CN116113803B - 距离计测装置、距离计测方法以及工作装置 - Google Patents

距离计测装置、距离计测方法以及工作装置

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Publication number
CN116113803B
CN116113803B CN202080104884.9A CN202080104884A CN116113803B CN 116113803 B CN116113803 B CN 116113803B CN 202080104884 A CN202080104884 A CN 202080104884A CN 116113803 B CN116113803 B CN 116113803B
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CN
China
Prior art keywords
light
distance
frequency
distance measuring
unit
Prior art date
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Active
Application number
CN202080104884.9A
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English (en)
Chinese (zh)
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CN116113803A (zh
Inventor
大畠伸夫
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4917—Receivers superposing optical signals in a photodetector, e.g. optical heterodyne detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G06F17/18—Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Electromagnetism (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Pure & Applied Mathematics (AREA)
  • Algebra (AREA)
  • Evolutionary Biology (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Operations Research (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Probability & Statistics with Applications (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
CN202080104884.9A 2020-07-22 2020-07-22 距离计测装置、距离计测方法以及工作装置 Active CN116113803B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/028411 WO2022018848A1 (ja) 2020-07-22 2020-07-22 距離計測装置、距離計測方法、及び工作装置

Publications (2)

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CN116113803A CN116113803A (zh) 2023-05-12
CN116113803B true CN116113803B (zh) 2025-08-29

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Country Status (6)

Country Link
US (1) US12605800B2 (https=)
JP (1) JP7146146B2 (https=)
KR (1) KR102535920B1 (https=)
CN (1) CN116113803B (https=)
TW (1) TW202204852A (https=)
WO (1) WO2022018848A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2638921B (en) * 2022-11-17 2026-03-25 Mitsubishi Electric Corp Optical measuring device, acquisition method, acquisition program, and recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020070884A1 (ja) * 2018-10-05 2020-04-09 三菱電機株式会社 工作装置

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JP3725135B2 (ja) * 2003-04-21 2005-12-07 三菱電機株式会社 光波面測定装置、光波面測定方法、及び光源装置の調整方法
WO2010119561A1 (ja) * 2009-04-17 2010-10-21 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
JP2013096877A (ja) * 2011-11-01 2013-05-20 Canon Inc 計測装置
CN104048944A (zh) * 2014-03-14 2014-09-17 中国科学院力学研究所 差分干涉测量成像系统及方法
DE102014005181A1 (de) * 2014-04-03 2015-10-08 Astrium Gmbh Positions- und Lagebestimmung von Objekten
JP6301891B2 (ja) * 2015-09-29 2018-03-28 日本電信電話株式会社 学習装置、識別装置、その方法、およびプログラム
CN105675146B (zh) 2016-02-04 2018-07-17 北京理工大学 基于压缩感知的双波长三维温度场成像设备、系统及方法
WO2017187510A1 (ja) * 2016-04-26 2017-11-02 株式会社日立製作所 距離計測装置、距離計測方法、及び形状計測装置
WO2018048907A1 (en) * 2016-09-06 2018-03-15 Neosensory, Inc. C/O Tmc+260 Method and system for providing adjunct sensory information to a user
US9964396B1 (en) 2016-11-04 2018-05-08 Com Dev Ltd. Integrated fourier transform optical spectrometer
JP6983374B2 (ja) * 2016-11-21 2021-12-17 株式会社東京精密 測定装置及び測定方法
US11249190B2 (en) * 2017-06-20 2022-02-15 Mitsubishi Electric Corporation Laser radar device and method for controlling frequency modulation
CN112204428B (zh) * 2018-05-24 2024-03-22 三菱电机株式会社 光测距装置以及加工装置
DE112018007552B4 (de) * 2018-06-12 2022-03-10 Mitsubishi Electric Corporation Optische-Distanz-Messungseinrichtung und Bearbeitungseinrichtung
JP2020030065A (ja) 2018-08-21 2020-02-27 株式会社島津製作所 クロマトグラフ装置
JP6686201B2 (ja) * 2019-03-22 2020-04-22 株式会社東京精密 距離測定装置、および距離測定方法
CN110646805B (zh) * 2019-09-04 2023-01-24 宁波核芯光电科技有限公司 一种基于虚拟扫频光源的调频连续波激光测距系统
WO2021059327A1 (ja) * 2019-09-24 2021-04-01 日本電信電話株式会社 測距装置

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WO2020070884A1 (ja) * 2018-10-05 2020-04-09 三菱電機株式会社 工作装置

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Also Published As

Publication number Publication date
WO2022018848A1 (ja) 2022-01-27
JP7146146B2 (ja) 2022-10-03
KR20230013156A (ko) 2023-01-26
TW202204852A (zh) 2022-02-01
CN116113803A (zh) 2023-05-12
US12605800B2 (en) 2026-04-21
KR102535920B1 (ko) 2023-05-26
US20230076436A1 (en) 2023-03-09
JPWO2022018848A1 (https=) 2022-01-27

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