conversion unit 26 included in the distance measuring device 100.
  • the frequency calculation unit 120 calculates the peak frequency of the electric signal based on the electric signal based on the interference light acquired by the signal acquisition unit 110 by using Lasso (Least Absolute Shrinkage and Selection Operator) regression. The details of the frequency calculation unit 120 will be described later.
  • Lasso Least Absolute Shrinkage and Selection Operator
  • the distance measuring unit 130 measures the distance from the predetermined reference point to the object 4 based on the peak frequency calculated by the frequency calculating unit 120.
  • the predetermined reference point is a surface of the head main body 42 provided in the machining apparatus 40 facing the table 41, or an end portion of the machining tool 47 held by the head main body 42 on the table 41 side. Since the method of calculating the distance using the peak frequency by the sweep light is a well-known technique, the description thereof will be omitted.
  • the distance output unit 140 outputs distance information indicating the distance measured by the distance measurement unit 130.
  • the frequency calculation unit 120 calculates the peak frequency of the electric signal based on the electric signal based on the interference light acquired by the signal acquisition unit 110 by using Lasso regression.
  • Lasso regression is a method for estimating a power spectrum by sparse modeling proposed in Document 1 shown below.
  • Reference 1 "Robert Tibshirani”, “Journal of the Royal Statistical Society: Series B (Statistical Methodology)", 1996, Volume 58, Issue 1.
  • the Lasso regression is expressed by the following equation (1).
  • y is time-series data, for example, a digital electric signal is replaced with time-series data.
  • F is a determinant for performing a Fourier transform
  • the vector ⁇ is represented by the following equation (2).
  • ⁇ Fy ⁇ ⁇ ⁇ Equation (2) That is, the vector ⁇ indicates the power spectrum of y, which is time series data.
  • ⁇ is a threshold value.
  • the Lasso regression shown in the equation (1) that is, the method for estimating the power spectrum by sparse modeling proposed in Document 1, is a power spectrum in which the frequency component other than the frequency having the highest intensity is set to 0 by using the threshold value ⁇ . Estimate a vector ⁇ lasso.
  • the frequency calculation unit 120 adjusts the threshold value of the penalty term of the Lasso regression so as to calculate the peak frequency of the electric signal based on the interference light by a predetermined number by using the Lasso regression. For example, the frequency calculation unit 120 calculates a predetermined number of peak frequencies in order from the frequency having the highest intensity among the plurality of frequency components calculated by using the Lasso regression.
  • FIG. 5A is an example of the power spectrum of an electrical signal estimated using a general Fourier transform.
  • FIG. 5B is an example of a power spectrum estimated by using the Lasso regression with the ⁇ of the equation (1) as a threshold value for the same electric signal as in FIG. 5A.
  • FIG. 5C is an example of a power spectrum estimated by applying the equation (1) to the same electric signal as in FIG. 5A and using Lasso regression with ⁇ as an appropriate value among the values smaller than the threshold value.
  • the frequency calculation unit 120 estimates the power spectrum shown in FIG. 5C by adjusting ⁇ to an appropriate value among the values smaller than the threshold value, and among the frequency components of the estimated power spectrum, two signals S1 having a high intensity. And the frequency of the signal S2 is calculated as a peak frequency.
  • the distance measuring unit 130 measures the distance from the predetermined reference point to the object 4 based on the two peak frequencies calculated by the frequency calculating unit 120.
  • FIG. 6 is an explanatory diagram showing an example of reflected light when cutting oil is present on the machined surface of the object 4.
  • the irradiation light emitted toward the object 4 is partially reflected by the oil surface of the cutting oil.
  • the rest of the irradiation light passes through the cutting oil and is reflected on the machined surface of the object 4. Since the first reflected light, which is the irradiation light reflected by the oil surface of the cutting oil, is scattered, only a part of the first reflected light goes to the irradiation optical system 23 shown in FIG.
  • the intensity of the electric signal caused by the first reflected light is the electric signal caused by the second reflected light which is the irradiation light reflected by the processed surface of the object 4. It is smaller than the strength of. Therefore, the electric signal caused by the first reflected light included in the electric signal acquired by the distance measuring device 100 may be mixed with white noise.
  • the power spectrum estimated by using a general Fourier transform for the electric signal acquired by the distance measuring device 100 is in the state as shown in FIG. 5A. It may end up. If cutting oil is present on the machined surface of the object 4, the power spectrum may be as shown in FIG. 5A. Therefore, the distance measuring unit 130 performs cutting existing on the machined surface of the object 4 from a predetermined reference point. It is not possible to measure the distance of oil to the oil level. Since the cutting oil has a refractive index different from that of air or vacuum, as a result, the distance measuring unit 130 cannot accurately measure the distance from the predetermined reference point to the machined surface of the object 4.
  • the distance measuring unit 130 can measure the distance from the predetermined reference point to the oil level of the cutting oil existing on the machined surface of the object 4, and as a result, the distance measuring unit 130 is predetermined. The distance from the reference point to the machined surface of the object 4 can be accurately measured.
  • the distance measuring device 100 is predetermined even when the intensity of the reflected light cannot be sufficiently obtained due to the scattering of the reflected light reflected by the object 4 to be measured.
  • the distance from the reference point to the object 4 to be measured can be accurately measured.
  • FIG. 7 is an explanatory diagram showing an example of reflected light when the processed surface of the object 4 is not uniform with respect to the optical axis direction of the irradiation light.
  • the irradiation light emitted toward the object 4 is reflected by each of the surfaces A, B, and C, which are the processed surfaces of the object 4. Since the surface A or the surface B is uniform with respect to the optical axis direction of the irradiation light, the reflected light reflected by the surface A or the surface B is directed to the irradiation optical system 23 shown in FIG.
  • the reflected light reflected by the surface C is scattered and only a part of the reflected light is applied to the irradiation optical system 23 shown in FIG. Head.
  • FIG. 8A is an example of a power spectrum estimated by using a general Fourier transform for an electric signal based on the reflected light reflected by the machined surface of the object 4 shown in FIG. 7.
  • FIG. 8B is an example of a power spectrum estimated by applying the equation (1) to the same electric signal as in FIG. 8A and using Lasso regression with ⁇ as an appropriate value among the values smaller than the threshold value.
  • the intensity of the electric signal caused by the reflected light reflected on the surface C is the electricity caused by the reflected light reflected on the surface A or the surface B. It is small compared to the signal strength. Therefore, as shown in FIG.
  • the signal S3 corresponding to the electric signal caused by the reflected light reflected by the surface C included in the electric signal acquired by the distance measuring device 100 is white noise or the processed surface of the object 4.
  • the frequency component or the like caused by the reflected light reflected on the surface other than the surface C is confused.
  • the distance measuring unit 130 can measure the distance from the predetermined reference point to the surfaces A, B, and C which are the processed surfaces of the object 4, and as a result, the distance measuring unit 130 is predetermined. The distance from the reference point to the machined surface of the object 4 can be accurately measured.
  • the distance measuring device 100 scatters the reflected light reflected by the object 4 to be measured, such as when the processed surface of the object 4 is not uniform with respect to the optical axis direction of the irradiation light. As a result, even when the intensity of the reflected light is not sufficiently obtained, the distance from the predetermined reference point to the object 4 to be measured can be accurately measured.
  • FIGS. 9A and 9B are block diagrams showing an example of the hardware configuration of the distance measuring device 100 according to the first embodiment.
  • the distance measuring device 100 is composed of a computer, and the computer has a processor 901 and a memory 902.
  • the memory 902 stores a program for causing the computer to function as a signal acquisition unit 110, a frequency calculation unit 120, a distance measurement unit 130, and a distance output unit 140.
  • the processor 901 reads out and executes the program stored in the memory 902, the functions of the signal acquisition unit 110, the frequency calculation unit 120, the distance measurement unit 130, and the distance output unit 140 are realized.
  • the distance measuring device 100 may be configured by the processing circuit 903.
  • the functions of the signal acquisition unit 110, the frequency calculation unit 120, the distance measurement unit 130, and the distance output unit 140 may be realized by the processing circuit 903.
  • the distance measuring device 100 may be composed of a processor 901, a memory 902, and a processing circuit 903 (not shown).
  • some of the functions of the signal acquisition unit 110, the frequency calculation unit 120, the distance measurement unit 130, and the distance output unit 140 are realized by the processor 901 and the memory 902, and the remaining functions are the processing circuit 903. It may be realized by.
  • the processor 901 uses, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), a microprocessor, a microprocessor, or a DSP (Digital Signal Processor).
  • a CPU Central Processing Unit
  • GPU Graphics Processing Unit
  • microprocessor a microprocessor
  • DSP Digital Signal Processor
  • the memory 902 uses, for example, a semiconductor memory or a magnetic disk. More specifically, the memory 902 includes a RAM (Random Access Memory), a ROM (Read Only Memory), a flash memory, an EPROM (Erasable Programmable Read Only Memory), and an EEPROM (Electrically Memory). It uses State Drive) or HDD (Hard Disk Drive).
  • RAM Random Access Memory
  • ROM Read Only Memory
  • flash memory an EPROM (Erasable Programmable Read Only Memory)
  • EEPROM Electrically Memory
  • It uses State Drive) or HDD (Hard Disk Drive).
  • the processing circuit 903 may be, for example, an ASIC (Application Specific Integrated Circuit), a PLD (Programmable Logic Device), an FPGA (Field-Programmable Gate Array), or a System-Logic (Sy) system. Is used.
  • ASIC Application Specific Integrated Circuit
  • PLD Programmable Logic Device
  • FPGA Field-Programmable Gate Array
  • Sy System-Logic
  • FIG. 10 is a flowchart showing an example of processing of the distance measuring device 100 according to the first embodiment.
  • the distance measuring device 100 repeatedly executes, for example, the processing of the flowchart.
  • step ST1001 the signal acquisition unit 110 acquires an electric signal based on the interference light from the optical sensor device 20.
  • step ST1002 the frequency calculation unit 120 calculates the peak frequency of the electric signal based on the interference light by using the Lasso regression.
  • step ST1003 the distance measuring unit 130 measures the distance from the predetermined reference point to the object 4.
  • step ST1004 the distance output unit 140 outputs the distance information.
  • step ST1004 the distance measuring device 100 ends the processing of the flowchart. After finishing the processing of the flowchart, the distance measuring device 100 returns to step ST1001 and repeatedly executes the processing of the flowchart.
  • the distance measuring device 100 divides the sweep light whose frequency changes periodically into the reference light and the irradiation light irradiating the object 4 to be measured, and emits the irradiation light.
  • the reference light and the reflected light reflected by the object 4 to be measured interfere with each other to generate interference light, and an electric signal is generated based on the generated interference light.
  • the peak frequency of the electric signal is determined by using LASTO regression.
  • the frequency calculation unit 120 the distance measurement unit 130 that measures the distance from the predetermined reference point to the object 4 to be measured based on the peak frequency calculated by the frequency calculation unit 120, and the distance measurement unit 130.
  • the distance output unit 140 which outputs the distance information indicating the measured distance, is provided.
  • the frequency calculation unit 120 uses Lasso regression to determine the peak frequency of the electric signal based on the interference light in advance. It was configured to adjust the threshold of the penalties for the Lasso regression so that only the number was calculated. With this configuration, the distance measuring device 100 is based on the reflected light even when the reflected light reflected by the object 4 to be measured is scattered and the intensity of the reflected light is not sufficiently obtained. The peak frequency of the electric signal can be calculated. As a result, the distance measuring device 100 can accurately measure the distance from the predetermined reference point to the object 4 to be measured.
  • the frequency calculation unit 120 uses Lasso regression to determine the peak frequency of the electric signal based on the interference light in advance. Only the number is calculated, and among the plurality of frequency components calculated by using the Lasso regression, a predetermined number of peak frequencies are calculated in order from the frequency having the highest intensity.
  • the distance measuring device 100 is based on the reflected light even when the reflected light reflected by the object 4 to be measured is scattered and the intensity of the reflected light is not sufficiently obtained.
  • the peak frequency of the electric signal can be calculated.
  • the distance measuring device 100 can accurately measure the distance from the predetermined reference point to the object 4 to be measured.
  • the frequency calculation unit 120 uses LASSO regression to determine the peak frequency of the electric signal based on the interference light in advance. Only the number is calculated, and the distance measuring unit 130 measures the distance from the predetermined reference point to the object 4 to be measured based on the predetermined number of peak frequencies calculated by the frequency calculating unit 120. Configured. With this configuration, the distance measuring device 100 is based on the reflected light even when the reflected light reflected by the object 4 to be measured is scattered and the intensity of the reflected light is not sufficiently obtained. The peak frequency of the electric signal can be calculated. As a result, the distance measuring device 100 can accurately measure the distance from the predetermined reference point to the object 4 to be measured.
  • the machine tool 1 has the shape of the object 4 to be measured based on the distance measuring device 100 and the distance information output by the distance measuring device 100 in the above configuration.
  • a shape calculation unit 46 for calculation is provided. With this configuration, even if the distance measuring device 100 does not sufficiently obtain the intensity of the reflected light due to the scattering of the reflected light reflected by the object 4 to be measured, the working device 1 has a distance measuring device 100. Since the distance information indicating the accurate distance from the predetermined reference point to the object 4 to be measured is output, the shape of the object 4 to be measured can be accurately calculated.
  • Embodiment 2 The distance measuring device 100a according to the second embodiment will be described with reference to FIGS. 11 to 13. With reference to FIG. 11, the configuration of the main part of the distance measuring device 100a according to the second embodiment will be described.
  • FIG. 11 is a block diagram showing an example of the configuration of the main part of the distance measuring device 100a according to the second embodiment.
  • the distance measuring device 100a includes a signal acquisition unit 110, a frequency calculation unit 120a, a distance measuring unit 130, and a distance output unit 140.
  • the frequency calculation unit 120 included in the distance measuring device 100 according to the first embodiment is changed to the frequency calculation unit 120a.
  • the description of the same configuration as the distance measuring device 100 according to the first embodiment will be omitted. That is, in FIG. 11, the same blocks as those shown in FIG. 4 are designated by the same reference numerals and the description thereof will be omitted.
  • the distance measuring device 100a is applied to, for example, the working device 1 in the same manner as the distance measuring device 100 according to the first embodiment.
  • the frequency calculation unit 120 included in the distance measuring device 100 calculates the peak frequency of the electric signal based on the electric signal based on the interference light acquired by the signal acquisition unit 110 by using Lasso regression. It was a thing.
  • the frequency calculation unit 120a calculates the peak frequency of the electric signal based on the interference light by a predetermined number, and has a plurality of frequency components calculated by using LASSO regression and a Fourier transform. A predetermined number of the peak frequencies are calculated based on the plurality of frequency components calculated using the above.
  • the frequency calculation unit 120a uses each frequency component calculated by using LASSO regression and each frequency calculated by using the Fourier transform corresponding to each frequency component calculated by using LASSO regression. The product with the components is calculated for each frequency to obtain the vector ⁇ H.
  • the frequency calculation unit 120a obtains the vector ⁇ H by multiplying each frequency component of the power spectrum shown in FIG. 5A and each frequency component of the power spectrum shown in FIG. 5C by an amplitude value of the same frequency.
  • Each element of the vector ⁇ H obtained by the frequency calculation unit 120a corresponds to the frequency component of the electric signal based on the interference light.
  • the frequency calculation unit 120a selects a predetermined number of elements in order from the plurality of elements of the obtained vector ⁇ H in descending order of the element value, and calculates the peak frequency.
  • FIG. 12 is an explanatory diagram showing an example of the vector ⁇ H obtained by the frequency calculation unit 120a according to the second embodiment.
  • the horizontal axis of FIG. 12 is similar to the frequency of the power spectrum shown in FIG. 5A or FIG. 5C.
  • the amplitude value of the power spectrum shown in FIG. 5C in the signal S2 is close to the amplitude value of the other frequency, whereas the value of the element corresponding to the frequency of the signal S2 in the vector ⁇ H shown in FIG. 12 is other.
  • the difference with the value of the element at the frequency of is clearer.
  • the frequency calculation unit 120a can calculate the peak frequency based on the vector ⁇ H, which has a larger signal-to-noise ratio than the power spectrum shown in FIG. 5C.
  • the distance measuring device 100a can measure the distance from the predetermined reference point to the object 4 to be measured more accurately by comparing with the distance measuring device 100 according to the first embodiment.
  • each function of the signal acquisition unit 110, the frequency calculation unit 120a, the distance measurement unit 130, and the distance output unit 140 may be realized by the processor 901 and the memory 902, or may be realized by the processing circuit 903. It may be something that is done.
  • FIG. 13 is a flowchart showing an example of processing of the distance measuring device 100a according to the second embodiment.
  • the distance measuring device 100a repeatedly executes, for example, the processing of the flowchart.
  • step ST1301 the signal acquisition unit 110 acquires an electric signal based on the interference light from the optical sensor device 20.
  • step ST1302 the frequency calculation unit 120a obtains the vector ⁇ H based on the plurality of frequency components calculated by using the Lasso regression and the plurality of frequency components calculated by using the Fourier transform. ..
  • step ST1303 the frequency calculation unit 120a calculates the peak frequency of the electric signal based on the interference light based on the vector ⁇ H.
  • step ST1304 the distance measuring unit 130 measures the distance from the predetermined reference point to the object 4.
  • step ST1305, the distance output unit 140 outputs the distance information.
  • step ST1304 the distance measuring device 100a ends the processing of the flowchart. After finishing the processing of the flowchart, the distance measuring device 100a returns to step ST1301 and repeatedly executes the processing of the flowchart.
  • the distance measuring device 100a divides the sweep light whose frequency changes periodically into the reference light and the irradiation light irradiating the object 4 to be measured, and emits the irradiation light.
  • the object 4 to be measured is irradiated, and the reference light and the reflected light reflected by the object 4 to be measured interfere with each other to generate interference light, and an electric signal is generated based on the generated interference light.
  • the signal acquisition unit 110 that acquires an electric signal based on the interference light from the optical sensor device 20, and the electric signal based on the interference light acquired by the signal acquisition unit 110, the peak frequency of the electric signal is set by using LASTO regression.
  • the frequency calculation unit 120a calculated by the frequency calculation unit 120a, the distance measurement unit 130 that measures the distance from the predetermined reference point to the object 4 to be measured based on the peak frequency calculated by the frequency calculation unit 120a, and the distance measurement unit 130.
  • a distance output unit 140 that outputs distance information indicating the distance measured by the frequency calculation unit 120a is provided, and the frequency calculation unit 120a calculates the peak frequency of the electric signal based on the interference light by a predetermined number. It is configured to calculate a predetermined number of peak frequencies based on a plurality of frequency components calculated by using regression and a plurality of frequency components calculated by using Fourier transform.
  • the distance measuring device 100a is a predetermined reference even when the reflected light reflected by the object 4 to be measured is scattered and the intensity of the reflected light is not sufficiently obtained. The distance from the point to the object 4 to be measured can be accurately measured.
  • any combination of embodiments can be freely combined, any component of each embodiment can be modified, or any component can be omitted in each embodiment. ..
  • the distance measuring device of the present disclosure can be applied to a working device.

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